Abstract: A lens driving device having a leaf spring; a suspension wire, having one end thereof joined to the leaf spring; a supporting plate to which the other end portion of the suspension wire is joined; a lens retaining portion that is supported by the leaf spring and the suspension wire; and a driving portion for driving the lens retaining portion in a direction that is perpendicular to the optical axial direction of the lens. The leaf spring and/or the supporting plate is joined to the suspending wire through a joining material that is provided on a primary face, where the wettability of the primary face in respect to the joining material is greater than the wettability, in respect to the joining material, of the face on the opposite side from the primary face.

Abstract: A shade for a camera module is disclosed. The shade includes an optical aperture; a deformed portion extending outward from a wall of the optical aperture; and a fixed portion extending outward from the deformed portion. The deformed portion includes a body and a plurality of notches communicating with the optical aperture, and the notches pass through an upper surface and a lower surface of the shade.

Abstract: A compound optical assembly is constructed from a plurality of stacking elements for spacing, aligning, and retaining optical elements within the assembly. Stacking faces of the stacking elements are measured and low-order surface errors are extracted, represented by mathematical approximations having a primary angular frequency. The stacking elements including the optic holders are relatively oriented to promote complementarity between the low-order surface errors of mating stacking faces.

Abstract: A lens holder drive device has: a lens holder; a fixing part that includes a base member disposed below the lens holder; a drive mechanism; an upper-side plate spring; a lower-side plate spring; and a position detection unit that detects the position of the lens holder in the optical axis direction. The drive mechanism has: a drive coil fixed to the perimeter of the lens holder; a yoke having a substantially square columnar shape; and a drive magnet disposed to face the drive coil in a first direction which is orthogonal to the optical axis direction. The position detection unit includes: a sensor magnet attached to an outer circumferential surface of the lens holder in a second direction which is orthogonal to the optical axis direction and the first direction; and a magnetic sensing element that faces the sensor magnet and is provided to the base member.

Abstract: A motor vehicle camera module (12) having a lens assembly (20), a housing (22) forming a front end (50) surrounding an opening (28), an image sensor (24) carried by a back wall (32) within the housing (22) adjacent an image plane (A). The housing (22) having a lens holder (53) between the front end (50) and the back wall (32). The camera module (12) has a tube (26) fixed to the lens holder (53) at the front end (50). The tube (26) surrounds the opening (28) and extends from the opening (28) into the housing (22). The lens assembly (20) is connected to a tube bottom end section by threads (71, 72). The thermal expansion coefficient of the tube (26) is higher than that of the lens holder (53). The threads (71, 72) extends over less than half of the axial length (hL) of the lens assembly (20).

Abstract: A camera module is provided, the camera module including a mover mounted with a lens, a stator movably supporting the mover to an optical axis direction of the lens, balls interposed at one side and the other side between the mover and the stator, a ball distance maintainer constantly keeping a distance between balls to a first direction, fixation means restricting a relative movement of the mover and the stator to a first direction, and permission means allowing a relative displacement of the mover and the stator to the first direction and restricting the relative displacement of the mover and the stator to a second direction.

Abstract: A camera module according to an exemplary embodiment of the present disclosure is proposed, the camera module including a PCB (Printed Circuit Board) mounted with an image sensor, a housing member arranged at an upper surface of the PCB, a bobbin movably positioned at an inner side of the housing member, an upper elastic member connected to an upper surface of the housing member and to an upper surface of the bobbin, and a space forming part formed at one side of the housing member to provide a moving space to the upper elastic member when the bobbin makes a relatively vertical movement to the housing member.

Abstract: A lens assembly includes at least a pair of lenses fixed in a lens barrel and an additional lens initially having at least one degree of freedom of movement with respect to the other lenses. The additional lens can be fixed in a desired alignment position with respect to the other lenses.

Abstract: The invention provides an endoscope having a lens holder, wherein the lens holder includes a body containing a sintered feedstock and machined surfaces. The invention also provides a method of manufacturing the endoscope which includes the steps of molding a metal blank by a MIM process, wherein the metal blank is “near net shape” and has a sprue, a post, and optionally an outer shell, machining the inner surfaces and then the outer surfaces of the metal blank to form a lens holder, installing a lens in the lens holder, and assembling the lens holder having the lens into the endoscope.

