Abstract: A packaged capacitive MEMS sensor device includes at least one capacitive MEMS sensor element with at least one capacitive MEMS sensor cell including a first substrate having a thick and a thin dielectric region. A second substrate with a membrane layer is bonded to the thick dielectric region and over the thin dielectric region to provide a MEMS cavity. The membrane layer provides a fixed electrode and a released MEMS electrode over the MEMS cavity. A first through-substrate via (TSV) extends through a top side of the MEMS electrode and a second TSV through a top side of the fixed electrode. A metal cap is on top of the first TSV and second TSV. A third substrate including an inner cavity and outer protruding portions framing the inner cavity is bonded to the thick dielectric regions. The third substrate together with the first substrate seals the MEMS electrode.

Abstract: A locator for capacitively sensing an object includes a transmission electrode to which an excitation signal can be applied, a reception electrode, a sensing region in the region of the transmission electrode and the reception electrode, and a measuring device for sensing a capacitance between the transmission electrode and the reception electrode. The locator further includes a processing device for determining the presence of the object in the sensing region if the sensed capacitance differs from a reference capacitance, and a screening electrode that is arranged in the region of the transmission electrode and the reception electrode. The screening electrode is connected to a potential so as to reduce the base capacitance between the transmission electrode and the reception electrode.

Abstract: A system for inspecting an aperture is disclosed. The aperture has an axis, a design geometric parameter, an actual geometric parameter, and a depth. The system includes a first measuring probe configured to produce a signal indicative of the actual geometric parameter of the aperture when inserted therein; a deployment mechanism supporting the first measuring probe and attachable to a robotic device, the deployment mechanism configured to selectively orient the first measuring probe along the axis of the aperture; and a controller, couplable to the robotic device, the first measuring probe, and the deployment mechanism. The controller is configured to cause insertion of the first measuring probe into the aperture substantially along the axis and to receive the signal from the probe.

Abstract: A method for monitoring movement of an element such as a cable is carried out by providing a pair of conductive elements each extending along an extent of the cable or other element to be monitored. A DC potential difference is applied between the conductive elements. The conductive elements are provided with an intervening material therebetween, which can be a continuous dielectric or can be other insulating material which varies in spacing and capacitance value along its length, such that the movement causes a change in capacitive coupling between the conductive elements at points or areas where the movement occurs so as to generate a changing voltage therebetween. The changing voltage as an amplified and filtered variable electrical signal is analyzed for monitoring the changing voltage for perturbations caused by the movement of the element.

Abstract: An integrated low-noise sensing circuit with efficient bias stabilization in accordance with the present invention comprises a first capacitance sensing element, a second capacitance sensing element, a sub-threshold transistor and an amplifier circuit wherein the first stage is an input transistor. The second capacitance sensing element is connected to the first capacitance sensing element. The sub-threshold transistor comprises a body, a gate, a source, a drain, a source-body junction diode and a bulk. The gate forms on top of the body. The source forms on the body and is connected to the first capacitance sensing element and the second capacitance sensing element. The drain forms on the body and is connected to the gate and the amplifier output terminal. The source-body junction diode comprises an anode and a cathode. The anode is connected to the ground.

Abstract: Apparatuses and methods of adaptive resolution circuits are described. One apparatus includes an input node coupled to a capacitance sense pin coupled to an electrode of a sense array and a capacitance-sensing circuit coupled to the input node and comprising an integrator configured to measure a capacitance with a first resolution. An adaptive resolution circuit is coupled to the capacitance-sensing circuit and the input node and is configured to selectively modify an integration capacitance of the integrator to set the integrator to measure the capacitance with a second resolution.

Abstract: A system for sensing characteristics of a volume can include a mirror input configured to connect to a first mirror plate. The first mirror plate can be physically isolated from a first monitored space for containing a material. A sense input can be configured to connect to a first sense plate. The first sense plate can be positioned between the first mirror plate and the first monitored space, and can have a surface that faces the first monitored space. A capacitance sense section can generate a first sense value based on a capacitance at the sense input, and a mirror value based on a capacitance at the mirror input.

