Abstract: A method of operating by pulse width modulation a micromirror device is disclosed. In one aspect, the method includes providing a micromirror device having a micromirror element electrostatically deflectable around a rotation axis between a first and second position. The micromirror element is controllable by applying voltage signals to a first and second electrode on one side of the rotation axis and a third and fourth electrode on the other side. The method includes associating an intermediate value of intensity to the micromirror element during a time frame, the intensity being between a first value corresponding to the first position and a second value corresponding to the second position. The method includes switching the micromirror element between the first and second position. The intermediate value corresponds to the ratio of periods in the time frame in which the micromirror element is in the first or second position.

Abstract: This disclosure provides systems, methods, and devices for actuating, charging and calibrating the charge on a movable electrode in electromechanical systems (EMS) devices. The electromechanical systems device can include a first electrode, a second electrode spaced apart from the first electrode by a gap, a complementary electrode, at least one electrical contact, and a movable third electrode disposed between the first electrode and the second electrode. In one implementation, a method of calibrating charge on the movable electrode of the EMS device includes electrically connecting a complementary electrode to the first electrode to form a compound electrode and applying a calibration voltage across the compound electrode and the second electrode to produce a uniform electric field in the gap. Under the electric field the third electrode moves towards the first electrode until it connects with the at least one electrical contact.

Abstract: The ferroelectric substrate 11 of ferroelectric crystals, while being supported by the support plate 14 which is thicker than the ferroelectric substrate 11, is integrated with the support plate 14 by letting the junction 13 mediate between one major surface S1A of the ferroelectric substrate 11 and one major surface S1B of the support plate 14, and therefore, it is possible through the flat surface polishing to perform thinning of the ferroelectric substrate 11, namely, the ferroelectric crystals, and as a result, it is possible to obtain the thin periodically poled structure. By the voltage application method, the domain inverted region is formed in the ferroelectric substrate 11 which is made thin.

Abstract: Disclosed herein is a display apparatus including first and second substrates, at least one of which has a light transmitting characteristic, as well as first and second electrodes provided on the two mutually facing surfaces of the first and second substrates respectively; and an electrophoretic device provided between the first and second substrates, wherein the first substrate and the first electrode each have an external edge folded back so as to cover at least a portion of a terminal surface of the second substrate.

Abstract: A method of manufacturing an electrowetting display device includes forming a protection layer on a pixel electrode, forming a water-repellent layer on the protection layer, and removing the water-repellent layer from regions surrounding a display area of the pixel electrode. The water-repellent layer is formed by coating the protection layer with a hydrophilic material using a method such as slit coating. The water-repellent layer is removed using a method such as an edge bead removal method. The resulting water-repellent layer has a uniform thickness.

Abstract: The present invention relates to an electric-field drive display device. According to one embodiment of the present invention, the electric-field drive display device comprises: a first substrate; a first electrode which is formed on the first substrate; a second electrode which is formed on the first substrate and is disposed in parallel with the first electrode; a drive partition wall which is formed on the first electrode and the second electrode and has a plurality of opening and closing holes; and a plurality of drive bodies which are disposed inside each of the opening and closing holes. Consequently, the electric-field drive display device according to one embodiment of the present invention can adjust the amount of light transmitted and so display the desired image by adjusting the positions of the drive bodies in the horizontal direction through the use of electrical force.

Abstract: This disclosure provides systems, methods and apparatus for writing a display image to a display having an array of pixels according to a selected driving sequence. In one aspect, display elements in a row are driven using a tall and narrow voltage pulse. This allows display elements of a row to be driven in a shorter line time.

Abstract: Embodiments of an interferometric modulator are disclosed having various enhancements and features including a conductive bus. In certain embodiments, the interferometric modulator has a first conductive layer suspended over a second electrode layer. In certain embodiments, a second conductive layer is provided over the first conductive layer. One of the first and/or second conductive buses may further connect to the first electrode layer and/or the second electrode layer. Other disclosed features can be incorporated into embodiments of the interferometric modulator to improve response time, power consumption, and image resolution.

Abstract: This disclosure provides mechanical layers and methods of forming the same. In one aspect, a method of forming a pixel includes depositing a black mask on a substrate, depositing an optical stack over the black mask, and forming a mechanical layer over the optical stack. The black mask is disposed along at least a portion of a side of the pixel, and the mechanical layer defines a cavity between the mechanical layer and the optical stack. The mechanical layer includes a reflective layer, a dielectric layer, and a cap layer, and the dielectric layer is disposed between the reflective layer and the cap layer. The method further includes forming a notch in the dielectric layer of the mechanical layer along the side of the pixel so as to reduce the overlap of the dielectric layer with the black mask along the side of the pixel.

