Abstract: Provided is a sensor device including: a sensor unit that emits light and receives light reflected by an object; and a reflection mirror that is a columnar reflection mirror having a reflection surface on a side face and is configured to be rotated on an axis of the reflection mirror as a rotation axis, in which at least a part of the reflection surface forms a logarithmic spiral having the center at the rotation axis in a cross section perpendicular to the rotation axis, and when light emitted from the sensor unit and reflected by the reflection surface moves in parallel in response to rotation of the reflection mirror, the light reflected by the reflection surface is swept.

Abstract: A field facet system for a lithography apparatus includes an optical element. The optical element includes a base section having an optically effective surface. The optical element also includes a plurality of lever sections provided at a rear side of the base section facing away from the optically effective surface. In addition, the field facet system includes two or more actuating elements configured, with the aid of the lever sections acting as levers, to apply in each case a bending moment to the base section to elastically deform the base section and thus to alter a radius of curvature of the optically effective surface. The actuating elements are arranged in series as viewed along a length direction of the optical element.

Abstract: An optical imaging arrangement includes an optical element and a piezoelectric device. The optical element includes an optical element body carrying an optical surface on a front side of the optical element body. The piezoelectric device includes a first electrode and at least one piezoelectric element. The first electrode is configured to cooperate with the at least one piezoelectric element and at least one second electrode, when the at least one second electrode is located on a rear side of the optical element body and the at least one piezoelectric element is located between the first electrode and the at least one second electrode, the rear side of the optical element body being opposite to the front side of the optical element body. The first electrode is located on the front side of the optical element body, and the at least one piezoelectric element is formed by at least one piezoelectric section of the optical element body.

Abstract: The application relates to a composite part which comprises a cell core, a connecting layer, a planar glass and optionally a further flexible layer. The cell core is filled with a hardened polymer, such that the composite part can be produced in a one-shot process.

Abstract: A deformable mirror can include a reservoir containing a ferrofluid. The deformable mirror can also include a reflective face sheet covering a front side of the reservoir such that a back side of the reflective face sheet is exposed to the ferrofluid. The reflective face sheet can have a reflective surface on a front side of the reflective face sheet opposite the back side. The reflective face sheet can have a non-uniform thickness between the front and back sides of the reflective face sheet to provide stiffness for the reflective face sheet. In addition, the deformable mirror can include one or more electromagnets operable to generate a magnetic field that acts on the ferrofluid to deform the reflective face sheet. A deformable mirror system can further include a control system operably coupled to the one or more electromagnets to control the magnetic field and thereby a deformation of the reflective face sheet.

Abstract: A non-drive dynamic stabilizer includes a damper and an actuator. The dynamic stabilizer provides multiple states of support to a solar tracker structure. These states may include 1) flexible movement and/or damping during normal operation (i.e. tracking) and/or 2) rigid or locked, whereby the dynamic stabilizer acts as a restraint. The dynamic stabilizer is actuated by a control system according to the real-time demands on the structure. Sensors to provide input to the control system may include wind speed sensors, wind direction sensors, snow sensors, vibration sensors and/or displacement sensors.

Abstract: A method for aligning multiple optical components in an optical system including placing a sphere at a first position that is at a center of curvature of a first optical component, and aligning a focus of a first reference signal with the sphere at the first position. Then, moving the sphere along an axis of optical symmetry to a second position that is at a center of curvature of a second optical component, and aligning a focus of a second reference signal with the sphere at the second position. The first optical component is aligned with the first reference signal and fixing the first optical component, and the second optical component is aligned with the second reference signal and fixing the second optical component.

Abstract: A reflective camera and an electronic device are provided. The reflective camera includes a first mirror, a second mirror and an imaging detector. The first mirror is provided with a through hole and configured to reflect an incident light. The second mirror is arranged on a first side of the first mirror, and configured to reflect the incident light reflected by the first mirror. The imaging detector is arranged on a second side of the first mirror, and configured to receive the incident light reflected by the second mirror through the through hole, and further to convert the incident light into an electrical signal for imaging.

Abstract: A pressure sensing medical device may include a guidewire including a tubular member having a lumen, the tubular member being translatable between a generally straightened position and a deflected position, and a pressure sensor attached at a distal end of a fiber optic extending within the lumen, the pressure sensor being disposed within a distal portion of the tubular member. The pressure sensor may include a pressure-sensitive membrane disposed on a distal end thereof. The pressure sensor may include one or more contact members capable of providing a contact point between the contact member and an inner surface of the tubular member when in the deflected position, the contact point being axially spaced apart from the membrane along a longitudinal axis of the pressure sensor.

