Abstract: Provided is an apparatus and a method for coating objects and in particular containers with at least one first and one second coating station, wherein these coating stations each have at least one first coating electrode and one second coating electrode, and with a supply device for electrical supply of in each case at least one of the coating electrodes. The supply device has a high-frequency generator device for generating an a.c. voltage and/or voltage pulses as well as an a.c. voltage distribution device which distributes this a.c. voltage and/or the voltage pulses respectively to in each case at least one electrode of the first coating station and at least one electrode of the second coating station, wherein the a.c. voltage distribution device is suitable and intended for distributing the a.c. voltages and/or the voltage pulses with a time delay to the electrodes.

Abstract: A microwave heating device includes a variable frequency microwave power supply, a waveguide launcher, and a fixture to contain a material to be heated, with the fixture located directly adjacent to the end of the launcher. All heating occurs in the near-field region, i.e., no cavity modes or standing waves are established within the fixture. This condition may be insured by keeping the thickness of the fixture or workpiece under one wavelength (at all microwave frequencies being used). The launcher is preferably a horn configured to spread the microwave power laterally over a selected area while maintaining a single propagating mode. The invention may be used to enhance catalytic reactions for research and other purposes. Alternatively, the invention may be configured to perform spot curing or repair operations involving adhesives and composites.

Abstract: Described is an apparatus for guiding an electromagnetic microwave, having: antenna surrounding walls, which define an interior space so as to surround therein at least an end region of an antenna of a microwave source, in particular laterally annularly as well as frontally; waveguide boundary walls, at least two of which are arranged in parallel to each other, wherein the waveguide boundary walls form a, in particular cuboid-shaped, waveguide having a substantially rectangular cross-section, wherein a cross-sectional plane is defined by a first direction that extends along a longitudinal direction of the antenna and a second direction that extends perpendicularly to the first direction, wherein it holds: 25>a/b>3, wherein a: is a width of the waveguide along the second direction, b: is a height of the waveguide along the first direction, wherein the apparatus is designed to let proceed a microwave from the interior space of the antenna surrounding walls into the waveguide.

Abstract: A microwave plasma chemical vapor deposition device for diamond synthesis. A microwave source generates a microwave signal, and a resonant cavity receives a plurality of process gases. The microwave signal is spread in a first mode at a first waveguide. A mode conversion antenna converts the first mode of the microwave signal into a second mode that is spread at a second waveguide. A coupling conversion cavity receives and transmits the microwave signal in the second mode to the mode conversion antenna thereby converting the second mode of the microwave signal into a third mode. A medium viewport receives the microwave signal in the third mode and transmits to the resonant cavity which enables the microwave signal to excite and discharge the process gases to form spherical plasma, carbon containing groups and atomic hydrogen thereby depositing a diamond film on a seed.

Abstract: A Faraday enclosure for substantially attenuating microwave-frequency fields outside the Faraday enclosure. Information to and from the circuitry inside the Faraday enclosure is accessible by input pinholes and output pinholes, respectively. A sensor positioned outside of the Faraday enclosure and aligned with the first input pinhole senses microwave-frequency fields. A receiver inside the Faraday enclosure aligned with the input pinhole and the sensor responds to the sensor.

Abstract: Microwave plasma slowing system for a plasma shutter comprises a waveguide-band transmission for interconnection of the system with a generator, and for letting waves from the generator into the plasma shutter, a bridge band interconnected with the waveguide-band transmission, two parallel band waistlines, interconnected by its one end with the bridge band, where the band waistlines are flat plates, where one of its sides is provided with tenons arranged side by side along the axis of the band waistlines with orientation in a such way, that the tenons arranged on the one side of the first band waistline placed in turns between the tenons arranged on the one side of the second band waistline, where the band waistlines are provided at the other end by mutually separated lockable electromagnetic oscillators.

