Abstract: A method for measuring overlay at a semiconductor device on which circuit patterns are formed by a plurality of exposure processes is characterized in including an image capturing step for capturing images of a plurality of areas of the semiconductor device, a reference image setting step for setting a reference image based on a plurality of the images captured in the image capturing step, a difference quantifying step for quantifying a difference between the reference image set in the reference image setting step and the plurality of images captured in the image capturing step, and an overlay calculating step for calculating the overlay based on the difference quantified in the difference quantifying step.

Abstract: In an image capturing and processing system, a device and method is provided. The lens is made of simple lens with high diffractive materials and known strong color aberrations. The method includes the steps of: calibrating or measuring a Point Spread Function (PSF) for each color components at a set of distances, capturing image data, and calculating the image obtained using a de-convolution method based on the PSF found.

Abstract: The invention relates to a device for viewing a digital image comprising means (2) for viewing at least one portion of the digital image. According to the invention, the viewing means include a viewing mask (2) held by a stand (3) such that the viewing mask (2) is used at the eye level of a user such that same can bring his/her eyes closer to the viewing mask in order to examine the portion of the digital image displayed, the viewing mask comprising side extensions (6g, 6d) for protecting the user from outer visual interferences, and in that the viewing device further includes at least one movement handling device (7, 200) that can be controlled by the user in order to control virtual movement of the digital image such that the user is able to view another portion of the digital image.

Abstract: Multispectral images, including ultraviolet light and its interactions with ultraviolet light-interactive compounds, can be captured, processed, and represented to a user. Ultraviolet-light related information can be conveniently provided to a user to allow the user to have awareness of UV characteristics and the user's risk to UV exposure.

Abstract: Provided is an image processing apparatus, including: a receiver to receive an all-in-focus image, which is generated through selecting, from focus face images, representative divided images being best-focused images among images in divided regions forming the focus face images, for each of the focus face images correspondingly to the divided regions, the focus face images being obtained through imaging an object at focus positions, and information about the focus positions of the focus face images including the representative divided images; and a predicted-image generator to generate a blur-compensation predicted image corresponding to each of the focus face images through performing a blur-compensation prediction using a blur function with respect to each of the representative divided images based on the information about the focus positions of the focus face images including the representative divided images, the information being received by the receiving means.

Abstract: An apparatus for obtaining a plurality of images of a sample includes a sample device suitable for holding a liquid sample; a first optical detection assembly including a first image acquisition device, the first optical detection assembly having an optical axis and an object plane, the object plane including an image acquisition area from which electromagnetic waves can be detected as an image by the first image acquisition device; one translation unit arranged to move the sample device and the first optical detection assembly relative to each other; and an image illumination device, wherein the apparatus is arranged to move the sample device and the first optical detection assembly relative to each other along a scanning path, which defines an angle theta relative to the optical axis, wherein theta is in the range of about 0.3 to about 89.7 degrees.

Abstract: A microscope system including: an observation optical system acquiring an image of an observation position of a sample; a stimulation optical system irradiating the sample with stimulation light; an observation position setting section setting the observation positions; a stimulation position setting section setting a common stimulation position; a stage switching the observation positions; a synchronization condition setting section setting a common synchronization condition in which the timing of the image acquisition is associated with the timing of the irradiation with stimulation light; an observation condition registration section registering the common stimulation position and the common synchronization condition as observation conditions associated with each of the observation positions; and a control section, according to the registered conditions, switching the observation positions, making the observation optical system acquire an image of each of the observation positions, and making the stimulati

Abstract: With respect to a charged particle beam device, the step size of focal point measure for executing autofocusing is optimized to a value that is optimal with respect to the spread of an approximation curve for a focal point measure distribution. The step size of focal point measure for executing autofocusing is corrected using an image feature obtained based on a layout image derived from an image obtained at a first magnification or from design data. Autofocusing is executed based on the obtained step size to carry out observation, measurement, or to image the sample under inspection.

