Abstract: A switch arrangement comprises a plurality of MEMS switches arranged on a substrate about a central point, each MEMS switch being disposed on a common imaginary circle centered on the central point. Additionally, and each MEMS switch is preferably spaced equidistantly along the circumference of the imaginary circle. Connections are provided for connecting a RF port of each one of the MEMS switches with the central point.

Abstract: A switch arrangement comprises a plurality of MEMS switches arranged on a substrate about, and close to, a central point, each MEMS switch being disposed on a common imaginary circle centered on the central point. Additionally, and each MEMS switch is preferably spaced equidistantly along the circumference of the imaginary circle and within one quarter wavelength of the central point for frequencies in the passband of the switch arrangement. Connections are provided for connecting a RF port of each one of the MEMS switches with the central point.

Abstract: A multiple switch MEMS structure has a higher resistance, higher durability switch arranged in parallel with a lower resistance, less durable switch. By closing the higher resistance, high durability switch before the lower resistance, less durable switch, the lower resistance, less durable switch is protected from voltage transients and arcing which may otherwise damage the lower resistance, less durable switch. By appropriate selection of dimensions and materials, the high resistance, high durability switch may be assured to close first, as well as open first, thereby also protecting the lower resistance, less durable switch from voltage transients upon opening as well as upon closing.

Abstract: The present invention provides a monolithic inductor developed using radio frequency micro electromechanical (RF MEMS) techniques. In a particular embodiment of the present invention, a tunable radio frequency microelectromechanical inductor includes a coplanar waveguide and at least one direct current actuatable contact switch positioned to vary the effective width of a narrow inductive section of the center conductor of the CPW line upon actuation the DC contact switch.

Abstract: An electromagnetic switch element that through electromechanical actuation is able to be used to influence the propagation of an electromagnetic signal within a guiding medium. An electromagnetic switch element that is activated by displacement of conducting elements, the displacement being forced through electrostatic, electric field, magnetic field, thermal or other means.

Abstract: The systems and methods described herein provide for a radio frequency micro-electromechanical systems switch having two or more resonant frequencies. The switch can be configured as a capacitive shunt switch having a deflectable member coupled between two electrodes over a transmission line. A first insulator can be located between one of the electrodes and the deflectable member to form a capacitive element. The deflectable member can be deflectable between an up-state and a down-state, the down-state capacitively coupling the deflectable member with the transmission line. The degree by which the deflectable member overlaps the first insulator can be adjusted to adjust the capacitance of the capacitive element and the resulting resonant frequency.

Abstract: A micro electro mechanical system switch and a method of fabricating the same. The micro electro mechanical system switch includes a substrate a plurality of signal lines formed at sides an upper surface of the substrate and including switching contact points and a plurality of immovable electrodes on the upper surface of the substrate and between the plurality of signal lines. An inner actuating member performs a seesaw based on a center of the substrate and together with an outer actuating member. Pushing rods are formed at ends of an upper surface of the inner actuating member with ends protruding from and overlapping with an upper portion of the outer actuating member. Contacting members are formed on a lower surface of the outer actuating member so as to be pushed by the pushing rods and contacting the switching contact points of the signal lines.

Abstract: An electromechanical switch includes an actuation electrode, a cantilever electrode, a contact, a suspended conductor, and a signal line. The actuation electrode is mounted to a substrate, the cantilever electrode is suspended proximate to the actuation electrode, and the contact is mounted to the cantilever electrode. The suspended conductor is coupled to the contact and straddles a portion of the cantilever electrode. The signal line is positioned to form a closed circuit with the contact and the suspended conductor when an actuation voltage is applied between the actuation electrode and the cantilever electrode.

Abstract: An integrated RF front-end module for use in a communications device, such as a mobile phone. The RF front-end module is made from a laminated structure consisting of a plurality of layers. At least one of the layers is used to embed RF electronics. Microvias are disposed in various layers of the laminated structure so as to provide electrical connections to the embedded RF electronics. Two electrically conductive layers are provided on both sides of the laminated structure for shielding the RF components against electromagnetic interference. An antenna has one or two radiating elements disposed on one or both sides of the laminated structures for conveying RF signals to and from the RF electronics. The antenna can be fine-tuned and the operational frequency range of the antenna can also be changed.

