Abstract: The present disclosure relates to a piezoelectric stick-slip-motor and control method. An exemplary method to enable speed variation of the piezoelectric stick-slip-motor with a reduced noise generation, includes: applying a cyclic sawtooth-waveform drive voltage signal with a constant frequency in which the drive voltage (V) increases to and decreases from a peak voltage (Vp) for operating the motor with a constant speed; and changing the motor speed by gradually increasing or decreasing the gradient (dV/dt) of increasing the drive voltage (V) to the peak voltage (Vp) with each subsequent sawtooth-waveform drive voltage signal cycle (C) while keeping the frequency of the drive voltage signal constant.

Abstract: A method of forming a microelectromechanical device wherein a beam of the microelectromechanical device may deviate from a resting to an engaged or disengaged position through electrical biasing. The microelectromechanical device comprises a beam disposed above a first RF conductor and a second RF conductors. The microelectromechanical device further comprises at least a center stack, a first RF stack, a second RF stack, a first stack formed on a first base layer, and a second stack formed on a second base layer, each stack disposed between the beam and the first and second RF conductors. The beam is configured to deflect downward to first contact the first stack formed on the first base layer and the second stack formed on the second base layer simultaneously or the center stack, before contacting the first RF stack and the second RF stack simultaneously.

Abstract: An optical device includes: a base that includes a main surface; a movable unit that includes an optical function unit; and an elastic support unit that is connected between the base and the movable unit, and supports the movable unit so that the movable unit is movable along a first direction perpendicular to the main surface. The elastic support unit includes a lever, a first torsion support portion that extends along a second direction perpendicular to the first direction and is connected between the lever and the movable unit, and a second torsion support portion that extends along the second direction and is connected between the lever and the base. A torsional spring constant of the first torsion support portion is greater than a torsional spring constant of the second torsion support portion.

Abstract: An optical device includes: a base that includes a main surface; a movable unit that includes an optical function unit; and an elastic support unit that is connected between the base and the movable unit, and supports the movable unit so that the movable unit is movable along a first direction perpendicular to the main surface. The elastic support unit includes a lever, a first torsion support portion that extends along a second direction perpendicular to the first direction and is connected between the lever and the movable unit, and a second torsion support portion that extends along the second direction and is connected between the lever and the base. A torsional spring constant of the first torsion support portion is greater than a torsional spring constant of the second torsion support portion.

Abstract: A comb-like capacitive microphone includes a substrate penetrated by a cavity having an upper part provided with a step, stationary electrodes equally spaced on the step, and a diaphragm received in the step and including a vibrating portion and a connecting portion connected to the vibrating portion. Movable electrodes protrude from a periphery of the vibrating portion, and an end of the connecting portion away from the vibrating portion is connected to the substrate. The stationary electrodes are arranged in a comb shape and directly etched on the substrate, and the movable electrodes are arranged in a comb shape. The stationary electrodes are spatially separated from the movable electrodes, each stationary electrode is corresponding to each movable electrode. Such structure of the comb-like capacitive microphone offers a relatively large displacement, to decrease the acoustic noise and to offer a high sensitivity, and eventually a sound transducer with high performances.

Abstract: A scanning element includes a multilayer circuit board having a first detector unit arranged in a first layer and in a second layer. In addition, the circuit board has a second detector unit, which is arranged in a third layer and in a fourth layer, and a first shielding layer, which is arranged in a fifth layer. The circuit board moreover has a geometrical center plane, which is located between the detector units, and furthermore has vias, which are arranged at an offset from one another in a direction parallel to the center plane. The fifth layer is structured such that that a web that is electrically insulated with respect to this first shielding layer is arranged next to the first shielding layer, the web being electrically contacted with the vias and electrically connecting the vias to one another.

Abstract: A composite actuator device includes a composite material that is configured to be driven by applying power thereto and that is composed of a silicone; and from 1 to 20 wt % of an iron oxide mixed in the silicone; and a metal plate that is spaced apart from the composite material by a predetermined distance. When the power is applied, the composite actuator is driven toward the metal plate by an electrostatic attractive force. Preferably, the composite actuator device has a resonance frequency of 3±0.1 Hz.

