Abstract: A spectrally selective (e.g., color) target has been designed and fabricated for reflectance micro- and/or macro-imaging that utilizes microlens arrays and color mirrors. The color mirrors are optical interference coatings. The microlenses are designed and fabricated such that the light reflected from the color mirror is incident onto the detector. This system of microlenses and color mirrors allows the user to image different colored specular highlights. An infinite number of spectral reflectance profiles can be created with these color targets and used for spectral and colorimetric imaging applications. The targets are not limited to the visible region; they can also be designed to work in the ultraviolet and infrared wavelength regions.

Abstract: An image inspection apparatus includes: a parameter setting unit that automatically sets a value of a first parameter among a plurality of image processing parameters; an image generation unit that generates a processed image with each of a plurality of second parameter candidate values obtained by changing a value of a second parameter; a display unit that displays a second parameter candidate list image group in which a plurality of processed images are listed; an image selection unit that receives a selection of any one of the processed images included in the second parameter candidate list image group displayed on the display unit; and a determination unit that outputs a determination result of the visual inspection. The parameter setting unit sets a second parameter candidate value corresponding to the processed image selected by the image selection unit as the second parameter.

Abstract: A cargo position tracking routine implemented in an electronic control unit of an automotive vehicle uses machine vision to monitor the position of cargo in a cargo area of an automotive vehicle and determine whether the cargo has shifted. Upon determining that the cargo has shifted, the cargo position tracking routine causes a driver of the vehicle to be alerted.

Abstract: Methods and systems for sorting hides are provided. In particular, one or more embodiments comprise a tanning control system that enhances the traceability of hides by capturing and utilizing data related to the unloading, tanning, sorting, and packaging of hides. Furthermore, one or more embodiments enable the tanning control system to improve efficiency by sorting hides based, at least in part, on data generated during prior tanning processes. Additionally, one or more embodiments facilitate the tanning control system in customizing the sorting and packaging of hides based, at least in part, on one or more hide characteristics and/or customer specifications.

Abstract: Data acquisition devices for analyzing reference objects and systems for monitoring turbine component deformation are provided. A data acquisition device has a longitudinal axis and includes a lens assembly and an image capture device in communication with the lens assembly for receiving and processing light from the lens assembly to generate images. The data acquisition device further includes a light source and a light tube coupled at a rear end to the light source. The light tube extends along the longitudinal axis between a front end and the rear end, and is operable to transport light from the light source therethrough and emit the light from the front end. The data acquisition device further includes an actuator operable to activate the image capture device and the light source.

Abstract: In order to provide a tire inspection apparatus which is capable of identifying, when performing an appearance inspection of a tire, a location of a rubber burr from a captured image of a tire side and avoiding detection of the rubber burr as a defect in a subsequent inspection step using image processing, the tire inspection apparatus is provided with a storage unit for storing a model pattern of a molded object to be molded on the tire side to be inspected and a master image of the tire side, the master image being prepared when the molded object(s) and an unnecessary molded object(s) are molded together as a conforming article, a model pattern locating unit for locating the model pattern on the captured image of the tire side to be inspected in a position of the captured image showing a highest degree of agreement, and an unnecessary molded object location identifying unit for identifying a location of the unnecessary molded object from the captured image by comparing the position of the model pattern loca

Abstract: An information processing device includes: a memory configured to store data concerning a write access; and a processor coupled to the memory, the processor being configured to: record, for each data, time of a write access of the data to management information, when writing out data from the memory to a storage, determine a plurality of data as a group of overall compression based on the management information, the plurality of data having a difference of time of write accesses being equal to or less than a threshold value, and compress the plurality of data corresponding to the determined group by an overall compression, and write compressed data obtained through the overall compression to the storage.

Abstract: In one embodiment, apparatus and methods for determining a parameter of a target are disclosed. A target having an imaging structure and a scatterometry structure is provided. An image of the imaging structure is obtained with an imaging channel of a metrology tool. A scatterometry signal is also obtained from the scatterometry structure with a scatterometry channel of the metrology tool. At least one parameter, such as overlay error, of the target is determined based on both the image and the scatterometry signal.

Abstract: In some aspects, camera systems can include a camera enclosure, a lens disposed in or along the camera enclosure along an optical axis of the camera system, and an optical accessory attached to camera enclosure, where the optical accessory is attached using a magnetic retention force that is provided by at least one magnetic element.

