Abstract: A sanitizing shield for a vehicle includes a separation surface configured to at least partially shroud a shielded seat. The separation surface has an inner seat facing side and an outer shielding side. The sanitizing shield includes a sanitization station coupled to the separation surface. The sanitizing shield can have one or more of a hand sanitizer dispenser, an air purifier, and/or an ultraviolet-C (UVC) sanitizer. The sanitizing shield provides for improved physical separation within the passenger cabin while enhancing the sanitization potential available to rear passengers of the vehicle.

Abstract: An oven system includes an oven chamber defined by side walls and a top wall. The oven chamber includes a slot formed in the top wall. A conveyor rail extends longitudinally along the slot at a position outside of the oven chamber. A conveyor hanger is coupled to and movable along the conveyor rail to support a material within the oven chamber. A first support bracket and a second support bracket each extend longitudinally along a length of the top wall of the oven chamber. The second support bracket is spaced from the first support bracket to define the slot that extends longitudinally along the top wall of the oven chamber. A closure mechanism is coupled to the first and second support brackets to inhibit heat from releasing out of the oven chamber.

Abstract: A computing system includes a liquid cooled segment and an air cooled segment that are both removably received and secured inside a chassis with a fixed physical arrangement relative to one another. The fluid cooled segment includes an enclosure forming an enclosed space for placement of one or more high heat generating components. The enclosed space being in fluid communication with an inlet tube for receiving a cooling fluid and an outlet tube for expelling the cooling fluid that has been used to cool the high heat generating components. The enclosure includes a leak proof connector configured on the enclosure. The air cooled segment includes one or more reduced heat generating components. The reduced heat generating components are electrically coupled to the high heat generating components through the leak proof connector.

Abstract: An apparatus for drying clothes includes a body having an inner space, a first dryer rotatably arranged in the inner space to dry a first load of laundry while the first load is tumbled, and a second dryer to dry a second load of laundry without tumbling. The second dryer uses air discharged from the first dryer to dry the second load of laundry.

Abstract: The present invention provides a preheat module, which comprises a heating chamber, a blower and a platform; the heating chamber comprises a heating device and a first inlet; the blower comprises a second inlet and a first outlet, and the second inlet is connected to the heating chamber; the platform comprises a third inlet and a second outlet, and the third inlet is connected to the first outlet; the first inlet and the second outlet are set in a same plane. An advantage of the present invention is that it can reduce the energy consumption also can satisfy the requirement of conserving electrical power and protecting the environment.

Abstract: Apparatus for treatment of multiple articles located in separate chambers (38) for treatment with an ambient or heated, and/or treated air flow stream (44); and processes for drying multiple articles located in the separate chambers (38) using an ambient or heated, and/or treated air flow stream (44). The chambers (38) are within a container or form a container (36), and the chambers (38) are connected in a manner that defines a virtual air flow stream tube having a length in excess of any single nominal length dimension or of any nominal internal width dimension or of any nominal internal height dimension of the container so that any to-be-treated items supported within any chamber is treated with air flow stream (44).

Abstract: Disclosed is an apparatus and method for capturing the hot humid gases from a gypsum board dryer and utilizing those gases in the production of a synthetic gas (referred to as “syngas”). The syngas produced can then be utilized within a gypsum board plant to reduce the amount of natural gas needed.

Abstract: The present invention relates to a biomass product drying system having a fluidized bed for mixing, drying and transporting the biomass product through one or more stages in order to sufficiently dry the biomass product for commercial markets.

Abstract: A multiple laundry treating machine, in which an auxiliary laundry treating device (120) is coupled to a general laundry treating device (110), is disclosed. The multiple laundry treating machine includes a main laundry treating device (110) for washing or drying laundry contained in an interior of the main laundry treating device (110), an auxiliary laundry treating device (120) arranged at one side of the main laundry treating device (110), the auxiliary laundry treating device (120) having a volume and a height respectively smaller than a volume and a height of the main laundry treating device (110), and having a laundry container (121) formed in an interior of the auxiliary laundry treating device (120), and a connecting unit (300) for connecting the main and auxiliary laundry treating devices (110, 120), to enable communication or control operations between the main and auxiliary laundry treating devices (110, 120).

