Abstract: A device capable of simultaneous independent motion measurement of multiple probes in an atomic force microscope includes at least two cantilever arms arranged in parallel. The end of each cantilever arm is provided with a needle tip. The surface of each cantilever arm is provided with a grating structure with a periodic distribution rule for reflecting laser irradiated on the grating structure and receiving the laser through reflected light detectors. The discrimination and motion measurement includes the steps of irradiating the measurement laser of different wavelengths on the back surfaces of multiple probes through the same light path at the same time, adopting the grating structures of different feature sizes as physical labels of the multiple probes and reflecting high-order reflected light of the laser of different wavelengths by the grating structures at different angles to separate the light path.

Abstract: A see-through type display device includes an image generation unit configured to emit image light, a light coupling unit configured to generate off-axis aberration in the image light, and a correction aberration generation unit configured to generate correction aberration, opposite to the off-axis aberration, in the image light emitted from the image generation unit, wherein the correction aberration generation unit is disposed on an optical path of the image light between the image generation unit and the light coupling unit, and wherein the light coupling unit is disposed off-axis relative to the image light.

Abstract: A method of manufacturing a wafer with an integrated circuit (IC) layout includes receiving a first plurality of pixels, wherein each of the pixels corresponds to a portion of the IC layout and includes data members. The method further includes transforming the first plurality of pixels into a second plurality of control signals, wherein at least some of the control signals include both a data member of one of the pixels and another data member of another one of the pixels. The method further includes transferring the control signals to a third plurality of mirrors, wherein the mirrors conditionally reflect an energy beam incident thereupon when coupled with the control signals.

Abstract: A system using an energy beam to expose patterns on a wafer includes first mirror elements, a multiplexer element, and second mirror elements. The first and second mirror elements are dynamically controlled to reflect the energy beam to the wafer. The first mirror elements are configured in a first chain having a first data input and a first data output. The multiplexer element includes a second data input, a third data input, a select input, and a second data output. The third data input is coupled to the first data output. The second mirror elements are configured in a second chain having a fourth data input.

Abstract: The present invention is directed to a color display comprising an electrophoretic fluid which comprises one or two types of pigment particles dispersed in a clear and colorless or clear and colored solvent, wherein said electrophoretic fluid is sandwiched between a common electrode and a plurality of driving electrodes. The driving electrodes are kept at a certain distance in order to expose a background layer.

Abstract: According to the present invention there is provided a method of projecting an image, the method comprising the steps of, providing light signal which is configured such that it can be projected onto a display surface to display an image; oscillating a first reflective surface, to scan the light signal over the display surface, using an actuator which is in operable co-operation with the first reflective surface, by applying a first actuation signal to the first reflective surface, wherein a rise time or fall time of the first actuation signal is inversely proportional to a resonant frequency of oscillation of the first reflective surface.

Abstract: A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.

Abstract: Disclosed herein is a camera module having a MEMS actuator and a driving method thereof, the camera module with a MEMS actuator, including, a MEMS actuator moving a lens with electrostatic force, for focus adjustment, an electrostatic capacity measurement unit measuring electrostatic capacity produced in the MEMS actuator, a foreign substance determination unit determining if foreign substances exist in the MEMS actuator, and outputting a trigger signal when a foreign substance exists, and a MEMS actuator drive unit driving the MEMS actuator to a reiterated vibration using the trigger signal outputted from the foreign substance determination unit.

Abstract: A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate may contain electronic circuitry fabricated on the backplane. The electronic circuitry is placed in electrical communication with the array of interferometric modulators and is configured to control the state of the array of interferometric modulators.

Abstract: A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate may contain electronic circuitry fabricated on the backplane. The electronic circuitry is placed in electrical communication with the array of interferometric modulators and is configured to control the state of the array of interferometric modulators.

Abstract: A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate may contain electronic circuitry fabricated on the backplane. The electronic circuitry is placed in electrical communication with the array of interferometric modulators and is configured to control the state of the array of interferometric modulators.

Abstract: A deformable reflective surface is disclosed that may be used with a retroreflector to provide a modulated retroreflector. The modulated retroreflector may be used in communication systems such as optical laser communication systems wherein an incident beam is reflected back to the source, as modulated by the modulated retroreflector. The deformable reflective surface uniformly reflects or disperses an incident light, depending on a deformation state of the surface. The different states of the deformable reflective surface permits modulation of the reflected beam, based on an input modulation signal that can contain voice or sensor data, for example. A sensor may be used to sense the incident beam and activate the retroreflector. The deformable reflective surface may be arranged to be switched between a diffractive reflective surface and a uniform reflective surface.

