Abstract: An image forming apparatus having a light scanning unit including a light source to emit a light beam; a deflector to deflect the light beam in a main scanning direction; an imaging lens to focus the light beam deflected by the deflector onto a photoconductor; at least one reflecting element to reflect the light beam that has passed through the imaging lens; and a bow control apparatus to correct a bow of a scanning line of the light beam, the bow control apparatus comprising first and second support units to support the reflecting element, first and second pressure units to pressure an inside and an outside of the reflecting element, respectively, and first and second adjusting elements to adjust the amount of pressure of the first and second pressure units, the bow control apparatus convexly or concavely bows the reflecting element to correctan image bow of a scanning line of the light beam.

Abstract: The invention relates to a bimorph optical device comprising a deformable optical element and active elements made of piezoelectric ceramic provided with electrodes, said elements being controlled in pairs and in opposition so as to produce a compression movement for a first element of a pair and an extension movement for the second element of a pair, the device being characterized in that the optical element (1) presents an optically active first main surface (6) and a second main surface (7) opposite to the first main surface, together with at least first and second opposite lateral faces (2, 3), and in that the ceramic active elements comprise at least two pairs of bars (21, 22; 31, 32) of piezoelectric ceramic placed facing each other on said first and second lateral faces (2, 3), each pair comprising two bars (21, 22; 31, 32) placed on one of the first and second lateral faces (2, 3) on either side of a middle surface of the optical element (1) that constitutes the neutral axis thereof.

Abstract: A vehicle simulation system equipped to display information on the rear side of a driver (rider). The simulation system includes a dummy bicycle operated by the rider, a monitor on the front side for displaying a scene based on the operations of the dummy bicycle, and a lamp unit connected to the dummy bicycle and provided on the rear side relative to the seated position of the rider. The lamp unit has a red lamp, a yellow lamp and a green lamp, and is controlledly turned ON under the action of a main control unit. An input device is provided on a steering handle of the dummy bicycle. The input device has a switch for red, a switch for yellow, and a switch for green. The rider checks behind, and operates the input device according to the ON/OFF conditions of the lamp unit.

Abstract: Optical devices can comprise a deformable mirror and a system for deforming said mirror. A deformation system comprises a first mechanical structure comprising a first surround, one or more electromechanical actuators attached to the first mechanical structure, a second mechanical structure comprising a substantially planar bottom and a second surround, both deformable, the bottom being attached to the first surround, the second surround being attached to the surround of the mirror, a rigid stud being attached to the bottom, substantially planar and centred on the bottom, the electromechanical actuator or actuators exerting predetermined forces or bending moments on the stud so as to generate a particular distribution of the bending moments on the surround of the mirror, deforming it according to a geometrical form representative or of one or more predetermined geometrical aberrations.

Abstract: The invention relates to a deformable mirror comprising a deformable membrane (2) having a reflecting face (3) and being mounted on a support provided with at least one actuator designed to deform said membrane (2), said actuator comprising at least one movable member (7) fixed to the membrane (2) via an adhesive joint (8) and having a main body (11) located away from the adhesive joint (8), said body being extended by an active part (12) that penetrates said adhesive joint (8) partly or completely in such a way that the adhesive spreads over the concealed face (4), parallel to the reflecting face (3), and adheres at least partly to the side wall (14) of said active part (12), this part (12) forming a tip (32) limiting the bonding footprint on said reflecting face (3). Deformable mirror for adaptive optics.

Abstract: A micro-electro-mechanical system (MEMS) actuator assembly includes a mirror and four actuators. Each actuator includes a lever pivotable about a fulcrum axis. The inner end of each lever is coupled to one side of the mirror. Force is applied to one outer end of the levers to move one side of the mirror, which positions the mirror in one of four positions. Force is applied to two outer ends of the levers to move two sides of the mirror, which positions the mirror in one of four additional positions.