Abstract: Methods and devices for calibrating and controlling the actuation of an analog interferometric modulator configured to have a plurality of actuation states. Devices and methods for calibrating an analog interferometric modulator to respond in linear relation to an applied voltage.

Abstract: This disclosure provides systems, methods and apparatus related to an electromechanical display device. In one aspect, an analog interferometric modulator (AIMOD) includes a reflective display pixel having a movable element disposed between first and second electrodes. The movable element includes a third electrode embedded within a deformable layer and a reflector. The movable element is moved to different positions between first and second electrodes, with different positions corresponding to different reflected colors from the AIMOD. In another aspect, the reflector is coupled to, but spaced apart from, the deformable layer, thereby decoupling the mechanical and optical properties of the movable element. In another aspect, the need for a bending region in the reflector is eliminated, providing for increased fill factor. In another aspect, the reflector may include a dielectric layer having substantially identical metal layers above and below, so as to provide increased rigidity to the reflector.

Abstract: As for the method that modulates optical path length by the position of reflection plane of light, the movement of the position-movable plate in micrometer-size electromechanical device can be restricted by the stopping plates placed above and below the edge of the position-movable plate, the distance between the stopping plates may be set depending on the desired amount in modulating the optical path length. The voltage differential in the device is operable to create electrostatic attraction, to perform transition movement of the position-movable plate between the stopping plates, the light reflector connected to the position-movable plate takes at least two states in positioning, enabling to modulate the optical path length of reflected light by the light reflector with high reproducibility and high accuracy.

Abstract: An electro-optic display (100) comprises a backplane (102); an electro-optic layer (112) adjacent the backplane (102), the electro-optic layer (112) being smaller than the backplane (102) so as to leave a peripheral portion of the backplane extending beyond the edges of the electro-optic layer (112); and a protective layer (118) disposed on the opposed side of the electro-optic layer (112) from the backplane (102), a peripheral portion of the protective layer (118) extending beyond the edges of the electro-optic layer and being adhered (at 120) to the backplane (102).

Abstract: A method of actuating micromirror elements of a digital micromirror device is disclosed. A logic state is stored in the micromirror element including applying a negative voltage more negative than about ?5 volts to the micromirror element, applying a positive voltage less than about 5 volts to a first electrode, and applying ground to a second electrode. A first logic state is switched to a second logic state with an inverted waveform, including applying ground to the first electrode, applying a positive voltage less than 5 volts to the second electrode, applying a negative BSA voltage to the first electrode, applying a positive reset voltage pulse greater than about 10 volts, removing the negative BSA voltage, and applying the negative voltage to the micromirror element.

Abstract: A pair of support members each having a spring section in a part thereof support a mirror element, and a pair of drive mechanisms arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base. Accordingly, the mirror element can be translated by driving all of the drive mechanisms, or the mirror element can be inclined with respect to the base by driving some of the drive mechanisms.

Abstract: A flexible display apparatus that has improved portability and convenience of usage. The flexible display apparatus includes a display main body that is flexible; and a bendable driving film coupled to the display main body, and that bends when an electric current flows. The flexible display apparatus may be flexibly transformed to be stored when it is carried, and then, may be unfolded to be flat through a simple manipulation when it is in use for displaying an image. Thus, the convenience of carrying and using the flexible display apparatus may be increased.

Abstract: An electrowetting display device that features dual-mode operation. The display device can operate in either a low-power consumption bistable mode, or a higher-power consumption fast switching (video-rate) mode.

Abstract: Embodiments of a display comprising pixels formed from suitably tethered deformable membrane-based MEMS subsystems are provided that include the means to dynamically alter the in-plane tension, and thus the effective spring constant, of the deformable membrane being ponderomotively propelled between active and inactive optical states, said dynamic alteration being effected by exploiting transverse piezoelectric properties of the deformable membranes. Manipulating the spring constant can reduce the actuation force required to turn pixels on, thus significantly reducing the operational voltages for the display composed of an array of such subsystems. Since display power rises with the square of the pixel drive voltage, such architectures give rise to more power efficient display systems.

