Abstract: A piezoelectric element includes a lower electrode film formed on one surface of a substrate, a piezoelectric layer made of a piezoelectric material and disposed on the lower electrode film, and an upper electrode film disposed on the piezoelectric layer, in which the lower electrode film contains platinum, titanium, iridium, and oxygen, and the lower electrode film includes a first layer disposed on the substrate and containing platinum as a primary component, a second layer disposed on the first layer and containing titanium as a primary component, and a third layer disposed on the second layer and containing iridium as a primary component.

Abstract: Disclosed is a driving method. When the main piezoelectric element is driven so as to jet liquid droplets from a predetermined nozzle, a driving signal which is in opposite phase to a driving signal to be applied to the main piezoelectric element is applied to a sub piezoelectric element corresponding to a sub pressure chamber communicating with a nozzle, which does not jet liquid droplets.

Abstract: To provide an inkjet head that maintains a reliable electric connection between a flow channel unit and a common electrode of an actuator unit, a flow channel unit is provided with a cavity formed on an attachment surface of flow channel unit to attach to an actuator unit, and the actuator unit is provided with a contact terminal connected to the common electrode and formed at a position facing the cavity when the flow channel unit and the actuator unit are attached. The common electrode is reliably connected to the flow channel unit through the contact terminal and a conductive material filling the cavity.

Abstract: In a step of heating a piezoelectric precursor film, piezoelectric films are formed one by one on each of plurality of flow passage forming substrate wafers constituting a flow passage forming substrate wafer group, and an order of the flow passage forming substrate wafers for starting the heating of the piezoelectric precursor film is varied by the predetermined number of wafers of the flow passage forming substrate wafer group.

Abstract: A liquid-jet head includes: head main bodies each including at least a nozzle plate in which nozzle orifices are formed, each of the nozzle orifices being that from which liquid droplets are ejected; a passage-forming substrate, the nozzle plate being joined to one surface of the passage-forming substrate, and a plurality of pressure generating chambers respectively communicating with the nozzle orifices being arranged side by side in the passage-forming substrate; and pressure generators, each of which applies pressure to a liquid in each of the corresponding pressure generating chambers; and a fixing plate including exposure ports through which to expose the nozzle orifices to the outside respectively in areas corresponding to the head main bodies, the plurality of head main bodies being aligned and fixed, at predetermined intervals, to the fixing plate, the liquid-jet head wherein the fixing plate includes a reservoir forming plate, a compliance plate and a sealing plate, the reservoir forming plate being

Abstract: An inkjet head has a passage unit where individual ink passages are formed, and an actuator unit bonded onto the upper surface of the flow passage unit. On the upper surface of the actuator unit, plural individual electrodes are positioned opposing pressure chambers. The plural individual electrodes form plural individual electrode rows. Each individual electrode includes a main electrode region disposed where the pressure chamber is opposed, and an auxiliary electrode region connected to the main electrode region and a FPC terminal. In the individual electrode row closest to a base-end side of the FPC, the individual electrodes whose auxiliary electrode regions are on the tip-end side of the FPC in relation to the main electrode regions and the individual electrodes whose auxiliary electrode regions are on the base-end side of the FPC 50 in relation to the main electrode regions are mixed.

Abstract: An inkjet head comprises a plurality of individual electrodes each of which includes a first part and a second part connected to an end portion B of the first part. The end portion B is one of the end portions of a first part in a longitudinal direction of a pressure chamber. The second part of each of the individual electrodes corresponding to a first pressure chamber line is positioned between two first parts corresponding to two respective pressure chambers neighboring each other in a second pressure chamber line, so that an end portion C of the second part crosses over a line connecting each end portion D of the two first parts.

Abstract: A piezoelectric element includes: a base substrate; a lower electrode provided above the base substrate; a lower dummy electrode provided on the base substrate and electrically insulated from the lower electrode; a piezoelectric layer provided on the base substrate, the lower electrode and the lower dummy electrode; and an upper electrode provided on the piezoelectric layer.

