Abstract: The present invention is a measurement method of three-dimensional profiles and a reconstruction system thereof using subpixel localization with color gratings and picture-in-picture switching on a single display, wherein the measurement method includes: 1. Preparation step; 2. Projection step; 3. Image extraction step; 4. Image fine-tuning step; 5. Image processing step; and 6. Reconstruction step. The system includes: a projection apparatus, emitting a grating towards a workpiece under measurement, and forming a grating image on the workpiece under measurement, the contrast values of the plurality of grating stripes of the grating image being identical; a central processing unit, using the grating image and picture-in-picture of a display thereof to fine tune and reconstruct three-dimensional profiles of the workpiece under measurement. Thereby, the grating stripes have equal contrast for easier identification; the display has switchable picture-in-picture; and an adjustment module can adjust the grating.

Abstract: Aberration marks, which may be used in conjunction with lenses in optical photolithography systems, may assist in estimating overlay errors and optical aberrations. Aberration marks may include an inner polygon pattern and an outer polygon pattern, wherein each of the inner and outer polygon patterns include a center, and two sets of lines and spaces having a different feature size and pitch that surround the outer polygon pattern. In some embodiments, the marks can be used with scatterometry or scanning electron microscope devices.

Abstract: The device enables strains of at least one surface (1) of a sample (2) to be measured versus temperature. Strains in a direction perpendicular to a predetermined plane, for example the plane of the surface (1), are measured by composite images. Strains in said plane are measured by image correlation. The measurements by image correlation and by composite images use a common visible light detection camera (3). The sample (2) is arranged in an enclosure (6) transparent at least locally to visible light (L). At least one infrared emitter (9) enables an infrared light to be created in a spectral band for a large part not detected by the camera (3).

Abstract: An operation of projecting slit light onto an object to be measured and receiving light reflected thereon, and an operation of acquiring a two-dimensional image concerning the object to be measured are repeated a certain number of times by changing a focal length. An imaging contrast is calculated with respect to each of areas on the two-dimensional images acquired at the different focal lengths. A high contrast area where the imaging contrast exceeds a predetermined threshold value is extracted with respect to each of the two-dimensional images acquired at the different focal lengths. Distance information concerning the respective areas is acquired by performing triangulation with respect to each of the high contrast areas. Position adjustment of measurement dimensions is performed in such a manner that the areas are included in the measurement dimensions having the predetermined measurement depth, based on the distance information.

Abstract: The top-view profiles of repeating structures in a wafer are characterized and parameters to represent variations in the top-view profile of the repeating structures are selected. An optical metrology model is developed that includes the selected top-view profile parameters of the repeating structures. The optimized optical metrology model is used to generate simulated diffraction signals that are compared to measured diffraction signals.

Abstract: In order to determine three-dimensional coordinates of a surface (2) of an object (3) to be detected, the changes in color of a color pattern (5), which is projected by a projector (4) onto the surface (2), are to be encoded by using a redundant code. An analyzing method, which analyzes the changes in color occurring in an image (7) recorded by a camera (6), is insensitive to changes on the surface (2). In addition, the contour of the object (3) can be determined with a single recording. The method is thereby also suited for moving objects.

Abstract: A method and a microscopy imaging apparatus for generating an optically sectioned image of a specimen are provided. The method comprises the steps of: illuminating the specimen with a modulating, spatially periodic illumination pattern; imaging said specimen on a conjugate image plane; acquiring a plurality of signals at respective positions on said image plane, each signal corresponding to the incident light intensity at that position and having an oscillatory component caused by the modulation of the illumination pattern; and measuring a characteristic of the oscillatory component of each of the signals, whereby the measured characteristics when combined in their relative positions generate an optically sectioned image of the specimen.

Abstract: Embodiments of the invention provide a non-contact method for measuring the surface profile of an object that can include generating a point-type optical signal and projecting it on a rotatable precision optical grating, generating a rotating pattern of light and dark lines onto the object, recording a series of images of the rotating pattern moving across the object with an image receiving device and calculating the surface profile of the object. Other embodiments can include a method to calibrate the system and a non-contact apparatus that generally includes a point-type light source, a rotatably mounted optical grating being configured to project a moving grating image on the object, a processor in communication with the image capturing device and configured to receive image input from the image capturing device and generate a surface profile representation of the object therefrom.

