Abstract: A method allows analyzing and describing the reflective properties of a three-dimensionally structured original surface. The topology of the original surface is determined and the topological data are stored in the form of a depth map in a first data record and evaluated with respect to the influence of the data on the reflective properties. Each surface element is assigned a reflective value in accordance with the evaluation and the value is stored in a second data record and made available to other machining or inspection systems. There, the reflection values of the second data record are divided into classes and the depth values of the first data record, assigned to the classified reflection values, are varied in accordance with the classification. Finally, the changed depth values are employed as parameters for electronically controlling a tool in order to machine the artificially produced surface.

Abstract: There is provided an optical displacement detection mechanism in which, even if a measurement object changes, a detection sensitivity and a ratio of a noise are adjustable without depending on optical characteristics such as reflectivity, or a shape and mechanical characteristics of a measurement object, an influence of a thermal deformation of the measurement object by an irradiated light to the measurement object can be made small, and a measurement accuracy can be ensured under optimum conditions.

Abstract: A device that is usable to inspect the surface of a material uses an inspection system which includes an optical unit. That optical unit can register the light which is reflected by the surface to be inspected. An illumination system, that uses at least two light sources, provides the light. The optical unit and the illumination system are connected to a control unit. The at least two light sources are arranged spaced at a distance from each other and both emit light directed to a recording region of the optical unit. The optical unit is oriented toward the surface to be inspected and at least one of the illumination light sources can be subdivided into several individual light sources. The control unit controls at least two of the illumination system light sources that are arranged at a distance from each other or the respective individual light sources of at least one of the illumination sources both selectively and independently of each other.

Abstract: A device for detecting disk asperities. The device includes an optical glide head. The glide head is not required to physically contact a disk for detection of the disk asperities. The optical glide head includes a waveguide configured to transmit light onto the disk and receive reflected light from the disk.

Abstract: A paper type determination device of the invention drives plural light emitting points different from one another and having sequentially increasing distances from a reference point to emit light in such a manner that each is identified for irradiating one surface of a sheet of paper subjected to determination. A photodetection device set at a specific detection field of view having the center at the reference point is disposed on the other surface side of the sheet of paper, and it receives light having passed through the sheet of paper from the respective light emitting points at positions on inside and outside of the detection field of view to detect intensity of light for each light emitting point. A diffusing characteristic of the sheet of paper is obtained on the basis of the intensity of light from each light emitting point detected by the photodetection device, and a paper type is determined on the basis of the diffusing characteristic.

Abstract: A method for detecting at least one value at least indirectly characterizing the properties of a surface in a material web treatment device. The method includes the steps of illuminating the surface at least at two measuring points with at least one emission source, simultaneously detecting at least one value at least indirectly characterizing a reflectivity of the surface at said each of the at least two measuring points with a detector device and evaluating the reflectivity.

Abstract: A method and system for measuring an optical property of a multi-focal lens are disclosed. One embodiment of the method comprises: filtering out light transmitted by all but one of a plurality of diffraction orders of the lens to provide an unfiltered light from a single diffraction order; receiving the unfiltered light at a wavefront detector; and analyzing the unfiltered light at the wavefront detector to measure the optical property. The multi-focal lens can be a multi-focal diffractive intra-ocular lens. The measured optical property can be a discontinuity in the lens surface. Filtering can comprise blocking all but the unfiltered light using an aperture operable to let through the unfiltered light from the single diffraction order, and/or blocking all but the unfiltered light using an opaque obstruction operable to let through only a selected amount of light corresponding to the light transmitted by the single diffraction order.

Abstract: An object of the present invention is to provide a surface inspection tool in which a flat inspection range capable of measuring surface roughness of a wafer with patterns with high accuracy and in a nondestructive manner can be searched without visual search. In order to solve the object, in a surface inspection tool 110 which measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a wafer 200 with patterns and inspects the surface roughness of the wafer 200, the surface inspection tool includes a controller 250 which extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection range 406 of the surface roughness inspection in a partial layout 405a of a part of the whole layout 401 of the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range 406.

