Dimension Patents (Class 356/625)
-
Patent number: 10180523Abstract: An optical coupling device can couple incident light, propagating orthogonal to a layered structure, into a layer of the layered structure. The device can include a lens having a lens central axis. The lens can focus a first beam to form a converging second beam. The first beam can have a first beam central axis that is offset from the lens central axis. The second beam can have a second beam central axis that is angled with respect to the first beam central axis. A planar grating can redirect the second beam to form a converging third beam. The third beam can have a third beam central axis that is parallel to a plane of the grating. Offsetting the first beam central axis from the lens central axis in this manner can help relax wavelength, manufacturing, and/or alignment tolerances, compared to a configuration in which there is no offset.Type: GrantFiled: August 24, 2017Date of Patent: January 15, 2019Assignee: Juniper Networks, Inc.Inventor: Brian Koch
-
Patent number: 10025285Abstract: Methods and metrology tool modules embodying the methods are provided. Methods comprise measuring characteristics of intermediate features such as guiding lines in a directed self-assembly (DSA) process, deriving exposure parameters from the measured characteristics; and adjusting production parameters for producing consecutive target features according to the derived exposure parameters. The methods and modules enhance the accuracy of the DSA-produced structures and related measurements.Type: GrantFiled: June 30, 2015Date of Patent: July 17, 2018Assignee: KLA-Tencor CorporationInventors: Roie Volkovich, Eran Amit, Nuriel Amir, Michael E. Adel
-
Patent number: 9952517Abstract: A method of determining exposure dose of a lithographic apparatus used in a lithographic process on a substrate, the method comprising the steps: (a) receiving a substrate comprising first and second structures produced using the lithographic process; (b) detecting scattered radiation while illuminating the first structure with radiation to obtain a first scatterometer signal; (c) detecting scattered radiation while illuminating the second structure with radiation to obtain a second scatterometer signal; (d) using the first and second scatterometer signals to determine an exposure dose value used to produce said first and second structures wherein the first structure has a first periodic characteristic with spatial characteristics and yet at least another second periodic characteristic with spatial characteristics designed to be affected by the exposure dose and the second structure has a first periodic characteristic with spatial characteristics and yet at least another second periodic characteristic with spType: GrantFiled: June 29, 2015Date of Patent: April 24, 2018Assignee: ASML Netherlands B.V.Inventors: Alok Verma, Hugo Augustinus Joseph Cramer
-
Patent number: 9927374Abstract: An optical scanning assembly for use in inspecting a channel is provided. The assembly includes a housing and an inspection probe that selectively advances from the housing along an axis. The probe includes a light source that directs light towards at least one side wall of the channel and a light detector that receives the light reflected from the side wall. The assembly further includes a controller in communication with the inspection probe. The controller obtains a first optical length measurement for the light reflected from the side wall when the inspection probe is in a first position along the axis within the channel, obtain a second optical length measurement for the light reflected from the side wall when the inspection probe is in a second position along the axis within the channel, and compare the first and second optical length measurements to determine variations in a geometry of the channel.Type: GrantFiled: June 10, 2015Date of Patent: March 27, 2018Assignee: The Boeing CompanyInventors: Morteza Safai, Jeffrey G. Thompson
-
Patent number: 9841689Abstract: A method is provided that comprises printing FEM wafers having different predefined focus offsets and multiple corresponding sites, measuring signals from the sites, and quantifying a focus inaccuracy by comparing the measured signals from the corresponding sites across the wafers.Type: GrantFiled: August 21, 2015Date of Patent: December 12, 2017Assignee: KLA-Tencor CorporationInventors: Vladimir Levinski, Daniel Kandel, Yoel Feler, Nadav Gutman
-
Patent number: 9799117Abstract: A method for processing data and an apparatus thereof are provided. The method includes: projecting a first structure light and a second structure light onto a surface of a target object, wherein the first structure light is a stripe-structure light; capturing a first image comprising the target object; detecting first image information corresponding to the first structure light in the first image, wherein the first image information is stripe image information; detecting second image information corresponding to the second structure light in the first image; and obtaining a depth of the target object based on the first image information and the second image information.Type: GrantFiled: August 14, 2014Date of Patent: October 24, 2017Assignee: Lenovo (Beijing) Co., Ltd.Inventors: Ke Chen, Manjun Xiao, Wenjing Liu, Chen Yang, Rongyao Fu, Qian Ma
-
