Dimension Patents (Class 356/625)
  • Patent number: 10180523
    Abstract: An optical coupling device can couple incident light, propagating orthogonal to a layered structure, into a layer of the layered structure. The device can include a lens having a lens central axis. The lens can focus a first beam to form a converging second beam. The first beam can have a first beam central axis that is offset from the lens central axis. The second beam can have a second beam central axis that is angled with respect to the first beam central axis. A planar grating can redirect the second beam to form a converging third beam. The third beam can have a third beam central axis that is parallel to a plane of the grating. Offsetting the first beam central axis from the lens central axis in this manner can help relax wavelength, manufacturing, and/or alignment tolerances, compared to a configuration in which there is no offset.
    Type: Grant
    Filed: August 24, 2017
    Date of Patent: January 15, 2019
    Assignee: Juniper Networks, Inc.
    Inventor: Brian Koch
  • Patent number: 10025285
    Abstract: Methods and metrology tool modules embodying the methods are provided. Methods comprise measuring characteristics of intermediate features such as guiding lines in a directed self-assembly (DSA) process, deriving exposure parameters from the measured characteristics; and adjusting production parameters for producing consecutive target features according to the derived exposure parameters. The methods and modules enhance the accuracy of the DSA-produced structures and related measurements.
    Type: Grant
    Filed: June 30, 2015
    Date of Patent: July 17, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Roie Volkovich, Eran Amit, Nuriel Amir, Michael E. Adel
  • Patent number: 9952517
    Abstract: A method of determining exposure dose of a lithographic apparatus used in a lithographic process on a substrate, the method comprising the steps: (a) receiving a substrate comprising first and second structures produced using the lithographic process; (b) detecting scattered radiation while illuminating the first structure with radiation to obtain a first scatterometer signal; (c) detecting scattered radiation while illuminating the second structure with radiation to obtain a second scatterometer signal; (d) using the first and second scatterometer signals to determine an exposure dose value used to produce said first and second structures wherein the first structure has a first periodic characteristic with spatial characteristics and yet at least another second periodic characteristic with spatial characteristics designed to be affected by the exposure dose and the second structure has a first periodic characteristic with spatial characteristics and yet at least another second periodic characteristic with sp
    Type: Grant
    Filed: June 29, 2015
    Date of Patent: April 24, 2018
    Assignee: ASML Netherlands B.V.
    Inventors: Alok Verma, Hugo Augustinus Joseph Cramer
  • Patent number: 9927374
    Abstract: An optical scanning assembly for use in inspecting a channel is provided. The assembly includes a housing and an inspection probe that selectively advances from the housing along an axis. The probe includes a light source that directs light towards at least one side wall of the channel and a light detector that receives the light reflected from the side wall. The assembly further includes a controller in communication with the inspection probe. The controller obtains a first optical length measurement for the light reflected from the side wall when the inspection probe is in a first position along the axis within the channel, obtain a second optical length measurement for the light reflected from the side wall when the inspection probe is in a second position along the axis within the channel, and compare the first and second optical length measurements to determine variations in a geometry of the channel.
    Type: Grant
    Filed: June 10, 2015
    Date of Patent: March 27, 2018
    Assignee: The Boeing Company
    Inventors: Morteza Safai, Jeffrey G. Thompson
  • Patent number: 9841689
    Abstract: A method is provided that comprises printing FEM wafers having different predefined focus offsets and multiple corresponding sites, measuring signals from the sites, and quantifying a focus inaccuracy by comparing the measured signals from the corresponding sites across the wafers.
    Type: Grant
    Filed: August 21, 2015
    Date of Patent: December 12, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Vladimir Levinski, Daniel Kandel, Yoel Feler, Nadav Gutman
  • Patent number: 9799117
    Abstract: A method for processing data and an apparatus thereof are provided. The method includes: projecting a first structure light and a second structure light onto a surface of a target object, wherein the first structure light is a stripe-structure light; capturing a first image comprising the target object; detecting first image information corresponding to the first structure light in the first image, wherein the first image information is stripe image information; detecting second image information corresponding to the second structure light in the first image; and obtaining a depth of the target object based on the first image information and the second image information.
    Type: Grant
    Filed: August 14, 2014
    Date of Patent: October 24, 2017
    Assignee: Lenovo (Beijing) Co., Ltd.
    Inventors: Ke Chen, Manjun Xiao, Wenjing Liu, Chen Yang, Rongyao Fu, Qian Ma
  • Patent number: 9797712
    Abstract: A method for determining the position of at least one edge of an object, in particular a strand, comprises illuminating the object using light from at least one coherent light source, wherein diffraction borders are generated on both geometric boundaries of the shadow caused by the object. The method also includes recording the spatial intensity profile of at least one diffraction border using at least one single or multi line optical sensor, differentiating the at least one recorded intensity profile with respect to location and plotting it using a squared location axis, and comparing the at least one recorded intensity profile, differentiated with respect to location and plotted using a squared location axis, to at least one periodic reference intensity profile. The position of at least one edge of the object is determined on the basis of the completed comparison.