Abstract: In a three-dimensional shape detecting system comprising a three-dimensional shape detecting device and an external calculating device, the three-dimensional shape detecting device includes: projection means which projects pattern light onto a subject; image data obtaining means which captures a pattern light projection image of the subject and thereby obtains image data of the pattern light projection image while capturing a pattern light non-projection image of the subject and thereby obtaining image data of the pattern light non-projection image; pattern light position extraction means which extracts a position of the pattern light projected on the subject based on the obtained image data; and three-dimensional shape calculation means which figures out three-dimensional shape data of the subject based on the position of the pattern light extracted by the pattern light position extraction means.

Abstract: A method for generating a mask for use with a light measurement system that includes a light source for projecting light onto a surface of an object, and an imaging system for receiving light reflected from the surface of the object. The method includes determining a profile of the object to be inspected, and generating a mask based on the determined profile, wherein the mask includes an opening extending therethrough that has a profile that substantially matches a profile of the object as viewed from the light source.

Abstract: Systems for acquiring an approximation of the surface geometry of a 3-dimensional object include a self-powered wireless, non-contact optical scanner, the location and orientation of which may be tracked with respect to an object coordinate system, and a processor configured for projecting a pattern of structured light on the object, moving the pattern with respect to the object, acquiring images of the intersection of the light on the object over time, determining local coordinates of points on the intersection with respect to the pattern, tracking the position of the pattern, transforming the local coordinates to object coordinates, and accumulating the points as a model of the surface of the object. The systems may wirelessly and possibly compactly transmit geometrical data which characterizes an intersection for a given position of the scanner with respect to the object.

Abstract: The invention relates to a method and a device for optically measuring the surface shape and for the optical surface inspection of moving elongated bodies, according to which surface shape measurement and surface inspection are integrated. A projector applies a line pattern to the object to be measured. A camera registers the surface of the object to be measured and compares the image information with a reference pattern. Two high-resolution cameras additionally detect surface defects on the object to be measured. The inventive measuring technique is especially suitable for a combined planarity and surface measurement of metal strips in rolling installations.

Abstract: A non-contact three-dimensional surface measurement method is provided in which a grating pattern projected onto an object being measured, while the phase of the pattern is being shifted, is observed in a different direction from a projection direction to analyze the contrast of a grating image deformed in accordance with the shape of the object and thereby obtain the shape thereof. The method enables measurement of a three-dimensional shape over a large measurement range in a short time in a non-contact manner by successively shifting the focus on the projection and the imaging sides to enlarge the measurement range in the direction of depth.

Abstract: A three dimensional (3D) image capture system uses structured light technique. The 3D image capture system includes a first texture camera for capturing a textural image of a 3D object and a second geometry camera for capturing a geometric image of a 3D object while a structured light pattern is projected onto the 3D object. A pattern flash unit is used for projecting the structured light pattern onto the 3D object. The textural image is stored in a texture image file; and the geometric image is stored in a geometric image file. The geometric image file is processed to determine 3D coordinates and stored in a geometric image data file; and then the texture image file is processed to create texture data that is overlaid onto the 3D coordinates in the geometric image data file to produce a composite image.

Abstract: An optical 3D digitizer with an enlarged non-ambiguity zone, comprising a structured light projector for projecting a fringe pattern over a target area, the fringe pattern having a shiftable position over the target area is disclosed. First and second cameras having overlapping measurement fields are directed toward the target area and positioned with respect to the projector to define distinct triangulation planes therewith. The second camera has a larger non-ambiguity depth than the first camera.

Abstract: There is provided an apparatus and method for three-dimensional measurements by shining an object to be measured with plural laser beams while scanning. Even if the optical intensity of laser beams is weak, light disturbance is accurately separated to perform real-time three-dimensional measurement. A laser beam emitted from a laser source is separated into the plural beams of slit light with a predetermined angle at a hologram plate. These two beams are used for scanning and irradiating the object by a scanning mirror. These beams are reflected and read to determine whether or not an interval between these beams corresponds to the predetermined angle.

Abstract: For measuring the three-dimensional shape of an object of measurement using a phase shift method, a three-dimensional shortening the measurement time. A printed state inspection device 1 includes a printed circuit board K printed with cream solder H, an illumination device 3 for illuminating three sine wave light component patterns with different phases on the surface of printed circuit board K, and a CCD camera 4 for picking-up images of the illuminated part of the printed circuit board K. A control device 7 creates a chart representing a relationship between brightness and coordinates for each light component from the image data obtained by the illumination of the light component patterns and determines relative phase angles among the light component patterns, and calculates the height of the cream solder H from the image data and the relative phase angles.