Abstract: The invention relates to a bimorph optical device comprising a deformable optical element and active elements made of piezoelectric ceramic provided with electrodes, said elements being controlled in pairs and in opposition so as to produce a compression movement for a first element of a pair and an extension movement for the second element of a pair, the device being characterized in that the optical element (1) presents an optically active first main surface (6) and a second main surface (7) opposite to the first main surface, together with at least first and second opposite lateral faces (2, 3), and in that the ceramic active elements comprise at least two pairs of bars (21, 22; 31, 32) of piezoelectric ceramic placed facing each other on said first and second lateral faces (2, 3), each pair comprising two bars (21, 22; 31, 32) placed on one of the first and second lateral faces (2, 3) on either side of a middle surface of the optical element (1) that constitutes the neutral axis thereof.

Abstract: An optical component bowing device includes a bending moment generating structure. In a particular embodiment, the bending moment generating structure can have extension members that extend in a direction substantially orthogonal to a longitudinal direction of an optical component. The extension members can be positioned adjacent longitudinal end portions of the optical component. The bending moment generating structure can also have loading members that load the extension members in a direction that is parallel to a longitudinal direction of the optical component, whereby displacement of the extension members can generate a bending moment in a supported portion of the optical component that reflects or shapes a light beam. The bending moment generating structure can also include a reflective surface. Extension members on at least one end of the optical component can be T-shaped when seen in plan view in a direction orthogonal to the reflective surface.

Abstract: A fast-steering, deformable mirror system is configured to manipulate a reflective surface in order to control the reflection of electromagnetic radiation off of the reflective surface. The system is configured to steer the reflective surface as a unit, and also to deform the reflective surface. The system is designed to reduce hysteresis in drive signals that control deformation of the reflective surface, to maintain an overall size and/or footprint of conventional fast-steering, non-deformable mirror systems, and/or provide other enhancements.

Abstract: A deformable mirror includes a plurality of block segments and at least one actuator. The block segments are arranged in an array, with adjacent block segments being coupled together by an elastomer and the top surface of the array being reflective. The at least one actuator is coupled to at least one of the block segments at the bottom surface of the array and is adapted to adjust in piston.

Abstract: An electromechanical systems device includes a plurality of supports disposed over a substrate and a deformable reflective layer disposed over the plurality of supports. The deformable reflective layer includes a plurality of substantially parallel columns extending in a first direction. Each column has one or more slots extending in a second direction generally perpendicular to the first direction. The slots can be created at boundary edges of sub-portions of the columns so as to partially mechanically separate the sub-portions without electrically disconnecting them. A method of fabricating an electromechanical device includes depositing an electrically conductive deformable reflective layer over a substrate, removing one or more portions of the deformable layer to form a plurality of electrically isolated columns, and forming at least one crosswise slot in at least one of the columns.

Abstract: The embodiment of the invention provides a supporting and a shape-regulating device for a reflector of a heliostat, which relates to the solar field.

Abstract: A millimeter wave power source module may include N submodules, each of which includes M circuit devices, where M and N are greater than one. Each circuit device may have an output connected to a corresponding radiating element. Each submodule may include a power divider having K input ports and M output ports, where K is a factor of M. Each input port may be coupled to a corresponding receiving element, and each output port may be coupled to an input of a corresponding circuit device. Each submodule may include a heat spreader for removing heat from the circuit devices. The power source module may include a combination RF feed network and heat sink. The combination RF feed network and heat sink may include a wavefront expander to expand the RF input wavefront along at least one axis, and to direct the expanded wavefront to the receiving elements of the N submodules. The combination RF feed network and heat sink may also include a heat exchanger thermally coupled to the heat spreaders of the N submodules.

Abstract: An array of reflective elements in which at least one of the reflective elements is mounted on a mounting which comprises a rod at least partially located within a sleeve. A first end of the rod is fixed to a first end of the sleeve and a second end of the rod is moveable, the sleeve including a first resiliently flexible portion which is configured to bend in order to allow the movement of the second end of the rod to take place, wherein the reflective element is mounted at the first end of the sleeve such that bending of the sleeve causes rotation of the reflective element.

Abstract: A structure such as an electronically deformable mirror contains a deformable membrane, an array of actuators located facing the membrane, each actuator being arranged to actuate local displacement of the membrane perpendicular to its surface. The actuators and the membrane are connected via an array of actuating connections. The actuating connections substantially transmit movement perpendicular to the second surface, but leave planar displacement and/or local rotation of the second surface substantially free. Preferably, the actuators contain an array of soft magnetic islands on a soft magnetic base plane, with actuator coils running around the islands and a system of sort magnetic walls on the base plane to separate the coils. The walls support a soft magnetic resilient surface that extend over of the islands and serve to drive the actuating connections.