    Type: Grant
    Filed: October 9, 2013
    Date of Patent: October 24, 2017
    Assignee: Sikora AG
    Inventors: Werner Blohm, Harald Sikora
  • Patent number: 9768084
    Abstract: In one aspect of the present disclosure, a method is provided, the method including providing a test region in an upper surface region of a semiconductor substrate, forming a plurality of trenches in the test region, the trenches of the plurality of trenches having at least one of a varying width, a varying length, and a varying bridge between adjacent trenches, determining depth values of the trenches, and evaluating the risk of defects of gate electrodes to be formed on the basis of the depth values.
    Type: Grant
    Filed: March 21, 2016
    Date of Patent: September 19, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Elliot John Smith, Nigel Chan
  • Patent number: 9557523
    Abstract: A target object has an upper surface including a first surface and a second surface located below the first surface. A method of focusing an optical system includes: measuring a surface position of the first surface; measuring a surface position of the second surface; obtaining, based on a measurement results of the surface position of the first surface, an in-focus condition in which the optical system is focused on the first surface; obtaining information about a step amount between the first surface and the second surface based on the measurement results of the surface positions of the first surface and the second surface; and focusing the optical system on the second surface based on the in-focus condition and the information about the step amount.
    Type: Grant
    Filed: June 2, 2014
    Date of Patent: January 31, 2017
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Hiromi Suda
  • Patent number: 9558436
    Abstract: A method includes identifying one or more codewords of a bit sequence that fail to satisfy at least one codeword constraint. The method also includes removing the one or more codewords from the bit sequence to generate a punctured bit sequence. The method further includes determining whether the punctured bit sequence is symmetric. The method includes, in response to determining that the punctured bit sequence is symmetric, generating a hermitian symmetric codebook primitive based at least in part on the punctured bit sequence, where the hermitian symmetric codebook primitive is useable to form a diffractive optical element (DOE) of a structured light depth sensing system.
    Type: Grant
    Filed: September 19, 2014
    Date of Patent: January 31, 2017
    Assignee: Qualcomm Incorporated
    Inventors: James Wilson Nash, Kalin Mitkov Atanassov, Stephen Michael Verrall
  • Patent number: 9436099
    Abstract: In order to determine whether an exposure apparatus is outputting the correct dose of radiation and its projection system is focusing the radiation correctly, a test pattern is used on a mask for printing a specific marker onto a substrate. This marker is then measured by an inspection apparatus, such as a scatterometer, to determine whether there are errors in focus and dose and other related properties. The test pattern is configured such that changes in focus and dose may be easily determined by measuring the properties of a pattern that is exposed using the mask. The test pattern may be a 2D pattern where physical or geometric properties, e.g., pitch, are different in each of the two dimensions. The test pattern may also be a one-dimensional pattern made up of an array of structures in one dimension, the structures being made up of at least one substructure, the substructures reacting differently to focus and dose and giving rise to an exposed pattern from which focus and dose may be determined.
    Type: Grant
    Filed: May 9, 2014
    Date of Patent: September 6, 2016
    Assignee: ASML Netherlands B.V.
    Inventors: Christian Marinus Leewis, Hugo Augustinus Joseph Cramer, Marcus Adrianus Van De Kerkhof, Johannes Anna Quaedackers, Christine Corinne Mattheus
  • Patent number: 9322640
    Abstract: Optical measuring systems for measuring geometrical parameters of nano-objects and methods of measuring a critical size (CS) are provided. The optical method of measuring the CS includes selecting parameters of an optic scheme and an illumination condition; recording a set of nanostructure images corresponding to various wavelengths with various defocusing levels of scattered radiation; calculating a plurality of sets of images of a nanostructure with various defocusing levels, corresponding to various wavelengths of the scattered radiation with CS values within a known range; and comparing a set of measured images of the nanostructure with the sets of the calculated images and determining a best approximate value of the CS values.
    Type: Grant
    Filed: August 7, 2013
    Date of Patent: April 26, 2016
    Assignee: SAMSING ELECTRONICS CO., LTD.
    Inventors: Sergey Nikolaevich Koptyaev, Maxim Vladimirovich Ryabko, Alexander Vyacheslavovich Shcherbakov, Alexey Dmitrievich Lantsov
  • Patent number: 9299623
    Abstract: An apparatus for performing run-to-run control and sampling optimization in a semiconductor manufacturing process includes at least one control module. The control module is operative: to determine a process output and corresponding metrology error associated with an actual metrology for a current processing run in the semiconductor manufacturing process; to determine a predicted process output and corresponding prediction error associated with a virtual metrology for the current processing run; and to control at least one parameter corresponding to a subsequent processing run as a function of the metrology error and the prediction error.