Abstract: Methods, systems, and devices involving patterned radiation are provided in accordance with various embodiments. Some embodiments include a device for projecting pattern radiation. Some embodiments include a method for estimating coordinates of a location on an object in a 3D scene. Some embodiments include a system for estimating the coordinates of a location on an object in a 3D scene. A variety of radiation patterns are provided in accordance with various embodiments. Some embodiments may relate to the use of patterned illumination to identify the angular information that may be utilized to measure depth by triangulation.

Abstract: A method of and an apparatus for providing an indicator for a diamond as to whether it is natural by testing for the presence or absence of one or more specific markers in the luminescence properties of the diamond. These markers are characterized by luminescence decay time and luminescence wavelength.

Abstract: In order to inspect a substrate, an image information of a substrate before applying solder is displayed. Then, at least one inspection region on the substrate is image-captured to obtain an image of the inspection region that is image-captured. Then, image information that is to be displayed is renewed and the renewed image information is displayed. And, in order to inspect a foreign substance, obtained image of the inspection region is compared with a reference image of the substrate. Therefore, an operator can easily catch a region corresponding to a specific region of the image that is displayed, and easily detect a foreign substance on the substrate.

Abstract: In some embodiments, an apparatus for performing temperature-compensated measurement of a position of a lens assembly is attached to an autofocus actuator. In some embodiments, the apparatus includes a light source for emitting light in a first direction. In some embodiments, a measurement sensor is affixed for receiving light reflected from a reflector. In some embodiments, a lateral shield is affixed in a position blocking detection by the measurement sensor of light having been emitted from light source but having not been reflected from the reflector. In some embodiments, a monitoring sensor is affixed in a position relative to the light source to receive light having been emitted from light source but having not been reflected from the reflector. In some embodiments, a transverse shield is affixed in a position blocking detection by the monitoring sensor of light reflected from the reflector.

Abstract: The invention relates to a UV light sensor produced in a CMOS method, comprising a substrate that has a surface, one or more sensor elements that detect radiation and are designed in said substrate, at least one passivation layer arranged over said substrate surface, and a functional layer that is arranged over said passivation layer and designed in the form of at least one filter. The problem addressed by the invention of providing a UV light sensor which is sensitive exclusively within the UV wavelength range is solved, in terms of arrangement, by means of filters designed directly on a planar passivation layer, and stray light suppressing means around said at least one sensor element and/or around the UV light sensor. In terms of the method, the problem is solved by measuring two output signal from at least two photo diodes fitted with different filters, and by determining a mathematical relationship between the two output signals.

Abstract: This invention provides a system for measuring displacement of an object surface having a displacement sensor that projects a line on the object surface and receives light from the projected line at an imager in a manner defines a plurality of displacement values in a height direction. A vision system processor operates on rows of imager pixels to determine a laser line center in columns of imager pixels in each of a plurality of regions of interest. Each region of interest defines a plurality of rows that correspond with expected locations of the projected line on the object surface. A GUI can be used to establish the regions. In further embodiments, the system generates grayscale images with the imager. These grayscale images can be compared to a generated height image to compensate for contrast-induced false height readings. Imager pixels can be compared to a reference voltage to locate the line.

Abstract: A printed code associated with a product is illuminated with light having a first lighting characteristic, and is readable in a default mode of an imaging reader. An electronic code displayed on a mobile communication device is readable in another mode of the reader, with a different second lighting characteristic that is designed to minimize specular reflection from a screen of the device. When the presence of the device in close proximity to the reader is detected, the reader is automatically configured to switch from the default mode to the other mode to enable the electronic code to be read.

Abstract: A measuring machine (10), in particular a coordinate measuring machine, has at least one optical sensor (34) for recording an image in an image capturing region (80) during an image recording time period (86), a control signal transducer (89) which provides a control signal that represents the image recording time period (86), a measurement illumination arrangement (96) for illuminating the image capturing region (80), and a control device (19). The control device (19) is configured to switch on the measurement illumination arrangement (96) during the image recording time period (86) in a manner dependent on the control signal. The control device is further configured to switch on at least one further illumination arrangement (97, 98, 100, 102) temporally outside of the image recording time period (86) in a manner dependent on the control signal. A corresponding measurement system and method for controlling the illumination are also discussed.