Abstract: A substrate processing system that has a plurality of deposition chambers, and one or more robotic arms for moving a substrate between one or more of a deposition chamber, load lock holding area, and a curing and treatment module. The substrate curing and treatment module is attached to the load-lock substrate holding area, and may include: The curing chamber for curing a dielectric layer in an atmosphere comprising ozone, and a treatment chamber for treating the cured dielectric layer in an atmosphere comprising water vapor. The chambers may be vertically aligned, have one or more access doors, and may include a heating system to adjust the curing and/or heating chambers between two or more temperatures respectively.

Abstract: A vacuum drying apparatus of a circulative preheating type comprises a working area, containing a material-filling-preheating sub-area, a heating sub-area, a drying sub-area, and a material-discharging sub-area; a rotatable frame, rotatably installed in the working area and having four accommodating spaces corresponding to the sub-areas of the working area, respectively; four cylinders, installed in the accommodating spaces of the rotatable frame and corresponding to the sub-areas of the working area; and a driving assembly, connected to and thereby driving the rotatable frame to rotate; wherein when the rotatable frame rotates, each of the cylinders is moved from a currently corresponding sub-area to an adjacent said sub-area. Thereby, since the cylinders have been preheated in the material-filling-preheating sub-area before receiving a heating procedure in the heating sub-area, a required duration of the heating procedure can be reduced.

Abstract: A tray dryer is provided that has tray stack with trays that rotate about an axis. A material leveler is stationary with respect to the rotating trays and has a leveling surface that engages the product. The material leveler has a plurality of prongs that engage the product and that in combination with the leveling surface form a series of rows in the product on the upper surface of one of the trays. The material leveler does not function to hold the product for transfer to a subsequent tray of the tray stack.

Abstract: The invention relates to a device (1) for malting cereals comprising a tower (2) consisting a certain number of stories which are separated from each other by storey floors (9, 10), each storey comprising an air-proof carrier plate (13) carrying germinating cereals (24). Said tower also comprises air conditioning means for air conditioning, transfer means provided with a feeding channel and a removing channel for transferring conditioned air by means of the feeding channel which extends from air conditioning means downwards to the bottom of the carrier plate, passes along said carrier plate and a cereal layer arranged thereon in a direction of the top surface of said cereal layer and exits said top surface of the cereal layer by means of the removing channel. The inventive device is characterized in that the feeding channel and/or removing channel extend through a central opening in at least one storey floor.

Abstract: Disclosed is a system to dry the hands of individuals. The system may include a pedestal, an air pedal and powder pedal hinged to the pedestal, a chamber having a dome connected to a shroud to define a chamber interior. The chamber interior may be divided into a first divided area, a second divided, and an overhead area that connects the first divided area to the second divided area. Each dived area may include a perforated tube to deliver pressurized air and powder into the chamber interior. An air compressor may be connected directly to the perforated tubes and connected to a powder chamber. In addition to pressurized air being delivered to the chamber interior, powder optionally may be delivered to the chamber interior.

Abstract: A vacuum drying apparatus of a circulative preheating type comprises a working area, containing a material-filling-preheating sub-area, a heating sub-area, a drying sub-area, and a material-discharging sub-area; a rotatable frame, rotatably installed in the working area and having four accommodating spaces corresponding to the sub-areas of the working area, respectively; four cylinders, installed in the accommodating spaces of the rotatable frame and corresponding to the sub-areas of the working area; and a driving assembly, connected to and thereby driving the rotatable frame to rotate; wherein when the rotatable frame rotates, each of the cylinders is moved from a currently corresponding sub-area to an adjacent said sub-area. Thereby, since the cylinders have been preheated in the material-filling-preheating sub-area before receiving a heating procedure in the heating sub-area, a required duration of the heating procedure can be reduced.

Abstract: An operation method for a drying device is disclosed. More particularly, the present invention relates to a new type of a drying device which enables air in a drying drum and a cabinet for drying the laundry to circulate continuously, as well as capable of getting a suitable output of power based on each drying cycle due to a various structure of a drying heater.

Abstract: A hybrid thermal management system for providing simultaneous spray cooling and dry cooling for a plurality of cards. The hybrid thermal management system includes a chassis having a global spray chamber, a hybrid chamber, a first opening within a rear portion of the chassis extending into the global spray chamber, a second opening within the rear portion of the chassis extending into the hybrid chamber, and a backplane secured and sealed to the rear portion of the chassis. A dry chamber may be attached to the chassis for air cooling electrical components. The cards within the global spray chamber are typically high heat flux components with increased cooling requirements and the cards in the hybrid chamber are comprised of dry/air cooling and zone cooling components.