    Type: Grant
    Filed: November 8, 2012
    Date of Patent: March 29, 2016
    Assignee: International Business Machines Corporation
    Inventors: Robert J. Baseman, Jingrui He, Emmanuel Yashchin, Yada Zhu
  • Patent number: 9280057
    Abstract: An alignment measurement system measures an alignment target on an object. A measurement illuminates the target and is reflected. The reflected measurement beam is split and its parts are differently polarized. A detector receives the reflected measurement beam. A processing unit determines alignment on the basis of the measurement beam received by the detector. An alternative arrangement utilizes an optical dispersive fiber to guide a multi-wavelength measurement beam reflected from the object to a detector.
    Type: Grant
    Filed: May 29, 2015
    Date of Patent: March 8, 2016
    Assignee: ASML Netherlands B.V.
    Inventors: Franciscus Godefridus Casper Bijnen, David Deckers, Sami Musa
  • Patent number: 9276369
    Abstract: According to one embodiment, one of two connectors, and a circuit board on which the other of the connectors is mounted are prepared. The one of the connectors has an engagement portion. The other of the connectors has an elastically deformable engagement detent. The engagement detent can go over the engagement portion and be engaged with the engagement portion. One of the connectors is fitted to the other of the connectors. A portion of the electric equipment is imaged by a camera. A piece of data which changes is measured from an obtained picture image. A deformation of the engagement detent occurs with going-up of the engagement detent onto the engagement portion. Whether or not the connectors are properly fitted is determined. Fitting of the connectors is performed again when it is determined that the connectors are not properly fitted.
    Type: Grant
    Filed: February 20, 2013
    Date of Patent: March 1, 2016
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hirofumi Kurita, Noriyasu Kashima, Tomohiro Shimamoto
  • Patent number: 9240360
    Abstract: A method for run-to-run control and sampling optimization in a semiconductor manufacturing process includes the steps of: determining a process output and corresponding metrology error associated with an actual metrology for a current processing run in the semiconductor manufacturing process; determining a predicted process output and corresponding prediction error associated with a virtual metrology for the current processing run; and controlling at least one parameter corresponding to a subsequent processing run as a function of the metrology error and the prediction error.
    Type: Grant
    Filed: July 25, 2012
    Date of Patent: January 19, 2016
    Assignee: International Business Machines Corporation
    Inventors: Robert Jeffrey Baseman, Jingrui He, Emmanuel Yashchin, Yada Zhu
  • Patent number: 9221128
    Abstract: A method of inspecting a solder joint through which a lead of a semiconductor device is mounted on a printed circuit board is disclosed. The method includes setting an estimated solder joint region at an outside of an end of the lead of the semiconductor device, capturing an image of the estimated solder joint region, calculating a height of solder joint in the estimated solder joint region by using the captured image of the estimated solder joint region, and determining whether the solder joint is defective by comparing the height of the solder joint in the estimated solder joint region with a reference height of a solder joint, which is previously set. According to the method, reliability of inspection is enhanced regardless of environmental noises.
    Type: Grant
    Filed: November 6, 2013
    Date of Patent: December 29, 2015
    Assignee: KOH YOUNG TECHNOLOGY INC.
    Inventor: Joong-Ki Jeong
  • Patent number: 9217669
    Abstract: The present invention provides a one-dimensional global rainbow measurement device and a measurement method. The measurement device comprises three parts, i.e., a laser emission unit, a signal collection unit and a signal processing unit. The laser emission unit is modulated to be a light sheet by a laser beam emitted by a laser, and configured to irradiate droplets in a spray field to generate rainbow signals. The signal collection unit is configured to separately image, by an optical system unit, the rainbow signals at measurement points of different height onto different row pixels of a CCD signal collector. The signal processing unit is configured to convert the received rainbow signals and process by a computer the rainbow signals in a form of data to obtain the measured values.
    Type: Grant
    Filed: May 10, 2013
    Date of Patent: December 22, 2015
    Assignee: ZHEJIANG UNIVERSITY
    Inventors: Xuecheng Wu, Kefa Cen, Zhihua Wang, Xiang Gao, Linhong Chen, Kunzan Qiu, Yingchun Wu, Haoyu Jiang
  • Patent number: 9194813
    Abstract: Method for detecting and evaluating the protrusions that appear on cords coming from a twisting/rubberizing process, by the digital processing of the image of a layer of cord formed by a number of turns wound around the core of a spool (4), which method comprises the steps during which: A) the raw digital image of the surface of the layer of cord over one complete revolution of the spool is taken using a linear camera (1); B) the raw image is displayed flat so as to limit the influence of the variations in lighting and in the brightness of the wires; C) the flattened image is segmented so as to reveal the dark areas that contain protrusion areas; D) the segmented image is a processed using a series of morphological processing operations in order to separate and select the shapes likely to represent protrusions and areas likely to represent shadows; and E) an evaluation value is assigned to the final image obtained and the evaluation value is compared with a threshold value.
    Type: Grant
    Filed: October 4, 2010
    Date of Patent: November 24, 2015
    Assignees: COMPAGNIE GENERALE DES ETABLISSEMENTS MICHELIN, Michelin Recherche et Technique S.A.
