Abstract: Wafer processing apparatuses and methods of operating the same are provided herein. In an embodiment, a wafer processing apparatus includes a rotatable platen that has the capacity to support a polishing pad on a pad mounting surface of the rotatable platen. A drive assembly is coupled to the rotatable platen and has the capacity to rotate the rotatable platen. A polishing head is coupled to a head actuator. The polishing head is disposed adjacent to and over a first portion of the pad mounting surface and the polishing head is movable relative to the pad mounting surface by the head actuator. An optical sensor has a vision field including a second portion of the pad mounting surface. The first portion and the second portion of the pad mounting surface are at least partially offset. A control unit is operatively connected to the drive assembly and the head actuator.

Abstract: An apparatus to measure surface orientation maps of an object may include a light source that is configured to illuminate the object with a controllable field of illumination. One or more cameras may be configured to capture at least one image of the object. A processor may be configured to process the image(s) to extract the reflectance properties of the object including an albedo, a reflection vector, a roughness, and/or anisotropy parameters of a specular reflectance lobe associated with the object. The controllable field of illumination may include limited-order Spherical Harmonics (SH) and Fourier Series (FS) illumination patterns with substantially similar polarization. The SH and FS illumination patterns are used with different light sources.

Abstract: There is disclosed a measuring method of a surface roughness of a polishing pad which can measure a surface roughness index of the polishing pad showing a strong relationship with polishing performance. A method for measuring a surface roughness of a polishing pad includes acquiring an image of a surface of a polishing pad by using a laser microscope, selecting only a region which has a height larger than an average height from the acquired image, and calculating a surface roughness from only the selected region.

Abstract: In order to establish a lighting intensity of an inspection apparatus, an inspection board is installed in an inspection apparatus. Then, a width of a histogram of a captured image acquired through a camera of the inspection apparatus is adjusted to avoid from a dark region and a bright region. Thereafter, a lighting intensity of the inspection apparatus is adjusted by adjusting the histogram to be near a middle of a graph. Thus, a setting time of an inspection condition stored in a job file may be reduced to increase the user's convenience, and measurement error due to mis-establishment may be reduced to enhance inspection precision.

Abstract: The invention provides a positioning device for locating a planar light beam emitted by an optical triangulation sensor across a diameter of a hole formed in a surface of an object. The positioning device has an adjustable guiding element which is capable of locating an optical triangulation sensor at the same distance away from holes have a range of diameters. The guiding element is movably mounted relative to a platform that is fixed to the optical triangulation sensor. The guiding element comprises a body which is insertable into the hole, the body having a pair of contact surfaces for contacting diametrically opposed portions of the hole, the pair of contact surfaces being opposed to each other in a direction orthogonal to the plane of the planar light beam.

Abstract: A recording material detection apparatus having a detecting device configured to detect a surface state of a recording material on the basis of reflected light from a surface of the recording material includes a reference surface to be irradiated with light from a light source, the detecting device includes a light-shielding portion configured to control conditions for detecting information relating to the surface state of the recording material on the basis of the reflected surface from the reference surface, and cover a portion of the reference panel other than the reference surface so as to prevent the light from the light source from being reflected from the portion of the reference panel other than the reference surface and being received by the light-receiving unit.

Abstract: A measurement system for monitoring an LED chip surface roughening process is described. A reflective illuminator can run reflectance measurements. A vertical positioning means can adjust a distance between an objective lens and an industrial sample. A horizontal positioning means can move objects in XY plane, and is specifically configured to hold the industrial sample and a reference sample. An optical sensor can acquire images of the industrial sample. A spectrometer can acquire reflectance spectrums of the industrial sample and the reference sample. A processor can control these components. The processor can perform deskew, and calculate an average reflectance and an oscillation amplitude from the reflectance spectrums of the industrial sample.

Abstract: There is disclosed a measuring method of a surface roughness of a polishing pad which can measure a surface roughness index of the polishing pad showing a strong relationship with polishing performance. A method for measuring a surface roughness of a polishing pad includes acquiring an image of a surface of a polishing pad by using a laser microscope, selecting only a region which has a height larger than an average height from the acquired image, and calculating a surface roughness from only the selected region.

