Abstract: Device for detecting and calculating focus point position (2), shape (3) and power distribution of a laser beam after a focussing lens, and which at least incorporates a laser source (10), the focussing lens (4), a light affecting body (5, 6), a light sensor (7), and means for calculation (9).

Abstract: A method and apparatus for autofocus on a target layer contained within a microplate well is provided. The instrument is capable of optically sensing a reference point on the underside of a microplate. This reference point is then used to focus light onto a target layer within the microplate well, the target layer having a location that is in defined relation to the reference point. The reference point is either a surface of the bottom of the microplate well or is an optically detectable mark on the underside of the microplate. In an alternate embodiment, a light position sensitive detector is used to enable deterministic autofocus for a plurality of wells on a microplate.

Abstract: An optical pickup apparatus includes first and second light sources which selectively emit one of first and second light beams, the first and second light beams being different in wavelength, the wavelengths of the first and second light beams being appropriate for accessing first and second optical disks respectively. A coupling lens converts a corresponding one of the first and second light beams into a collimated beam. An objective lens forms a light spot on a corresponding one of the first and second optical disks by focusing the collimated beam. A holographic optical element receives a reflection beam of the light spot from one of the first and second optical disks and provides holographic effects on the reflection beam so as to diffract the reflection beam in predetermined diffracting directions depending on the wavelength of the reflection beam.

Abstract: The invention relates to a method and apparatus for measuring The landing angle of a particle beam is adjusted by scanning the beam over two cylindrical beam target surfaces that are positioned close to the system axis. The output of a beam detector is differentiated and displayed on an oscilloscope. The relevant lens current is adjusted until one side of the scan indicates that the focal plane of the beam is at the center of the beam target. The angle of the beam is then adjusted with the relevant deflector until both sides of the scan are the same, indicating that the beam is accurately vertical.

Abstract: A device for measuring characteristic values of an optical pickup and/or an optical disc capable of detecting tracking signals for measuring characteristic values even if optical disc rotation is not subjected to eccentricity. The device for measuring characteristic values of an optical pickup and/or an optical disc 1 samples outputs of photodetectors of an optical pickup 2 as signals A to F directly by a sample-and-hold circuit 8 and an analog-to-digital converter 10 to store the resulting digital data in a second memory 11. An arithmetic-logic unit 12d measures tracking error signals based on the digital data stored in the second memory 11. A signal generating circuit 25 then sends a sine wave signal to a tracking coil 2b for moving the laser light illuminated on the optical disc along the radius of the disc.

Abstract: A light projector for camera including a light emission lamp having a filament, a lamp mounting frame which holds the light emission lamp integrally therewith as well as has a pair of support shafts projecting from opposite the sides thereof with one of the support shaft having a rectangular hole defined thereto, a reflection umbrella for reflecting the light from the filament, a light projection lens disposed so that the optical axis thereof matches the optical axis of the reflection umbrella and a casing on which the reflection umbrella and the light projection lens are mounted, wherein the lamp mounting frame is held by swingably engaging the pair of support shafts and the like with a pair of sliding grooves and the like along an optical axis direction.

Abstract: A method for checking cytological system illumination including the steps of checking global illumination variation, static field uniformity, dynamic field uniformity, specimen thickness variation, strobe repeatability, calibration plate cleanliness, and strobe dropout. A calibration plate and test target is employed for various illumination checks.

Abstract: The invention relates to a multipoint focus detection device and is to provide a device which determines a sampling point of an output of a sensor in accordance with a movement speed distribution of an image on the sensor and carries out an appropriate process in case that the movement speed is different.

Abstract: A computer receives image data from a star-shaped optical target in the object plane and calculates angle-dependent boundary sharpness. The horizontal, x-direction, amplitude derivative and the vertical, y-direction, amplitude derivative are computed over a portion of each star pattern image from a Z panning sequence. A microscope slide stage, carrying the target, is moved vertically from a level just below where the target is in focus to a level just above where the target is in focus. For each small increment of vertical motion, Z panning, an image of the star pattern is captured for analysis. Computations are performed on the differentiated images to search for evidence of elongation of the point spread function and variation with stage Z position of the angle of long axis of such an out-of-round point spread function. The presence of a distorted point spread function that varies along the optical axis indicates astigmatism.