    Inventors: Marc Calvet, Jean-Paul Zanella, Davy Vernier
  • Patent number: 9161679
    Abstract: The invention relates to an image processing system, containing an optical digital camera (1) having means (4) that produce information representative of a specified geometric distance within the image using laser light in the detection range of the optical digital camera (1), said information representative of the specified geometric distance being processed together with the image information. Separating means (8) are arranged downstream of the digital camera, said separating means separating the information representative of the specified geometric distance from the image information. Subsequent evaluating means produce a distance value therefrom. Image storage means (9) additionally arranged downstream of the separating means are used to store the recorded image information.
    Type: Grant
    Filed: August 17, 2010
    Date of Patent: October 20, 2015
    Inventors: Olaf Christiansen, Eckhard Löhde
  • Patent number: 9140998
    Abstract: Methods are disclosed for measuring target structures formed by a lithographic process on a substrate. A grating structure within the target is smaller than an illumination spot and field of view of a measurement optical system. The optical system has a first branch leading to a pupil plane imaging sensor and a second branch leading to a substrate plane imaging sensor. A spatial light modulator is arranged in an intermediate pupil plane of the second branch of the optical system. The SLM imparts a programmable pattern of attenuation that may be used to correct for asymmetries between the first and second modes of illumination or imaging. By use of specific target designs and machine-learning processes, the attenuation patterns may also be programmed to act as filter functions, enhancing sensitivity to specific parameters of interest, such as focus.
    Type: Grant
    Filed: November 10, 2011
    Date of Patent: September 22, 2015
    Assignee: ASML Netherlands B.V.
    Inventors: Hendrik Jan Hidde Smilde, Arno Jan Bleeker, Patrick Warnaar, Willem Marie Julia Marcel Coene, Michael Kubis
  • Patent number: 9046385
    Abstract: An alignment measurement system measures an alignment target on an object. A measurement illuminates the target and is reflected. The reflected measurement beam is split and its parts are differently polarized. A detector receives the reflected measurement beam. A processing unit determines alignment on the basis of the measurement beam received by the detector. An alternative arrangement utilizes an optical dispersive fiber to guide a multi-wavelength measurement beam reflected from the object to a detector.
    Type: Grant
    Filed: August 10, 2011
    Date of Patent: June 2, 2015
    Assignee: ASML Netherlands B.V.
    Inventors: Franciscus Godefridus Casper Bijnen, Sami Musa, David Deckers
  • Publication number: 20150146218
    Abstract: A method of detecting an overall dimension of a plate-shaped workpiece to be processed on a processing machine by a contactless-acting sensor includes moving the workpiece by a motion device of the processing machine in a predetermined direction until the sensor detects a first workpiece edge by a first change of state, detecting a first position of the workpiece where the first change of state happens by an evaluation device connected to the sensor, moving the workpiece by the motion device in a direction toward a second workpiece edge until the sensor detects the second workpiece edge by a second change of state, detecting a second position of the workpiece where the second change of state happens by the evaluation device, and determining an overall dimension of the workpiece by a determination of a distance between the first position and the second position of the workpiece.
    Type: Application
    Filed: November 26, 2014
    Publication date: May 28, 2015
    Inventor: Stefan Kerscher
  • Patent number: 9038434
    Abstract: In a method for calibrating a star probe of an image measuring machine, the star probe includes one or more probe heads. Probe configuration information for the star probe is configured when there is no probe configuration file of the star probe stored in a storage device of the image measuring machine, and one of the probe heads to be calibrated is selected from the star probe. The method calibrates a radius value of the selected probe head, and calibrates the deviation between the center point of the selected probe head and the focus of the camera lens. The method further generates a star probe model of the star probe according to the probe configuration information and the probe calibration information, and displays the star probe model of the star probe on a display device of the image measuring machine.
    Type: Grant
    Filed: July 23, 2012
    Date of Patent: May 26, 2015
    Assignees: HONG FU JIN PRECISION INDUSTRY (ShenZhen) CO., LTD., HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Chih-Kuang Chang, Zheng-Cai She, Zhong-Kui Yuan, Zhi-Jun Zou, Dong-Hai Li
  • Patent number: 9041918
    Abstract: A handheld distance measuring instrument includes a first emission device, a first reception device and a second reception device. The first emission device is configured to emit an optical measurement radiation onto a target object. The first reception device is configured to detect the radiation returning from the target object. The second reception device is configured in order to detect a reference radiation internal to the instrument. The reception devices respectively include a first detector unit, a second detector unit, a first time measurement unit, and a second time measurement unit. The first time measurement unit is configured to be connected selectively to the first detector unit and to the second detector unit. The second time measurement unit is configured to be connected selectively to the first detector unit and to the second detector unit.