Abstract: The present invention describes a micro-mechanical light modulator including a two-dimensional array of modulating elements, in which small modulating elements are organized into larger modulating areas. Using smaller elements organized into larger areas increases the resonant frequency of the modulators and the modulation speed. In some implementations, multiple modulating elements are driven by shared signals, allowing the number of elements driven and the resulting area to increase without increasing the data traffic. In some implementations, an anamorphic optical path is used that leaves individual modulating elements of the micro-mechanical light modulator that are operated as a single area unresolved at an image plane of the workpiece being patterned. Devices and methods are described.

Abstract: The present invention relates to a tri wavelength interference modulator (TWIM) and a method of tri wavelength interference modulation. The tri wavelength interference modulator includes: a stationary substrate with a bottom electrode plate formed on top of the stationary substrate; a first electrode plate comprising a first suspended beam suspended in parallel above the stationary substrate and a first connection electrically connected onto the stationary substrate; and a second electrode plate comprising a second suspended beam suspended in parallel above the first electrode plate and a second connection electrically connected onto the stationary substrate. The inference modulator and the method for inference modulation are suitable to projection system.

Abstract: A method of manufacturing is disclosed for an electrophoretic display apparatus that includes an array substrate and an electrophoretic film laminated to the array substrate. A thermally activated adhesive is used to adhesively attach the electrophoretic film to the array substrate. The electrophoretic film is first aligned to and flattened against the array substrate and then a substantially stronger than original adhesion property of the adhesive is activated by annealing at a high temperature that is substantially greater than room temperature. Rework prior to annealing is therefore possible when alignment errors occur between the electrophoretic film and the array substrate.

Abstract: A transparent conductor structure includes a transparent, insulating substrate and a discontinuous, transparent conducting layer established on the substrate. The discontinuous conducting layer is partitioned into a plurality of segments, each of which has a thickness ranging from about 1 nm to about 10 ?m. Two or more of the segments are connected together by i) a metal trace disposed on or between them, or ii) a mesh, formed from a plurality of metal traces, disposed across a surface of the segments.

Abstract: The present invention relates to a light modulating device, comprising a SLM and a pixelated optical element, in which a group of at least two adjacent pixels of the SLM in combination with a corresponding group of pixels in the pixelated optical element form a macropixel, the pixelated optical element being of a type such that its pixels comprise a fixed content, each macropixel being used to represent a numerical value which is manifested physically by the states of the pixels of the SLM and the content of the pixels of the pixelated optical element which form the macropixel.

Abstract: An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique used to pattern the spacers which are deposited separately, each deposition providing a different thickness of spacer. Or a patterned photoresist may be used to allow for an etching process to selectively etch back the thickness of a spacer which was deposited in a single deposition. A full-color static graphical image may be formed of combined patterns of interferometric modulator cavities. Each cavity includes a reflector, and an induced absorber, the induced absorber including a spacer having a thickness that defines a color associated with the cavity.

Abstract: Operating methods of an array of electromechanical pixels resulting in efficient and reliable operation of light modulating elements. The invention simplifies the design of electromechanical light modulators and permits the construction of large size displays with greater mechanical tolerances on glass substrates.

Abstract: An optical device includes a non-transparent substrate. The optical device further includes a first optical layer which is at least partially transmissive and at least partially reflective to incident light. The optical device further includes a second optical layer which is at least partially reflective to incident light. The second optical layer is spaced from the first optical layer. At least one of the first optical layer and the second optical layer is movable between a first position at a first distance from the first optical layer and a second position at a second distance from the first optical layer. Movement of the at least one of the first optical layer and the second optical layer between the first and second positions modulates the reflectivity of the device.

Abstract: A micro-electro mechanical device includes a first structure, a second structure offset from the first structure by a gap. The first structure is configured to be electrostatically actuated to deflect relative to second structure. A pulse generator is configured to combine at least two different pulses to electrostatically drive at least one of the first structure and the second structure between an initial position and a final position.

Abstract: Methods of fabricating an electromechanical systems device that mitigate permanent adhesion, or stiction, of the moveable components of the device are provided. The methods provide an amorphous silicon sacrificial layer with improved and reproducible surface roughness. The amorphous silicon sacrificial layers further exhibit excellent adhesion to common materials used in electromechanical systems devices.

Abstract: An electrophoretic display device includes a common electrode, an electrophoresis layer, and pixel electrodes. The electrophoretic layer includes cavities, with each cavity arranged between one of the pixel electrodes and the common electrode, and comprises suspension fluid, first type charged particles, and second type charged particles. The first type charged particles and the second type charged particles are dispersed in the suspension fluid. Three cavities constitute a pixel unit. The first type charged particles and the second type charged particles in each of the three cavities constituting the pixel unit are one of red, green, and blue particles, and one of yellow, magenta, and cyan particles, respectively.