Abstract: An optical element support system and a method of supporting an optical element are provided. The optical element includes an optical axis, an arcuate front surface, and a back surface. The optical element support system includes an axial support system that provides axial support to the optical element in a direction parallel to the optical axis of the optical element, and further includes a lateral support system that provides lateral support to the optical element in one or more directions perpendicular to the optical axis of the optical element that is offset from a center-of-gravity of the optical element.

Abstract: Aspects include a method of manufacturing a flexible electronic structure that includes a metal or doped silicon substrate. Aspects include depositing an insulating layer on a silicon substrate. Aspects also include patterning a metal on a silicon substrate. Aspects also include selectively masking the structure to expose the metal and a portion of the silicon substrate. Aspects also include depositing a conductive layer including a conductive metal on the structure. Aspects also include plating the conductive material on the structure. Aspects also include spalling the structure.

Abstract: An adjustable mirror assembly comprising a mirror, a support, a leaf spring element biased between the support and a planar reverse side of the mirror, said leaf spring element generating a spring force, as well as at least two adjusting units mounted in the support and acting on the mirror in opposition to the spring force. The leaf spring element is mounted to the reverse side of the mirror via at least one mirror mounting point by a substance-to-substance bond and to the support via at least one support mounting point. The spring force is directed toward the support.

Abstract: Substrates suitable for mirrors used at wavelengths in the EUV wavelength range have substrates (1) including a base body (2) made of a precipitation-hardened alloy, of an intermetallic phase of an alloy system, of a particulate composite or of an alloy having a composition which, in the phase diagram of the corresponding alloy system, lies in a region which is bounded by phase stability lines. Preferably, the base body (2) is made of a precipitation-hardened copper or aluminum alloy. A highly reflective layer (6) is preferably provided on a polishing layer (3) of the substrate (1) of the EUV mirror (5).

Abstract: An eye-implantable device including an electrowetting lens is provided that can be operated to control an overall optical power of an eye in which the device is implanted. A lens chamber of the electrowetting lens contains first and second fluids that are immiscible with each other and that differ with respect to refractive index. By applying a voltage to electrodes of the lens, the optical power of the lens can be controlled by affecting the geometry of the interface between the fluids. One or both of the fluids can have a melting point slightly below body temperature. Freezing such an oil or other fluid of the lens can prevent fouling of internal surfaces of the lens due to folding or other manipulation of the lens during implantation. Once implanted, the fluids are melted by body heat such that the optical power of the lens may be controlled.

Abstract: A system, device and method for wirelessly providing power and data to a remote device having a source apparatus generating a modulated collimated beam and a steerable optical element. A remote device with a receiver to convert the modulated collimated beam into an electrical signal which provides a power component for powering the device and a signal component. An uplink channel relays feedback data to position the collimated beam onto the receiver.

Abstract: The disclosure describes an electrowetting contact lens comprising including an electrowetting cell. The cell includes first and second optical windows that form a sealed enclosure. A first electrode is formed on the first optical window, and a second electrode is formed on the second optical window. The first and second electrodes include an electrically conductive layer, and the first electrode includes at least one dielectric layer sandwiched between the relevant optical window and the at least one dielectric layer. Oil and saline layers are positioned in the sealed enclosure so that the oil is in contact with one electrode and the saline is in contact with the other electrode. A protective coating encloses the electrowetting cell, and a contact lens material encloses the sealing material. Other embodiments are disclosed and claimed.

Abstract: An optical beam steering device can include a first electrically conductive fluid having an optically reflective surface thereon, and this first electrically conductive fluid may include a material that deforms in response to application of a first magnetic field and/or first electric field thereto. This first electrically conductive fluid may be an optically reflective material. The optically reflective surface may at least partially cover a non-fluid substrate that maintains its shape in response to the application of the first magnetic field and/or first electric field. A sealed package may be provided, which includes the optical beam steering device, and the first electrically conductive fluid, the non-fluid substrate and an ambient within the package may be collectively configured to yield a substantially neutrally buoyant condition therein.