Abstract: Apparatus and methods of measuring three-dimensional position information of a onto a surface of an object including two sources of radiation separated by a distance, each source having a spectral distribution, and being coherent with respect to the other of the sources, a control system moving each of the sources relative to the other of the sources, and a detector positioned to receive radiation scattered from the point on the surface of the object. In another embodiment, the two sources of radiation include, an initial source of a beam of radiation having a spectral width, a beam separator in optical communication with the initial source of a beam of radiation generating a first optical beam and a second optical beam, and an imaging system optically connected to the beam separator.

Abstract: An apparatus for mounting semiconductor chips onto a substrate contains a measuring station for the contactless measurement of the height of the surface of the mounted semiconductor chip facing away from the substrate at a minimum of three locations. From this, at least one parameter is calculated that characterises the adhesive layer formed between the semiconductor chip and the substrate. A difference of the measured value to a set value is used to adjust the mounting process. An apparatus for wiring semiconductor chips also contains such a measuring station in order to determine the individual height of each connection point on the semiconductor chip. This information is used in order to lower the capillary to the respective connection point on the semiconductor chip in the shortest possible time.

Abstract: Methods, systems, and computer program products for imperceptibly embedding structured light patterns in projected color images for display on planar and non-planar surfaces are disclosed. According to one method, an image exposure period for detecting an embedded structured light patterns in a projected image is selected based on analysis of pixel polarities for different pixel intensities of a pixel color. Pixel intensities for the color are varied in the user image so that pixel polarities encode the structured light patterns during image exposure period. The user image is projected with the structured light patterns onto the surface. Depth information is continuously acquired and used to adjust display of the user image.

Abstract: A method and system for detecting the presence of an object or the distance between the system and an object supports the provision of rapid and reliable obstacle detection. A transmitter emits generally linear beams of electromagnetic radiation with a transmitted radiation pattern within a defined spatial zone. A camera collects an image of the defined spatial zone. A data processor detects a presence of an object in the collected image based on an observed illumination radiation pattern on an object formed by at least one of the generally linear beams. A distance estimator estimates a distance between the object and the optical device based on a change (e.g., an observed shift in one or more positions of generally linear beams) from the transmitted radiation pattern to the observed illumination radiation pattern.

Abstract: A three-dimensional inspection system and method is used to obtain information about three-dimensional articles with specular surfaces having a shape and positive or negative height by projecting a pattern of light onto the articles at an oblique angle. The system includes a patterned light projector with optical axis disposed at an oblique angle with respect to the plane of the article being inspected, an extended light source, and an image detector disposed above the article to detect the image of the pattern on the article. The light pattern includes lines with a substantially equal thickness and spacing. The spacing of the lines is greater than a spacing or pitch of the specular elements. An image processor, coupled to the image detector, receives the image, locates the lines, and measures the lateral shift of the lines. Height information is determined from the lateral shift and projection angle using triangulation.

Abstract: Methods and apparatus for introducing a plurality of optical markers to a field of view, capturing a two-dimensional image of said field of view on an image plate comprising a pixel array, determining a set of marker origin offset values and using said offset values to establish a set of orientation values describing the relationship between the field of view and the image plate are disclosed. These orientation values are used to relate the area of image captured by each pixel in the image plate to the real world. By applying projective geometry, vector analysis and trigonometrical surveys an image analysis is conducted to establish a three-dimensional positional data set describing the three-dimensional position of regions of reflectivity in the captured two-dimensional image. From this data set a three-dimensional model of the field of view can be reconstructed.

Abstract: Embodiments of the invention provide a non-contact method for measuring the surface profile of an object that can include generating a point-type optical signal and projecting it on a rotatable precision optical grating, generating a rotating pattern of light and dark lines onto the object, recording a series of images of the rotating pattern moving across the object with an image receiving device and calculating the surface profile of the object. Other embodiments can include a method to calibrate the system and a non-contact apparatus that generally includes a point-type light source, a rotatably mounted optical grating being configured to project a moving grating image on the object, a processor in communication with the image capturing device and configured to receive image input from the image capturing device and generate a surface profile representation of the object therefrom.