Abstract: A method and apparatus wherein the height over the complete surface of interest on a wafer/material is scanned and mapped, using either a central or non-central focus system. The type of data gathered is similar to that which is normally acquired in operation of the particular focusing system indicative of the wafer/material surface height. The difference is that according to the present invention, a much larger number of data points are sampled and then processed in a novel manner to provide improved focus information. These data are stored and used to calculate corrections in both the vertical position/height and tilt of the material/wafer for each exposure field, such as the areas (34) in FIGS. 5b and 6b. The invention sorts out selected height data indicating periodic variations in surface height.

Abstract: A laser apparatus includes a laser for emitting a laser beam which is reflected from a primary mirror through a primary lens in a primary optical path and focused at a primary spot. A portion of the laser beam leaks through a back face of the mirror and is directed through a reference lens and focused at a reference spot in a reference optical path. Angular wander of the laser beam on the primary mirror is corrected by measuring the lateral position of the reference spot and adjusting the primary optical path to decrease lateral wander of the primary spot.

Abstract: The target of the present invention is to provide an automatic high speed, low-cost, multi-mode three-dimensional(3D) surface profile measurement method. This method exploits the projected energy with a known spatially distributed wavelength spectrum on the surface of objects in the scene. The unique wavelength is encoded with geometry information of a unique projection ray of the radiation energy in 3D space. This wavelength of the projected energy is detected by a 2D image sensor array that is able to uniquely distinguish the wavelength of the radiation energy at the points of interest on the scene. The projection geometry information is recovered by using a color match scheme and the range values associated with every pixel of the 2D image sensor will be calculated through a straightforward triangulation algorithm. Full frames of 3D range images can then be obtained directly at the frame acquisition rate of the 2D image sensor array.

Abstract: A computer receives image data from a star-shaped optical target in the object plane and calculates angle-dependent boundary sharpness. The horizontal, x-direction, amplitude derivative and the vertical, y-direction, amplitude derivative are computed over a portion of each star pattern image from a Z panning sequence. A microscope slide stage, carrying the target, is moved vertically from a level just below where the target is in focus to a level just above where the target is in focus. For each small increment of vertical motion, Z panning, an image of the star pattern is captured for analysis. Computations are performed on the differentiated images to search for evidence of elongation of the point spread function and variation with stage Z position of the angle of long axis of such an out-of-round point spread function. The presence of a distorted point spread function that varies along the optical axis indicates astigmatism.

Abstract: That illuminating pattern of the headlight which appears on a screen disposed in front of the vehicle is pictured. The optical axis of the headlight is adjusted based on an image of the illuminating pattern. A distribution of illuminance of the illuminating pattern along a scanning line which bridges a light portion and a dark portion of the image of the illuminating pattern is measured. A position of a reference point which serves as a reference in adjusting the optical axis is obtained from that point on the scanning line which corresponds to a crossing point of a first straight line and a second straight line. The first straight line is obtained from a portion corresponding at least to one of the light portion and the dark portion of a curve which represents the measured distribution of illuminance. The second straight line is obtained from a portion corresponding to a transient region which is positioned between the light portion and the dark portion.

Abstract: A laser beam measurement device comprises a pinhole aperture spaced to one side of a power meter for measuring the power level of the laser beam. The positioning system of the laser system causes the laser beam to move relative to the pinhole aperture in each of the three x, y and z directions of an xyz coordinate system, namely longitudinally, transversely and radially relative to the pinhole aperture, respectively. During each scan, the power meter measures the Gaussian distribution of the power level that occurs when the laser beam passes through the pinhole aperture and moves relative thereto along the scan axis. The coordinate position of the laser beam along each scan axis is identified corresponding to a peak value of the Gaussian distribution, thus deriving a three dimensional reference location corresponding to the point in space at which the focal point of the laser beam is centered on the pinhole aperture.