Abstract: A system for inhibiting seizure of a bearing may include: a knocking sensor provided at one side of an engine to measure vibration transmitted from the engine and detect knocking of the engine, and a controller for controlling operation of the engine. In particular, the controller determines that a bearing of the engine is damaged when a magnitude of vibration of the engine inputted from the knocking sensor is greater than a damaged-bearing judging threshold value while the engine is operated in a damaged-bearing detecting region which is a region where knocking does not occur.

Abstract: A load simulator includes a passive element, two electrode plates that are connected to the passive element, and a bias applier. The bias applier is a coil spring, for example, and is provided between the two electrode plates. The bias applier biases at least one of the two electrode plates in a predetermined direction. The two electrode plates are disposed so as to be substantially parallel with each other, for example, and the bias applier biases the two electrode plates in the direction of separation from each other.

Abstract: A core body temperature measurement device includes a plurality of electronic temperature sensors (12, 12f, 12b, 132) operatively coupled with or near a surface (STA, PAA, BTT) having a surface temperature approximating the core body temperature, and a readout controller (10, 48, 68, 90, 124) including a maximum temperature reading selector (14). The readout controller is configured to acquire temperature readings using the plurality of temperature sensors and to output a core body temperature based on a highest usable temperature reading of the acquired temperature readings as determined by the maximum temperature reading selector. A core body temperature measurement method includes: acquiring a plurality of temperature readings at and near a surface (STA, PAA, BTT) having a surface temperature approximating the core body temperature; generating a highest usable temperature reading from the acquired temperature readings; and outputting a core body temperature based on the highest usable temperature.

Abstract: A plasma processing apparatus includes a processing chamber in which a target substrate is processed; an application electrode and a facing electrode provided to face each other in the processing chamber, a plasma generation space being formed between the application electrode and the facing electrode; and an RF power supply connected to the application electrode, an RF power being supplied from the RF power supply to the application electrode. At least one of the application electrode and the facing electrode includes a base formed of a metal, and a dielectric body inserted into the base, one or more metal plate electrodes being buried in the dielectric body.

Abstract: An electronic element includes a fixed portion, and a movable portion which is movable with respect to the fixed portion and which is provided to generate a spring force to make restoration to a predetermined position. The fixed portion is provided with a first driving electrode and a first signal electrode. The movable portion is provided with a second driving electrode and a second signal electrode. An electrostatic force is generated between the first driving electrode and the second driving electrode by a voltage applied therebetween so that the electrostatic force resists against the spring force; and the first and second driving electrodes and the first and second signal electrodes are arranged so that the electrostatic force is generated in a direction in which a spacing distance between the first and second signal electrodes is widened.

Abstract: An electrostatic actuator includes: a fixed driving electrode that is disposed on a silicon substrate; a movable driving electrode that is disposed so as to face the fixed driving electrode and approaches the fixed driving electrode with an electrostatic force generated between the movable driving electrode and the fixed driving electrode; and a pair of spacers that comes in contact with the movable driving electrode in an approaching state in which the fixed driving electrode and the movable driving electrode approach each other and forms a prescribed air gap between the fixed driving electrode and the movable driving electrode, wherein each of the spacers has a spacer electrode portion that comes in contact with the movable driving electrode via an insulator and has the same potential as one of the electrodes at least in the approaching state.

Abstract: A variable capacitor device is disclosed in which the capacitive tuning ratio and quality factor are increased to very high levels, and in which the capacitance value of the device is tuned and held to a desired value with a high level of accuracy and precision using a laser micromachining tuning process on suitably designed and fabricated capacitor devices. The tuning of the variable capacitor devices can be performed open-loop or closed-loop, depending on the precision of the eventual capacitor value needed or desired. Furthermore, the tuning to a pre-determined value can be performed before the variable capacitor device is connected to a circuit, or alternatively, the tuning to a desired value can be performed after the variable capacitor device has been connected into a circuit.

