Abstract: A laser-sustained plasma (LSP) light source with reverse vortex flow is disclosed. The LSP source includes gas cell including a gas containment structure including a body, neck, and shaft. The gas cell includes one or more gas delivery lines for delivery gas to one or more nozzles positioned in or below the neck of the gas containment structure. The gas cell includes one or more gas inlets and one or more gas outlets arranged to generate a reverse vortex flow within the gas containment structure of the gas cell. The LSP source also includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure. The LSP source includes a light collector element configured to collect at least a portion of broadband light emitted from the plasma.

Abstract: A laser-sustained plasma (LSP) light source with vortex gas flow is disclosed. The LSP source includes a gas containment structure for containing a gas, one or more gas inlets configured to flow gas into the gas containment structure, and one or more gas outlets configured to flow gas out of the gas containment structure. The one or more gas inlets and the one or more gas outlets are arranged to generate a vortex gas flow within the gas containment structure. The LSP source also includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure within an inner gas flow within the vortex gas flow. The LSP source includes a light collector element configured to collect at least a portion of broadband light emitted from the plasma.

Abstract: The present invention is to solve the problems described above and to provide the plasma torch nozzle of graphite material coupled to the front electrode of the plasma torch by bolts. To achieve the object of the invention, the plasma torch nozzle according to this invention is characterized by that the torch nozzle is fixedly coupled to the front electrode of the plasma torch by one or more bolts.

Abstract: A nozzle protection cap for an arc plasma torch comprises a front end section and a rear end section with a thread region on its inner surface for screwing to a torch body of an arc plasma torch. At least one groove crosses the thread region on the inner surface. A nozzle protection cap holder for the arc plasma torch comprises a section with a thread region on its outer surface for screwing to the nozzle protection cap. At least one groove crosses the thread region on its outer surface. An arc plasma torch comprises a torch body and a nozzle protection cap screwed thereto in a screw connection region. The torch body and/or the nozzle protection cap is/are designed so that at least one channel is formed between them, the channel crossing the screw connection region.

Abstract: A wafer inspection system includes a laser sustained plasma (LSP) light source that generates light with sufficient radiance to enable bright field inspection. Reliability of the LSP light source is improved by introducing an amount of water into the bulb containing the gas mixture that generates the plasma. Radiation generated by the plasma includes substantial radiance in a wavelength range below approximately 190 nanometers that causes damage to the materials used to construct the bulb. The water vapor acts as an absorber of radiation generated by the plasma in the wavelength range that causes damage. In some examples, a predetermined amount of water is introduced into the bulb to provide sufficient absorption. In some other examples, the temperature of a portion of the bulb containing an amount of condensed water is regulate to produce the desired partial pressure of water in the bulb.

Abstract: The present invention provides a glow discharge assembly that includes an electrically conductive cylindrical screen, a flange assembly, an electrode, an insulator and a non-conductive granular material. The electrically conductive cylindrical screen has an open end and a closed end. The flange assembly is attached to and electrically connected to the open end of the electrically conductive cylindrical screen. The flange assembly has a hole with a first diameter aligned with a longitudinal axis of the electrically conductive cylindrical screen. The electrode is aligned with the longitudinal axis of the electrically conductive cylindrical screen and extends through the hole of the flange assembly into the electrically conductive cylindrical screen. The insulator seals the hole of the flange assembly around the electrode and maintains a substantially equidistant gap between the electrically conductive cylindrical screen and the electrode.

Abstract: An improved electrode for use in a plasma arc torch. The electrode includes an electrode body, a cavity in a front face at a first end of the electrode body, and an insert disposed in the cavity. The first end of the electrode body is formed of high purity copper containing at least 99.81% copper. The insert has a first end and a second end and is formed of a high emissivity material. A diameter of the first end of the insert is less than a diameter of a second end of the insert. An electrode is compressed to retain the insert using radial compression. The invention also includes a method for forming the electrode, and a method of operation of an electrode in a plasma torch.

Abstract: An anode of an arc plasma generator and the arc plasma generator are disclosed. The plasma generator is a multi-stage gas admission type arc plasma generator, and the plasma generator includes a cathode and an anode. The anode comprises at least two portions (201, 203), wherein any two adjacent portions of the anode are connected electrically with one another.

Abstract: A shield device for a plasma arc torch includes an inner shield member defining an inner auxiliary gas chamber and an outer shield member surrounding the inner shield member. An outer auxiliary gas chamber is defined between the inner shield member and outer shield member. The shield device allows an auxiliary gas flow to be split into a first flow of auxiliary gas through the inner auxiliary gas chamber and a second flow of auxiliary gas through the outer auxiliary gas chamber. The inner shield member and the outer shield member are configured to be mounted to the plasma arc torch as an integral unit.