Abstract: A liquid-jet head and a manufacturing method thereof are provided. The liquid-jet head includes a channel substrate which has pressure generation chambers formed therein and communicating nozzle orifices for discharging liquid droplets, and piezoelectric elements. The piezoelectric element includes a lower electrode, a piezoelectric layer and an upper electrode, and disposed on one surface of the channel substrate via a vibration plate, wherein at least pattern regions of the respective layers which constitute the piezoelectric element are covered with an insulating film formed of an inorganic insulating material.

Abstract: The droplet discharge head comprises: a plurality of nozzles which discharge droplets of liquid; a plurality of pressure chambers which are connected to the nozzles and filled with the liquid to be discharged through the nozzles; and a laminated piezoelectric body which has a plurality of active portions to impart pressure variation to the liquid inside the pressure chambers so as to cause the droplets to be discharged from the nozzles, respectively, wherein first linear grooves and second linear grooves which intersect each other at a prescribed non-orthogonal angle are formed in the laminated piezoelectric body, and the active portions of the laminated piezoelectric body are defined by the first and second linear grooves.

Abstract: A piezoelectric actuator 3 of a liquid transporting apparatus includes grooves 40 which are formed on a surface of a vibration plate 30 on a side of pressure chambers 14, and each of the grooves 40 is formed at an area which is inside of the edge of one of the pressure chambers and which is outside of an area overlapping with one of individual electrodes 32. With the grooves 40, it is possible to partially reduce the rigidity of the vibration plate 30 at portions each of which surrounding one of the individual electrodes 32 (driving portions 31a), thereby improving the driving efficiency of the piezoelectric actuator 3 and to reduce the crosstalk between adjacent pressure chambers 14.

Abstract: A piezoelectric element includes two electrode films and a layered piezoelectric film which is sandwiched between the electrode films and made of two thin piezoelectric films each having preferred orientation along the (111) plane. The two thin piezoelectric films are aggregates of columnar grains, respectively, which are continuously linked to each other. The columnar grains of the second thin piezoelectric film have a larger average cross-sectional diameter than the columnar grains of the first thin piezoelectric film. The ratio of the thickness of the layered piezoelectric film to the average cross-sectional diameter of the columnar grains of the second thin piezoelectric film is 20 to 60 inclusive.

Abstract: A piezoelectric actuator includes first active portions corresponding to center portions in a row direction of pressure chambers and second active portions corresponding to left and right portions on outer peripheral sides which are more outside than the center portions of the pressure chambers. When applying voltage to the first active portions, the first active portions deform to project toward pressure chambers. At this time, the second active portions do not deform and the influence of deformation of the first active portions does not reach the adjacent pressure chambers. Accordingly, effect of suppressing crosstalk is exhibited.

Abstract: An inkjet printing device includes a flow path plate comprising a manifold to supply ink, a pressure chamber filled with the ink supplied from the manifold, and a nozzle via which the ink is ejected, a piezoelectric actuator which is disposed on a top surface of the flow path plate and includes a lower electrode, a piezoelectric layer, and an upper electrode that are stacked sequentially, a first electrostatic electrode to generate an electrostatic field, and a second electrostatic electrode which is disposed a predetermined distance apart from a bottom surface of the flow path plate to generate the electrostatic field between the first electrostatic electrode and the second electrostatic electrode.

Abstract: An inkjet head includes a channel unit and actuator units. Inside the channel unit, individual ink channels are formed so that ink supplied from ink inlets is ejected from nozzles via pressure chambers. The actuator units are bonded to the upper surface of the channel unit. The actuator units have a configuration of four piezoelectric sheets laminated to one another. On the upper surface of the piezoelectric sheet, individual electrodes are disposed in positions opposed to the pressure chambers respectively. A FPC for supplying driving signals to the actuator units is connected to the individual electrodes.

Abstract: An inkjet recording system including an inkjet recording head in which a part of wall face of a pressure chamber in which a nozzle is provided is formed of a piezoelectric element, the piezoelectric element being activated and deformed to make pressure wave act on ink in the pressure chamber, thereby discharging an ink droplet from the nozzle, wherein surface of the piezoelectric element forming a part of wall face of the pressure chamber has a centerline average roughness Ra ranging from 0.05 to 2 ?m, and contact angle ? with ink is 45 degrees or less, and the following expression (1) is satisfied; A cos2?>0.04??(1) wherein A represents centerline average roughness Ra (?m) of surface of piezoelectric element forming wall surface of pressure chamber, and ? represents contact angle of ink with respect to piezoelectric element.

