Abstract: An apparatus which can neutralize charge bodies such as processed substrates for semiconductor device and for flat display, free from electromagnetic noise, impurity contamination, and residual potentials. To process in a prescribed way a wafer(5) to be processed, the wafer(5) is, for example, moved from a pretreatment chamber(2) to a low pressure reaction chamber(3). In this case, a gas, which does not react on the wafer, such as nitrogen and argon, is introduced into the pretreatment chamber(2), and is kept under a predetermined pressure by a vacuum pump(15). Then, ultraviolet rays are projected in the pretreatment chamber(2) from an ultraviolet rays lamp(11) constituting a means for generating neutralization charge, and positive and negative floating charged particles(electrons and positive ions) are generated by exiting the atmosphere in the chamber(2).

Abstract: The present invention releases anions out of a main body, by using convection occurring due to heat from heat elements inside a product. According to this invention, an apparatus for generating anions is positioned at the upper part in a main body, an ascending air stream formed by heat from heat elements which are in the lower part of a product pushes anions out of a product. Thus an extra fan and fan driver are unnecessary.

Abstract: The invention releases anions out of a main body using convection caused by heat from heating elements inside a product without a fan or a blower. To make up for reduction of the amount of released anions due to elimination of the fan, the apparatus according to the present invention can be drawn out from a main body so as to maximize the amount of released anions.

Abstract: An air ionizing apparatus, specifically an elongated static bar, is provided with an indicating light capable of being energized by extremely low amperage, such as a neon light. The static bar is connected to a source of alternating current, preferably a flux limiting transformer. Upon shorting out of the ionizing points of the static bar, current flow through the conductor of the static bar is reduced below the minimum operating energy of the neon light, which is then not energized, indicating that the static bar is not functioning.

Abstract: A method for rapidly, reliably, and safely removing a substrate from an electrostatic clamping electrode and a mechanism for effecting the method. The method comprises forming a gap between an electrode and a substrate which had been made to hold onto the electrode by electrostatic clamping to increase the electrostatic potential between the substrate and the electrode, generating a DC-glow-discharge in the vicinity of the substrate according to Paschen's law, and removing the substrate from the electrode after eliminating the static charge from the substrate using gas molecules charged by the DC-glow-discharge. A mechanism for effecting the method comprises a means for introducing a gas, a protruding means, a means for controlling the pressure, a sequencer for sequentially activating them, and a lifting mechanism for adjusting the height of the protruding means to the gap distance necessary for generating a DC-glow-discharge between the substrate and the electrode.

Abstract: An air ionizing device that prevents contaminant buildup on the electrodes, comprising a housing that includes a low pressure plenum that meters dry gas to flow near an electrode, and the electrode is surrounded by an annular shaped shroud. The housing and shroud are configured to provide a laminar flow of dry gas around the electrode, such that moist room-air is prevented from reaching the electrode during ionization. The device may further include a plurality of electrodes and shrouds spaced laterally along an elongate housing, and a high pressure plenum to distribute gas at a plurality of locations to the low pressure plenum. A plurality of mounting bars connect each of the electrodes to wiring inside the low-pressure plenum, the wiring routed to a high voltage power supply. The outside of the housing is formed of smooth concave-shaped surfaces to avoid interfering with existing room-air flow. The air-ionizing device is low maintenance and inexpensive to manufacture.

Abstract: An air ionizing device that minimizes interference with existing room-air flow and lighting, comprising a narrow enclosed housing of an insulating material having intake openings and vent openings. Disposed inside the housing is a fan that takes room-air axially through the openings in the housing, and disperses the air radially. The room-air collects inside the housing until the capacity is reached, and then flows downwardly in a laminar fashion sufficiently near a plurality of electrodes to be ionized. The ionized air exits through vents in the housing and is directed towards the workbench. The housing may be extruded to many different lengths, and include a plurality of fans. Sections of the housing may be attached together to span across a long workstation. A conductive rail runs the length of the housing to electrically connect the electrodes. The outside of the housing is formed of smooth concave-shaped surfaces to avoid interfering with existing room-air flow.