Abstract: A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate may contain electronic circuitry fabricated on the backplane. The electronic circuitry is placed in electrical communication with the array of interferometric modulators and is configured to control the state of the array of interferometric modulators.

Abstract: An apparatus includes micro-electromechanical (MEM) devices, a charge source, and a discharge mechanism. Each MEM device has different states based on a charged induced thereon. The charge source is to induce the charge thereon such that the MEM devices each enter one of the different states thereof. The discharge mechanism for the MEM devices is to discharge the induced thereon. The discharge mechanism includes one of a resistor for each MEM device and an ultraviolet (UV) light source. The resistor is to discharge the charge on its MEM device to ground. The UV light source is to emit photons onto the MEM devices, such that the photons discharge the charge on the MEM devices via photoelectric effect.

Abstract: The present invention discloses a method for processing a deformable element of a microstructure for reducing the plastic deformation by oxidizing the deformable element. The method of the present invention can be performed at a variety of stages of the fabrication and packaging processes.

Abstract: One embodiment of a display system includes a first array that defines multiple reflective devices each movable between an inactive position to reflect light to a light dump and an active position to reflect light to an imaging region, a second array that defines multiple reflective devices each movable between an inactive position to reflect light to the light dump and an active position to reflect light to the imaging region, and an activation device that projects an activation beam to the devices to move individual ones of the devices between the active position and the inactive position, wherein the first array, the second array and the activation device are housed within a single vacuum enclosure.

Abstract: An electronic device for at least partially displaying a pixel of an image, the device comprising first and second reflectors defining an optical cavity therebetween, the optical cavity being selective of an electromagnetic wavelength at an intensity by optical interference, the device having a concentric control structure comprising at least an inner and an outermost electrode, the optical cavity being controlled only by the inner electrode.

Abstract: Compositions comprising a matrix polymer and a mixture of monomers are used for making polymer mixtures containing the matrix polymer and a second polymer formed from the monomer mixture. Preferably, the matrix polymer comprises a polyester, polystyrene, polyacrylate, thiol-cured epoxy polymer, thiol-cured isocyanate polymer, or mixtures thereof. Preferably, the monomer mixture comprises a thiol monomer and at least one second monomer selected from the group consisting of ene monomer and yne monomer. The compositions may be used to fabricate optical elements such as lenses.

Abstract: An electronic device of an embodiment of the invention is disclosed that at least partially displays a pixel of a display image. The device includes a first reflector and a second reflector defining an optical cavity therebetween that is selective of a visible wavelength at an intensity. The device includes a mechanism to allow optical properties of the cavity to be varied such that the visible wavelength and/or the intensity are variably selectable in correspondence with the pixel of the displayable image. The device also includes one or more transparent deposited films, one or more absorbing layers, an integral micro-lens, and/or one or more anti-stiction bumps. The deposited films are over one of the reflectors, for self-packaging of the device. The absorbing layers are over one of the reflectors, to reduce undesired reflections. The integral micro-lens is over one of the reflectors, and the anti-stiction bumps are between the reflectors.

Abstract: An electronic device of an embodiment of the invention is for at least partially displaying a pixel of a displayable image. The electronic device includes a first reflector and a second reflector that define an optical cavity therebetween, and which is selective of a visible wavelength at an intensity by optical interference. The electronic device also includes a mechanism to allow optical properties of the optical cavity to be varied. The visible wavelength and/or the intensity are thus variably selectable in correspondence with the pixel of the displayable image.

Abstract: A light modulator assembly includes a substrate, a micro-electro mechanical semiconductor device (MEMS device) formed on the substrate, and a temperature control device coupled to the substrate and configured to maintain the MEMS device at or above an elevated threshold temperature.

Abstract: An electronic device of an embodiment of the invention is for at least partially displaying a pixel of a displayable image. The electronic device includes a first reflector and a second reflector that define an optical cavity therebetween, and which is selective of a visible wavelength at an intensity by optical interference. The electronic device also includes a charge-controlling mechanism to allow optical properties of the optical cavity to be varied by controlling a predetermined amount of charge stored on the first and the second reflectors. The visible wavelength and/or the intensity are thus variably selectable in correspondence with the pixel of the displayable image.