Abstract: Various embodiments for providing removable, pluggable and disposable opto-electronic modules for illumination and microscopic imaging are provided, for use with portable display devices. Generally, various medical or industrial miniature microscopes can include one or more solid state or other compact electro-optic illuminating elements, electronic vision systems and means of scanning located thereon. Additionally, such opto-electronic modules may include illuminating optics, imaging optics, and/or image manipulation and processing elements. The illuminating elements may have different wavelengths and can be time-synchronized with an image sensor to illuminate an object for imaging or detecting purpose or other conditioning purpose. All control and power functions of such disposable microscope units can be made in the control unit that the disposable microscopes are plugged into.

Abstract: An pattern evaluation method includes a step of estimating imaging deviation allowed to evaluate an overlay position on one or more evaluation point candidates based on pattern layout information, a step of deciding one or more evaluation points from among the evaluation point candidates based on the allowed imaging deviation, a step of deciding an imaging sequence for imaging the selected evaluation point, and a step of evaluating an overlay position between first and second patterns based on an image obtained by imaging the evaluation point according to the imaging sequence.

Abstract: A temporal focusing system is disclosed. The temporal focusing system is configured for receiving a light beam pulse and for controlling a temporal profile of the pulse to form an intensity peak at a focal plane. The temporal focusing system has a prismatic optical element configured for receiving the light beam pulse from an input direction parallel to or collinear with the optical axis of the temporal focusing system and diffracting the light beam pulse along the input direction.

Abstract: A system and method are disclosed for correcting the color of microscope images for different illuminants. The system includes a microscope having at least one image setting value selector with a plurality of pre-set positions, and an optical train having a distal end and a proximal end and being configured to convey illumination. The optical train is further configured to allow introduction of a calibration slide into the optical train of the microscope at a plurality of possible positions, each position being a conjugate plane of the sample plane, when the sample is in focus. The calibration slide incorporates an integral transmission filter array of known transmission values.

Abstract: An optical microscope includes a first mask that has transmission regions that are separated from one another for the simultaneous generation of a plurality of illumination light beams from illumination light, for example, a first scanning device for generating a scanning motion of the illumination light beams and a sample holder. The optical microscope also includes a second mask with transmission regions separated from one another, which transmission regions are smaller than the transmission regions of the first mask in order to clip the illumination light beams, such that, through the scanning motion of the first scanning device, each of the illumination light beams can be successively passed onto different transmission regions of the second mask, and a second scanning device is provided for generating a scanning motion between the clipped illumination light beams and the sample holder. A method for examining a microscopic sample is also provided.

Abstract: An imaging system for generating images of biological samples having a surface, the system comprising: a sample support for supporting a biological sample in use; a plurality of illumination sources, the plurality of illumination sources being arranged around the sample support and each adapted to illuminate the biological sample, in use, from a different direction; an image capture device for capturing illumination which has impinged on the biological sample to thereby form an image of the sample; wherein at least one of the illumination sources direction is not perpendicular to the surface of the sample.

Abstract: Disclosed is a digital microscope system capable of controlling two or more microscope units with a controlling unit. The digital microscope system includes (i) two or more microscope units, (ii) a camera interface, (iii) a controlling unit and (iv) a light output device. The microscope unit includes a lens tube, a digital camera, a light terminator and a stand. The camera interface includes two or more camera interface (I/F) channels and a camera interface channel selector. The controlling unit includes a memory, a display device, a CPU (Central Processing Unit) and a power supply.

Abstract: A charged particle beam device of the present invention has a signal processing function of acquiring a secondary signal obtained when a charged particle beam is caused to scan at a low speed not subjected to a band limitation of an electrical signal path, and a secondary signal obtained when a charged particle beam is caused to scan at a high speed subjected to the band limitation of the electrical signal path, calculating a degradation function (H?1(s)) between the plurality of secondary signals, and using an inverse function thereof as a correction filter; and a function of updating a parameter of the correction filter to an optimal value as needed or at given timing. Accordingly, the charged particle beam device can perform optimum image restoration even when a detector or an amplifier circuit that constitutes the electrical signal path degrades with time.

Abstract: Brightness information with a wide dynamic range is acquired and observed while preventing degradation of a detector.

Abstract: A microscope has a light source for generating a light beam having a wavelength, ?, and beam-forming optics configured for receiving the light beam and generating a Bessel-like beam that is directed into a sample. The beam-forming optics include an excitation objective having an axis oriented in a first direction. Imaging optics are configured for receiving light from a position within the sample that is illuminated by the Bessel-like beam and for imaging the received light on a detector. The imaging optics include a detection objective having an axis oriented in a second direction that is non-parallel to the first direction.

