Abstract: An energy storage system stores potential energy and providing a regulated output of electrical energy for powering an electrical load. The system includes an array of storage capacitors including a plurality of storage capacitors coupled in series. A balance control device balances the voltage on each of the storage capacitors in the array. An input control device manages the input for charging the storage capacitor array. An output power supply has an input coupled to the storage capacitor array and provides regulated power to an electrical load. A power monitor device electrically decouples the storage capacitor array from the electrical load when the total voltage of the storage capacitor array falls below a preset minimum level.

Abstract: An input apparatus includes a detection unit that repeatedly generates a detection signal according to a degree of proximity of the object, a drift simulation unit that generates a drift simulated signal that undergoes a change having correlation with a drift in the detection signal due to repeated generation of the detection signal in the detection unit, and a correction unit that corrects the detection signal according to the change in the drift simulated signal at least one of when repeated generation of the detection signal in the detection unit is started and when an interval for repeatedly generating the detection signal in the detection unit is changed.

Abstract: A capacitive coupler provides high coupling capacitance through the use of an electrolyte and insulator formed as an oxide layer on at least one plate of the coupler. The coupler can be independent or provide a hydrodynamic or hydrostatic bearing as well as capacitive coupling, and the circulated dielectric can provide for cooling of associated machinery.

Abstract: A timepiece movement includes an analogue display, including a rotary indicator and a wheel that rotates as one with the rotary indicator. The wheel includes a plate with a locating element. The timepiece movement also includes a device for detecting at least one angular position of the locating element, which includes a board that is fixed with respect to the plate, extending substantially parallel to the plate, and on which a first electrode, a second electrode, and a common electrode are arranged. The electrodes are planar and are arranged such that, in one angular position of the wheel, the locating element is located over at least a portion of each electrode.

Abstract: A timepiece movement including an analogue display, including a rotary indicator and a wheel secured in rotation to the rotary indicator, the wheel including a roller including a location element, a device for detecting at least one angular position of the location element, including a plate fixed relative to the roller, extending substantially parallel to the roller, and on which are arranged a first electrode, a second electrode and a common electrode positioned between the first electrode and the second electrode the electrodes being planar and being arranged in such a way that, in an angular position of the wheel, the location element is located above at least a portion of each electrode, the first electrode and the second electrode having the form of two segments of a ring centred on the intersection between the axis of the wheel and the plate.

Abstract: The invention relates to a method for actuating a closure element arrangement in a motor vehicle, wherein the closure element arrangement has a closure element, a drive arrangement associated with the closure element, a control arrangement and a sensor arrangement having at least one sensor element that is particularly in the form of a proximity sensor, wherein operator control event monitoring involves the control arrangement being used to monitor the sensor measured values from the sensor arrangement for whether there is a predetermined operator control event, and the result of the operator control event monitoring is taken as a basis for actuating the drive arrangement, the mechanical configuration of the motor vehicle being able to be altered by an adjusting process and/or by a fitting process during use based on normal operation.

Abstract: An operation input detection device includes an operation input detection unit, a change amount accumulation unit, a section variation amount calculating unit, and a noise determination unit. The operation input detection unit detects an operation input on an operation input unit based on a sensor output of a capacitance sensor. The change amount accumulation unit accumulates a change amount of the sensor output in a determination section. The change amount of the sensor output is a difference of a detection value of the sensor output detected as each sampling timing from a previous value of the sensor output. The section variation amount calculating unit calculates a section variation amount of the sensor output.

Abstract: A micromechanical component having a main extension plane is provided; the micromechanical component encloses a first cavern and a second cavern, and a first pressure prevails in the first cavern while a second pressure prevails in the second cavern, and a first layer of the micromechanical component, which extends essentially parallel to the main extension plane, projects into a second layer of the micromechanical component, which extends essentially parallel to the main extension plane, between the first cavern and the second cavern, essentially in a perpendicular direction to the main extension plane.

Abstract: A capacitive sensor (10) for a roller (12) of a roller track is provided which has a plurality of measuring electrodes (18) as well as a measurement unit (28) for determining capacitances between measuring electrodes (18) to recognize an object (42) located at the roller track with reference to capacitance changes. In this respect, at least some of the measuring electrodes (18) are arranged co-rotating with the roller (12, 16).