Abstract: A planarized substrate structure for an electromechanical device comprising a substrate layer; a dielectric layer formed on the substrate layer, the dielectric layer formed with conductor spaces therein, the dielectric layer further including a dielectric top surface; and a conducting layer formed as a set of conductors in the conductor spaces of the dielectric layer, the conducting layer having a conducting layer top surface, and where the dielectric top surface and the conducting layer top surface are formed in a substantially co-planar fashion to provide a planarized substrate structure.

Abstract: An RF-actuated microelectromechanical systems (MEMS) switch for use with switchable RF structures such as antennas and reflectors is disclosed. An antenna within each MEMS switch module is coupled to a circuit that provides a trigger voltage based on an RF control signal received at the antenna. The trigger voltage output of the circuit is used as the control the MEMS switch. This allows arrays of MEMS switch modules to be actuated by remotely generated radio frequency signals thus alleviating the need for running metallic conductors or optical fibers to each MEMS switch. Frequency response characteristics, phasing, reflectivity, and directionality characteristics may be altered in real-time.

Abstract: Disclosed are an RF MEMS switch and a fabrication method thereof. The RF MEMS switch is actuated with a low voltage and a low consumption power by using a piezoelectric capacitor actuated by being converted to mechanical energy from electric energy when an electric field is applied to the piezoelectric capacitor. A cap substrate is formed by using an etching method, a chemical mechanical polishing method, an electroplating method, etc., and the RF MEMS switch has a high reliability and a high yield.

Abstract: A MEMS switch includes a micro-machined monolithic layer (122) having, a seesaw (52), a pair of torsion bars (66a, 66b), and a frame (64). The frame (64) supports the seesaw (52) for rotation about an axis (68) established by the torsion bars (66a, 66b). Shorting bars (58a, 58b) at ends of the seesaw (52) connect across pairs of switch contacts (56a1, 56a2, 56b1, 56b2) carried on a substrate (174) bonded to one surface of the layer (122). A base (104) is also joined to a surface of the layer (122) opposite the substrate (174). The substrate (174) carries electrodes (54a, 54b) for applying forces to the seesaw (52) urging it to rotate about the axis (68). An electrical contact island (152) supported at a free end of a cantilever (166) ensures good electrical conduction between ground plates (162a, 162b) on the layer (122) and electrical conductors on the substrate (174).

Abstract: A hybrid circuit phase shifter assembly of RF MEMS switch modules and passive phase delay shifter circuits uses a low loss, preferably flip-chip, interconnection technology. The hybrid circuit assembly approach separates the fabrication of the MEMS switch modules from the fabrication of the passive phase delay circuits thereby avoiding process incompatibilities and low yields and providing substantial production cost savings. In another aspect of the invention, the integration on a common substrate of a MEMS-based hybrid circuit phase shifter assembly behind each of a plurality of radiating elements provides a compact, low cost electronic scanning antenna array.

Abstract: In a seesaw-type MEMS switch for radio frequency (RF) and a method for manufacturing the same, the seesaw-type MEMS switch for radio frequency (RF) includes a substrate, a transmission line formed on the substrate having a gap therein to provide a circuit open condition, an intermittent part formed a predetermined distance from the substrate, the intermittent part being operable to contact the transmission line on both sides of the gap by performing a seesaw movement about a seesaw movement axis, and a driving part to drive the seesaw movement of the intermittent part in response to a driving signal.

Abstract: An RF signal divider/combiner is provided for dividing a supplied RF signal to any number of up to N output ports. A switchable impedance matching network is provided to impedance match the divider according to the number of output ports connected.

Abstract: According to one embodiment a microelectromechanical (MEMS) switch is disclosed. The MEMS switch includes a substrate, a bottom electrode mounted on the substrate, a top electrode mounted on the bottom electrode, an actuation electrode mounted on the substrate and a resistor coupled to the actuation electrode. The resistor prevents self-actuation at the actuation electrode whenever the switch is open.