Abstract: An air ionizing ring that provides a flow of ionized gas, comprising a housing having an inlet side and an inlet opening, and a cap that releasably attaches to the inlet side of the housing. When a supply of pressurized gas comes between the housing and the cap, the cap is partially released and the gas flows through the inlet opening. The gas flows sufficiently near a plurality of electrode mounted to the housing and electrically connected to a high voltage power source. Ionization occurs and the ionized gas flows towards the workstation. The cap is fabricated from an elastic plastic material designed to deflect away from the housing allowing the pressurized gas to flow. The housing and cap are designed for facilitate gas flow through the inlet opening. The device is simple and inexpensive to manufacture.

Abstract: A vacuum processing method including the steps of generating plasma of a charge neutralizing medium by plasma generating means in a vacuum process chamber, and supplying the charge neutralizing medium in the plasma state to an object during transportion in the vacuum process chamber, thereby neutralizing a charge on the object. With this method, the object can be smoothly transported in a vacuum atmosphere after treatment and adhesion of particles to the object is prevented.

Abstract: Cleaning of a product in strip or sheet form.The device is characterised in that:the electrode is enclosed in an insulating housing (20) connected to the said channel by an antihalo duct (30),the housing is swept by a weak flow of air, so as to carry away the ions on the moving strip.Application to unexposed photosensitive products.

Abstract: The present invention is a method and apparatus for controlling free charge on a moving web. The method and apparatus includes two DC ionizers one of each polarity positioned near one surface of the web. A conductive plate mounted on the opposite side of the web opposite the DC ionizers is controlled in response to the free charge measured on the web downstream of the ionizers. The present invention allows control of the free charge on the web to almost zero without imparting any frequency in the charge on the web.

Abstract: Ionization of air without the use of corona discharge tips, thereby to avoid the generation of particulates from corrosion of the corona tips, is accomplished by use of a laser beam focussed to a small focal volume of intense electric field adjacent a semiconductor chip. The electric field is sufficiently intense to ionize air. In the manufacture of a semiconductor circuit chip, during those steps which are conducted in an air environment, opportunity exists to remove from a surface of a chip, or wafer, charge acquired during the manufacturing process. The ionized air is passed along the chip surface. Ions in the air discharge local regions of the chip surface which have become charged by steps of a manufacturing process. By way of further embodiment of the invention, the ionization may be produced by injection of molecules of water into the air, which molecules are subsequently ionized by a laser beam and directed toward the chip via a light shield with the aid of a magnetic field.

Abstract: A blast nozzle for accelerating a stream of abrasive particles to a surface for the cleaning thereof has a nozzle body formed of a non-electrically conductive material and is provided with an encapsulating coat to prevent breakage of the nozzle body. To prevent the accumulation of static electric charge during the blast cleaning operation, the exterior surface of the blast nozzle core is covered with an electrically conductive layer disposed between the nozzle body and the encapsulating coat, the nozzle further including an electrically conductive grounding pathway contacting the electrically conductive layer and passing through the encapsulating coat so that the electrically conductive layer can be bonded to ground to provide a pathway for removing the accumulated static charge and prevent periodic sparking.

Abstract: An apparatus used in eliminating static buildup in paper (or plastic) stock used within paper handling machines, wherein an anti-static air enhancer cartridge is inserted in an airstream. The airstream passes across the enhancer cartridge where positively charged ions are released into the airstream. The enhanced airstream is then directed at the top sheet of paper stock which is to be fed into the printing press. The positively charged particulates in the airstream act to neutralize the charged static charges which build up between sheets in the stock. This allows the top sheet to be easily separated from the stock, preventing paper jams and misfeeds. The device can be used with existing paper feed mechanisms that use an air supply under pressure to separate stock sheets, such as printing presses, paper collators, paper folding machines, paper sheeters, web presses, sheeters, and thermography machines, or plastic stock feeding machines.

