Abstract: Multilayered piezoelectric transformers, transformer elements and methods of constructing piezoelectric transformers are disclosed.

Abstract: A piezoelectric micro-machined ultrasonic transducer (PMUT) uses multiple electrodes, e.g., in a radial pattern for a disc, to improve performance. The multiple electrodes may be differentially driven to operate the PMUT in d31 mode (that is, with an applied electrical field perpendicular to the piezoelectrically-induced strain) where deflection relative to input voltage is increased and in-plane stresses are reduce, thus improving overall performance.

Abstract: There is provided a lead-free piezoelectric ceramic having a high and stable piezoelectric constant and a high and stable mechanical quality factor in a wide operating temperature range. A method for manufacturing the lead-free piezoelectric ceramic is also provided. the general formula (1) (Ba1-xCax)a(Ti1-y-zSnyZrz)O3 (0.08?x?0.20, 0.01?y?0.04, 0?z?0.04)??(1) A piezoelectric ceramic includes a main component containing a perovskite type metal oxide having the following general formula (1); and Mn as a first auxiliary component. The amount b (mol) of Mn per mole of the metal oxide is in the range of 0.0048?b?0.0400, and the value a of the general formula (1) or (2) is in the range of 0.9925+b?a?1.0025+b.

Abstract: A multi-layer electronic component that can be repetitively operated under high voltage, high temperature and high humidity is provided. The multi-layer electronic component comprises a plurality of dielectric material layers made of a sintered material having perovskite structure that includes Pb; and a plurality of internal electrodes, the dielectric material layers and the internal electrodes being stacked alternately one on another, wherein lead compound that remains in the crystal grain boundaries of the dielectric material layers is controlled so that the number of grains of the lead compound not smaller than 0.01 ?m are 2 or less per 100 ?m2 on average.

Abstract: A stackable piezoelectric actuator component (100) comprises a stack (10) of piezoelectric layers (11) and electrode layers (12) arranged therebetween, a voltage supply device (20) arranged outside the stack (10) and serving for making electrical contact with the electrode layers, a contact connection (30) for applying a voltage to the voltage supply device (20) and a further contact connection (40), which is electrically coupled to the voltage supply device (20). The contact connection (30) and the further contact connection (40) are designed complementarily with respect to one another in such a way that a further stackable piezoelectric actuator component (200), comprising at least a contact connection or a further contact connection (30, 40), can be electrically coupled to the actuator component (100).

Abstract: A third electrode is provided on a second electrode configuring a piezoelectric element by covering a region facing a pressure generation chamber.

Abstract: A vibration gyro-element includes a base portion, an excitation vibrating arm and a detection vibrating arm extending from the base portion, and a first adjustment vibrating arm and a second adjustment vibrating arm extending from the base portion and vibrating along with excitation vibration of the excitation vibrating arm, wherein an output signal of the first adjustment vibrating arm at least is out of phase with respect to an output signal of leakage vibration of the detection vibrating arm, and wherein an amplitude of the output signal of the first adjustment vibrating arm is larger than an amplitude of the output signal of the second adjustment vibrating arm.

Abstract: A navigable system for catheter based endovascular neurosurgery including: a micro-motor (3) including a piezoelectric actuator (5) mounted to a free end of a guidewire or micro-catheter (2), the piezoelectric actuator (5) including a piezoelectric element (7), and an elongate transducer (9) mounted on the piezoelectric element (7) and extending therefrom, the transducer (9) being formed from an asymmetric hollow member, and an end member (15) located at a free end of the transducer (9); wherein electrical excitation of the piezoelectric element (7) induces one or both orthogonal flexural and axial vibration modes within the transducer (9), the coupling of the induced vibration modes thereby resulting in rotation of the end member (15) with three degrees of freedom (DOF).