Abstract: A high isolation RF switch for launching a selected one of two RF signals into a slabline transmission line structure has a three switch configuration—a pair of input switches coupled to corresponding input ports and a transition switch coupled to an output port via a slabline transmission line. The input switches select one of the input ports for coupling to the transition switch, and the transition switch couples the selected input port from the input switches to the output port. A grounded conductor is situated between the input ports in a cavity of a housing within which the high isolation RF switch is located to provide isolation between the input ports. Additional isolation between the input ports is provided by coupling the non-selected RF signal to ground, either by grounding the non-selected input to the transition switch or the non-selected input port.

Abstract: The present invention relates to a switch device for opening and closing at least one electrical line, the device comprising: at least one pair of contact terminals; at least one drive member each drive member including a contact piece suitable for being displaced axially between a closed position in which the contact piece presses simultaneously against the two contact terminals of said at least one pair, interconnecting them electrically, and an open position in which the contact piece is spaced apart from said two contact terminals; and at least one actuator comprising an actuator element that is movable and suitable for driving said drive member(s); at least one of the actuator element and the drive member being connected to a stationary portion of said device by means of a generally flexible holding element, which element has at least one region secured to said stationary portion of the device, and at least one region secured to the actuator element or the drive member, which region is suitable for fl

Abstract: A power combining system includes multiple amplifiers, a reactive combiner for combining the output power of the amplifiers and a short plate. Switches are used to electrically connect an output of each of the amplifiers to an input of the reactive combiner. In the event of amplifier failure, the switches are used to electrically connect the short plate to an input of the reactive combiner in place of the failed amplifier.

Abstract: A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom electrode, a dielectric layer deposited on at least part of said bottom electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actuation area in order to stabilize the down state position of the armature. The device may furthermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area or with relay actuation.

Abstract: A military special operations forces communications assisting, ruggedized, manually operated coaxial antenna A/B switch especially suited for mounting directly on the input/output port connector of a wide band transceiver radio apparatus or for alternate use as a tether-connected switch. The switch includes multi-switch stacking capability, weather and rough usage adaptability, detented operation, accidental position change protection, gloved hand operation and desirable electrical characteristics. Use of the switch in single or multi switch arrangements under darkened and time-limited battlefield conditions to change between differing antennas used with a military mission transceiver radio transceiver is possible.

Abstract: This application discloses a microelectromechanical (MEMS) switch apparatus comprising an anchor attached to a substrate and an electrically conductive beam attached to the anchor and in electrical contact therewith. The beam comprises a tapered portion having a proximal end and a distal end, the proximal end being attached to the anchor, an actuation portion attached to the distal end of the tapered portion, a tip attached to the actuation portion, the tip having a contact dimple thereon. The switch apparatus also includes an actuation electrode attached to the substrate and positioned between the actuation portion and the substrate. Additional embodiments are also described and claimed.

Abstract: As the basic building block of microwave and millimeter wave units and circuits, the microwave switch must fulfill several requirements including low insertion loss, high isolation and small dimensions. For conventional electrostatically actuated microwave MEMS switches, the isolation between DC and RF is achieved using an RF choke. In this invention, a miniature electrostatically actuated microwave switch with a cantilever and employing two resistive lines on a first substrate and act as the actuation electrodes is provided. The resistive lines as the actuation electrodes according to this invention allows one to minimize the switch dimensions, to facilitate the integration and minimize the interference of the propagating microwave or millimeter wave signals.

Abstract: A tunable ferroelectric component and a narrowband resonant circuit for measuring the loss of the ferroelectric component. The ferroelectric component may be a capacitor integrated in the resonant circuit. The testing method eliminates other sources of loss to isolate the loss due to the ferroelectric material and to demonstrate that this loss is low.

Abstract: A high frequency module substrate device used in a high frequency module apparatus, which is adapted for switching pass-frequency characteristic of band-pass filter by switching and is adapted so that optimum band-pass filter characteristic is obtained in all pass-frequency bands, wherein a thin film capacitor element (18) is constituted between a base substrate (2) in which the uppermost layer is flattened with organic substrate being as core substrates (5), (6) to constitute a buildup formation surface (16) and a high frequency circuit unit (3) of lumped parameter design formed on the buildup formation surface in a laminated manner to carry out switching of load of parallel capacity with respect to a coupler (11) having frequency characteristic of ?/4 which has been caused to undergo distributed parameter design at the base substrate portion side of the thin film capacitor through switch means (4).