Abstract: A passive 5x athermalized afocal beam expander comprising a housing integrally formed of a single material. Using titanium for the housing as well as lens materials having a minimal change of index of refraction over changes in temperature provides for a 5x athermalized afocal beam expander constructed to operate in a wavelength range from about 1460 nm to about 1675 nm at temperatures ranging from about ?40 degrees Celsius to about +75 degrees Celsius.

Abstract: An optical module includes a base portion having a top-surface metal layer on a top surface of a base, a semiconductor element on the top-surface metal layer and an optical element optically-coupled to the semiconductor element and bonded to the base with adhesive at a first side surface of the base at a side of the optical element being optically-coupled. A pull-back area is formed on the top surface by disposing a second side surface at the side, of the top-surface metal layer at a retracted position to the first side surface at the side. Between an adhesion area where the base and the optical element are bonded and a mounting portion below an optical-power-outputting surface of the semiconductor element, the top-surface metal layer has an adhesive flow stopping portion formed, by patterning, so as to prevent the adhesive from flowing through the pull-back area to the mounting portion's side.

Abstract: A stacked-lens assembly includes a lower substrate and an upper substrate. The lower substrate includes a lower-substrate top surface having thereon a lower element and an inner spacer, the inner spacer at least partially surrounding the lower element. The upper substrate includes an upper-substrate bottom surface opposite the lower-substrate top surface and having thereon an upper element and an outer spacer, the outer spacer (i) being attached to the inner spacer and (ii) at least partially surrounding the upper element. In any cross-section of the stacked-lens assembly parallel to the upper substrate and including both the inner spacer and the outer spacer, the entirety of the inner spacer is within a perimeter of the outer spacer.

Abstract: An optical mount, comprising an outer ring (1), an inner ring (2), at least two manipulator units, by means of which the inner ring (2) is adjustable with respect to the outer ring (1) in an adjustment plane perpendicular to a mount axis, and at least one clamping unit (0) acting independently of the manipulator units. The clamping unit (0) is formed by a threaded hole (4), which is directed radially to the mount axis (1.1) in the outer ring (1), and a screw (5) supported in said threaded hole (4), said screw (5) having a through hole (8) along the screw axis (5.0) which is connected with the inner ring (2) in the clamping condition via an adhesive gap (7) filled with adhesive (6).

Abstract: The optical apparatus includes an optical system forming an optical image on a rectangular image capturing surface having long and short sides, a plastic lens, a holder holding the plastic lens, and a pressing member pressing the plastic lens to the holder. One of the plastic lens and the holder includes first and second protrusions located on mutually opposite sides across an optical axis in a first direction parallel to the short sides. Another of the plastic lens and the holder includes a first hole portion into which the first protrusion is inserted to prevent a displacement thereof in a second direction parallel to the long sides and the first direction and a second hole portion into which the second protrusion is inserted to prevent a displacement thereof in the second direction and to allow a relative displacement thereof in the first direction.

Abstract: Various optoelectronic modules are described that include an optoelectronic device (e.g., a light emitting or light detecting element) and a transparent cover. Non-transparent material is provided on the sidewalls of the transparent cover, which, in some implementations, can help reduce light leakage from the sides of the transparent cover or can help prevent stray light from entering the module. Fabrication techniques for making the modules also are described.

Abstract: The present disclosure provides an optical module. The optical module of the present disclosure may include: a base, the base being provided with a fixing part configured to place a lens; the lens located in the fixing part; and a laser, located on the base, the laser being configured to transmit an optical signal to the lens, where fixing adhesive is filled symmetrically in gaps between two symmetric sides of the lens and the fixing part.

Abstract: An embodiment relates to a light emitting module. A light emitting module according to an embodiment includes a light source unit including a light emitting device; a body including a lower portion on which the light source unit is arranged, a wall portion arranged on the lower portion and configured to surround the light source unit, and an upper portion arranged on the wall portion; an optical member arranged on the light source unit to transmit light from the light emitting device; and an adhesive member arranged between the wall portion of the body and the optical member to couple the body and the optical member, wherein the upper portion of the body is arranged between the light emitting device and the adhesive member.

Abstract: An optical module (10) having at least one beam-forming element (14) and having at least two retainer brackets (20) for fastening the optical module (10) to a carrier (30) are provided. In this connection the retainer brackets (20) have a first support element (22a) at a first spacing with respect to the lens (14) and a second support element (22b) at a second spacing different from the first spacing with respect to the beam-forming element (14) in order to selectively fasten the optical module (10) to the carrier (30) at the first spacing or at the second spacing.