Abstract: A lattice pattern projector for measuring a three-dimensional shape with enhanced accuracy while shortening the measuring time using a lattice pattern projection method, characterized by comprising a light source section (101), a liquid crystal lattice (111), a section (102) for projecting a lattice pattern, formed by passing the outgoing light from the light source section through the liquid crystal lattice, to an object for measurement, a section (112) for driving the liquid crystal lattice such that a linear intensity distribution is present in one period of the lattice pattern, a section (104) for detecting the lattice pattern projected to the object for measurement and deformed, and an operating section (114) for converting the linear intensity distribution in each period of the deformed lattice pattern into a linear phase distribution having a phase varying linearly.

Abstract: A moving distance of a moiré grating in y direction is set with respect to a grating pitch of a moiré grating, whereas an imaging magnification of imaging means is set according to the relationship between the pixel pitch of an image pickup device in the imaging means and the size of grating pitch when forming an image on the image pickup device. An image of moiré fringes is captured each time when the moiré grating is moved by a predetermined distance in the y direction, so as to yield a predetermined number of y-direction positional moiré fringe images, which are then averaged. According to thus obtained average moiré fringe image, shape information of a surface to be inspected is determined.

Abstract: In order to reproduce a three-dimensional shape of an object accurately while maintaining measuring accuracy and high speed, in a three-dimensional measuring method of projecting a stripe pattern having colored stripes on the object and measuring the three-dimensional shape of the object based on stripe positions on the imaged image corresponding to the stripes on the stripe pattern, colors of the stripes on the stripe pattern are set according to a predetermined rule, and a plurality of stripes having a predetermined positional relationship are extracted from the image, and correspondence with stripes on the stripe pattern based on the color arrangement of the extracted plural stripes.

Abstract: A method and arrangement are disclosed for increasing the depth contrast in microscope imaging. The method and implementation described can be designated as structured illumination for generating quasi-confocal optical sections. In implementing the method, a grating structure located in the field diaphragm plane of a microscope, the object plane and the TV intermediate image plane of a microscope are arranged confocally. The term “confocally” refers to the fact that the grating, object and the intermediate image plane are positioned on optically conjugate planes. By this arrangement, the grating structure is projected in the object plane of the microscope and the object which is structured in this way is imaged in the TV intermediate image plane of the microscope by the optical system following it. Optical sections are generated by calculating the modulation depth of the structured object.

Abstract: A process for measuring alignment of latent images in a photoresist layer of an integrated circuit structure on a semiconductor substrate with a test pattern formed in a lower layer on the substrate comprises the steps of forming a test pattern in selected fields of a first layer on a semiconductor substrate, forming a layer of photoresist over the first layer, forming latent images in portions of the photoresist layer lying in the selected fields overlying the test pattern of the first layer; and measuring the alignment of the test pattern in the selected fields of the first layer with the overlying latent images in the photoresist layer using scatterometry.

Abstract: The present invention provides a wheel measurement method and system to measure an attribute of a wheel. Light illumination devices and light sensing devices provide wheel data. A computer then performs a calculation on the wheel data to measure the attribute of the wheel.

Abstract: The present invention provides a Fast Moiré Interferometry (FMI) method and system for measuring the dimensions of a 3D object using only two images thereof. The method and the system perform the height mapping of the object or the height mapping of a portion of the object. The present invention can be used to assess the quality of the surface of an object that is under inspection. It can also be used to evaluate the volume of the object under inspection.

Abstract: A three-dimensional shape measuring method by which measurement of a three-dimensional shape is realized with an improved precision. Grid patterns comprising a plurality of one-dimensional grids 1, 2 and 3, each having a period and direction different from those of the others, are simultaneously projected upon objects to be measured, using different colors for each of the one-dimensional grids 1, 2 and 3. Subsequently, a grid image deformed in accordance with the three-dimensional shapes of the objects to be measured is imaged, the grid image is separated by colors into one-dimensional grid components of each color, a phase for each of the one-dimensional grid components is detected, and then, measurement values of the three-dimensional shapes are obtained on the basis of the detected phases. At the same time, by imaging the objects to be measured by use of white light, color information on the objects to be measured are measured as well.

Abstract: A method and apparatus for assessing surface irregularities comprising directing a line beam at the surface, imaging the line on the surface formed by the line beam, and analysing data of the image to produce an objective indication of the degree of regularity of the surface.

Abstract: A process is disclosed for determining surface information by a projected structure with periodically changing brightness curve which is shifted by 1/n, n=whole number greater than two, of the grating constant, and the projection image is acquired of a CCD camera, and information is determined for every image point, which information represents the brightfield intensity multiplied by the respective grating phase, the sine components and cosine components are extracted from these images and gives: I. Ixy=Iobxy*m*sin x II.