Abstract: A self-cleaning, anti-fouling, ionizing air gun for static neutralization and particle blow-off comprises a generally tubular barrel having an open forward or nozzle end and a rearward open end for drawing air therethrough from the atmosphere. A pointed ion emitting electrode is positioned intermediate the ends of the barrel and directs ions toward the forward nozzle end while a plurality of circumferentially spaced air jets direct streams of compressed air in a conical pattern toward the apex thereof in front of the ion emitting electrode so as to induce air drawn in from the open rear end over the electrode to effect cleansing thereof thereby expelling a high velocity ionized air stream through the forward nozzle end.

Abstract: A control device for use on film cleaners that remove dust, lint and static charge from plastic film surfaces by the use of high velocity ionized air. The high velocity ionized air removes static charge from the film simultaneously as the dust and lint are blown from the surface of the film by the convective action of the air. The control device is automatically activated when film is inserted between two sets of intersecting conductive fibers, thereby breaking the contact between the two sets of conductive fibers. In addition, the control device can be switched between a constant mode, where the air is on continuously, to a pulse mode where the air is pulsed alternately on and off, in a periodic manner, to synchronize the cleaning action with the stop and go advance of an automatic film printer system. The intersecting fibers also prevent the film from being drawn into the air inlets by the "Bernoulli Effect".

Abstract: A method, system and apparatus for maintaining articles to be processed clean, having an airtight transportable container with an inlet valve for admitting ionized gas and an outlet valve for venting gas, a purger with an interface to the container inlet valve and a vacuum pick-up and ionized gas spray wand is disclosed. A purger rack for storing multiple containers is also disclosed.

Abstract: Ionization of air without the use of corona discharge tips, thereby to avoid the generation of particulates from corrosion of the corona tips, is accomplished by use of a laser beam focussed to a small focal volume of intense electric field adjacent a semiconductor chip. The electric field is sufficiently intense to ionize air. In the manufacture of a semiconductor circuit chip, during those steps which are conducted in an air environment, opportunity exists to remove from a surface of a chip, or wafer, charge acquired during the manufacturing process. The ionized air is passed along the chip surface. Ions in the air discharge local regions of the chip surface which have become charged by steps of a manufacturing process. By way of further embodiment of the invention, the ionization may be produced by injection of molecules of water into the air, which molecules are subsequently ionized by a laser beam and directed toward the chip via a light shield with the aid of a magnetic field.

Abstract: Granule cleaner and method comprises a hollow elutriation column into which dust- and debris-adulterated pellets are blasted on a high velocity air stream through an upwardly inclined injection tube to form a floating suspension in said column. Suction withdraws the lighter suspended material from the top while the heavier particles fall to the bottom. A.C. electrostatic dischargers diametrically disposed opposite conductive portions of the injection tube which may be ground-isolated (and also opposite ground-isolated conductive portions of the column below the injection level of the granules therein) to neutralize both the entering contaminated granules and the falling cleansed pellets, the conductive ground-isolated portions defining reference electrodes for balancing ion emission.

Abstract: A corona generating device of the type in which a control screen adjacent a corona generating electrode regulates the charge flow. The control screen is coated with a substantially continuous layer of boron electroless nickel.

Abstract: The present invention relates to an electrified object neutralizing method and a neutralizing device.The present invention is characterized in that electrons are made released by means of a photoelectric effect, negative ions are generated by making the released electrons combine with gas-state atoms or molecules, and positive electric charge in an electrified object is neutralized by the negative ions. With the features, electrification of an object can be prevented without contaminating the object.

Abstract: An ionizer having a pair of electrodes for generating ions by corona discharge when a pulsed DC voltage is applied thereto, wherein each electrode is covered with a microporous glass tube. Release of fine particles is thereby substantially eliminated, the generation of ions not being decreased.