Patent number: 9797712Abstract: A method for determining the position of at least one edge of an object, in particular a strand, comprises illuminating the object using light from at least one coherent light source, wherein diffraction borders are generated on both geometric boundaries of the shadow caused by the object. The method also includes recording the spatial intensity profile of at least one diffraction border using at least one single or multi line optical sensor, differentiating the at least one recorded intensity profile with respect to location and plotting it using a squared location axis, and comparing the at least one recorded intensity profile, differentiated with respect to location and plotted using a squared location axis, to at least one periodic reference intensity profile. The position of at least one edge of the object is determined on the basis of the completed comparison.Type: GrantFiled: October 9, 2013Date of Patent: October 24, 2017Assignee: Sikora AGInventors: Werner Blohm, Harald Sikora
-
Patent number: 9768084Abstract: In one aspect of the present disclosure, a method is provided, the method including providing a test region in an upper surface region of a semiconductor substrate, forming a plurality of trenches in the test region, the trenches of the plurality of trenches having at least one of a varying width, a varying length, and a varying bridge between adjacent trenches, determining depth values of the trenches, and evaluating the risk of defects of gate electrodes to be formed on the basis of the depth values.Type: GrantFiled: March 21, 2016Date of Patent: September 19, 2017Assignee: GLOBALFOUNDRIES Inc.Inventors: Elliot John Smith, Nigel Chan
-
Patent number: 9557523Abstract: A target object has an upper surface including a first surface and a second surface located below the first surface. A method of focusing an optical system includes: measuring a surface position of the first surface; measuring a surface position of the second surface; obtaining, based on a measurement results of the surface position of the first surface, an in-focus condition in which the optical system is focused on the first surface; obtaining information about a step amount between the first surface and the second surface based on the measurement results of the surface positions of the first surface and the second surface; and focusing the optical system on the second surface based on the in-focus condition and the information about the step amount.Type: GrantFiled: June 2, 2014Date of Patent: January 31, 2017Assignee: CANON KABUSHIKI KAISHAInventor: Hiromi Suda
-
Patent number: 9558436Abstract: A method includes identifying one or more codewords of a bit sequence that fail to satisfy at least one codeword constraint. The method also includes removing the one or more codewords from the bit sequence to generate a punctured bit sequence. The method further includes determining whether the punctured bit sequence is symmetric. The method includes, in response to determining that the punctured bit sequence is symmetric, generating a hermitian symmetric codebook primitive based at least in part on the punctured bit sequence, where the hermitian symmetric codebook primitive is useable to form a diffractive optical element (DOE) of a structured light depth sensing system.Type: GrantFiled: September 19, 2014Date of Patent: January 31, 2017Assignee: Qualcomm IncorporatedInventors: James Wilson Nash, Kalin Mitkov Atanassov, Stephen Michael Verrall
-
Patent number: 9436099Abstract: In order to determine whether an exposure apparatus is outputting the correct dose of radiation and its projection system is focusing the radiation correctly, a test pattern is used on a mask for printing a specific marker onto a substrate. This marker is then measured by an inspection apparatus, such as a scatterometer, to determine whether there are errors in focus and dose and other related properties. The test pattern is configured such that changes in focus and dose may be easily determined by measuring the properties of a pattern that is exposed using the mask. The test pattern may be a 2D pattern where physical or geometric properties, e.g., pitch, are different in each of the two dimensions. The test pattern may also be a one-dimensional pattern made up of an array of structures in one dimension, the structures being made up of at least one substructure, the substructures reacting differently to focus and dose and giving rise to an exposed pattern from which focus and dose may be determined.Type: GrantFiled: May 9, 2014Date of Patent: September 6, 2016Assignee: ASML Netherlands B.V.Inventors: Christian Marinus Leewis, Hugo Augustinus Joseph Cramer, Marcus Adrianus Van De Kerkhof, Johannes Anna Quaedackers, Christine Corinne Mattheus
-
Patent number: 9322640Abstract: Optical measuring systems for measuring geometrical parameters of nano-objects and methods of measuring a critical size (CS) are provided. The optical method of measuring the CS includes selecting parameters of an optic scheme and an illumination condition; recording a set of nanostructure images corresponding to various wavelengths with various defocusing levels of scattered radiation; calculating a plurality of sets of images of a nanostructure with various defocusing levels, corresponding to various wavelengths of the scattered radiation with CS values within a known range; and comparing a set of measured images of the nanostructure with the sets of the calculated images and determining a best approximate value of the CS values.Type: GrantFiled: August 7, 2013Date of Patent: April 26, 2016Assignee: SAMSING ELECTRONICS CO., LTD.Inventors: Sergey Nikolaevich Koptyaev, Maxim Vladimirovich Ryabko, Alexander Vyacheslavovich Shcherbakov, Alexey Dmitrievich Lantsov
-
Patent number: 9299623Abstract: An apparatus for performing run-to-run control and sampling optimization in a semiconductor manufacturing process includes at least one control module. The control module is operative: to determine a process output and corresponding metrology error associated with an actual metrology for a current processing run in the semiconductor manufacturing process; to determine a predicted process output and corresponding prediction error associated with a virtual metrology for the current processing run; and to control at least one parameter corresponding to a subsequent processing run as a function of the metrology error and the prediction error.Type: GrantFiled: November 8, 2012Date of Patent: March 29, 2016Assignee: International Business Machines CorporationInventors: Robert J. Baseman, Jingrui He, Emmanuel Yashchin, Yada Zhu