Abstract: A transmission line structure includes first and second mutually separated strip conductors lying on an upper side of an upper dielectric sheet, and a ground conductor juxtaposed with the lower side of the upper dielectric sheet. A further strip conductor lies on a lower side of a lower dielectric sheet, with its ends registered with the ends of the first and second strip conductors. A gap in the further strip conductor is controllably bridged by a MEMS switch element, which may lie below the second dielectric sheet or in a cavity defined in the second dielectric sheet.

Abstract: A micro electromechanical system (MEMS) switch (10) includes a substrate (12) and a stress free beam (14) disposed above the substrate (12). The stress free beam (14) is provided within first and second platforms (16, 18) to limit displacement of the stress free beam (14) in directions that are not substantially parallel to the substrate (12). A set of one or more control pads (20) is disposed in a vicinity of a first lengthwise side (22) of the stress free beam (14) for creating a potential on the first lengthwise side (22) of the stress free beam (14). The stress free beam (14) is displaceable in directions substantially parallel to the substrate (12) in accordance with the potential for providing a signal path.

Abstract: An RF switch useable up to millimeter wave frequencies and higher frequencies of 30 GHz and above. Four embodiments of the invention are configured as ground switches. Two of the ground switch embodiments are configured with a planar air bridge. Both of these embodiments are configured so that the bridge length is shortened between the transmission line and ground by introducing grounded stops. The other two ground switch embodiments include an elevated metal seesaw. In these embodiments, a shortened path to ground is provided with relatively low inductance by proper sizing and positioning of the seesaw structure. Lastly, broadband power switch embodiment is configured to utilize only a small portion of the air bridge to carry the signal. The relatively short path length results in a relatively low inductance and resistance lowers the RF power loss of the switch, thereby increasing the RF power handling capability of the switch.

Abstract: A switch contact for use in a microwave switch. The contact comprises a probe contact member having a first contact region with a first surface, and a reed contact member having a second contact region with a second surface. The second surface is non-conformal with respect to the first surface for providing an incomplete mechanical contact when the contact members are in contact.

Abstract: A method and apparatus for controlling the coupling of a circuit into a signal path is described. A moveable element is supported by a substrate and has a magnetic material and a long axis. At least one magnet produces a first magnetic field. The first magnetic field induces a magnetization in the magnetic material. The magnetization is characterized by a magnetization vector pointing in a direction along the long axis of the moveable element. The first magnetic field is approximately perpendicular to a major central portion of the long axis. A coil produces a second magnetic field to switch the moveable element between first and second stable states. Only temporary application of the second magnetic field is required to change direction of the magnetization vector, which causes the moveable element to switch between the first and second stable states. In the first stable state, the moveable element does not couple the circuit in series with a signal.

Abstract: This application discloses a microelectromechanical (MEMS) switch apparatus comprising an anchor attached to a substrate and an electrically conductive beam attached to the anchor and in electrical contact therewith. The beam comprises a tapered portion having a proximal end and a distal end, the proximal end being attached to the anchor, an actuation portion attached to the distal end of the tapered portion, a tip attached to the actuation portion, the tip having a contact dimple thereon. The switch apparatus also includes an actuation electrode attached to the substrate and positioned between the actuation portion and the substrate. Additional embodiments are also described and claimed.

Abstract: A high power switchable power combiner includes a plurality of input ports and a plurality of matching elements. The matching elements are arranged to be used in combination when more than two of the input ports are connected. A thermally conductive dielectric member may be provided between the inner conductor of the combiner and the conductive housing thereof to provide a thermal path to dissipate heat from the center conductor.

Abstract: A conductive bridge in a second conductive layer may be utilized to join a pair of spaced apart conductive strips in a first conductive layer. A gap between the first and second strips may be bridged by the bridge while isolating both the first and second strips and the bridge itself from another conductor which extends through the gap between the first and second strips.