Abstract: Embodiments of the subject method and apparatus relate to a sequence of noncontact Corona-Kelvin Metrology that allows the determination and monitoring of interface properties in dielectric/wide band gap semiconductor structures. The technique involves the incremental application of precise and measured quantities of corona charge, QC, onto the dielectric surface followed by determination of the contact potential difference, VCPD, as the material structure response. The V-Q characteristics obtained are used to extract the surface barrier, VSB, response related to the applied corona charge. An intersection of the VCPD-QC characteristic obtained in the dark with the VOX-QC characteristic representing the dielectric response is determined. The specific VSB-QC dependence surrounding the reference VFB value is obtained and the dielectric interface trap density and its spectrum is determined. A method and apparatus to quantify and separate trapped charge components is provided.

Abstract: Disclosed is a plastic film and a touch module produced therefrom. The module is constructed from two conductive layers with an insulation layer in between, as are used in capacitive touch pads and/or touch screens, for example. The problem of connecting the respective x or y sensors across two planes in a cost-effective manner employs foldable sensor planes in the plastic film suitable for mass production. The connections and conductor tracks are concentrated on one plane on a sensor side wherein the sensor planes are arranged on flexible materials. The registering of the two planes relative to each other is simplified via a secure mechanical connection of the two planes via a fold in the film.

Abstract: A touch screen sensor includes a visible light transparent substrate and an electrically conductive micropattern disposed on or in the visible light transparent substrate. The micropattern includes a first region micropattern within a touch sensing area and a second region micropattern. The first region micropattern has a first sheet resistance value in a first direction, is visible light transparent, and has at least 90% open area. The second region micropattern has a second sheet resistance value in the first direction. The first sheet resistance value is different from the second sheet resistance value.

Abstract: Electrically conductive structures produced on or in a substrate, or produced such that the structures are floating in a substrate undergo simple and reliable capacitive contactless and non-destructive inspection using a capacitive sensor having at least two sensor electrode surfaces which are arranged at different constant distances from one another parallel to a surface of the substrate and are arranged beside one another relative to the surface of the substrate.

Abstract: A low power capacitive detector is disclosed. The detector includes a mechanism to measure and detect touch on capacitive sensors. The detector uses signal processing to suppress noise and increase sensitivity. The detector does not require dedicated analog circuitry, making it easy to adopt in a microcontroller system. The detector can be scaled to a larger number of capacitive sensors without noticeable increase in silicon cost.

Abstract: An electrode layout for a touchscreen includes multiple sense electrodes. Each sense electrode has multiple spines coupled to each other, including a main spine and at least one spaced apart interpolation spine running in the same direction. The interpolation spine of one sense electrode is positioned adjacent a spaced apart interpolation spine of a neighboring sense electrode to provide interpolated sense electrodes.

Abstract: A capacitive rotation sensor for detecting the position of an object moving relative to a stationary object, comprising a shaft rotatably supported in a housing flange, said shaft being connected integral in rotation therewith to a rotor to which, separated by an air gap, a stator situated opposite thereto is assigned, wherein at least the rotor, the stator and an evaluation circuit are enclosed by an electrically conductive cap, wherein a stator surface is arranged on the underside of a circuit board and the stator surface has assigned thereto, situated opposite thereto and separated by the air gap, a non-rotation-symmetrical rotor disc which, in turn, is fixed on a rotor support, said rotor support being fastened highly precisely on the outer periphery of the shaft so as to be integral in rotation therewith.

Abstract: A sensor device for detecting a number of objects, has a number of electrode configurations forming a sensor surface, each electrode configuration having a number of measurement electrodes and each electrode configuration being associated with at least one transmitter electrode, and an evaluation device coupled to the measurement electrodes and the transmitter electrodes, which is adapted for using a time multiplexing method for applying an alternating signal to one of the transmitter electrodes, and to apply a predetermined constant electrical potential to the remaining transmitter electrodes, and tapping an electrical signal indicating the position of the object relative to the sensor surface at the measurement electrodes associated with the transmitter electrode having the electrical alternating signal applied.

Abstract: A hybrid sensor includes a proximity sensor section and a load sensor section. The proximity sensor section includes a first base material, a plurality of first front-side electrodes, a plurality of first back-side electrodes, and a protective layer. Each of these members is made of an elastomer. The proximity sensor section detects the approach and coordinates of an object to be detected, based on a change in capacitance between the first front-side electrode and the first back-side electrode which is caused by the approach of the object to be detected. The load sensor section detects pressing and coordinates of the object to be detected, based on a load that is applied from the object to be detected via the proximity sensor section.