Abstract: There is provided a head control device able to re-charge an electromechanical transducing element with a driving pulse without requiring an additional re-charging time period in a recording period. The driving signal includes a plurality of driving pulses, and in each recording period, at least one driving pulse includes a portion varying from a discharging level to a medium level to charge the piezoelectric element to eject a liquid droplet, and a subsequent portion varying from the medium level to a target level to re-charge the piezoelectric element to the target level.

Abstract: A piezoelectric actuator for a liquid transporting apparatus includes a drive plate having a base portion which is arranged, on an upper surface of a vibration plate covering a pressure chamber; outside of an end portion in a longitudinal direction of the pressure chamber, and a drive portion which extends from the base portion along the longitudinal direction at least up to an area facing a substantially central portion of the pressure chamber; and a piezoelectric layer arranged on the upper surface of the vibration plate. The drive plate is fixed to the vibration plate at the base portion and at the area facing the substantially central portion of the pressure chamber. By increasing an amount of deformation of the piezoelectric actuator, a liquid transporting apparatus with improved drive efficiency is provided.

Abstract: The invention relates to a piezoactuator for miniaturized pumps, atomizers, valves or the like. The piezoactuator comprises a piezoceramic disk (1) and a pressure disk (2) coupled to the piezoceramic disk. Said pressure disk is linked on its rim (18) with a substrate (3) in a fluid-tight manner and can be deflected by the piezoceramic disk (1) while modifying the volume of a cavity (4) formed between the pressure disk (2) and the substrate (3). According to the invention, a weak point (6, 9) is provided which extends along the linked rim (18) of the pressure disk (2) and forms a joint when the pressure disk is deflected.

Abstract: A piezoelectric actuator 3 includes a metallic vibration plate 30, an insulating layer 31, a plurality of individual electrodes 32, a piezoelectric layer 33 and a common electrode 34. The insulating layer 31 is formed on the top surface of the vibration plate 30. The individual electrodes 32 are formed on the top surface of the insulating layer 31. The piezoelectric layer 33 is formed on the top surfaces of the individual electrodes 32. The common electrode 34 is formed on the top surface of the piezoelectric layer 33 over the individual electrodes 32. A plurality of terminals 36 and a plurality of wirings 35 are formed on the top surface of the insulating layer 31. Each of the terminals 36 is associated with one of the individual electrodes 32. Each of the wirings 35 connects one of the individual electrodes 32 and the associated terminal 36.

Abstract: An ink jet head is presented that decreases the density in wiring patterns to be connected to a large number of actuator terminals formed on a main body of the ink jet head while ensuring large spacing between the wirings. The ink jet head comprises a main body, a driver IC, and a sheet. The main body comprises a plurality of nozzles, a plurality of pressure chambers, a plurality of actuators, and a plurality of actuator terminals distributed on a surface of the main body. The driver IC can select any actuator terminal among the plurality of actuator terminals and transmit a driving voltage to the selected actuator terminal. The sheet mounts the driver IC at a first surface of the sheet and is fixed to the main body at a second surface.

Abstract: A discharge head includes a discharge driving element; an individual electrode formed on the discharge driving element and having a connecting section; and a wired board having a terminal which is joined to the individual electrode by a conductive brazing material. The connecting section is provided to face the terminal, and a metal, which is hardly sulfurized, is exposed in a facing area, of a surface of the connecting section, facing the terminal. A silver sulfide coating is formed on a surface of the connecting section except for a portion facing the terminal. The silver sulfide coating has a low affinity for the conductive brazing material, which is hardly wetted thereby. Therefore, even when the conductive brazing material leaks, then the conductive brazing material is not retained on the silver sulfide coating, and no influence is exerted on the driving operation of the discharge head.