Abstract: Coplanar waveguides have a center signal line and a pair of ground lines on either side formed of a sputtered material such as gold (Au). Such waveguides are subject to what is known as the edge effect at high frequency operation causing currents to concentrate and flow along adjacent edges of the lines. Providing a thicker plated layer only on adjacent edges of the lines provide substantial performance improvements over sputtered lines alone while saving significant amount of Au, thus reducing costs.

Abstract: A micro-electrical-mechanical system (MEMS) switch. The switch includes a compliant spring that supports a contact shuttle for movement in a lateral direction generally parallel to the substrate and biases the contact shuttle to a normally open switch state position. A plurality of moving electrodes are coupled to the contact shuttle. A plurality of fixed electrodes are interleaved with the moving electrodes. The moving electrodes and the fixed electrodes have generally planar major surfaces perpendicular to the plane of the substrate. Electrostatic forces developed between the fixed and moving electrodes cause the contact shuttle to move to a closed switch state position in response to the application of an actuation voltage. The moving direction of the moving electrodes and the contact shuttle is along a longitudinal axis parallel to the substrate and perpendicular to the planar major surfaces of the electrodes.

Abstract: A microelectromechanical system (MEMS) analog isolator may be created in which an actuator such as an electrostatic motor drives a beam against an opposing force set, for example, by another electrostatic motor. Motion of the beam may be sensed by a sensor also attached to the beam. The beam itself is electrically isolated between the locations of the actuator and the sensor. The structure may be incorporated into integrated circuits to provide on-chip isolation.

Abstract: A switch includes at least two distributed constant lines (21a, 21b) disposed close to each other, a movable element (11) arranged above the distributed constant lines so as to oppose these distributed constant lines and connecting the distributed constant lines to each other in a high-frequency manner upon contacting the distributed constant lines, and a driving means (4) for displacing the movable element by an electrostatic force to bring the movable element into contact with the distributed constant lines. The movable element has at least two projection (32a-32d) formed by notching an overlap portion of the movable element which is located on at least one distributed constant line. The projections oppose a corresponding distributed constant line.

Abstract: A microwave switch for transmitting signals having a plurality of ports and a plurality of signal paths for selective transmission of the signals. Each signal path is disposed between a respective pair of the ports and each signal path has a conducting state in which signal transmission occurs between the respective pair of ports and a non-conducting state in which signal transmission does not occur between the respective pair of ports. The switch also has a plurality of actuators, each actuator being adapted to actuate at least one of the signal paths between the conducting and non-conducting states. At least one of the ports and at least one of the signal paths are located on a first plane and the remainder of the ports and the signal paths are located on a second plane such that there are no cross over points between the signal paths in any of the planes. A switch matrix can be built using this bi-planar switch such that the switches in the matrix are connected without any cross over points.

Abstract: A high power switchable power combiner includes a plurality of input ports and a plurality of matching elements. The matching elements are arranged to be used in combination when more than two of the input ports are connected. A thermally conductive dielectric member may be provided between the inner conductor of the combiner and the conductive housing thereof to provide a thermal path to dissipate heat from the center conductor.

Abstract: A switch arrangement comprises a plurality of MEMS switches arranged on a substrate about, and close to, a central point, each MEMS switch being disposed on a common imaginary circle centered on the central point. Additionally, and each MEMS switch is preferably spaced equidistantly along the circumference of the imaginary circle and within one quarter wavelength of the central point for frequencies in the passband of the switch arrangement. Connections are provided for connecting a RF port of each one of the MEMS switches with the central point.

Abstract: A switch comprises voltage applying means for providing direct current potentials to first to third beams arranged with a spacing slightly distant one from another, and electrodes for inputting/outputting signals to/from the beams. By controlling the direct current potential provided to the beam, an electrostatic force is caused to thereby change the beam positions and change a capacitance between the beams. By causing an electrostatic force between the first and second beams and moving the both beams, the first and second beams can be electrically coupled together at high speed. Also, an electrostatic force is caused on the third beam arranged facing to the first and second beams, to previously place it close to the first and second beams. When the electrostatic force is released from between the first and second beams, the second beam moves toward the third beam thereby releasing the first and second beams of an electric coupling.