Abstract: A radon decay product remover for use in a conventional, residential lamp. The remover screws into the light bulb socket of a lamp and provides a replacement socket for a light bulb. The flow of electric current to the light bulb is controlled by an on-off switch in the radon decay product remover. When used in a table lamp, an ion generator includes electrodes (from which negative and/or positive ions are emitted) that attach to the exterior of the lamp shade.

Abstract: The device acts by remote action to disperse electric charges or ionic concentrations inside organic or inorganic matter, inside biological matter, or in any other matter in which mobile electric charges exist. The remote action charge transport takes place without direct contact with the matter. The main characteristic resides is in a particular direction or one way motion of the charges from a particular region. The device is useful for charging or discharging regions within bulk matter where electrical contact is either difficult or impossible to establish. The device is also ideal in applying Nordenstrom's method in medicine, where electrical circuits are established between particular regions by inserting electrodes into these regions.

Abstract: A surface cleaning apparatus and method is disclosed for disbonding, removal and collection of undesired matter from product surfaces, particularly in controlled process environments. The apparatus includes a negatively chargeable staging surface for receipt thereat of a product having a surface or surfaces to be cleaned, a gas stream nozzle having an electron generation source, usually a negative ion source, adjacent to its outlet, and a positive electrostatic field generator having a collector surface spaced from the staging surface. The electrostatic field generator may optionally include pulse generating circuitry for generating pulsations of selected frequency within the positive electrostatic field. Controls are provided for selectively controlling negative charge at the staging surface, ion output, field strength and, when provided, field pulsation frequency.

Abstract: An arrangement for discharge of electricity or lightning in the atmosphere to prevent formation of space charges that would reduce the strength of electric fields therein by transmitting through a path in the atmosphere one or more first leaser pulses of wavelength essentially within the ultraviolet range and of duration sufficient to create an electrically conductive ionized channel in the atmosphere and simultaneously transmit in said path one or more second laser pulses of longer wavelength than the ultraviolet pulses to maintain the conductivity of the channel for a time long enough for lightning to occur therein.

Abstract: In order to be able to investigate non-conductive specimens in an electron beam apparatus in a charge-neutral manner, a charge applied by the scanning electron beam is neutralized with the assistance of charge carriers present in a metal plasma. The plasma is generated by a gas discharge between two electrodes positioned with the vacuum specimen chamber of the electron beam apparatus. One of these electrodes has a layered structure (e.g. metal-insulator-metal) that facilitates the ignition of the gas discharge by means of a high-voltage pulse.

Abstract: An air ionizing cell has an elongated, hollow dielectic cylindrical body member, one end of which defines a greatly restricted orifice (relative to the inside diameter of the cylindrical body member). An elongated metallic electrode having an end tapered at a constant rate and terminating at a microscopically sharp point is disposed coaxially within the cylindrical body member. The point of the electrode is positioned concentrically within the orifice and an electrical potential is applied to the electrode without defining a corresponding ground within the cylindrical body member.

Abstract: An apparatus for removing static electricity from charged articles existing in a clean space, particularly in a clean room for the production of semiconductor articles, includes a AC ionizer having a plurality of needle-like emitters disposed in a flow of clean air. A discharge end of each emitter is coated with a dielectric ceramic material. Opposite conductors are also included which are respectively positioned apart from the discharge end of each emitter by a predetermined distance. Each opposite conductor is grounded. Emitters of some of the discharge pairs are connected to a high voltage AC source having added thereto negative voltage bias to thereby form pseudo negative pole emitters, and emitters of the other discharge pairs are connected to a high voltage AC source having added thereto a more positive voltage bias relative to the negative voltage bias to thereby form pseudo positive pole emitters.

