Abstract: An overcoat protected diffraction grating. A replica grating having a thin aluminum reflective grating surface is produced by replication of a master grating or a submaster grating. The thin aluminum reflective surface may be cracked or have relatively thick grain boundaries containing oxides and hydroxides of aluminum and typically is also naturally coated with an aluminum oxide film. The grating is subsequently recoated in a vacuum chamber with a thin, pure, dense aluminum overcoat and then also in the vacuum the aluminum overcoat is coated with a thin film of MgF2. The grating is especially suited for use for wavelength selection in an ArF laser operating producing an ultraviolet laser beam at a wavelength of about 193 nm. The oxygen free aluminum overcoat prevents the ultraviolet light from causing damage by stimulating chemical reactions in grating materials under the aluminum grating surface or in the aluminum oxide film. The MgF2 additionally prevents oxidation on the surface, of the aluminum overcoat.

Abstract: Novel optical devices, which are referred to as composite prisms in this document, have been designed, produced and tested. They have the potential to be useful for a number of vision related applications. For high prism diopter (15 prism diopters or more), composite prisms have resulted in thinner, lighter and lower aberration optical devices than the standard ophthalmic prisms currently in use. They also offer significantly better optical quality than the Fresnel press-on prisms which are also used to correct several ophthalmic disorders.

Abstract: The optical system of this invention is an unique type of imaging spectrometer, i.e. an instrument that can determine the spectra of all points in a two-dimensional scene. The general type of imaging spectrometer under which this invention falls has been termed a computed-tomography imaging spectrometer (CTIS). CTIS's have the ability to perform spectral imaging of scenes containing rapidly moving objects or evolving features, hereafter referred to as transient scenes. This invention, a reflective CTIS with an unique two-dimensional reflective grating, can operate in any wavelength band from the ultraviolet through long-wave infrared. Although this spectrometer is especially useful for rapidly occurring events it is also useful for investigation of some slow moving phenomena as in the life sciences.

Abstract: This invention provides a method of manufacturing a diffraction grating capable of scribing by an interference light at a lower power density than usual. That is, a coating solution containing a metal alkoxide and a &bgr;-diketone is coated on a substrate, the coated film is heat treated to form a gelled film and then an interference light is irradiated to the gelled film, to manufacture a diffraction grating.

Abstract: The back surface of a BOE (binary optical element) having a binary optical structure formed thereon is coated with a resist film. Chromium is then deposited on the BOE by means of electron beam evaporation so as to form an island structure with an island size of about 50 nm and an island-to-island distance of about 80 nm. The BOE is then etched with an etchant to a depth of 55 nm using the island structure as a mask thereby forming a pillar-shaped microstructure. The island structure used as the mask is removed by means of wet etching using an etchant, and the resist film on the back surface of the BOE is removed using a resist remover. Thus, a microstructure is obtained which has antireflection capability allowing suppression of reflection to a level of 1% or less for a wavelength of 248 nm.

Abstract: A diffraction grating that achieves high diffraction efficiency at all polarizations for optical signals at telecommunications wavelengths is provided. The diffraction grating has a substrate and a plurality of reflective faces oriented at respective blaze angles &thgr;b spaced along the substrate surface, with the blaze angles substantially differ from the Littrow condition. Each reflective surface is supported by a support wall connected substantially with the substrate surface.

Abstract: A diffraction grating that achieves high diffraction efficiency at all polarizations for optical signals at telecommunications wavelengths is provided. The diffraction grating has a substrate and a plurality of reflective faces oriented at respective blaze angles &thgr;b spaced along the substrate surface, with the blaze angles substantially differ from the Littrow condition. Each reflective surface is supported by a support wall connected substantially with the substrate surface. The grating may be used in interference orders greater than first order and may diffract signals with low polarization-dependent losses in addition to high polarization-averaged efficiency.

Abstract: A diffractive optical element, as well as an optical system incorporating the same, has a comparatively large minimum grating pitch and, hence, is easy to produce. The diffractive optical element has a diffraction grating surface and an aspherical surface formed on an identical substrate or on separate substrates. The pitch of the diffractive grating varies such that it progressively decreases radially outward from the center of the substrate and then kept constant towards the radially outer extremity of the substrate.