Abstract: Surface states have traditionally been measured with apparatuses such as an atomic force microscope (AFM), and these measurements have been high in resolution but low in speed. In conventional apparatuses for inspecting the foreign matter sticking to a wafer surface, and for inspecting defects present on the wafer surface, the inspection has had a tendency to be restricted in a region of the highest noise level arising from the roughness of the surface, the surface state, and/or crystal orientations, and thereby to reduce detection sensitivity in a region of lower noise levels. In these conventional techniques, signal processing of the light scattered from the object to be inspected has been based only upon the intensity of the light. This invention acquires three-dimensional data by, during such signal processing, adding detection intervals and the frequency of detection, as well as the intensity of light.

Abstract: Minute surface unevenness formed on the surface of an object under inspection is detected, thereby improving the accuracy of an appearance inspection. A target surface in the sidewall region (21) of a tire (20) is illuminated by a red slit light from a first illuminating means (11) disposed in the direction of 45 degrees with respect to the normal line to the target surface. At the same time, the target surface is illuminated by a blue slit light from a second illuminating means (12) disposed in the direction of ?45 degrees with respect to the normal line. The illuminated surface is shot by a line camera (13) from the direction of the normal line. An R-component image and a B-component image are produced from the original image, and their respective luminance distribution waveforms are obtained. The surface unevenness formed on the target surface is detected on the basis of the luminance distribution waveforms.

Abstract: An apparatus for determining optical properties of materials including a first measuring device having a first radiation device which directs radiation onto the material under a first specified angle of radiation and a first radiation detection device which is located under a first angle of reception with respect to the material, and a second measuring device which includes a second radiation device which directs radiation onto the material under a second specified angle of radiation and a second radiation detection device which is located at a second angle of reception with respect to the material and allows a locally resolved evaluation of the radiation incident thereon and emits at least one second characteristic signal which is characteristic of the radiation incident on the second radiation detection device.

Abstract: A surface roughness value and a sub-surface scattering property of a material are estimated. The material is illuminated with a light beam with controlled coherence properties at multiple incident angles. Multiple speckle patterns are recorded, each speckle pattern being recorded for a respective one of the multiple incident angles. Both of a surface roughness value and a sub-surface scattering property of the material are estimated by calculations using the multiple speckle patterns and the incident angle for each such speckle pattern.

Abstract: An image forming apparatus for detecting surface conditions of a recording sheet on which an image is formed, includes a light source configured to emit a first light beam and a second light beam, an image capture device configured to capture a first image of a surface of the recording sheet illuminated with the first light beam and a second image of the surface of the recording sheet illuminated with the second light beam. A first straight line including a ray in a center of the first light beam and a second straight line including a ray in a center of the second light beam intersect with each other, when each straight line is projected onto the surface of the recording sheet, and a detection device configured to detect information about the unevenness on the surface of the recording sheet based on the first image and the second image.

Abstract: In order to make it possible for a difference between a defect and a normal part, such as contrast, to appear, a lighting device for inspection is provided with: a surface light source that emits inspection light; a lens that is provided on a light axis of the inspection light emitted from the surface light source, and between an inspection object and the surface light source; and a first diaphragm that is provided between the lens and the surface light source or the inspection object, wherein: the surface light source and the lens are set such that an image plane on which the surface light source is imaged is present near the inspection object; and the first diaphragm is set such that the central axis of an irradiation solid angle determined by a part of the inspection light is parallel to the light axis.

Abstract: A printer with integral scanner for obtaining a digital signature from a sheet of paper or other article as it is printed. The integral scanner has a coherent source which directs a light beam to illuminate the article and a detector arrangement to collect data points from light scattered from many different parts of the article to collect a large number of independent data points, typically 500 or more. The digital signature derived from the data points is stored in a database with an image of what was printed on the article. At a later time, the authenticity of an article purported to be the originally printed article can be verified by scanning the purported genuine article to obtain its digital signature. The database is then searched, to establish whether there is a match. If a match is found, the image stored in the database with the matched digital signature is displayed to the user to allow a further visual check that the article is genuine.

Abstract: Laser scanning microscope and method for the operation thereof having at least two detection channels which has at least one beamsplitter with a splitting of the sample light deviating from the 50:50 split and/or, with 50:50 split in the detection channels, has detectors with differently adjusted gain, or in at least one detection channel with equal light splitting has an additional light attenuator.

