Photoelectric Or Optical-type Measuring Instruments Patents (Class 318/640)
  • Patent number: 5973471
    Abstract: A micromanipulator system is comprised of a microscope, a micromanipulator for three-dimensionally manipulating a fine instrument in the field of the microscope, image pick-up device for picking up an image within the microscopic field, reference position setting device for setting a reference position of the micromanipulator along a height direction, detecting device for detecting a height position of a tip portion of the manipulator as positional information measured from the reference position along the height direction, and a display device for combining the image of the image pick-up device with the positional information detected by the detecting device to display the combined image thereon. The joy stick includes a manipulating lever, X- and Y- axial direction detectors, a control signal generation device, and a push button switch. The manipulating lever is swingable in an arbitrary direction with the center of a base.
    Type: Grant
    Filed: December 23, 1998
    Date of Patent: October 26, 1999
    Assignee: Shimadzu Corporation
    Inventors: Makoto Miura, Kohji Inoue, Mitsuo Yamashita, Takahiro Kaneuchi
  • Patent number: 5955857
    Abstract: A wafer conveyor system and controlling method therefor sends/receives a semiconductor wafer to/from a designated place includes a stocker for storing and delivering a package box with a plurality of wafers therein, a transferring path for connecting one stocker with another stocker, a carrier traveling along the transferring path for transporting the package box between the stockers, an automatic charging device placed to any one position of the transferring path for charging a battery loaded onto the carrier traveling along the transferring path when the battery is discharged, and a central control unit for controlling the driving of the stocker, transferring path, carrier and automatic charging device.
    Type: Grant
    Filed: August 14, 1996
    Date of Patent: September 21, 1999
    Assignee: Hyundai Electronics Industries Co., Ltd.
    Inventors: Chang-Heon Kwon, Ki-Ho Lee, Hae-San Ryoo, Yong-Pyo Kim
  • Patent number: 5952806
    Abstract: An inner force sense controller includes an actuator for exerting a reaction force on a moving object such as a manipulator, a sensor for producing a detecting signal indicative of current position of the moving object and a controlling unit connected to the actuator and the sensor; the controlling unit calculates a current velocity so as to determine the direction of motion, and selects one of the data tables assigned to the direction of the motion for reading out a target reaction force; and the operator feels the inner force sense to be different depending upon the direction of the motion.
    Type: Grant
    Filed: October 16, 1997
    Date of Patent: September 14, 1999
    Assignee: Yamaha Corporation
    Inventor: Shigeru Muramatsu
  • Patent number: 5939852
    Abstract: A stage feeding device has a movable guide which is guided on a reference surface of a platen to be movable in the Y-direction, a Y-linear motor for moving the movable guide in the Y-direction, a movable stage which is supported by the movable guide to be movable in the X-direction, and carries an object, and an X-linear motor for moving the movable stage in the X-direction. The stator of the X-linear motor is supported by a second stationary guide to be movable in only the Y-direction independently of the movable guide, and is moved in the Y-direction by a driving mechanism. The stator of the Y-linear motor and the second stationary guide are fixed to the base, and mount members for removing vibrations are arranged between the base and the platen.
    Type: Grant
    Filed: August 28, 1997
    Date of Patent: August 17, 1999
    Assignee: Canon Kabushiki Kaisha
    Inventors: Kotaro Akutsu, Eiji Osanai, Hirohito Ito
  • Patent number: 5923140
    Abstract: A detecting device includes: an actuator with its end placed in a conveying path of a moving object such as a sheet etc., pivotally supported by a rotary shaft so that it can sway as the moving object passes by; a slit arm integrally formed with the actuator and having a slit therein and an optical sensor disposed below the actuator. In this arrangement, the slit arm having a slit therein is placed in the path of the optical sensor. An urging portion for returning the actuator to the standby position is provided for the slit arm. The abutment surface P of the urging portion abutting the unit base of the optical sensor is formed inclined. A component force E causing the actuator to bounce, which is proportional to a repulsive force D normal to the abutment surface P when the abutment surface abuts the unit base abutment surface P, is smaller than the repulsive force D. Therefore, the distance of the bouncing of the actuator becomes smaller, thus preventing chattering.
    Type: Grant
    Filed: August 11, 1997
    Date of Patent: July 13, 1999
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Shinichi Azumi, Kouji Yamaji
  • Patent number: 5907976
    Abstract: An apparatus for determining and encoding the position of a control handle on a control stand of a locomotive or other railway transit vehicle utilizing a rotational, absolute encoder rigidly mounted adjacent to the axle to which the control handle is attached for pivotal motion, wherein a drive transfer means interconnecting the control handle and/or axle with encoder has a driving ratio that will permit full partial rotation of the control handle, which is typically less than 90 degrees, to rotate the encoder axle through a significantly greater rotational angle not exceeding 360 degrees, for the purpose of making fuller use of the sensitivity and resolution range of the encoder.
    Type: Grant
    Filed: June 20, 1997
    Date of Patent: June 1, 1999
    Assignee: Westinghouse Air Brake Co.