Abstract: The present subject matter relates to the use of current splitting and routing techniques to distribute current uniformly among the various layers of a device to achieve a high Q-factor. Such current splitting can allow the use of relatively narrow interconnects and feeds while maintaining a high Q. Specifically, for example a micro-electromechanical systems (MEMS) device can comprise a metal layer comprising a first portion and a second portion that is electrically separated from the first portion. A first terminus can be independently connected to each of the first portion and the second portion of the metal layer, wherein the first portion defines a first path between the metal layer and the first terminus, and the second portion defines a second path between the metal layer and the first terminus.

Abstract: Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions.

Abstract: Embodiments of a method include forming a metal-insulator-metal (MIM) capacitor including a first electrode and a second electrode and an insulator layer between the first and second electrodes, the MIM capacitor also including a reactive layer; and altering the reactive layer to change a capacitive value of the MIM capacitor.

Abstract: A capacitive MEMS structure comprising first and second opposing capacitor electrode arrangements, wherein at least one of the electrode arrangements is movable, and a dielectric material located adjacent to the second electrode arrangement, wherein the second electrode arrangement is patterned such that it includes electrode areas and spaces adjacent to the electrode areas, and wherein the dielectric material extends at least partially in or over the spaces.

Abstract: A varactor includes a first PTC region, which comprises a ceramic material with a positive temperature coefficient with respect to the resistance. The varactor also includes a capacitor region that includes a first electrode, a second electrode, and a first dielectric layer arranged between the first electrode and the second electrode. The first PTC region and the capacitor region are connected thermally conductively to one another. The capacitance of the capacitor region can be changed by applying a bias to the first PTC region, the capacitor region or to the first PTC region and the capacitor region.

Abstract: An electronic device may be provided with a housing having housing sidewalls. A plate may be connected between a pair of the sidewalls. An audio jack may be mounted to the plate. A microphone may be mounted within the device between the audio jack and a given one of the sidewalls. A vibrator may be mounted between one of the sidewalls and the audio jack using a bracket. The vibrator may have a weight that is tapered along its length. A button may be formed in an opening in one of the housing sidewalls. The button may have a button member with a protrusion that extends through a button opening in the sidewall. A support structure may be interposed between a switch and the button member. The switch may have a portion that extends through an opening in the support structure and that is actuated by the button member.

Abstract: An embodiment of a tunable capacitor can include a plurality of capacitors connected in series where at least two capacitors of the plurality of capacitors share a common electrode where the at least two capacitors are in lateral proximity and a bias that is capable of being applied to the at least two capacitors whereby the at least two capacitors vibrate in opposite phase to each other when the bias and an RF signal is applied to the at least two capacitors.

Abstract: Disclosed are a capacitor and a method of fabricating the same. The capacitor includes a first electrode; a second electrode spaced apart from the first electrode while facing the first electrode; a driving member connected to the second electrode to move the second electrode relative to the first electrode; and an insulating connection member between the driving member and the second electrode.

Abstract: Disclosed is a capacitor. The capacitor includes a plurality of capacitor units connected to each other in parallel. The capacitor unit includes a first capacitor, a second capacitor connected to the first capacitor in parallel, and a switch selectively connected to the first capacitor or the second capacitor.

Abstract: A capacitive transducer (1) comprises a polymer film (2) having a first surface and a second surface, a first electrically conductive layer (3) arranged on the first surface of the polymer film (2), and a second electrically conductive layer (3) arranged on the second surface of the polymer film (2). The polymer film (2) is at least partly made from a material having a molecular weight which is at least 21,000 g/mol. The inventors have surprisingly found that silicone polymer materials with high molecular weights, such as liquid silicone rubbers (LSR) or high temperature vulcanizing (HTV) elastomers, have high electrical breakdown strengths, even though technical data sheets from manufacturers state almost identical electrical breakdown strengths similar to that of RTV-2 elastomers. Using such materials in capacitive transducers allows high electrical fields to be applied to transducers without risking electrical breakdown, thereby increasing performance of transducers.

Abstract: Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods are provided. A MEMS variable capacitor can include first and second feed lines extending substantially parallel to one another. Further, MEMS variable capacitors can include first and second capacitive plates being spaced apart from the first and second feed lines. The first and second capacitive plates can be separately movable with respect to at least one of the first and second feed lines for varying the capacitance between the first and second feed lines over a predetermined capacitance range.