Abstract: An actuator unit for applying pressure to liquid in each of pressure chambers formed in a passage unit includes a piezoelectric layer; a common electrode formed on one surface of the piezoelectric layer to be positioned over the pressure chambers; and electric field blocking layers formed on an opposite surface of the piezoelectric layer from the one surface to be opposed to the common electrode and outside regions of the respective pressure chambers. Each electric field blocking layer is porous and lower in dielectric constant than the piezoelectric layer. The actuator unit further includes lands each positioned to sandwich an electric field blocking layer between the land and the piezoelectric layer; and individual electrodes formed on the opposite surface to be opposed to the respective pressure chambers and the common electrode and neighbor the respective electric field blocking layers. Each individual electrode is electrically connected to the corresponding land.

Abstract: The liquid ejection head comprises: a plurality of ejection ports which eject liquid; a plurality of pressure chambers which are communicated with the ejection ports; a plurality of piezoelectric elements which are arranged to sides of the pressure chambers opposite sides of the pressure chambers where the ejection ports are formed, the piezoelectric elements each having driving electrodes, the piezoelectric elements each deforming the pressure chambers when drive signals are applied through the driving electrodes; a protective member which covers the piezoelectric elements and has a first wiring layer electrically connected to a first external wiring; a common liquid chamber which is arranged on the protective member on the sides of the plurality of pressure chambers opposite the sides of the pressure chambers where the ejection ports are formed, a wall of the common liquid chamber opposite the protective member having a second wiring layer electrically connected to a second external wiring, the common liqui

Abstract: A liquid discharge apparatus includes a liquid storage-discharge member having a liquid storage chamber for storing liquid and a liquid outlet for discharging the liquid from the liquid storage chamber to the outside of the liquid storage chamber, a vibration plate formed on the liquid storage-discharge member and a piezoelectric element having a lower electrode, a piezoelectric body and an upper electrode, which are sequentially formed on the vibration plate. The piezoelectric body includes an edge portion including at least a portion of the piezoelectric body, the portion positioned on the outside of the wall position of the liquid storage chamber, and a main portion, which is the remaining portion of the piezoelectric body. Further, the edge portion and the main portion are formed on different base layers from each other and the fracture stress of the edge portion is higher than that of the main portion.

Abstract: A print head laminate includes a flexible glass layer between an adhesive layer and an electrical conductor.

Abstract: This invention relates to a micromachined fluid ejector array having a fluid reservoir bounded at one side by an elastic membrane having scalable arrays of orifices arranged between concentric piezoelectric transducers, and at another side by a top cover supported by surrounding walls. By actuating neighboring concentric piezoelectric transducers, the scalable array of orifices arranged between the actuated neighboring concentric piezoelectric transducers deflect to eject fluid droplets. Also disclosed is a micromachined fluid ejector array having a fluid reservoir bounded at one side by an elastic membrane having scalable arrays of orifices arranged between concentric piezoelectric transducers, and at another side by a top cover supported by surrounding walls. A piezoelectric layer is bonded on top of the top cover.

Abstract: The piezoelectric actuator has: a diaphragm made of silicon; an insulating layer formed on a front surface of the diaphragm; a plurality of individual electrodes formed on a surface of the insulating layer; a plurality of piezoelectric bodies formed respectively on surfaces of the plurality of individual electrodes; and a plurality of common electrodes which are respectively arranged across the plurality of piezoelectric bodies from the plurality of individual electrodes, wherein the plurality of piezoelectric bodies are polarized in a direction from the individual electrodes toward the plurality of common electrodes.

Abstract: A piezoelectric actuator has a first ceramic layer covering openings of pressure chambers, a first electrode provided over the plurality of pressure chambers, a second ceramic layer, a second electrode, a third ceramic layer and a third electrode in this order from the side of the pressure chambers. By measuring insulation resistance between a cavity unit and the first electrode in the state where ink is filled into the pressure chambers, a defect in the ceramic layer is detected.

Abstract: A liquid ejection head according to one aspect of the invention comprises: a channel unit that comprises: a plurality of individual liquid channels each including a pressure chamber; and a first surface having a plurality of openings corresponding to a plurality of the pressure chambers; and a piezoelectric actuator unit having a second surface that is bonded to the first surface of the channel unit via an adhesive to cover the plurality of pressure chambers. One or more grooves are formed in the first surface of the channel unit to surround the plurality of pressure chambers. An outer edge portion of the second surface the piezoelectric actuator unit faces the groove. A supporting portion that faces the outer edge portion of the second surface of the piezoelectric actuator unit to support the piezoelectric actuator unit is provided in the groove.