Abstract: Surfaces are sanitized by using radiation (such as UV-C) to kill pathogens (such as bacteria). A lamp shade is provided that shapes the radiation from a sanitizing lamp into an intended projection pattern, which is irradiated on a target area to kill pathogens in that target area. The radiation is controlled and turned on autonomously based upon sensors that determine when no one is using the device being sanitized.

Abstract: Some embodiment describe a reflector comprising a hollow body having an interior surface defining a passage. The interior surface has an optical surface part configured to reflect radiation and a supporter surface part. The optical surface part has a predetermined optical power and the supporter surface part does not. The reflector can be made by providing an axially symmetric mandrel, shaping a part of the circumferential surface of the mandrel to form an inverse optical surface part that is not rotationally symmetric about the axis of the mandrel, forming a reflector body around the mandrel and releasing the reflector body from the mandrel whereby the reflector body has an optical surface defined by the inverse optical surface part and a supporter surface part defined by the rest of the outer surface of the mandrel.

Abstract: A gauge having a housing formed of a polymer material and one or more electrical feedthrough pins disposed in the housing. The electrical feedthrough pins can be oriented substantially perpendicular to each other and have complex shapes.

Abstract: A crossed field device for generating electromagnetic emissions includes an anode having a first slow-wave structure having a plurality of first vanes separated by cavities formed therebetween and a second slow-wave structure having a plurality of second vanes separated by cavities formed therebetween. At least one of the first vanes is laterally aligned with one of the second vanes. The first vanes are offset from the second vanes by an offset distance so that at least one of the first vanes is not laterally aligned with a second vane and at least one of the second vanes is not laterally aligned with a first vane. The device further includes a cathode disposed in a space located between first and second vanes. A magnetic element generates a magnetic field (B), which is oriented orthogonally to an electric field (E) formed by the anode and cathode to generate EM emissions.

Abstract: Provided are a traveling wave tube and a high-frequency circuit system such that the product life span of the traveling wave tube operating in multiple modes can be extended while variations in gain and amplification efficiency that accompany switching of the operation modes can be suppressed. The traveling wave tube comprises: an electron gun equipped with a cathode that releases electrons, and a heater that provides the cathode with heat energy for releasing the electrons; a helix causing an RF signal to interact with an electron beam formed from the electrons released by the electron gun; a collector for catching the electron beam emitted by the helix; an anode whereby the electrons released from the electron gun are guided into the helix; and a magnetic field application device for generating a magnetic field in order to change the diameter of the electron beam, said magnetic field application device being supplied with electric power for generating the magnetic field from the outside.

Abstract: A system has a linear accelerator, ion pump and a compensating magnet. The ion pump includes an ion pump magnet position, an ion pump magnet shape, an ion pump magnet orientation, and an ion pump magnet magnetic field profile. The compensating magnet has a position, a shape, an orientation, and a magnetic field profile, where at least one of the position, shape, orientation, and magnetic field profile of the compensating magnet reduce at least one component of a magnetic field in the linear accelerator resulting from the ion pump magnet.

Abstract: The present invention pertains to a resonant cavity system, more specifically, a resonant system for measuring the dielectric constant of a sample and its method of use. The system and method provide for holding sample materials, which can be in solid, liquid, or powder form, and for reducing the size of the requisite cavity for measurement. The construction incorporates waveguide flange connectors to seal the electromagnetic cavity, which facilitates the measurement of low-loss materials. The design for signal input enables the use of standard calibration techniques and measurement.

Abstract: A plasma applicator includes a plasma discharge tube and a microwave cavity at least partially surrounding a portion of the plasma discharge tube. Microwave energy is coupled to the microwave cavity via a coupling iris. At least two orthogonal dimensions of the microwave cavity are selected such that the microwave energy in the microwave cavity propagates in a transverse electric (TE) mode. Primary electric fields generated from the microwave energy combine with an evanescent electric field generated from the coupling iris, such that a combined electric field in the microwave cavity is substantially uniform along the longitudinal axis of the plasma discharge tube. A plurality of radial microwave chokes is disposed over an exterior of the plasma discharge tube. Positions of the microwave chokes are such that microwave energy propagating in the TE mode and a transverse electric magnetic (TEM) mode is attenuated.