Abstract: A waveguide is arranged in radial extension on a support mounted in rotary manner and whose pivot pin is parallel to the laser beam axis. The outer end thereof intersects the laser beam during a rotation of the support and in each case detects a partial beam of the laser radiation. By means of the waveguide, said partial beam is supplied to a detector, which is arranged in fixed manner in the pivot pin of the support. A hollow waveguide or light guide serves as the waveguide. A parallel displacement of the pivot pin of the support is possible by means of a stepping motor to enable the complete beam profile to be determined by a plurality of sections through the laser beam. In place of the stepping motor, the support can be provided with several waveguides of different lengths, distributed with the same angular spacing over the support circumference and which successively supply the detected partial beams to the same detector.

Abstract: The system comprises a latent image detection device comprising an alignment device which uses non-actinic radiation (10) and which is intended for aligning the mask pattern with respect to the substrate (3) and is designed for detecting the measure of coincidence of a mask alignment feature and a substrate alignment feature (8). The alignment device is provided with a radiation-sensitive detection system (6) which is connected to an electronic signal circuit in which the amplitude of the radiation incident on the detection system is determined, which originates from a latent image, formed in the photosensitive layer, of a mask feature, in which a spatial frequency occurs which is approximately equal to the useful resolving power of the projection lens system and considerably greater than the resolving power of the alignment device.

Abstract: Apparatus for aligning the optical systems of a lamphouse and a movie projector in the form of a laser alignment tool having a single beam laser with a diffraction grating to split the beam into multiple beams and the laser diode module is housed in a cylindrical casing. The diffraction grating splits the single laser into a specific number of beams of equal intensity, consisting of a center beam and each of the beams to either side of it at equal angles. The laser alignment tool has a geared motor with an adjustable speed which rotates the diffraction grating so that each angled beam sweeps a concentric circle with respect to the other beams. The diffraction grating is interchangeable so that the laser alignment tool can be used for lamphouse systems with varying focal lengths or for other applications such as reflector inspection. The motor may be turned on or off while the laser is kept on. The speed of rotation of the beams is controlled by varying the voltage to the motor.

Abstract: The System is a test instrument used to measure the quality of the optical path through the atmosphere. The device measures the atmospheric transverse coherence length, also known as Fried's parameter or the diffraction limited aperture of the atmosphere, and the angle-of-arrival of incident optical radiation. The system consists of a high resolution Charge Coupled Device (CCD) camera mounted at the focal plane of a telescope and interfaced with a high resolution frame grabber and computer. Incident optical radiation is focused by the telescope onto the CCD array in the camera. The picture frame is then transferred to the frame grabber where the computer determines the size of the focussed spot and position of the spot in pixel coordinates, the Atmospheric Transverse Coherence Length and the Angle-of-Arrival. The software required to control the camera and determine the parameters is an integral part of the system.

Abstract: A method and apparatus for adjusting the optical alignment of a film projection system of the type having a film gate with a central opening, a lens mount having lenses optically aligned along an optical axis of the lens mount, a light source and a generally ellipsoidal collector for reflecting light from the light source along an optical axis of the collector. The method and apparatus utilize a laser light source which is inserted in the position normally occupied by the lenses and a beam splitter which splits the beam of laser light into a center beam and two inclined side beams. An intercept sheet is temporarily placed in the path of the center beam and reflections of the side beams from the interior surface of the collector to create images of the center beam and the reflected side beams on the intercept sheet.

Abstract: A symbol reader for reading symbols on a symbol surface. An optical system including a laser, condensing lens and scanning mirror illuminate a symbol surface to be read with a laser beam, scanning across the symbol surface. A transducer measures the amount of light reflected from the symbol surface. A differentiating circuit develops a differential coefficient indicative of the change of light intensity as light scans the symbols being read. A control system adjusts the optical system illuminating the symbol surface so as to maximize the differential coefficient, thereby minimizing the diameter of the light beam to allow for adequate reading of the symbol surface at variable distances.