Abstract: According to one embodiment, a method for measuring pattern misalignment, includes: a first step obtaining image data; a second step specifying a measurement region; a third step calculating a first shift amount (x1, y1); a fourth step determining, after calculating the first shift amount, a first distribution; a fifth step executing a plurality of times the second step, the third step, and the fourth step; a seventh step calculating a second shift amount (x2, y2); an eighth step determining, after calculating the second shift amount, a second distribution; a ninth step executing a plurality of times the sixth step, the seventh step, and the eighth step; and a tenth step calculating a difference (x2?x1, y2?y1) between the second pattern misalignment and the first pattern misalignment.

Abstract: A digital microscope apparatus includes: an observation image capturing unit configured to capture an observation image of each of a plurality of small areas, an area containing a sample on a glass slide being partitioned by the plurality of small areas; and a controller configured to set at least one evaluation area for the observation image of each of the plurality of small areas, the observation image being captured by the observation image capturing unit, to perform an edge detection on the at least one evaluation area, and to calculate, using results of the edge detection on two evaluation areas that are closest between two of the observation images adjacently located in a connected image, a difference in blur evaluation amount between the two observation images, the connected image being obtained by connecting the observation images according to the partition.

Abstract: A digital microscope apparatus includes an illumination optical system configured to emit illumination light; a stage having an opening capable of transmitting the light therethrough, on which a preparation can be placed in accordance with a position of the opening; an enlarging imaging unit including an objective lens configured to enlarge an image and disposed to face the system with the stage disposed therebetween, and an imaging device configured to capture an image enlarged by the lens; a white image acquiring unit configured to open the opening, to cause the system to emit the light in a state where an image point of the system is aligned with a focal point of the lens, and to acquire, as a white image, an image formed on an imaging surface of the device; and a calculation unit configured to use the captured white image to calculate a shading correction coefficient.

Abstract: An imaging microscope (12) for generating an image of a sample (10) comprises a beam source (14) that emits a temporally coherent illumination beam (20), the illumination beam (20) including a plurality of rays that are directed at the sample (10); an image sensor (18) that converts an optical image into an array of electronic signals; and an imaging lens assembly (16) that receives rays from the beam source (14) that are transmitted through the sample (10) and forms an image on the image sensor (18). The imaging lens assembly (16) can further receive rays from the beam source (14) that are reflected off of the sample (10) and form a second image on the image sensor (18). The imaging lens assembly (16) receives the rays from the sample (10) and forms the image on the image sensor (18) without splitting and recombining the rays.

Abstract: A single-photon or ultra-weak light multi-D imaging spectral system and method. In order to realize rough time resolution, a time-resolved single-photon counting 2D imaging system for forming color or grey imaging is provided. Moreover, in order to realize high-precision time resolution, the system comprises a light source, an imaging spectral measurement unit, an electric detection unit, a system control unit and an algorithm unit. The light carrying information of an object is imaged on a spatial light modulator and randomly modulated according to compressed sensing theory, emergent light of a grating is collected using a point or array single-photon detector, the number of photons and photon arrival time are recorded, and reconstruction is carried out using the compressed sensing algorithm and related algorithm of the spectral imaging. The system provides single-photon detection sensitivity, high time resolution and wide spectral range, and can be applied in numerous new high-tech industries.

Abstract: A deformable mirror unit 7A including a plurality of segment mirrors 71 each having a surface 71a, a flexible member 72 configured to connect the plurality of segment mirrors 71 to each other, a driver 74 configured to apply a driving force to at least one of the segment mirror 71 and the flexible member 72 so as to change at least one of a position and a tilt of the reflection surface 71a of each of the plurality of segment mirrors 71, and a connector 73 configured to connect the driver 74 to at least one of the segment mirror 71 and the flexible member 72 and to be rotatable so as to change a light reflecting direction by the at least one reflection surface 71a is provided.