    Inventors: Ralph Santoro, Jr., Paul J. Kettle, Jr., Vincent Ferri, Craig A. Miller
  • Patent number: 5900708
    Abstract: The apparatus includes a combination of a microscope and an interactive image analysis system comprising a camera and a computer work station. The purpose of the apparatus is to facilitate the interactive control of coordinate displacements of the stage of the microscope. For each coordinate x and y an electromechanical control channel is established. At the input of the control channel two cascaded wheels in a coaxial arrangement and two angle encoders are used as a detached, independent tool which is not kinematically linked to the stage. In the middle of the control channel, the pulses of the angle encoders undergo a non-linear transformation. A processor performs a calculation which discriminates between slow displacements and fast displacements. At the end of the control channel, a flat, easily accessible platform of the microscope stage has two working areas, one for manual previewing and one for interactive scanning of a specimen.
    Type: Grant
    Filed: May 6, 1997
    Date of Patent: May 4, 1999
    Assignee: Becton, Dickinson and Company
    Inventors: Peter Den Engelse, Alexander Flipse, Walter Janus
  • Patent number: 5886496
    Abstract: A tilt servo controlling apparatus is provided with: an optical pickup for emitting a light beam onto an optical record medium and detecting a reflection light from the optical record medium to thereby output a detection signal; a level detecting device for detecting a level of the detection signal outputted by the optical pickup; a tilt error correcting device for correcting a tilt error due to an aberration, which is generated by a tilt angle between (i) a normal line of a surface of the optical record medium at a position irradiated with the light beam and (ii) an optical axis of the light beam; and a tilt error correction controlling device for outputting a control signal to control a correction amount of the tilt error correcting device, by giving a variation to the control signal on a time base and adjusting the control signal so that the level detected by the level detecting device be optimized with respect to the variation of the control signal.
    Type: Grant
    Filed: April 17, 1998
    Date of Patent: March 23, 1999
    Assignee: Pioneer Electronic Corporation
    Inventors: Junichi Furukawa, Kiyoshi Tateishi, Noriaki Murao
  • Patent number: 5828198
    Abstract: The apparatus includes a combination of a microscope and an interactive image analysis system comprising a camera and a computer work station. The purpose of the apparatus is to facilitate the interactive control of coordinate displacements of the stage of the microscope. For each coordinate x and y an electromechanical control channel is established. At the input of the control channel two cascaded wheels in a coaxial arrangement and two angle encoders are used as a detached, independent tool which is not kinematically linked to the stage. In the middle of the control channel, the pulses of the angle encoders undergo a non-linear transformation. A processor performs a calculation which discriminates between slow displacements and fast displacements. At the end of the control channel, a flat, easily accessible platform of the microscope stage has two working areas, one for manual previewing and one for interactive scanning of a specimen.
    Type: Grant
    Filed: May 6, 1997
    Date of Patent: October 27, 1998
    Assignee: Becton Dickinson and Company
    Inventors: Peter Den Engelse, Alexander Flipse, Walter Janus
  • Patent number: 5818188
    Abstract: A noncontacting power transfer apparatus, a noncontacting signal transfer apparatus, to be referred to below as a power coupler and a signal coupler, respectively, and a separate machine apparatus that uses these couplers are disclosed. The power coupler is composed of a primary side and a secondary side that are fixed to a static unit and rotatable unit of the machine apparatus, respectively, such that its output does not vary with arbitrary rotation by the rotatable unit. The signal coupler is composed of receiving side portion having a electric-to-light conversion device that converts an electric signal to an optical signal of rotational symmetry relative to the axis of rotation of the rotatable unit and a photoelectric conversion device that converts an optical signal to an electric signal. Accordingly, the rotatable unit can be supplied with power from the static unit even while rotating, and moreover, can communicate with the static unit.
    Type: Grant
    Filed: December 9, 1996
    Date of Patent: October 6, 1998
    Assignee: Kabushiki Kaisha Yaskawa Denki
    Inventors: Junji Hirai, Yoshiji Hiraga, Kenji Hirose, Yuji Nitta, Hiroyuki Hamamoto, Kenji Nomura
  • Patent number: 5808439
    Abstract: A satellite mechanism is provided for tilting a directional device such as an earth sensor, telescope, antenna, reaction wheel, etc. through a small angle using flexural supports which provide rigidity in all directions. The tilting mechanism is flexurally supported (semi-fixed) on two points and moved (pivoted) through a small arc at a driven point by an eccentric drive. The flexurally supported points comprise a diaphragm whose periphery is clamped to a supporting structure while one side of a flexural pivot is attached at the center and the other side of the flexural pivot is attached to the earth sensor or pivoted element. The driven point has a similar diaphragm whose periphery is attached eccentrically to an harmonic drive motor. Accordingly, the directional device may be driven through a small angle without moving the entire satellite.
    Type: Grant
    Filed: December 20, 1996
    Date of Patent: September 15, 1998
    Inventor: Peter E. Spanenberg
  • Patent number: 5801823
    Abstract: Apparatus for determining the location of the eyes of a driver for a vehicle having a central inside rearview mirror, comprises a distance sensor, an orientation detector, a signal processor. The distance sensor senses the distance between the central mirror and the driver's head. The orientation detector detects the orientation of the inside mirror. Once the driver has manually adjusted the inside mirror, the driver operates a switch, which activates both the distance sensor and the orientation detector. The signal processor, preferably a microcomputer, uses the equation of a parabola in space to determine the location of the parabola's focus, and thereby determine the location of the driver's eyes.