Abstract: Disclosed is an optical element which includes a support substrate and a thin plate of single crystal stacked on the support substrate through a thermoplastic adhesive, having the advantages of easily regulating the phase of light waves and restoring the regulated state to the original state. The optical element includes a support substrate 4 and a thin plate 1 of single crystal stacked on the support substrate 4 through a thermoplastic adhesive 3. The optical characteristics of the optical element are regulated by applying stress within an elastic limit to at least a part of the thin plate in a state where the thermoplastic adhesive is softened by heating the optical element, forming a concavo-convex part 10 in the thin plate, and then cooling the optical element to fix the concavo-convex part.

Abstract: The invention relates to methods and apparatus for forming images on a display utilizing a control matrix to control the movement of MEMs-based light modulators.

Abstract: A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.

Abstract: An electromechanical systems device includes a plurality of supports disposed over a substrate and a deformable reflective layer disposed over the plurality of supports. The deformable reflective layer includes a plurality of substantially parallel columns extending in a first direction. Each column has one or more slots extending in a second direction generally perpendicular to the first direction. The slots can be created at boundary edges of sub-portions of the columns so as to partially mechanically separate the sub-portions without electrically disconnecting them. A method of fabricating an electromechanical device includes depositing an electrically conductive deformable reflective layer over a substrate, removing one or more portions of the deformable layer to form a plurality of electrically isolated columns, and forming at least one crosswise slot in at least one of the columns.

Abstract: An electrophoretic display device includes a pair of substrates, an electrophoretic element that includes electrophoretic particles and that are held between the pair of substrates, and a display portion formed of a plurality of pixels. The display portion includes pixel electrodes, an opposite electrode, a first control line and a second control line. The opposite electrode is opposed to the plurality of pixel electrodes through the electrophoretic element. The first control line and the second control line are connected to each of the pixels. Each of the pixels includes a pixel switching element, a memory circuit, and a switch circuit. Switching of the switch circuit is performed by an output signal of the memory circuit to switch between a connected state where the pixel electrode is connected to the first control line and a connected state where the pixel electrode is connected to the second control line.

Abstract: An electromechanical systems array includes a substrate and a plurality of electromechanical systems devices. Each electromechanical systems device includes a stationary electrode, a movable electrode, and an air gap defined between the stationary electrode and the movable electrode, where the air gap defines open and collapsed states. At least two different electromechanical systems device types correspond to finished devices having different sized air gaps when in the open state. Each electromechanical systems device further includes a primary mechanical layer of a common thickness along with one or more mechanical sub-layers with a different cumulative thickness for each of the at least two different electromechanical systems device types. The mechanical sub-layers can be deposited for use as etch stops during processing of the air gap. The different air gap sizes of each electromechanical systems device type can correspond to a different mechanical sub-layer thickness.

Abstract: A screen device of the present invention has a light collecting element array including a plurality of light collecting elements that collect incident light from a projector and a back surface sheet. The back surface sheet includes a first electrode plate, a second electrode plate, a photoconductive layer disposed between the first electrode plate and the second electrode plate, and an image recording layer disposed between the first electrode plate and the photoconductive layer. At the back surface sheet, a light reflecting portion is formed at a light collecting region to which the light collected by the light collecting elements is irradiated, and a light absorbing portion is formed at a non-light collecting region to which the light collected by the light collecting elements is not irradiated.

Abstract: A two-terminal, variable capacitance device is described that is constructed by connecting multiple MEMS devices having different actuation or “pull in” voltages in parallel.

Abstract: A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate may contain electronic circuitry fabricated on the backplane. The electronic circuitry is placed in electrical communication with the array of interferometric modulators and is configured to control the state of the array of interferometric modulators.

Abstract: A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.

Abstract: A method of manufacturing is disclosed for an electrophoretic display apparatus that includes an array substrate and an electrophoretic film laminated to the array substrate. A thermally activated adhesive is used to adhesively attach the electrophoretic film to the array substrate. The electrophoretic film is first aligned to and flattened against the array substrate and then a substantially stronger than original adhesion property of the adhesive is activated by annealing at a high temperature that is substantially greater than room temperature. Rework prior to annealing is therefore possible when alignment errors occur between the electrophoretic film and the array substrate.