Abstract: A cylindrical waveguide with a mode converter transforms a whispering gallery mode from a gyrotron cylindrical waveguide with a helical cut launch edge to a quasi-Gaussian beam suitable for conveyance through a corrugated waveguide. This quasi-Gaussian beam is radiated away from the waveguide using a spiral cut launch edge, which is in close proximity to a first mode converting reflector. The first mode converting reflector is coupled to a second mode converting reflector which provides an output free-space HE11 mode wave suitable for direct coupling into a corrugated waveguide. The radiated beam produced at the output of the second mode converting reflector is substantially circular.

Abstract: The invention relates to an apparatus for performing a plasma chemical vapor deposition process. The apparatus comprises a mainly cylindrical resonator being provided with an outer cylindrical wall enclosing a resonant cavity extending in a circumferential direction around a cylindrical axis. The resonator is further provided with side wall portions bounding the resonant cavity in the cylindrical direction, and with a slit configuration extending in a circumferential direction around the cylindrical axis providing access from the resonant cavity radially inwardly. Further, the slit configuration includes slit sections that are mutually offset in the cylindrical direction.

Abstract: A plasma actuator system includes a first electrode having a first slit formed in a first peripheral section of the first electrode. The first slit directs flow of a gaseous medium along a radial direction of the first electrode. Further, the plasma actuator system includes a second electrode coupled to the first electrode and is disposed concentrically around the first electrode. The second electrode includes a second slit formed in a second peripheral section for directing flow of the gaseous medium along the radial direction. Further, the system includes a power source coupled to the first and second electrode for supplying electric power to the electrodes for ionizing gaseous medium to generate plasma.

Abstract: An electrodeless, microwave lamp has a magnetron as a microwave source and an excitable material lucent crucible in whose excitable material a plasma is established. For coupling microwaves from the magnetron into the crucible, an air wave guide coupling circuit is provided, with an output of the magnetron as an input at one quarter lambda from one end and an output at one quarter from the other end as an input to a connection to the crucible.

Abstract: A cathode of a magnetron having a radial extension to accommodate the cathode terminals is supported by arms which have a greater diameter over the region in which they are supported in the glass thimble than over the region of the free ends. This shifts any vibrations to a higher frequency band, which is less liable to be excited in the event the magnetron is moved rapidly as in a linac used for radiotherapy purposes.

Abstract: A lighting apparatus having a magnetron configured to generate microwaves, a waveguide including a wave guide space configured to introduce and guide the microwaves and an aperture to discharge the microwaves, a resonator to which the microwaves are transmitted through the aperture, and a bulb located in the resonator, the bulb encapsulating a light emitting material and configured to emit light based on the transmitted microwaves is provided. The apparatus also includes a reflective member or optical member located in the resonator such that light emitted from the bulb towards the aperture is reflected away from the aperture.

Abstract: In some aspects, a micro-plasma device comprises a plasma gas enclosure containing at least one plasma gas, and a plurality of electrodes interfaced with the plasma gas enclosure. In other aspects, a micro-plasma circuitry apparatus comprises a first layer having a cavity formed therein and a second layer having a circuit formed therein. The circuit includes a micro-plasma circuit (“MPC”) that includes one or more micro-plasma devices (“MPDs”). The first layer of the circuit is bonded to the second layer of the circuit thereby forming an enclosure that contains at least one plasma gas. An excitation voltage is applied to a drain electrode of the MPDs to generate a conductive plasma path between the drain electrode and a source electrode.