    Type: Grant
    Filed: December 17, 2013
    Date of Patent: May 26, 2015
    Assignee: Robert Bosch GmbH
    Inventors: Andreas Eisele, Bernd Schmidtke, Reiner Schnitzer, Oliver Wolst
  • Patent number: 9030676
    Abstract: The spatial information detection device emits, to a space including an intended area, signal light defined as light modulated with a modulation signal defined as a square wave signal having high and low level periods appearing alternately, each of the periods having its length randomly selected from integral multiples of a unit time period. The device generates signal electric charges by accumulating electric charges generated in response to light from the space in a collection time period determined by a demodulation signal defined as a signal having the same waveform as that of the modulation signal or that of the inverted modulation signal. The device corrects, using correction information regarding an effect caused by light from an unintended area, the amount of signal electric charges as an amount of intended electric charges produced in response to light from the intended area, thereby generating spatial information.
    Type: Grant
    Filed: February 21, 2012
    Date of Patent: May 12, 2015
    Assignee: Panasonic Intellectual Property Management Co., Ltd.
    Inventors: Kenichi Murakami, Yusuke Hashimoto
  • Patent number: 9019477
    Abstract: A laser scanner comprises a light projecting optical system for projecting a distance measuring light, a deflecting optical member for deflecting and projecting the distance measuring light to a measurement area, a distance measuring unit for carrying out measurement based on a reflection light and for acquiring distance data of the measurement area, a second image pickup unit capable of continuously acquiring image data including the measurement area, and a control unit. The control unit has a first image processing unit for acquiring a three-dimensional image based on the image data and on the distance data, and also has a second image processing unit for detecting a mobile object by comparing image data being adjacent to each other in terms of time. The control unit controls the distance measuring unit so that measurement of the mobile object detected in the measurement area is restricted by the second image processing unit.
    Type: Grant
    Filed: March 27, 2012
    Date of Patent: April 28, 2015
    Assignee: Kabushiki Kaisha TOPCON
    Inventors: Masae Matsumoto, Tadayuki Ito, Ken-ichiro Yoshino
  • Publication number: 20150103335
    Abstract: A method and apparatus for dimensioning and, optionally, weighing an object. A platform with a surface is used for supporting an object. A user selects between two different dimensioning devices of the apparatus. The first device employs three distance sensors to determine a distance between each of the distance sensors and a side of an object. The second device includes a movable gate which is passed over and about an object or objects on the platform. Sensor arrays, such as paired, aligned light emitter and receiver arrays, are used in combination with a plurality of sensed gate positions to determine the dimensions of the objects(s) as the gate passes around the object(s) based on whether or not light from an emitter on one side of the gate reaches a light receiver on another, opposing side of the gate.
    Type: Application
    Filed: December 22, 2014
    Publication date: April 16, 2015
    Inventors: Robert L. Kennington, Eve A. Carlsruh, Craig R. Bailey, Marie L. Midboe, Brandon M. Taylor, Randy B. Neilson
  • Patent number: 9007568
    Abstract: A distance detecting induction device includes a casing, a circuit board within the casing, and a pair of focusing lenses provided at respective openings in the casing. The distance detecting induction device further includes an emitting device including an infrared light emitting diode for emitting infrared light rays to the emitting lens and a receiving device including a distance detection induction module for inducing reflected light rays focused by the receiving lens. The distance detecting induction device further includes an emitting light ray guiding device arranged between the emitting lens and the emitting device. The guiding device includes a small circular hole provided at a position of the emitting device and a big circular hole provided at a position of the emitting lens.
    Type: Grant
    Filed: August 27, 2009
    Date of Patent: April 14, 2015
    Assignee: Shanghai Kohler Electronics, Ltd.
    Inventors: Qiaomei Tang, Guofeng Chen
  • Patent number: 8994925
    Abstract: Optical range finders are configured to transmit optical bursts toward a target and detect a corresponding received burst. DC offset in the received burst due to square law detection can be offset based on a difference between high pass and low pass filtered portions of the received burst. Edge records associated with bursts can be obtained, and correlated with a reference signal or waveform to obtain a range estimate.
    Type: Grant
    Filed: March 27, 2012
    Date of Patent: March 31, 2015
    Assignee: PulsedLight, Inc.
    Inventor: Robert Alden Lewis
  • Patent number: 8994944
    Abstract: In a method of determining the focus of a lithographic apparatus used in a lithographic process on a substrate, the lithographic process is used to form a structure on the substrate, the structure having at least one feature which has an asymmetry in the printed profile which varies as a function of the focus of the lithographic apparatus on the substrate. A first image of the periodic structure is formed and detected while illuminating the structure with a first beam of radiation. The first image is formed using a first part of non-zero order diffracted radiation. A second image of the periodic structure is formed and detected while illuminating the structure with a second beam of radiation. The second image is formed using a second part of the non-zero order diffracted radiation which is symmetrically opposite to the first part in a diffraction spectrum.
    Type: Grant
    Filed: January 7, 2014
    Date of Patent: March 31, 2015
    Assignee: ASML Netherlands B.V.