Abstract: A structure for connecting an inkjet recording head, including an actuator on which connecting terminals are disposed to apply therethrough drive voltage to respective channels formed in the head for ejecting an ink droplet onto a recording medium, to a circuit element through which control signals for controlling an operation of the head are supplied, is disclosed. The circuit element is disposed on a wiring board having bump electrodes formed thereon. The connecting terminals are superposed on and connected to the bump electrodes. Each connecting terminal comprises a surface electrode having a small thickness, and an external electrode having a large thickness and formed on the surface electrode. A part of the surface electrode has a width larger than that of the other part, and the external electrode is disposed such that a margin thereof is positioned on an inside of a periphery of the wide part.

Abstract: A printhead or other droplet emitter is manufactured integrally with a flexible circuit. Preferred methods of manufacturing a droplet emitter comprise the steps of: creating metal traces, preferably deposited using a metal oxide precursor; patterning a sacrificial photoresist to create ink channels and nozzle chambers; depositing piezoelectrically active material over the metal traces and sacrificial photoresist; patterning vias through the piezo-electrically active material to act as nozzles and openings to ink reservoirs; and flushing out the photoresist. The piezo-electrically active material is preferably a mixture of PZT and PVDF.

Abstract: The present invention provides a piezoelectric element at least including a piezoelectric layer, a first higher-potential electrode layer formed in contact with the piezoelectric layer on one face of the piezoelectric layer, and a second lower-potential electrode layer formed in contact with the piezoelectric layer on the face of the piezoelectric layer opposite to the first electrode layer, wherein the first electrode layer contains a metal A having a standard electrode potential of higher than 0 V and a metal B having a standard electrode potential higher than that of the metal A in which the metal A is present in the largest amount by weight of the total amount of the metal elements contained in the first electrode layer, the second electrode layer contains a metal C having a standard electrode potential lower than that of the metal A, in which the metal C is present in the largest amount by weight of the total amount of the metal elements contained in the second electrode layer.

Abstract: The present invention is directed to a method for driving a piezoelectric ink jet head comprising a piezoelectric actuator AC that includes two piezoelectric ceramic layers 7a, 7b having such a size that covers the plurality of pressure chambers 2, wherein an electric field of opposite sense to the polarizing direction is applied to the second piezoelectric ceramic layer 7b by using the common electrodes 8a, 8b and, (1) for the pressure chambers 2 from which the ink is discharged, an electric field of the same sense as the polarizing direction of the layer is applied to the first piezoelectric ceramic layer 7a by using the individual electrode 10 and the first common electrode 8a, thereby causing the region of the piezoelectric actuator AC to deflect toward the pressure chamber 2, while (2) for the pressure chambers 2 from which the ink should not be discharged, an electric field of the opposite sense to the polarizing direction is applied to the first piezoelectric ceramic layer 7a by using the electrodes 10

Abstract: A liquid ejecting head includes a flow passage formation section and a sealing section. The flow passage formation section includes a plurality of nozzle openings, ejecting liquid therefrom, a plurality of pressure generation parts, corresponding to the nozzle openings respectively, a plurality of liquid supply passages, communicating with the pressure generation parts respectively for supplying liquid thereto, and a plurality of partition wall parts, each separating one liquid supply passage and its corresponding pressure generation part from another liquid supply passage and its corresponding pressure generation part. The sealing section seals the flow passage formation section. The partition wall parts respectively include liquid supply passage partition wall parts which separate adjacent liquid supply passages. The sealing section has a thick part and a thin part.

Abstract: The inkjet recording head comprises: pressure chambers in which nozzles for discharging ink are formed; diaphragms which form portions of walls of the pressure chambers; laminated piezoelectric elements which are disposed on the diaphragms at a side opposite from the pressure chambers and are formed by alternately laminating piezoelectric elements and electrodes for driving the piezoelectric elements in a lamination direction; and lead electrodes which mutually join the electrodes that impart a same electric potential of the laminated electrodes in a plane orthogonal to the lamination direction.