Abstract: A dry-wet thermal management system for providing simultaneous spray cooling and dry cooling for a plurality of cards. The dry-wet thermal management system includes a chassis having a dry chamber and a spray chamber, a first opening within a rear portion of the chassis extending into the spray chamber, a second opening within the rear portion of the chassis extending into the dry chamber, and a main backplane secured and sealed to the rear portion of the chassis. Electronic cards may be electrically coupled within sockets of the main backplane within both the dry chamber and the spray chamber. The cards within the spray chamber are typically high heat flux components with increased cooling requirements and the cards within the dry chamber are typically low heat flux components with reduced cooling requirements. A spray cool system is within the spray chamber and a dry cool system is within the dry chamber.

Abstract: Embodiments of the present invention generally relate to an apparatus and methods for rinsing and drying substrates that include multiple rinsing and drying modules. Methods for arranging drying modules to enable high-throughput rinsing and drying of multiple substrates are also provided. In one embodiment a system for drying semiconductor substrates is provided. The system comprises a housing, a first drying module positioned within the housing, and a second drying module positioned adjacent the first drying module within the housing, wherein the first and second drying modules are oriented approximately vertically within the housing.

Abstract: Apparatus for treatment of multiple articles located in separate chambers (38) for treatment with an ambient or heated, and/or treated air flow stream (44); and processes for drying multiple articles located in the separate chambers (38) using an ambient or heated, and/or treated air flow stream (44). The chambers (38) are within a container or form a container (36), and the chambers (38) are connected in a manner that defines a virtual air flow stream tube having a length in excess of any single nominal length dimension or of any nominal internal width dimension or of any nominal internal height dimension of the container so that any to-be-treated items supported within any chamber is treated with air flow stream (44).

Abstract: This vacuum processing apparatus has a fixed processing chamber 24 and two movable load lock chambers 28a and 28b. A gate valve 26 is provided on the processing chamber 24, and gate valves 30 are respectively provided on the load lock chambers 28a and 28b. Each of the load lock chambers 28a and 28b is moved in a Y direction by a preparatory chamber moving mechanism 34. A vacuum seal 54, which is expandable and shrinkable so as to vacuum seal a gap G between the gate valves 26 and 30 which are set close to each other during the expansion, is provided around a peripheral edge portion of the processing chamber gate valve 26. Further, a substrate transporting mechanism for transporting a substrate 2 between the processing chamber 24 and each of the load lock chambers 28a and 28b set close thereto.

Abstract: The present invention is directed to a substrate dryer, a substrate treating apparatus including the substrate dryer, and a substrate treating method. The substrate dryer includes a chamber, a process chamber constituting one part of the chamber and provided for supplying supercritical fluid to a substrate to dry the substrate, and a high-pressure chamber constituting the other part of the chamber and provided for boosting the process chamber above a critical pressure. According to the present invention, the substrate drying chamber is boosted fast by the high-pressure chamber to change to a supercritical state and thus a substrate dry treatment is performed using supercritical fluid.

Abstract: A dual chamber apparatus including a first chamber and a second chamber which is configured to be coupled to the first chamber at an interface. Each of the first chamber and the second chamber has a transfer opening located at the interface. An insulating plate is located on one of the first chamber and the second chamber at the interface and is configured to have a low thermal conductivity such that the first chamber and the second chamber can be independently controlled at different temperatures when the first chamber and the second chamber are coupled together. Additionally, the apparatus may include an alignment device and/or a fastening device for fastening the first chamber to the second chamber. In embodiments, the insulating plate may be constructed of Teflon. Further, the first chamber may be a chemical oxide removal treatment chamber and the second chamber may be a heat treatment chamber.

Abstract: A cognitive stimulating sterilizing device for providing visual, tactile and, or audible stimulation for infants while selectively sterilize select items and the surrounding ambient, including a housing adapted for removable connection to cribs, changing tables and similar furniture, ultraviolet light generating source in the housing for sanitizing items in the housing when closed and the ambient when opened, audio source and compartments for holding and storing select items. The housing may include reflective and, or transparent surfaces for directing, reflecting and, or passing ultraviolet light.