Abstract: A process for manufacturing a mirror includes preparing a mirror core by successively depositing a plurality of layers of a core material to form a core structure; and bonding, using a bonding material, the mirror core to a front polishable faceplate and a back faceplate. A mirror includes a mirror core including a plurality of layers of a core material; a front polished faceplate; and a back faceplate. The front polished faceplate and the back faceplate are bonded to the mirror core with a bonding material.

Abstract: A mirror is comprised of a reflective film including a flexible polymer with a reflective coating, at least one magnet attached to the reflective film, a motor configured to rotate the reflective film wherein the reflective film is secured to the motor, and at least one electromagnet configured to receive an applied voltage. The mirror further comprises a first flexible support layer to increase the rigidity of the reflective film during curvature change and a second rigid support layer to prevent the reflective film, first support layer, and at least one magnet from contacting the at least one electromagnet.

Abstract: A method and a mirror selectively magnify an image reflected by a discrete portion of a reflective area of the mirror while an image reflected by the remainder of the reflective area outside the discrete portion remains unchanged. A light-transmitting area is placed within the reflective area, outside of and adjacent to the discrete portion, and a light source is located for directing light through the light-transmitting area to illuminate a space adjacent to and confronting at least the discrete portion of the reflective area.

Abstract: A process for manufacturing a mirror includes preparing a mirror core by successively depositing a plurality of layers of a core material to form a core structure; and bonding, using a bonding material, the mirror core to a front polishable faceplate and a back faceplate. A mirror includes a mirror core including a plurality of layers of a core material; a front polished faceplate; and a back faceplate. The front polished faceplate and the back faceplate are bonded to the mirror core with a bonding material.

Abstract: A flexible fluidic mirror system and a hybrid fluidic optical system is disclosed herein. The flexible fluidic mirror system generally includes a flexible fluidic mirror having an outer housing and a flexible membrane supported within the outer housing, and a fluid control system operatively coupled to the flexible fluidic mirror. A portion of the flexible membrane comprises a reflective coating or film or nanoparticles disposed thereon or sprayed on. The hybrid fluidic optical system generally includes a hybrid fluidic optical device (i.e., a lens or mirror) having an outer housing and a flexible membrane supported within the outer housing, and a fluid control system operatively coupled to the hybrid fluidic optical device. The hybrid fluidic optical device further includes a magnetically actuated subsystem configured to selectively deform the flexible membrane so as to increase or decrease the convexity of the flexible membrane of the hybrid fluidic optical device.

Abstract: An element (1) is provided for stabilising an optoelectronic device (7), wherein the element (1) comprises a main body (1C), wherein the main body (1C) consists of a glass or at least comprises a glass and wherein the main body (1C) comprises a first and a second surface (1A, 1B). The first and second surface (1A, 1B) are opposite to one another and extend in each case in a lateral main direction of extension of the element (1), wherein a protective layer (2A, 2B) is formed at least at one of the surfaces (1A, 1B) and wherein the protective layer (2A, 2B) is configured and arranged in such a way that cracks (3) present in the main body (1C) are filled in by a material of the protective layer (2A, 2B). In addition, an optoelectronic device (7) is provided.

Abstract: The invention relates to a light module (1) for a motor vehicle or for a motor vehicle headlamp, wherein the light module (1) has at least two or more light sources (10, 11), which are positioned in defined positions relative to one another, and wherein the light module (1) also has two or more reflectors (20, 21), wherein at least one reflector (20, 21) is associated with each light source (10, 11), wherein at least one of the reflectors (20, 21) is movably connected to at least one adjacent reflector (20, 21).

Abstract: The disclosure relates to an optical device, in particular for microlithography. The optical device includes an optical module and a support structure that supports the optical module. The optical module includes an optical element and a holding device that holds the optical element. The holding device includes a deformation device having a plurality of active deformation units which contact the optical element and which are designed so as to impose a pre-defined deformation on the optical element. The optical module is fixed to the support structure in a replaceable manner.

Abstract: Techniques and mechanisms for providing an eye-mountable device including an accommodation actuator. In an embodiment, fabrication of the eye-mountable device includes sealing layers of enclosure material to form a lens enclosure comprising a pinch-off region where the layers of enclosure material physically contact one another. The accommodation actuator includes a liquid crystal layer disposed between the layers of enclosure material in a central region around which the pinch-off region extends. In another embodiment, electrodes are disposed in the central region each between the liquid crystal layer and a respective one of the layers of enclosure material. The liquid crystal layer isolates the electrodes from one another in the central region.