Abstract: A method of obtaining a spectrum in a Fourier transformation infrared spectrophotometer includes the following steps: sampling a set of data while a movable mirror of the Fourier transformation infrared spectrophotometer performs a reciprocal movement, wherein the set of data constitutes an interferogram; judging whether the interferogram is reliable or not by comparing the shape of the interferogram with a shape of another interferogram or shapes of other interferograms obtained through neighboring measurement of measurements; accumulating the data of interferograms that are judged to be reliable; and constituting an absorption spectrum using a Fourier transformation method based on the accumulated data. Since unreliable data are adequately avoided from the data accumulation, the reliability of the accumulated data is assured, and an accurate absorption spectrum can be obtained.

Abstract: A lattice pattern projector for measuring a three-dimensional shape with enhanced accuracy while shortening the measuring time using a lattice pattern projection method, characterized by comprising a light source section (101), a liquid crystal lattice (111), a section (102) for projecting a lattice pattern, formed by passing the outgoing light from the light source section through the liquid crystal lattice, to an object for measurement, a section (112) for driving the liquid crystal lattice such that a linear intensity distribution is present in one period of the lattice pattern, a section (104) for detecting the lattice pattern projected to the object for measurement and deformed, and an operating section (114) for converting the linear intensity distribution in each period of the deformed lattice pattern into a linear phase distribution having a phase varying linearly.

Abstract: A three-dimensional shape measuring method and a three-dimensional shape measuring apparatus of excellent measurement accuracy. An optical system comprises a light source, a pattern forming unit which is disposed on the optical axis of the light source to form slit light from the light from the light source, and a projection lens to collect the slit light on the object for measurement. An asymmetric diaphragm having an aperture in which the size in the direction perpendicular to the slit direction is smaller than the size in the slit direction is provided in order to stop the slit light. An image pickup optical system is provided to measure the three-dimensional shape of the object for measurement on the basis of the slit light reflected from the object for measurement.

Abstract: A contour measurement system determines three dimensional surface information of an object using a projection moiré technique to obtain a single fringe pattern that is analyzed using a phase-shift image processing method. A grating is projected onto the object and the reflected fringe pattern is recorded by a camera and stored digitally as an array of pixels. An estimated fringe spacing is then determined for each pixel. Using the estimated fringe spacings, four phase-shifted fringe patterns are generated by correlation integration and then used in a phase calculation to obtain wrapped phase information for the object. This phase information is then unwrapped and normalized, producing a set of data points representative of the unwrapped phase information. Noise suppression using pattern reconstruction and smoothing can be utilized at this point to improve the signal to noise ratio.

Abstract: Provided in a preferred embodiment is an application of phase or “shadow” profilometry to determine a 3-D profile of structure instantaneously. In one application, a vehicle-mounted system captures a 3-D profile while operating normally. The system may use a digital camera, a computer for processing and storage, a broadband light source, and a device positioned between the light and structure that enables strips of light to impinge on the structure. A preferred embodiment uses a single straight edge as the device, casting a straight line shadow. In addition to profiling road surfaces, the bottom of hydraulic models have been profiled even while being disturbed with a wave generator. It may be integrated with other devices such as a pro-active suspension system for civilian, military, and construction vehicles. Further, use with tiltmeters and GPS receivers provides data useful for engineering or construction management.

Abstract: A method for generating, in a non-contact range finding and measurement system, a template structure representative of the surface of an observed object, and for utilizing the template structure to synthesize data points in corrupted regions of an image of the object.

Abstract: An optical system for computing a height of a target on a surface includes a light projector for projecting light. The light passes through a patterned reticle and a projector lens so as to illuminate the target with an image of the pattern. The light is projected telecentrically between the reticle and the projector lens, and a camera is positioned along a receive optical path. The camera receives an image of the target through a receive lens. The target and the pattern move at least three times with respect to each other, and the camera acquires an image of the object at each of at least three positions.