Abstract: Air ionizing apparatus that produces both positive and negative ions has a housing with air inlet and outlet passages, a plurality of spaced apart air ionizing electrodes and a high voltage supply which applies positive and negative voltages to separate electrodes. A fan creates an airflow that carries the ions out of the housing, the fan preferably being between the electrodes and the outlet passages to promote intermixing of positive and negative ions. The high voltage region of the high voltage supply is isolated from any direct current path to ground. The electrodes then inherently acquire a D.C. voltage bias, when necessary, that maintains an equal output of positive and negative ions without requiring use of an air ion sensor and feedback circuit for the purpose.

Abstract: An improved filter-box positioned on a spin dryer is disclosed, which has a ceiling plate, a bottom plate and an annular filter provided between the ceiling plate and the bottom plate. The inner area of the lower surface of the ceiling plate within the filter is downwards convex so that the center of the inner area locates at the lowermost portion thereof. This convex form of the lower surface ceiling guides introduced air to the central lowermost portion of the same and prevents fine dust from accumulating on the lower surface of the ceiling plate. A static electricity removing member is mounted on the lowermost portion of the ceiling plate. The member includes an ionizer to effect the ionization of the introduced air, guided by the convex surface.

Abstract: A process for eliminating the static charge from expandable polystyrene beads during a molding cycle. Pre-expanded polystyrene beads are injected into a mold cavity by using an air stream created by a venturi-type fill gun. To prevent the beads from carrying static while being injected into the mold, the air is ionized by exposure to high energy nuclear particles prior to contact with the polystyrene beads.

Abstract: A self-balancing circuit for convection air ionizers with a passively balanced ion emitter and collector including a circuit in which the ion emitter and the collector are capacitively isolated from external charge sources or sinks for maintaining balance in the positive and negative charge for producing a zero average current flow and a charge balanced ionized airstream.

Abstract: A web electricity removing roller which removes static charge appearing on the surface of a web formed of paper, a plastic sheet or the like. The roller has a rotary cylindrical body as the main body thereof for guiding contact with the web. The rotary cylindrical body can be electrically connected to a power source or grounded. A plurality of through bores are formed in the peripheral surface of the cylindrical body and a discharge electrode is disposed within the rotary cylindrical body. The electrically charged particles that are radiated from the discharge electrode by corona discharge form an electrically charged layer on the outer peripheral surface of the rotary cylindrical body which can remove the static charges from the surface of the web in surface contact with the roller.

Abstract: An area ionization system which includes a first set of positive emitters and a second set of negative emitters for providing a supply of positive and negative ions to a work area. A control circuit or computerized control system simultaneously provides high voltage to the positive emitters and to the negative emitters. This "steady state DC" system has been found to be superior to previous systems which provide alternating current or pulsed direct current to emitters. The steady, balanced supply of positive and negative ions allows faster charge decay rates within the work area as well as reduced foreign material contamination. The system also distributes power to the emitters throughout the work area via low voltage lines. The low voltage is stepped up in the emitter arrays in order to supply 8-12 kilovolts to the emitters.

Abstract: Ion content of the atmosphere at a particular location is controlled by generating ions during repetitive period that are initiated by timing signals which reoccur at a predetermined rate. An ion sensor produces feedback signals indicative of the ion content of the air and a feedback circuit varies the duration of the recurring periods of ion generation, if necessary, to maintain the ion content within a predetermined range. Positive and negative ions may be generated during alternate ones of the repetitive periods in which case the feedback circuit inversely varies the periods of positive and negative ion generation to maintain the relative proportions of the two types of ion within a predetermined range. The method and apparatus may be used to suppress accumulation of electrostatic charge by objects, such as in a clean room where electronic components are manufactured, or for other purposes requiring control of the ion content of air.