Abstract: A method for manufacturing a piezoelectric actuator is provided. The method includes: forming a diffusion-preventive layer having an electrical conductivity on a partial surface thereof on a surface of a vibration plate formed of a metallic material; forming a piezoelectric layer on the surfaces of the diffusion-preventive layer and the vibration plate; forming an electrode in an area of the piezoelectric layer which overlaps the partial surface of the diffusion-preventive layer having the electrical conductivity; forming an extraction electrode in an area of the piezoelectric layer which does not overlap the diffusion-preventive layer; and heating the piezoelectric layer and the vibration plate after the piezoelectric layer is formed so as to diffuse metallic atoms of the metallic material of which the vibration plate is formed to the piezoelectric layer, thereby making the extraction electrode be in conduction with the partial surface of the diffusion-preventive layer having the electrical conductivity.

Abstract: An ultrasonic probe and an ultrasonic diagnosis device which can improve electrical safety for an operator are provided. The ultrasonic probe 2 has an insulating portion 62 between a mounting board 43 and a case 25. Since electrical leakage from the internal device of the ultrasonic probe 2 can be prevented, electrical safety of the ultrasonic probe 2 for the operator can be improved. A conductive film 61 is provided on the ultrasonic wave radiation side of a cMUT chip 20, and a conductive member 63 is provided along the insulating member 62. A conductive film 61 and a conductive member 63 are connected by a conductive member 64. A closed space having a ground potential is formed by the conductive film 61, the conductive member 63 and a coaxial cable 55 connected to ground. Main components or the body circuits of the ultrasonic probe 2 are contained in the closed space having the ground potential and shielded electrically from the outside.

Abstract: A piezoelectric actuator includes a prismatic piezoelectric element body having side surfaces, and external surface electrodes provided on at least three of the side surfaces of the piezoelectric element body.

Abstract: A piezoelectric component, e.g., for use as an actuator of a fuel injection valve in a motor vehicle, may include a stack-shaped actuator body including a plurality of piezoelectric elements and inner electrode layers arranged in an alternating manner in a stacking direction, each inner electrode layer being connected alternately to one of two metalizations on an outer face of the stack in an electrically conductive manner. Each metalization is connected to an electrically conductive electrode structure via an electrically conductive contacting element (e.g., adhesive or solder). The stack-shaped actuator body has at least one predetermined breaking point, and the metalizations and/or the contacting elements have a recess in the region of the at least one predetermined breaking point.

Abstract: Mounting electrodes are formed in a state of being separated from excitation electrodes on one main surface of a base portion, and the excitation electrodes are formed on another main surface of a piezoelectric plate and includes base portion electrodes which are connected to the excitation electrodes and conducting portions which electrically connect the mounting electrodes and the base portion electrodes in a thickness direction of the piezoelectric plate.

Abstract: Disclosed is a method of fabricating a multiple degree of freedom actuator with inter-digitated electrodes including molding an electroactive polymer membrane so that a plurality of projections are formed around a cross section of an outer surface of the polymer membrane; depositing a metal electrode layer onto the outer surface of the molded membrane; and removing the plurality of projections on the outer surface on the molded membrane, thereby forming a multiple degree of freedom actuator with a plurality of inter-digitated electrodes. Also provided are actuators as well as devices (such as catheters) including such actuators formed by the disclosed methods of fabricating an actuator with multiple DOF.

Abstract: There are provided a piezoelectric vibrator capable of suppressing vibration leakage while securing mounting strength of a piezoelectric vibrating reed and an oscillator, an electronic apparatus, and a radio-controlled timepiece each using the piezoelectric vibrator. The piezoelectric vibrator includes: a package that accommodates a piezoelectric vibrating reed; and a bump that mounts the base portion of the piezoelectric vibrating reed on a package. The bump includes a plurality of main bumps which is arranged in a line in the width direction of the base portion so as to be bonded to the base portion; and an auxiliary bump which is bonded to the base portion in an area between the main bumps disposed at both ends in the width direction of the base portion and an area between the main bumps and base ends of the vibrating arms in the longitudinal direction of the base portion.