Abstract: The invention relates to a varactor with an actuator, wherein the first actuator surface (2a) of the actuator is embodied on a substrate (1), and a second actuator surface (2b) is embodied on a first movable membrane (3a). In this context, the first movable membrane (3a) is arranged above an upper side (1a) of the substrate (1). A second movable membrane (2b) is arranged below a lower side (1b) of the substrate (1) facing away from the upper side (1a). The invention further relates to a varactor system made from two such varactors.

Abstract: Devices and methods of operating partitioned actuator plates to obtain a desirable shape of a movable component of a micro-electro-mechanical system (MEMS) device. The subject matter described herein can in some embodiments include a micro-electro-mechanical system (MEMS) device including a plurality of actuation electrodes attached to a first surface, where each of the one or more actuation electrode being independently controllable, and a movable component spaced apart from the first surface and movable with respect to the first surface. Where the movable component further includes one or more movable actuation electrodes spaced apart from the plurality of fixed actuation electrodes.

Abstract: This disclosure provides systems, methods and apparatus for providing an in-plane electromechanical systems (EMS) varactor. In one aspect, the in-plane EMS varactor may include in-plane relative translation between a second portion and a first portion. Such translation may cause a change in a gap or overlap between first electrodes that remain fixed with respect to the first portion and second electrodes that remain fixed with respect to the second portion that may cause a change in capacitance between the first and second electrodes. In some implementations, the configuration of the second portion and the first portion may be either of two mechanically bi-stable states.

Abstract: An amplifier provides a first amplifier circuit (16), a second amplifier circuit (17), a first hybrid-coupler circuit (18) and a termination (3). The hybrid-coupler circuit (18) provides an output terminal (13) and an insulation terminal (12). In this context, the termination (3) is connected to the insulation terminal (12) of the hybrid-coupler circuit (18). The termination (3) comprises a first capacitor (34) and/or an inductance (35), which is disposed directly at the insulation terminal (12) of the hybrid-coupler circuit (18).

Abstract: A variable capacitor includes a plurality of variable capacitor elements connected in parallel with one another, the variable capacitor elements each including a fixed electrode and a movable electrode facing each other, a beam supporting the movable electrode displaceably, and a drive electrode supplied with a drive voltage to change spacing between the fixed electrode and the movable electrode. The variable capacitor further includes a drive control unit configured to sequentially apply an AC drive voltage to the drive electrodes of the variable capacitor elements with a predetermined phase difference for each element. The sum of capacitances of the variable capacitor elements is an output capacitance.

Abstract: Disclosed herein is a variable capacitor and its driving method, the variable capacitor including, a movable first electrode; and a second electrode formed with an insulating film, fixed in place, and its insulating film contacting the first electrode that is moved.

Abstract: An input device includes a movable electrode and a capacitance detection electrode provided on the upper and lower sides of the resin film substrate, respectively. The movable electrode includes a moving section, and an immobile section. The moving section includes a protrusion. The end of the protrusion comes in contact with the upper side of the resin film substrate in an initial state, or is bonded to the upper side of the resin film substrate. The protrusion has a curved shape so that the side surface of the protrusion is depressed relative to a straight line that connects the end and the base of the protrusion having an approximately trapezoidal cross-sectional shape, or at least one step is formed on the side surface of the protrusion, and the width of the protrusion increases stepwise from the end to the base of the protrusion.

Abstract: An electronic device having a variable capacitance element, includes a support substrate providing physical support, a pair of anchors formed on the support substrate, and having support portions in a direction perpendicular to a surface of the substrate, a movable electrode supported by the support portions of the pair of anchors, having opposing first and second side surfaces constituting electrode surfaces, and at least partially capable of elastic deformation, a first fixed electrode supported above the support substrate, and having a first electrode surface opposing to the first side surface of the movable electrode, and a second fixed electrode supported above the support substrate, and having a second electrode surface opposing to the second side surface of the movable electrode.