Abstract: An inspection system and method are presented for inspecting structures having a pattern formed by an array of elongated grooves having high aspect-ratio geometry, such as semiconductor wafers formed with vias. The inspection system comprises an imaging system and a control unit. The imaging system is configured and operable for imaging the structure with a dark-field imaging scheme and generating a dark-field image. The control unit comprises an analyzer module for analyzing pixels brightness in the dark-field image for identifying a defective groove, being a groove characterized by pixels brightness in the dark-field image lower than nominal brightness by a predetermined factor.

Abstract: The present invention provides a TDI line image sensor. The TDI line image sensor according to the present invention is characterized by comprising: a pixel unit, which has N line sensors having M CCDs arranged in a line and being arranged horizontally to a scan direction, horizontally moves charges accumulated in the respective columns of the line sensors, and accumulates same; and an output unit for parallelly receiving as inputs the charges accumulated in the pixel unit from the respective columns, performing analog-to-digital conversion on and storing the charges, and then sequentially outputting same.

Abstract: A dental apparatus is provided. The dental apparatus include a handle. A controller operably couples to the housing. A subsystem is in operable communication with the controller and configured to generate an excitation signal causing an emitted fluorescence light to be reflected back to the subsystem and to the controller for analyzing one or more properties of the emitted fluorescence light. The one or more properties corresponding to a decay time of the emitted fluorescence light, wherein plaque emitted florescence light decays faster than tooth emitted florescence light. The controller is programmed to analyze detected emitted fluorescence light to determine if the emitted fluorescence light is indicative of a plaque emitted fluorescence decay time or tooth emitted florescence light decay time to detect the presence of one of dental plaque and tooth demineralization.

Abstract: Methods are provided for the automated detection of micro-objects in a microfluidic device. In addition, methods are provided for repositioning micro-objects in a microfluidic device. In addition, methods are provided for separating micro-objects in a spatial region of the microfluidic device.

Abstract: Advanced interconnect technologies such as Through Silicon Vias (TSVs) have become an integral part of 3-D integration. Methods and systems and provided for laser-based acoustic techniques in which a short laser pulse generates broadband acoustic waves that propagate in the TSV structure. An optical interferometer detects the surface displacement caused by the acoustic waves reflecting within the structure as well as other acoustic waves traveling near the surface that has information about the structure dimensions and irregularities, such as voids. Features of voids, such as their location, are also identified based on the characteristics of the acoustic wave as it propagates through the via. Measurements typically take few seconds per site and can be easily adopted for in-line process monitoring.

Abstract: A system, method, and computer program product are provided for correcting a difference image generated from a comparison of target and reference dies. In use, an intra-die inspection of a target die image is performed to generate, for each pattern of interest, a first representative image. An intra-die inspection of a reference die image is performed to generate, for each of the patterns of interest, a second representative image. Further, the target die image and the reference die image are compared to generate at least one difference image, and the at least one difference image is corrected using each of the generated first representative images and each of the generated second representative images. Detection is then performed using the corrected difference image.

Abstract: An apparatus to control processing conditions for a substrate. The apparatus may include a current measurement component to perform a plurality of extraction current measurements for extraction current in a processing apparatus housing the substrate, the extraction current comprising ions extracted from a plasma and directed to the substrate; and an endpoint detection component comprising logic to generate an endpoint detection signal based upon a change in extraction current during the plurality of extraction current measurements.

Abstract: The disclosure relates to a method and apparatus for preventing oxidation or contamination during a circuit printing operation. The circuit printing operation can be directed to OLED-type printing. In an exemplary embodiment, the printing process is conducted at a load-locked printer housing having one or more of chambers. Each chamber is partitioned from the other chambers by physical gates or fluidic curtains. A controller coordinates transportation of a substrate through the system and purges the system by timely opening appropriate gates. The controller may also control the printing operation by energizing the print-head at a time when the substrate is positioned substantially thereunder.

Abstract: A print management method implemented in a system including a client computer, a server, and a plurality of printers is disclosed, which includes by the server: (a) receiving, from a client computer, a request relating to a print job; (b) determining whether a predetermined print quality is required for the print job; (c) filtering at least two printers each of which has an in-line spectrophotometer from the plurality of printers; (d) instructing the each filtered at least two printers to conduct a color validation process by using the in-line spectrophotometer; (e) receiving, from the each filtered at least two printers, a result corresponding to the color validation process by the in-line spectrophotometer; and (f) determining at least one candidate of a destination printer for the print job based on whether the each filtered at least two printers meets predetermined print quality, using the result corresponding to the color validation process.