-
Patent number: 9280057Abstract: An alignment measurement system measures an alignment target on an object. A measurement illuminates the target and is reflected. The reflected measurement beam is split and its parts are differently polarized. A detector receives the reflected measurement beam. A processing unit determines alignment on the basis of the measurement beam received by the detector. An alternative arrangement utilizes an optical dispersive fiber to guide a multi-wavelength measurement beam reflected from the object to a detector.Type: GrantFiled: May 29, 2015Date of Patent: March 8, 2016Assignee: ASML Netherlands B.V.Inventors: Franciscus Godefridus Casper Bijnen, David Deckers, Sami Musa
-
Patent number: 9276369Abstract: According to one embodiment, one of two connectors, and a circuit board on which the other of the connectors is mounted are prepared. The one of the connectors has an engagement portion. The other of the connectors has an elastically deformable engagement detent. The engagement detent can go over the engagement portion and be engaged with the engagement portion. One of the connectors is fitted to the other of the connectors. A portion of the electric equipment is imaged by a camera. A piece of data which changes is measured from an obtained picture image. A deformation of the engagement detent occurs with going-up of the engagement detent onto the engagement portion. Whether or not the connectors are properly fitted is determined. Fitting of the connectors is performed again when it is determined that the connectors are not properly fitted.Type: GrantFiled: February 20, 2013Date of Patent: March 1, 2016Assignee: Kabushiki Kaisha ToshibaInventors: Hirofumi Kurita, Noriyasu Kashima, Tomohiro Shimamoto
-
Patent number: 9240360Abstract: A method for run-to-run control and sampling optimization in a semiconductor manufacturing process includes the steps of: determining a process output and corresponding metrology error associated with an actual metrology for a current processing run in the semiconductor manufacturing process; determining a predicted process output and corresponding prediction error associated with a virtual metrology for the current processing run; and controlling at least one parameter corresponding to a subsequent processing run as a function of the metrology error and the prediction error.Type: GrantFiled: July 25, 2012Date of Patent: January 19, 2016Assignee: International Business Machines CorporationInventors: Robert Jeffrey Baseman, Jingrui He, Emmanuel Yashchin, Yada Zhu
-
Patent number: 9221128Abstract: A method of inspecting a solder joint through which a lead of a semiconductor device is mounted on a printed circuit board is disclosed. The method includes setting an estimated solder joint region at an outside of an end of the lead of the semiconductor device, capturing an image of the estimated solder joint region, calculating a height of solder joint in the estimated solder joint region by using the captured image of the estimated solder joint region, and determining whether the solder joint is defective by comparing the height of the solder joint in the estimated solder joint region with a reference height of a solder joint, which is previously set. According to the method, reliability of inspection is enhanced regardless of environmental noises.Type: GrantFiled: November 6, 2013Date of Patent: December 29, 2015Assignee: KOH YOUNG TECHNOLOGY INC.Inventor: Joong-Ki Jeong
-
Patent number: 9217669Abstract: The present invention provides a one-dimensional global rainbow measurement device and a measurement method. The measurement device comprises three parts, i.e., a laser emission unit, a signal collection unit and a signal processing unit. The laser emission unit is modulated to be a light sheet by a laser beam emitted by a laser, and configured to irradiate droplets in a spray field to generate rainbow signals. The signal collection unit is configured to separately image, by an optical system unit, the rainbow signals at measurement points of different height onto different row pixels of a CCD signal collector. The signal processing unit is configured to convert the received rainbow signals and process by a computer the rainbow signals in a form of data to obtain the measured values.Type: GrantFiled: May 10, 2013Date of Patent: December 22, 2015Assignee: ZHEJIANG UNIVERSITYInventors: Xuecheng Wu, Kefa Cen, Zhihua Wang, Xiang Gao, Linhong Chen, Kunzan Qiu, Yingchun Wu, Haoyu Jiang
-
Patent number: 9194813Abstract: Method for detecting and evaluating the protrusions that appear on cords coming from a twisting/rubberizing process, by the digital processing of the image of a layer of cord formed by a number of turns wound around the core of a spool (4), which method comprises the steps during which: A) the raw digital image of the surface of the layer of cord over one complete revolution of the spool is taken using a linear camera (1); B) the raw image is displayed flat so as to limit the influence of the variations in lighting and in the brightness of the wires; C) the flattened image is segmented so as to reveal the dark areas that contain protrusion areas; D) the segmented image is a processed using a series of morphological processing operations in order to separate and select the shapes likely to represent protrusions and areas likely to represent shadows; and E) an evaluation value is assigned to the final image obtained and the evaluation value is compared with a threshold value.Type: GrantFiled: October 4, 2010Date of Patent: November 24, 2015Assignees: COMPAGNIE GENERALE DES ETABLISSEMENTS MICHELIN, Michelin Recherche et Technique S.A.Inventors: Marc Calvet, Jean-Paul Zanella, Davy Vernier
