Abstract: A lithographic apparatus includes an illumination system configured to provide a beam of radiation, a first support structure configured to support a patterning device, a second support that includes a substrate holder for holding a substrate, a projection system configured to project the patterned beam of radiation onto the substrate, and a servo unit configured to position the substrate holder. The apparatus further includes a sensor unit configured to determine a distance of at least one location point on the surface of the substrate relative to a reference plane, a memory unit configured to store surface information of the substrate based on respective distances of corresponding location points on the substrate surface, and a calculating unit configured to determine a feed-forward set-point signal based on the stored surface information, such that the feed-forward set-point signal is forwardly fed to the servo unit in order to position the substrate holder.

Abstract: A method is provided for converting joystick deflection into a speed of relative motion between a image system and a workpiece stage in a computer vision system. The conversion of joystick deflection into speed may be described in terms of a speed/deflection profile that corresponds a present lens characteristics of the system. In one embodiment, the speed/deflection response of the system depends relatively strongly on the present lens characteristic at relatively lower deflections and depends on relatively weakly on the present lens characteristic as the deflection approaches a maximum deflection. The system is advantageous in that, for any lens used, it maintains consistent ergonomic and visual feel at small joystick deflections which typically occur during ostensible precision maneuvers, but is also able to provide fast long-range traverses for large joystick deflections.

Abstract: Three rotation sensors circumferentially arranged at 90 degree intervals in a disk code wheel attached to a motor's output shaft respectively output a signal corresponding the rotational speed of the wheel. An error component of one period (one-periodic component) or an error component of two period (two-periodic component) is generated per rotation when the code wheel is eccentric to the output shaft or is elliptically deformed, respectively. Control means averages the signals of the first and second sensors to obtain a first correction signal and subtracts the signal of the third sensor from the signal of the first sensor to obtain a second correction signal while removing the two-periodic component. The control means subtracts or adds the first correction signal relative to the second correction signal upon coinciding these signals in phase and amplitude to calculate a rotation measurement signal from which the periodic components are removed.

Abstract: An autonomous machine comprises driving means for moving the machine along a surface of an area, and a navigation system. The navigation system causes the machine to follow a boundary of the area, storing path information on the path travelled by the machine as the machine follows the boundary and compares when the machine has returned to a previously visited position in the area. The navigation system compares the latest section of the path travelled by the machine with information representing a section of the path previously stored in the memory and decides when the new path information and previously stored path information are substantially the same.

Abstract: Generally, a method of determining a position of a robot is provided. In one embodiment, a method of determining a position of a robot comprises acquiring a first set of positional metrics, acquiring a second set of positional metrics and resolving the position of the robot due to thermal expansion using the first set and the second set of positional metrics. Acquiring the first and second set of positional metrics may occur at the same location within a processing system, or may occur at different locations. For example, in another embodiment, the method may comprise acquiring a first set of positional metrics at a first location proximate a processing chamber and acquiring a second set of positional metrics in another location. In another embodiment, substrate center information is corrected using the determined position of the robot.

Abstract: An apparatus and a method for adjusting components of an optical system, the components including an adjustment device. An electric positioning motor can be engaged onto the adjustment device of the components. An electrical generator is electrically connected to the positioning motor. The generator can be manually operated using an operating element, thereby effecting an adjustment of the component.

Abstract: A positioning device that includes a pivotable shaft and a pivot drive mechanism, which has a stator and a rotor that moves relative to the stator. A position measuring arrangement includes a first element and a second element that moves in relation to the first element, wherein the rotor and the first element are connected, fixed against relative rotation, with the shaft. The positioning device further includes a bearing unit, wherein, starting at one end of the shaft, first the first element, then the bearing unit, and thereafter the rotor are arranged along the shaft.

Abstract: A stage assembly (10) for moving and positioning a device (26) includes a device table (20), a device holder (24) that retains the device (26), and a stage mover assembly (14). The stage assembly (10) includes one or more features that can isolate the device holder 24 and the device (26) from deformation. In some embodiments, the stage assembly (10) allows precise rotation of the device (26) between a first position (42) and a second position (44) without influencing the flatness of the device (26) and without deflecting and distorting the device (26). For example, the stage assembly (10) can include a carrier (60) and a holder connector assembly (62). The carrier (60) is supported above the device table (20) and rotates relative to the device table (20). The holder connector assembly (62) connects the device holder (24) to the carrier (60). Further, the stage assembly (10) can include a holder mover (120) that rotates the device holder (24) relative to the device table (20).