Abstract: A mirror device comprises: a plurality of electrodes disposed on a substrate; a hinge connected to at least one of the electrodes; a mirror connected to the hinge and corresponding to at least one of the electrodes, wherein a barrier layer is comprised between the hinge and mirror, and/or between the hinge and electrode. Also noted is a mirror device production method for producing such-configured mirror device. Further noted is a projection apparatus comprising such-configured mirror device.

Abstract: A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated from an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate light. A semi-reflective layer and a transparent material are formed over the movable upper electrode.

Abstract: This disclosure provides systems, methods and apparatus for an electromechanical system. In one aspect, an electromechanical interferometric modulator system includes a substrate and a plurality of interferometric modulators (IMODs). At least two different IMOD types correspond to different reflected colors. Each IMOD has an optical stack, an absorber layer, a movable reflective layer, where the movable reflective layer has at least open and collapsed states, and an air gap defined between the movable reflective layer and the optical stack in the open state. The optical stacks define different optical path lengths for each of the different IMOD types by way of different transparent layer thickness and/or material, while the air gap has the same size when in the open state. The IMODs reflect different colors in the closed state and a common appearance in the open state. Use of two absorbers aids in defining the common appearance in the open state and can also improve color saturation.

Abstract: Systems and methods for generating, projecting or correlating thermal spectra use digital micro-mirror devices (DMDs) to controllably modulate input radiation such as long wave infrared light. An optical system for creating an output spectrum based upon an input light suitably includes a grating configured receive the input light and to spread the input light by wavelength into an input spectrum. A digital micro-mirror device (DMD) is configured to receive the input spectrum and to controllably activate mirrors in the DMD corresponding to selected wavelengths of the input light. Portions of the input light having selected wavelengths can be extracted from remaining portions of the input light for the output spectrum.

Abstract: A display system is built up of at least one display cell comprising an assembly which has at least a first electrode and a second electrode and in which there are mutually non-miscible first and second liquids filled, wherein either one of the first and second electrodes is electrically insulated from the first and second liquids, the first liquid has electrical conductivity or polarity, and voltage is applied to one or both of the first and second electrodes, whereby the first liquid and the second liquid can vary in position to produce a display. Even after an applied voltage is shut off at a position to which the first and second liquids have migrated, the positions of the first and second liquids that have migrated are retained to keep memory capability going on.

Abstract: A method for forming an optical deflection device includes providing a semiconductor substrate comprising an upper surface region and a plurality of drive devices within one or more portions of the semiconductor substrate. The upper surface region includes one or more patterned structure regions and at least one open region to expose a portion of the upper surface region to form a resulting surface region. The method also includes forming a planarizing material overlying the resulting surface region to fill the at least one open region and cause formation of an upper planarized layer using the fill material. The method further includes forming a thickness of silicon material at a temperature of less than 300° C. to maintain a state of the planarizing material.

Abstract: A reflective display, comprising a plurality of pixels (10), each having a first electrode, a light-modifying layer (12), and a second electrode (3; 16) arranged to enable formation of an electric field in the light-modifying layer (12) through application of a voltage between the electrodes. The pixel (10) further includes an active portion (16) which is switchable between light-modifying states by means of said electric field, and an inactive portion (17). The inactive portion (17) is arranged for reflecting light so as to direct at least a fraction of incoming light (20) impinging on the inactive portion (17) towards the active portion (16). As a result, a contrast ratio of the reflective display is improved, since light is now directed from the inactive portion towards the active portion and thus contributes to the displayed image as observed by a viewer.

Abstract: A multi-state light modulator comprises a first reflector 104. A first electrode 142 is positioned at a distance from the first reflector 104. A second reflector 14 is positioned between the first reflector 104 and the first electrode 142. The second reflector 14 is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector 104. In one embodiment, the light modulator has latch electrodes 17 and 143, which hold the light modulator in a driven state. In another embodiment the latch electrodes 17 and 143 are used to alter the actuation and release thresholds of the light modulator.

Abstract: A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.

Abstract: An active matrix electrophoretic display is driven. In a reset period Tr a reset voltage is applied to each pixel electrode. Next, in a writing period an applied voltage is applied to each of said pixel electrode during a time period corresponding to a gradation value designated by an image data. Next, a common voltage is applied to each of said pixel electrode, so that electric charge accumulated in each capacitor is taken away and no electric field is applied to each dispersal system, thereby a displayed image is held.