-
Patent number: 9161679Abstract: The invention relates to an image processing system, containing an optical digital camera (1) having means (4) that produce information representative of a specified geometric distance within the image using laser light in the detection range of the optical digital camera (1), said information representative of the specified geometric distance being processed together with the image information. Separating means (8) are arranged downstream of the digital camera, said separating means separating the information representative of the specified geometric distance from the image information. Subsequent evaluating means produce a distance value therefrom. Image storage means (9) additionally arranged downstream of the separating means are used to store the recorded image information.Type: GrantFiled: August 17, 2010Date of Patent: October 20, 2015Inventors: Olaf Christiansen, Eckhard Löhde
-
Patent number: 9140998Abstract: Methods are disclosed for measuring target structures formed by a lithographic process on a substrate. A grating structure within the target is smaller than an illumination spot and field of view of a measurement optical system. The optical system has a first branch leading to a pupil plane imaging sensor and a second branch leading to a substrate plane imaging sensor. A spatial light modulator is arranged in an intermediate pupil plane of the second branch of the optical system. The SLM imparts a programmable pattern of attenuation that may be used to correct for asymmetries between the first and second modes of illumination or imaging. By use of specific target designs and machine-learning processes, the attenuation patterns may also be programmed to act as filter functions, enhancing sensitivity to specific parameters of interest, such as focus.Type: GrantFiled: November 10, 2011Date of Patent: September 22, 2015Assignee: ASML Netherlands B.V.Inventors: Hendrik Jan Hidde Smilde, Arno Jan Bleeker, Patrick Warnaar, Willem Marie Julia Marcel Coene, Michael Kubis
-
Patent number: 9046385Abstract: An alignment measurement system measures an alignment target on an object. A measurement illuminates the target and is reflected. The reflected measurement beam is split and its parts are differently polarized. A detector receives the reflected measurement beam. A processing unit determines alignment on the basis of the measurement beam received by the detector. An alternative arrangement utilizes an optical dispersive fiber to guide a multi-wavelength measurement beam reflected from the object to a detector.Type: GrantFiled: August 10, 2011Date of Patent: June 2, 2015Assignee: ASML Netherlands B.V.Inventors: Franciscus Godefridus Casper Bijnen, Sami Musa, David Deckers
-
Publication number: 20150146218Abstract: A method of detecting an overall dimension of a plate-shaped workpiece to be processed on a processing machine by a contactless-acting sensor includes moving the workpiece by a motion device of the processing machine in a predetermined direction until the sensor detects a first workpiece edge by a first change of state, detecting a first position of the workpiece where the first change of state happens by an evaluation device connected to the sensor, moving the workpiece by the motion device in a direction toward a second workpiece edge until the sensor detects the second workpiece edge by a second change of state, detecting a second position of the workpiece where the second change of state happens by the evaluation device, and determining an overall dimension of the workpiece by a determination of a distance between the first position and the second position of the workpiece.Type: ApplicationFiled: November 26, 2014Publication date: May 28, 2015Inventor: Stefan Kerscher
-
Patent number: 9038434Abstract: In a method for calibrating a star probe of an image measuring machine, the star probe includes one or more probe heads. Probe configuration information for the star probe is configured when there is no probe configuration file of the star probe stored in a storage device of the image measuring machine, and one of the probe heads to be calibrated is selected from the star probe. The method calibrates a radius value of the selected probe head, and calibrates the deviation between the center point of the selected probe head and the focus of the camera lens. The method further generates a star probe model of the star probe according to the probe configuration information and the probe calibration information, and displays the star probe model of the star probe on a display device of the image measuring machine.Type: GrantFiled: July 23, 2012Date of Patent: May 26, 2015Assignees: HONG FU JIN PRECISION INDUSTRY (ShenZhen) CO., LTD., HON HAI PRECISION INDUSTRY CO., LTD.Inventors: Chih-Kuang Chang, Zheng-Cai She, Zhong-Kui Yuan, Zhi-Jun Zou, Dong-Hai Li
-
Patent number: 9041918Abstract: A handheld distance measuring instrument includes a first emission device, a first reception device and a second reception device. The first emission device is configured to emit an optical measurement radiation onto a target object. The first reception device is configured to detect the radiation returning from the target object. The second reception device is configured in order to detect a reference radiation internal to the instrument. The reception devices respectively include a first detector unit, a second detector unit, a first time measurement unit, and a second time measurement unit. The first time measurement unit is configured to be connected selectively to the first detector unit and to the second detector unit. The second time measurement unit is configured to be connected selectively to the first detector unit and to the second detector unit.Type: GrantFiled: December 17, 2013Date of Patent: May 26, 2015Assignee: Robert Bosch GmbHInventors: Andreas Eisele, Bernd Schmidtke, Reiner Schnitzer, Oliver Wolst