Abstract: Disclosed is a method for varying the size of the scanning field of a multifocal laser scanning microscope, said scanning field being scanned in X columns and Y lines, and n laser spots being arranged at a distance d from one another in the scanning field along the slow scanning axis in the sample plane, the distance between the scanned lines in the sample plane being a=d/K, where K ? N, the size of the scanning field being varied by varying K. After scanning K lines, a vertical skip is made, e.g. a skip of (n?1)×K+1 lines in the scanning direction or (n+1)×K?1 lines against the scanning direction until at least Y lines have been scanned.

Abstract: Generally, the present disclosure provides a method and system for improving imaging efficiency for CPB systems while maintaining or improving imaging accuracy over prior CPB systems. A large field of view image of a sample is acquired at a low resolution and thus, at high speed. The low resolution level is selected to be sufficient for an operator to visually identify structures or areas of interest on the low resolution image. The operator can select one or more small areas of arbitrary shape and size on the low resolution image, referred to as an exact region of interest (XROI). The outline of the XROI is mapped to an x-y coordinate system of the image, and the CPB system is then controlled to acquire a high resolution image of only the XROI identified on the low resolution image. For 3D imaging, once the XROI is identified, each section of the sample can be iteratively imaged in the previously described manner, with the operator having the option to redefine the XROI later.

Abstract: Provided herein are systems methods including a design of a microscope slide scanner for digital pathology applications which provides high quality images and automated batch-mode operation at low cost. The instrument architecture is advantageously based on a convergence of high performance, yet low cost, computing technologies, interfaces and software standards to enable high quality digital microscopy at very low cost. Also provided is a method based in part on a stitching method that allows for dividing an image into a number of overlapping tiles and reconstituting the image with a magnification without substantial loss of accuracy. A scanner is employed in capturing snapshot images. The method allows for overlapping images captured in consecutive snapshots.

Abstract: The present invention allows observation or capturing of a high-contrast image of a sample for which sufficient contrast cannot be obtained in bright-field observation, such as a wafer having a pattern with a small pattern height. According to the present invention, a sample is illuminated through an objective lens used for capturing an image, and an imaging optics are provided with an aperture filter so that an image is captured while light of bright-field observation components is significantly attenuated.

Abstract: A system and method is disclosed for a quality control and/or inspection procedure for assembly line processes. The disclosed system and method enable automatic optical inspection of a device during different stages of manufacture as well as in its finished form. The disclosed system and method enable the automatic quality control process to be self-learning, dynamic, and to identify and classify defects in real time.

Abstract: Systems and techniques for an optical scanning microscope and/or other appropriate imaging system includes components for scanning and collecting focused images of a tissue sample and/or other object disposed on a slide. The focusing system described herein provides for determining best focus for each snapshot as a snapshot is captured, which may be referred to as “on-the-fly focusing.” Best focus may be determined using an error function generated according to movement of a dither focusing lens. The devices and techniques provided herein lead to significant reductions in the time required for forming a digital image of an area in a pathology slide and provide for the creation of high quality digital images of a specimen at high throughput.

Abstract: A physical properties measuring method includes: acquiring an experimental convergent beam electron diffraction image of a sample by using a transmission electron microscope; calculating Zernike moment intensities of the experimental convergent beam electron diffraction image; and comparing the Zernike moment intensities of the experimental convergent beam electron diffraction image with Zernike moment intensities of calculated convergent beam electron diffraction images calculated on changed physical properties of the sample.

Abstract: The invention relates to an apparatus, a method and a system for obtaining a plurality of images of a sample arranged in relation to a sample device. The apparatus comprises at least a first optical detection assembly having an optical axis and at least one translation unit arranged to move the sample device and the first optical detection assembly relative to each other. The movement of the sample device and the first optical detection assembly relative to each other is along a scanning path, which defines an angle theta relative to the optical axis, wherein theta is larger than zero.

Abstract: A microscopy optoelectronic device for reconstructing a three-dimensional model of a sample, which can be connected to any PC in order to obtain three-dimensional surface micro-reliefs, includes a portable device body, having a casing and a frame supporting: a digital optical sensor; an optical group, coupled to the sensor including an objective lens directed towards a distal end of the device body, faceable towards the sample; a motor that translates the optical group and sensor with respect to said frame; a connector to connect the device body to an energy source and to a device that controls the position of the optical group and to transmit the digitalized images; and a light source that provides diffused lighting at the objective lens arranged to surround a front region with respect to the objective lens and also includes a luminescent and diffusing surface having a tubular portion coaxial to the optical group.