Abstract: Provided is a large scale light shielding device and a light shielding method for controlling weather. A light shielding device 1 includes a shielding member 11 that shields a part or all of spectrums of sunlight, a buoyant force imparting unit 13 having buoyant members 41, and a drive mechanism 15. The shielding member 11 includes, in order to shield the part or all of the spectrums of the sunlight, a light shielding unit 35 and a light transmitting unit 37. The drive mechanism 15 includes a driving unit 21 that settles or changes a position of the light shielding device 1, and a controlling unit 25 for the driving unit 21. Buoyant force is produced by the buoyant members 41, and imparted to the light shielding device 1 in a direction opposite of gravity due to an own weight of the main body.

Abstract: A fast-steering, deformable mirror system is configured to manipulate a reflective surface in order to control the reflection of electromagnetic radiation off of the reflective surface. The system is configured to steer the reflective surface as a unit, and also to deform the reflective surface. The system is designed to reduce hysteresis in drive signals that control deformation of the reflective surface, to maintain an overall size and/or footprint of conventional fast-steering, non-deformable mirror systems, and/or provide other enhancements.

Abstract: A manufacturing method for variable shape mirrors, which is suitable for mass production, includes a bonding step for sandwiching support pillars and piezoelectric elements between a support substrate and a mirror substrate, and bonding at least the support substrate and the support pillar to each other, the support substrate and the piezoelectric element to each other, and the mirror substrate and the support pillars to each other, respectively, and an elastic film forming step for forming a flat elastic film on the outer surface of the mirror substrate, and a reflection film forming step for forming a reflection film on the elastic film.

Abstract: A combination mirror and media display device assembly is provided. The combination mirror and media display device includes a mirror platform having a media display device viewing area and a media display device coupled to the mirror platform. The media display device is positioned to display images through the media display device viewing area.

Abstract: A curve correction mechanism for correcting a direction and degree of curvature of a reflecting mirror that reflects a light beam includes an adjuster to contact and move a pressing member between a first position, where a first pressing portion of the pressing member presses against an outboard portion of the reflecting mirror provided outboard from a support that supports the reflecting mirror in a longitudinal direction of the reflecting mirror while a second pressing portion of the pressing member is isolated from the reflecting mirror, and a second position, where the second pressing portion of the pressing member presses against an inboard portion of the reflecting mirror provided inboard from the support while the first pressing portion of the pressing member is isolated from the reflecting mirror.

Abstract: This invention relates to a plate-type deformable mirror with discrete contacts between the faceplate and the actuators.

Abstract: This invention deals with novel method and apparatus for positioning and motion control of the elements (mirrors) of a Fresnel reflector solar concentrator tracking heliostat array by induced and/or permanent dipole coupling to an electronic grid to produce angular deflection, and rotational motion. Thus forces and torques are produced without the use of internal moving parts. Control is achieved without recourse to magnetic fields, by means of high electric fields which may be attained at relatively low voltages. At low voltages, the instant invention exceeds the capability of conventional systems. It can perform dynamic motion control with independent amplitude and frequency modulation. It is ideally suited for maximization of solar energy focused by the array onto a receiver. Since there are no internal moving parts, the instant invention is the most adapted for fabrication from the mini- to the microtechnology realm.

Abstract: An individual mirror is used to construct a facet mirror. A mirror body of the individual mirror is configured to be tiltable relative to a rigid carrier body about at least one tilting axis of a tilting joint. The tilting joint is configured as a solid-body joint. The solid-body joint, perpendicular to the tilting axis, has a joint thickness S and, along the tilting axis, a joint length L. The following applies: L/S>50. The result is an individual mirror to construct a facet mirror, which can be reproduced and is precisely adjustable and simultaneously ensures adequate heat removal, in particular, heat produced by residually absorbed useful radiation, which is reflected by the individual mirror, by dissipation of the heat by the mirror body.