Abstract: The droplet ejection head comprises: a nozzle through which a droplet of liquid is ejected; a pressure chamber which is connected to the nozzle and filled with the liquid to be ejected through the nozzle; a diaphragm which defines a part of the pressure chamber; an electromechanical transducer which is deformed to drive the diaphragm to apply pressure to the liquid inside the pressure chamber so as to cause the droplet to be ejected through the nozzle; and a mechanoelectrical transducer which determines oscillation state in the pressure chamber, wherein the electromechanical transducer and the mechanoelectrical transducer are arranged on the diaphragm in layers.

Abstract: A method of manufacturing an actuator device includes forming a Zr layer on one surface of a substrate, forming a ZrO2 layer by oxidizing the Zr layer, forming a lower electrode on top of the ZrO2 layer, forming a piezoelectric layer on top of the lower electrode, and forming an upper electrode on top of the piezoelectric layer. In the method, in forming the Zr layer, the Zr layer is formed through crystal growth of Zr, and the Zr layer thus formed has special crystal regions that protrude from the opposite surface of the Zr layer from the substrate. Each special crystal region has a height of 10 to 100 nm and a diameter of 0.1 to 1 ?m when viewed from above, and the special crystal regions exist with a density of 1.0×106 to 1.0×103/cm2.

Abstract: An ink jet recording head comprising: a nozzle orifice for jetting ink; an ink chamber communicating with the nozzle; a diaphragm for pressurizing ink in the ink chamber; a piezoelectric thin film on the diaphragm; and an electrode for the piezoelectric thin film wherein the piezoelectric thin film and the electrode are patterned to the same shape.

Abstract: A piezoelectric element is provided that is equipped with a seed layer formed on a base substrate and a piezoelectric film formed on the seed layer. The seed layer is formed of a perovskite type piezoelectric material preferentially oriented to pseudo cubic (100). The piezoelectric film is formed of a relaxor material that has a perovskite type rhombohedral structure, and is preferentially oriented to pseudo cubic (100).

Abstract: A liquid discharge head, comprising: a plurality of liquid chambers for pressurizing a liquid, the plurality of liquid chambers communicating with discharge ports respectively; and a plurality of piezoelectric elements provided in correspondence with the plurality of liquid chambers respectively, the plurality of piezoelectric elements each including a lower electrode, a piezoelectric body film, and an upper electrode which are sequentially laminated in the stated order from the plurality of liquid chambers side, the lower electrode being provided up to a region corresponding to a portion between the plurality of liquid chambers, wherein the piezoelectric body film is reduced in thickness at the region corresponding to the portion between the plurality of liquid chambers than at a region corresponding to the plurality of liquid chambers and completely covers at least the lower electrode provided to the region corresponding to the portion between the plurality of liquid chambers.

Abstract: A liquid discharge head according to the present invention comprises plural pressure chambers for applying pressure to liquid, which communicate with liquid discharge openings for discharging liquid respectively; and plural piezoelectric elements, arranged corresponding to the plural pressure chambers, respectively, which respectively include lower electrodes, piezoelectric layers and upper electrodes layered in order from the pressure chambers, the lower electrodes being extended to areas corresponding to areas between the plural pressure chambers, and wherein an insulating layer is provided so as to cover at least all the lower electrodes located in the areas corresponding to areas between the plural pressure chambers.

Abstract: An inkjet head includes a flow-path unit and an actuator unit. The actuator unit includes a piezoelectric sheet, electrodes, and flexible printed circuit sheets. The electrodes are disposed on the piezoelectric sheet to correspond to pressure chambers, respectively. The flexible printed circuit sheets are disposed on the piezoelectric sheet while partially overlapping each other. Each of the electrodes includes a first and second end portions that are opposite to each other. At least a part of the electrodes of a first electrode group, which are adjacent to one end portion of a first flexible printed circuit sheet, include the contact portions at the first end portions thereof. At least a part of the electrodes of the second electrode group, which are adjacent to the one end portion of the first flexible printed circuit sheet, include the contact portions at the second end portions thereof.