Abstract: An endoscope (1) is provided in which a mechanically or electrically adjustable mirror (7) is interposed between two lenses (3, 4) adapted for stereoscopic image recording and an image recording chip (5), the mirror allows light captured by the lenses (3, 4) to be alternately guided onto the image recording chip (5).

Abstract: An adjustable mirror system, including a flexible mirror configured to change curvature, a shaft coupled to the mirror, a cylinder, wherein the cylinder is configured to receive the shaft and a fluid, and an actuator coupled to the housing, wherein the actuator increases and decreases the pressure of the fluid in the cylinder to drive the shaft and change the curvature of the flexible mirror.

Abstract: An optical device may include a flat optical member; a reinforcement member which is bonded to a back side of the optical member and demonstrates stronger rigidity in a center area thereof than two side portions thereof when curved in a thickness direction in a first direction within an in-plane direction; and a driving device which switches a shape of the optical member together with the reinforcement member between a flat state and a curved state in which the optical member is curved in the first direction.

Abstract: Disclosed is a camera assembly having a wide viewing angle using a variable mirror. The camera assembly includes a variable mirror located in front of an image sensor, a variable mirror controller to switch a mode of the variable mirror to one of a reflection mode to reflect light incident upon the variable mirror and a transmission mode to transmit light incident upon the variable mirror, an image sensor to sense the light reflected by the variable mirror to acquire first image data and to sense the light transmitted through the variable mirror to acquire second image data, and an image processing unit to register the first image data and the second image data acquired by the image sensor to generate a third image.

Abstract: A curvature variable mirror includes a mirror base material that is configured such that the curvature is variable and that reflects laser light on the mirror reflective surface side, wherein the mirror base material is formed by using spring-material copper alloy, and the spring-material copper alloy is constituted by using any of phosphor bronze, copper-nickel-zinc alloy, chromium copper, zirconium copper, titanium copper alloy, copper-nickel alloy, and alloy obtained by adding at least one of Ni (nickel), Sn (tin), Si (silicone), Mg (magnesium), Zn (zinc), Mn (manganese), Pb (lead), Fe (iron), and Al (aluminum) to copper.

Abstract: An optically corrective microprobe for white light interferometry is disclosed. In white light interferometry which uses different spectral ranges, the dispersion-induced dependency of optical path differences on the wavelength between measurement light bundle and reference light bundle is compensated by an efficient, easily miniaturized arrangement. A reference beamsplitter with partially reflecting filters in at least two different spectral ranges for generating at least two transmitted measurement light bundles and associated reflected reference light bundles of nonoverlapping spectral ranges is arranged between the light output surface of the light-conducting fiber and the focusing optics.

Abstract: A method for shaping a glass sheet having a thickness Ev by applying and adhering a layer of a first material that can be subjected to traction onto a first surface of the glass sheet. The layer has a thickness E1. Either the neutral fiber of the complex moves across into the layer of the first material, the glass being then completely under compression; or the neutral fiber moves towards the first material but remains in the glass sheet, the surface of the glass being then subjected to a level of traction lower than the failure value. The complex comprising the glass sheet coated with the first layer of material is deformed, such that it is close to the final shape and the glass is mainly under compression. A stabilizing element B is applied and adhered or attached onto the complex A and of dimensionally stabilizing the final shape.

Abstract: System for establishing a surface shape. The system includes a compliant substrate including the surface and having a reverse side, and a plurality of discrete actuators engaging the reverse side and arranged in a selected pattern to control the surface shape as individual discrete activators are activated. It is preferred that the actuators have multiple discrete stable states of elongation. A particularly preferred embodiment uses actuators that are binary with two stable states of elongation.

Abstract: An optical element is described that is a single molded piece. It includes a parabolic mirror configured to reflect substantially collimated light incident along a first axis. The reflected light converges towards a virtual focal point located along a second axis. The piece also includes a plane turning mirror positioned with respect to the parabolic mirror such that the converging light hits a surface of the plane mirror after traveling a distance less than a focal length of the parabolic mirror. The plane mirror reflects the incident converging light outward as exit light, which focuses at a final focus point located a nonzero distance from the plane mirror. The final focus point is located in a plane defined by the second axis and a third axis, and is offset at a nonzero angle from the third axis relative to a point on the surface of the plane mirror.