    Type: Grant
    Filed: February 21, 1997
    Date of Patent: September 1, 1998
    Inventor: Borje A. Brandin
  • Patent number: 5798622
    Abstract: A noncontacting power transfer apparatus, a noncontacting signal transfer apparatus and a separate machine apparatus that uses these couplers are disclosed. The power coupler is composed of a primary side and a secondary side that are fixed to a static unit and rotatable unit of the machine apparatus, respectively, such that its output does not vary with arbitrary rotation by the rotatable unit. The signal coupler is composed of receiving side portion having a electric-to-light conversion device that converts an electric signal to an optical signal of rotational symmetry relative to the axis of rotation of the rotatable unit and a photoelectric conversion device that converts an optical signal to an electric signal. Accordingly, the rotatable unit can be supplied with power from the static unit even while rotating, and moreover, can communicate with the static unit. Further, the rotatable unit can be easily attached to the static unit and can be removed from the static unit.
    Type: Grant
    Filed: July 3, 1996
    Date of Patent: August 25, 1998
    Assignee: Kabushiki Kaisha Yaskawa Denki
    Inventors: Junji Hirai, Yoshiji Hiraga, Kenji Hirose, Yuji Nitta, Hiroyuki Hamamoto, Kenji Nomura
  • Patent number: 5789884
    Abstract: A control arrangement for a motorised trolley having a handle by which to control a driving motor which propels the trolley. The handle works a transducer which supplies a control signal for the driving motor. Then handle has limited movement relative to the trolley in the fore and aft direction but is stiffly connected to the trolley in the vertical and lateral direction whereby the trolley can be manually controlled by the handle in pitch and yaw by the pedestrian operating the trolley. The motor is controlled in a proportional or integral manner to accelerate, to decelerate, or to maintain a constant (cruise) velocity of the trolley. The acceleration, deceleration and velocity maintenance are achieved by ramping and constant voltages applied, preferably by a microprocessor-based control system, to a D.C. shunt motor which drives one or more wheels of the trolley.
    Type: Grant
    Filed: July 16, 1996
    Date of Patent: August 4, 1998
    Inventor: Frank John Thompson Hancock
  • Patent number: 5789743
    Abstract: An optical scanning device is described, which is provided with a scanning element having a reflecting measuring reference face (31), and a position detection system (80) which supplies, inter alia, a measuring signal (S.sub.z) for the position of the scanning element in a direction perpendicular to the reference face. By implementing the scanning element in a very thin form and by correcting said measuring signal (S) by means of the polygon bending signal (S.sub.b) supplied by the position detection system, a very rapid and accurate scanning can be realized.
    Type: Grant
    Filed: February 6, 1997
    Date of Patent: August 4, 1998
    Assignee: U.S. Philips Corporation
    Inventor: Gerard E. Van Rosmalen
  • Patent number: 5777721
    Abstract: A coordinate position of a stage for supporting a wafer or a reticle which is driven by a linear motor includes a stator and a mover is measured by a laser interferometer, and a thrust obtained from a deviation between the measured coordinate position and an aimed coordinate position is output to a multiplier. Further, a cosine function corresponding to a phase between the stator and the mover is obtained on the basis of the measured coordinate position and is output to the multiplier. Then, an exciting current is supplied to an armature coil of the linear motor on the basis of an output of the multiplier.
    Type: Grant
    Filed: August 28, 1995
    Date of Patent: July 7, 1998
    Assignee: Nikon Corporation
    Inventor: Susumu Makinouchi
  • Patent number: 5767650
    Abstract: A display device for sequentially displaying multiple sets of image pixels formed on a transparent mosaic through an aperture pattern formed in a substantially opaque mask. An DC gear motor and drive assembly is employed to move the mosaic through a predetermined travel path relative to the mask to sequentially register the image sets with the aperture pattern. A control system is employed to temporarily deactivate the gear motor at predetermined precise positions to display the various images through the aperture pattern.
    Type: Grant
    Filed: February 16, 1996
    Date of Patent: June 16, 1998
    Assignee: Admotion Corporation
    Inventors: Hans J. Dehli, Jaspal Sethi Attrey, Francis Frederick Dyer
  • Patent number: 5764012
    Abstract: A robot having a pair of magnetic couplings that each couple a motor in a cylindrical first chamber to an associated cylindrical ring closely spaced from the cylindrical wall of said first chamber. The robot includes a mechanism to convert rotation of each of these rings into separate motions of the robot. In the preferred embodiment, these separate motions are radial and rotational.
    Type: Grant
    Filed: April 22, 1997
    Date of Patent: June 9, 1998
    Assignee: Applied Materials, Inc.