Abstract: Methods and apparatus for cleaning hearing aid devices are disclosed. Drying is facilitated in hearing instruments through a novel combination of heater and desiccant in an essentially closed system. Greater efficiency is obtained by minimizing the volume of gas, e.g., air, requiring moisture extraction.

Abstract: A dry-wet thermal management system for providing simultaneous spray cooling and dry cooling for a plurality of cards. The dry-wet thermal management system includes a chassis having a dry chamber and a spray chamber, a first opening within a rear portion of the chassis extending into the spray chamber, a second opening within the rear portion of the chassis extending into the dry chamber, and a main backplane secured and sealed to the rear portion of the chassis. Electronic cards may be electrically coupled within sockets of the main backplane within both the dry chamber and the spray chamber. The cards within the spray chamber are typically high heat flux components with increased cooling requirements and the cards within the dry chamber are typically low heat flux components with reduced cooling requirements. A spray cool system is within the spray chamber and a dry cool system is within the dry chamber.

Abstract: A web converting process and apparatus employing a dry converting station and substrate-handling equipment for conveying the substrate through the dry converting station. The substrate is enveloped in the dry converting station by a close enclosure supplied with one or more streams of conditioned gas flowing at a rate sufficient to reduce materially the particle count in the close enclosure.

Abstract: Preferred embodiments of the present invention provides a sublimation system employing guidance structures including certain preferred embodiments having a high surface area support medium onto which a solid source material for vapor reactant is coated. Preferably, a guidance structure is configured to facilitate the repeated saturation of the carrier gas with the solid source for a vapor reactant. Methods of saturating a carrier gas using guidance structures are also provided.

Abstract: There are provided a substrate drying method and apparatus by which an attachment amount of particles to surfaces of substrates can be reduced when the substrates are exposed from pure water, and occurrence of non-uniform drying can be prevented by improving drying efficiency of the substrates. Air or an inert gas, and gaseous or droplet-like isopropyl alcohol (hereinafter, referred to as IPA) are supplied into a space on a liquid level of the pure water in a drying chamber, and pure water on a liquid level side is drained from the liquid level or the vicinity of the liquid level of the pure water, while raising the pure water in which the substrates are immersed together with the substrates, the substrates are exposed from the pure water above the liquid level in the drying chamber, and, at the same time, the pure water held on the exposed surfaces of the substrates is replaced by IPA, whereby the substrates are dried.

Abstract: A web coating process and apparatus employing a coating applicator, dryer or curing station and web-handling equipment for conveying the web past the coating applicator and through the dryer. The web is enclosed from at least the coating applicator to the dryer or curing station in a close-coupled enclosure or series of close-coupled enclosures supplied with one or more streams of conditioned gas flowing at a rate sufficient to reduce materially the particle count or change materially a physical property of interest in a close-coupled enclosure.

Abstract: The aim of the present invention is to create an efficient energy rational and consequently economical drying device, particularly the drying compartment unit, which could be used for drying processes for all wood products regardless to dimensions, with the ability of a controlled process of humid transfer from wood in specific atmospheric conditions by travel air, to achieve improvement of quality of drying wood, which include known drying effects, by the construction of the kiln volume proportional to fulfil dimensional and transport standards of transport containers, thus making possible the drying device being exploited by end user as a stationary or mobile type.

Abstract: A desolventizing system for removing solvent from a quantity of solvent-laden particles such as flakes comprises first and second desolventizer units, each having an inlet port for receiving solvent-laden particles, an outlet port for discharging at least partially desolventized particles, and a solvent vapor port. A solvent trap is connected between the outlet port of the first desolventizer through a first airlock, and to the inlet port of the second desolventizer unit. Particles entering the solvent trap through the first airlock are conveyed to the inlet port of the second desolventizer. The second desolventizer unit has an airlock connected to the outlet port of the second desolventizer unit.

Abstract: A forage bale dryer is described, which is particularly adapted to dry large bales of forage material, such as hay, alfalfa, etc. The dryer has a bale support platform disposed between a lower and an upper plenum chamber, and the upper plenum chamber is spaced from the support platform to define an accessible stacking area for disposing one or more layers of forage bales onto the support platform. An air circulating passage is connected to the plenum chambers to direct a drying air flow there across. A sheet of flexible film material is disposed about the stack of bales and between the plenum chambers, whereby upon the application of a drying air flow, a negative pressure causes the flexible film material to collapse against the circumferential side surface of the stack of bales, whereby the drying air flow is confined through the stack. The drying air flow is also reversible by proper synchronization of valve plates in the air circulating conduits.