Abstract: A hard-coated antiglare film that has an extremely low haze value, superior anti-fluorescent lamp glare properties, and anti-face glare properties, and can improve the depth of black in black display by preventing white blur from occurring, a polarizing plate, and the like. The hard-coated antiglare film includes: a transparent plastic film substrate; and a hard-coating antiglare layer containing fine particles, which is on at least one surface of the transparent plastic film substrate, and has a total haze value in a range of 0% to 5%. The number Ntotal of convexities that exceed a first standard line that is parallel with a roughness mean line of a surface roughness profile and is located at a height of 0.1 ?m is at least 15 in a 4-mm long portion at an arbitrary location of the surface of the hard-coating antiglare layer.

Abstract: A hard-coated antiglare film that has superior antiglare properties, allow high definition to be provided even in the case of a low haze value, can prevent white blur in an oblique direction from occurring and, and can improve the depth of black in black display, as well as a polarizing plate, and the like. The hard-coated antiglare film includes a transparent plastic film substrate and a hard-coating antiglare layer containing fine particles, which is on at least one surface of the transparent plastic film substrate. The hard-coated antiglare film has a total haze value Ht in the range of 10% to 35%. The total haze value Ht and an internal haze value Hin satisfy a relationship of 0.5?Hin/Ht?0.9. The surface of the hard-coating antiglare layer has an uneven shape and an arithmetic average surface roughness Ra in the range of 0.1 to 0.3 ?m.

Abstract: The invention provides an electrode comprising an electrically conductive material having a surface capable of producing surface enhanced Raman scattering of incident light from a complex adsorbed at the surface of the electrode, the complex including the electrically conductive material combined with a second material that is substantially reducible and not substantially oxidizable. The surface of the electrode can be microroughened. The invention also includes a method for making various embodiments of the electrode, and a method of generating electricity using the electrode. In accordance with a further aspect of the invention, a fuel cell is provided including the electrode of the invention.

Abstract: The invention is directed to a method for illuminating an object and projecting its image on a ground glass screen. Optical comparators conventionally use incandescent illumination, either mercury arc or halogen. The use of an array of high intensity LED devices, provides many options for packaging the required optical components used in comparators.

Abstract: An automatic scan and mark apparatus has a machine tool, a location detection module, a laser detector, an ink jet and a control computer. The machine tool has a movable module and a stage. The stage mounts and holds a specimen having a scraped surface. The control computer controls the location detection module to determine a position of the movable module, controls the laser detector to detect a surface morphology of the scraped surface in a measurement range, and activates the ink jet to eject inks on high points of the scraped surface of the specimen. Thus, the surface morphology is built automatically and high points are screened out and marked by colored ink. Manufacturer may easily redo scraping of determined high points based on the marked location on the specimen without burdensome measurement.

Abstract: A test structure is presented test structure on a substrate for monitoring a LER and/or LWR effect, said test structure comprising an array of features manufactured with amplified LER and/or LWR effect.

Abstract: Included are an illumination lamp (2) for illuminating a color filter edge (23) at a predetermined angle of incidence, a sensor (3) for taking at least two images by imaging light reflected at a predetermined angle different from the angle of incidence, an image processing section (9) for calculating a difference in luminance within a color filter in accordance with the images thus taken, and a defect determination section (13) for determining the existence of unevenness in the color filter from the difference in luminance. Provided thereby are a color filter inspection method and a color filter inspection apparatus, each for early discovering unevenness through macroscopic observation of the whole color filter by illuminating the color filter edge and by taking reflected light that is not specular reflected light, the unevenness occurring in a drying step, the color filter edge containing a boundary between a pixel and a black matrix.