Abstract: There is provided a multilayer ceramic electronic component, including: a ceramic element including a plurality of dielectric layers laminated therein; a plurality of first and second internal electrodes formed on dielectric layers positioned in a middle portion of the ceramic element and alternately exposed from both ends of the ceramic element; a plurality of dummy electrodes formed on dielectric layers positioned in upper and lower portions of the ceramic element, respectively; and first and second external electrodes formed on both ends of the ceramic element and electrically connected to the exposed portions of the first and second internal electrodes, wherein the length of each of the dummy electrodes is longer than that of the first and second external electrodes covering the ceramic element.

Abstract: Provided are a piezoelectric vibrator, an oscillator, an electronic device, and a radio-controlled timepiece capable of preventing lowering of an electrical characteristic of a routing electrode during the frequency adjustment with respect to a piezoelectric vibrator whose frequency can be adjusted by irradiating a laser beam onto a weight metal film formed on a distal end of a vibrating arm portion. In a piezoelectric vibrator, a routing electrode is arranged in an offset manner toward one side with respect to a center line of a base substrate in the lateral width direction, and a piezoelectric vibrating piece is arranged in an offset manner toward a side opposite to the routing electrode with respect to the center line of the base substrate in the lateral direction.

Abstract: An energy harvesting and storage system includes an array of piezoelectric electrodes, in which the piezoelectric electrodes generate electrical energy from mechanical displacements of the piezoelectric electrodes; and an array of capacitor electrodes disposed in proximity to the piezoelectric electrodes, in which the array of capacitor electrodes stores a portion of the energy generated by the piezoelectric electrodes. An energy system includes a substrate including an array of micro-post electrodes connected to a cathode layer of the substrate; an isolation material covering the array of micro-post electrodes; and an anode layer including electrodes filling the remaining region between the isolation material-covered micro-post electrodes, in which the anode layer, electrodes, isolation material, micro-post electrodes, and substrate are monolithically coupled.

Abstract: There are provided a multi-layer piezoelectric element which suppresses damage or separation of an external electrode and improves durability, as well as an injection device and a fuel injection system using the multi-layer piezoelectric element. A multi-layer piezoelectric element includes a stacked body including stacked piezoelectric bodies and internal electrodes, a conductor layer disposed coveringly on a side surface of the stacked body so as to be elongated in a stacking direction of the stacked body to electrically connect with ends of the internal electrodes, which are extended to the side surface of the stacked body, and an external electrode disposed on the conductor layer, one end in the stacking direction of the external electrode being a feeding end, a bonded region of the external electrode which is bonded to the conductor layer in an area near the feeding end being covered with a resin.

Abstract: A stacked piezoelectric actuator has a laminate structure including piezoelectric layers and cover parts such that when an external electrode is applied with drive voltage, the piezoelectric layers become distorted and the entire stacked piezoelectric actuator deforms, and at that time, the cover parts become displaced, wherein the distortion difference occurring between the piezoelectric layers and the cover parts reduces, thereby inhibiting the development of cracks. Moreover, the surface area of the active region of the piezoelectric layers is the same as the surface area of the active region of the cover parts, and therefore the loss of the displacement transfer, which is produced by the piezoelectric layers, at the cover parts is reliably reduced.

Abstract: A piezoelectric resonator plate includes at least a pair of excitation electrodes and at least a pair of extraction electrodes. The pair of extraction electrodes are respectively extracted from the pair of excitation electrodes to electrically and mechanically bond the pair of excitation electrodes to an external electrode. The pair of extraction electrodes each include a distal end portion. The distal end portion includes a connecting electrode extracted to a vicinity of one end portion on one principal surface of the piezoelectric resonator plate. The connecting electrodes each include a top surface where a first metal film to be bonded to the external electrode is formed. The first metal film includes a top surface with two or more protruding portions. The first metal film has a larger surface roughness and a smaller area compared with the respective connecting electrodes. The protruding portions are formed with cross-sections in curvature shapes.

Abstract: A piezoelectric actuator unit includes a piezoelectric layer, a first electrode and a second electrode which are arranged to be sandwiching the piezoelectric layer, and which form an active portion of the piezoelectric layer by sandwiching the piezoelectric layer, a capacitor which is connected in series to the active portion, and a voltage applying mechanism which applies a first voltage to the capacitor, and a second voltage between the first electrode and the second electrode to cause a piezoelectric deformation in the active portion of the piezoelectric layer.