-
Patent number: 9030676Abstract: The spatial information detection device emits, to a space including an intended area, signal light defined as light modulated with a modulation signal defined as a square wave signal having high and low level periods appearing alternately, each of the periods having its length randomly selected from integral multiples of a unit time period. The device generates signal electric charges by accumulating electric charges generated in response to light from the space in a collection time period determined by a demodulation signal defined as a signal having the same waveform as that of the modulation signal or that of the inverted modulation signal. The device corrects, using correction information regarding an effect caused by light from an unintended area, the amount of signal electric charges as an amount of intended electric charges produced in response to light from the intended area, thereby generating spatial information.Type: GrantFiled: February 21, 2012Date of Patent: May 12, 2015Assignee: Panasonic Intellectual Property Management Co., Ltd.Inventors: Kenichi Murakami, Yusuke Hashimoto
-
Patent number: 9019477Abstract: A laser scanner comprises a light projecting optical system for projecting a distance measuring light, a deflecting optical member for deflecting and projecting the distance measuring light to a measurement area, a distance measuring unit for carrying out measurement based on a reflection light and for acquiring distance data of the measurement area, a second image pickup unit capable of continuously acquiring image data including the measurement area, and a control unit. The control unit has a first image processing unit for acquiring a three-dimensional image based on the image data and on the distance data, and also has a second image processing unit for detecting a mobile object by comparing image data being adjacent to each other in terms of time. The control unit controls the distance measuring unit so that measurement of the mobile object detected in the measurement area is restricted by the second image processing unit.Type: GrantFiled: March 27, 2012Date of Patent: April 28, 2015Assignee: Kabushiki Kaisha TOPCONInventors: Masae Matsumoto, Tadayuki Ito, Ken-ichiro Yoshino
-
Publication number: 20150103335Abstract: A method and apparatus for dimensioning and, optionally, weighing an object. A platform with a surface is used for supporting an object. A user selects between two different dimensioning devices of the apparatus. The first device employs three distance sensors to determine a distance between each of the distance sensors and a side of an object. The second device includes a movable gate which is passed over and about an object or objects on the platform. Sensor arrays, such as paired, aligned light emitter and receiver arrays, are used in combination with a plurality of sensed gate positions to determine the dimensions of the objects(s) as the gate passes around the object(s) based on whether or not light from an emitter on one side of the gate reaches a light receiver on another, opposing side of the gate.Type: ApplicationFiled: December 22, 2014Publication date: April 16, 2015Inventors: Robert L. Kennington, Eve A. Carlsruh, Craig R. Bailey, Marie L. Midboe, Brandon M. Taylor, Randy B. Neilson
-
Patent number: 9007568Abstract: A distance detecting induction device includes a casing, a circuit board within the casing, and a pair of focusing lenses provided at respective openings in the casing. The distance detecting induction device further includes an emitting device including an infrared light emitting diode for emitting infrared light rays to the emitting lens and a receiving device including a distance detection induction module for inducing reflected light rays focused by the receiving lens. The distance detecting induction device further includes an emitting light ray guiding device arranged between the emitting lens and the emitting device. The guiding device includes a small circular hole provided at a position of the emitting device and a big circular hole provided at a position of the emitting lens.Type: GrantFiled: August 27, 2009Date of Patent: April 14, 2015Assignee: Shanghai Kohler Electronics, Ltd.Inventors: Qiaomei Tang, Guofeng Chen
-
Patent number: 8994925Abstract: Optical range finders are configured to transmit optical bursts toward a target and detect a corresponding received burst. DC offset in the received burst due to square law detection can be offset based on a difference between high pass and low pass filtered portions of the received burst. Edge records associated with bursts can be obtained, and correlated with a reference signal or waveform to obtain a range estimate.Type: GrantFiled: March 27, 2012Date of Patent: March 31, 2015Assignee: PulsedLight, Inc.Inventor: Robert Alden Lewis
-
Patent number: 8994944Abstract: In a method of determining the focus of a lithographic apparatus used in a lithographic process on a substrate, the lithographic process is used to form a structure on the substrate, the structure having at least one feature which has an asymmetry in the printed profile which varies as a function of the focus of the lithographic apparatus on the substrate. A first image of the periodic structure is formed and detected while illuminating the structure with a first beam of radiation. The first image is formed using a first part of non-zero order diffracted radiation. A second image of the periodic structure is formed and detected while illuminating the structure with a second beam of radiation. The second image is formed using a second part of the non-zero order diffracted radiation which is symmetrically opposite to the first part in a diffraction spectrum.Type: GrantFiled: January 7, 2014Date of Patent: March 31, 2015Assignee: ASML Netherlands B.V.Inventors: Hugo Augustinus Joseph Cramer, Arie Jeffrey Den Boef, Henricus Johannes Lambertus Megens, Hendrik Jan Hidde Smilde, Adrianus Johannes Hendrikus Schellekens, Michael Kubis