    Inventor: Robert B. Lowrance
  • Patent number: 5757160
    Abstract: A stage used for positioning and aligning a wafer, as used in photolithography or microlithography in semiconductor manufacturing having a plurality of interferometer laser gauges placed on a movable wafer stage associated with a pair of stationary orthogonal return mirrors. A beam of light parallel to the X axes is directed through a penta prism to an interferometer laser gauges placed on the wafer stage near the wafer plane through a plurality of beamsplitters and fold mirrors. The present invention is less sensitive to rotation or twisting of the wafer stage and eliminates or reduces certain errors introduced by the rotation. Additionally, large stable return mirrors may be used, increasing the travel distance permitted by the wafer stage while reducing weight on the wafer stage. The wafer stage can be more accurately positioned and accommodate larger wafer sizes with improved positioning and alignment accuracies.
    Type: Grant
    Filed: December 23, 1996
    Date of Patent: May 26, 1998
    Assignee: SVG Lithography Systems, Inc.
    Inventor: Justin Kreuzer
  • Patent number: 5740062
    Abstract: A wafer positioning system determines the position of a wafer during processing by monitoring the position of the wafer transport robot as the robot transports the wafer by one or more position sensors. The wafer positioning system incorporates a transparent cover on the surface of the wafer handling chamber and two optical position sensors disposed on the surface of the transparent cover. The position sensors direct light through the wafer handling chamber to reflectors near the floor of the chamber which reflect the light back to the position sensors. A detector within the position sensor detects when the beam path from the position sensor to the reflector is uninterrupted. As wafers are transported through the chamber, the edge of the transported wafer interrupts the position sensor beam path causing the output of the position sensor to switch states. When the position sensor output switches, the position of the wafer transport robot is measured.
    Type: Grant
    Filed: September 30, 1996
    Date of Patent: April 14, 1998
    Assignee: Applied Materials, Inc.
    Inventors: Lloyd M. Berken, Frederik W. Freerks, William H. Jarvi, Hatice Sahin
  • Patent number: 5726548
    Abstract: A movable stage apparatus and an exposure system including a moving stage apparatus, includes a movable member capable of being driven by a driving mechanism, and first and second sets of fluid bearings. The first set of fluid bearings supports the movable member. The second set of fluid bearings is connected to a plurality of driving elements. The plurality of driving elements are connected to the movable member and are displaceable in a direction in which the movable member is supported by the first set of fluid bearings. The second set of fluid bearings supports the movable member. Also provided is a controller for applying a voltage to the plurality of driving elements so as to compensate for the postutre of the movable member when the posture of the movable member changes in response to being driven by the driving mechanism. The system further includes an exposure apparatus for exposing an object to be exposed which is mounted on the movable member.
    Type: Grant
    Filed: January 29, 1996
    Date of Patent: March 10, 1998
    Assignee: Canon Kabushiki Kaisha
    Inventors: Shinichi Chiba, Kotaro Akutsu
  • Patent number: 5717961
    Abstract: An automatic focus adjustment device which accurately performs end point detection of the range of movement of a photographic lens to smoothly drive the photographic lens completely to a focus position. The automatic focus adjustment device includes a defocus amount detection device to detect a position deviation of the image position of a subject formed by the photographic lens from an image forming plane. An actuation amount necessary to drive the photographic lens by the detected defocus amount is calculated. An actual actuation amount decision device decides whether the actual actuation amount output to drive the lens is within a permissible range predetermined for the drive.
    Type: Grant
    Filed: September 1, 1995
    Date of Patent: February 10, 1998
    Assignee: Nikon Corporation
    Inventor: Seiichi Yasukawa
  • Patent number: 5712546
    Abstract: A control system is provided for a door positioning assembly having a door mounted on a track. The door is movable between an open position and a closed position. The door has a leading edge adjacent a door opening, an edge arranged to define a second opening, and a pass door pivotably coupled to the second opening. The control system includes a proximity detector for providing a door position signal in response to the position of the door on the track system, and a user input for providing user input signals including open inputs, stop inputs including signals provided by a stop button of a user-operated switch, and close inputs in response to user commands. The system also includes a plurality of sensors for providing stop input signals in response to the position of an object located within a detection zone adjacent the door opening, in response to contact between an object and the leading edge of the door, and in response to the position of the pass door.
    Type: Grant
    Filed: January 3, 1995
    Date of Patent: January 27, 1998
    Assignee: American Metal Door Company, Inc.
    Inventors: Jeffery A. Holthouse, David C. Rice
  • Patent number: 5686804
    Abstract: A system for measuring the angle of rotation in order to determine the absolute angular position of the shaft of an electromotor is described which consists of a device for measuring the angle of rotation (10) and a control unit (11) connected to one another via an electric interface. The electric interface comprises an analog process data channel (8) and a digital parameter channel (9). The control unit (11) controls a change-over switch (7) of the process data channel (8) via the digital parameter channel (9). As a result thereof, a sine-cosine signal pair with one period for revolution is supplied via the process data channel (8) to the control unit (11) in order to determine the absolute angular position for the starting of the motor. Then, a sine-cosine signal pair with a high number of periods per revolution is supplied via the process data channel (8) in order to incrementally count the angle of rotation.