Abstract: A plasma torch includes an electrically conductive cylindrical vessel, a hollow electrode, a first insulator, a concentric reducer, a tangential inlet, an electrode housing and a first electrode. The hollow electrode is aligned with a longitudinal axis of the electrically conductive cylindrical vessel and extends into the electrically conductive cylindrical vessel. The first insulator seals the electrically conductive cylindrical vessel around the hollow electrode. A non-conductive granular material is disposed between the electrically conductive cylindrical vessel and the hollow electrode. The concentric reducer is disposed within the electrically conductive cylindrical vessel and extends from the electrically conductive cylindrical vessel to the hollow electrode. The electrode housing is connected to the electrically conductive cylindrical vessel.

Abstract: A plasma arc torch both cutting and marking of metal workpieces includes a plasma nozzle having a plasma nozzle orifice through which an electric arc from an electrode and a stream of plasma gas are emitted toward a workpiece, and a liquid-injection shield cup that injects liquid tangentially inwardly to the arc and stream of plasma gas. A power supply is operable to selectively deliver electrical power to the electrode at either a low power level suitable for marking of a workpiece or a high power level suitable for workpiece cutting. The torch may be selectively operated to mark at the low power level, with a plasma marking gas being delivered to the plasma gas passage, or to cut at the high power level, with a plasma cutting gas being delivered to the plasma gas passage, and liquid being delivered to the liquid injection passage for both cutting and marking.

Abstract: A plasma torch 1 used in plasma-arc welding is provided with a rod-shaped electrode 10, a first cylindrical nozzle 11 which is provided to surround the electrode 10 and which injects a plasma gas and a second cylindrical nozzle 12 which is provided to surround the first nozzle 11 and which injects a shielding gas. A second injection opening 121 of the second nozzle 12 directs in a substantially parallel direction with respect to an axial direction of the electrode 10 or in a direction being away from the electrode 10, and a plurality of groove portions inclining with respect to the axial direction of the electrode 10 are formed in an outer circumferential surface of the first nozzle 11 or an inner circumferential surface of the second nozzle 12.

Abstract: An improved electrode for use in a plasma arc torch. The electrode includes an electrode body, a cavity in a front face at a first end of the electrode body, and an insert disposed in the cavity. The first end of the electrode body is formed of high purity copper containing at least 99.81% copper. The insert has a first end and a second end and is formed of a high emissivity material. A diameter of the first end of the insert is less than a diameter of a second end of the insert. An electrode is compressed to retain the insert using radial compression. The invention also includes a method for forming the electrode, and a method of operation of an electrode in a plasma torch.

Abstract: A consumable for a plasma arc torch, such as a nozzle, having a body and a head defining a shoulder portion having a frusto-conical portion and a flared portion. The flared portion increases the cross-sectional thickness to provide a greater heat-conduction path for removal of heat generated by a plasma arc, thereby extending consumable life. The frusto-conical portion provides a sharper, pointier nozzle head to simultaneously increase the operator's visibility of the workpiece. Methods of making and using the consumables are also included.

Abstract: Method of controlling the wear of at least one of the electrodes of a plasma torch including two electrodes having the same main axis, and being separated by a chamber designed to receive a plasma-generating gas, and at least one element for generating a magnetic field placed locally to the at least one electrode for which the control of wear is sought, in which the arc root is made to sweep longitudinally over a portion of the surface of this electrode from an initial position until the arc root reaches a defined final position of the portion, the longitudinal progression of the arc root being defined by a function dependent on at least the time, f(t), which is fixed.

Abstract: A DC steam plasma torch includes front, middle and rear sections. The front section includes a first amount and a first electrode attached to the first amount, thus defining co-axial first internal and external coolant channels. The middle section includes a second mount and a second electrode co-axially connected to the second mount, thus defining co-axial second internal and external coolant channels. The rear section includes an insulating transient element connected to the second electrode, a window frame connected to the insulating transient element and a window provided in the window frame. A first swirl generator is provided between the first and second sections to receive primary working gas and generating a swirl in the same. A second swirl generator is provided between the middle and rear sections to receive auxiliary working gas and generating a swirl in the same.

Abstract: A system and method for over-voltage protection is described. In one embodiment of the invention, an apparatus includes an output port configured to deliver power to a plasma chamber to ignite a plasma. The apparatus also includes a shunt switch in parallel with the output port and a processor configured to receive an indicator of an arc in the plasma. The processor is configured to close the shunt switch for a period of time to divert current away from the arc. The processor is also configured to trigger a pulse of the shunt switch to limit a voltage of an increasing voltage condition associated with the arc.

Abstract: An anode of an arc plasma generator and the arc plasma generator are disclosed. The plasma generator is a multi-stage gas admission type arc plasma generator, and the plasma generator includes a cathode and an anode. The anode comprises at least two portions (201, 203), wherein any two adjacent portions of the anode are connected electrically with one another.