Abstract: A method of controlling a rotational velocity of a rotatable member during initialization of an analog encoder unit that generates a channel A signal and a channel B signal, includes the steps of processing the channel A signal and the channel B signal to generate a feedback signal, an integrity of the feedback signal being maintained even if only one of the channel A signal and channel B signal is functional; and controlling the rotational velocity of the rotatable member during the initialization of the analog encoder unit based on the feedback signal generated by processing the channel A signal and the channel B signal.

Abstract: A planar positioning system having a rigid base, and first and second linear actuator means mounted to the rigid base, the first and second linear actuator means being arranged orthogonal to one another. A rigid reference surface (2A, 2B) is mounted to the base, (1) and a moveable platform (17) for holding a workpiece is supported for movement on the rigid reference surface (2A, 2B). First and second guiding means are coupled to moveable portions of the respective first and second actuator means, the first and second guiding means being arranged to bear on the moveable platform for transmission of forces thereto from the respective first and second actuator means to effect movement of the platform (17) on said rigid reference surface (2A, 2B). The first actuator means may comprise two linear actuators (4A, 4B) parallel to one another and spaced apart with the second linear actuator means (8) orthogonal thereto and arranged in an H-shaped configuration.

Abstract: A stage assembly (224) for moving and positioning a device (200) relative to a mounting base (232) includes a stage base (202), a stage (206), a stage mover assembly (204), and a reaction frame assembly (230). The stage mover assembly (204) moves the stage (206) along an X axis, along a Y axis and about a Z axis. The reaction frame assembly (230) is coupled to the stage mover assembly (204) and reduces the magnitude of the reaction forces created by the stage mover assembly (204) that are transferred to the stage (206) and the mounting base (232). In one embodiment, the reaction frame assembly (230) includes a first mass assembly (256) and a first mass support assembly (258). In this embodiment, the first mass assembly (256) is coupled to the stage mover assembly (204), and the first mass support assembly (258) supports the first mass assembly (256) relative to the mounting base (232) and allows the first mass assembly (256) to move relative to the mounting base (232) along the Z axis.

Abstract: Robot system incorporates a versatile end effector that can be used to transport wafers, map wafers, and autocalibrate the movements of the robotic system. Typically, the end effector of the invention is rotatably and/or pivotably coupled to a robotic arm and includes an optical sensor system whose light path preferably includes a directional component that extends along a lengthwise axis of the end effector. Preferably the end effector is independently movable about at least two axes. These characteristics, singly or in combination, allow the end effector to carry out transport, mapping, and autocalibration functions within a relatively small volume either horizontally, vertically, or at other desired orientations.

Abstract: An apparatus rotates a sample to facilitate an accurate analysis of the sample. The apparatus includes a sample stage on which a plurality of samples are supported, a rotatable cap and a linearly movable plate for placing a selected one of the samples at an analysis position, and a rotating stage that supports the sample stage, rotatable cap and movable plate. The rotating stage is rotatable about an axis of rotation that intersects the analysis position. Once the selected sample is placed at the analysis position by the rotation of the cap and the linear movement of the plate, the selected sample is rotated by the rotating stage. The analysis process can be selectively or sequentially carried out with respect to the plurality of samples with a high degree of efficiency and without the associated drive mechanisms experiencing high loads.

Abstract: There is provided a small-sized and slim driving device which is easy to manufacture and capable of producing high output. A magnet has a cylindrical shape, and at least the outer peripheral surface of the magnet is circumferentially divided into n sections magnetized so as to have alternately different poles. The magnet can rotate about a rotational axis of the cylindrical shape. A coil is arranged axially of the magnet and parallel thereto. An outer magnetic pole portion is disposed to be magnetized by the coil, and has a plurality of hair comb tooth-shaped portions opposed to the magnet and arranged around the magnet such that an angle corresponding to the circumferential width of each of the hair comb tooth-shaped portions opposed to the magnet about the rotational axis of the hollow cylindrical shape of the magnet is equal to a predetermined angle A.