Abstract: A microwave waveguide apparatus for generating plasma includes a waveguide which has first and second ends and propagates microwave from input end such that the microwave propagates from the first end to the second end, a circulator device having a first port, a second port coupled to the first end, and a third port coupled to the second end, the circulator device being structured such that the microwave is received at the first port, propagates from the second port to the first end, is received at the third port from the second end and is returned toward the input end, and a matching device which is interposed between the input end and the circulator device and reflects part of the microwave received at the third port and returned toward the input end to the first port. The waveguide has a slot-hole extending along the microwave propagation direction in the waveguide.

Abstract: The present invention is directed to devices and methods for generating light with plasma lamps. More particularly, the present invention provides plasma lamps driven by a radio-frequency source without the use of electrodes inside the bulb and related methods. In a specific embodiment, a coaxial type coupling module is used to drive an electrodeless bulb. Merely by way of example, such plasma lamps can be applied to applications such as stadiums, security, parking lots, military and defense, street lighting, large and small buildings, vehicle headlamps, aircraft landing, bridges, warehouses, UV water treatment, agriculture, architectural lighting, stage lighting, medical illumination, microscopes, projectors and displays, any combination of these, and the like.

Abstract: An LER LUWPL source luminaire having a magnetron heat conductingly mounted below a finned heat dissipater with a suspension eye. The magnetron is attached to a microwave transition and a lucent crucible. An imperforate cover extends down from the heat dissipater and is closed by a transparent screen, held by a molding. A generally square shaped molding supports a polished-sheet-metal reflector (having four triangular faces, pyramidally arranged, with a square base embodied by a rim supported on the top of the screen above the molding) extending back to the lucent crucible, with its reflective surfaces obliquely facing both the crucible and the screen for reflection of light from the crucible out of the luminaire via the screen. The faces converge to a virtual apex, on the central axis of the lucent crucible. This axis is coincident with the pyramid's normal axis from the apex to the center of the base.

Abstract: There is provided a cyclotron including: a hollow yoke including first and second yoke portions facing each other and a side yoke portion connecting the first and second yoke portions to each other; first and second poles provided in the yoke so as to face each other; a coil disposed so as to surround the first and second poles; a D electrode provided between the first and second poles; a power source configured to supply electric power to the coil; a pole temperature detector configured to detect a temperature of at least one of the first and second poles; a yoke temperature detector configured to detect a temperature of the side yoke portion; and a control unit configured to control supply of electric power to the coil by the power source on the basis of detection results of the pole temperature detector and the yoke temperature detector.

Abstract: A charged particle cancer therapy system is used to accelerate an anion, such a C?, and to convert the anion to a cation, such as C6+, through use of one or more electron extraction subsystems. A first example of an electron extraction subsystem is a hydrogen gas electron stripping system. A second example of an electron extraction subsystem is a carbon foil electron stripping system. The resultant cation is accelerated in a synchrotron, transported along a beam-line, and targeted to a tumor resulting in ablation of the tumor.

Abstract: The present invention includes an electron-discharge signal system with a supercharged electron source and process therefor. The system may be any signal modification unit such as a klystron, magnetron, traveling wave tube, etc. The system includes a heat-responsive electron source, supercharger, collector, a wave modification assembly, and a bleeder module. The electron source discharges an electron beam along a predetermined electron path. The supercharger heats the electron source upon absorption of electromagnetic radiation of a predetermined signal characteristic redirected by the system. The bleeder module redirects a portion of the system's output signal to the supercharger, which heats in response thereto. In other embodiments, the system may be operated entirely by electromagnetic radiation from a freestanding signal source.

Abstract: A surface wave plasma source (SWPS) is disclosed, having an electromagnetic (EM) wave launcher including a slot antenna configured to couple EM energy in a desired EM wave mode to a plasma by generating a surface wave on a plasma surface of the SWPS adjacent the plasma. The SWPS also includes a dielectric window positioned below the slot antenna, having a lower surface and the plasma surface. The SWPS further includes an attenuation assembly disposed between the slot antenna and the plasma surface. The attenuation assembly includes a first fluid channel substantially aligned with a first arrangement of slots in the slot antenna, and is configured to receive a first flow of a first fluid at a first fluid temperature. The SWPS finally includes a power coupling system coupled to the EM wave launcher and configured to provide EM energy to the EM wave launcher for forming the plasma.