Abstract: The present invention relates to a method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp, in which a discharge plasma (8) emitting EUV radiation or soft X-rays is generated in a gaseous medium formed by an evaporated liquid material in a discharge space, said liquid material being provided on a surface in the discharge space and being at least partially evaporated by an energy beam (9). The invention also refers to a corresponding apparatus for producing EUV radiation and/or soft X-rays. In the method, a gas (11) composed of chemical elements having a lower mass number than chemical elements of the liquid material is supplied through at least one nozzle (10) in a directed manner to the discharge space and/or to the liquid material on a supply path to the discharge space in order to reduce the density of the evaporated liquid material in the discharge space. With the present method and corresponding apparatus the conversion efficiency of the lamp is increased.

Abstract: A dielectric waveguide integrated plasma lamp (DWIPL) with a body comprising at least one dielectric material having a dielectric constant greater than approximately 2, and having a shape and dimensions such that the body resonates in at least one resonant mode when microwave energy of an appropriate frequency is coupled into the body. A dielectric bulb within a lamp chamber in the body contains a fill which when receiving energy from the resonating body forms a light-emitting plasma. The bulb is transparent to visible light and infrared radiation emitted by the plasma. Radiative energy lost from the plasma is recycled by reflecting the radiation from thin-film, multi-layer coatings on bulb exterior surfaces and/or lamp chamber surfaces back into the bulb.

Abstract: A method of removing organic impurities from a surface of a substrate that is used for feeding or processing web material, wherein a jet of an atmospheric plasma is directed onto the surface of the substrate.

Abstract: A method and apparatus for producing high intensity electromagnetic radiation are disclosed. The apparatus includes a high intensity arc lamp having an inner envelope cooled by a first flow of liquid along an inside surface of the inner envelope. The arc lamp includes first and second electrodes for generating a high power plasma arc within the inner envelope, the arc emitting the radiation. The apparatus further includes a cooling device for producing a second flow of liquid in contact with an outside surface of the inner envelope. In order to approximate a desired electromagnetic radiation spectrum, the apparatus may further include an energy redistributor for redistributing energy within a first radiation spectrum generated by the arc to produce a second radiation spectrum.

Abstract: A plasma arc torch is disclosed which has an elongated electrode with an open front and a nozzle with a plasma discharge opening that is coaxial with the electrode. A mounting arrangement includes a ceramic ring that engages the front end of the electrode and a gas ring which concentrically surrounds the ceramic ring. A forward portion of the gas ring, the forward end of the electrode, and the nozzle define a swirl chamber of the torch, and opposing, spaced-apart concentric cylindrical surfaces of the ceramic ring and the gas ring, respectively, form an annulus which extends rearwardly from the swirl chamber. The ceramic ring closes the aft end of the annulus, and the gas ring houses a plurality of plasma gas injection ports which are located immediately forward of the aft end of the annulus.

Abstract: The closed electron drift plasma thruster uses a magnetic circuit to create a magnetic field in a main annular channel for ionization and acceleration, said magnetic circuit comprises: an essentially radial first outer pole piece; a conical second outer pole piece; an essentially radial first inner pole piece; a conical second inner pole piece; a plurality of outer magnetic cores surrounded by outer coils to interconnect the first and second outer pole pieces; an axial magnetic core surrounded by a first inner coil and connected to the first inner pole piece; and a second inner coil placed upstream from the outer coils. The thruster also comprises a plurality of radial arms included in the magnetic circuit, and a structural base which is separate from the magnetic circuit and which serves, amongst other things, to cool the coils.

Abstract: A four-nozzle plasma generator comprising two anode electrode chambers and two cathode electrode chambers connected to DC power sources and generating four plasma jets of which the shape and the path are determined by an external magnetic field system. The plasma jets converge on a central area into which the material to be processed is injected, in order to form a single plasma stream. The nozzles are symmetrically arranged on a hood which includes a flat water-cooled diaphragm provided with a central aperture.

Abstract: A method of centering an electrode in the nozzle of a plasma arc torch head is disclosed. The method involves complementing the external wall of the swirl to the internal taper of the nozzle; complementing the internal wall of the swirl to the external taper of the electrode; fitting the hollow tapered swirl so formed in the hollow nozzle to abut the inner taper of the nozzle; and fitting the electrode in the hollow swirl to abut the inner taper of the swirl to center the electrode within the nozzle. Also disclosed is a head for a plasma arc cutting torch which includes a a swirl located between the nozzle and the electrode, through which plasma fuel gas is introduced into the nozzle, characterized in that the plasma fuel gas is introduced directly into the plasma formation zone or plenum beyond the junction between the nozzle body and cone end thereby avoiding change in direction within the conical end of the nozzle before the plasma formation zone.