Abstract: A strobe reflector that includes a reflective material and a support structure is provided. The support structure may be adjusted or moved into at least two distinct positions to provide two distinct shapes for the reflective material. The first position of the support structure shapes the reflective material in a first configuration (such as a half-hemisphere) and a second position of the support structure shapes the reflective material in a second configuration (such as a full hemisphere). The different shapes of the reflective material may be used for different mountings of the strobe device, such as for a ceiling mount or a wall mount. In this way, a single strobe reflector may be configured for different installations (whether to the wall or ceiling).

Abstract: An endoscope has a tubular shaft whose interior contains components, in particular lenses, spacers, diaphragms, prisms and filters of an optical system, said components being at least partially surrounded by a support piece made of shrunk material. It is proposed that the components be surrounded by a transparent and tube-sleeve-shaped shrunk material which has been shrunk before the components are introduced into the tubular shaft.

Abstract: The present invention relates to a deformable mirror (1) comprising a deformable membrane (2) with a reflective outer face (3) and an opposite face (4), a rigid support plate (7), and at least one force actuator (5, 6). Each actuator (5, 6) comprises at least two elements (5, 6) suitable for interacting with each other remotely so as to generate a force in a direction that is substantially perpendicular to the surface of the initially non-deformed membrane (2), and suitable for being displaced relative to each other in the direction of said generated force so as to cause said membrane (2) to be deformed locally. One of the two elements (5, 6) is incorporated into the support plate (7) and the other element is coupled to the membrane (2). One of said two elements (5, 6) is suitable for controlling the intensity of said generated force.

Abstract: A deformable hinge for use in microelectromechanical devices comprises a protection layer that is electrically conductive. The protection layer is on top of another hinge layer; and is more resistive than the hinge layer to the etchant used in during patterning and/or release processes during fabrication of the microelectromechanical device. As a result, the hinge layer can be protected from being damaged during the fabrication process.

Abstract: A pair of support members each having a spring section in a part thereof support a mirror element, and a pair of drive mechanisms arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base. Accordingly, the mirror element can be translated by driving all of the drive mechanisms, or the mirror element can be inclined with respect to the base by driving some of the drive mechanisms.

Abstract: System and method for estimating and correcting an aberration of an optical system. The method includes capturing a first plurality of images on a first plurality of planes. The first plurality of images is formed by at least the optical system. Additionally, the method includes processing at least information associated with the first plurality of images, and determining a first auxiliary function based upon at least the information associated with the first plurality of images. The first auxiliary function represents a first aberration of the optical system. Moreover, the method includes adjusting the optical system based upon at least information associated with the first auxiliary function.

Abstract: An illumination optical system for microlithography is used to guide an illumination light bundle from a radiation source to an object field in an object plane. A field facet mirror has a plurality of field facets to predetermine defined illumination conditions in the object field. A following optical system is arranged downstream of the field facet mirror to transfer the illumination light into the object field. The following optical system has a pupil facet mirror with a plurality of pupil facets. Some of the field facets are divided into individual mirrors, which predetermine individual mirror illumination channels. The latter illuminate object field portions, which are smaller than the object field. At least some of the individual mirrors are configured as individual correction mirrors.

Abstract: A reflector for the lighting device and an illumination system of the projection apparatus are provided. The reflector comprises a first reflecting structure and a second reflecting structure disposed on the portion of the first reflecting structure. The reflecting surfaces of the first and second reflecting structures are formed with a distance therebetween. After the first portion of the light is reflected from the first reflecting surface and the second portion of the light is reflected from the second reflecting surface, the second portion of the light is adapted to remove the centrally dimmed area at the opening of the lighting device. Thus, the luminance performance can be improved.

Abstract: The present disclosure relates to a deformable mirror including a deformable membrane with a reflecting face and an opposite face, a stiff plate and a structure of at least one actuator at least a part of which is fixed to the stiff plate and able to locally deform the membrane, wherein the deformable mirror also includes a not necessarily uniform adhesive layer against the opposite surface of the membrane, and a structure of at least one flexible coupling including a mechanical connection and upper and lower linking means coupling respectively the upper and lower ends of the mechanical connection to the adhesive layer and to the stiff plate. The disclosure also relates to a tool and a method making it possible to produce such a mirror.