Abstract: The present invention generally relates to methods for increasing the lifetime of MEMS devices by reducing the number of movements of a switching element in the MEMS device. Rather than returning to a ground state between cycles, the switching element can remain in the same state if both cycles necessitate the same capacitance. For example, if in both a first and second cycle, the switching element of the MEMS device is in a state of high capacitance the switching element can remain in place between the first and second cycle rather than move to the ground state. Even if the polarity of the capacitance is different in successive cycles, the switching element can remain in place and the polarity can be switched. Because the switching element remains in place between cycles, the switching element, while having the same finite number of movements, should have a longer lifetime.

Abstract: According to one embodiment, a MEMS device includes an electrode on a substrate, a movable structure which is supported in midair above the electrode by first and second anchor portions on the substrate, and moves toward the electrode, a first spring structure which connects the first anchor portion to the movable structure and uses a ductile material, and a second spring structure which connects the second anchor portion to the movable structure and uses a brittle material.

Abstract: The device comprises first and second contact pads having a contact surface. The first and second contact pads move with respect to one another between an ohmic contact position between these contact surfaces and another position. The device further comprises means for applying a non-uniform electric field around the first contact pad. The electric field has a component in a direction parallel to the contact surface of the first contact pad. A fluid with a first dielectric permittivity value is arranged between the first contact pad and the decontamination electrode. The decontamination device and the fluid are configured in such a way that the electric field generates a force directed towards the decontamination electrode on a contaminant, by dielectrophoresis.

Abstract: A novel semiconductor variable capacitor is presented. The semiconductor structure is simple and is based on a semiconductor variable MOS capacitor structure suitable for integrated circuits, which has at least three terminals, one of which is used to modulate the equivalent capacitor area of the MOS structure by increasing or decreasing its DC voltage with respect to another terminal of the device, in order to change the capacitance over a wide ranges of values. Furthermore, the present invention decouples the AC signal and the DC control voltage avoiding distortion and increasing the performance of the device, such as its control characteristic. The present invention is simple and only slightly dependent on the variations due to the fabrication process. It exhibits a high value of capacitance density and, if opportunely implemented, shows a linear dependence of the capacitance value with respect to the voltage of its control terminal.

Abstract: Disclosed herein is a variable capacitor and its driving method, the variable capacitor including, a movable first electrode; and a second electrode formed with an insulating film, fixed in place, and its insulating film contacting the first electrode that is moved.

Abstract: Driving is made possible in a moving range equivalent to or wider than the conventional range, with a driving voltage having a range smaller than a pull-in voltage. An electronic element includes a fixed portion provided with a first driving electrode and a first signal electrode, and a movable portion provided with a second driving electrode and a second signal electrode, movable with respect to the fixed portion and provided to generate a spring force to make restoration to a predetermined position. An electrostatic force is generated between the first and second driving electrodes by a voltage applied therebetween so that the electrostatic force resists against the spring force; and the first and second driving electrodes and the first and second signal electrodes are arranged so that the electrostatic force is generated in a direction in which a spacing distance between the first and second signal electrodes is widened.

Abstract: Impedance between an antenna and a power amplifier in a cell phone is dynamically matched by selectively increasing the potential difference between a bias electrode and a top plate to move the top plate to a down position for a number of varactors needed to change the capacitance and bring about the match. Each varactor has a capacitor bottom plate formed on the substrate to include the bias electrode, a ground electrode and an RF signal line electrode. A capacitor top plate is suspended by mechanical spring action above the bottom plate for movement between an up position and a down position relative to dielectric material covering the bottom plate. The potential difference applied between the bias electrode and the top plate can be selectively increased to overcome the spring action and move the top plate to the down position, shunting an RF signal applied at the RF signal line electrode to ground through the top plate.

Abstract: An embodiment of a tunable capacitor can include a plurality of capacitors connected in series where at least two capacitors of the plurality of capacitors share a common electrode where the at least two capacitors are in lateral proximity and a bias that is capable of being applied to the at least two capacitors whereby the at least two capacitors vibrate in opposite phase to each other when the bias and an RF signal is applied to the at least two capacitors.