Abstract: A container which is to be autoclaved has a shiftable plunger that defines a compartment filled with a fluid. The container is confined in a pressurizable chamber and heated so as to change a pressure in the compartment of the container. The pressure in the compartment of the container is monitored and an output corresponding thereto is generated. Pressure in the chamber around the container is continuously varied so as to be generally equal to the instantaneous monitored pressure in the compartment of the container. In this manner the plunger is not moved by thermal expansion or contraction of the fluid.

Abstract: A drier for continuous flow drying of food products, especially pasta, inside the drier with adjustable and/or conditioning zones along the continuous flow path of the product. The inside of the drier can be accessed by a maintenance technician and the respective horizontal segments of the side walls are sub-divided perpendicular to the direction of the continuous flow from top to bottom into respectively at least two vertical segments which are respectively curved in an outer direction and which can also be moved away from the housing in an independent manner, enabling the maintenance technician to have access to the inside from the respective point of a vertical segment moved away from the housing.

Abstract: A heating oven for use in dynamo-electric machine component manufacture is provided. The oven uses forced air heating to raise the temperature of in-process component subassemblies to suitable process temperatures. The heating oven includes a rotating drum mounted in a cabinet. A number of open-ended tubular cradles are disposed in circular arrays between the drum faces. Batches of component subassemblies may be individually loaded into the cradles for heat treatment. Air flow channels are set up in the oven cabinet to evenly distribute heated air through individual cradles. Heated air after passing over the individual in-process subassemblies, exits the cradles through side slots in the cradle walls into the interior of the drum. The exiting air is reheated and recirculated through the heating oven.

Abstract: Disclosed is a high-speed drying apparatus for drying objects, which are rinsed with non-volatile or volatile liquid. The drying apparatus is capable of quickly drying such objects at a reduced cost, not permitting their oxidization.

Abstract: A treating device for use with a fabric article drying appliance. The treating device dispenses a benefit composition into a chamber so as to provide benefits to fabric articles contained within the fabric article drying appliance. The treating device is comprised of at least two housings in communication with one another wherein at least one housing is located in the interior of a fabric article drying appliance and at least one housing is located outside of the fabric article drying appliance.

Abstract: The invention relates to a method for treating plastic material, especially polyethylene terephthalate, wherein the relatively low temperature material is initially crystallized by heating before subjecting said material to heating or condensation in the solid phase. The material is then exposed to a hot treatment gas for at least 10 minutes in at least two chambers (2) of an apparatus and crystallized at a temperature above 135° C., e.g. 140-180° C. The is subsequently heated in a preheating chamber (3) having at least one to eight stages at a temperature of at least 185° C., preferably at least 200° C. and more preferably around 220° C.

Abstract: A garment drying apparatus (200) is disclosed having a frame (201), a porous net 204, slip proof pads (205,206), an adjustable width garment hanger (202) and a hook (203) to support said adjustable width garment hanger; the frame (201) rests at an acute angle from the floor to provide iron free drying effect.

Abstract: The invention produces equipment for drying bales of forage comprising: at least one unit for generating hot air (30) channeled onto at least one pair of treatment units (A, B) stack one over the other, each having a rectangular bottom chamber (2, 5) and top chamber (4, 6), kept apart by spacing devices (40, 41; 60, 61; 103, 104) supporting the top chamber above the bottom chamber, and where one or more telescopic columns (A1, A2, A3; B1, B2, B3) set between the bottom chamber and the top chamber transfer the hot air from the bottom chamber to the top one. The bales are set in each treatment unit between the bottom chamber (2, 5) and the top chamber (4, 6) stacked in two layers so that they can be dried by the countercurrent flow of hot air. One or more of the telescopic columns (A3; A1, A2) is provided with shutoff dampers (20; 101, 102) suited to opening/closing the air flow from the bottom treatment unit (A) to the top treatment unit (B).

Abstract: The invention provides a compact drying chamber for drying printed circuit boards and electronic connectors and components mounted thereto by enhanced evaporation to remove residual water and completely dry printed circuit boards. The compact drying chamber comprises features that help maximize a velocity at which heated air impacts printed circuit boards to significantly enhance evaporation from surfaces of printed circuit boards and to raise the temperature of electronic connectors and components to allow evaporation therefrom, while maintaining low power consumption with respect to heating and circulating air. The compact drying chamber also comprises features that help maximize a dwell time of printed circuit boards in high velocity heated air within practical conveyance speeds, while maintaining overall dimensions that allow a compact design.