Abstract: A substrate mark detection apparatus includes: a detecting module, configured to detect a depth at which a mark is embedded in a substrate to be detected and determine whether the substrate is valid or not according to the depth at which the mark is embedded in the substrate; an information extracting module, configured to parse the mark to obtain parsed information in a case where the substrate is valid, query pre-stored information corresponding to the mark, determine whether the parsed information conforms to the pre-stored information or not, and if yes, to extract the pre-stored information and output the pre-stored information; a sorting module, configured to remove the substrate in a case where the substrate is invalid or the parsed information does not conform to the pre-stored information.

Abstract: According to an embodiment of the invention there may be provided a system for assigning lithographic mask inspection process parameters. The system may include a search module, a decision module and a memory module. The memory module may be configured to store an expected image expected to be formed on a photoresist during a lithographic process that involves illuminating the lithographic mask. The search module may be configured to search in the expected image for printable features. The decision module may be configured to assign a first lithographic mask inspection process parameter to lithographic mask areas related to printable features and assign a second lithographic mask inspection process parameter to at least some lithographic mask areas that are not associated with printable features. The second lithographic mask inspection process parameter may differ from the first lithographic mask inspection process parameter.

Abstract: A template defect inspection method using an optical system includes emitting linearly polarized light to a template having a metal film formed on at least part of a concave-convex structure that is formed on a substrate and that has a line-and-space pattern, acquiring information on a polarization-rotated component, which is different from linearly polarized light incident on the template, of light reflected by the template in accordance with the emission thereto, converting the acquired information on the polarization-rotated component into an electrical signal, and processing the electrical signal.

Abstract: One embodiment relates to an apparatus for detecting defects on a manufactured substrate. The apparatus includes an imaging tool arranged to obtain image frames from the manufactured substrate. The apparatus further includes a data processing system which includes computer-readable code configured to compute features for pixels in an image frame and divide the pixels in the image frame into feature-defined groups of pixels. The computer-readable code is further configured to select a feature-defined group, and generate a multi-dimensional feature distribution for the selected feature-defined group. Another embodiment relates to a method of detecting defects from a test images frame and multiple reference image frames. Other embodiments, aspects, and features are also disclosed.

Abstract: A lighting-on apparatus comprises at least one gate line pin and further comprises a gate line pin moving unit. The at least one gate line pin is moved by the gate line pin moving unit so that the at least one gate line pin corresponds with a gate line interface of a liquid crystal display panel under test. The lighting-on apparatus according to the embodiments of the present disclosure is configured to perform a test on the liquid crystal display panel, and is capable of simplifying test work of liquid crystal display panels, saving test time and cost, and improving work efficiency.

Abstract: An automatic focus control apparatus includes a light detector, which receives light reflected by a surface of a wafer and generates a light reception signal based on the received signal, a controller, which generates a driving signal, the driving signal being one of a first signal and a second signal, the driving signal indicating whether to perform automatic focus control based on the light reception signal, a focus error corrector, which generates a focus error correction signal based on the driving signal, and a stage driver, which displaces a wafer stage supporting the wafer by adjusting the z-axis position of the wafer stage based on the focus error correcting signal if the driving signal is the first signal, and maintains the z-axis position of the wafer stage based on the focus error correction signal if the driving signal is the second signal.

Abstract: Methods and systems for detecting early stage dental caries and decays are provided. In particular, in an embodiment, laser-induced autofluorescence (AF) from multiple excitation wavelengths is obtained and analyzed. Endogenous fluorophores residing in the enamel naturally fluoresce when illuminated by wavelengths ranging from ultraviolet into the visible spectrum. The relative intensities of the AF emission changes between different excitation wavelengths when the enamel changes from healthy to demineralized. By taking a ratio of AF emission spectra integrals between different excitation wavelengths, a standard is created wherein changes in AF ratios within a tooth are quantified and serve as indicators of early stage enamel demineralization. The techniques described herein may be used in conjunction with a scanning fiber endoscope (SFE) to provide a reliable, safe and low-cost means for identifying dental caries or decays.