    Type: Grant
    Filed: February 14, 1996
    Date of Patent: November 11, 1997
    Assignee: Max Stegmann GmbH
    Inventor: Josef Siraky
  • Patent number: 5668629
    Abstract: The system includes a base unit sensitive to infrared (IR) signals transmitted by a mobile remote unit to an IR receiver which is placed behind a rotating set of signal blocking blinders whose position at any time defines a view angle with a position known with precision resulting in the IR signal reception scanning across an area. The base unit detects when the peak strength of the signal occurs and utilizes this data to determine the exact effective angle between the axis of the IR signal and the base unit to create an error signal used by the base unit to position the camera mounted thereon. Receivers for TILT and two PAN positions, PAN 1 and PAN 2, are used to include range calculations for ZOOM functions. Command circuitry to override the automatic tracking function is provided in the base unit.
    Type: Grant
    Filed: September 25, 1995
    Date of Patent: September 16, 1997
    Assignee: ParkerVision, Inc.
    Inventors: Jeffrey L. Parker, David F. Sorrells, John D. Mix, Richard P. Daber
  • Patent number: 5656902
    Abstract: A robot having a pair of magnetic couplings that each couple a motor in a cylindrical first chamber to an associated cylindrical ring closely spaced from the cylindrical wall of said first chamber. The robot includes a mechanism to convert rotation of each of these rings into separate motions of the robot. In the preferred embodiment, these separate motions are radial and rotational.
    Type: Grant
    Filed: October 26, 1995
    Date of Patent: August 12, 1997
    Assignee: Applied Materials, Inc.
    Inventor: Robert B. Lowrance
  • Patent number: 5637973
    Abstract: A noncontacting power transfer apparatus, a noncontacting signal transfer apparatus, and a separate machine apparatus that uses these couplers are disclosed. The power coupler is composed of a primary side and a secondary side that are fixed to a static unit and rotatable unit of the machine apparatus, respectively, such that its output does not vary with arbitrary rotation by the rotatable unit. The signal coupler is composed of receiving side portion having a electric-to-light conversion device that converts an electric signal to an optical signal of rotational symmetry relative to the axis of rotation of the rotatable unit and a photoelectric conversion device that converts an optical signal to an electric signal. Accordingly, the rotatable unit can be supplied with power from the static unit even while rotating, and moreover, can communicate with the static unit. Further, the rotatable unit can be easily attached to the static unit and can be removed from the static unit.
    Type: Grant
    Filed: February 17, 1994
    Date of Patent: June 10, 1997
    Assignee: Kabushiki Kaisha Yaskawa Denki
    Inventors: Junji Hirai, Yoshiji Hiraga, Kenji Hirose, Yuji Nitta, Hiroyuki Hamamoto, Kenji Nomura
  • Patent number: 5636137
    Abstract: An improved torque sensor, or relative angular movement sensor, comprises an input member, an output member, LED light sources, a pair of photodetector units adapted to receive light from the LED light sources, and signal processing means, in which said signal processing means is adapted to receive output signals from the photodetector units, the output signals of the photodetector units being dependent upon the light signals which they receive, and the signal processing means being adapted to process the output signals from the photodetector units so as to produce a modified output signal indicative of the relative angular displacement between, or torque applied between, the input and output member. The improvement comprises the provision of diagnostic means which continuously monitors a sum signal, .SIGMA., which comprises the sum of the output signals from the photodetector units, and which detects any variation in the sum signal due to failure of the sensor.
    Type: Grant
    Filed: August 11, 1994
    Date of Patent: June 3, 1997
    Assignee: Lucas Industries Public Limited Company
    Inventor: Roger J. Hazelden
  • Patent number: 5627442
    Abstract: The apparatus includes a combination of a microscope and an interative image analysis system comprising a camera and a computer work station. The purpose of the apparatus is to facilitate the interactive control of coordinate displacements of the stage of the microscope. For each coordinate x and y an electromechanical control channel is established. At the input of the control channel two cascaded wheels in a coaxial arrangement and two angle encoders are used as a detached, independent tool which is not kinematically linked to the stage. In the middle of the control channel, the pulses of the angle encoders undergo a non-linear transformation. A processor performs a calculation which discriminates between slow displacements and fast displacements. At the end of the control channel, a flat, easily accessible platform of the microscope stage has two working areas, one for manual previewing and one for interactive scanning of a specimen.
    Type: Grant
    Filed: October 3, 1995
    Date of Patent: May 6, 1997
    Assignee: Becton Dickinson and Company
    Inventors: Peter D. Engelse, Alexander Flipse, Walter Janus
  • Patent number: 5574348
    Abstract: A tool-receiving system 14 displaceable in one, two or three dimensions is mounted on a tool support 6 displaceable in two or three dimensions relative to the 2-dimensional or, e.g., 3-dimensional processing or drawing surface. System 14 is amenable to higher acceleration than the tool support 6. A device 30 coordinates the superposed components of displacements of tool support 6 and/or tool-receiving system 14 in such a way that the resulting maximum acceleration of the overall equipment corresponds at least to the acceleration of the system 14.