Abstract: A concentric coplanar capacitive sensor includes a charged central disc forming a first electrode, an outer annular ring coplanar with and outer to the charged central disc, the outer annular ring forming a second electrode, and a gap between the charged central disc and the outer annular ring. The first electrode and the second electrode may be attached to an insulative film. A method provides for determining transcapacitance between the first electrode and the second electrode and using the transcapacitance in a model that accounts for a dielectric test piece to determine inversely the properties of the dielectric test piece.

Abstract: An novel impedance sensor for use together with a switch is provided having a plurality of substantially parallel drive lines configured to transmit a signal into a surface of a proximally located object, and also a plurality of substantially parallel pickup lines oriented substantially perpendicular to the drive lines and separated from the pickup lines by a dielectric to form intrinsic electrode pairs that are impedance sensitive at each of the drive and pickup crossover locations.

Abstract: Disclosed is a test apparatus for efficiently and accurately testing a high frequency voltage dependency of an impedance of a test object without damaging the test object. The test apparatus includes a high frequency power source unit, a reference waveform generator, a matching device, an oscilloscope, a control panel, and a main control unit. The test apparatus may boost a high frequency pulse output at a relatively low power from the high frequency power source unit to a voltage required for a high frequency withstand voltage test to be applied to a test object in a state where impedance matching is performed between the high frequency power source unit and the test by the matching device, that is, under a tuned state. Whether the waveform of the voltage applied to the test object is a defined waveform may be concisely monitored and observed by the oscilloscope.

Abstract: A display panel includes a color filter substrate and an array substrate. The color filter substrate includes a transparent substrate and a touch electrode layer. The touch electrode layer includes a sensing electrode and a driving electrode disposed on opposite sides of the transparent substrate. The sensing electrode includes a plurality of striped sub-electrodes having random shapes and disposed along a first direction and spaced apart from each other in a second direction by a spacing. The first direction is perpendicular to the second direction. Each of the sub-electrodes has a width of about 3 micrometers and a resistance value that varies within 25 percent of a predetermined resistance value. The sensing electrode has a width of 4 to 5 millimeters.

Abstract: An apparatus including a sensor array, configured to produce an array output value in response to an environmental stimulus, and a controller, the sensor array including a plurality of sensors and a common output terminal connected to the respective outputs of the sensors, each sensor having first and second electrodes configured to output a respective sensor output value in a particular environment based on the areas of the first and second electrodes and/or the spacing therebetween, the controller configured to control which of the sensors are connected to the common output terminal using respective switches to vary the effective area and/or spacing of the sensor array such that the array output value at the common output terminal, based on the contribution of the respective sensor output values of the connected sensors, is held at a reference value.

Abstract: Apparatuses and methods of mutual-capacitance sensing with a capacitance-sensing circuit, such as a self-capacitance sensing device (CSD). One apparatus includes an input node coupled to a capacitance sense pin to couple to a first electrode of a sense array, a transmit (TX) signal generation circuit to generate a TX signal to drive a second electrode of the sense array, logic circuitry coupled to the TX signal generation circuit and the input node. The logic circuitry is configured to selectively couple a first capacitor to the input node and a second capacitor to the input node timed with the TX signal. The apparatus further includes an analog-to-digital converter (ADC) coupled to receive a receive (RX) signal from the input node and to convert the RX signal into a digital value, the digital value representing a mutual capacitance between the first electrode and the second electrode.

Abstract: A method and apparatus use a plurality of first region values to calculate a second region value, each of the plurality of first region values reflecting sensor element activity in a corresponding region of an input module, the second region value reflecting sensor element activity of a group of the corresponding regions. The method and apparatus determine that the input object is present relative to the group of the corresponding regions if the second region value meets or exceeds a threshold presence value.

Abstract: A detection device for detecting an object by measuring the capacitance variation of the detection device includes at least a pair of sensor pads, each sensor pad being able to transmit or to receive an electric field. Each sensor pad can be used to measure the impedance variation of the pad, each sensor pad being driven by a driven rail impedance measuring system including an inverter, an oscillator, a power supply rail driver and switches, the measuring system being able to change the sensor pad function from electric field transmitter to electric field receiver or impedance measurer by turning on and off the oscillator to the input of the power supply rail driver of the inverter.

Abstract: Devices and methods for capacitively sensing key cap position during the initial and latter stages of a keystroke. A key assembly includes a stationary key guide magnet, a movable key cap magnet, and a transmitter/receiver electrode pair. One or both of the electrodes underlies the key cap. The capacitance change between the electrodes during a keystroke includes the capacitance change between the key cap and the electrode pair, and the change in capacitance between the key cap and the key guide. Key cap position may thus be accurately detected throughout the entire keystroke.