Abstract: The present invention is related to an operating device (200) for driving and controlling the opening and closing of an electrical high voltage or medium voltage switching apparatus, such as a switch or a circuit breaker. The operating device comprises a rotating electric machine (201) which is operatively connected to a mobile contact (203) of the switching apparatus. The rotating electric machine (201) operates the mobile contact via a mechanical coupling (202) upon receiving control signals (208) from a control unit (205). The rotating electric machine (201) may, upon a decelerating motion of the mobile contact (203), transform the kinetic energy of the mobile contact (203) into electrical energy which can be transferred to a suitable energy storage or supply unit (204). The operating device according to the invention is especially suited to operate circuit breakers of all types.

Abstract: There is provided a small-sized and slim driving device which is easy to manufacture and capable of producing high output. A magnet has a cylindrical shape, and at least the outer peripheral surface of the magnet is circumferentially divided into n sections magnetized so as to have alternately different poles. The magnet can rotate about a rotational axis of the cylindrical shape. A coil is arranged axially of the magnet and parallel thereto. An outer magnetic pole portion is disposed to be magnetized by the coil, and has a plurality of hair comb tooth-shaped portions opposed to the magnet and arranged around the magnet such that an angle corresponding to the circumferential width of each of the hair comb tooth-shaped portions opposed to the magnet about the rotational axis of the hollow cylindrical shape of the magnet is equal to a predetermined angle A.

Abstract: An actuator comprises a magnet yoke (10a, 10b) and a carrier member (2) movable relative to the magnet yoke. The magnet yoke (10a, 10b) has at least one permanent magnet (14) and the carrier member (20) is positioned in the magnetic field produced by this magnet. The carrier member (20) has an auxiliary magnetic member (28) that produces a relative bias force between the carrier member (20) and the magnet yoke (10a, 10b). The bias force will be used to compensate for a weight applied to the device and acts as a bearing with a very large compliance. The carrier member (2) also comprises a coil (26). Passing current through the coil (26) produces a Lorentz force for further control of the actuator; alternatively, the device provides a velocity transducer by sensing the EMF generated in the coil by relative motion of the carrier member (20) and magnet yoke (10a, 10b).

Abstract: A system for acquiring knowledge from cellular information. The system has a database comprising a database management module (“DBMS”). The system also has a variety of modules, including a population module coupled to the DBMS for categorizing and storing a plurality of features (e.g., cell size, distance between cells, cell population, cell type) from an image acquisition device into the database. The system has a translation module coupled to the DBMS for defining a descriptor from a set of selected features from the plurality of features. In a specific embodiment, the descriptor is for a known or unknown compound, e.g., drug. A prediction module is coupled to the DBMS for selecting one of a plurality of a descriptors from known and unknown compounds from the database based upon a selected descriptor from a selected compound. The selected compound may be one that is useful for treatment of human beings or the like.

Abstract: An individual section glassware forming machine that includes at least one blow mold for forming articles of glassware, a sweepout station for transferring glassware to a machine conveyor, and a take-out mechanism for transferring glassware from the blow mold to the sweepout station. The take-out mechanism comprises first and second electromagnetic stators mounted in fixed position above the blow mold and the sweepout station. A first electromagnetic armature is mounted for linear motion along a horizontal axis adjacent to the first stator. A second electromagnetic armature is mounted to the first armature for linear motion along a vertical axis adjacent to the second stator. Take-out tongs are carried by the second armature for engaging and transferring glassware from the blow mold to the sweepout station.

Abstract: A semiconductor processing system includes a transfer apparatus for transferring a wafer. The transfer apparatus has a pick arm member with wings. The reference distances between the wafer located at the normal position and the wings are stored in a memory of a CPU. Detection ranges of line sensors are set in a standby position in front of a process chamber in order to detect the distances between the wafer and the wings. In the CPU, the amount of positional shift of the wafer is detected based on the reference distances and the detected distances.

Abstract: A digital encoder control method of a digital control apparatus has a driving unit, a frequency signal generating unit for generating a pulse signal of a frequency according to a driving velocity of a driven member which is driven by the driving unit, an edge detecting unit for detecting a rising-up edge and a falling-down edge of the pulse signal, and a period data detecting unit for counting period data between edges detected by the edge detecting unit. Each time the edges are detected by the edge detecting unit, the period data between the same edges as the detected edges is outputted as control velocity data of the driving unit.