Abstract: An object of the present invention is to provide a surface inspection tool in which a flat inspection range capable of measuring surface roughness of a wafer with patterns with high accuracy and in a nondestructive manner can be searched without visual search. In order to solve the object, in a surface inspection tool 110 which measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a wafer 200 with patterns and inspects the surface roughness of the wafer 200, the surface inspection tool includes a controller 250 which extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection range 406 of the surface roughness inspection in a partial layout 405a of a part of the whole layout 401 of the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range 406.

Abstract: Intra-field distortion for a projection imaging tool is determined using a self-referenced rectangular grid reticle pattern, that includes at least two arrays of alignment attributes that are complementary to each other, is exposed multiple times onto a substrate with a recording media. A reference reticle pattern is exposed onto the substrate, wherein the reference reticle pattern overlaps the grid alignment attributes thereby creating completed grid alignment attributes. Positional offsets of the completed alignment attributes and completed grid alignment attributes are measured and an intra-field distortion from the offsets is determined.

Abstract: A microscopic-measurement apparatus capable of conducting measurement successively in several set areas regardless of the type of stage driving system or the precision of the stage driving system.

Abstract: A method is provided for detecting not fully set coatings and liquid or smearing impurities on a surface, in which in a first step a film is pressed onto a surface of a coating using a predefined press-on pressure, the film having a relative motion with respect to the surface of the coating, thereafter the film is pulled off the surface of the coating and finally it is determined whether impurities are adhering to the film. A device is also provided for performing the method, including at least one film, which may be pressed against a surface to be tested, at least one press-on roller having a surface by which the film is pressed against the coating, and at least one device for determining whether there are impurities adhering to the film.

Abstract: A system for estimating the specular roughness of points on a surface of an object may include a lighting system, an image capture system and a computer processing system. The lighting system may be configured to illuminate the surface of the object at different times with different illumination patterns. Each illumination pattern may illuminate the surface from a plurality of different directions and form an intensity gradient having an order of no more than two. The image capture system may be configured to capture an image of the surface of the object when illuminated by each of the different illumination patterns at each of the different times. The computer processing system may be configured to compute the specular roughness of each point on the surface of the object based on the images captured by the image capture system.

Abstract: A structure, decomposable into at least one elementary structure or base element, is illuminated and then provides an optical response, at least one geometrical parameter of the base element is determined, and a value is attributed to it, a regression algorithm is implemented which determines modified values of the parameter(s), in order to make the difference between the theoretical response of the base element and the acquired result at most equal to a threshold, and to obtain an image of the structure, and as long as the separation between the acquired and theoretical responses is not satisfactory, new subdivisions of the base element(s) are performed.

Abstract: Evaluating irregularities in surfaces of objects such as semiconductor wafers using a thickness profile of a surface section and analyzing the profile to obtain information of an irregularity start position, magnitude, and span along with surface slope and height information.

Abstract: A sensor is provided that measures web caliper using optical and magnetic measuring devices. The optical measuring devices may employ a confocal chromatic aberration method to accurately determine the distance to the moving web and the magnetic devices may be ferrite core coil and target. Means of stabilizing a moving web are included for improving dynamic measurement accuracy.

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable scan speed beam scanning subsystem, preferably using an acousto-optic deflector, with beam compensation, so that variable scanning speeds can be achieved. Also included are methods and systems for improving the signal to noise ratio by use of scatter reducing complements, and a system and method for selectively and repeatedly scanning a region of interest on the surface in order to provide additional observations of the region of interest.

Abstract: A position detecting device, including: a movable section which has an axial section and moves in a direction of an axial line of the axial section; and a supporting section which supports the movable section and allows the movable section to move through the axial section; wherein the movable section includes a basic position section which is arranged on a virtual surface which includes the axial line of the axial section, and the virtual surface is vertically positioned on the supporting section toward the axial section, wherein the supporting section includes a position detecting section to detect a positional change of the basic position section; and wherein the position detecting device detects the position of the movable section relative to the supporting section, based on the change of position of the basic position section, detected by the position detecting section.