Abstract: The focus and overlay alignment of photolithographic exposure tools of the type wherein the location of the wafer is accurately tracked with respect to a baseline position, such as in step and repeat cameras, are evaluated by monitoring the output signal generated by a photodetector in response to the light radiated from one or more periodic test patterns carried by a re-useable calibration wafer while such a test pattern is being exposed to an aerial image of a matching calibration mask. Overlay alignment suitably is evaluated by stepping the pattern on the wafer from side-to-side and fore and aft of the aerial image while monitoring the photodetector for a peak output signal, whereby overlay alignment errors along the x-axis and y-axis of the exposure tool are determined by the displacement of the wafer positions at which such peak signals are detected from the positions at which such peak signals ae expected.

Abstract: A device for generating printed output has an array of point light sources focused onto a photosensitive surface. The array is spaced from the surface substantially at the position of best focus by generating a pattern of activated and unactivated light sources along the array such that a pair of light sources which lead to the creation of an image on the output are separated by a light source which does not lead to the creation of an image. Since the image size grows in width as the focus decreases, the width of the space between images can be used as a focusing gauge, and appropriate adjustments can be made to maximize the width of the space.

Abstract: Discrete segments of an analog optical wave signal are collected in individual waveguides of a waveguide array. In the waveguide array, the optical signal is processed to provide an analysis of the signal or to control the signal. The signal can be analyzed by Mach-Zehnder interferometers which can provide an indication of the distance of a subject from the array. By controlling the dielectric constants of the waveguides electronically, the array can serve as an aberration free focusing lens or as an aberration compensation lens. Rapid electronic control of the focal length of the lens makes the lens particularly applicable to automatic focusing systems, systems which view only objects within a selected range of distances from the array, and the compiling of in focus segments to form a wide depth of field image.

Abstract: An improved pattern of lines (26, 28) is placed on a wedged substrate (18) used to locate the focal plane of a scanning projection aligner. This pattern replaces the conventional array of microscopic resolution targets with large regions of microscopic lines and spaces. When printed, in- and out-of-focus conditions are macroscopically apparent due to the presence or absence of photoresist (14). Desired quantities conventionally determined from microscopic data, such as location of the best focus plane, astigmatism, mask-to-wafer parallelism, mirror aberrations and misalignments, are macroscopically determined in accordance with the invention.

Abstract: A focus error detector comprises an inner group of light detector elements formed in a circular area about a focus point of an illumination beam for generating a first focus error signal. A second group of light detector elements formed in an annular-shaped area around the circular area for generating a second focus error signal, an amplifier for amplifying the second error signal, and an adder for combining the first and second focus error signals to generate a composite focus error signal.

Abstract: A test device for setting motor-vehicle headlight beams is described, which essentially consists of a base plate (1) and the two open-up parts, namely the lens holder (2) and the test surface (3). The lens holder contains an aspheric lens (4) of which the optical axis (5) is parallel to the rest surface (6) of the base plate (1) and simultaneously perpendicular to the test surface when the device is in the opened-up, operational position. The lens is of such height and so corrected that the light of headlights mounted low, normally or high is passed without headlight elevation adjustment and is imaged on the test surface located approximately in the lens focus, and in that the test result is entirely independent of the particular headlight elevation.

Abstract: A device for automatically detecting a proper focusing state of an image-forming optical system e.g. for a photographic camera such as a single-lens reflex camera and the like, comprises a mechanism for splitting a beam of light incident through the optical system. The device does not depend intrinsically upon a current state of polarization of the incident light-beam.The mechanism for splitting a beam of light comprises a two-component lens arrangement which divides the incident beam of light into two beams of light, and a phase-shifting plate behind one of the components for lengthening the effective optical path of one of the split beams with respect to the other split beam. A first a second array of light-sensing elements is provided for receiving both of the split beams of light for evaluating and comparing the sharpness and other characteristics of the two beams of light.

Abstract: A focusing device for optical systems wherein, in order to make it possible to use an image photographing element and to focus an image without vibrating a body, on a light intercepting plate to be rotated in a plane intersecting at right angles with an optical axis around the optical axis in or near an exit pupil or a position conjugate with the exit pupil of an optical system, light intercepting parts and non-light intercepting parts are so arranged as to alternately vary the relative positions of the light intercepting parts and non-light intercepting parts appearing within the pupil whenever the light intercepting plate makes 1/4 rotation. The light intercepting plate is rotated either continuously or intermittently by 1/4 rotation. The light intercepting parts and non-light intercepting parts appearing within the pupil are alternately varied vertically or horizontally within the visual field.