Abstract: A tunable filter design. The filter is implemented using transmission line sections as inductive and capacitive components. At least one capacitive component is a tunable capacitor. In some implementations, the tunable capacitor may be an interdigitated array of finger elements arranged so that the spacing between fingers may be adjusted. The design has a number of advantages including high capacitance for a given circuit area, small area for a given desired capacitance, mechanical stability, high self resonance frequency, and high quality factor.

Abstract: The invention relates to a method for actuating a closure element arrangement in a motor vehicle, wherein the closure element arrangement has a closure element, a drive arrangement associated with the closure element, a control arrangement and a sensor arrangement having at least one sensor element that is particularly in the form of a proximity sensor, wherein operator control event monitoring involves the control arrangement being used to monitor the sensor measured values from the sensor arrangement for whether there is a predetermined operator control event, and the result of the operator control event monitoring is taken as a basis for actuating the drive arrangement, the mechanical configuration of the motor vehicle being able to be altered by an adjusting process and/or by a fitting process during use based on normal operation.

Abstract: A voltage detection device is such that an intermediate electrode is provided between a central conductor to which a voltage is applied and a grounded tank to constitute a voltage divider and detects a voltage of the central conductor on the basis of a voltage of the voltage divider. The voltage detection device includes an integration circuit to which a voltage of the voltage divider, which is an output of the voltage divider, is input, an analog circuit that amplifies an output voltage of the integration circuit to a specified amplitude, an amplifier/attenuator to which a voltage of the voltage divider, which is an output of the voltage divider, is input and that amplifies or attenuates the voltage of the voltage divider to the specified amplitude, and an adder that adds an output voltage of the analog circuit and an output voltage of the amplifier/attenuator.

Abstract: The present subject matter relates to the use of current splitting and routing techniques to distribute current uniformly among the various layers of a device to achieve a high Q-factor. Such current splitting can allow the use of relatively narrow interconnects and feeds while maintaining a high Q. Specifically, for example a micro-electromechanical systems (MEMS) device can comprise a metal layer comprising a first portion and a second portion that is electrically separated from the first portion. A first terminus can be independently connected to each of the first portion and the second portion of the metal layer, wherein the first portion defines a first path between the metal layer and the first terminus, and the second portion defines a second path between the metal layer and the first terminus.

Abstract: A variable capacitor device is disclosed in which the capacitive tuning ratio and quality factor are increased to very high levels, and in which the capacitance value of the device is tuned and held to a desired value with a high level of accuracy and precision using a laser micromachining tuning process on suitably designed and fabricated capacitor devices. The tuning of the variable capacitor devices can be performed open-loop or closed-loop, depending on the precision of the eventual capacitor value needed or desired. Furthermore, the tuning to a pre-determined value can be performed before the variable capacitor device is connected to a circuit, or alternatively, the tuning to a desired value can be performed after the variable capacitor device has been connected into a circuit.

Abstract: A varactor includes a first PTC region, which comprises a ceramic material with a positive temperature coefficient with respect to the resistance. The varactor also includes a capacitor region that includes a first electrode, a second electrode, and a first dielectric layer arranged between the first electrode and the second electrode. The first PTC region and the capacitor region are connected thermally conductively to one another. The capacitance of the capacitor region can be changed by applying a bias to the first PTC region, the capacitor region or to the first PTC region and the capacitor region.

Abstract: An embodiment of a tunable capacitor can include a plurality of capacitors connected in series where at least two capacitors of the plurality of capacitors share a common electrode where the at least two capacitors are in lateral proximity and a bias that is capable of being applied to the at least two capacitors whereby the at least two capacitors vibrate in opposite phase to each other when the bias and an RF signal is applied to the at least two capacitors.