Abstract: A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features back collectors disposed in the back quartersphere, outside the incident plane, for collecting light scattered from the surface of the workpiece. The back collectors are disposed at a relative minimum in the portion of scattered light attributable to haze relative to the portion of scattered light attributable to defect scatter portion, or, alternatively, at a relative minimum in the Rayleigh scatter.

Abstract: This is an optical three-dimensional measurement device provided with observation illumination light for illuminating an observation specimen, an object lens for collecting the observation light on the observation specimen and a display unit for displaying an observation image and its measurement result that are obtained via the object lens. The optical three-dimensional measurement device comprises a filter process determination unit for determining a first filter process on the basis of observation conditions used when taking in a three-dimensional image of the observation specimen and a filter process unit for applying the first filter process determined by the filter process determination unit to the measurement image or the measurement result.

Abstract: Methods and apparatus for determining an object's three-dimensional location (i.e. real world coordinates) using the audio-video infrastructure of a 3G cellular phone or a 3C (Computer, Communications, Consumer) electronic device. A first detection device (e.g. a camera) is used to capture images of the objects. The captured image data is used to compute location data of the object in a first two-dimensional plane. A second detection device (e.g. microphone or infrared detector) may be used to collect additional location data in a second plane, which when combined with image data from the captured images allows the determination of the real world coordinates (x, y, z) of the object. The real-world coordinate data may be used in various applications. If the size of an object of interest is known or can be calculated, and the size of the projected image does not vary due to rotation of the object, a single camera (e.g.

Abstract: An optical method and apparatus are described for the measurement of properties of a travel vehicle or a travel surface upon which the travel vehicle travels, which includes providing an incident light from a light source to the travel surface, collecting light reflected from the travel surface, determining a surface induced Doppler shift from the incident and collected light and determining at least one of a motion property of the travel vehicle and a surface property of the travel surface based on the determined surface induced Doppler shift.

Abstract: An optical method and system for measuring characteristics of a sample using a broadband metrology tool in a purge gas flow environment are disclosed. In the method a beam path for the metrology tool is purged with purge gas at a first flow rate. A surface of the sample is illuminated by a beam of source radiation having at least one wavelength component in a vacuum ultraviolet (VUV) range and/or at least one wavelength component in an ultraviolet-visible (UV-Vis) range. A flow rate of a purge gas is adjusted between the first flow rate for metrology measurements made when the source radiation is in the VUV spectral region and a second flow rate for metrology measurements made when the source radiation is in the UV-Vis spectral region. The system includes a light source, illumination optics, collection optics, detector, a purge gas source and a controller.

Abstract: A roughness evaluation method for evaluating a roughness of lines formed on a substrate includes a measuring step of irradiating light onto a plurality of locations of the substrate and measuring a state of reflected light by a scatterometry; and an analyzing step of evaluating the roughness of the lines based on a variation in value measured in the measuring step. A roughness evaluation system includes an optical device for irradiating light onto the substrate and measuring a state of reflected light by a scatterometry; a moving device for moving the substrate in at least one of an x-direction and a y-directions on a horizontal plane; a controller for controlling the moving device such that the optical device measures a plurality of locations on the substrate; and an analysis unit for evaluating the roughness based on a variation in measured values at the plurality of locations on the substrate.

Abstract: A method and a device for determining a topography under load of the surface of a material, wherein a test piece (40) of the material intended to be determined is subjected to a compression with a determined load between a first and a second clamping surface (7, 27), after which, in a compressed state, at least one representation is made of surface portions of the material that are in contact with at least one of said clamping surfaces (7, 27), and that the representation is evaluated. The compression is controlled in respect of its speed for obtaining said predetermined load, and said at least one representation is made at a chosen point in time or chosen points in time during this process.