Abstract: A wall mountable mirror includes an enclosure and a replaceable film sheet allowing easy repair to commercial bathroom mirrors following vandalism. The enclosure includes a backing frame and a face frame. The backing frame is mounted to a wall and the face frame is connected to the backing frame by two pairs of parallel links. A top link pair is preferably longer than a bottom link pair. The film sheet includes small edge rods attached along each edge. The face is pulled out and down to open the enclosure to replace the film sheet. When the face is closed, the last closing motion provided by the links is a parallel motion which uniformly stretches the film sheet by pushing the edge rods over corresponding curved tensioning members to stretch the film sheet providing uniform stretching in two dimensions to provide a flat reflecting surface.

Abstract: It is described a method for the production of a fully or partially reflective stretchable and deformable optical element, comprising the implantation in at least one surface of an elastomeric support, by a technique of “Cluster Beam Implantation”, of neutral nanoclusters of a material selected among one or more metals, their alloys, their oxides or mixtures thereof, thus obtaining in said support a nanocomposite layer, possibly emerging at the surface of said element, and said implantation taking place by: uniformly implanting said nanoclusters in a surface of said elastomeric support, wherein said surface has a molded profile essentially corresponding to the profile of the optical element to be produced; or selectively implanting said nanoclusters in a flat surface of said elastomeric support; or uniformly implanting a first layer of said nanoclusters in a surface of said elastomeric support, and then selectively implanting a second layer of said nanoclusters onto the first nanoclusters layer thus obtain

Abstract: Provided is an actuator formed in a substrate including a handle layer, an elastic body layer, and an insulating layer, the actuator including a movable portion supported to a support portion by an elastic body, a movable comb electrode formed on the movable portion, a fixed comb electrode supported by the support portion, and electrode wirings connected to the respective comb electrodes in which the elastic body supports the movable portion such that the movable portion is displaceable in a direction perpendicular to the substrate in accordance with voltages applied to the comb electrodes; the comb electrodes are made up of the handle layer, and the elastic body is made up of the elastic body layer; and a handle layer separation groove is provided to electrically separate between the handle layers of the support portions supporting the comb electrodes, and a structure reinforcing portion is formed across the separation groove.

Abstract: A curvature variable mirror includes a mirror base material that is configured such that the curvature is variable and that reflects laser light on the mirror reflective surface side, wherein the mirror base material is formed by using spring-material copper alloy, and the spring-material copper alloy is constituted by using any of phosphor bronze, copper-nickel-zinc alloy, chromium copper, zirconium copper, titanium copper alloy, copper-nickel alloy, and alloy obtained by adding at least one of Ni (nickel), Sn (tin), Si (silicone), Mg (magnesium), Zn (zinc), Mn (manganese), Pb (lead), Fe (iron), and Al (aluminum) to copper.

Abstract: A device for correcting optical defects of a telescope mirror, compatible with use in a space environment, is provided, where the criteria of weight, reliability, service life, cost and resistance to extreme temperatures are fundamental. The device comprises at least one controllable-length element, means for controlling the length of this element, this element being connected to the mirror by its ends in zones that are diametrically or diagonally opposed and close to the periphery of this mirror, the connection between the controllable-length element and the mirror comprising attachments that are rigid on the axis joining these two attachment zones and flexible in the other degrees of freedom.

Abstract: System for manufacturing facets comprising a frame a series of mirrors and multiple securing parts in which said parts are the key to the invention and are formed by a rod and a circular metal sheet provided with a series of small circular perforations, where the rod and the circular sheet are attached by electric arc welding or any other equivalent fixation and the purpose of which is to secure a curved mirror to the rear structure or frame of a heliostat.

Abstract: An exterior sideview mirror system includes an exterior sideview mirror assembly including a reflective element having a rearward field of view when attached to a side of an automobile. The reflective element includes has a plano reflective element and a separate auxiliary reflective element having a curvature. The plano reflective element and the auxiliary reflective element are supported adjacently at a backing plate element having a first support portion supporting the plano reflective element and a second support portion supporting the auxiliary reflective element. The auxiliary reflective element is positioned at an outboard portion of the reflective element assembly when the exterior sideview mirror assembly is attached to the side of the automobile. When the exterior sideview mirror assembly is attached to and operated at the side of the automobile, the field of view of the auxiliary reflective element overlaps with the field of view of the plano reflective element.