Abstract: A method of combining components to form an integrated device, wherein at least one first component is provided on a first surface of a sacrificial substrate, and at least one second component is provided on a first surface of a non-sacrificial substrate. At least one support structure is formed on at least one of the first surfaces of the sacrificial substrate, and the non-sacrificial substrate, respectively, such that said at least one support structure is extended outwardly from at least one of the first surfaces. The sacrificial substrate carrying the first component, and the non-sacrificial substrate carrying the second component, respectively, are bonded, so that the first and second surfaces will be facing one another with a distance defined by a thickness of the support structure. At least a part of the sacrificial substrate is removed. The first component and second components are interconnected.

Abstract: A UV-transmissable window assembly for a DMD device includes a UV-transmissable glass window provided in a frame. The window and frame are bonded together to preferably effect a hermetic seal therebetween. Optical coatings specific to the intended wavelength of light transmission are applied to the inner and outer surfaces of the glass window to reduce reflection and increase light transmission therethrough. The window assembly, and DMD provided with the same, is adapted for excellent transmission of ultraviolet light, even at the deep ultraviolet portion of the spectrum. The DMD window assembly has application in the medical arts, both surgery and device manufacture, in the production of integrated circuits (IC), and in other optical lithography applications, among other fields.

Abstract: A method and an apparatus for controlling exposure of a surface of a substrate in a process of structuring the substrate with light of a predetermined intensity are described, wherein the light is directed to the surface by means of a deflectable mirror. The intensity has a first maximum at a first deflection of the deflectable mirror, a first minimum at a second deflection of the deflectable mirror, a second maximum at a third deflection of the deflectable mirror, and a second minimum at a fourth deflection of the deflectable mirror. A signal representing the predetermined intensity, and a signal representing a threshold intensity are received, the threshold intensity being equal to or less than the intensity of the second maximum. It is determined whether the predetermined intensity is greater than the threshold intensity.

Abstract: An apparatus of one embodiment of the invention is disclosed that includes a number of micro-electromechanical (MEM) devices, a charge source, and at least one discharge path. Each MEM device has a plurality of different states based on a charge induced thereon. The charge source is to induce the charge thereon such that the MEM devices each enter one of the states. The at least one discharge path is for the plurality of MEM devices, and along which the charge induced thereon is dischargeable.

Abstract: The present invention provides a method for modulating light by a driven particle beam is disclosed. An optical beam is being sent to metal-dielectric structure so that the optical field partially transforms into a delayed electromagnetic wave, in a preferred embodiment into the surface evanescent mode, and the beam of charged particles, such as electrons, is also sent to said structure the way that the particle's kinetic energy partially transforms into energy of the delayed electromagnetic wave having the same phase-frequency characteristics as transformed field of optical beam at that, transformation of the optical beam and excitation of wave by particle beam commonly take place at the same small space region, which is localized by said metal-dielectric structure. Delayed electromagnetic wave, which is generated by particle beam, is summarized with the optical field, which is transformed on said structure.

Abstract: In one form of the invention, an apparatus for visually displaying a non-volatile message includes an integrated circuit having first circuitry. The apparatus also includes a package for the integrated circuit and a display affixed to the integrated circuit package. The first circuitry is coupled to the display and operable to be coupled to an electronic device by pins of the integrated circuit package and to write a non-volatile, visual image via the display responsive to receiving a message from the electronic device.

Abstract: A charge control circuit for controlling a micro-electromechanical device having a variable capacitance is disclosed. In one embodiment, a charge storage device is configured to store a charge amount. A switch circuit is configured to control the variable capacitance of the micro-electromechanical device by sharing the charge amount between the charge storage device and the micro-electromechanical device to equalize the charge storage device and the micro-electromechanical device to a same voltage.

Abstract: The present application discloses a micro-opto-electromechanical apparatus comprising a silicon wafer comprising a plurality of layers, a reflector formed in one of the plurality of layers, and a pattern on the reflector to focus or collimate an incident beam of radiation into a reflected beam.

Abstract: The present invention provides a method for modulating light by a driven particle beam is disclosed. An optical beam is being sent to metal-dielectric structure so that the optical field partially transforms into a delayed electromagnetic wave, in a preferred embodiment into the surface evanescent mode, and the beam of charged particles, such as electrons, is also sent to said structure the way that the particle's kinetic energy partially transforms into energy of the delayed electromagnetic wave having the same phase-frequency characteristics as transformed field of optical beam; at that, transformation of the optical beam and excitation of wave by particle beam commonly take place at the same small space region, which is localized by said metal-dielectric structure. Delayed electromagnetic wave, which is generated by particle beam, is summarized with the optical field, which is transformed on said structure.