Abstract: In order to derive a focussing error signal of an objective lens with respect to a video disc on which a light beam is focussed by the objective lens, the P-polarized light beam is made incident upon a prism and then upon a thin film which is applied to the prism and has a refractive index higher than that of the prism, and the light beam reflected by a boundary surface between the thin film and the air is detected by a photo-detector having two light receiving regions. The thin film is made of material having a higher refractive index than that of the prism. Between the prism and the thin film there may be interposed at least one additional thin film in such a manner that the lower and higher refractive index thin films are alternately arranged.

Abstract: An apparatus for detecting a position of an optical pickup is disclosed in which there are provided a lens having lens areas of four quadrants sectioned by two planes, each including an optical axis and being perpendicular to each other, focal lengths of the lens areas of first and third quadrants being selected equal with each other, focal lengths of the lens areas of second and fourth quadrants being selected equal to each other, the focal length of the lens areas in the first and third quadrants being selected different from that of the lens areas in the second and fourth quadrants, the respective lens areas having axial symmetry, the lens being located within the optical path of the reflected beam on an optical disc, and a photo detector having four divided detecting portions in correspondence with the respective lens areas for detecting the reflected beam passed through the lens.

Abstract: A data compression system includes a logarithmic ratioing network configured from only two chopper stabilized operational amplifiers connected to a dual slope analog-to-digital converter having a signal integrate time t.sub.int. The system is characterized in that the chopping frequency of the chopper stabilized operational amplifiers is equal to the inverse of an integer number N times the signal integrate time of the converter. For the analog-to-digital converter to average to zero the noise output due to chopping, the chopper stabilized operational amplifiers are driven together at the chopping frequency.

Abstract: This invention relates to a method and device for detecting the focusing position in a laser processing apparatus, such as a machine for cutting plate-shaped workpieces by laser beams.The method includes the steps of placing a light shielding member and a light sensor in a path of laser light beams irradiated through a condenser lens to the workpiece to be processed; moving at least either one of the light shielding member and light sensor along the optical axis of the laser beams; and detecting the position at which electrical output of the light sensor becomes either a minimum or a maximum; whereby the focusing position is determined.

Abstract: A test lens and a photo-detector array are fixed in position along an optical axis a fixed distance from each other. Light is reflected by the front and rear surfaces of the test lens through an objective lens and is detected by the photo-detector array. The detected light is processed to produce a pixel count by video processing electronics. Control electronics adjusts the focusing of the objective lens by incremental displacement along the optical axis during a measurement cycle and significant focus position data is obtained from the video processing electronics to determine best focus location from which test lens data is derived.

Abstract: A focussing error detection system is described for determining deviations between the plane of imaging of an objective system in an optical arrangement and the radiation-reflecting surface in said system. The apparatus comprises an optical element by means of which a radiation beam coming from the radiation reflecting surface is both rendered astigmatic and separated from a radiation beam which is directed to the radiation-reflecting surface. By the use of this element the number of components of the focussing-error detection system can be minimized and a compact construction of said system can be obtained.

Abstract: Focus accuracy of a radiant energy recording beam is determined by recording test signals along a spiral track to form on the recording medium a series of adjacent bands. Each band comprises a plurality of track convolutions. Track convolutions in each band are recorded at a focus setting on the recording beam which is different by known increments from the focus setting of the beam when track convolutions in respective bands adjacent thereto are recorded. The best focus conditions are obtained at the focus setting of the recording beam forming the brightest band. By comparing the position of that band relative to the position of the band formed by the recording beam at the focus setting at which information is recorded, an accurate determination of the focus conditions thereat is readily obtained from the known increments of focus settings.