Abstract: A non-destructive method for assessing the “degree of sensitization” of ship structures formed from aluminum-magnesium marine service alloys. Features of the method include (1) selective etching of beta phase in a sensitized aluminum-magnesium alloy (2) metallographic recording of the etched surface; (3) image enhancement to produce high-contrast binary images of etched and unetched areas; (4) image analysis of the enhanced images using line segments along grain boundaries to provide statistical information about the grain boundary beta phase percentage and (5) calibration, whereby the grain boundary beta phase percentage is converted to an expression of the degree of sensitization in the sample.

Abstract: A wafer scanning system includes imaging collection optics to reduce the effective spot size. Smaller spot size decreases the number of photons scattered by the surface proportionally to the area of the spot. Air scatter is also reduced. TDI is used to produce a wafer image based on a plurality of image signals integrated over the direction of linear motion of the wafer. An illumination system floods the wafer with light, and the task of creating the spot is allocated to the imaging collection optics.

Abstract: The measurement equipment includes a rack, a first image capturing device, a second image capturing device, a third image capturing device and a fourth image capturing device. Wherein, the first image capturing device and the second image capturing device capture an entire image of a to-be-measured object, the third image capturing device and the fourth image capturing device capture a plurality of local images of a plurality of local areas of the to-be-measured object, and the entire image and the local images and are simultaneously captured.

Abstract: The invention discloses a flat-panel product inspection device, comprising: a horizontal conveying mechanism for driving a flat-panel product in a horizontal state to move in a first horizontal direction; a guiding clamp for clamping the flat-panel product when the flat-panel product is moved to a first position; and a turnover mechanism connected with the guiding clamp and used to drive the guiding clamp to turn around a first rotating axis after the flat-panel product is clamped by the guiding clamp, so that the flat-panel product is turned from the horizontal state to a vertical state, the first rotating axis being parallel to the first horizontal direction.

Abstract: An analysis system (e.g., LIBS) includes a laser source generating a laser beam, a movable optic configured to move said laser beam to multiple locations on a sample, and a spectrometer responsive to photons emitted by the sample at those locations and having an output. A controller is responsive to a trigger signal and is configured in a moving spot cycle to adjust the moveable optic, activate the laser source sequentially generating photons at multiple locations on the sample, and process the spectrometer output at each location.

Abstract: ProA wafer image inspection apparatus for inspecting defects of a semiconductor wafer comprises: a lighting portion for generating light; a lens portion for obtaining a wafer image, which is reflected after the light has been reflected onto a wafer to be inspected, and delivering the wafer image by lighting same in one direction; a dividing optical element for dividing the wafer image delivered from the lens portion; an image detection portion comprising a plurality of image-capturing elements, which are installed so that images which have passed through the lens portion and the dividing optical element are respectively formed on different focus positions; and an image processing portion for combining the images on different focus positions captured by the plurality of image pick-up elements to form a TSOM image, and comparing the TSOM image with a TSOM image of a normal semiconductor apparatus part to determine whether an object is defective.

Abstract: Wearable systems with thermal imaging capabilities may be provided for detecting the presence and location of persons or animals in an environment surrounding the system in accordance with an embodiment. A wearable system may include a wearable structure such as a helmet with a plurality of imaging modules mounted to the wearable structure. An imaging module may include one or more imaging components such as infrared imaging modules and visible light cameras. Thermal images captured using the infrared imaging modules may be used to detect the presence of a person in the thermal images. The wearable imaging system may include one or more alert components that alert the wearer when a person is detected in the thermal images. The alert components may be used to generate a location-specific alert that alerts the wearer to the location of the detected person. A wearable imaging system may be a multidirectional threat monitoring helmet.

Abstract: A bill discrimination apparatus and method using a radio frequency (RF) signal that includes a transmission antenna radiating the radio frequency (RF) signal; a reception antenna receiving the RF signal from the transmission antenna; and a control unit providing the RF signal to the transmission antenna, and detecting a thickness of a bill, a state of the bill, or a presence of a foreign object on the bill based on a voltage of the RF signal transmitted through the bill and received by the reception antenna when the bill is between the transmission antenna and the reception antenna. The RF signal has a preset, specific frequency.

Abstract: A device for measuring a large-area and massive scattered field in nanoscale. The device includes a polarization state generator disposed on an output optical path of a laser source, a polarization state analyzer operating to demodulate a polarized light beam emitted thereon, a first objective lens and a first lens disposed on an optical path of a sample stage, and a scanning mirror disposed on an optical path in front of or at the rear of the polarization state generator.