Abstract: An imaging apparatus controls a size of an imaging region according to a spread of Z positions of substances in an object. For example, the imaging region becomes wide when the spread is small and becomes narrow when the spread is large. Or, the number of image sensors to be used is increased when the spread is small and is decreased when the spread is large. Or, an image sensor having a wide image pickup area is used when the spread is small, and an image sensor having a narrow image pickup area is used when the spread is large.

Abstract: Provided is a panorama image synthesis technique using a scanning charged-particle microscope and capable of obtaining a panorama image synthesis that is robust against contamination and the imaging shift and distortion of an image in a wide-field imaging region (EP) for semiconductor fine patterns. The panorama image synthesis technique in the wide-field imaging region (EP) using the scanning charged-particle microscope is characterized in that the layout of each adjustment point, each local imaging region, and an imaging sequence comprising the imaging order of the each adjustment point are optimized and created as an imaging recipe.

Abstract: A microscope apparatus is disclosed. The microscope apparatus comprises a microscope module and an image capture device. The microscope module comprises a housing, a lens element, a sampling assembly, and a light guide element. The lens element is mounted on the housing. The sampling assembly is accommodated in the housing. The light guide element is mounted in the sampling assembly. The sampling assembly is configured to sample a specimen and comprises a cover body and a base body received in the cover body. The cover body has a first top plate and a first anchoring structure connected to the top plate. The base body has a second opt plate and a second anchoring structure connected to the second top plate. The second top plate faces the first top plate to define a holding space for the specimen.

Abstract: A microstructure inspection method which inspects an angle of a sidewall of a sample microstructure pattern, the method including: taking SEM photographs of the sample microstructure pattern under plural SEM conditions; measuring a width of a white band at an edge portion of the sample microstructure pattern in the SEM photographs; and calculating the angle of the sidewall of the sample microstructure pattern on the basis of an amount of change in the width of the white band due to the change between the plural SEM conditions.

Abstract: The invention relates to a method of sampling and displaying information comprising scanning a beam over the sample in a series of N overlapping sub-frames, each comprising Mn scan positions, thereby irradiating the sample at N×Mn scan positions, which form the field of view; detecting a signal, sampled for each scan position, emanating from the sample; and displaying the sub-frames having at least N×Mn pixels in such a way, that after the series of N scans each of the pixels displays information derived from the signal from one or more scan positions; in which after the scan of the first sub-frame each of the pixels displays information derived from the scan positions of the first sub-frame; and after the scan of the second sub-frame each of the pixels displays information derived during the scanning of the first, the second, or both sub-frames.

Abstract: Systems, devices, and methods of Fourier ptychographic imaging by computationally reconstructing a high-resolution image by iteratively updating overlapping regions of variably-illuminated, low-resolution intensity images in Fourier space.

Abstract: A method includes capturing a first image of the sample via a detector, wherein the particles of the primary particle beam have a first average energy so that the interaction products detected by the detector predominantly contain sample information from a sample layer lying below the sample surface. The method also includes removing the outermost sample layer with the aid of the cutting device, and capturing a second image of the sample via the detector, wherein the particles of the primary particle beam have a second average energy so that the interaction products detected by the detector predominantly contain sample information from the surface layer of the sample. The method further includes calculating the lateral shift/lateral offset of the sample from a comparison of the first and second images, and compensating for the lateral offset.

Abstract: A specimen image capture method using a charged particle microscope device includes: a first image acquisition step in which the gain of a detector in a charged particle microscope is set to a first gain value, charged particle beam scanning is carried out on a specimen, and a first image is obtained; a second image acquisition step in which the gain of the detector is set to a second gain value, which is different to the first gain value, charged particle beam scanning is carried out on the specimen, and a second image is obtained; and an image combination step in which the first gain value and the second gain value are used and the first image and the second image are combined.

Abstract: An image processing apparatus and image processing method according to the present disclosure are characterized to obtain N number of image data regarding a same object, each N number of image data consisting of a plurality of pixels; remove noise data of among N number of pixel data regarding pixels in a same location, from the N number of image data; and generate an image of the object using data excluding the noise data.