Abstract: A variable capacitor and a control method thereof capable of responding to applications of electronic apparatuses including various electronic devices and communication mobile devices. The variable capacitor includes a pair of electrodes formed so as to sandwich a ferroelectric material layer, in which polarization processing higher than a coercive field in hysteresis characteristics of polarization has been performed to the ferroelectric material layer, and the capacitance can be varied in accordance with a control voltage applied to the electrodes.

Abstract: Systems including varactor devices are provided. A varactor device (400) includes a gap closing actuator (GCA) varactor (200), includes a drive comb structure (201), an output varactor structure (514) defining an output capacitance, a reference varactor structure (214) defining a reference capacitance, and a movable truss comb structure (204) interdigitating the drive comb, the output varactor, and the reference varactor structures. The truss comb structure moves along a motion axis (205) between interdigitating positions based on a bias voltage. The device also includes a feedback circuit (404) configured for modifying an input bias voltage based on the reference capacitance to produce the output bias voltage that provides a target capacitance associated with the input bias voltage at the output varactor structure.

Abstract: Embodiments of a method include forming a metal-insulator-metal (MIM) capacitor including a first electrode and a second electrode and an insulator layer between the first and second electrodes, the MIM capacitor also including a reactive layer; and altering the reactive layer to change a capacitive value of the MIM capacitor.

Abstract: A variable capacitive element includes a first fixed electrode and a second fixed electrode that are insulated from each other, a movable electrode arranged to face the first fixed electrode and the second fixed electrode, a dielectric layer provided between the movable electrode and the first fixed electrode as well as the second fixed electrode, a first wiring part for applying a first driving voltage to the first fixed electrode with reference to a potential of the movable electrode, and a second wiring part for applying a second driving voltage to the second fixed electrode with reference to the potential of the movable electrode, the second driving voltage having a polarity different from a polarity of the first driving voltage.

Abstract: A MEMS device comprises first and second opposing electrodes (42,46), wherein the second electrode (46) is electrically movable to vary the electrode spacing between facing first sides of the first and second electrodes. A first gas chamber (50) is provided between the electrodes, at a first pressure, and a second gas chamber (52) is provided on the second, opposite, side of the second electrode at a second pressure which is higher than the first pressure. This arrangement provides rapid switching and with damping of oscillations so that settling times are reduced.

Abstract: The present subject matter relates to the use of current splitting and routing techniques to distribute current uniformly among the various layers of a device to achieve a high Q-factor. Such current splitting can allow the use of relatively narrow interconnects and feeds while maintaining a high Q. Specifically, for example a micro-electromechanical systems (MEMS) device can comprise a metal layer comprising a first portion and a second portion that is electrically separated from the first portion. A first terminus can be independently connected to each of the first portion and the second portion of the metal layer, wherein the first portion defines a first path between the metal layer and the first terminus, and the second portion defines a second path between the metal layer and the first terminus.

Abstract: Disclosed are a humidity sensor and a fabricating method thereof. The humidity sensor includes a substrate, an anodic aluminum oxide layer formed on the substrate and having a plurality of holes, and electrodes formed on the anodic aluminum oxide layer, in order to improve sensitivity and accuracy of the humidity sensor. Further, the fabricating method of a humidity sensor includes preparing an aluminum substrate, forming an anodic aluminum oxide layer by oxidizing the aluminum substrate, and forming electrodes on the anodic aluminum oxide layer.

Abstract: A varactor element, includes: a dielectric layer; a pair of signal electrodes, each disposed on one face of the dielectric layer and facing each other; and a pair of control electrodes, each disposed on another face of the dielectric layer and facing each other parallel to a direction intersecting a direction of the pair of signal electrodes facing each other.

Abstract: A MEMS device of an aspect of the present invention including a MEMS element includes a first lower electrode provided on a substrate, a first insulator which is provided on the upper surface of the first lower electrode, and has a first thickness, and a movable first upper electrode supported by an anchor in midair above the first lower electrode, and a capacitance element includes a second lower electrode provided on the substrate, a second insulator which is provided on the upper surface of the second lower electrode, and has a second thickness, and a second upper electrode provided on the second insulator, wherein the second thickness is less than the first thickness.