Abstract: A method for fabricating a piezoelectric device includes preparing a piezoelectric wafer, preparing a first wafer, bonding the piezoelectric wafer and the first wafer, preparing a first terminal mask for forming a pair of hot terminals on the bottom surface and a second terminal mask for forming the pair of hot terminals and a grounding terminal as a ground point, selecting an arrangement of the first terminal mask and an arrangement of the second terminal mask on a bottom surface of the first wafer after the wafer bonding, and forming a bottom surface with the power supply terminal and the output terminal through the first terminal mask, or a bottom surface with the power supply terminal, the output terminal, and the grounding terminal through the second terminal mask, after selecting the arrangement.

Abstract: A piezoelectric device includes a piezoelectric vibrating piece, a base plate, which has a connecting electrode on one principal surface and a mounting terminal on another principal surface, in a rectangular shape, and a lid plate. The another principal surface of the base plate includes a pair of sides that face one another. At least the pair of sides has a level difference portion depressed toward the one principal surface side and a castellation passing through from the another principal surface to the one principal surface. A wiring electrode extracted from the mounting terminal to the one principal surface of the base plate is at a part of the level difference portion and the castellation. The wiring electrode and the mounting terminal include a metal film formed by sputtering or vacuum evaporation and an electroless plating film formed on the metal film by electroless plating.

Abstract: A piezoelectric vibration element includes a piezoelectric piece, a pair of excitation electrodes, and a pair of extraction electrodes. The piezoelectric piece has a rectangular shape with long sides and short sides and a first principal surface and a second principal surface. The piezoelectric piece includes a mesa portion thicker than a peripheral portion at least on the first principal surface. The excitation electrode is larger than an area of the mesa portion and covers the mesa portion on the principal surface where the mesa portion is formed. The excitation electrode has a center away from a center of the piezoelectric piece toward another short side by a first distance. The mesa portion has a center away from the center of the piezoelectric piece to the other short side by a second distance. The second distance is different from the first distance.

Abstract: A piezoelectric resonator device includes: a top electrode layer with a patterned structure, a top piezoelectric layer adjacent to the top layer, a middle metal layer adjacent to the top piezoelectric layer opposite the top layer, a bottom piezoelectric layer adjacent to the middle layer opposite the top piezoelectric layer, and a bottom electrode layer with a patterned structure and adjacent to the bottom piezoelectric layer opposite the middle layer. The top layer includes a first plurality of electrodes inter-digitated with a second plurality of electrodes. A first one of the electrodes in the top layer and a first one of the electrodes in the bottom layer are coupled to a first contact, and a second one of the electrodes in the top layer and a second one of the electrodes in the bottom layer are coupled to a second contact.

Abstract: Various embodiments include apparatus and methods of providing a piezoelectric element having a surface front surface to operate as an active surface of a transducer on which a number of separate electrodes are disposed such that the electrodes on the front surface provide an effectively flat surface to the transducer. Additional apparatus, systems, and methods are disclosed.

Abstract: A vibrator element includes a base section, a driving vibrating arm extending from one end of the base section, a detecting vibrating arm extending from another end of the base section opposite to the one end, an adjusting vibrating arm extending from the base section on an opposite side to the driving vibrating arm, and a support section extending from the base section and to be fixed to a substrate, and an output signal of the adjusting vibrating arm has a reverse phase with respect to an output signal of a leakage vibration of the detecting vibrating arm.

Abstract: A multi-layer piezoelectric element that has high durability with capability to operable continuously under higher voltage and higher pressure over a long period of time, a method for manufacturing the same, an injection apparatus and a fuel injection system are provided. The multi-layer piezoelectric element, comprising: a multi-layer structure comprising a plurality of internal electrode layers and a plurality of piezoelectric material layers, the plurality of piezoelectric material layers being stacked with each one of the plurality of internal electrode layers intervened between each two of the plurality of piezoelectric material layers, wherein a cross-sectional area of a cross section of the multi-layer structure parallel to the plurality of internal electrode layers is smaller in both end portions in a stacked direction than in a middle portion in the stacked direction.