Abstract: A capacitive touch sensing device by detecting induced electric field includes a differential amplifier, a resistor and a signal judgment circuit. The differential amplifier is electrically connected to a touch sensor. The resistor is electrically connected to a first input end and a second input end of the differential amplifier. The signal judgment circuit is electrically connected to an output end of the differential amplifier. As the touch sensor receives an induced electric field signal, the induced electric field signal is amplified by the differential amplifier and the signal judgment circuit determines whether the amplified induced electric field signal is a touch input.

Abstract: A water-resistant capacitance sensing apparatus comprising a plurality of capacitive sense elements and a capacitance sensing circuit configured to measure both the mutual capacitance and self-capacitance on the plurality of capacitive sense elements. A method for water-resistant capacitance sensing, the method comprising performing a self-capacitance scan and a mutual capacitance scan, and detecting, by a processing device, a presence of an object with the plurality of sense elements. The method further determines whether the detected presence of the object is legitimate.

Abstract: A system for monitoring a plurality of capacitor cells connected in series in a capacitor module which are used as electrical energy stores in an energy storage device and which can be charged in same by a charge current flowing through all the capacitor cells or discharged by a discharge current. The system includes a measuring unit which can determine the voltages applied to the individual capacitor cells by measuring voltages, an evaluation unit which sets a nominal voltage for the capacitor cells, and at least one discharge branch connectable to each capacitor cell and controllable by a discharge control unit which discharges a respective capacitor cell onto said discharge branch depending upon the set nominal voltage and the applied voltage.

Abstract: A sensor has a strip resonator filter that energizes an emitter patch which emits an electric field out from the strip resonator filter (away from the strip resonator filter). The capacitance of the filter, or specifically the coupling capacitance and radiation pattern of the slotted patch, is altered when an object such as a finger is near the sensor. Resulting changes in a signal outputted by the filter can be used to determine how close the object is to the sensor. The strip resonator filter may be a half wavelength strip resonator coupled filter having three separate strips. The patch may have a slot and two accompanying strips. An arrangement of multiple sensors may detect the position of an object in two or three dimensions.

Abstract: A capacitance-to-voltage interface circuit is utilized to obtain a voltage corresponding to a detected capacitance differential, which may be associated with the operation of a capacitive sensing cell. The interface circuit includes a capacitive sensing cell, an operational amplifier adapted for selective coupling to the capacitive sensing cell, a feedback capacitor for the operational amplifier, a load capacitor for the operational amplifier, and a switching architecture associated with the capacitive sensing cell, the operational amplifier, the feedback capacitor, and the load capacitor. During use, the switching architecture reconfigures the capacitance-to-voltage interface circuit for operation in a plurality of different phases. The different operational phases enable the single operational amplifier to be used for both capacitance-to-voltage conversion and voltage amplification.

Abstract: An electrode configuration for a capacitive sensor device has a transmitting electrode and a receiving electrode, wherein the transmitting electrode can be brought into a capacitive coupling with the receiving electrode, wherein the electrode configuration has at least one first and second sensor area, wherein both of the electrode surfaces of the transmitting electrode and of the receiving electrode in the first sensor area are small compared to the electrode surfaces of the transmitting electrode and of the receiving electrode in the second sensor area. A capacitive sensor device for the detection of an approximation may have such an electrode configuration. An electrical device, particularly an electrical hand-held device, may have at least one such capacitive sensor device.

Abstract: A high-voltage supply unit is provided for a particle beam device. The high-voltage supply unit includes at least one high-voltage cable for feeding a high voltage, and at least one measuring device for measuring the high voltage. The measuring device has at least one first capacitor, and the first capacitor is formed by at least one first section of the high-voltage cable.

Abstract: A system (110) for monitoring growth conditions of a plurality of plant containers (112) is disclosed. The system (110) has a transport system (118) for transporting the plant containers (112). Each plant container (112) comprises at least one growing medium (114) and preferably at least one plant specimen (116). The system (110) further comprises at least one measurement position (130) having at least one contactless capacitive humidity sensor (132). The system (110) is adapted to successively transport the plant containers (112) to and from the measurement position (130). The system (110) is further adapted to measure the humidity of the growing medium (114) of the plant containers (112) in the measurement position (130) by using the contactless capacitive humidity sensor (132).