    Type: Grant
    Filed: October 6, 1994
    Date of Patent: November 12, 1996
    Inventor: Andreas Ehlerding
  • Patent number: 5574556
    Abstract: A stage mechanism suitable used in an exposure apparatus is disclosed, wherein heat generation of a coil assembly of a stage driving motor is prevented from adversely affecting a semiconductor substrate or measurement by a laser interferometer. A wafer chuck and the laser interferometer are disposed at a side of a base plate, and a stage and an electromagnetic coil for dirving the stage are disposed at the other side of the base plate. The wafer chuck and the stage are coupled to each other by a coupling member which extends through a bore formed in the base plate.
    Type: Grant
    Filed: March 25, 1996
    Date of Patent: November 12, 1996
    Assignee: Canon Kabushiki Kaisha
    Inventors: Tetsuzo Mori, Hidehiko Fujioka
  • Patent number: 5572317
    Abstract: The system includes improvements to a remote tracking system for the control of the field of view of a camera. The system provides for improved motor control for PAN and TILT functions and expanded modes of operation in both the automatic and manual operation of the system. These improvements also include several tracking response and command programs for control based upon the error between the desired position of the camera field of view and its actual position. In addition, a universal learning remote unit is provided to learn commands from the IR remote unit for those cameras that have such features.
    Type: Grant
    Filed: May 12, 1995
    Date of Patent: November 5, 1996
    Assignee: ParkerVision, Inc.
    Inventors: Jeffrey L. Parker, David F. Sorrells, Jonathan D. Mix, Richard C. Looke
  • Patent number: 5570177
    Abstract: The system includes distance measuring capability for use in the local and remote control of a camera lens for automatic and programmable control of ZOOM perspective, FOCUS, IRIS and other functions of the camera in conjunction with the programming of an included microcomputer-controlled automatic tracking system.
    Type: Grant
    Filed: June 5, 1995
    Date of Patent: October 29, 1996
    Assignee: ParkerVision, Inc.
    Inventors: Jeffrey L. Parker, David F. Sorrells, John D. Mix
  • Patent number: 5563798
    Abstract: A wafer positioning system determines the position of a wafer during processing by monitoring the position of the wafer transport robot as the robot transports the wafer by one or more position sensors. The wafer positioning system incorporates a transparent cover on the surface of the wafer handling chamber and two optical position sensors disposed on the surface of the transparent cover. The position sensors direct light through the wafer handling chamber to reflectors near the floor of the chamber which reflect the light back to the position sensors. A detector within the position sensor detects when the beam path from the position sensor to the reflector is uninterrupted. As wafers are transported through the chamber, the edge of the transported wafer interrupts the position sensor beam path causing the output of the position sensor to switch states. When the position sensor output switches, the position of the wafer transport robot is measured.
    Type: Grant
    Filed: April 5, 1994
    Date of Patent: October 8, 1996
    Assignee: Applied Materials, Inc.
    Inventors: Lloyd M. Berken, Frederik W. Freerks, William H. Jarvi, Hatice Sahin
  • Patent number: 5561519
    Abstract: The system includes improvements to a remote tracking system for motion picture as well as still picture cameras. The system provides for improved motor control for PAN and TILT functions including motor turn-off in the event of stall; the use of optical means to provide position feedback through the use of a light-blocking disk graduated on a "gray scale" which eliminates mechanical contacts; mechanical levers that are motor driven for operation of ON/OFF and ZOOM functions of a motion picture camera or shutter control for a still camera via either the base or remote unit command circuitry. The remote unit is formed as a hand-held wand and also provides audio circuitry. A space diversity RF receiver is used to improve the communication link between the remote unit and the base unit.
    Type: Grant
    Filed: June 6, 1995
    Date of Patent: October 1, 1996
    Assignee: ParkerVision, Inc.
    Inventors: Jeffrey L. Parker, David F. Sorrells, John D. Mix, Richard P. Daber
  • Patent number: 5561518
    Abstract: The system includes improvements to a remote tracking system for motion picture as well as still picture cameras. The system provides for improved motor control for PAN and TILT functions including motor turn-off in the event of stall; the use of optical means to provide position feedback through the use of a light-blocking disk graduated on a "gray scale" which eliminates mechanical contacts; mechanical levers that are motor driven for operation of ON/OFF and ZOOM functions of a motion picture camera or shutter control for a still camera via either the base or remote unit command circuitry. The remote unit is formed as a hand-held wand and also provides audio circuitry. A space diversity RF receiver is used to improve the communication link between the remote unit and the base unit.
    Type: Grant
    Filed: June 6, 1995
    Date of Patent: October 1, 1996
    Assignee: ParkerVision, Inc.
    Inventors: Jeffrey L. Parker, David F. Sorrells, John D. Mix, Richard P. Daber
  • Patent number: 5541485
    Abstract: A parallel jaw robotic gripper and method for operating the gripper to grasp an unknown object are disclosed. The parallel jaw gripper of the present invention includes two pairs of light sources and sensors mounted on opposing extensions of each gripper. The light sources and detectors on each jaw are used to produce and detect the interruption of a pair of parallel light beams and/or a pair of crossed light beams by the object to be grasped. The gripper is rotated, translated, and/or closed in accordance with the detected status of the light beams in a simple table-driven manner by which the gripper is positioned to grasp the object with a stable grasping configuration. The gripper of the present invention can grasp an object of an unknown shape without disturbing or touching the object before grasping it.