Abstract: A thin film bulk acoustic resonator (FBAR) includes a first electrode, a first piezoelectric layer having a first c-axis orientation and on the first electrode, a second piezoelectric layer having a second c-axis orientation over the first piezoelectric layer, and a second electrode on the second piezoelectric layer. The first and second piezoelectric layers are made of respective different piezoelectric materials. The FBAR can be set to have different resonance frequencies by selecting the first and second c-axis orientations to be respectively the same or different. The high and low frequency range of the FBAR can thus be extended.

Abstract: A laminated piezoelectric device comprising a device body 10 on which a number of piezoelectric layers 2 and internal electrodes 3, 4 are laminated, external electrodes 5, 6 electrically connected to the internal electrodes 3, 4 and formed on the surface of the device body 10, an insulation layer 7 and a resistance layer 8. The insulation layer 7 covers at least a portion wherein internal electrodes 3, 4 are exposed on the surface of the device body 10, where mechanical displacement is generated by applying voltage. The resistance layer 8 is formed to connect between external electrodes 5, 6 and has a lower electric resistance value than the insulation layer 7.

Abstract: A microelectromechanical (MEM) filter is disclosed which has a plurality of lattice networks formed on a substrate and electrically connected together in parallel. Each lattice network has a series resonant frequency and a shunt resonant frequency provided by one or more contour-mode resonators in the lattice network. Different types of contour-mode resonators including single input, single output resonators, differential resonators, balun resonators, and ring resonators can be used in MEM filter. The MEM filter can have a center frequency in the range of 10 MHz-10 GHz, with a filter bandwidth of up to about 1% when all of the lattice networks have the same series resonant frequency and the same shunt resonant frequency. The filter bandwidth can be increased up to about 5% by using unique series and shunt resonant frequencies for the lattice networks.

Abstract: A piezoelectric component with a monolithic stack has piezoceramic layers and electrode layers arranged alternately one on top of the other, at least one porous security layer arranged in the stack for the formation of a crack if mechanical overload of the stack occurs, at least one outer electrode arranged at a lateral surface section for electric contacting of the electrode layers and a plastic sheath of the stack for protecting the stack, wherein the plastic sheath has silicon. The piezoelectric component is characterized in that a coating of the outer electrode, has silicon-free polymer, is arranged between the outer electrode and the plastic sheath. By coating the plating of the outer electrode, the area of the security layer present directly under the plating is protected from silicon component deposits. The piezoelectric component is used for the control of valves, particularly of injection valves of internal combustion engines.

Abstract: In one embodiment, a method of deforming a MEMS structure includes providing a base layer, providing a first piezoelectric slab operably connected to a surface of the base layer, determining a desired deformation of the base layer, applying a first potential to a first electrode operably connected to the first piezoelectric slab, applying a second potential to a second electrode operably connected to the first piezoelectric slab, and deforming the base layer with the first piezoelectric slab using the applied first potential and the applied second potential based upon the determined desired deformation.

Abstract: A transverse acoustic wave resonator includes a base, a resonator component, a number of driving electrodes fixed to the base and a number of fixing portions connecting the base and the resonator component. The resonator component is suspended above a top surface of the base and is perpendicular to the base. The driving electrodes are coupling to side surfaces of the resonator component. The resonator component is formed in a shape of an essential regular polygon. The driving electrodes and the resonator component jointly form an electromechanical coupling system for converting capacitance into electrostatic force. Besides, a capacitive-type transverse extension acoustic wave silicon oscillator includes the transverse acoustic wave resonator and a method of fabricating the transverse acoustic wave resonator are also disclosed.