Abstract: A MEMS hierarchically-dimensioned deformable minor comprising a substrate, a plurality of spacers disposed on the substrate, a plurality of piezoelectric cantilever microactuators disposed on the plurality of spacers, and a continuous deformable membrane disposed on the plurality of the cantilever assemblies, has significantly improved overall device performances owing to the use of the cantilever microactuators based on relaxor ferroelectric single crystal materials or other piezoelectric materials.

Abstract: A facet mirror is to be used as a bundle-guiding optical component in a projection exposure apparatus for microlithography. The facet mirror has a plurality of separate mirrors. For individual deflection of incident illumination light, the separate mirrors are in each case connected to an actuator in such a way that they are separately tiltable about at least one tilt axis. A control device, which is connected to the actuators, is configured in such a way that a given grouping of the separate mirrors can be grouped into separate mirror groups that include in each case at least two separate mirrors. The result is a facet mirror which, when installed in the projection exposure apparatus, increases the variability for setting various illumination geometries of an object field to be illuminated by the projection exposure apparatus. Various embodiments of separate mirrors for forming the facet mirrors are described.

Abstract: This invention deals with novel method and apparatus for positioning and motion control of the elements (mirrors) of a Fresnel reflector solar concentrator tracking heliostat array by induced and/or permanent dipole coupling to an electronic grid to produce angular deflection, and rotational motion. Thus forces and torques are produced without the use of internal moving parts. Control is achieved without recourse to magnetic fields, by means of high electric fields which may be attained at relatively low voltages. At low voltages, the instant invention exceeds the capability of conventional systems. It can perform dynamic motion control with independent amplitude and frequency modulation. It is ideally suited for maximization of solar energy focused by the array onto a receiver. Since there are no internal moving parts, the instant invention is the most adapted for fabrication from the mini- to the microtechnology realm.

Abstract: An apparatus and method for effecting and changing optical distortions is disclosed. The apparatus includes a beam imaging apparatus including a first deformable mirror, a second deformable mirror, and a beam-steering apparatus. The beam-steering apparatus includes a plurality of planar tiltable mirrors arranged to define a radiation beam path therebetween, wherein the plurality of planar tiltable mirrors comprises at least three tiltable mirrors. A mirror drive system is configured to tilt each respective planar mirror about its respective axis of rotation or axes of rotation and a controller is configured to control deformation of a reflective surface of the first and the second deformable mirrors.

Abstract: An electromechanical systems device includes a plurality of supports disposed over a substrate and a deformable reflective layer disposed over the plurality of supports. The deformable reflective layer includes a plurality of substantially parallel columns extending in a first direction. Each column has one or more slots extending in a second direction generally perpendicular to the first direction. The slots can be created at boundary edges of sub-portions of the columns so as to partially mechanically separate the sub-portions without electrically disconnecting them. A method of fabricating an electromechanical device includes depositing an electrically conductive deformable reflective layer over a substrate, removing one or more portions of the deformable layer to form a plurality of electrically isolated columns, and forming at least one crosswise slot in at least one of the columns.

Abstract: A method for mounting a mirror for use in a telescope includes attaching the mirror to a plurality of adjustable mounts; determining a distortion in the mirror caused by the plurality adjustable mounts, and, if the distortion is determined to be above a predetermined level: adjusting one or more of the adjustable mounts; and determining the distortion in the mirror caused by the adjustable mounts; and in the event the determined distortion is determined to be at or below the predetermined level, rigidizing the adjustable mounts.

Abstract: A large, thin, variable focus lens that would be practical in a variety of applications, such as eyeglasses. An example of the present invention is a surface that can be deformed to a desirable shape in a simple, controllable fashion. In particular, a surface shape with desirable optical properties is achievable. The surface has the ability to produce a reflective or refractive surface with a variable optical power.

Abstract: The present invention is related to a deformable mirror comprising individual units (1), each unit including a continuous reflective substrate (2) having a front and back surface, on the back surface of the substrate: a continuous mass electrode (3) and a plurality of in-plane actuators (4) of electrostrictive or piezo-electric material, arranged between the mass electrode (3) and individual addressing electrodes (5).

Abstract: A deformable mirror includes a plurality of block segments and at least one actuator. The block segments are arranged in an array, with adjacent block segments being coupled together by an elastomer and the top surface of the array being reflective. The at least one actuator is coupled to at least one of the block segments at the bottom surface of the array and is adapted to adjust in piston.