Abstract: An optical instrument for locating the focal point of a smooth surface concave reflector of a signal lamp unit. The optical instrument includes a cylindrical metallic base member for insertion into the electrical socket of a light bulb. A translucent sighting target member is carried by the base member and includes a reticle for focusing in a distant image whereby the filament of a light bulb will be located at the focal point of the concave reflector for maximizing the illuminative efficiency of the signal lamp unit.

Abstract: A method of locating the filament of a light bulb at the focal point of a parabolic reflector comprising the steps of placing an optical instrument into the electrical socket for the light bulb, positioning the electrical socket and optical instrument until a reticle of the optical instrument is situated at the focal point of the parabolic reflector, and replacing the optical instrument by a light bulb.

Abstract: A compact optical bench type unit for making selected color-component records of color transparencies for use in color printing comprises a light source with a rotary filter disc for directing a beam of selectively colored light through a light condenser which converges the beam through a color diapositive to be reproduced and into the objective of a camera. The condenser, possibly formed of Fresnel lenses, is of large dimensions to accommodate large diapositives, and the camera objective has a relatively short focal length. Chromatic aberration of the condenser is corrected by moving the light source in correspondence with rotation of the filter disc, or by selectively inserting correcting lenses in the beam.

Abstract: A headlamp with a parabolic reflector has a filament mounted on lead wires attached to a support disc which is slidably and angularly adjustable within a cylindrical ferrule attached to the reflector so as to permit positioning the filament at the reflector focal point whereupon light from the filament will be reflected as a parallel beam from the reflector. The invention contemplates an improved method for focusing the filament including locating a planar mirror on the optical axis of the parabolic reflector for redirecting light parallel to the optical axis from the reflector back to the focal point of the mirror and wherein terminals of the filament are electrically connected to a power supply and to a meter to detect electrical resistance changes in the filament to indicate location of the filament at the focal point where light rays reflected from the flat planar mirror directly impinge on the filament to cause increase in its electrical resistance.

Abstract: A system for determining the focus point of a high power radiation beam.

Abstract: An image sharpness detecting system employing two photoconductive cells of different geometry which permits detection of an optimum degree of sharpness of an image formed thereon regardless of variation in the direction of light distribution of the image relative to the electrodes of the cells. Differences between light response characteristics of these two cells due to the different geometry thereof are compensated for by providing optical means such as filter arranged between the cells, whereby the system is made accurately and reliably responsive to variation of light distribution even at low total light levels.

Abstract: A photoelectric focus detecting member includes a semiconductor substrate of a first polarity and at least two closely transversely spaced parallel longitudinally extending photosensitive laminae of a polarity opposite to the first polarity to form corresponding photodiodes. Each of the photosensitive laminae is masked to provide regularly spaced light receiving areas alternating with masked areas, the light receiving areas of successive transversely spaced photodiodes being relatively longitudinally offset to present a checkered pattern. The detecting element is positioned in the focal plane of a lens and is either stationary or oscillated. The difference in potential between the diodes or the amplitude of the AC current in a circuit including the photodiodes is a function of the condition of focus of the lens.

Abstract: An electronic optical analyzer for use in systems such as optical transfer function analyzers eliminates mechanical scanning systems and comprises entirely electronic image dissection means for dissecting an image transmitted by an optical system under test and producing an electric output signal representative of the beam intensity at a selected element of the image. The image dissection means is preferably (in the case of visible light) an image dissector tube whose positioning coils serve as an image element addressing means. The system is useable with any optical system including visible light, other electromagnetic radiation or charged particles (ions or electrons) so long as the image dissection means is responsive to the beam in question. The optical system under test must produce a real image at the image dissection surface of the image dissection means in order for readily evaluatable data to be obtained.

Abstract: A system for detecting the distinction of the object image characterized in that respectively on a photoelectric transducing element presenting electrodes on both extremities along the longer sides of a photoelectric semiconductor presenting considerably short sides as compared with the long sides and on a photoelectric transducing element presenting electrodes on both extremities along the shorter sides of a photoelectric semiconductor presenting considerably short sides as compared with the long sides an object image is formed by means of an optics and that the distinction of the above mentioned object image is detected by detecting the electric characteristics variable corresponding to the distinction of the above mentioned object image, of each of the above mentioned photoelectric transducing elements.