    Inventors: Hugo Augustinus Joseph Cramer, Arie Jeffrey Den Boef, Henricus Johannes Lambertus Megens, Hendrik Jan Hidde Smilde, Adrianus Johannes Hendrikus Schellekens, Michael Kubis
  • Patent number: 8988663
    Abstract: Using a hand-held range finding device to range an object in a field of view is difficult due to user-induced jitter. In particular, user-induced jitter introduces uncertainty as to which object in a field of view is actually ranged. Current approaches attempt to mitigate user-induced jitter by requiring a user to mount the hand-held range finding device onto a stabilizing device (e.g., a tripod). However, such approaches require the user to carry additional equipment. Embodiments of the present disclosure enable the user to visually confirm which object in a field of view is actually ranged during a range finding event by generating a composite image that includes a visual representation of a laser pulse emitted by the range finding device reflecting off an object in the field of view. Advantageously, disclosed embodiments provide true hand-held range finding capabilities without requiring the use of stabilization assistance techniques.
    Type: Grant
    Filed: January 22, 2013
    Date of Patent: March 24, 2015
    Assignee: Raytheon Company
    Inventors: Brent L. Sisney, Bryan K. Hawk, Robert P. Francis, James A. McIntosh
  • Patent number: 8984730
    Abstract: A system for rotating a turbine shell includes a first platform and a first trunnion rotatably connected to the first platform. A second platform is separated from the first platform, and a second trunnion is separated from the first trunnion and rotatably connected to the second platform. The system further includes structure for rotating the first trunnion.
    Type: Grant
    Filed: February 7, 2012
    Date of Patent: March 24, 2015
    Assignee: General Electric Company
    Inventors: James Bradford Holmes, Randall Stephen Corn
  • Patent number: 8982330
    Abstract: A method and an apparatus of profiling a surface are disclosed. The method comprises projecting slit pattern light toward a target object in at least two directions in sequence to obtain pattern images reflected on the target object, obtaining heights by using the pattern images according to the directions, obtaining vector fields showing a direction of maximum variation of height, obtaining confidence indexes of the heights corresponding to the at least two directions, obtaining integrated vector fields by using the confidence indexes and the vector fields, and calculating height of each position of the target object by using the integrated vector fields. Therefore, accuracy is enhanced.
    Type: Grant
    Filed: November 17, 2011
    Date of Patent: March 17, 2015
    Assignee: Koh Young Technology Inc.
    Inventor: Evgeny Vorobyev
  • Patent number: 8982329
    Abstract: End of line effect can occur during manufacture of components using a lithographic apparatus. These end of line effects can result in line end shortening of the features being manufactured. Such line end shortening may have an adverse impact on the component being manufactured. It is therefore desirable to predict and/or monitor the line end shortening. A test pattern is provided that has two separate areas such that, as designed, when the two areas are illuminated with radiation (for example from an angle-resolved scatterometer) they result in diffused radiation with asymmetry that is equal in sign to each other, but opposite in magnitude. When the test pattern is actually manufactured, line end shortening occurs, and so the asymmetry of the two areas are not equal and opposite. From the measured asymmetry of the manufactured test pattern, the amount of line end shortening that has occurred can be estimated.
    Type: Grant
    Filed: April 22, 2009
    Date of Patent: March 17, 2015
    Assignee: ASML Netherlands B.V.
    Inventors: Maurits Van Der Schaar, Arie Jeffrey Den Boef, Richard Johannes Franciscus Van Haren, Marcus Adrianus Van De Kerkhof
  • Publication number: 20150070713
    Abstract: A method of fabricating an aberration monitor on a production mask used in photolithographic patterning of a semiconductor substrate is provided. The method may include placing a production mask within a nanomachine repair tool and generating, using the nanomachine repair tool, a phase shifting pattern within a region of the production mask.
    Type: Application
    Filed: September 12, 2013
    Publication date: March 12, 2015
    Applicant: International Business Machines Corporation
    Inventor: Gregory R. McIntyre
  • Patent number: 8976340
    Abstract: A system for landing or docking a mobile platform is enabled by a flash LADAR sensor having an adaptive controller with Automatic Gain Control (AGC). Range gating in the LADAR sensor penetrates through diffuse reflectors. The LADAR sensor adapted for landing/approach comprises a system controller, pulsed laser transmitter, transmit optics, receive optics, a focal plane array of detectors, a readout integrated circuit, camera support electronics and image processor, an image analysis and bias calculation processor, and a detector array bias control circuit. The system is capable of developing a complete 3-D scene from a single point of view.
    Type: Grant
    Filed: April 16, 2012
    Date of Patent: March 10, 2015
    Assignee: Advanced Scientific Concepts, Inc.
    Inventors: Patrick Gilliland, Bob Koseluk, Steve Penniman, Brad Short, Joe Spagnolia, Roger Stettner
  • Patent number: 8970827
    Abstract: A fast spatial light modulator based on a linear MEMS ribbon array enables a depth capture system to operate in structured light and time-of-flight modes. Time-of-flight depth information may be used to phase unwrap structured light depth information. Combined structured light and time-of-flight systems offer precise depth resolution over a wide range of distances.