Abstract: A multiplexer/demultiplexer is provided for optical interconnection between electronic components on an integrated circuit chip. The multiplexer/demultiplexer includes a substrate formed with an array of photo emitters/detectors and conditioning electronics coupled thereto. A first layer of optically transparent material is formed on the substrate overlying the emitters/detectors and a second layer of optically transparent material, functioning as an optical waveguide, is formed on the first layer. A binary blazed grating is formed at the interface of the two layers. For multiplexing, discrete wavelength optical signals are modulated with data, emitted by the emitters, intercepted by the binary blazed grating, and multiplexed into a polychromatic beam for transmission through the waveguide. For demultiplexing, the discrete wavelengths are separated by the binary blazed grating and directed to corresponding detectors.

Abstract: A diffraction grating that achieves high diffraction efficiency at all polarizations for optical signals at telecommunications wavelengths is provided. The diffraction grating has a substrate and a plurality of reflective faces oriented at respective blaze angles &thgr;b spaced along the substrate surface, with the blaze angles substantially differ from the Littrow condition. Each reflective surface is supported by a support wall connected substantially with the substrate surface. The grating may be used in interference orders greater than first order and may diffract signals with low polarization-dependent losses in addition to high polarization-averaged efficiency.

Abstract: A grating device with a substantially polarization-independent diffraction efficiency is disclosed. The grating device is preferably a surface grating that can be produced by ruling or holographically, and includes at least two different grating elements with the same grating period, but different modulation depths or blaze angles. The blaze angles and the illuminated areas of the respective grating elements can be selected to produce a substantially polarization-independent and optionally also wavelength-independent response of the grating device.

Abstract: An optical head comprises a light path alteration member (first surface of a first transparent substrate), a first grating element and a second grating element arranged in that order in a light path between a light source and an optical disk. A beam emitted by the light source passes a collimated lens, is deflected by total reflection from the light path alteration member, and enters the first grating element. Diffracted light enters a second grating element, and is focused on a recording medium by an objective lens. Wavelength variations in light diffracted by the first grating element and wavelength variations in light diffracted by the second grating element at least partially cancel each other out. Thus, a thin optical head for an optical recording medium is provided.

Abstract: The present disclosure describes a technique for creating diffraction gratings on curved surfaces with electron beam lithography. The curved surface can act as an optical element to produce flat and aberration-free images in imaging spectrometers. In addition, the fabrication technique can modify the power structure of the grating orders so that there is more energy in the first order than for a typical grating. The inventors noticed that by using electron-beam lithography techniques, a variety of convex gratings that are well-suited to the requirements of imaging spectrometers can be manufactured.

Abstract: An objective lens includes a refractive lens having a positive refractive power, and a diffractive lens structure having a plurality of concentric ring-shaped steps that are formed on a lens surface of the refractive lens. The objective lens is a biconvex plastic lens having first and second aspherical surfaces. The diffractive lens structure has such a wavelength dependence that at least two diffracted beams having different wavelengths with the same diffraction order form appropriate wavefronts for at least two kinds of optical discs having cover layers of different thickness, respectively. Further, the diffractive lens structure has a predetermined power at any points in a middle ring area that is concentrically arranged about the optical axis at a middle range of the radius of the refractive lens.

Abstract: Agile steering of a laser beam using a pair of complementary optical elements which are mechanically translated. The elements consist of pixelated steps of varying depth. Structure is provided to steer a laser beam by translating one element with respect to the other element by a distance that is an integer multiple of the step width.

Abstract: A diffracting optical element has a structure that a plurality of layers having a periodic relief pattern varying in height in a period are laminated in proximity to or close contact with each other. The diffracting optical element includes two layers equal in the height of the relief pattern and opposite to each other in the direction in which the height of the relief pattern varies in a period, and another layer differing in the height of the relief pattern from the two layers. Materials forming the three layers differ in dispersion from one another.

Abstract: Disclosed is an optical element including a substrate made of a monocrystal of a fluoride compound, and a fine structure formed on the substrate and made of a non-monocrystal of metal fluoride. Also disclosed are an optical system having such optical element, and an exposure apparatus having such optical system incorporated therein.