Abstract: According to an embodiment of the invention there may be provided a system for inspecting an object, the system may include a traveling lens acousto-optic device that is configured to generate a sequence of traveling lenses that propagate through an active region of the traveling lens acousto-optic device; an illumination unit that that is configured to illuminate the sequence of traveling lenses to provide a sequence of input beams; a first beam splitter that is configured to split the sequence of input beams to an intermediate array of intermediate beams, the intermediate array comprises multiple sequences of intermediate beams, the sequences of intermediate beams are spaced apart from each other; a masking unit that is configured to mask first beams of the intermediate array and unmask output beams of the intermediate array in an alternating manner; multiple detectors; and an objective lens that is configured to receive the output beams, direct the output beams towards multiple areas of the object, receive

Abstract: It is judged whether or not an average gray level of an image of a wafer W that is an inspection target and that has been imaged by the light receiving part 2 is in the defect detectable range. A control processing part 6a is configured to modify an exposure time in imaging the wafer W and to obtain an image of the wafer W again by the light receiving part 2 in the case in which it is decided that an average gray level of an image of the wafer W is not in a defect detectable range, and an image processing part 6b is configured to carry out a defect inspection based on an image of the wafer W in the case in which it is decided that an average gray level of the image of the wafer W is in the defect detectable range.

Abstract: A reverse vending machine, including: a chamber adapted to receive an object returned to the reverse vending machine; a plurality of cameras arranged around the perimeter of the chamber for viewing said object; a transparent or translucent plate arranged such that the cameras in use view the object obliquely through the transparent or translucent plate; and means adapted to couple light into the plate such that the light undergoes total internal reflection in the plate. Also, a method of detecting dirt in a reverse vending machine.

Abstract: An object carrier, a system and a method is disclosed for the back light inspection of transparent or semitransparent objects. The carrier has a carrier base layer with photo luminescent properties which carries the transparent or semitransparent object on top of the layer. The transparent or semitransparent object could be a wafer and the object carrier could be a wafer chuck. At least one light source being arranged above the object carrier such that excitation light emitted from the at least one light source is directed through the transparent or semitransparent object to the layer with photo luminescent properties. The light returned from the layer with photo luminescent properties is collected by an objective and registered by a sensor.

Abstract: The present disclosure provides a system and method of optical inspection of substrates that have relative large variations in topography. The present disclosure provides a system wherein optical components of the optical inspection system can be automatically moved vertically towards or away from the substrate during optical inspection of the substrate. The system moves the optics in a controlled and precise manner, thereby enabling accurate on-the-fly inspection of substrates having a large variation in topography.

Abstract: The present disclosure is directed toward a machine tool configured to perform small-scale, high-accuracy drilling operations for small-hole applications. The small-hole applications for which the machine tool is designed includes holes with one or more diameters. A part may have a larger-diameter hole that penetrates through a fraction of the thickness of a part and a smaller-diameter hole that penetrates from the bottom of the larger-diameter hole through the remainder of the part thickness. Additionally, the machine tool may be used with parts in any of the following categories: (i) both the step-hole and the flow-hole are created using the machine tool; or, (ii) the step-hole is created with an up-stream process and the machine tool may accept the part, measure the step-holes and create the flow-holes; or, (iii) no step-hole is used and the machine tool may accept the part, measure the raw surface and create the flow-holes.

Abstract: A method of defect inspection for a photomask is provided. According to the method, a light transmittance correction is performed to reduce a light transmittance of a calibration key pattern region of a photomask including a field region and the calibration key pattern region to the light transmittance of the field region. Light calibration is performed using the calibration key pattern region having corrected light transmittance. Defect inspection for the field region is performed by applying a result of the light calibration.

Abstract: An imaging device inserted into an opening of a tire includes a light source, a mirror, and a camera and is configured so that the mirror revolves around a rotation shaft while an orientation of a surface of the mirror changes. The mirror is set in an imaging position by being revolved around the rotation shaft to be inserted into a tire cavity region. The tread inner surface of the tire is scanned with slit light by being irradiated with the slit light. During the scanning with the slit light, a line irradiation region on the tread inner surface formed through the irradiation of the slit light is imaged via the mirror by the camera from a direction tilted with respect to the tire circumferential direction, and image data is output.