Abstract: A method of determining optical properties of textured surfaces by irradiation of the surface to be investigated. At least part of the radiation irradiated onto the surface and reflected by the latter is detected by a detector device which permits a location-resolved evaluation of the radiation striking it. A first characteristic value from the radiation detected, characteristic of a texture of the surface is detected. A second characteristic value from the radiation detected, characteristic of a further optical property of the surface is detected. And, a result value is determined on the basis of the first characteristic value and the second characteristic value.

Abstract: A system for simultaneous real-time three-dimensional geometry and color texture acquisition. The system includes a system processor for generating at least three phase shifted black and white fringe patterns with a phase shift of 2 ?/3, a light projector adapted to project the fringe patterns onto an object, the projector being electrically connected with the system processor, and a color camera for capturing the fringe patterns to generate at least three raw fringe images. The fringe images are used to calculate a black and white texture image which is further converted to a color image by employing a demosaicing algorithm. The fringe images are also used to calculate a wrapped phase map that is further processed to generate a continuous unwrapped phase map by employing a phase unwrapping algorithm and the unwrapped phase map is converted to co-ordinates using calibrated system parameters for point-by-point three-dimensional shape measurement.

Abstract: Devices for measuring the surface state of a surface, at least one portion of which has a surface curvature. The devices may includes a probe for being in contact with the curved surface portion. The probe may be stressed on the surface with a substantially constant stress. A way to measure the displacement of the probe may be provided and arranged to measure the displacement of the probe along an axis substantially perpendicular to the surface. The probe may also be relatively displaced in relation to the surface only along a path following the surface curvature.

Abstract: A system to detect and classify defects on a surface of a substrate. A first targeting assembly directs radiation in a first beam onto the substrate. A first collecting assembly collects first radiation specularly reflected from the substrate and produces first signals, a second collecting assembly collects first radiation scattered from the surface of the substrate by defects and not micro-roughness and produces second signals, and a third collecting assembly collects first radiation scattered from the surface of the substrate by defects and micro-roughness and produces third signals. A second targeting assembly directs radiation in a second beam onto the substrate. A fourth collecting assembly collects second radiation scattered from the substrate and produces fourth signals. A processor receives the first, second, third, and fourth signals.

Abstract: Provided is an asperity detection device for a can which does not need an additional conveyance device for inspection, reduces increased inspection costs, and allows for quick detection of defective merchandise while conveying the can.

Abstract: An optical arrangement for the non-contact measurement or testing of properties of a solid's surface, such as curvature, shape, contour, roughness or alignment. An optical arrangement includes structure for establishing a gap between the solid's surface and a reference edge, structure for imaging the gap on a detector, and an analyzing system connected to the detector. The analyzing system is designed to determine gap widths lying adjacent to each other on the basis of the output signals of the detector, and to determine curvature, shape, contour or roughness of the solid's surface on the basis of the gap widths lying adjacent to each other. From the comparison of the images obtained from any two positions within a drilled hole, deductions can be made, among other things, about any tilt between the measuring object and the measuring system.

Abstract: Disclosed are systems and methods to extract information about the size and shape of an object by observing variations of the radiation pattern caused by illuminating the object with coherent radiation sources and changing the wavelengths of the source. Sensing and image-reconstruction systems and methods are described for recovering the image of an object utilizing projected and transparent reference points and radiation sources. Sensing and image-reconstruction systems and methods are also described for rapid sensing of such radiation patterns. A computational system and method is also described for sensing and reconstructing the image from its autocorrelation. This computational approach uses the fact that the autocorrelation is the weighted sum of shifted copies of an image, where the shifts are obtained by sequentially placing each individual scattering cell of the object at the origin of the autocorrelation space.

Abstract: An apparatus for detecting the flatness of a top surface of a wafer includes a plurality of detector elements, a metal sink and a plurality of injection pipes. Each detector element comprises: a metal tube body, jet pipes, a light receiver and a light emitter. The method comprises: injecting ultra-pure water into the detector elements by injection pipes; emitting parallel beams along an upward-oblique direction, a preset Angle ? being formed between the beams and the vertical direction. The radiated beams above the water surface are incident on a receiver. The intensity of the beams received by the light receiver is used to calculate the height of the detecting point of the surface of the silicon wafer to determine the flatness condition of the wafer surface. The flatness of the photo-resist covered on the wafer surface can also be accurately measured by this method.