Abstract: A touch screen (60) disposed on a display surface of a display means (58) is used as an inputting means so that a variety of actions of a microscope can be controlled with sufficient ease and precision. A variety of actions are controlled based on an operator's various finger gestures used on the touch screen disposed on the display surface of the display means, for example, making contact by a finger (tap), making two consecutive contacts by a finger (double-tap), making contact by a finger, and moving the finger without releasing it (drag), making contact by a finger and maintaining the contact for a predetermined time or longer (touch-and-hold), making simultaneous contact by two fingers, and increasing spacing between the fingers (pinch-out) or decreasing the spacing (pinch-in), and making simultaneous contact by two fingers, and moving the fingers in parallel (double-drag).

Abstract: A method includes performing an approximate partially coherent imaging operation for elements of a first basis generated from a model image having no noise and no blur, and generating based upon the first basis a second basis that is blurred, the approximate partially coherent imaging operation being expressed by a convolution integral on an eigenfunction corresponding to a maximum eigenvalue of a Kernel matrix and each element of the first basis, generating an intermediate image in which each pixel value of the observed image that has been denoised is replaced with its square root, and obtaining a restored image by approximating each of a plurality of patches that are set to entirely cover the intermediate image, using a linear combination of elements of the first basis and linear combination coefficients obtained when each patch is approximated by a linear combination of elements of the second basis.

Abstract: System and methods are provided for distributed microscopy. A plurality of microscopes may capture images and send them to a media server. The microscopes and the media server may be part of a local area network. The microscopes may each have a distinct network address. The media server may communicate with an operations console, which may be used to view images captured by the microscopes. The operations console may also accept user input which may be used to selectively control the microscopes.

Abstract: There is provided an information processing apparatus, including an image combination section which connects a plurality of partial images, each of which is an image obtained by imaging a part of a region to be observed, and a connection information generation section which generates connection information of a combined image combined by the image combination section. The connection information is provided, along with the combined image or separately from the combined image, to an image display apparatus capable of displaying the combined image.

Abstract: A microscope apparatus which captures images of an object by image sensors having different focusing positions in an optical axis direction and acquires image data of plural layers of the object, includes: a judgment unit which divides a whole region of the image data obtained from the image sensors into plural blocks and judges whether or not each block includes an object image; and a data reducing unit which reduces a data volume of the image data of all of the layers in a block which is judged not to include an object image. The judgment unit selects two or more layers from a block which is being subjected to judgment, respectively evaluates whether or not the image data of the selected layers includes the object image, and judges whether or not the block includes the object image on the basis of the evaluation results.

Abstract: Exemplary embodiments provide microscope devices and methods for forming and using the microscope devices. The microscope device can include a light emitter array with each light emitter individually addressable to either emit or detect light signals. Magnified images of a sample object can be generated by a reflection mechanism and/or a transmission mechanism using one or more microscope devices in an imaging system. Real-time computer control of which microscope pixels are viewed can allow the user to digitally replicate the “fovea” function of human vision. Viewing an object from both sides in the double-sided microscope system and from multiple pixel positions can allow the microscope to reconstruct pseudo-3D images of the object.

Abstract: A hand-held microscope includes a rigid tripod stand with adjustable legs, a visual display component, an imaging detector and an optical assembly comprising an imaging lens and an objective lens housed within an imaging tube. Multiple illumination sources can be used in the microscope, including LED or laser diode sources. The microscope can also include interchangeable imaging tubes that enable bright field, dark field, fluorescence and other imaging modalities.

Abstract: A digital camera has two imaging units. In a single photography mode, upon a half press of the shutter release button, imaging units carry out preliminary photography at magnifications different from each other. A face detecting section detects persons' faces from a preliminary image captured by each imaging unit. A face comparing section compares the faces between the two preliminary images. A face evaluating section calculates a face evaluation value of each face, and determines ranking of the faces in each preliminary image based on the face evaluation values. Moreover, in consideration of the ranking of the faces determined in the telephoto preliminary image out of the two preliminary images, the face evaluating section corrects the face evaluation values and ranking of the faces in the wide-angle preliminary image. In each imaging unit, photographic conditions for actual photography are determined with giving high priority to the higher-ranked image.