Abstract: A method for operating a plasma lamp apparatus. The method includes providing a resonator structure configured with a bulb comprising a fill mixture. The bulb is coupled to an output coupling element. The method applying an RF power source to a resonator structure configured with an input coupling element and coupling the RF power to the output coupling element configured with the input coupling element to cause the fill mixture to discharge electromagnetic radiation. The method includes adjusting a spatial distance or relative configuration between the input coupling element and the output coupling element during output of the electromagnetic radiation and causing a change in an impedance value of the resonator structure to initiate an adjustment of a power transfer from the RF power source to an output of the electromagnetic radiation.

Abstract: Electromagnetic wave oscillators each having a multi-tunnel and electromagnetic wave generating apparatuses including the electromagnetic wave oscillators are provided. The electromagnetic wave oscillator includes: a first waveguide which has a folded structure such that a path traveled by an electromagnetic wave through the first waveguide crosses an axial direction a plurality of times; an electron beam tunnel through which an electron beam passes, wherein the electron beam tunnel extends along the axial direction and crosses the first waveguide a plurality of times; and at least one auxiliary tunnel which extends parallel to the electron beam tunnel and which crosses the first waveguide a plurality of times.

Abstract: A High Frequency light source has a central body of fused quartz, with a central void, filled with a fill in the void of material excitable by High Frequency energy to form a light emitting plasma. An inner sleeve of perforate metal shim extends along the length of the central body to provide a launching gap. The sleeve has a transverse end portion extending across the other, inner end of the central body. An outer cylinder of fused quartz with an internal bore such as to be a sliding fit with the inner sleeve, itself a sliding fit on the central body. An outer sleeve of perforate metal, enclosing the outer cylinder and having an end portion extending across the flush, void ends of the quartz body and cylinder and having a skirt extending past the flush over an aluminum carrier, clamped and holding the quartz elements against the carrier.

Abstract: A band pass filter comprises an air filled aluminum chamber, having a lid and a cuboid resonant cavity having a central iris. At opposite end nodes of the cavity, perfect electric conductors (PECs) are provided. One is connected to a feed wire from an input at one end of the cavity. The other PEC is connected via a further feed wire to a radiator in a fabrication of solid-dielectric, lucent material. Threaded tuning projections opposite the PECs and in the iris are provided, whereby the pass band and the transmission characteristics of the filter in the pass band can be tuned to match the input impedance of the band pass filter and the wave guide to the output impedance of a microwave drive circuit (not shown). Typically the impedance will be 50?.

Abstract: A low-temperature, atmospheric-pressure microplasma generator comprises at least one strip of metal on a dielectric substrate. A first end of the strip is connected to a ground plane and the second end of the strip is adjacent to a grounded electrode, with a gap being defined between the second end of the strip and the grounded electrode. High frequency power is supplied to the strip. The frequency is selected so that the length of the strip is an odd integer multiple of ¼ of the wavelength traveling on the strip. A microplasma forms in the gap between the second end of the strip and the grounded electrode due to electric fields in that region. A microplasma generator array comprises a plurality of strongly-coupled resonant strips in close proximity to one another. At least one of the strips has an input for high-frequency electrical power. The remaining strips resonate due to coupling from the at least one powered strip. The array can provide a continuous line or ring of plasma.

Abstract: A Lucent Waveguide Electromagnetic Wave Plasma Light Source has a fabrication (1) of quartz with an inner closed void enclosure (2) is formed of 8 mm OD, 4 mm ID drawn tube. It is sealed at its inner and outer ends (3,4). Microwave excitable plasma material is sealed inside the enclosure. Its outer end (4) protrudes through an end plate (5) by approximately 10.5 mm and the overall length of the enclosure is approximately 20.5 mm. The tube (71) from which the void is formed is continued backwards from the inner end of the void enclosure as an antenna sheath (72). The 2 mm thick end plate (5) is circular and has the enclosure (2) sealed in a central bore in it.