Abstract: Ion content of the air in a clean room or the like is controlled by generating positive and negative ions during alternating time periods using positive and negative high voltage generators connected to ionizing electrodes. Ion generation periods are followed by off intervals during which the ions disperse away from the electrodes before ions of opposite polarity are generated. In one aspect of the invention, each period of actuation of a high voltage generator of one polarity is followed by a momentary actuation of the high voltage generator of opposite polarity. This produces ions that are attracted to the electrode of the one polarity and then neutralize residual charge on the capacitors of the generator of the one polarity thereby assuring an abrupt termination of ion generation which can otherwise extend into the subsequent off period.

Abstract: A balancing system for electrical A.C. air ionizers having at least one discharge electrode adjacently spaced from a proximity ground and connected to the high side of an A.C. high voltage power source includes (a) a capacitor interposed between each electrode and the high voltage source to maintain a bias on each of the electrodes by blocking the D.C. current component across the circuit capacitance between the discharge electrodes and ground, and (b) a by-pass resistor across the circuit capacitance for providing a path to ground to bleed off excess bias so that equal positive and negative ion densities are generated during corona flow, the by-pass resistor having a resistance value which is determined by the parameters of the system's corona characterisitics (including corona onset voltage and average current flow) that will provide a required equilibrium bias for producing the correct ratios of positive and negative ion currents as will balance the ion densities.

Abstract: An apparatus for generating air ions. Nuclear air ionizers are utilized which generate a multiplicity of ions of both positive and negative polarity by the bombardment of air molecules with radiation. An electric field is supplied in proximity to the nuclear air ionizers for generating an electrical field of alternating polarity near the source of generation of the multiplicity of ions. This combination creates waves of ions of opposite polarity which assist in moving the air ions away from the ionization source and preventing early recombination. An air ionization system for entire room or enclosure may be constructed utilizing a grid of a plurality of spaced apparatus as described above. Optionally, an air stream may be utilized to assist in moving the air ions created to a target surface.

Abstract: Potentially damaging electrostatic charges on semiconductor wafers or other objects are suppressed during the manufacturing process by generating ions in a flow of nitrogen or other non-reactive gas and by delivering the ionized flow to the product region through an enclosed flow path. The ions are produced by directing X-rays or other ionizing radiation into a shielded chamber portion of the flow path where flow is relatively slow and a large volume of gas is exposed to the X-rays. The ionized flow is then transmitted to the product region through a relatively narrow tubulation in which flow velocity is higher. Inter-relating of the flow rate and the length and diameter of the delivery tube minimizes ion loss from contact with the tube wall and from charge exchange with each other. The process and apparatus do not generate ozone or metallic particles, which can damage the products, as may occur with prior systems which use high voltage electrodes to ionize the air.

Abstract: A method and apparatus for establishing a uniform electrostatic charge of selected magnitude and polarity on a randomly charged web. The method and apparatus include first and second uniform electrostatic fields of predetermined magnitudes and of opposite polarities spaced from one another. Apparatus is provided for mechanically vibrating each electrostatic field at a particular magnitude and frequency while alternately passing the randomly charged web through each such electrostatic field at a particular angle with respect to the direction of field vibration to thereby establish a uniform magnitude and polarity electrostatic charge on the randomly charged web.

Abstract: Apparatus for ionizing air molecules to suppress electrostatic charges in a room or for other purposes includes internal feedback which maintains a desired rate of ion production in the presence of electrode deterioration or other effects which could otherwise alter ion output. Production of air ions of a given polarity results in a ground return flow of electrical charges of opposite polarity from the high voltage generator at a rate corresponding to the rate of air ion output. The ground return current is monitored to produce an electrical feedback signal. A control circuit causes the high voltage generator to apply higher voltage to the electrode when the feedback signal decreases and to apply lower voltage to the electrode when the feedback signal increases. Such self-regulation of each individual electrode in systems having an array of electrodes that are otherwise jointly controlled acts to maintain a desired ratio of positive and negative ions in a room as well as a desired total ion concentration.