Abstract: An optical unit including a plate, an optical element, a fixing device for partially fixing the optical element against the plate, and a deforming device, located between the plate and the optical element, for applying a deforming force to the optical element to change a surface shape of the optical element. The deforming device includes poles for contacting a back face of the optical element, and actuators for driving the poles against the plate.

Abstract: In a variable-shape mirror provided with a support base, a mirror portion that is disposed to face the support base and that has, on a side thereof facing away from the support base, a mirror surface which is irradiated with a light beam, and piezoelectric elements that are sandwiched between the support base and the mirror portion and that vary the shape of the mirror surface, the piezoelectric elements are bonded, by means of a thin layer of metal, to at least one of the support base and the mirror portion by the application of heat and pressure.

Abstract: A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.

Abstract: This invention relates to a deformable-mirror holder for holding a mirror in a desired position, to within accepted tolerances, even whilst the mirror is deforming or in a deformed state. In particular, this invention relates to a holder for a bimorph mirror. A deformable-mirror holder is provided comprising a body with a central aperture for receiving a deformable mirror, the central aperture being defined by a plurality of flexible beams, with each flexible beam having an end shaped to provide a supporting surface and a flexible portion that connects the beam's end to the holder's body.

Abstract: A deformable mirror formed out of two layers of a nanolaminate foil attached to a stiff substrate is introduced. Deformation is provided by an electrostatic force between two of the layers. The internal stiffness of the structure allows for high-spatial-frequency shapes. The nanolaminate foil of the present invention allows for a high-quality mirror surface. The device achieves high precision in the vertical direction by using foils with accurately controlled thicknesses, but does not require high precision in the lateral dimensions, allowing such mirrors to be fabricated using crude lithography techniques. Such techniques allow structures up to about the meter scale to be fabricated.

Abstract: Provided is a compact, high-speed deformable mirror for use with an adaptive optic. The mirror or wavefront correction device corrects and/or compensates for wavefront aberrations present in a wavefront received by the optics. The mirror includes a deformable membrane which may be made of a semiconductive, metallic or insulating material. Positioned in close proximity to a front surface of the membrane is a transparent conductor, which may be covered by a window having an anti-reflective coating. A plurality of electrostatic actuators is located in close proximity to a back surface of the membrane, the conductor and actuators separated by a gap of approximately 10 ?m. In operation, a bias voltage is applied to the transparent conductor and an actuator voltage is applied to the plurality of actuators. The resultant voltage differential across the membrane defines the amount of membrane deformation, which in turn compensates for distortions in a subsequently reflected wavefront.

Abstract: It is an object of the present invention to provide a low cost moveable mirror with 2 axes of movement that is suitable for use in an optical application where a relatively large tip of tilt of a mirror is needed in a known series of positions repeatably and rapidly. This object is achieved by providing a planar structure with 4 bending actuators that can be produced through MEMs based manufacturing. The moveable mirror is flexibly connected to the bending actuators so it can be moved on 2 axes. The bending actuators are designed to have substantial length to increase the angular movement of the mirror. Hard stops are provided to provide repeatable and accurate positioning of the mirror for selected positions.

Abstract: An optical module includes a mirror which reflects input light and which outputs output light; and a mirror control section which is opposite to the mirror and which controls, at the time of the input light being reflected from a reflecting surface of the mirror, the reflecting surface by distorting the reflecting surface according to voltage applied to the mirror so as to output the output light an optical coupling characteristic of which changes. By using this optical module, the optical coupling characteristic of the output light changes.

Abstract: Manufacturing method for variable shape mirrors suitable for mass production includes steps: for forming first grooves and second grooves along boundaries between areas to be variable shape mirrors on a surface of first wafer to be support substrate and a surface of second wafer to be mirror substrate; for arranging first and second wafer so that support pillars and piezoelectric elements are sandwiched between first and second wafer at areas with surface on which second grooves are formed facing inward for bonding; for dividing second wafer into mirror substrates by flattening process of outer surface of second wafer until at least reaching second groove; for dividing first wafer into the support substrates by breaking first wafer along first grooves; and for forming reflection film on outer surface of each of mirror substrates obtained by the dividing step.