Abstract: Mass spectrometry systems or assemblies therefore include an ionizer that includes at least one planar conductor, a mass analyzer with a planar electrode assembly, and a detector comprising at least one planar conductor. The ionizer, the mass analyzer and the detector are attached together in a compact stack assembly. The stack assembly has a perimeter that bounds an area that is between about 0.01 mm2 to about 25 cm2 and the stack assembly has a thickness that is between about 0.1 mm to about 25 mm.

Abstract: A fast response output signal circuit (10) for a cold cathode gauge is provided to produce a fast response output signal (48) in addition to a voltage output signal (40) that is representative of the pressure in the cold cathode gauge. The fast response output signal (48) is either on or off, thus can be used to trigger a closing of an isolation valve or other responsive action upon a change in pressure that attains or exceeds a certain set point threshold. The fast response output signal is produced and processed with analog circuits, but the set point is produced with a microprocessor. The voltage output signal can be produced as a logarithmic function of the pressure.

Abstract: A suppressor is structured by an ion exchange section being structured by an eluate path forming member forming an eluate path and a regenerant path forming member forming a regenerant path being stacked across an ion exchange film, and a heat-conductive heat block covering the outside of the ion exchange section. A separation column, the suppressor, and an electrical conductivity meter are accommodated in a common constant temperature bath. The inside of the constant temperature bath is feedback-controlled by a temperature control section so as to be maintained at constant temperature.

Abstract: A technique for reducing an electromagnetic noise entering an electrode or a drift of a signal due to a fluctuation in the ambient temperature is provided to improve the S/N ratio of a signal originating from a component of interest. A dummy electrode having the same structure as an ion-collecting electrode is provided within a lower gas passage at a position where dilution gas with no sample gas mixed therein flows. A differential amplifier is provided to perform differential detection between output A of a current amplifier connected to the ion-collecting electrode and output B of a current amplifier connected to the dummy electrode. The differential signal is free from a common mode noise or drift and hence accurately reflects the amount of the component of interest.

Abstract: The invention relates to anion gauge for determining a total integrated concentration of a substance having a molecular weight falling into a pre-determined range of molecular weights in a gas sample. The anion gauge includes an ionization region in a vicinity of the ionization source; an accelerator for generating a flow of ionized molecules; a mass filter for intercepting the flow for separating ions having the molecular weight falling into the pre-determined range from the ionized molecules and a detector for generating a signal representative of the total integrated concentration of such ions present in the gas sample. The invention further relates to a lithographic apparatus and a method for determining a total integrated concentration of a substance having a molecular weight falling into a pre-determined range of molecular weights in a gas sample.

Abstract: Systems and methods for controlling an internal combustion engine include an ignition coil that generates a pre-discharge ionization signal during charging of the ignition coil after reaching a first threshold charge level and prior to spark discharge and a controller that determines an engine operating condition, such as pre-ignition or plug fouling, in response to the pre-discharge ionization signal. The ignition coil may also generate digital feedback and ionization signals used to by the controller for to control ignition coil dwell and repetitive sparking, as well as providing various combustion diagnostics.

Abstract: A measuring device for carrying out purity measurements in a media circuit of a power station with an ion exchanger device and a measuring means for measuring a parameter of a media current flowing through the ion exchanger device is described. In order to obtain measurements in a rapid and reliable manner at the start up of the ion exchanger device, for example during the start-up phase of the power station, it is suggested that the ion exchanger device has two flow paths for two different operating modes of the power station.

Abstract: Various environmental systems are disclosed. In accordance with one of the systems, a first and second valve are provided. The valves provide a first air flow path from an air pump to a photo-ionization detector is provided through a pre-filter. The valves also provide a second air flow path from the air pump to the photo-ionization detector so that the pre-filter is isolated from its environmental surroundings. Various other arrangements of environmental monitoring systems with one or more pre-filters are also disclosed.