Abstract: Spatio-temporal light field cameras that can be used to capture the light field within its spatio temporally extended angular extent. Such cameras can be used to record 3D images, 2D images that can be computationally focused, or wide angle panoramic 2D images with relatively high spatial and directional resolutions. The light field cameras can be also be used as 2D/3D switchable cameras with extended angular extent. The spatio-temporal aspects of the novel light field cameras allow them to capture and digitally record the intensity and color from multiple directional views within a wide angle. The inherent volumetric compactness of the light field cameras make it possible to embed in small mobile devices to capture either 3D images or computationally focusable 2D images. The inherent versatility of these light field cameras makes them suitable for multiple perspective light field capture for 3D movies and video recording applications.

Abstract: Disclosed is a camera module. The camera module includes a lens assembly comprising a plurality of lens units having a polygonal outer peripheral portion, a lens barrel receiving the lens assembly, a fixing unit fixing the lens assembly to the lens barrel, a housing coupled with the lens barrel, and a sensor unit in the housing. The lens barrel is provided in a lower portion thereof with a receiving groove, and the receiving groove has a shape corresponding to a shape of the lens assembly.

Abstract: Spatio-temporal light field cameras that can be used to capture the light field within its spatio temporally extended angular extent. Such cameras can be used to record 3D images, 2D images that can be computationally focused, or wide angle panoramic 2D images with relatively high spatial and directional resolutions. The light field cameras can be also be used as 2D/3D switchable cameras with extended angular extent. The spatio-temporal aspects of the novel light field cameras allow them to capture and digitally record the intensity and color from multiple directional views within a wide angle. The inherent volumetric compactness of the light field cameras make it possible to embed in small mobile devices to capture either 3D images or computationally focusable 2D images. The inherent versatility of these light field cameras makes them suitable for multiple perspective light field capture for 3D movies and video recording applications.

Abstract: A device for adjustably positioning an optical component includes a holding unit, which is which at least partly composed of a magnetostrictive material, and a mechanism for generating a magnetic field having a predetermined directional and amplitude distribution in the region of the holding unit. The holding unit has, in a predefined direction, an expansion which can be varied by a specific absolute value by the effect of the magnetic field.

Abstract: A lens assembly includes a lens barrel, a plurality of lenses and at least one light-shielding member. The lens barrel extends along an axis and includes a peripheral wall that surrounds the axis and defines a receiving chamber. The peripheral wall has open and aperture-forming ends that are opposite to each other and respectively adjacent to image and object sides of the lens assembly. The lenses are disposed in the receiving chamber in sequence along the axis between the aperture-forming and open ends. The light-shielding member is disposed in the receiving chamber and includes an annular light-shielding body and an adhesive layer for positioning the annular light-shielding body relative to at least one of the lenses.

Abstract: The disclosure provides a positioning unit for an optical element in a microlithographic projection exposure installation having a first connecting area for connection to the optical element, and having a second connecting area for connection to an object in the vicinity of the optical element.

Abstract: An artificial muscle structure has an electro-active polymer (EAP) layer having a frusto-conical shape and whose tip has an opening formed therein for use as a camera variable aperture. First, second and third electrode segments are formed on a rear face of the EAP layer. The second segment is positioned in a gap between the first and third segments so as to be electrically isolated from the first and third segments. The second segment has an opening formed therein that is aligned with the opening in the EAP layer. A complementary electrode is formed on a front face of the EAP layer. Other embodiments are also described.

Abstract: A compliable unit in an compliable network comprises a first layer including at least one device component at a first region of the first layer, and a second layer including at least one compliable element at a first region of the second layer to transfer the at least one device component to a desired location. The first layer and the second layer are arranged in a stack.

Abstract: A solar concentrator has frame members connected together to form a framework, and a flexible sheet attached to the framework such that the flexible sheet takes a loose shape and can flex in response to shaping forces exerted thereon. The sheet has a reflective surface located between the frame members. A shaping force system is operative, when activated, to exert the shaping forces on the sheet, the shaping forces configured to draw the sheet from the loose shape into a desired shape such that solar rays striking the reflective surface are focused on a target, and a solar energy receiver is attached to the framework at a location corresponding to the target. Thin wall tubing filled with pressurized air can provide strong light frame members. When the shaping force system is deactivated, the flexible sheet reverts substantially to the loose shape.