    Type: Grant
    Filed: May 6, 1994
    Date of Patent: July 30, 1996
    Assignee: New York University
    Inventors: Marek Teichmann, Bhubaneswar Mishra
  • Patent number: 5519299
    Abstract: Apparatus for determining and encoding the position of a reverser control handle on a control stand of a locomotive or other railway transit vehicle of the type having a reverser control handle attached to an axle partially rotatable through a defined angle and including a pair of stationary signal transmitting sensor means, and a pair of sensor activators secured to the axle adapted for partial rotation with the axle, whereby one each of the pair of sensor activators are positioned proximate to one each of the signal transmitting sensor means, so that any partial rotation of the axle in one given will be sensed by one such signal transmitting sensor means to provide a second signal, and partial rotation of the axle in the opposite direction will be sensed by the other signal transmitting sensor means to provide a second signal.
    Type: Grant
    Filed: November 16, 1994
    Date of Patent: May 21, 1996
    Assignee: Westinghouse Air Brake Company
    Inventors: Vincent Ferri, Ralph Santoro, Jr., Paul J. Kettle, Jr., Craig A. Miller
  • Patent number: 5517300
    Abstract: The system includes improvements to a remote tracking system for motion picture as well as still picture cameras. The system provides for improved motor control for PAN and TILT functions including motor turn-off in the event of stall; the use of optical means to provide position feedback through the use of a light-blocking disk graduated on a "gray scale" which eliminates mechanical contacts; mechanical levers that are motor driven for operation of ON/OFF and ZOOM functions of a motion picture camera or shutter control for a still camera via either the base or remote unit command circuitry. The remote unit is formed as a hand-held wand and also provides audio circuitry. A space diversity RF receiver is used to improve the communication link between the remote unit and the base unit.
    Type: Grant
    Filed: February 17, 1994
    Date of Patent: May 14, 1996
    Assignee: ParkerVision, Inc.
    Inventors: Jeffrey L. Parker, David F. Sorrells, John D. Mix, Richard P. Daber
  • Patent number: 5498944
    Abstract: An automatic focusing apparatus having an object distance data detecting mechanism having an optical system which includes a focusing lens assembly which can be driven by a motor, and a mechanism for detecting an angular velocity of the motor. The optical system further includes a motor driving mechanism for driving the motor in a direction and at an angular velocity based on object distance data obtained by the object distance data detecting mechanism to move the focusing lens assembly, and a mechanism for controlling the motor. When the motor is instructed to be stopped, the angular velocity is reduced to a predetermined value. The controlling mechanism is effected in accordance with the angular velocity detected by the velocity detecting means.
    Type: Grant
    Filed: September 13, 1993
    Date of Patent: March 12, 1996
    Assignee: Asahi Kogaku Kogyo Kabushiki Kaisha
    Inventor: Masahiro Nakata
  • Patent number: 5483134
    Abstract: A bag neck tying device for tying a ribbon dispensed from a spool about a gathered neck. A pulley and proximity switch are mounted to prevent the completion of a tying cycle if a bag neck is not properly gathered and ready to be tied.
    Type: Grant
    Filed: September 30, 1993
    Date of Patent: January 9, 1996
    Assignee: Burford Corporation
    Inventors: Jimmy R. Frazier, John D. Richardson, Greg P. Coxsey
  • Patent number: 5471296
    Abstract: The system includes distance measuring capability for use in the local and remote control of a camera lens for automatic and programmable control of ZOOM perspective, FOCUS, IRIS and other functions of the camera in conjunction with the programming of an included microcomputer-controlled automatic tracking system.
    Type: Grant
    Filed: June 16, 1993
    Date of Patent: November 28, 1995
    Assignee: ParkerVision, Inc.
    Inventors: Jeffrey L. Parker, David F. Sorrells, John D. Mix
  • Patent number: 5469038
    Abstract: A method for compensating for variations in the operating efficiency of electric motors used in plastic processing machines. The current to the motor is continually monitored during all periods of operation to identify variations in the motor's actual efficiency as it relates to measurable machine performance. Normal operation of the electric motor is monitored to establish baseline current usage for the various periods of the operating cycle under given conditions. With a baseline established, variations in motor efficiency can be detected by monitoring the current during closed loop control of specific parameters and comparing the results to the baseline. Since the parameter is held constant by virtue of the closed loop, a deviation in current from the baseline indicates a change in efficiency. Based on the identified variance, the current to the motor during other (open loop) operations can be adjusted accordingly.
    Type: Grant
    Filed: May 10, 1994
    Date of Patent: November 21, 1995
    Assignee: Cincinnati Milacron Inc.
    Inventor: Jeff L. Silvey
  • Patent number: 5465144
    Abstract: The system includes a mobile remote unit sensitive to infrared (IR) signals transmitted by a base or stationary unit and an IR transmitter which is placed behind a rotating lens whose position at any time is known with precision resulting in the IR signal being "scanned" across an area. The remote unit detects when the peak strength of the signal occurs and provides this data via an RF signal to the base unit wherein the exact effective angle between the axis of the IR signal and the remote unit creates an error signal used by the base unit to position the camera mounted thereon. Transmitters for TILT and two PAN positions, PAN 1 and PAN 2, are used to include range calculations for ZOOM functions. Command circuitry to override the automatic tracking function is provided in each of the units.