Abstract: A piezoelectric vibration piece includes a base made of a piezoelectric material; a plurality of vibration arms which is integrally formed with the base and extends in parallel; elongate grooves which are formed along longitudinal directions of the vibration arms; and excitation electrodes which include inner electrodes disposed in the elongate grooves and side electrodes disposed in side surfaces facing the inner electrodes, wherein widening portions in which the widths of the vibration arms are widened toward the base at a joint between the vibration arms of the base are formed, and the side electrodes are led to principal surfaces and side surfaces of the widening portions.

Abstract: A piezoelectric drive type MEMS element includes: a first substrate including, in a portion thereof, a movable part which is driven by a piezoelectric drive section to be displaced in a convex shape, a movable electrode being provided on a surface of the movable part; and a second substrate which is bonded to the first substrate and supports a fixed electrode facing the movable electrode via a prescribed gap, wherein the piezoelectric drive section includes a piezoelectric film provided on a region of the first substrate which forms the movable part as a portion of the movable part, and a pair of electrodes disposed so as to sandwich the piezoelectric film.

Abstract: A multilayer piezoelectric element includes a plurality of piezoelectric layers and a plurality of metal layers stacked alternately. The plurality of metal layers include a plurality of low-filled metal layers having a lower filling rate of metal composing the metal layers than oppositely disposed metal layers adjacent to each other in a stacking direction. The plurality of metal layers may include a plurality of thin metal layers having a smaller thickness than oppositely disposed metal layers adjacent to each other in a stacking direction. Where the plurality of metal layers are composed mainly of an alloy, the plurality of metal layers may include a plurality of high-ratio metal layers having a higher ratio of a component constituting the alloy than oppositely disposed metal layers adjacent to each other in a stacking direction.

Abstract: A piezoelectric ceramic comprising as a main component an alkali-containing niobate-based perovskite structure expressed by a compositional formula (LixNayK1-x-y)a(Nb1-zTaz)O3 (provided: 0.04<x?0.1, 0?y?1, 0?z?0.4, and 0.95?a?1.005); wherein a crystal phase or an amorphous phase containing Si and K is made present at a grain boundary or a grain boundary triple point of a plurality of crystal grains constituting the piezoelectric ceramic.

Abstract: A piezoelectric component includes an electromechanical transducer with two first electrodes and a second electrode. The second electrode is arranged between the two first electrodes. The transducer also includes a first main side, a second main side, opposite from the first main side, and a first longitudinal side. A first contiguous metallization layer is arranged on a first partial region of the first main side and on a partial region of the first longitudinal side adjacent to the first partial region of the first main side. Here, the partial region of the first longitudinal side is kept at a sufficient distance from a side edge facing the second main side and the partial region electrically contacts the at least two first electrodes.

Abstract: A magnetic head driving piezoelectric ceramic actuator having an actuator body and a coating layer. The actuator body has a piezoelectric ceramic substrate and first and second electrodes. The piezoelectric ceramic substrate has first and second principal surfaces, first and second side surfaces, and first and second edge surfaces. The first electrode has a first external electrode portion formed on a part of the first principal surface, and a second external electrode portion formed on the first edge surface. The second electrode has a third external electrode portion formed on the second edge surface, and a fourth external electrode portion formed on the first principal surface. Each of: at least a part of each of the first and second external electrode portions; and at least a part of each of the third and fourth external electrode portions, constitutes a joined portion mounted on the substrate by an electrically-conductive agent.

Abstract: There is provided a transducer array for lysing an adipose tissue, the transducer array comprising at least one unitary piece of piezoelectric material having first and second opposing surfaces; and one or more conductive layers on each of said first and second opposing surfaces, wherein at least one of said one or more conductive layers comprises a plurality of electrode elements.

Abstract: An actuator manufacturing method includes alternately stacking a plurality of dielectric elastomer layers and a plurality of conductive rubber layers along the direction of thickness to form a sheet, and wrapping the sheet formed about a core to form a rolled sheet. When the sheet formed in the step of alternately stacking is wrapped about the core, the sheet is formed by the dielectric elastomer layers and the conductive rubber layers. Therefore, even if the dielectric elastomer layers in the sheet are made to be thin, the thickness of the entire sheet is prevented from being excessively thin.