Abstract: An optical system includes a lens assembly and a light source. The lens assembly includes an optical lens positioned to transmit and refract light provided by the light source, and a lens holder coupled to the optical lens and maintaining a position of the optical lens relative to the light source. The optical lens is coupled to the lens holder with a bonding agent arranged in an interrupted configuration at positions proximate to a circumference of the optical lens. The light source provides light to the optical lens of the lens assembly that has an optical footprint that includes a plurality of high-intensity regions separated from one another by low-intensity regions and the bonding agent is positioned in a circumferential orientation relative to the light source such that the bonding agent is spaced apart from the high-intensity regions of the optical footprint of the light.

Abstract: A camera module, in particular, for a vehicle, the camera module including at least: an objective mount and an objective, which is held in the objective mount and has a lens holder and at least one lens secured in the lens holder, the objective being fixed in position in the objective mount by a frictional connection between an outer surface of the lens holder and an inner surface of the objective mount. A plurality of frictional connection devices spaced apart in the circumferential direction are formed on the outer surface of the lens holder and/or on the inner surface of the objective mount, in order to generate the frictional connection. To insert and to adjust the objective, the objective mount is preferably asymmetrically deformed in an elastic manner, and the objective is placed into the deformed objective mount, and the elastic deformation is subsequently removed.

Abstract: The present invention provides a lens driving device which can limit rotations caused by torque generated when a lens is inserted or disassembled. The state that the lens driving device is damaged can be distinguished, and the finished product rate and reliability of a camera assembly are improved more easily. The lens driving device includes a lens support, a coil disposed on the lens support, a fixing assembly and springs for supporting the lens support to move along the optical axis, and a magnet yoke. Extruding clamping parts closer to the upper side than a mounting surface for the springs to mount are arranged on the lens support, the magnet yoke is provided with bending parts extending from the edge part of the opening part downwardly, and the bending parts of the magnet yoke are located closer to the upper side than the mounting surface.

Abstract: A welded structure may include a first member having a spherical surface part, and a second member which is formed in a plate shape. A part of an end face of the second member before laser welding is performed is formed to be a contact end face having a contact part with which a part of the spherical surface part is contacted. The second member is formed with a joining part including the contact end face and the joining part is joined to the spherical surface part by laser welding. At least before laser welding is performed, a plate thickness of the joining part is thinner than a plate thickness of a portion of the second member except the joining part and the spherical surface part of the first member and the end part of the second member are joined to each other by laser welding.

Abstract: A zoom lens barrel includes front and rear lens group support frames, a first spring member provided to bias the front lens group support frame and a diaphragm in directions away from each other, and a second spring member provided to bias the diaphragm and the rear lens group support frame in directions away from each other. Spring loads of the first and second spring members are determined such that, when the front and rear lens group support frames approach each other during zooming, one and the other of the first and second spring members are compressed and not compressed, and the other of the first and second spring members is compressed after the one of the first and second spring members is fully compressed.

Abstract: The invention relates to a mount assembly comprising two monolithic mounts in which optical components (1.3, 2.3), which can be translationally and rotationally adjusted in relation to each other, are held. The adjustment movements can be carried out without influencing one another, by providing one of the mounts as a rotational mount (1) and the other as a translational mount (2), which substantially only permit a translational and/or a rotational movement within the adjustment region provided.

Abstract: An image capturing module having a built-in dustproof structure includes an image sensing unit, a housing frame and an actuator structure. The image sensing unit includes a substrate and an image sensing chip disposed on the substrate. The housing frame is disposed on the substrate to surround the image sensing chip. The actuator structure includes a lens holder disposed on the housing frame and a movable lens assembly movably disposed inside the lens holder. More precisely, the lens holder has a first surrounding structure disposed on the inner surrounding surface thereof, and the movable lens assembly has a second surrounding structure disposed on the outer perimeter surface thereof and located above the first surrounding structure, and the first surrounding structure of the lens holder and the second surrounding structure of the movable lens assembly are mated with each other to form the built-in dustproof structure.