Abstract: A substrate changing-over mechanism in a vacuum processing apparatus which includes a substrate supporting means arranged within a vacuum tank which has at least two openings at a side wall of the tank, the openings being openable or closable by gate valves, the substrate supporting sections in upper and lower spaces and an ascending or descending driver section for driving the substrate supporting means; thereby allowing the supporting means to be stopped in a vertical direction at a plurality of predetermined positions.

Abstract: It is required with respect to the production of cement clinker from wet slurry raw materials that are calcined to cement clinker in a drying-rotary pipe furnace, which is preceded by a cyclone suspension type heat exchanger system, after the materials have been processed—to initially mechanically dewater the raw meal slurry up to a moisture of approximately 20% and to subsequently thermally dry the materials up to a residual moisture of approximately 0.5 through 1.0%. It is inventively proposed to carry out this thermal drying in a static cascade-step drier, whereby hot gas from the cyclone heat exchangers, in cross current, is led through the step drier for the drying.

Abstract: On drying pasty materials, particularly sewage sludge, the material is compacted in an intermediate drying stage with a dry fraction of 60 to 80%, so that relatively low energy costs are required. The conveying of the material takes place both during pre-drying and after leaving the compactor on one or two air-permeable conveyor belts (3, 4) succeeding one another in the conveying direction and which are enclosed in a common housing (2). Thus, drying before and after compacting is performed under identical method conditions, so that it is possible to produce a simple and therefore inexpensive installation for performing the method. The finished product has advantageous characteristics with regards to density and abrasion resistance, so that dust production is avoided during subsequent handling.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.

Abstract: The invention relates to a method for treating plastic material, especially polyethylene terephthalate, wherein the relatively low temperature material is initially crystallized by heating before subjecting said material to heating or condensation in the solid phase. The material is then exposed to a hot treatment gas for at least 10 minutes in at least two chambers (2) of an apparatus and crystallized at a temperature above 135° C., e.g. 140-180° C. The is subsequently heated in a preheating chamber (3) having at least one to eight stages at a temperature of at least 185° C., preferably at least 200° C. and more preferably around 220° C.

Abstract: An expandable tunnel garment finishing apparatus including a front module having an entrance for receiving garments on hangers for being conveyed through the apparatus, an initial treatment zone downstream from the entrance for treating the garments with steam and heat, a final treatment zone downstream from the initial treatment zone for treating the garments with hot air, and an exit downstream from the final treatment zone and adjacent the entrance through which the finished garments exit the finishing apparatus. The finishing apparatus also includes a rear module communicating with the front module for receiving garments conveyed therefrom. The rear module includes a heating apparatus for heating the garments, and a U-shaped intermediate treatment zone downstream from the initial treatment zone and upstream from the final treatment zone for receiving the garments from the initial treatment zone and for delivering the garments to the final treatment zone and the exit of the front module.

Abstract: A vertical multiple stage oven includes a first plurality of ovens in a vertical arrangement, and a second plurality of ovens in a vertical arrangement positioned adjacent the first plurality of ovens. An access port is provided to the first plurality of ovens and an exit port is provided from the second plurality of ovens. A coupling port couples the first plurality of ovens to the second plurality of ovens. A continuous pathway is defined through the first plurality of ovens and through the second plurality of ovens from the access port, through the coupling port to the exit port. Each oven is sealed from adjacent ovens by trays moving along the pathway.

Abstract: A raw material feeding apparatus is provided for a film-forming apparatus in which a thin film is formed from a solid matter as a raw material during chemical vapor-phase deposition. The apparatus includes sub-containers each having an opening for introduction of a gas, an opening for discharge of a gas, a bottom, on which a solid raw material is spread between the inlet opening and the outlet opening, and a wall defining a gap, in which a gas being introduced and discharged is made to contact the solid raw material spread on the bottom while the gas is moved on the surfaces of the material. The apparatus also includes a raw material container for receiving and holding the sub-containers. The apparatus also includes a heating device for heating the raw material container, and carrier gas conveying tubes for introducing a carrier gas into the raw material container and including a passage communicated to the outlet openings of the sub-containers.