Abstract: A method of producing an inkjet head includes producing a flow path unit that includes plural ink flow paths that reach inkjet nozzles through pressure chambers; producing an actuator unit that has a thermal expansion coefficient different from that of the flow path unit, includes a piezoelectric ceramic sheet; laminating the flow path unit and the actuator unit through a heat-curable adhesive agent; heating the flow path unit and the actuator unit to a predetermined temperature; applying pressure on the flow path unit and the actuator unit against each other through the heat-curable adhesive agent, after the flow path unit and the actuator unit are thermally expanded to maximum sizes at the predetermined temperature and before the heat-curable adhesive agent is cured; and releasing the pressure applied on the flow path unit and the actuator unit after the heat-curable adhesive agent is cured.

Abstract: An ink-jet head, including: a flow-passage unit having a laminated structure with a plurality of plates and including a plurality of nozzles, a common ink chamber, and a plurality of individual ink flow-passages each of which communicates the common ink chamber with a corresponding one of the plurality of nozzles and in each of which a pressure chamber having an opening open in a surface of the flow-passage unit is provided; and an actuator fixed to the surface of the flow-passage unit so as to close the opening of the pressure chamber and operable to change a volume thereof, wherein the plurality of plates include an outermost plate nearest to the actuator and at least one plate contiguous to the outermost plate, wherein the pressure chamber is formed by a plurality of pressure-chamber-forming holes respectively provided in the outermost plate and the at least one plate so as to communicate with each other, and wherein the outermost plate has a smallest thickness among the plurality of plates.

Abstract: A thin-film piezoelectric element has a substrate, a lower electrode, a piezoelectric portion, and an upper electrode that are sequentially formed on the substrate. The piezoelectric portion has a dielectric thin film that has an alkali niobium oxide-based perovskite structure expressed by general formula (NaxKyLiz)NbO3 (0<x<1, 0<y<1, 0?z<1, x+y+z=1), and a high voltage-withstand dielectric that has a dielectric strength voltage greater than that of the dielectric thin film.

Abstract: A method of manufacturing an ultrasonic probe including the steps of forming a plurality of first slits on a layered assembly having a first imner electrode member and a second inner electrode member through a top surface of the layered assembly and forming a plurality of second slits through a bottom surface of the layered assembly, forming a first vertical electrode layer on each side surface within each of the first slits, forming a second vertical electrode layer on each side surface within each one of the second slits and forming a plurality of separating slits on the layered assembly to divide the layered assembly into a plurality of transducer elements.

Abstract: A liquid delivering device including: (a) a cavity unit defining cavities for accommodating a liquid which is to be delivered to an exterior of the liquid delivering device; (b) a piezoelectric actuator unit superposed on the cavity unit, and having active portions which correspond to the respective cavities and which are selectively deformable upon application of a drive voltage thereto so as to deliver the liquid from the corresponding cavities to the exterior of the liquid delivering device; and (c) a backup plate superposed on the actuator unit such that the actuator unit is interposed between the cavity unit and the backup plate. The backup plate is jointed, at least at portions thereof corresponding to peripheries of the cavities, to the actuator unit.

Abstract: An ink-jet recording head has a plate-shaped member including a first layer with a partition wall formed by a first etching process and defining a pressure chamber, an ink inlet passage and a common ink storage chamber, a second layer with a land formed by a second etching process so as to correspond to the pressure chamber, and an intermediate layer sandwiched between the first and the second layers. The recording head also has a pressure producing device disposed with its extremity in contact with the land, and a nozzle plate with a nozzle hole bonded to the front surface of the plate-shaped member. An ink particle is jetted through the nozzle hole when the pressure in the pressure chamber is changed by the pressure producing device.

Abstract: A laminated-type piezoelectric element includes first electrode layers defining individual electrodes, second electrode layers defining common electrodes, and piezoelectric sheets sandwiched between the first and second electrode layers. The first and second electrode layers are laminated alternately. Each individual electrode has a substantially rectangle shape extending in a first direction. The individual electrodes defined in each first electrode layer are arranged at predetermined intervals in a second direction perpendicular to the first direction, to form a row. The common electrode includes a first portion having a band shape. The first portion overlaps the row when viewed in a plan view. The first portion has a pair of edges extending to be perpendicular to a long side of the rectangle shape of each individual electrode. Both ends of each individual electrode in the first direction protrude to outer positions than the edges, when viewed in the plan view.