    Type: Grant
    Filed: October 19, 1994
    Date of Patent: November 7, 1995
    Assignee: ParkerVision, Inc.
    Inventors: Jeffrey L. Parker, David F. Sorrells, John D. Mix, Richard P. Daber
  • Patent number: 5459384
    Abstract: The apparatus includes a combination of a microscope and an interative image analysis system comprising a camera and a computer work station. The purpose of the apparatus is to facilitate the interactive control of coordinate displacements of the stage of the microscope. For each coordinate x and y an electromechanical control channel is established. At the input of the control channel two cascaded wheels in a coaxial arrangement and two angle encoders are used as a detached, independent tool which is not kinematically linked to the stage. In the middle of the control channel, the pulses of the angle encoders undergo a non-linear transformation. A processor performs a calculation which discriminates between slow displacements and fast displacements. At the end of the control channel, a flat, easily accessible platform of the microscope stage has two working areas, one for manual previewing and one for interactive scanning of a specimen.
    Type: Grant
    Filed: April 26, 1993
    Date of Patent: October 17, 1995
    Assignee: Becton Dickinson and Company
    Inventors: Peter D. Engelse, Alexander Flipse, Walter Janus
  • Patent number: 5444348
    Abstract: An electric jack of the type used in robotics having a rotation-translation movement transformation system, at least one electric motor connected to the movement transformation system, means for controlling the electric motor for driving the movement transformation system with acceleration and deceleration phases and energy recovery means for recovering electrical energy generated by the electric motor during deceleration phases. The movement transformation system has a rotation part and a translation part and is mechanically reversible such that, during deceleration phases, the translation part is capable of driving the rotation part with substantially identical efficiency as the rotation part drives the translation part during acceleration phases. During deceleration phases, the kinetic energy of the translation part causes the electric motor to generate energy which is recovered and stored in an energy recovery system utilizing a capacitor and a diode.
    Type: Grant
    Filed: December 9, 1993
    Date of Patent: August 22, 1995
    Assignee: Commissariat a l'Energie Atomique
    Inventor: Philippe Garrec
  • Patent number: 5444613
    Abstract: A digital position signal generator suitable for gain control and other purposes. A typical embodiment includes a rotary disk notionally divided into a plurality of sectors of the same angle about the disk axis. Some of the disk sectors have radial extensions which are detectable by photocouplers. The photocouplers are fixedly disposed about the disk axis with angular spacings each greater than the angle of each disk sector. Thus, with the rotation of the disk, the photocouplers produce binary zero and one outputs in various predetermined combinations nonsequentially representing successive predetermined angular positions of the disk. A position data generator circuit such as a microcomputer is provided which has stored thereon meaningful position data sequentially representing the successive predetermined angular positions of the disk. Inputting each output combination of the detectors, the position data generator circuit puts out a corresponding one of the meaningful position data.
    Type: Grant
    Filed: April 7, 1994
    Date of Patent: August 22, 1995
    Assignee: TEAC Corporation
    Inventors: Makoto Tani, Takashi Nishijima
  • Patent number: 5432597
    Abstract: The system includes improvements to a remote tracking system for the control of the field of view of a camera. The system provides for improved motor control for PAN and TILT functions and expanded modes of operation in both the automatic and manual operation of the system. These improvements also include several tracking response and command programs for control based upon the error between the desired position of the camera field of view and its actual position. In addition, a universal learning remote unit is provided to learn commands from the IR remote unit for those cameras that have such features.
    Type: Grant
    Filed: February 14, 1994
    Date of Patent: July 11, 1995
    Assignee: Parkervision, Inc.
    Inventors: Jeffrey L. Parker, David F. Sorrells, Jonathan D. Mix, Richard C. Looke
  • Patent number: 5412301
    Abstract: An individual regulation circuit is provided for each position-regulated drive motor for a textile machine, such as drafting arrangement. It is contemplated by the invention to have each such regulation circuit encompass a position sensor which also can deliver a position signal during standstill of the motor shaft of the associated drive motor.
    Type: Grant
    Filed: January 3, 1994
    Date of Patent: May 2, 1995
    Assignee: Maschinenfabrik Rieter AG
    Inventors: Erich Jornot, Urs Keller
  • Patent number: 5378973
    Abstract: An automatic eye angle adjusting apparatus in a camcorder for automatically moving an electronic view finder in accordance with camcorder set motion includes a set motion detector for output of a control signal in accordance with intentional movement of the camcorder and an eye angle adjustor for adjusting an angle of the electronic view finder in response to the control signal. The automatic eye angle adjusting apparatus eliminates the discomfort of manually adjusting an angle of the electronic view finder and prevent a trembling motion resulting from angle adjustment of the electronic view finder from being recorded along with the desired image. A method for operating the adjusting apparatus is also disclosed.
    Type: Grant
    Filed: August 9, 1993
    Date of Patent: January 3, 1995
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Hyoung-Gwon Kim