Abstract: Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same are disclosed. The shaped electrodes utilize its three-dimensional geometry to shape an electric field for electrostatic actuation for MEMS devices. For example, the height, width, length, sidewall slope, and layout of the shaped electrodes can be used to provide an optimum electric field in moving a MEMS mirror device. The shaped electrodes can provide electrostatic actuation at a low operating voltage and provide an optimum electric field for maximum tilt or angular range of motion for a MEMS mirror device. The shaped electrodes can be fabricated simply by using a pillar wafer and an electrode wafer. The pillar wafer can be used to form pillars as electrodes, or, alternatively, as barriers. A single substrate can also be used to form pillars and electrodes.

Abstract: In an electrostatically controlled deflection apparatus, such as a MEMS array having cavities formed around electrodes and which is mounted directly on a dielectric or controllably resistive substrate in which are embedded electrostatic actuation electrodes disposed in alignment with the individual MEMS elements, a mechanism is provided to mitigate the effects of uncontrolled dielectric surface potentials between the MEMS elements and the electrostatic actuation electrodes, the mechanism being raised electrodes relative to the dielectric or controllably resistive surface of the substrate. The aspect ratio of the gaps between elements (element height to element separation ratio) is at least 0.1 and preferably at least 0.5 and preferably between 0.75 and 2.0 with a typical choice of about 1.0, assuming a surface fill factor of 50% or greater. Higher aspect ratios at these fill factors are believed not to provide more than marginal improvement.

Abstract: A light modulation element which has a light guide body 11 for guiding light from a light source and a flexible thin film 12 having a phosphor 13 being provided facing the light guide body 11. The distance between the flexible thin film 12 and the light guide body 11 is changed by the electromechanical operation and light emission of the phosphor 13 excited by the guided light is controlled.

Abstract: A microstructure is provided which facilitates alignment by allowing movement of the microstructure between one of a plurality of positions. The microstructure is included in an electromechanical machine which comprises a base layer, an actuator and two or more structural plates. One of the structural plates can be deflected to select a movement limit for the other structural plate. Methods for configuring the structural plates relative to each other to facilitate alignment are also provided.

Abstract: An optical switch that any vibration or oscillation transmitted to the optical switch from the outside is substantially prevented from being transmitted to a movable electrode is provided. In an optical switch comprising: a stationary electrode; a movable electrode opposed to the stationary electrode with a predetermined space therebetween; and a mirror mounted to the movable electrode, wherein the movable electrode and the mirror are moved together by applying a voltage between the stationary electrode and the movable electrode thereby to switch the path of an incident optical signal to the optical switch, a buffer member provided with a diaphragm is attached to the bottom of the stationary electrode, and a vibration or oscillation is substantially prevented from being transmitted to the movable electrode by the damping effects of the diaphragm and the space area formed above the diaphragm.

Abstract: A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

Abstract: In accordance with the present invention, an array of individually addressable micromachined light reflecting ribbons provide a high speed light valve action by employing a method in accordance with which the ribbons flex about their longer axis under the action of an applied electrostatic field. The ribbons are mounted on pedestals such that the resulting micromechanical structures are substantially symmetrical with respect to a plane along their long axis through the centers of the pedestals and normal to the substrate. This micromechanical arrangement ensures a structure with a high natural frequency, thereby allowing high light valve switching speeds. The particular mode of deformation also ensures a robust structure. The method may be applied in either “bright field” or “dark field” (Schlieren) mode. The particular combination of materials employed allows the method to be used in higher incident power applications such as those encountered in the printing industry.

Abstract: A system of digitally controlling light output by producing separate control signals for different colors of light. The light is contained in an optical waveguide, either prior to shaping or after shaping. Each of the control signals is coupled to a digitally controlled device which controls the shape of the light output. The digital controlling device can be digital mirror devices, for example.

Abstract: A beam steering module and switching system. The steering module is composed of a N×M array of single axis mirrors able to rotate about a particular axis (X-axis), a second N×M array of single axis mirrors able to rotate about an axis orthogonal to that of the first N×M array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.

Abstract: A crosspiece precursor and a picture element assembly precursor are hardened at mutually different timings to form a crosspiece and a picture element assembly. For example, the crosspiece precursor is firstly hardened to form the crosspiece. After that, the picture element assembly precursor is hardened while allowing an upper end surface of the picture element assembly precursor to make pressed contact with an optical waveguide plate, by displacing an actuator element toward an actuator substrate. The picture element assembly, which is formed by hardening the picture element assembly precursor, reliably abuts against the optical waveguide plate when a display device is in a light emission state.