    Type: Grant
    Filed: September 20, 2013
    Date of Patent: March 3, 2015
    Assignee: Alces Technology, Inc.
    Inventors: David M Bloom, Matthew A Leone
  • Publication number: 20150055144
    Abstract: A high-resolution imaging and processing method and system for determining a geometric dimension of a part is provided. The method includes directing at least one plane of collimated radiation at a surface of a supported part. Each of the planes is occluded by the part to create unobstructed first and second planar portions of the plane of radiation passing by and not blocked by the supported part and to cast a radiation shadow of the supported part. Each of the first and second planar portions has a width and contains an amount of radiation which is representative of a respective geometric dimension of the part to be determined. The method includes increasing the width and decreasing the intensity of the first and second planar portions imaged on first and second predetermined measuring areas, respectively.
    Type: Application
    Filed: August 21, 2013
    Publication date: February 26, 2015
    Applicant: GII Acquisition, LLC dba General Inspection, LLC
    Inventors: Christopher C. Fleming, Michael G. Nygaard
  • Publication number: 20150055145
    Abstract: A high-resolution imaging and processing method and system for increasing the range of a geometric dimension of a part that can be determined are provided. The method includes directing at least one plane of collimated radiation at a surface of the part. Each of the planes is occluded by the part to create unobstructed first and second planar portions of the plane of radiation. Each of the first and second planar portions has a width and contains an amount of radiation which is representative of a respective geometric dimension of the supported part to be determined. The method includes increasing the width and decreasing the intensity of the first and second planar portions imaged on a plurality of predetermined measuring areas to obtain respective elongated planar portions and to produce respective electrical signals. The electrical signals are processed to determine the geometric dimension with enhanced accuracy.
    Type: Application
    Filed: August 21, 2013
    Publication date: February 26, 2015
    Applicant: GII Acquisition, LLC dba General Inspection, LLC
    Inventors: Christopher C. Fleming, Michael G. Nygaard
  • Publication number: 20150049345
    Abstract: A three-dimensional measuring apparatus 1 projects slit light from a projector 7 onto a work 2 and a stereo camera 5 captures an image of the work projected by the slit light. A control apparatus 10 of the three-dimensional measuring apparatus 1 temporarily identifies a correspondence between a bright line 4j on a first image of the captured stereo image and a light-section plane 6Pj and projects the bright line 4j onto the light-section plane 6Pj. The bright line projected onto the light-section plane 6Pj is projected onto a second image. The control apparatus 10 calculates the level of similarity between a bright line 4jX projected onto the second image and a bright line on the second image and determines a result of identified correspondence relationship between the bright line 4jX and the bright line on the second image.
    Type: Application
    Filed: March 22, 2013
    Publication date: February 19, 2015
    Inventor: Hiroshi Miyagawa
  • Publication number: 20150049346
    Abstract: Apparatus and methods of determining a position of a height sensor in a dispensing system. The dispensing system includes a dispenser, height sensor, camera, and a calibration device configured to receive a signal from the height sensor. The calibration device may include an optical sensor that generates an alignment signal in response to receiving light from the height sensor and/or a fiducial that causes the height sensor to generate the alignment signal in response to a detected height change. The alignment signal is used to automatically determine the position at which the height sensor is aligned with the calibration device. The position of the height sensor relative to a camera is determined by aligning the camera with the calibration device and recording its position. The recorded coordinates of the camera are compared to the coordinates of the height sensor when the height sensor is automatically aligned with the calibration device.
    Type: Application
    Filed: October 29, 2014
    Publication date: February 19, 2015
    Inventors: Floriana Suriawidjaja, Todd S. Weston
  • Patent number: 8958056
    Abstract: A triangulation light sensor includes at least one light transmitter for transmitting a light signal into a detection zone, a light receiver having a plurality of receiver elements for receiving light from the detection zone reflected diffusely and/or specularly, and a reception optics arranged between the detection zone and the light receiver in the beam path, with the position of a light spot produced on the light receiver in a triangulation direction by the reflected light resulting in dependence on the distance of the object. The reception optics includes at least one multisegmented lens element having a plurality of lens segments with mutually spaced apart optical axes in the triangulation direction and at least one freeform lens element or one diffractive-optical element having a multisegmented lens element having a plurality of lens segments with optical axes spaced apart from one another in the triangulation direction.
    Type: Grant
    Filed: February 15, 2013
    Date of Patent: February 17, 2015
    Assignee: Sick AG
    Inventors: Friedhelm Wiethege, Gerhard Merettig
  • Patent number: 8958079
    Abstract: A system for inspecting railroad ties in a railroad track includes a light generator, an optical receiver and a processor. The light generator is oriented to project a beam of light across the railroad track while moving along the railroad track in a travel direction. The optical receiver is oriented to receive at least a portion of the beam of light reflected from the railroad track and configured to generate image data representative of a profile of at least a portion of the railroad track. The processor is configured to analyze the image data by applying one or more algorithms configured to find boundaries of a railroad tie and determine one or more condition metrics associated with the railroad tie.