Abstract: A zoom lens includes a driving device, a zooming frame, and a lens group, wherein the driving device has a lens barrel. The zooming frame is located in the lens barrel, and has a body, a first lens holder, and a second lens holder which are pivotally connected to the body. The body is drivable by the driving device to reciprocally move between a first position and a second position. The first lens holder is respectively pivoted between a third position and a fourth position on the body along with the body being moved between the first position and the second position. The second lens holder is pivoted between a fifth position and a sixth position on the body in the same way. The lens group has a first lens sub-group provided on the first lens holder, and a second lens sub-group provided on the second lens holder.

Abstract: A gravitation compensator for mounting optical elements in a projection exposure apparatus and a corresponding projection exposure apparatus are disclosed. The gravitation compensator at least partly compensates for the weight force of a mounted optical element and simultaneously enables a change in the position of the optical element without the compensated weight force being altered in an impermissible manner during the change in position. This applies, in particular, to high weight forces which are to be compensated. Furthermore, the gravitation compensator enables use in different atmospheres and the compensation of corresponding aging effects.

Abstract: An optical element storage package, an optical filter device, an optical module, and an electronic apparatus are disclosed. The optical element storage package is an optical element storage package having a cavity that accommodates an optical element. The optical element storage package includes a case member that forms the cavity, an enclosure member that is part of the case member and has an opening through which the cavity is open, a first window member that covers the opening from outside the cavity and is bonded to the enclosure member, through which the opening is formed, and a second window member that covers the opening from inside the cavity and is bonded to the enclosure member.

Abstract: A lens holder driving device includes an auto-focusing lens holder driving portion moving a lens holder holding a lens barrel along an optical axis, and an image stabilizer portion stabilizing image blurred by moving the auto-focusing lens holder driving portion in first and second directions which are orthogonal to the optical axis and which are perpendicular to each other. The image stabilizer portion includes: a fixed portion disposed apart from the auto-focusing lens holder driving portion in the direction of the optical axis; a plurality of suspension wires having first end portions fixed to the fixed portion at outer regions thereof, extending along the optical axis, having second end portions fixed to the auto-focusing lens holder driving portion, and swingably supporting the auto-focusing lens holder driving portion in the first direction and the second direction; and a fracture preventing member preventing the suspension wires from fracturing.

Abstract: The present invention relates to a method for microstructuring a substrate. In the method according to the invention a substrate with a region to be structured is provided, and then by applying colloid spheres into this region, a colloid sphere monolayer is formed. The thus applied colloid sphere monolayer exhibits a certain geometrical symmetry. Said colloid sphere monolayer is then illuminated with a beam of spatially modulated intensity distribution synchronized to said monolayer, thereby performing mechanical structuring in said region in conformity with a desired pattern through concentrating beam intensity via near-field effect behind said colloid sphere monolayer in the propagation direction of light.

Abstract: A combination optical aiming device comprises a non-magnifying sight that includes an optic and a magnifying sight that includes an eyepiece and an objective. To reduce the vertical distance between viewing positions for the sights, the optic and the eye lens are truncated in order to position the optic predominately outside of a projection of a perimeter of the eye lens, the projection being parallel to the optical axis of the objective.

Abstract: The present invention relates to a camera module mounted with an external look-forming holder improved in heat emission function, the camera module including: a housing; a lens insertion hole opened toward an upper surface of the housing for insertion of a lens; a filter attachment unit formed on a floor surface of the housing for attaching a filter; and a heat emission outlet formed on an upper surface of the lens insertion hole in an upper-wide/bottom-narrow shape, wherein a heat emission outlet is formed at an upper surface of a lens insertion hole to induce heat generated from inside of a housing to be emitted to outside along an inner side of the heat emission outlet.

Abstract: An optical device includes a supporting frame and a light-transmissive element. The supporting frame has a frame body defining a through hole, and an extending portion extending from a side of the frame body and having a first cutting edge. The light-transmissible element is disposed on the supporting frame and has a main body aligned with the through hole, and an extending portion extending from a side of the main body and aligned with the extending portion of the supporting frame. The extending portion of the light-transmissible element has a second cutting edge that is flush with the first cutting edge of the supporting frame.

Abstract: A camera lens assembly includes: a lens holder unit to which a lens module is mounted; a wire member fixed to the lens holder unit and the lens module, and resiliently supporting the lens module such that the lens module is driven in an optical axis direction; and a fixing member mounted to the lens holder unit to fix the wire member and dampen an impact generated in the wire member due to an impact generated in a direction perpendicular to the optical axis direction. Also, a camera lens assembly can include: a wire module resiliently supporting a lens module such that the lens module is movable in an optical axis direction on a lens holder unit, dampening an impact generated in a direction perpendicular to the optical axis direction, and transferring a current applied to drive the lens module to a circuit board.