Abstract: An observing apparatus includes a lighting device for irradiating a surface of a measuring target with light having a first light source distribution, and an imaging section for imaging the surface of the measuring target. Considering a first plane passing through a measurement point, the first light source distribution is set such that: (1) a radiance L11(?) changes in a continuous or stepwise manner according to an angle ?, and (2) the radiance L11(?) is not zero in a local region of a predetermined range of ±? having a point located at a predetermined angle ?c as a center on the first plane when viewed from the measurement point, and the following equation substantially holds for arbitrary a satisfying 0<a??; L11(?c?a)+L11(?c+a)=2×L11(?c).

Abstract: The present invention provides an electron beam writing apparatus and an image placement error correcting method each capable of calculating a high-accuracy correction amount relative to an image placement error in consideration of a difference in required unit area of height distribution data between the shape of a back surface of an EUV mask and the shape of a surface of a pin chuck. Of back surface shape data of the EUV mask necessary to perform an image placement error correction of each pattern, the back surface shape data of a position brought into contact with each pin of the pin chuck is extracted. The image placement error is calculated only from the extracted back surface shape data.

Abstract: An apparatus is provided for inspecting holes in components. The apparatus includes a telecentric lens system positionable at a near end of a hole with an optical axis of the lens system aligned with the axis of the hole to image the interior of the hole. The apparatus further includes an illumination system for illuminating the interior of the hole. The apparatus further includes a camera arranged to receive an image of the illuminated interior of the hole from the telecentric lens system. The illumination system includes a light source for producing a beam of parallel light, and optics for directing the produced beam through the telecentric lens system along the optical axis thereof, and through the hole. The beam reaches the far end of the hole, and is reflected from a surface located at or adjacent the far end of the hole to illuminate the interior of the hole.

Abstract: Aspects of the disclosure relate generally to detecting road weather conditions. Vehicle sensors including a laser, precipitation sensors, and/or camera may be used to detect information such as the brightness of the road, variations in the brightness of the road, brightness of the world, current precipitation, as well as the detected height of the road. Information received from other sources such as networked based weather information (forecasts, radar, precipitation reports, etc.) may also be considered. The combination of the received and detected information may be used to estimate the probability of precipitation such as water, snow or ice in the roadway. This information may then be used to maneuver an autonomous vehicle (for steering, accelerating, or braking) or identify dangerous situations.

Abstract: A method and a device for determining a topography under load of the surface of a material, wherein a test piece (40) of the material intended to be determined is subjected to a compression with a determined load between a first and a second clamping surface (7, 27), after which, in a compressed state, at least one representation is made of surface portions of the material that are in contact with at least one of said clamping surfaces (7, 27), and that the representation is evaluated. The compression is controlled in respect of its speed for obtaining said predetermined load, and said at least one representation is made at a chosen point in time or chosen points in time during this process.

Abstract: An inspecting method and apparatus for inspecting a substrate surface includes illuminating a light to the substrate surface having a film, detection of a scattered light or reflected light from a plurality of positions of the substrate surface to obtain a plurality of electrical signals, comparison of the plurality of electrical signals and a database which indicates a relationship between the electrical signals and surface roughness, and calculation of a surface roughness value based on the result of comparison.

Abstract: An offset amount calibrating method that obtains the offset amount between a contact-type detector and an image probe for a surface profile measuring machine is provided. The method includes: setting on a stage a calibration jig that has a surface being provided with a lattice pattern with a level difference; measuring the lattice pattern of the calibration jig by the contact-type detector to obtain a first reference position of the lattice pattern; capturing the image of the lattice pattern of the calibration jig by the image probe to obtain a second reference position of the lattice pattern; and obtaining the offset amount from a difference between the first and second reference positions.

Abstract: A chromatic confocal scanning apparatus comprises a light source for producing light rays comprising a plurality of wavelengths, a first screen having an open elongated slit which allows a strip of light rays produced from the light source to pass through the slit and a cylindrical objective lens both to converge the light rays onto an object surface that is to be measured, and to image light rays reflected from the object surface. An intermediate cylindrical lens set converges a strip of light rays imaged from the cylindrical objective lens to pass through an open elongated slit comprised in a second screen, and a color sensor receives light rays which have passed through the slit of the second screen for determining a plurality of wavelengths of the said strip of light rays, to thereby construct a height profile of at least a portion of the object surface.