Abstract: Film is cleaned by:(a) providing a cleaning zone and passing film laterally through that zone,(b) providing streams of gas flowing toward opposite sides of the film as it passes in that zone,(c) supplying ions of opposite polarity to the air streams and in cyclically reversing polarity relation,(d) and also brushing the film opposite sides as the film passes through that zone, thereby causing the brushes to center the film as it passes through the zone.

Abstract: Air ionization control apparatus comprising a plurality of emitter lines suspended in the atmosphere above a work space, each line comprising a plurality of ion emitting stations spaced therealong and emitting positive and negative ions into the atmosphere with an elongated electrical conductor averaging bar. insulatedly mounted in the atmoshere among said stations for receiving an induced charge representative of the average level of ionization of the atmosphere. An electrical charge sensing means connected to the averaging bar is employed to provide a signal indicative of the average level of ionization present in the room environment.

Abstract: A method and apparatus for determining ion flow imbalance. High-magnitude positive and negative potential sources, each having a high-magnitude potential output terminal, are provided. Two electrodes are adapted for positioning adjacent the location of ions, the electrodes having areas for exposure to the ions. A supply of operating potential is provided for the high-magnitude potential sources. The operating potential supply is switched to supply operating potential alternately between the high-magnitude potential sources. Neutral terminals are provided on each of the high-magnitude potential sources and the current flows from the neutral terminals of the high-magnitude potential sources to reference potential are sensed to determine the current flows to the electrodes.

Abstract: A device for removing static charge, dust and lint from surfaces by use of electrically ionized high velocity air. The device generates high air velocities by means of high speed centrifugal impellers. The air from the impellers is passed through ducts to an ionizing section where it is electrically ionized, by high voltage emitters, and then directed through a nozzle means to exit the device to the adjacent atmosphere. Upon coming in contact with a statically charged surface, the ionized high velocity air neutralizes the static charge and convects away any dust or lint adhering thereto.

Abstract: A predetermined bending stress is applied in the direction of transport to a recording material, in particular a printing plate, which passes underneath a spray corona for electrostatic charging, the bending stress bringing about a flat contact of the printing plate on a supporting surface. This compensates for edge undulations of the printing plate caused during production. The charging apparatus has pairs of transport rollers which are arranged in front of and behind the supporting surface such that their nips for the printing plate lie above the supporting surface. Between each pair of transport rollers and the spray corona is attached a deflection roller which positively leads the printing plate down to the horizontal supporting surface at a first angle or lifts it up from the supporting surface at a second angle.

Abstract: A circuit board test apparatus includes an interchangeable interface board adapted for use with a particular type of circuit board to be tested, a receiver board with which said interface board engages, a back plane board located generally parallel to said receiver board and containing analog and digital buses, and a plurality of analog and digital interface and controller boards mounted generally perpendicular to said receiver and said back plane boards and electrically connected thereto. The test apparatus also includes vacuum apparatus for drawing the circuit board to be tested into engagement with the interchangeable interface board and further includes several embodiments of means for directing a stream of ionized air across the circuit board to be tested to eliminate static electrical charges therefrom.

Abstract: A method of cleaning film includes:(a) providing a cleaning zone and passing film laterally through that zone,(b) providing streams of gas flowing toward opposite sides of the film as it passes in said zone, and(c) supplying ions of opposite polarity to the air streams and in cyclically reversing polarity relation.

Abstract: A method of charging or discharging a member including the steps of, opposing to a member to be acted on, a discharging member having a dielectric member, an inducing electrode and a discharging electrode sandwiching the dielectric member so that the discharging electrode faces the member to be acted on, applying an alternating voltage between the inducing electrode and the discharging electrode to produce a surface discharge on a surface of the dielectric member at the discharging electrode side, wherein a charge density of the surface discharge area is changed in the direction of the width of the discharging electrode, and moving the member to be acted on relative to the discharging electrode to be subjected to a low charge density portion and then to a high charge density portion to charge or discharge the member to be acted on by the thus formed surface discharge.