Abstract: An articulated support for a mobile phone, tablet, or other mobile electronic device provides an articulated arm. The articulated arm may be mounted on a floor stand or desktop stand. The device may be positioned at a point convenient to a reclining user. In alternate embodiments, the articulated arm may be supported by a wall mount, or by a headband worn by the user. The articulated arm may be modified by the user by adding or removing sections to change its length, or by changing its attachments for electronic devices.

Abstract: There are provided a light source device where optical axes of a light source element and a lens are parallel and the element and the lens are disposed at a predetermined distance, a projector and a light source device fabrication method. A light source device includes a light source element having a flange portion and a cylindrical portion smaller in diameter than the flange portion, a light source element holder disposed abutting a rear of the flange portion, a collimator lens disposed at the front of the element, an annular member disposed between the element and the lens and of which a rear end face abuts a front surface of the flange portion and of which a front end face abuts a rear surface of the lens and a collimator lens holder which accommodates the lens in a hole portion.

Abstract: A lens holder driving device includes a lens holder for holding a lens assembly and a ring-shaped driving coil fixed to the lens holder. The lens holder has N bonded surfaces for bonding N areas of an inner surface of the driving coil to a tubular portion of the lens holder by means of an adhesive agent. At least one of the N bonded surfaces has a peeling inhibiting arrangement for inhibiting the driving coil from peeling from the lens holder after the N areas of the inner surface of the driving coil are bonded to the N bonded surfaces by means of the adhesive agent.

Abstract: An image capturing module having a built-in topmost dustproof structure includes an image sensing unit, a housing frame and an actuator structure. The image sensing unit includes a carrier substrate and an image sensing chip on the carrier substrate. The housing frame is disposed on the carrier substrate to surround the image sensing chip. The actuator structure includes a lens holder disposed on the housing frame and a movable lens assembly movably disposed inside the lens holder. The lens holder has a first topmost surrounding structure disposed on the inner surrounding surface and the topmost side thereof. The movable lens assembly has a second topmost surrounding structure disposed on the outer perimeter surface and the topmost side thereof and above the first topmost surrounding structure. The first topmost surrounding structure and the second topmost surrounding structure are mated with each other to form the built-in topmost dustproof structure.

Abstract: The invention relates to an optical system for forming and image on a concave spherical surface comprising, perpendicularly to the optical axis of the spherical surface, starting from the object side: a first elliptical plano-complex lens (L1) with convexity direct towards the object side; a second aspherical plano-concave lense (L2) whose radius of curvature decreases with distance from the axis, with concavity directed towards the image side, made of a material with a smaller Abbe number that that of the first lens; a parallel-faced plate (S1) on which bear the planer faces of the first and second lenses; a third aspherical plano-convex/concave lens (L3) exhibiting a convex shape in its central part and a concave shape at its periphery.

Abstract: A dust cleaning device includes a tray, a cover assembled to the tray, and an air nozzle. The tray defines recesses for receiving lens barrels. A bottom of each of the recesses defines a through hole communicating with the lens barrel. The cover includes a main body and an inlet tube. The main body includes a top wall, a bottom wall, sidewalls, guide passages between the top and bottom walls, an inlet passage, and outlet passages. The inlet tube extends from the top wall. The guide passages criss-cross and communicate with each other. The sidewalls shield the guide passages. The inlet passage communicates with an inside of the inlet tube and one of the guide passages. The outlet passages communicate with the guide passages and are exposed at the bottom wall. The outlet passages are aligned with the respective recesses. The air nozzle is mounted in the inlet tube.

Abstract: A mask inspection microscope for variably setting the illumination. It serves for generating an image of the structure of a reticle arranged in an object plane in a field plane of the mask inspection microscope. It comprises a light source that emits projection light, at least one illumination beam path, and a first diaphragm for generating a resultant intensity distribution of the projection light in a pupil plane of the illumination beam path, that is optically conjugate with respect to the object plane. The mask inspection microscope has at least one further diaphragm for generating the resultant intensity distribution. The first diaphragm and the at least one further diaphragm influence the resultant intensity distribution of the projection light at least partly at different locations of the pupil plane.