Abstract: The present invention relates to a method for optical visualization of graphene domains, and more particularly to a method for optical visualization of graphene domains, which can optically visualize the domains and domain boundaries of graphene by forming on a substrate a graphene layer to be measured, forming a liquid crystal layer on the formed graphene layer, and then measuring the optical properties of the formed nematic liquid crystal layer. The method for optical visualization of graphene domains according to the invention uses a liquid crystal-coating method, which is simpler and easier than a conventional method for observing graphene domains. Thus, the method of the invention is simple, time-saving and inexpensive and, at the same time, enables very-large-area graphene domains to be observed with a polarizing microscope or the like. Therefore, the inventive method will be very useful in the research of graphene's properties.

Abstract: A method for determining a flatness characteristic for a facet of a polygon assembly includes a) rotating a polygon assembly with facets at a desired speed, b) directing a light beam from a light source toward the polygon assembly so light is reflected by consecutive facets during revolutions of the polygon assembly, reflected light passing through a focusing lens that directs a spot light toward a target with spaced-apart bars arranged in a grating pattern that block a portion of the reflected light and allows another portion to pass through another focusing lens that directs another spot light toward a light sensor, the light sensor detecting intensity of the spot light, and c) measuring the intensity over time during revolutions of the polygon assembly to obtain measurements for each facet. An associated test setup includes a fixture, motor controller, light source, light sensor, two focusing lens, target, and system controller.

Abstract: A system includes a displacement sensor, an actuator connected to the displacement sensor, and a feedback unit. The displacement sensor is configured to measure at least one of a relative position and a relative orientation between the displacement sensor and the target object. The feedback unit receives a signal from the displacement sensor related to the measured relative position or relative orientation and controls the actuator to move the displacement sensor on the basis of variations in the received signal arising due to a change in environmental conditions.

Abstract: A method of actuating a system comprising a movable component and an actuator configured to move the movable component comprises providing a control signal representative of a desired motion of the movable component. The control signal is supplied to one or more resonators. Each of the one or more resonators has a mode of oscillation representative of at least one elastic mode of oscillation of the system. The control signal is modified by subtracting from the control signal a signal representative of a response of the one or more resonators to the control signal. The actuator is operated in accordance with the modified control signal. Thus, undesirable elastic oscillations of the system which might occur if the system were operated with the original control system can be reduced.

Abstract: A calibration apparatus for an optical non-contact surface roughness measurement device allowing for quick, accurate, and repeatable device calibration is described. In certain embodiments, the calibration apparatus may include a base, one or more calibration surfaces coupled to a top surface of the base, and an alignment collar coupled to the top surface of the base defining a window exposing the one or more calibration surfaces. By utilizing the mechanical structure of the alignment collar and base, the optical non-contact surface roughness measurement device may be accurately aligned with respect to the calibration surfaces, allowing for repeatable calibration measurements.

Abstract: An image forming apparatus for detecting surface conditions of a recording sheet on which an image is formed, includes a light source configured to emit a first light beam and a second light beam, an image capture device configured to capture a first image of a surface of the recording sheet illuminated with the first light beam and a second image of the surface of the recording sheet illuminated with the second light beam. A first straight line including a ray in a center of the first light beam and a second straight line including a ray in a center of the second light beam intersect with each other, when each straight line is projected onto the surface of the recording sheet, and a detection device configured to detect information about the unevenness on the surface of the recording sheet based on the first image and the second image.

Abstract: A coating removal apparatus removes a coating from a surface. The apparatus has a movable scanning head and scanning optics. The scanning head is movable in one dimension, and the scanning optics adjust in two dimensions to compensate for movement of the scanning head to implement long range scanning with a uniform scanning pattern. Further, a surface roughness is determined by measuring specular and scattered reflections at various angles. For composite surfaces, the apparatus utilizes UV laser radiation and a controlled atmosphere to remove coating and alter the chemical characteristics at the surface.

Abstract: An optical collection system for use in a surface inspection system for inspecting a surface of a workpiece. The surface inspection system has an incident beam projected through a back quartersphere and toward a location on the surface of the workpiece to impinge on the surface. This forms a reflected beam that extends along a light channel axis in a front quartersphere, and forms scattered light having a haze scatter portion. The incident beam and the light channel axis form an incident plane. The optical collection system includes back collectors that are positioned in the back quartersphere for collecting the scattered light, where each of the back collectors is disposed in the back quartersphere outside the incident plane, and at a relative minimum in the Rayleigh scatter.

Abstract: A surface inspection tool 110 measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a wafer 200 with patterns and inspects the surface roughness of the wafer 200. The surface inspection tool includes a controller 250 which extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection range 406 of the surface roughness inspection in a partial layout 405a of a part of the whole layout 401 of the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range 406.