    Type: Grant
    Filed: March 12, 2013
    Date of Patent: February 17, 2015
    Assignee: Georgetown Rail Equipment Company
    Inventors: John J. Kainer, Charles W. Aaron, Gregory T. Grissom, Antonio R. Mauricio, Jeb E. Belcher, David M. Pagliuco, Wilson T. Wamani, John A. Nagel, II, Christopher M. Villar, Steven C. Orrel, Zechariah Bertilson
  • Patent number: 8942458
    Abstract: A method for distinguishing and sorting cells characterized by comprising distinguishing and sorting a specific cell mass or a part of the cells in the cell mass with the use of transmitted light data reflecting the morphological characteristics of the cells such as size and shape optionally together with side-scattering light data reflecting the characteristics of the internal structure of the cells. The part of the cells in the specific cell mass as described above are at the G1 stage or at a part of the M stage in the cell cycle. A part of the cells at the G1 stage are referred to as the left bottom line in an analytical dispersion diagram of the cells wherein the abscissa indicates the transmitted light data, while a part of the cells at the M stage are referred to as the right bottom line in the analytical dispersion diagram of the cells wherein the abscissa indicates the transmitted light data.
    Type: Grant
    Filed: June 19, 2009
    Date of Patent: January 27, 2015
    Assignee: Furukawa Electric Co., Ltd.
    Inventors: Toru Takahashi, Ken Tsukii, Jie Xu
  • Publication number: 20150022827
    Abstract: Methods, systems, and devices for establishing a wear state of a cutting nozzle of a laser processing machine. An actual state of the cutting nozzle shape is established by a three-dimensional evaluation performed by a nozzle shape sensor and an associated controller. The established actual state of the cutting nozzle shape is compared to a desired state of the cutting nozzle shape, and the wear state of the cutting nozzle is established based on a result of the comparison.
    Type: Application
    Filed: July 17, 2014
    Publication date: January 22, 2015
    Inventors: Ulrich Meindl, Boris Regaard
  • Publication number: 20150015898
    Abstract: A method for measuring three-dimensional coordinates of an object surface with a line scanner, the line scanner including a projector and a camera, the projector projecting onto the object surface a first line of light at a first time and a second line of light at a second time, the integrated energy of the second line of light different than the first line of light, the camera capturing the reflections of the first line of light and the second line of light, a processor processing the collected data after discarding portions of the image that are saturated or dominated by electrical noise, and determining three-dimensional coordinates of the object surface based at least in part on the processed data and on a baseline distance.
    Type: Application
    Filed: July 11, 2014
    Publication date: January 15, 2015
    Inventors: Paul C. Atwell, Keith G. Macfarlane
  • Publication number: 20150015897
    Abstract: Various embodiments include systems adapted to detect a target within a machine casing. In some embodiments systems include a target attached to a component within a dynamoelectric machine casing, a conduit spanning from an outer surface of the dynamoelectric machine casing to an inner surface of the dynamoelectric machine casing and an optical detection device external to the outer surface of the dynamoelectric machine casing and configured to detect the target attached to the component through the conduit.
    Type: Application
    Filed: July 10, 2013
    Publication date: January 15, 2015
    Inventor: Hemanth Gudibande Sathya Kumar
  • Publication number: 20150009510
    Abstract: A distance measure between a beginning and an end of a material strip wound onto a body in a tangential direction can be determined by creating a height profile of a surface of the material strip, which covers the beginning and the end of the wound material strip in the tangential direction. If a position value of the beginning of the material strip is determined in the created height profile, the distance measure can be determined using this position value and the height profile covering the end of the material strip.
    Type: Application
    Filed: September 23, 2014
    Publication date: January 8, 2015
    Inventors: Guenther KOSTKA, Peter SCHMITT, Oliver SCHOLZ, Ulf HASSLER
  • Patent number: 8928896
    Abstract: A method and apparatus for dimensioning and, optionally, weighing an object. A platform with a surface is used for supporting an object. A user selects between two different dimensioning devices of the apparatus. The first device employs three distance sensors to determine a distance between each of the distance sensors and a side of an object. The second device includes a movable gate which is passed over and about an object or objects on the platform. Sensor arrays, such as paired, aligned light emitter and receiver arrays, are used in combination with a plurality of sensed gate positions to determine the dimensions of the objects(s) as the gate passes around the object(s) based on whether or not light from an emitter on one side of the gate reaches a light receiver on another, opposing side of the gate.
    Type: Grant
    Filed: February 6, 2012
    Date of Patent: January 6, 2015
    Assignee: Quantronix, Inc.
    Inventors: Robert L. Kennington, Eve A. Carlsruh, Craig R. Bailey, Marie L. Midboe, Brandon M. Taylor, Randy Brown Neilson