Abstract: An enhanced detection system can eliminate use of a sheath fluid by selecting which particles that pass through an sensing region to detect parametric characteristics thereof based upon position of each particle while it is in a sensing region relative to one or more predetermined positions, such as an in-focus position relative to one or more light beams directed into the sensing region, to enhance accuracy and robustness of particle parametric characteristics detection.

Abstract: A system and a method are provided for detecting a surface characteristic of a surface. A plurality of transponders are located on the surface for transmitting electromagnetic surface waves and for receiving the electromagnetic surface waves upon being reflected, diffracted, refracted, scattered, or otherwise altered by ice on the surface. A controller is coupled to the plurality of transponders. The controller is adapted to coordinate the plurality of transponders for imaging the surface characteristic of the surface.

Abstract: Before applying a processing laser beam to a surface of a substrate through a film of liquid, distance M2 between a reference point on an axis of a first laser displacement meter and the surface of the substrate is measured to correct distance M1 between a lower end of an optical unit and the surface of the substrate, on the basis of distance M2, the processing laser beam is applied to the surface of the substrate, thereby cutting and removing a part of the surface of the substrate, and a depth to which the surface of the substrate has been cut and removed with the processing laser beam is measured by a second laser displacement meter.

Abstract: The invention provides an electrode comprising an electrically conductive material having a surface capable of producing surface enhanced Raman scattering of incident light from an adsorbate material adsorbed on the surface of the electrode. The adsorbate is substantially reducible and not substantially oxidizable. The surface of the electrode can be microroughened and include, for example, a plurality of adatoms or clusters of adatoms of a metallic material. The adatoms or clusters of adatoms form sites for photocatalysis of electroreduction when the electrode is irradiated with a light source. The invention also includes a method for making the electrode, and a method of generating electricity using the electrode. In accordance with a further aspect of the invention, a fuel cell is provided including the electrode of the invention.

Abstract: A method and apparatus for assessing a height of a specimen includes an electron beam unit having an electron beam source, lenses, a table for setting a specimen and controllable in a height direction, and a detector, and a height detection system for detecting height of the specimen set on the table while the specimen is irradiated by an electron beam. The height detection system further includes an illumination system, a collection system, first and second detectors, a device configured to receive output signals from the first and second detectors while the specimen is irradiated by the electron beam and to generate a comparison signal from the output signals, wherein the comparison signal is responsive to the height of the specimen.

Abstract: The invention provides an electrode comprising an electrically conductive material having a surface capable of producing surface enhanced Raman scattering of incident light from a complex adsorbed at the surface of the electrode, the complex including the electrically conductive material combined with a second material that is substantially reducible and not substantially oxidizable. The surface of the electrode can be microroughened. The invention also includes a method for making various embodiments of the electrode, and a method of generating electricity using the electrode. In accordance with a further aspect of the invention, a fuel cell is provided including the electrode of the invention.

Abstract: A device for examining the optical properties of surfaces includes at least one first radiation device emitting radiation to a surface to be examined at least at a first predetermined spatial angle, at least one first detector for capturing the radiation emitted to and reflected back from the surface, wherein the detector, allowing a local resolution of detected radiation, is positioned at least at a second predetermined spatial angle relative to the surface. At least one spatial angle at which the radiation device and/or the detector are positioned, is variable and the radiation device and the detector are positioned in a space at least part of which exhibits light-reflecting properties.

Abstract: The present invention provides for test surfaces and methods for calibration of surface profilometers, including interferometric and atomic force microscopes. Calibration is performed using a specially designed test surface, or the Binary Pseudo-random (BPR) grating (array). Utilizing the BPR grating (array) to measure the power spectral density (PSD) spectrum, the profilometer is calibrated by determining the instrumental modulation transfer function (IMTF).