Abstract: A condenser system for generating a beam of radiation includes a source of radiation light that generates a continuous spectrum of radiation light; a condenser comprising one or more first optical elements for collecting radiation from the source of radiation light and for generating a beam of radiation; and a diffractive spectral filter for separating first radiation light having a particular wavelength from the continuous spectrum of radiation light. Cooling devices can be employed to remove heat generated. The condenser system can be used with a ringfield camera in projection lithography.

Abstract: A diffractive optical element has a plurality of step-like patterns each having surface levels of a number less than eight, the step-like patterns being disposed in combination to provide a function of a step-like structure of eight or more levels.

Abstract: A small-sized and low-cost wavelength division multiplexer having little insertion loss, little polarization dependence and a broad wavelength bandwidth,

Abstract: A tunable filter includes a polarizer, a polarization rotator, a diffraction grating and a diffraction grating adjustor. The polarizer polarizes a light beam and splits the light beam into first and second light beams. The polarization rotator rotates a plane of polarization of the first light beam at 90° to generate a rotated light beam. The diffraction grating receives the rotated light beam and the second light beam. The diffraction grating adjustor adjusts the diffraction grating to change incident angles of the rotated light beam and second light beam.

Abstract: A grating based line narrowing unit for gas discharge lasers with increased beam expansion to produce smaller bandwidths. The grating has a grating surface larger than 100 cm2 and is a replica grating produced from a master grating produced with a lithography process on a single crystal substrate. In preferred embodiments, a beam from the chamber of the laser is expanded with four prism beam expanders. The large grating, much larger than gratings historically produced from diamond lined gratings, permit substantial reductions in bandwidth while maintaining laser efficiency. A narrow band of wavelengths in the expanded beam is reflected from a grating in a Littrow configuration back via the bi-directional beam expanders into the laser chamber for amplification.

Abstract: An optical pickup is disclosed which includes a first light source for emitting a first beam of light with a first wavelength; a second light source for emitting a second beam of light with a second wavelength, longer than the first wavelength; a condenser lens for condensing the first and second beam of light onto an information recording surface of a recording medium; and a diffractive optical element arranged in an optical path from the first and second light source to the condenser lens. The condenser lens condenses, for the first beam of light, a refracted beam of the first diffraction order of the first beam of light by means of the diffractive optical element as an information read beam or an information write beam. For the second beam of light, the condenser lens condenses a refracted beam of the second diffraction order, lower than the first diffraction order, of the second beam of light by means of the diffractive optical element as an information read beam or an information write beam.

Abstract: A diffraction grating that achieves high diffraction efficiency at all polarizations for optical signals at telecommunications wavelengths is provided. The diffraction grating has a substrate and a plurality of reflective faces oriented at respective blaze angles &thgr;b spaced along the substrate surface, with the blaze angles substantially differ from the Littrow condition. Each reflective surface is supported by a support wall connected substantially with the substrate surface.

Abstract: An optical system including a diffraction optical element and for forming an image of an object by light having a given wavelength width includes at least one diffraction optical element and a diffraction light selection element for transmitting a diffraction light of given order to an output side of the diffraction optical element and for attenuating the diffraction light of orders other than the given order.

Abstract: A reconfigurable bi-directional wavelength selective switch and variable optical attenuator is disclosed. It has an optical system that is symmetric about a polarization modulator. The symmetric optical system consists of an input birefringent optical system and output birefringent optical system disposed around polarization modulator. The optical system delivers the wavelength channels that are to be switched as a superimposed wavelength channel incident the polarization modulator. As a result, crosstalk is reduced below −35 dB and greater optical performance is achieved.

Abstract: In one aspect of the invention, an apparatus operable to provide optical signal processing includes an inner conductive layer including an at least substantially conductive material and a plurality of at least partially reflective mirror strips disposed outwardly from the inner conductive layer and operable to receive an input optical signal, wherein none of the plurality of strips has a width greater than 40 microns. At least some of the strips are operable to undergo a partial rotation in response to a control signal, the partial rotation resulting in a diffraction of the input optical signal wherein a majority of the diffracted input signal is communicated in one direction.