Abstract: An ion energy analyzer is described for use in diagnosing the ion energy distribution (IED) of ions incident on a radio frequency (RF) biased substrate immersed in plasma. The ion energy analyzer comprises an entrance grid exposed to the plasma, an electron rejection grid disposed proximate to the entrance grid, and an ion current collector disposed proximate to the electron rejection grid. The ion current collector is coupled to an ion selection voltage source configured to positively bias the ion current collector by an ion selection voltage, and the electron rejection grid is coupled to an electron rejection voltage source configured to negatively bias the electron rejection grid by an electron rejection voltage. Furthermore, an ion current meter is coupled to the ion current collector to measure the ion current.

Abstract: A gas concentration detection apparatus includes a series-connected combination of a sensor element and a resistor, with an AC voltage being applied to one of the outer terminals of that combination and with the other outer terminal being held at a fixed potential. A DC voltage signal at a level determined by an oxygen concentration that is detected by the sensor element, and an AC voltage signal at an amplitude determined by sensor element impedance and hence by the sensor element activation status, are extracted from the series-connected combination by respectively separate circuits which apply separately determined amplification factors.

Abstract: A method and apparatus relating to an ion implantation system that employs an ion source for generating a plasma having an ion, and a probe assembly for detecting the ion of the plasma is provided. The probe assembly includes a probe body and a focusing device for extracting the ion from the plasma, and a filter for filtering ions extracted from the plasma.

Abstract: A method and apparatus relating to an ion implantation system that employs an ion source for generating a plasma having an ion, and a probe assembly for detecting the ion of the plasma is provided. The probe assembly includes a probe body and a focusing device for extracting the ion from the plasma, and a filter for filtering ions extracted from the plasma.

Abstract: An improved tomographic technique for determining the power distribution of an electron or ion beam using electron beam profile data acquired by an enhanced modified Faraday cup to create an image of the current density in high and low power ion or electron beams. A refractory metal disk with a number of radially extending slits, one slit being about twice the width of the other slits, is placed above a Faraday cup. The electron or ion beam is swept in a circular pattern so that its path crosses each slit in a perpendicular manner, thus acquiring all the data needed for a reconstruction in one circular sweep. The enlarged slit enables orientation of the beam profile with respect to the coordinates of the welding chamber. A second disk having slits therein is positioned below the first slit disk and inside of the Faraday cup and provides a shield to eliminate the majority of secondary electrons and ions from leaving the Faraday cup.

Abstract: The invention relates to a Penning vacuum meter (1), comprising a cathode and an anode. According to the invention, the cathode (11) consists at least mainly of titanium in order to avoid the detrimental effects of the cathode disintegrating.

Abstract: A mechanism is provided for reducing contamination of the interior of an apparatus by a sample and for performing a stable measurement. An ion lens has an Einzel lens for converging an ion beam, a deflector for deflecting the ion beam and a pair of compensation electrodes each composed of one or more elements. A mechanism is provided for controlling a voltage to be applied to each of the electrodes as desired. Also, alternatively, a shield plate is provided in a flow path of the ion beam. A drive mechanism is provided for projecting and retracting the shield plate. With such an arrangement, it is possible not only to effectively detect a small amount of impurities contained in a sample but also to stably measure the concentration thereof.

Abstract: The proposed method of carrying out diagnostics on a process for the thermo-chemical treatment of steels and alloys in a glow discharge involves monitoring the ionization characteristics of the atmosphere as revealed by the intensity of the electromagnetic radiation in various frequency intervals. The proposed device for carrying out the method in question comprises a primary converter (1) in the form of an electromagnetic radiation emitter unit and contains filtering elements (5) mounted in such a way that they can be positioned in the radiation zone in front of the receiver (6) on a rotating disk (4). The disk (4) is provided with a rotation drive (7) for positioning the elements (5).