-
Patent number: 8988663Abstract: Using a hand-held range finding device to range an object in a field of view is difficult due to user-induced jitter. In particular, user-induced jitter introduces uncertainty as to which object in a field of view is actually ranged. Current approaches attempt to mitigate user-induced jitter by requiring a user to mount the hand-held range finding device onto a stabilizing device (e.g., a tripod). However, such approaches require the user to carry additional equipment. Embodiments of the present disclosure enable the user to visually confirm which object in a field of view is actually ranged during a range finding event by generating a composite image that includes a visual representation of a laser pulse emitted by the range finding device reflecting off an object in the field of view. Advantageously, disclosed embodiments provide true hand-held range finding capabilities without requiring the use of stabilization assistance techniques.Type: GrantFiled: January 22, 2013Date of Patent: March 24, 2015Assignee: Raytheon CompanyInventors: Brent L. Sisney, Bryan K. Hawk, Robert P. Francis, James A. McIntosh
-
Patent number: 8984730Abstract: A system for rotating a turbine shell includes a first platform and a first trunnion rotatably connected to the first platform. A second platform is separated from the first platform, and a second trunnion is separated from the first trunnion and rotatably connected to the second platform. The system further includes structure for rotating the first trunnion.Type: GrantFiled: February 7, 2012Date of Patent: March 24, 2015Assignee: General Electric CompanyInventors: James Bradford Holmes, Randall Stephen Corn
-
Patent number: 8982330Abstract: A method and an apparatus of profiling a surface are disclosed. The method comprises projecting slit pattern light toward a target object in at least two directions in sequence to obtain pattern images reflected on the target object, obtaining heights by using the pattern images according to the directions, obtaining vector fields showing a direction of maximum variation of height, obtaining confidence indexes of the heights corresponding to the at least two directions, obtaining integrated vector fields by using the confidence indexes and the vector fields, and calculating height of each position of the target object by using the integrated vector fields. Therefore, accuracy is enhanced.Type: GrantFiled: November 17, 2011Date of Patent: March 17, 2015Assignee: Koh Young Technology Inc.Inventor: Evgeny Vorobyev
-
Patent number: 8982329Abstract: End of line effect can occur during manufacture of components using a lithographic apparatus. These end of line effects can result in line end shortening of the features being manufactured. Such line end shortening may have an adverse impact on the component being manufactured. It is therefore desirable to predict and/or monitor the line end shortening. A test pattern is provided that has two separate areas such that, as designed, when the two areas are illuminated with radiation (for example from an angle-resolved scatterometer) they result in diffused radiation with asymmetry that is equal in sign to each other, but opposite in magnitude. When the test pattern is actually manufactured, line end shortening occurs, and so the asymmetry of the two areas are not equal and opposite. From the measured asymmetry of the manufactured test pattern, the amount of line end shortening that has occurred can be estimated.Type: GrantFiled: April 22, 2009Date of Patent: March 17, 2015Assignee: ASML Netherlands B.V.Inventors: Maurits Van Der Schaar, Arie Jeffrey Den Boef, Richard Johannes Franciscus Van Haren, Marcus Adrianus Van De Kerkhof
-
Publication number: 20150070713Abstract: A method of fabricating an aberration monitor on a production mask used in photolithographic patterning of a semiconductor substrate is provided. The method may include placing a production mask within a nanomachine repair tool and generating, using the nanomachine repair tool, a phase shifting pattern within a region of the production mask.Type: ApplicationFiled: September 12, 2013Publication date: March 12, 2015Applicant: International Business Machines CorporationInventor: Gregory R. McIntyre
-
Patent number: 8976340Abstract: A system for landing or docking a mobile platform is enabled by a flash LADAR sensor having an adaptive controller with Automatic Gain Control (AGC). Range gating in the LADAR sensor penetrates through diffuse reflectors. The LADAR sensor adapted for landing/approach comprises a system controller, pulsed laser transmitter, transmit optics, receive optics, a focal plane array of detectors, a readout integrated circuit, camera support electronics and image processor, an image analysis and bias calculation processor, and a detector array bias control circuit. The system is capable of developing a complete 3-D scene from a single point of view.Type: GrantFiled: April 16, 2012Date of Patent: March 10, 2015Assignee: Advanced Scientific Concepts, Inc.Inventors: Patrick Gilliland, Bob Koseluk, Steve Penniman, Brad Short, Joe Spagnolia, Roger Stettner
-
Patent number: 8970827Abstract: A fast spatial light modulator based on a linear MEMS ribbon array enables a depth capture system to operate in structured light and time-of-flight modes. Time-of-flight depth information may be used to phase unwrap structured light depth information. Combined structured light and time-of-flight systems offer precise depth resolution over a wide range of distances.Type: GrantFiled: September 20, 2013Date of Patent: March 3, 2015Assignee: Alces Technology, Inc.Inventors: David M Bloom, Matthew A Leone