Abstract: In a dielectric window 41 for a plasma processing apparatus, a first dielectric window recess 47 is formed on an outer region of a surface of the dielectric window 41 in a diametrical direction of the dielectric window 41 at a side where plasma is generated, and the first dielectric window recess 47 is extended in a ring shape and has a tapered shape inwardly in a thickness direction of the dielectric window 41. A multiple number of second dielectric window recesses 53a to 53g are formed between the center of the dielectric window 41 and the first dielectric window recess 47, and each of the second dielectric window recesses 53a to 53g is recessed inwardly in the thickness direction of the dielectric window 41 from the surface of the dielectric window 41.

Abstract: Excimers are formed in a high pressure gas by applying a potential between a first electrode (14, 214) and a counter electrode (25, 226) so as to impose an electric field within the gas, or by introducing high energy electrons into the gas using an electron beam. A phosphor for converting the wavelength of radiation emitted from the formed excimers is disposed within the gas and outside a region (62, 162) where the excimers are expected to be formed, so as to avoid degradation of the phosphor.

Abstract: Electric lamps wherein material inside a bulb is excited using capacitive coupling through the bulb wall to external electrodes, forming plasma which emits light. Methods described include use of light-emitting material including sulfur and/or selenium, and a circuit for driving the external electrodes.

Abstract: A plasma generation device, a system comprising a plasma generation device, and a method of generating plasma and vacuum UV (VUV) photons are described.

Abstract: There is provided a plasma processing apparatus which can improve density uniformity of plasma excited by a high frequency wave as in the VHF frequency band for a substrate having a large size. The plasma processing apparatus includes a waveguide member defining a waveguide, a coaxial tube supplying electromagnetic energy from a predetermined power supply position in the longitudinal direction of the waveguide into the waveguide, first and second electrodes for electric field formation disposed so as to face a plasma formation space, and a coil member disposed in the waveguide so as to generate a voltage by electromagnetic induction due to a magnetic field and also electrically connected to the first and second electrodes.

Abstract: The invention relates to an HF resonator comprising a cylindrical cavity made of a dielectric material. An inner face of the cavity has an electrically conductive coating which is divided into a first inner coating and a second inner coating by an electrically insulating gap that encircles a lateral face of the cavity in an annular manner. An outer face of the cavity has an electrically conductive first outer coating and an electrically conductive second outer coating. The first outer coating and the second outer coating are electrically insulated from each other. The HF resonator comprises a device that is provided for applying a high-frequency electric voltage between the first outer coating and the second outer coating.

Abstract: Embodiments of the present invention provide an RF conducting rod comprising a hollow portion. Particularly, the RF conducting rod comprises an elongated hollow body having a sidewall enclosing an inner volume, a first solid connector extending from a first end of the elongated hollow body, and a second solid connector extending from a second end of the elongated hollow body. Each of the elongated hollow body, the first solid connector and the second solid connector is formed from an electrically conductive material.

Abstract: Disclosed herein is a class of mm and sub mm wavelength amplifiers and oscillators operating with miniature helical slow wave circuits manufactured using micro fabrication technology. The helices are supported by diamond dielectric support rods. Diamond is the best possible thermal conductor, and it can be bonded to the helix. The electron beam is transmitted, not through the center of the helix, but around the outside. In some configurations the RF power produced may be radiated directly from the slow wave circuit. The method of fabrication, which is applicable above 60 GHz, is compatible with mass production.

Abstract: An electrode-less plasma lamps, comprising generally of a bulb containing a gas-fill that is excited to produce light using radio-frequency (RF) energy. In specific embodiments, the use of grounded coupling-elements with integrated bulb assemblies simplifies manufacturability, improves resonant frequency control, and enables the use of solid, partially filled, and hollow lamp bodies.