Abstract: The present invention includes a method to use a phase modulating micromirror array to create an intensity only image that has high image fidelity, good stability through focus and good x-y symmetry. The method uses pixels consisting of at least one tilting mirror element and adjacent pixels tilt in different ways, but they are laid-out in a pattern that creates effective averaging between pixels with different tilt. The pattern is such that even if a single pixel creates a reflecting or scattering pattern that is asymmetric relative to the specular direction every neighborhood consists of pixels that together create symmetry. The invention allows the use of single-mirror pixels instead of multi-element pixels, thereby making manufacturing and design easier and also makes a smaller pixel size possible. Particular aspects of the present invention are described in the claims, specification and drawings.

Abstract: Techniques for use in a digital mirror device based luminaire. The techniques include using a filter as a gobo for definition.

Abstract: A light modulation element, device, and system is discussed. The light modulation element includes three electrodes, a flexible member, and a mirror. The flexible member is connected between the three electrodes so that the first and second electrodes are on one side and the third electrode is on the opposite side of the flexible member. The mirror is attached to the flexible member so that it can move therewith. The flexible member moves responsive to an external electrostatic force provided by one or more of the three electrodes so that the mirror is positioned in a predetermined position responsive to the state of the flexible member.

Abstract: An improved micromechanical device, particularly a micromirror device having improved electrostatic efficiency. A deflectable member comprised of a mirror 302 and an active hinge yoke 306 is suspended address 308 and landing electrodes 312 on a substrate 310 and above upper address electrodes supported above the substrate 310. The deflectable member is operable to rotate about a torsion hinge axis in response to an electrostatic force between the address electrodes and the deflectable member. The upper address electrode have a stair stepped shape to narrow a gap between the deflectable member near the axis of rotation 810, while leaving a wider gap away from the axis. The stair stepped shape is achieved by embedding a portion of an oxide layer 804 between a thin metal layer 806 making up the upper address electrodes 806, the active hinge yoke 306, and the torsion hinges, and a thick metal layer 808 making up the upper address electrodes 806 and the active hinge yoke 306.

Abstract: A spatial light modulator includes a pair of transparent substrates disposed with a prescribed gap therebetween and each having thereon a transparent electrode, and a liquid crystal layer and a photoconductor layer disposed between the substrates, with the transparent electrode on one substrate being split into a plurality of split electrodes. A display apparatus is formed by disposing a recording medium carrying a recorded picture at different sizes between the spatial light modulator and a writing light source. Depending on the picture size to be displayed on the spatial light modulator, a number among the plurality of split electrodes are selected for writing voltage application under illumination with writing light based on picture size data recorded in the recording medium, whereby a selected size of picture is written in the spatial light modulator and displayed thereon under illumination with reading light.

Abstract: An electrode for use in actuating MEMS elements. The electrode declines in height along its length from a first end thereof to second end thereof. In use, the first end of the electrode is disposed proximal to an axis of rotation or axis of bending of an overlying MEMS element. In one embodiment, the decline in height of the electrode along its length is linear such that the electrode has a wedge-shaped profile. In another embodiment, the height of the electrode declines in discrete steps such that the electrode has a stepped profile.

Abstract: An electrostatically driven optical membrane comprises a support structure and a membrane structure separated from the support structure by an electrostatic cavity. Stiction plugs are formed in the membrane structure. The plugs extend from a surface of the membrane. In one implementation, the plugs are hollow to allow a subsequent release process in which the sacrificial layer is removed.

Abstract: A micro-mirror device and associated method, the device including a substrate, address electrodes provided on the substrate, and a micro-mirror facing the substrate and spaced a predetermined distance from the substrate. The micro-mirror device is adapted so that the slope of the micro-mirror can be adjusted by electrostatic attraction forces between the address electrodes and the micro-mirror. The micro-mirror device further includes auxiliary electrodes formed on and projected from the substrate. The upper portions of the auxiliary electrodes are disposed in the vicinity of the micro-mirror, so that distances between the micro-mirror and the auxiliary electrodes can remain small, even when the micro-mirror is inclined by electrostatic attraction forces in one direction. Accordingly, restoration of the micro-mirror is enhanced by electrostatic attraction forces of the auxiliary electrodes.

Abstract: A display device, in accordance with the present invention includes a transparent substrate and an array of pixels formed on the substrate, each pixel comprises a transparent electrode and a deformable member electrically actuated between a first state and a second state, wherein in the first state a liquid including a dye is disposed in a gap between the transparent electrode and the deformable member and wherein in the second state the deformable member reduces the gap between the transparent electrode and the deformable member such that the liquid is substantially removed between the deformable layer and the transparent electrode in the area of contact.