Abstract: In a switching scheme mechanical MEMs switches are connected in parallel with solid state switches. This parallel MEMS/solid-state switch arrangement takes advantage of the fast switching speeds of the solid state switches as well advantage of the improved insertion loss and isolation characteristics of the MEMS switches. The solid-state switches only need to be energized during a ramp up/down period associated with the slower MEMs switch thus conserving power. As an additional advantage, using a solid-state switch in parallel with MEMs switches improves the transient spectrum of the system during switching operations.

Abstract: An RF switch useable up to millimeter wave frequencies and higher frequencies of 30 GHz and above. Four embodiments of the invention are configured as ground switches. Two of the ground switch embodiments are configured with a planar air bridge. Both of these embodiments are configured so that the bridge length is shortened between the transmission line and ground by introducing grounded stops. The other two ground switch embodiments include an elevated metal seesaw. In these embodiments, a shortened path to ground is provided with relatively low inductance by proper sizing and positioning of the seesaw structure. Lastly, broadband power switch embodiment is configured to utilize only a small portion of the air bridge to carry the signal. The relatively short path length results in a relatively low inductance and resistance lowers the RF power loss of the switch, thereby increasing the RF power handling capability of the switch.

Abstract: A switch contact for use in a microwave switch. The contact comprises a probe contact member having a first contact region with a first surface, and a reed contact member having a second contact region with a second surface. The second surface is non-conformal with respect to the first surface for providing an incomplete mechanical contact when the contact members are in contact.

Abstract: A switch arrangement includes a MEMS switch connected to a voltage supply system. The MEMS switch has a mechanical resonant frequency. The voltage supply system has a capability for supplying a voltage with a frequency corresponding to the mechanical resonant frequency of the switch. A method includes providing a MEMS switch including a movable part which has a mechanical resonant frequency, and then supplying an AC voltage to the movable part. The AC voltage has a frequency corresponding to the mechanical resonant frequency of the movable part.

Abstract: A broadband multiple input, multiple output switch matrix. The switch matrix comprises multiple crosspoint switch element tiles. Each tile comprises RF MEMS switches disposed on a substrate to provide a crosspoint switching capability. The crosspoint switch element tiles are disposed in a flip-chip manner on the upper side of an RF substrate that provides RF connectivity between the various crosspoint switch element tiles. A bias line substrate disposed on the lower side of the RF substrate receives control signals for the crosspoint switch element tiles and routes the signals through the RF substrate using vias in the RF substrate.

Abstract: A high frequency module substrate device used in a high frequency module apparatus, which is adapted for switching pass-frequency characteristic of band-pass filter by switching and is adapted so that optimum band-pass filter characteristic is obtained in all pass-frequency bands, wherein a thin film capacitor element (18) is constituted between a base substrate (2) in which the uppermost layer is flattened with organic substrate being as core substrates (5), (6) to constitute a buildup formation surface (16) and a high frequency circuit unit (3) of lumped parameter design formed on the buildup formation surface in a laminated manner to carry out switching of load of parallel capacity with respect to a coupler (11) having frequency characteristic of &lgr;/4 which has been caused to undergo distributed parameter design at the base substrate portion side of the thin film capacitor through switch means (4).

Abstract: A mini BNC connector, which provides a better signal transmission quality and can be fabricated conveniently, includes a metal outer casing with two locating cylinders and a joining chamber communicating with the two cylinders, two insulators fitted in the locating cylinders respectively with each of the two insulators having a piercing hole, two terminals joined to the piercing holes respectively with a tail section respectively extending to the joining chamber, two conductors connected to the tail sections respectively and a further insulator having two through holes joined to the conductors respectively and fitting with the inner side of the joining chamber so as to fix the conductors.

Abstract: A conductive bridge in a second conductive layer may be utilized to join a pair of spaced apart conductive strips in a first conductive layer. A gap between the first and second strips may be bridged by the bridge while isolating both the first and second strips and the bridge itself from another conductor which extends through the gap between the first and second strips.