Abstract: A method for detecting specular surface flaws on a coated substrate includes impinging visible non-integrated electromagnetic radiation from a first source onto the coated substrate, reflecting the visible non-integrated electromagnetic radiation off the coated substrate into a first photosensitive device, forming a recorded high frequency surface flaw image, and impinging visible coherent electromagnetic radiation from a second source onto a coated substrate at an oblique angle. The visible non-integrated electromagnetic radiation and the visible coherent electromagnetic radiation on the coated substrate are collocated but not combined on the substrate. The visible coherent electromagnetic radiation is reflected off the coated substrate onto a screen material to form a low frequency surface flaw image. The low frequency surface flaw image is recorded to form a recorded low frequency surface flaw image.

Abstract: In one embodiment, a surface analyzer system comprises a radiation targeting assembly to target a radiation beam onto a surface; and a scattered radiation collecting assembly that collects radiation scattered from the surface. The radiation targeting assembly generates primary and secondary beams. Data collected from the reflections of the primary and secondary beams may be used in a dynamic range extension routine, alone or in combination with a power attenuation routine.

Abstract: A device for determining properties of surfaces having at least one first radiation device having at least one radiation source emitting radiation, having at least one first radiation detector having a first radiation detector element which captures at least a portion of the radiation emitted from the radiation device and subsequently diffused and/or reflected off a measuring surface and emits at least one measuring signal characteristic of the reflected/diffused radiation, and at least one second radiation detector having a second radiation detector element capturing a portion of the radiation from the radiation device and diffused/reflected off a measuring surface and outputs a measuring signal characteristic of the reflected and/or diffused radiation, and at least one filter device which is placeable both in the optical path between the radiation device and the first radiation detector and in the optical path between the radiation device and the second radiation detector.

Abstract: An apparatus for measuring surface properties of a carriageway or road, comprising a platform arranged to move over the carriageway, the platform carrying a light source arranged to illuminate the carriageway, and a detector arranged to receive light returning from the carriageway, characterised in that the light source projects a line of light onto the surface and data representing light returning from the line of light is captured and stored.

Abstract: Disclosed is an apparatus for determining surface properties, comprising at least a first radiation device which emits radiation onto a surface to be analysed, at least a first radiation detector device which receives at least part of the radiation emitted by the at least one radiation device and then scattered or reflected by the surface and outputs at least a first measurement signal which is characteristic of the reflected or scattered radiation, and at least a second radiation detector device which receives at least part of the radiation emitted by the at least one radiation device and then scattered or reflected by a surface and outputs at least a second measurement signal which is characteristic of the reflected or scattered radiation.

Abstract: A method comprises generating a data set comprising first surface roughness data from a first orientation and second surface roughness data from a second orientation and determining a roughness bias parameter from the first surface roughness data and the second surface roughness data.

Abstract: A method for characterizing surfaces wherein a first and a second quantity characteristic of roughness of the surface are determined, a first derived quantity is determined by applying mathematical operations to at least said first characteristic quantity and a second derived quantity is determined by applying mathematical operations to at least said second characteristic quantity; wherein an interrelationship between the first and the second derived quantity will be formed which at least partially specifies at least the optical properties of the surface. Finally, the first and the second derived quantities are represented in a common reference frame.

Abstract: A device for examining the optical properties of surfaces includes at least one first radiation device which emits radiation to a surface to be examined at a first predetermined spatial angle, at least one first detector device for capturing the radiation emitted to and reflected back from the surface wherein the first detector device, allowing a local resolution of detected radiation, is positioned at least at a second predetermined spatial angle relative to the surface, and at least one further radiation device or second detector device emitting radiation to the surface to be examined at a third predetermined spatial angle or detecting radiation emitted to and reflected back from the surface.

Abstract: To inspect a substrate such as a semiconductor substrate for surface roughness at high precision. The surface roughness of the substrate is measured in each frequency band of the surface roughness by applying a light to the substrate surface and detecting a scattered light or reflected light at a plurality of azimuth or elevation angles.

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.