Abstract: A damper assembly having adjustable damper vanes and a motor mechanically coupled for moving the damper vanes is operatively associated with an electro-optical controller for repositioning the damper vanes between a normally open and a closed position and vice versa. The electro-optical control has an opaque disk connected and movable with the damper vanes with a first bore corresponding to the open position, and a second bore corresponding to the closed position of the damper vanes. Each of the respective bores is operatively associated with a pair of coacting electronic elements consisting of a light emitting diode and a phototransistor. Each of the phototransistors communicates with an electronic system having logic circuitry so that when the light signals are detected by the phototransistor and signaled, the electronic system will actuate or stop the motor as programmed in the control logic circuitry to reposition the damper vanes.

Abstract: An intelligent control and regulating device, especially for use in the process technology for flowable substances and media, which is built into the housing of an adjusting drive mechanism or into the drive mechanism itself and which has an adjustment arrangement controlling an adjusting member via an auxiliary energy device depending on sensor signals. The inventive control and adjusting device, which reacts reliably and rapidly to changing ambient conditions, includes a parameterable process regulator which receives adjustment input signals from the external sensors.

Abstract: The invention relates to a reactor (1) for processing wafers (7) comprising at least one process chamber (5), at least one transport chamber (2) with a transport robot (3) for the wafers (7), and at least one magazine (6) for wafers (7) with a lifting mechanism (12). To safeguard a better protection against damage also for wafers (7) stored in a magazine (6), an optical detection device (13, 14, 15, 16) is provided in the reactor (1) for monitoring the position of the wafers (7) stored in a magazine (6). All wafers stored one above the other in a magazine (6) with several compartments can thus be monitored, for example by means of a simple photoelectric barrier (13, 15). It is possible in this manner to monitor not only those wafers (7) which were just previously taken out or put in by the transport robot (3), but also all other wafers (7) present in the magazine (6).

Abstract: A video display stand having dual panning axes suitable for controlling a screen direction of appliances such as a TV set or a personal computer without bumping against a wall even in a state that it is positioned very closely to the wall, and its controlling method for automatically controlling screen directions by using a driving force, including two motors being installed having gear driving shafts at one side of either a rotational base or a rotation support member of the TV set; two movement guide toothed slots each being formed along a circular arc centering a mutually opposite gear driving shaft with a predetermined width and depth, at the opposite side corresponding to the position of each motor, and having a gear portion to be engaged with the gear driving shaft at one side of each wall; and a controller for controlling driving of the motors.

Abstract: A control (200) for an infant and child swing (40) driven by a direct current motor (160) includes a user interface (312) for selecting from a plurality of swing heights (or amplitudes), a microcontroller (400) having a processor (401), a swing angle indicator (118) having a light interrupter detector (210), and a music system (410). Processor (401) receives an output signal from light interrupter detector (210) for monitoring the current swing amplitude. At the end of each swing cycle processor (401) compares the current swing amplitude with the user selected maximum swing amplitude, and, if not substantially equal, generates a control signal to adjust the power output from motor (160) so that the current swing amplitude substantially equals the user selected maximum swing amplitude. This cycle-by-cycle adjustment produces a swing arc having improved accuracy and consistency.

Abstract: Apparatus for moving a platform in X and Y directions including a first shaft secured along a first edge of the platform and oriented axially in the X direction and a second shaft secured along a second edge of the platform and oriented axially in the Y direction. First and second bearings support the first and second shafts, respectively, for axial movement. First and second linear drive shafts are oriented axially in the Y and X directions, respectively, with each drive shaft having a first end secured to a respective bearing. The drive shafts are arranged for independent axial movement in the Y and X directions and all of the shafts lie substantially in a single plane.

Abstract: A stage system includes a movable stage, a guide mechanism for guiding the stage with respect to a predetermined direction, and a preloading mechanism for producing a magnetic attraction force with which the rigidity of the guide mechanism can be increased, wherein a portion to be attracted by the magnetic attraction force is made of a material having a product of a residual magnetic flux density Br and a holding force Hc in a hysteresis curve, not greater than 100 J/m3, this being very effective to reduce the hysteresis force, which is resistance due to the residual magnetic force, as compared with the preloading attraction force, whereby high precision positioning of the stage is accomplished.