Abstract: A diffractive lens, comprises an optical axis; a lens surface having a peripheral portion, and a diffractive relief provided on the lens surface, wherein the diffractive relief is shaped in annular zones, and wherein following conditional formulas (1) and (2) are satisfied: hi−1≦h<hi  (1) x=f(h−hti)+S  (2) where i is a suffix showing an ordinal number of each of the diffractive annular zones obtained by counting each diffractive annular zone in such a manner that a diffractive annular zone including the optical axis is counted as a first diffractive annular zone and other diffractive annular zones are counted respectively in consecutive order from the optical axis toward the peripheral portion; h is a distance between a point and X axis in which, when the optical axis is deemed as X axis, the distance is from X axis to the point in a direction perpendicular to X axis; hi is a distance from X axis to a border between i-th diffractive annular zone and (i&plus

Abstract: A diffractive having a grating period that exhibits significant polarization selectivity is used as a polarizing beamsplitter for obliquely incident polarized light. The grating is preferably a subwavelength of the illuminating beam and is preferably designed to substantially transmit transverse magnetic mode (TM) polarized light and to substantially reflect transverse electric mode (TE) polarized light at certain wavelengths or angles of incidence. Due to ease of manufacture, the polarizing beamsplitter may be integrated along with other optical elements, such as a subwavelength retarder, to form a polarization beam router, a dichroic beam combiner, a beam splitter on a curved surface, or an optical pickup using an optical beam splitter and router.

Abstract: An illumination system for a color projection display. In one embodiment a broad spectrum light source illuminates a multilevel optical phase element which disperses the broad spectrum light from the light source by diffraction. A display having a number of pixel elements, each capable of transmitting a predetermined spectral region, is positioned within the near field region of the multilevel optical phase element so as to receive the light dispersed by the multilevel phase element.

Abstract: A surface pattern is made up of surface elements (1 to 7) which are arranged in a mosaic-like fashion and which have microscopic relief structures. The surface elements (2 to 6) which are divided at least into first and second surface portions (8; 9) have in the first and second surface portions (8; 9) asymmetrical diffraction gratings (12; 13) with an optical diffraction effect, wherein in each divided surface element (2 to 6) adjacent first surface portions (8) are separated by at least one second surface portion (9). The grating vectors of the asymmetrical diffraction gratings (12) of the first surface portions (8) of all divided surface elements (2 to 6) have the same first value in respect of azimuth and the asymmetrical diffraction gratings (13) of the second surface portions (9) of all divided surface elements (2 to 6) have the same second value in respect of azimuth.

Abstract: A method and apparatus is disclosed for creating a structure, such as a grating (45) in a photosensitive material (40). The method and apparatus relies upon creating at least two coherent beams of light (33, 38) and reflecting them, in a counter propagating manner, around a series of reflective elements (35, 37) along substantially equivalent paths so that the coherent beams interfere at a structure staging area (45). The structure staging area can then be utilized to create grating structures or the like having improved qualities.

Abstract: A polarization conversion optical system converts light having a nonuniform plane of polarization into light having a uniform plane of polarization. The system includes a multilayer dielectric film at the side upon which the target light is incident. The film exhibits the property that it reflects one polarized component of the light and transmits a second polarized component of the light at a first angle of incidence, but transmits the first component at a second angle of incidence. Incident target light that is transmitted through the film at the first angle of incidence passes through a quarter-wavelength plate and is reflected at the second angle, whereupon it is retransmitted through the quarter-wavelength plate to be converted from one plane of polarization to the other. It is then emitted from the dielectric film in the same plane of polarization as light reflected by the film.

Abstract: A diffraction grating for use in multiplexing and demultiplexing optical signals in optical communication systems having reduced polarization sensitivity has a plurality of grooves including reflective step surfaces and transverse riser surfaces separated by a flat. The step surfaces have a reflective coating and the riser surfaces do not have a reflective coating. A method of making a reflective diffraction grating includes forming a plurality of grooves in a substrate, the grooves having a step surface for reflecting an incident beam, a transverse riser and a flat therebetween and providing a reflective coating on the steps and not on the risers.

Abstract: A method and system for providing an improved color image wherein a broad spectrum light is supplied to a phase grating which provides dispersed light having multiple diffraction orders. The dispersed light is supplied to a zero-order phase shifter which shifts the phase of the undiffracted (zero order) light relative to the diffracted light. The light from the phase shifter is thereupon concentrated so that the plane of the phase grating is imaged onto a display having a plurality of pixels assigned to transmit different spectral regions. The depths of the grating elements of each of the grating periods of the phase grating and the depth of the zero-order phase element of the phase shifter are selected to maximize the area of chromaticity space spanned by the different spectral regions at the display.