-
Publication number: 20150055144Abstract: A high-resolution imaging and processing method and system for determining a geometric dimension of a part is provided. The method includes directing at least one plane of collimated radiation at a surface of a supported part. Each of the planes is occluded by the part to create unobstructed first and second planar portions of the plane of radiation passing by and not blocked by the supported part and to cast a radiation shadow of the supported part. Each of the first and second planar portions has a width and contains an amount of radiation which is representative of a respective geometric dimension of the part to be determined. The method includes increasing the width and decreasing the intensity of the first and second planar portions imaged on first and second predetermined measuring areas, respectively.Type: ApplicationFiled: August 21, 2013Publication date: February 26, 2015Applicant: GII Acquisition, LLC dba General Inspection, LLCInventors: Christopher C. Fleming, Michael G. Nygaard
-
Publication number: 20150055145Abstract: A high-resolution imaging and processing method and system for increasing the range of a geometric dimension of a part that can be determined are provided. The method includes directing at least one plane of collimated radiation at a surface of the part. Each of the planes is occluded by the part to create unobstructed first and second planar portions of the plane of radiation. Each of the first and second planar portions has a width and contains an amount of radiation which is representative of a respective geometric dimension of the supported part to be determined. The method includes increasing the width and decreasing the intensity of the first and second planar portions imaged on a plurality of predetermined measuring areas to obtain respective elongated planar portions and to produce respective electrical signals. The electrical signals are processed to determine the geometric dimension with enhanced accuracy.Type: ApplicationFiled: August 21, 2013Publication date: February 26, 2015Applicant: GII Acquisition, LLC dba General Inspection, LLCInventors: Christopher C. Fleming, Michael G. Nygaard
-
Publication number: 20150049345Abstract: A three-dimensional measuring apparatus 1 projects slit light from a projector 7 onto a work 2 and a stereo camera 5 captures an image of the work projected by the slit light. A control apparatus 10 of the three-dimensional measuring apparatus 1 temporarily identifies a correspondence between a bright line 4j on a first image of the captured stereo image and a light-section plane 6Pj and projects the bright line 4j onto the light-section plane 6Pj. The bright line projected onto the light-section plane 6Pj is projected onto a second image. The control apparatus 10 calculates the level of similarity between a bright line 4jX projected onto the second image and a bright line on the second image and determines a result of identified correspondence relationship between the bright line 4jX and the bright line on the second image.Type: ApplicationFiled: March 22, 2013Publication date: February 19, 2015Inventor: Hiroshi Miyagawa
-
Publication number: 20150049346Abstract: Apparatus and methods of determining a position of a height sensor in a dispensing system. The dispensing system includes a dispenser, height sensor, camera, and a calibration device configured to receive a signal from the height sensor. The calibration device may include an optical sensor that generates an alignment signal in response to receiving light from the height sensor and/or a fiducial that causes the height sensor to generate the alignment signal in response to a detected height change. The alignment signal is used to automatically determine the position at which the height sensor is aligned with the calibration device. The position of the height sensor relative to a camera is determined by aligning the camera with the calibration device and recording its position. The recorded coordinates of the camera are compared to the coordinates of the height sensor when the height sensor is automatically aligned with the calibration device.Type: ApplicationFiled: October 29, 2014Publication date: February 19, 2015Inventors: Floriana Suriawidjaja, Todd S. Weston
-
Patent number: 8958056Abstract: A triangulation light sensor includes at least one light transmitter for transmitting a light signal into a detection zone, a light receiver having a plurality of receiver elements for receiving light from the detection zone reflected diffusely and/or specularly, and a reception optics arranged between the detection zone and the light receiver in the beam path, with the position of a light spot produced on the light receiver in a triangulation direction by the reflected light resulting in dependence on the distance of the object. The reception optics includes at least one multisegmented lens element having a plurality of lens segments with mutually spaced apart optical axes in the triangulation direction and at least one freeform lens element or one diffractive-optical element having a multisegmented lens element having a plurality of lens segments with optical axes spaced apart from one another in the triangulation direction.Type: GrantFiled: February 15, 2013Date of Patent: February 17, 2015Assignee: Sick AGInventors: Friedhelm Wiethege, Gerhard Merettig
-