Abstract: A control circuit identifies whether an occupant on a seat is an adult or a child based on a first capacitance between a first sensing electrode and a ground and a second capacitance between a second sensing electrode and the ground. The first capacitance is computed based on a value of an electric current, which is supplied to the first sensing electrode at the time of applying an oscillation signal from a signal application circuit to the first sensing electrode. The second capacitance is computed based on a value of an electric current, which is supplied to the second sensing electrode at the time of applying an oscillation signal from the signal application circuit to the second sensing electrode.

Abstract: An apparatus includes a sensor array with a plurality of active pixels. Each active pixel in the sensor array includes: a three transistor (3T) sensor with a source follower transistor, and a detection diode coupled in series to a parasitic capacitor at a sensing junction. A gate of the source follower transistor amplifier is coupled to the sensing junction. The apparatus includes an insulator layer over the sensor array. The insulator layer provides a variable capacitance to the sensing junctions of underlying active pixels in response to portions of an object being proximate to the insulator layer. The variable capacitance is used to detect an image of the object.

Abstract: The present sensor chip comprises a substrate. A plurality of electrode elements is arranged at a first level on the substrate with at least one gap between neighbouring electrode elements. A metal structure is arranged at a second level on the substrate, wherein the second level is different from the first level. The metal structure at least extends over an area of the second level that is defined by a projection of the at least one gap towards the second level.

Abstract: A processing system for a transcapacitive sensing device comprises a plurality of sensor electrodes sectioned by a seam, a first sensor electrode integrated circuit, and a second sensor electrode integrated circuit. The plurality of sensor electrodes comprises a plurality of transmitter electrodes intersecting a plurality of receiver electrodes. The first sensor electrode integrated circuit is communicatively coupled to a first subset of the plurality of sensor electrodes. The second sensor electrode integrated circuit is communicatively coupled to a second subset of the plurality of sensor electrodes. The first sensor electrode integrated circuit and the second sensor electrode integrated circuit are configured to operate the plurality of sensor electrodes in synchrony to transmit with the plurality of transmitter electrodes a set of transmitter signals and receive with the plurality of receiver electrodes a set of responses corresponding to the set of transmitter signals.

Abstract: A capacitive fluid sensor is provided that utilizes a flexible substrate. It has a plurality of conductive members supported on it which are connected to a connecting end. The conductive members are arranged in an array and are aligned with a longitudinal axis of the substrate and the members are separated by intervening spaces. The intervening spaces are arranged so that they cross the longitudinal axis at an angle such that adjacent conductive members overlap each other when viewed from a side edge of the sensor. Such an arrangement provide more accurate measurement of fluid levels within containers.

Abstract: A capacitive proximity sensor has a first sensor electrode and a second sensor electrode, a signal generator for providing a first and a second electric alternating signal, a first load element which comprises a first and a second electric load, in which the first alternating signal by the first load can be fed to the first sensor electrode and the second alternating signal by the second load to the second sensor electrode, and wherein the electric loads each together with the capacitive load to be measured at the respective sensor electrode form a lowpass filter, and a signal processing device, which is coupled with the first sensor electrode and with the second sensor electrode, and which is adapted to form a first measurement value from the push-pull portion of a first electric parameter tapped at the first sensor electrode and a second electric parameter tapped at the second sensor electrode.

Abstract: An example integrated control circuit includes a regulator, a first comparator, a second comparator, and a counter. The regulator is to charge, during a time period, a capacitor. The first comparator is to provide an output indicating when a voltage on the capacitor reaches a first threshold voltage. The second comparator is coupled to provide an output indicating when the voltage on the capacitor reaches a second threshold voltage. The counter is coupled to begin counting in response to the first threshold voltage being reached and is coupled to stop counting in response to the second threshold voltage being reached. The counter is coupled to provide an output representative of the capacitance value of the capacitor during the time period and the integrated control circuit receives a bias current at the terminal from the capacitor to provide power to operate the integrated control circuit after the time period has ended.

Abstract: A touch panel sensor with which unevenness of interference can be reduced is provided. A touch panel sensor of the present invention includes a film base material, a first transparent electrode pattern formed on a first face of the film base material, a first adhesive layer laminated on the first face of the film base material so as to cover the first transparent electrode pattern, a second transparent electrode pattern formed on a second face of the film base material, and a second adhesive layer laminated on the second face of the film base material so as to cover the second transparent electrode pattern, and the film base material has an in-plane phase difference of ?/4 with respect to a wavelength ? in the visible light region.