Abstract: A grating member comprising a diffraction grating having a periodic structure for converting an incident wavefront at the central area into a prescribed wavefront is provided with a light-shielding member comprising a UV-light absorbing material at the periphery of the grating member in order to reduce excess light and scattered light.

Abstract: A multilevel diffractive optical element comprising a base and a plurality of phase zones having phase levels of a substantially identical height h, each phase zone being defined by a local modulation depth d and a local number of phase levels &xgr;=d/h, the local number of phase levels &xgr; per phase zone being a real number, an integer of which defines the number of complete levels in the phase zone, which complete levels have identical widths, and a fraction of which, in at least one phase zone, defines an incomplete level which is narrower than the complete levels, said local number of phase levels &xgr;=&xgr;(x, y) varying among different phase zones so as to provide corresponding variation of said local modulation depth d=d(x, y) whereby local diffraction efficiencies and consequently an overall diffraction efficiency of the optical element is arbitrarily controlled.

Abstract: A scanning optical device to be used for an image forming apparatus such as a laser beam printer or a digital copying machine comprises a light source, an optical deflector, a first optical system for leading the light beam emitted from the light source to the optical deflector, and a second optical system for focussing the deflected light beam on a surface to be scanned, typically a photosensitive drum surface. The second optical system has a diffraction optical element and forms a light spot on the surface by selectively using the light beam of a predetermined order of diffraction. The sum of the light quantities of the light beams of the orders of diffraction on the positive side, relative to the predetermined order of diffraction, is smaller than that of the light beams of the orders of diffraction on the negative side, for the diffracted light beams located remotest from the optical axis or any of the light beams located within the scope of scanning.

Abstract: Kinoform diffusers (82) exhibit controllable diffusion characteristics that include off-axis transmittance and reflectance properties, elimination of zero-order beam, and freedom from spectral dispersion under achromatic illumination. Light control devices (76, 80, 82) implemented with kinoform diffusers having controllable diffusion characteristics provide anisotropic luminous intensity distributions and glare control at high viewing angles while maintaining high luminaire efficiency or daylight utilization.

Abstract: A diffraction grating (1) has a multiplicity of parallel diffraction structures succeeding one another periodically. The latter are arranged on a support (2) and each incorporate a slat (3) extending from a base area (4) of the support (2). Said slat has a substantially rectangular cross-section. The width w of the slat (3) comes to less than 100 nm, preferably between 20 nm and 60 nm, more preferably in the area of 50 nm. Advantageous uses of the diffraction grating (1) are obtained e.g. in a Littrow configuration, preferably in third order of the incident light beams (8), in particular at a light wavelength that is less than 250 nm.

Abstract: A reflective-type diffraction grating structure for use in color display devices such as liquid crystal displays (LCDs). It contains: (1) a plurality of micro-lenses each having a smooth top surface and a blazed zig-zag-shaped grating surface at the bottom; (2) an optical coating formed below the zig-zag-shaped grating surface; and (3) a reflective member formed below the optical coating. With the cooperative actions of the zig-zag-shaped grating surface, the optical coating layer, and the reflective member, an incident light, when reflected, is separated into repeated sequences of red, green, and blue color components and a black matrix segregating the red, green, and blue color components. A sequence of micro-light valves are placed in the path of the reflected incident light to block the undesired color components. The reflective-type diffraction grating structure dispenses with the need for the various layers of color filters.

Abstract: The invention relates to a method of easily and quantitatively determining the diffraction efficiency of a relief type diffraction optical element, and provides a method of designing an optical system comprising a diffractive optical element using diffraction efficiency as at least one estimation index. The diffractive optical element is a transmission blaze grating constructed of a relief having a sawtooth shape in section. The transmission blaze grating having a side wall substantially vertical to a grating surface. The estimation index is given by a predetermined mathematical expression including at least a phase difference due to a relief discontinuity and shadow effects thereof. The mathematical expression includes as the shadow effects of said discontinuity at least a light attenuation effect dependent on an angle-of-incidence and a light attenuation effect independent on the angle-of incidence in a separate manner.