Abstract: The present invention provides a method and apparatus for determining whether a substrate is in a clamped or unclamped state on a robot blade and preferably allows the position of a properly clamped substrate to be compensated for misalignments due to substrates not at or very near to their nominal positions on the blade. A sensor unit comprising a radiation source and a detector and capable of transmitting and receiving a signal is mounted outside a transfer chamber and is positioned to direct the signal therein. A robot blade having a reflecting member is actuated through the transfer chamber and into the path of the signal. The reflecting member is preferably positioned on a clamp finger and causes the signal to be reflected to the detector of the sensor unit when the signal is incident on the reflecting member. As the reflecting member moves through the signal the output of the sensor unit switches states, thereby generating values corresponding to the position of the reflecting member.

Abstract: An industrial robot capable of preventing re-collision after colliding with an obstacle. Disturbing torque exerted on each servomotor for a robot axis is estimated by its associated disturbance estimating observer. When a hand attached to an end of a robot arm collides with an obstacle, an estimated value of disturbance given by a disturbance estimating observer exceeds a predetermined threshold, and the collision is detected. Then, each motor for driving a robot arm is drivingly controlled with a velocity command turned to “0”. Each motor for driving the robot hand is driven with torque having a predetermined magnitude (maximum magnitude) and the same sign as that of an estimated value of disturbing torque exerted on it, for a predetermined time, and then it is brought to an emergency stop. Thus, after colliding with an obstacle, the robot hand is driven in a direction such that it recedes from the obstacle.

Abstract: In a method of manufacturing an organic thin-film electroluminescent device, a plurality of thin-film luminescent portions are arranged with fine pitches on a substrate. Each of the luminescent portions is formed by organic electroluminescent material or electrode material. A mask pattern is arranged on a pattern mask moving stage which finely moves in a predetermined direction. The substrate is arranged on a substrate moving stage. The substrate is opposed against the pattern mask with a predetermined pitch. An initial positioning alignment between the substrate and the pattern mask is performed by adjusting the substrate moving stage. The luminescent material is vaporized onto a surface of the substrate through the pattern mask. The luminescent material is vaporized on the surface of the substrate after moving the pattern mask onto a non-vaporizing portion of the surface of the substrate.

Abstract: An oscillation apparatus includes an oscillation mechanism for reciprocating an oscillating roller which can be rotated in the circumferential direction and can be reciprocated along the axial direction; an oscillation-width adjustment mechanism for adjusting the oscillation width of the oscillating roller; an oscillation-mechanism drive motor for operating the oscillation mechanism; an oscillation-width adjustment motor for operating the oscillation-width adjustment mechanism; oscillation-width controller for controlling operation of the oscillation-width adjustment motor such that the oscillation width of the oscillating roller attains a designated value; and oscillation-number controller for controlling operation of the oscillation-mechanism drive motor, on the basis of the number of revolutions of the plate cylinder, such that the number of oscillations of the oscillating roller per unit number of revolutions of the plate cylinder attains a designated value.

Abstract: An extruder driving apparatus is provided in which a speed change gear mechanism is disposed in a position allowing the speed change gear mechanism to rotate at a much lower rotational speed, whereby a noise level is reduced and a seizing trouble is more surely avoided. The extruder driving apparatus comprises a main motor; a planetary gear mechanism including a torque input portion driven by the main motor and outputting a driving force after reducing a rotational speed of the main motor; an output distributing gear mechanism for distributing a driving force from an output portion of the planetary gear mechanism to a plurality of rotor drive shafts arranged parallel to each other; coupling units for connecting one ends of the rotor drive shafts to a plurality of rotors disposed on the extruder side; and thrust bearings for supporting the other ends of the rotor drive shafts to bear thrust forces imposed from the rotors.

Abstract: A rotary magnetic head unit has a non-contact type transmission device capable of reliably performing non-contact transmission both in signal and power supply systems and designed so as to be smaller in size. The non-contact type transmission device is formed of a rotating member and a fixed member each having a power supply wiring section for transmitting a power supply, a signal wiring section for transmitting a signal, and a crosstalk prevention section positioned between the power supply wiring section and the signal wiring section to prevent crosstalk between these sections. If a reproducing head formed of a magnetoresistive element is used by being supplied with a bias current from the power supply transmitted by the power supply wiring sections of the rotary and fixed members, the rotary magnetic head unit uses bias current control means to change the bias current supplied to the reproducing head according to the amount of wear of the recording head during reproduction from signals from magnetic tapes.