Abstract: A sensing surface is presented for use in monitoring a three dimensional behavior of one or more objects above the surface. The sensing surface is associated with a self-capacitance sensor and comprises a plurality of self-capacitive sensing pads located on a single layer. The sensing surface is configured for providing measured data indicative of a three-dimensional behavior of one or more objects over an active area of the sensing surface. The pattern of the pads is configured such that each sensing pad can be connected to an edge of the sensing surface on said single layer. The technique further enables the use of a capacitive sensor comprising the sensing surface.

Abstract: A printed circuit board (P) has an evaluation device (E) and an electrode configuration of a capacitive sensor, wherein the electrode configuration has at least two electrodes, one arranged above the other and spaced apart from each other, which each are formed by portions of at least one electrically conductive layer of the printed circuit board (P), and wherein at least one electrode of the electrode configuration is coupled with the evaluation device (E) via a conductor path of the printed circuit board (P). Furthermore, an electric handheld device may have at least one such printed circuit board (P).

Abstract: The invention discloses a method of fabricating a capacitance touch panel module. The method includes providing a substrate with a touching area and a peripheral area; forming a plurality of first conductive patterns on the substrate along a first orientation, a plurality of second conductive patterns along a second orientation, and a plurality of connecting portions in the touching area; forming a plurality of insulated protrusions, in which each insulated protrusion covers one connecting portion; forming an insulated frame on the peripheral area; and forming a bridging member on each insulated protrusion.

Abstract: Apparatuses and methods of driving different transmit (TX) phase sequences of a TX signal on TX electrodes in different sensing stages according to a weighting matrix as the excitation matrix. One method drives the TX signals according to the weighting matrix and measures receive (RX) signals on the RX electrodes to determine if an object is proximate to the electrodes.

Abstract: A capacitance sensing system may include a current conveyor circuit coupled to receive induced current from a capacitance sensing structure at a low impedance current input port; and a comparator having an input coupled to a high impedance output port of the current conveyor circuit, and an output coupled to the current conveyor circuit by a feedback path and coupled to drive the capacitance sensing structure to generate the induced current.

Abstract: An integrated low-noise sensing circuit with efficient bias stabilization in accordance with the present invention comprises a first capacitance sensing element, a second capacitance sensing element, a sub-threshold transistor and an amplifier circuit wherein the first stage is an input transistor. The second capacitance sensing element is connected to the first capacitance sensing element. The sub-threshold transistor comprises a body, a gate, a source, a drain, a source-body junction diode and a bulk. The gate forms on top of the body. The source forms on the body and is connected to the first capacitance sensing element and the second capacitance sensing element. The drain forms on the body and is connected to the gate and the amplifier output terminal The source-body junction diode comprises an anode and a cathode. The anode is connected to the ground.

Abstract: Embodiments of the subject method and apparatus relate to a sequence of noncontact Corona-Kelvin Metrology, C-KM, that allows the determination and monitoring of interface properties in dielectric/wide band gap semiconductor structures. The technique involves the incremental application of precise and measured quantities of corona charge, QC, onto the dielectric surface followed by determination of the contact potential difference, VCPD, as the material structure response. The V-Q characteristics obtained are used to extract the surface barrier, VSB, response related to the applied corona charge. The metrology method presented determines an intersection of the VCPD-QC characteristic obtained in the dark with the VOX-QC characteristic representing the dielectric response. The specific VSB-QC dependence surrounding the reference VFB value is obtained from this method and allows the noncontact determination of the dielectric interface trap density and its spectrum.

Abstract: An overlay mark including at least one first overlay mark and at least one second overlay mark is provided. The first overlay mark includes a plurality of first bars and a plurality of first spaces arranged alternately, and the first spaces are not constant. The second overlay mark includes a plurality of second bars and a plurality of second spaces arranged alternately, and the second spaces are constant. Besides, the second overlay mark partially overlaps with the first overlay mark.

Abstract: A method of verifying a correct adhesion of a substrate on a body which is configured to be electrically conductive and thermally conductive includes providing the body, providing the substrate comprising a top face and a rear face, connecting to the top face of the substrate an electric circuit comprising conductive paths and electronic components, attaching to the rear face the body via an adhesive layer comprising an adhesive, connecting the conductive paths and the body to an respective opposite terminal of a voltage source via contact tabs, measuring a capacity, and determining a quality of the adhesive layer from the measured capacity.