Abstract: The invention relates to a method of easily and quantitatively determining the diffraction efficiency of a relief type diffraction optical element, and provides a method of designing an optical system comprising a diffractive optical element using diffraction efficiency as at least one estimation index. The diffractive optical element is a transmission blaze grating constructed of a relief having a sawtooth shape in section. The transmission blaze grating having a side wall substantially vertical to a grating surface. The estimation index is given by a predetermined mathematical expression including at least a phase difference due to a relief discontinuity and shadow effects thereof. The mathematical expression includes as the shadow effects of said discontinuity at least a light attenuation effect dependent on an angle-of-incidence and a light attenuation effect independent on the angle-of-incidence in a separate manner.

Abstract: A scanner includes a laser for projecting a laser beam at a facet having a blazed diffractive grating thereon. The facet is rotated relative to the laser to traverse the laser beam across the grating to diffract the laser beam into a scan line. The blazed diffractive grating may be readily manufactured using injection molding or photolithograhic manufacturing techniques.

Abstract: Diffraction optical element used in a scanning optical apparatus as a scanning optical element has a diffraction grating formed on a substrate. The diffraction grating has a tilt portion for generating a power and a wall portion connecting one end portion of the tilt portion to the substrate. The wall portion is tilted within a predetermined range with respect to a normal of the substrate surface. The tilt angle of the wall portion of the diffraction grating with respect to the normal of the substrate continuously changes to increase as a distance away from an optical axis of the diffraction optical element becomes large.

Abstract: A multilevel diffractive optical element comprising a base and a plurality of phase zones having phase levels of a substantially identical height h, each phase zone being defined by a local modulation depth d and a local number of phase levels &xgr;=d/h, the local number of phase levels &xgr; per phase zone being a real number, an integer of which defines the number of complete levels in the phase zone, which complete levels have identical widths, and a fraction of which, in at least one phase zone, defines an incomplete level which is narrower than the complete levels, said local number of phase levels &xgr;=&xgr;(x, y) varying among different phase zones so as to provide corresponding variation of said local modulation depth d=d(x, y) whereby local diffraction efficiencies and consequently an overall diffraction efficiency of the optical element is arbitrarily controlled.

Abstract: Disclosed are a lens efficiently manufactured into an accurate shape at a low cost, a manufacturing method thereof, and an optical pickup using the lens. The lens includes a geometrical optics portion for converging light having been incident thereon from its light incoming plane, and two diffraction optics portions provided on the light incoming plane and a light outgoing plane of the geometrical optics portion, wherein the diffraction optics portions are made from a material different from that of the geometrical optics portion.

Abstract: The present invention introduces a novel scatter plate into the optical path of source light used for illuminating a replicated object. The scatter plate has been designed to interrupt a focused, incoming light beam by introducing between about 8 to 24 diffraction zones blazed onto the surface of the scatter plate which intercept the light and redirect it to a like number of different positions in the condenser entrance pupil each of which is determined by the relative orientation and the spatial frequency of the diffraction grating in each of the several zones. Light falling onto the scatter plate, therefore, generates a plurality of unphased sources of illumination as seen by the back half of the optical system. The system comprises a high brightness source, such as a laser, creating light which is taken up by a beam forming optic which focuses the incoming light into a condenser which in turn, focuses light into a field lens creating Köhler illumination image of the source in a camera entrance pupil.

Abstract: In a diffractive optical element composed of three or more laminated layers and having a diffraction grating at each interface between adjacent layers, each even-number-th layer has a uniform thickness.

Abstract: Spatial light modulators (SLMs) can be amplitude-only modulated, phase-only modulated, or the pixel amplitudes can even be a function of phase. However, practical devices providing independently controllable values of phase and amplitude are not expected for some time. It has been possible to design modulation patterns for these limited range SLMs that do produce diffraction patterns similar to those possible from full complex SLMs, but hours of intensive iterative optimization usually have been required. Our approach instead develops and evaluates direct, pixel-by-pixel encoding algorithms that map the limited range modulation properties onto the entire complex plane. The advantage of these algorithms (generally recognized by the name pseudo random encoding) over iterative optimization is that designs can be performed in real-time making systems adaptable to rapidly changing situations.