Abstract: The present invention is embodied in an automated system for the positioning and support of a machine tool within a workpiece supporting assembly, comprising a pair of generally parallel, planar longitudinal translation modules affixed to the assembly and having longitudinal sliding pads and a longitudinal movement device, a transverse translation module affixed to the longitudinal sliding pads in a generally perpendicular orientation to the longitudinal modules and having transverse sliding pads and a transverse movement device.

Abstract: A circuit on a curved surface is provided where the circuit includes at least one circuit element on the curved surface, at least one conductive path on, and integral with, the curved surface, where the conductive path is connected to the circuit element, and means for supplying power along the conductive path to the circuit element. The curved surface may be a helmet, in which case a plurality of pairs of light emitting elements may be provided thereon where the pairs emit light sequentially one pair at a time in order to maximize the brightness of the light emitted and maximize battery life. Also, means for receiving an infrared or ultrasonic signal may be provided such that the light emitting elements emit light in a certain manner as a result of the signal being received.

Abstract: Positioning apparatus to place a reference point at selected locations in a plane. Two carriages are independently mounted to a carriage rail. The rail bears location references and the carriage carry sensors responsive to them to learn their positions along the carriage rail. Guideways and guide rails are mounted in pairs to a respective carriage and to an interface member bearing the reference point. They form an angle between them such that the interface member moves in the plane as a function of the locations of the carriages along the axis and relative to each other. Drivers drive the carriages in response to commands related to the location of the carriages.

Abstract: The present invention provides a method and apparatus for determining whether a substrate is in a clamped or unclamped state on a robot blade and preferably allows the position of a properly clamped substrate to be compensated for misalignments due to substrates not at or very near to their nominal positions on the blade. A sensor unit comprising a radiation source and a detector and capable of transmitting and receiving a signal is mounted outside a transfer chamber and is positioned to direct the signal therein. A robot blade having a reflecting member is actuated through the transfer chamber and into the path of the signal. The reflecting member is preferably positioned on a clamp finger and causes the signal to be reflected to the detector of the sensor unit when the signal is incident on the reflecting member. As the reflecting member moves through the signal the output of the sensor unit switches states, thereby generating values corresponding to the position of the reflecting member.

Abstract: An exposure apparatus includes an exposure device disposed between a mask and an object. The exposure device exposes a pattern of the mask onto the object. The apparatus also includes a mask stage associated with the exposure device to hold the mask, and a drive to move the mask stage. At least part of the drive is connected to a first support structure so that a reaction force exerted by movement of the mask stage by the drive is transferred to the first support structure. A second support structure is provided, which is dynamically isolated from the first support structure. A position detector is supported by the second support structure, and detects a position of the mask stage.

Abstract: The duty of a current to be supplied to an injection motor is calculated on the basis of the ratio between set injection time for which the injection motor operates and molding cycle time, a shaft torque of the injection motor is calculated on the basis of a set maximum injection force of the injection molding condition, a maximum current for the injection motor is determined on the basis of the calculated shaft torque, and it is decided that the injection motor is overloaded, an alarm is given, a duty for a current that enables continuous molding is retrieved for the maximum current, a state that enables continuous molding is displayed and the molding cycle time determining the duty of the current that enables continuous molding is corrected when the current having the calculated desired duty is smaller than the maximum current.

Abstract: In accordance with the described invention, a stepper motor that drives a printer's movable subsystem, e.g. a sled-mounted ink-jet service station, is replaced with a less expensive and quieter DC motor, and continuous positional feedback is obtained via a fixed subsystem-mounted optical sensor array in cooperation with a movable subsystem-mounted code strip that includes a home-position encoding region. The code strip produces in the optical sensor array, in reflective response to a fixed subsystem-mounted light source, a plurality of modulated signals as the substantial extent of the code strip passes by, thereby enabling positional tracking of the movable subsystem's motion, and produces a secure home-position identification signal set when the homing patch is in the `view` of the array.

Abstract: A pair of complementary magnetic actuators controls a stage in a high-precision positioning instrument in a single coordinate direction. Additional pairs of complementary magnetic actuators can be used to provide control of the stage in other coordinate directions. A small current through the windings of both magnetic actuators provides a zero net force on the fine stage, thus maintaining the position of the fine stage. The small current used to control the fine stage minimizes the RMS power gain. By increasing the current in one magnetic actuator while decreasing the current in the other, a net force is generated for large accelerations of the stage. Control of the magnetic actuators is simplified by simultaneously increasing and decreasing the current through the windings of the complementary magnetic actuators prior to accelerating the stage. Additionally, a feedforward command can control the magnetic actuators to decrease the settling time of the system.