Abstract: A process is disclosed for determining surface information by a projected structure with periodically changing brightness curve which is shifted by 1/n, n=whole number greater than two, of the grating constant, and the projection image is acquired of a CCD camera, and information is determined for every image point, which information represents the brightfield intensity multiplied by the respective grating phase, the sine components and cosine components are extracted from these images and gives:

Abstract: A 3D shape measurement method and a device using the method eliminate harmful influences of periodic inconstancy in the phase shift method. Optical intensity patterns following periodic functions of sine waves are irradiated on an object while shifting the phases thereof. Based on the image picked up from the object, the 3D shape of the object is measured. In this method, a plurality of optical intensity patterns following periodic functions with varying wavelengths are projected onto the object so as not to interfere with each other. The least common multiple of the wavelengths of the periodic functions is larger than the extent having periodic inconstancy within the image pickup area.

Abstract: A three-dimensional shape measuring method by which measurement of a three-dimensional shape is realized with an improved precision. Grid patterns comprising a plurality of one-dimensional grids 1, 2 and 3, each having a period and direction different from those of the others, are simultaneously projected upon objects to be measured, using different colors for each of the one-dimensional grids 1, 2 and 3. Subsequently, a grid image deformed in accordance with the three-dimensional shapes of the objects to be measured is imaged, the grid image is separated by colors into one-dimensional grid components of each color, a phase for each of the one-dimensional grid components is detected, and then, measurement values of the three-dimensional shapes are obtained on the basis of the detected phases. At the same time, by imaging the objects to be measured by use of white light, color information on the objects to be measured are measured as well.

Abstract: Embodiments of the invention provide a non-contact method for measuring the surface profile of an object that can include generating a point-type optical signal and projecting it on a rotatable precision optical grating, generating a rotating pattern of light and dark lines onto the object, recording a series of images of the rotating pattern moving across the object with an image receiving device and calculating the surface profile of the object. Other embodiments can include a method to calibrate the system and a non-contact apparatus that generally includes a point-type light source, a rotatably mounted optical grating being configured to project a moving grating image on the object, a processor in communication with the image capturing device and configured to receive image input from the image capturing device and generate a surface profile representation of the object therefrom.

Abstract: A method to monitor a dimension of a pellicle includes projecting a first light signal against a surface of the pellicle. A second light signal reflected from the surface of the pellicle is detected, with the second light signal being a representation of the first light signal. The method determines if the dimension of the pellicle is within an allowable value based on a characteristic of the detected second light signal. The characteristic of the detected second light signal can include time periods between pulses of the detected second light signal, an intensity of the detected second light signal, or a positional displacement of the detected second light signal.

Abstract: In a pattern projection measurement grating, each cycle of the total amplitude of a sine wave is divided into eight sections, and each of thus divided sections is divided into white regions W and black regions B according to the ratio between the area S of the sine wave and the area So of a rectangular wave having the same amplitude as the sine wave in this section, so as to constitute a black and white binary pattern. Thus obtained pseudo sine wave density distribution is a density pattern close to the sine wave.

Abstract: A method of measuring a crystal section shape of a crystal being pulled from a crystal melt while rotating, including taking an image of the base of the crystal in horizontal and vertical directions with a two-dimensional camera set at an upper oblique position over the crystal; setting at least two horizontal light measuring lines in the image taken by the two-dimensional camera, being arranged in parallel in the vertical direction; detecting pairs of intersection points, at which a fusion ring intersects the two horizontal light measuring lines; transforming a position of each of the intersection points into a position of a point located on a line passing through a crystal center; determining diameters of the crystal based on the transformed positions and on time lags between two intersection points of each of the pairs of intersection points.

Abstract: A mechanism, employed for a camera, which obtains precise information upon a three-dimensional configuration of an object, without its being affected by nature of the object and/or by nature of a light with which the object is lit. The mechanism includes an image-taking apparatus, a projection apparatus for selectively projecting more than two types of pattern lights onto a photographing area, and a detecting apparatus for detecting a photographing condition about the object and/or the light. The projection apparatus selectively projects one of the pattern lights on the basis of a result of detection, executed by the detecting apparatus, of the photographing condition about the object and/or the light.

Abstract: A method and system are provided including an optical head which moves relative to an object at a vision station to scan a projected pattern of imagable electromagnetic radiation across the surface of an object to be inspected at a relatively constant linear rate to generate an imagable electromagnetic radiation signal. In one embodiment, the electromagnetic radiation is light to develop dimensional information associated with the object. The optical head includes at least one projector which projects a grid of lines and an imaging subsystem which includes a trilinear array camera as a detector. The camera and the at least one projector are maintained in fixed relation to each other. Three linear detector elements of the array camera extend in a direction parallel with the grid of lines. The geometry of the optical head is arranged in such a way that each linear detector element picks up a different phase in the grid pattern.