Patent number: 8958079Abstract: A system for inspecting railroad ties in a railroad track includes a light generator, an optical receiver and a processor. The light generator is oriented to project a beam of light across the railroad track while moving along the railroad track in a travel direction. The optical receiver is oriented to receive at least a portion of the beam of light reflected from the railroad track and configured to generate image data representative of a profile of at least a portion of the railroad track. The processor is configured to analyze the image data by applying one or more algorithms configured to find boundaries of a railroad tie and determine one or more condition metrics associated with the railroad tie.Type: GrantFiled: March 12, 2013Date of Patent: February 17, 2015Assignee: Georgetown Rail Equipment CompanyInventors: John J. Kainer, Charles W. Aaron, Gregory T. Grissom, Antonio R. Mauricio, Jeb E. Belcher, David M. Pagliuco, Wilson T. Wamani, John A. Nagel, II, Christopher M. Villar, Steven C. Orrel, Zechariah Bertilson
-
Patent number: 8942458Abstract: A method for distinguishing and sorting cells characterized by comprising distinguishing and sorting a specific cell mass or a part of the cells in the cell mass with the use of transmitted light data reflecting the morphological characteristics of the cells such as size and shape optionally together with side-scattering light data reflecting the characteristics of the internal structure of the cells. The part of the cells in the specific cell mass as described above are at the G1 stage or at a part of the M stage in the cell cycle. A part of the cells at the G1 stage are referred to as the left bottom line in an analytical dispersion diagram of the cells wherein the abscissa indicates the transmitted light data, while a part of the cells at the M stage are referred to as the right bottom line in the analytical dispersion diagram of the cells wherein the abscissa indicates the transmitted light data.Type: GrantFiled: June 19, 2009Date of Patent: January 27, 2015Assignee: Furukawa Electric Co., Ltd.Inventors: Toru Takahashi, Ken Tsukii, Jie Xu
-
Publication number: 20150022827Abstract: Methods, systems, and devices for establishing a wear state of a cutting nozzle of a laser processing machine. An actual state of the cutting nozzle shape is established by a three-dimensional evaluation performed by a nozzle shape sensor and an associated controller. The established actual state of the cutting nozzle shape is compared to a desired state of the cutting nozzle shape, and the wear state of the cutting nozzle is established based on a result of the comparison.Type: ApplicationFiled: July 17, 2014Publication date: January 22, 2015Inventors: Ulrich Meindl, Boris Regaard
-
Publication number: 20150015898Abstract: A method for measuring three-dimensional coordinates of an object surface with a line scanner, the line scanner including a projector and a camera, the projector projecting onto the object surface a first line of light at a first time and a second line of light at a second time, the integrated energy of the second line of light different than the first line of light, the camera capturing the reflections of the first line of light and the second line of light, a processor processing the collected data after discarding portions of the image that are saturated or dominated by electrical noise, and determining three-dimensional coordinates of the object surface based at least in part on the processed data and on a baseline distance.Type: ApplicationFiled: July 11, 2014Publication date: January 15, 2015Inventors: Paul C. Atwell, Keith G. Macfarlane
-
Publication number: 20150015897Abstract: Various embodiments include systems adapted to detect a target within a machine casing. In some embodiments systems include a target attached to a component within a dynamoelectric machine casing, a conduit spanning from an outer surface of the dynamoelectric machine casing to an inner surface of the dynamoelectric machine casing and an optical detection device external to the outer surface of the dynamoelectric machine casing and configured to detect the target attached to the component through the conduit.Type: ApplicationFiled: July 10, 2013Publication date: January 15, 2015Inventor: Hemanth Gudibande Sathya Kumar
-
Publication number: 20150009510Abstract: A distance measure between a beginning and an end of a material strip wound onto a body in a tangential direction can be determined by creating a height profile of a surface of the material strip, which covers the beginning and the end of the wound material strip in the tangential direction. If a position value of the beginning of the material strip is determined in the created height profile, the distance measure can be determined using this position value and the height profile covering the end of the material strip.Type: ApplicationFiled: September 23, 2014Publication date: January 8, 2015Inventors: Guenther KOSTKA, Peter SCHMITT, Oliver SCHOLZ, Ulf HASSLER
-
Patent number: 8928896Abstract: A method and apparatus for dimensioning and, optionally, weighing an object. A platform with a surface is used for supporting an object. A user selects between two different dimensioning devices of the apparatus. The first device employs three distance sensors to determine a distance between each of the distance sensors and a side of an object. The second device includes a movable gate which is passed over and about an object or objects on the platform. Sensor arrays, such as paired, aligned light emitter and receiver arrays, are used in combination with a plurality of sensed gate positions to determine the dimensions of the objects(s) as the gate passes around the object(s) based on whether or not light from an emitter on one side of the gate reaches a light receiver on another, opposing side of the gate.Type: GrantFiled: February 6, 2012Date of Patent: January 6, 2015Assignee: Quantronix, Inc.Inventors: Robert L. Kennington, Eve A. Carlsruh, Craig R. Bailey, Marie L. Midboe, Brandon M. Taylor, Randy Brown Neilson