Abstract: A piezoceramic surface actuator comprising multilayer plates each having a plurality of piezoceramic plates separated from one another by in each case a positive or negative electrode. The positive and negative electrodes alternate and are constructed integrally with the piezoceramic plates, and have collector electrode surfaces for the positive and negative electrodes, which are connected to the associated positive or negative electrodes in a conducting manner and are arranged on two exterior sides of the surface actuator that are opposite from one another. The multilayer plates are plate-shaped and have a much greater width of the piezoceramic plates, defined by the distance between the opposite collector electrode surfaces, than the thickness of the multilayer plates. The collector electrode surface in each case contacts the positive or negative electrodes of the neighboring multilayer plates.

Abstract: A piezoelectric multilayer component is specified. At least one external electrode is fixed to a stack of piezoelectric layers and electrode layers arranged therebetween. At wherein at least one region of the external electrode projects beyond the stack and the external electrode is at least partly pressure-deformed in said region. Furthermore, a method for forming an external electrode in a piezoelectric multilayer component is specified.

Abstract: This disclosure provides implementations of electromechanical systems piezoelectric resonator transformers, devices, apparatus, systems, and related processes. In one aspect, a transformer includes a piezoelectric layer; a first conductive layer arranged over a first surface of the piezoelectric layer including a first set of electrodes and a second set of electrodes interdigitated with the first set. The transformer includes a second conductive layer arranged over a second surface including at least a third set of electrodes. In some implementations, the transformer includes a first port capable of receiving an input signal and to which the first set of electrodes are coupled, and a second port capable of being coupled to a load and of outputting an output signal, the second set of electrodes being coupled to the second port. Generally, a ratio of the number of electrodes of the second set to the first set characterizes a transformation ratio.

Abstract: A microelectromechanical resonator can include a suspended frame-shaped beam anchored at four corners thereof to a surrounding substrate along with a suspended resonator plate tethered on four sides thereof to corresponding sides of the frame-shaped beam. A pair of drive electrodes are provided on first and third diametrically opposite corners of the frame-shaped beam and a pair of sense electrodes are provided on second and fourth diametrically opposite corners of the frame-shaped beam. The resonator may also include a ground electrode on the frame-shaped beam and a piezoelectric layer sandwiched between each of the drive and sense electrodes and the ground electrode.

Abstract: A multi-layer piezoelectric element having high durability of which amount of displacement is suppressed from varying even when operated continuously over a long period of time with a higher electric field under a high pressure is provided. The multi-layer piezoelectric element comprising a multi-layer structure in which a plurality of piezoelectric material layers and a plurality of metal layers are stacked alternately one on another, wherein the plurality of metal layers comprises internal electrodes and low-rigidity metal layer that has rigidity lower than those of the piezoelectric material layer and the internal electrode, wherein the low-rigidity metal layer comprises a plurality of metal parts that are separated from each other, and wherein at least one of the metal parts is bonded with only one piezoelectric material layer among the two piezoelectric material layers that adjoin in the stacking direction.

Abstract: A vibrator includes: a vibrating reed having a vibrating body, first and second support portions supporting the vibrating body, and four beams coupling the first and second support portions with the vibrating body; electrodes disposed at the vibrating body; and terminals disposed at the first and second support portions and electrically connected with the electrodes via wires disposed at the beams. Between the terminals next to each other, a plurality of grooves spaced apart in a predetermined direction and extending in a direction intersecting the predetermined direction are disposed.

Abstract: The present invention relates to a piezoelectric device of a multi-layered structure on which first electrodes and second electrodes are sequentially stacked on a piezoelectric polymer and single surfaces or both surfaces of piezoelectric polymer. In accordance with the present invention, the vibration response characteristics of the piezoelectric polymer can be improved by using the graphene or the composite thereof as a surface electrode material to the piezoelectric polymer; and, there are effects that the response characteristics of the piezoelectric device are excellent and the reliability thereof is excellent by forming a second electrode having an excellent conductivity and a protection electrode thereof.