Abstract: A quarter wave coaxial cavity resonator for producing corona discharge plasma from is presented. The quarter wave coaxial cavity resonator has a folded cavity made of opposing concentric cavity members that are nested together to form a continuous cavity ending in a aperture. A center conductor with a tip is positioned in the cavity. The folded cavity advantageously permits the coaxial cavity resonator to resonate at a lower operating frequency than an unfolded quarter wave coaxial cavity resonator of the same length. Embodiments of the quarter wave coaxial cavity resonator use narrower apertures to reduce radiative losses, and include center conductors that are reactive load elements, such as helical coils. When a radio frequency (RF) oscillation is produced in the quarter wave coaxial cavity resonator, corona discharge plasma is formed at the tip of the center conductor. The corona discharge plasma can be used to ignite combustible materials in combustion chambers of combustion engines.

Abstract: A dielectric window for a plasma treatment device for a plasma treatment device that uses microwaves as a plasma source. The dielectric window is circular-plate-shaped and allows microwaves to propagate. The dielectric window has a recess that has an opening on the lower-surface side and that indents in the plate thickness direction of the dielectric window, and is provided to the lower surface at which plasma is generated when the dielectric window is provided to the plasma treatment device. The recess has a bottom surface extending in the direction perpendicular to the plate thickness direction, and a side surface extending in the plate thickness direction from the circumferential edge of the bottom surface toward the opening of the recess. In addition, an inclined surface extends at an incline relative to the plate thickness direction from the opening-side circumferential edge of the side surface toward the opening of the recess.

Abstract: A lighting apparatus includes an emitter having a plasma bulb and a driver which provides an RF signal to the emitter to drive the plasma bulb. The lighting apparatus may be used for various applications including illuminating plants and organisms in an aquatic environment, growing plants, facility lighting, and other applications.

Abstract: In a magnetron and a plasma waveguide through which a microwave oscillated from the magnetron moves, there is provided a plasma waveguide including a plurality of step parts formed at any one side on an inner side surface of the waveguide, and a block part of a predetermined height formed at any other side on the inner side surface of the waveguide, wherein the block part is formed at a side opposite to a boundary part between the plurality of step parts.

Abstract: Disclosed herein is a class of mm and sub mm wavelength amplifiers and oscillators operating with miniature helical slow wave circuits manufactured using micro fabrication technology. The helices are supported by diamond dielectric support rods. Diamond is the best possible thermal conductor, and it can be bonded to the helix. The electron beam is transmitted, not through the center of the helix, but around the outside. In some configurations the RF power produced may be radiated directly from the slow wave circuit. The method of fabrication, which is applicable above 60 GHz, is compatible with mass production.

Abstract: Systems and methods for compensating for harmonics produced during plasma processing in a plasma chamber are described. One of the methods includes retrieving a measurement of a combined waveform. The combined waveform includes a fundamental waveform and a harmonic waveform. The combined waveform defines a voltage proximate to a surface of a chuck, which is coupled to a radio frequency (RF) transmission line. The RF transmission line is coupled to an impedance matching circuit. The impedance matching circuit is coupled to an RF generator. The method further includes extracting the fundamental waveform from the combined waveform, determining a difference between a magnitude of the combined waveform and a magnitude of the fundamental waveform, and controlling the RF generator to compensate for the difference.

Abstract: A microwave waveguide apparatus for generating plasma includes a waveguide which has first and second ends and propagates microwave from input end such that the microwave propagates from the first end to the second end, a circulator device having a first port, a second port coupled to the first end, and a third port coupled to the second end, the circulator device being structured such that the microwave is received at the first port, propagates from the second port to the first end, is received at the third port from the second end and is returned toward the input end, and a matching device which is interposed between the input end and the circulator device and reflects part of the microwave received at the third port and returned toward the input end to the first port. The waveguide has a slot-hole extending along the microwave propagation direction in the waveguide.