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. The system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.

Abstract: Apparatus for inspecting a semiconductor wafer (8) has a plurality of light sensors (2) arranged relative to a light source (1) and wafer inspection platform (4), so that images of different angle views of a surface of the wafer can be received and compared with corresponding images taken of a reference wafer to automatically detect defects based on image comparison. The light sensors (2) may receive superposed images of light (7) reflected directly from the light source (1) off the wafer surface and light (6) indirectly reflected off the wafer surface after first reflecting off a dome (3) with a diffusely reflecting inner surface (5) positioned over the platform (4).

Abstract: Provided is a roughness evaluating apparatus including: a generating unit configured to generate an electromagnetic wave pulse; a detecting unit configured to detect the electromagnetic wave pulse from a sample to which the electromagnetic wave pulse is irradiated; a time waveform calculating unit configured to calculate a time waveform of the electromagnetic wave pulse from the sample detected by the detecting unit; and a processing unit configured to obtain roughness information on an internal interface of the sample from the time waveform of the electromagnetic wave pulse, wherein the processing unit extracts a part corresponding to the internal interface in the time waveform of the electromagnetic wave pulse from the time waveform of the electromagnetic wave pulse to obtain the roughness information on the internal interface.

Abstract: Provided is a roughness evaluating apparatus including: a generating unit configured to generate an electromagnetic wave pulse; a detecting unit configured to detect the electromagnetic wave pulse from a sample to which the electromagnetic wave pulse is irradiated; a time waveform calculating unit configured to calculate a time waveform of the electromagnetic wave pulse from the sample detected by the detecting unit; and a processing unit configured to obtain roughness information on an internal interface of the sample from the time waveform of the electromagnetic wave pulse, wherein the processing unit extracts a part corresponding to the internal interface in the time waveform of the electromagnetic wave pulse from the time waveform of the electromagnetic wave pulse to obtain the roughness information on the internal interface.

Abstract: The invention relates to a device and method for measuring the properties of a surface. The device comprises means for producing illuminating light, which means are arranged to aim the illuminating light at the surface to be measured using at least two different wavelengths and at least two different angles, as well as means for directing the light reflected or scattered from the surface to a detector, in order to create an image of the surface to be measured. The device according to the invention further comprises at least one reference surface, the contents of which can be placed in the vicinity of the surface to be measured, in such a way that the illuminating light is also aimed at the reference surface and the light reflected or scattered from the reference surface can also be directed to the detector. The invention makes possible excellent measurement precision and repeatability, using a simple device construction with low production costs.

Abstract: A friction-coefficient estimating device is configured to estimate friction coefficient of the surface of a medium in a form of a sheet by irradiating a light on the surface and by detecting specularly-reflected light component of a reflected light and a diffusely-reflected light intensity.

Abstract: A structural color body is film-like and comprises a front surface layer disposed on a front surface side and a back surface layer disposed on a back surface side, the front surface layer and the back surface layer contain block copolymers and have micro-phase separated structures including lamellar micro domains, each of the micro domains has a wave-like shape having amplitudes in the thickness direction of the structural color body, a maximum value of distances predetermined in the micro domains of the front surface layer is larger than the wavelength in the visible light range, and distances predetermined in the micro domains of the back surface layer are equal to or less than the wavelength in the visible light range.

Abstract: A foreign substance inspection apparatus includes: an irradiation unit configured to irradiate a surface of an object to be inspected with inspection light; a detector configured to detect light scattered by the surface irradiated with the inspection light; a determination unit configured to determine, using data of a surface roughness of the object, and data of a size of the foreign substance, an irradiated region of the inspection light on the surface, that allows light scattered by the foreign substance to be discriminated from light scattered by the object due to the surface roughness of the object; and a controller configured to control the irradiation unit so as to irradiate the irradiated region determined by the determination unit with the inspection light.

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. Certain of these components, most notably the beam source subsystem, the beam scanning subsystem and the optical collection and detection subsystem are modular for ready field replacement and/or maintenance. The optical collection and detection system features wing collectors in the front quartersphere and back collectors in the back quartersphere for collected light scattered from the surface of the workpiece. This can greatly improve the measurement capabilities of the system. Also included is a method for detecting asymmetric defects using the wing collectors and back collectors.