Abstract: A method for position determination of a rotating drive element with the aid of a measuring system is indicated, which comprises an absolute and an incremental measuring subsystem. Here, following the start of a rotary movement, absolute position measurement values are continuously determined and transmitted to a subordinated evaluation unit until a reference marking at a known absolute position has been reached. A comparison of the measurement values, known from the continuing absolute position measurement, with the known absolute position and, if required, a necessary correction, take place at the reference marking. Thereafter the reference marking is used as the reference position for the incremental measuring subsystem, the continuously absolute position is determined on the part of the measuring system and is transmitted in digital form to the evaluation unit (FIG. 1).

Abstract: The present invention provides a method and apparatus for monitoring an infusion pump (10). The method and apparatus provides an encoder (101) which is used with a motor (65) of the infusion pump (10) and a monitoring method which effectively provides rotational directional information. The present invention utilizes a state transition of a first switch (111) indexed against a constant signal from a second switch (113) corresponding to the center of a flag (117) or sector (119).

Abstract: A control system for a tuning fork gyroscope uses motor frequency to control motor amplitude. The tuning fork gyroscope has a drive signal input and an output signal from which motor frequency is determined. A phase/frequency detector generates an error signal by comparing the actual oscillation phase of the output signal with the phase of a reference signal from a crystal controlled frequency synthesizer. The error signal is filtered in a feedback loop control to reduce phase detector ripple. The output of the loop controller is then used to determine the appropriate drive signal to drive the error signal to a constant and maintain a predetermined oscillation frequency.

Abstract: An angular division apparatus for circumferentially dividing a rotating object into a plurality of areas by using Doppler pulses includes an optical head for applying a beam emitted from a light source unit to a rotating object and detecting Doppler pulses based on a shift of the frequency of the light scattered from the rotating object, and a counting unit for counting the Doppler pulses output from the optical head to determine the number of pulses for one revolution of the rotating object. The number of Doppler pulses for one revolution is divided by a division number for dividing the rotating object into a plurality of areas in the angular direction. The rotating object is divided into a plurality of areas in the angular direction thereof by using the number of Doppler pulses per divided area.

Abstract: An electronic throttle assembly uses a torque motor and mechanical system to position the throttle. The assembly is configured to keep the throttle slightly open during times of electrical power failure to the torque motor. Inherent electromagnetic qualities of the torque motor provide a reluctance torque that varies depending on internal stator/rotor geometry and is present in the absence of electrical power to the motor. A mechanical system provides a counter torque. Aligning the throttle to the desired slightly open position at a point where the reluctance torque is countered by the mechanical torque, allows an engine controlled by the throttle to continue to operate even if electrical power to the torque motor is lost.

Abstract: An electrical power efficiency of the driving circuit is improved. The OP amplifier in the control arithmetic circuit compares a controlling amount with an added value of a target value and an AC signal and then outputs the comparing signal to the driving circuit. Since the transistor in the driving circuit is controlled in switching by the comparing signal, its loss of electrical power is reduced. Accordingly, an electrical power efficiency of the driving circuit is improved. In addition, the driving circuit drives the actuator section, a controlling amount of the actuator is detected by the position sensing unit and it is fed back as the controlling amount to the controlling arithmetic circuit.

Abstract: A method and apparatus for orienting a disk to precisely align a fiducial mark on the disk relative to an external reference point while gripping the disk only along its circumferential edge.

Abstract: A wafer position error detection and correction system determines the presence of a wafer on a wafer transport robot blade. The system also determines a wafer position error by monitoring the position of the wafer with respect to the blade with one sensor which is located proximate to each entrance of a process chamber. When a wafer position error is detected, the system determines the extent of the misalignment and corrects such misalignment if correctable by the wafer transport robot or alerts an operator for operator intervention. The system incorporates a transparent cover on the surface of the wafer handling chamber and four optical detection sensors disposed on the surface of the transparent cover, in which each sensor is placed proximate to the entrance of the process chamber. In addition, an I/O sensor is placed adjacent the I/O slit valve to detect and correct wafer position errors.