Abstract: A gas detector system for detecting gases such as CO.sub.2. Sample air is passed through a critically sized sealed sample chamber in a sample cell. Infrared waves are generated in an insulated heater assembly, and radiate through windows of the sealed sample chamber concurrent with the sample air. The strength and magnitude of the infrared waves is attenuated by the level of gas, such as CO.sub.2, present in the sample air passing through the critically sized sealed sample chamber, and is sensed by a thermopile detector, including a filter for a specific frequency of infrared energy. Electronic circuitry processes the thermopile signal and measures other parameters of the gas detector to provide a signal indicative of the percentage of gas concentration in the air. Extensive use of insulation about and around the thermopile detector electronic circuitry and other components of the detector maximize stability and reliability.

Abstract: A diesel engine exhaust system is provided with a particulate trap for collecting the products of incomplete combustion during the engine power cycle. A sensing mechanism including an electrode downstream of the trap and a signal generating circuit provides a positive indication of occurrence of regeneration of the trap. Charged particles generated during regeneration induce a charge of the electrode, that charge activates the signal generating circuit and it, in turn, produces an indication external of the exhaust system that trap regeneration is occurring. That indication can be in the operator's compartment.

Abstract: A hydrogen detector having a hydrogen-permeable membrane between the atmosphere and the inside of a vacuum tube is heated by an adjacent filament located within the tube.

Abstract: A tri-electrode probe consisting of a central electrode and a pair of measuring electrodes on the opposite sides of the central electrode disposed so as to symmetrically cover an immaginary surface having a plane of symmetry, is connected to a measuring system including minute current ammeters and a variable D.C. voltage source, the tri-electrode probe is positioned at a measuring point within an electric field where both positive and negative ions coexist as oriented in such direction that the plane of symmetry is directed in perpendicular to the direction of the electric field with one of the measuring electrodes opposed to a negative ion source and the other measuring electrode opposed to a positive ion source, a current flowing through the minute current ammeter connected to the central electrode is made substantially zero by varying the voltage of the variable D.C.

Abstract: Disclosed is a sodium ionization detector (SID) for detecting sodium leaks by detecting the magnitude of fluctuation of the ion current produced by thermally ionizing sodium. There is a particular relationship between the magnitude of fluctuation of the ion current and the concentration of sodium. The sodium ionization detector is adapted to determine the magnitude of fluctuation of the ion current so as to compare it with a predetermined value. The magnitude of fluctuation of the ion current is determined, for example, by the root-mean-square value of a fluctuation component of the ion current.

Abstract: A method and device for detecting the presence of a substance having predetermined characteristics. More particularly, a device is disclosed wherein a discharge grid (20) is provided having a sufficiently high voltage potential across its grid electrodes (32 and 36) so that the substance having the predetermined characteristics will cause an electric spark discharge to occur between electrodes, the electric spark discharge altering the predetermined characteristics of the substance by oxidation and/or vaporization so that the substance is no longer detectable by an electric spark discharge. A means for counting the number of electric spark discharges is provided (96), a count providing an indication of the concentration of the substance having the predetermined characteristics. One embodiment disclosed detects longitudinally extending carbon fibers suspended in a gaseous medium (12). Another embodiment provides for the detection of carbon fibers (66) adhesively attached to a collection tape (68).

Abstract: An improved particle sensing transducer apparatus and method for studying the physical properties of particles suspended in an electrolyte solution. The transducer apparatus includes a first chamber, at least a portion of which contains a quantity of the electrolyte solution with a first electrode disposed therein. A second chamber is provided, at least a portion of which contains a quantity of the electrolyte solution with a second electrode disposed therein. The transducer further includes an orifice for establishing a constricted electrical path by providing a passageway for a sample flow of electrolyte solution containing the particles between the two chambers. The improvement comprises a fluid retarding, ion conducting material, such as a gel, frit or membrane, interposed between the sample flow and at least one of the electrodes so as to pass an ionic current while retarding the electrolyte flow from the electrode.