Abstract: An adaptive mirror for a laser processing apparatus has a housing and a pressure chamber which is arranged in the housing and can be connected to a pressure source. A mirror substrate, which delimits the pressure chamber, is fixedly clamped in the housing. Depending on the internal pressure in the pressure chamber, which can be changed by means of the pressure source, the mirror substrate is deformed. The mirror substrate has a stiffness which increases towards the geometric centre at least in a region surrounding the geometric centre of the mirror substrate. By means of such a stiffness distribution, an almost spherical deformation can be achieved over a large surface of the mirror substrate despite the mirror substrate's being fixedly clamped into the housing.

Abstract: A method for producing a multiple surface system that may be a two-mirror surface. The method involves first finding from a given primary curve an appropriate secondary curve. The method then uses ideas from exterior differential systems to grow from the primary curve and the secondary curve, primary and secondary mirror surfaces. The Cartan-Kähler theorem gives a strong indication of the existence of such solution surfaces.

Abstract: A light weight minor comprising a reflecting element adapted to receive shape adjustments or corrections from an actuated frame. Shape adjustments may be as simple as a uniform curvature, although saddle or higher order shapes are also possible. The frame may execute such adjustments by varying tension or by torsion, with variations applied either locally or uniformly. The frame may be configured to contact a membrane reflector either from one or both sides. Thermal and piezoelectric examples of actuation means are provided along with methods of controlling the shape of said mirrors. To suppress the occurrence of possible vibrations, said mirrors are also provided with eddy current vibration damping means.

Abstract: A thin-sheet panel assembly. In one embodiment, a substantially rigid thin-sheet panel assembly having a non-rigid thin-sheet component includes the thin-sheet component which has selected plan area and shape, a backer having a plan shape and area substantially similar to the thin-sheet component, and plural riser elements of selected height and configuration each extending from the backer to distal ends connected to a reverse surface of the thin-sheet component, the riser elements being configured and disposed in an array which causes the assembly to have substantial rigidity in a selected direction in the thin-sheet component, and the thin-sheet panel assembly further includes a bar coupled to the backer and extending between at least one pair of adjacent riser elements of the plural riser elements.

Abstract: The present invention relates to a deformable mirror (1) comprising a deformable membrane (2) with a reflective outer face (3) and an opposite face (4), a rigid support plate (7), and at least one force actuator (5, 6). Each actuator (5, 6) comprises at least two elements (5, 6) suitable for interacting with each other remotely so as to generate a force in a direction that is substantially perpendicular to the surface of the initially non-deformed membrane (2), and suitable for being displaced relative to each other in the direction of said generated force so as to cause said membrane (2) to be deformed locally. One of the two elements (5, 6) is incorporated into the support plate (7) and the other element is coupled to the membrane (2). One of said two elements (5, 6) is suitable for controlling the intensity of said generated force.

Abstract: The invention relates to arrangements for actuating an element in a microlithographic projection exposure apparatus. In accordance with one aspect, an arrangement for actuating an element in a microlithographic projection exposure apparatus comprises a first number (nR) of degrees of freedom, wherein an adjustable force can be transmitted to the optical element in each of the degrees of freedom, and a second number (nA) of actuators, which are coupled to the optical element in each case via a mechanical coupling for the purpose of transmitting force to the optical element, wherein the second number (nA) is greater than the first number (nR). In accordance with one aspect, at least one of the ac-tuators is arranged in a node of at least one natural vibration mode of the optical element.

Abstract: A method of making specially shaped mirrors for astigmatism correction in spectrometers having a folded optical path using two mirrors by determining the curvature of one or both mirrors in the vertical direction such that the focal length in the sagittal direction of each of said one or both mirrors becomes the same as the focal length in the tangential direction wherein the radius of curvature of each of one or both mirror in the sagittal plane is adjusted to be equal to the radius of curvature in the tangential plane of each of one or both mirrors times the square of the cosign of the angle of incidence of the optical path at each of one or both mirrors is described.

Abstract: A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e.g., an integrated circuit piezoelectric actuator) having a support device and moveable extensions extending therefrom, which are coupled to the second surface, and electrodes coupled to corresponding ones of the extensions. Wavefront aberrations are detected and used to generate a control signal. The extensions are moved based on the control signal. The movement deforms the reflecting surface to correct the aberrations in the wavefront.