Abstract: [Problem] There is a need for a chip component which has excellent mountability, which can accommodate multiple types of requested values with a common basic design, and which has improved geometric accuracy and micromachining accuracy. [Solution] A chip resistor (10) (chip component) which includes: a substrate (11); an element circuit network (20, 21) which includes multiple element parts formed on the substrate (11); an external connection electrode (12) provided on the substrate (11) for external connection to the element circuit network (20, 21); multiple fuses provided on the substrate (11) for detachably connecting the element parts and the external connection electrode (12); and a solder layer (124) formed on the external connection terminal of the external connection electrode (12).

Abstract: A vacuum capacitor includes a fixed electrode, a movable electrode, a movable electrode shaft, a magnetic flux receiving unit, a magnetic flux generating unit and a capacitance control unit. The fixed electrode is formed from a plurality of electrode members in a vacuum casing. The movable electrode is formed from a plurality of electrode members arranged in gaps formed between the electrode members of the fixed electrode in the vacuum casing. The movable electrode shaft supports the movable electrode. Capacitance appearing between the movable electrode and the fixed electrode is varied by rotation of the movable electrode shaft. The magnetic flux receiving unit rotates the movable electrode shaft in the vacuum casing. The magnetic flux generating unit is located outside the vacuum casing and rotates the magnetic flux receiving unit by magnetic attraction. The capacitance control unit rotates the magnetic flux generating unit.

Abstract: A vacuum capacitor includes a fixed electrode, a movable electrode, a movable electrode shaft, a magnetic flux receiving unit, a magnetic flux generating unit and a capacitance control unit. A plurality of electrode members in a vacuum casing form the fixed electrode. The fixed electrode is divided into a plurality of fixed electrodes, and each fixed electrode is lead outside the vacuum casing and electrically connected to each other in series. A plurality of electrode members arranged in gaps between the electrode members of the fixed electrode form the movable electrode. Rotating the movable electrode shaft, which supports the movable electrode, varies capacitance between the movable electrode and the fixed electrode. The magnetic flux receiving unit rotates the movable electrode shaft. The magnetic flux generating unit, located outside the vacuum casing, rotates the magnetic flux receiving unit by magnetic attraction. The capacitance control unit rotates the magnetic flux generating unit.

Abstract: Disclosed is a proportional controller that utilizes a deflected metal cantilever that provides a progressive change in capacitance for a given deflection that is used to generate a proportional control signal. In addition, a efficient step-up converter 1500 is disclosed, which is capable of operating with a single alkaline cell. Further, a LED drive circuit is disclosed that has high efficiency and is capable of driving an infrared LED with a single alkaline cell.

Abstract: The present invention can easily adjust capacitance of a vacuum capacitor while maintaining a vacuum state in a vacuum chamber of the vacuum capacitor. A fixed electrode 4 is formed by arranging a plurality of flat electrode members 5 in layers at a certain distance in an axial direction of a vacuum chamber 1b. A movable electrode 7 is formed by arranging a plurality of flat electrode members 8 in layers at a certain distance in the axial direction of the vacuum chamber 1b and fixing the electrode members 8 to a movable electrode shaft 9. By rotation of the movable electrode shaft 9, each electrode member 8 is inserted into and extracted from a gap between the electrode members 5 of the fixed electrode 4 in noncontact with the electrode members 5 of the fixed electrode 4. A magnetic flux receiving portion 106b is fixed to a seal member 102 side of a disk member 106a that is provided at the movable electrode shaft 9.

Abstract: There is proved a variable capacitor that includes a substrate, a signal line disposed on a surface of the substrate for feeding a signal, a ground electrode disposed on the surface, and a movable electrode opposed the signal line and the ground electrode, the movable electrode operable to move toward and away from the signal line and the ground electrode. The movable electrode can be displaced by an electrostatic attraction between the movable electrode and the signal line and between the movable electrode and the signal line. An amount of displacement of the movable electrode varies according to an amount of the voltage which generates the electrostatic attraction.

Abstract: Disclosed herein is a variable capacitor and its driving method, the variable capacitor including, a movable first electrode; and a second electrode formed with an insulating film, fixed in place, and its insulating film contacting the first electrode that is moved.

Abstract: An improved MEMS transducer apparatus and method is provided. The apparatus includes a movable base structure having a base surface region. An anchor structure is disposed within a substantially circular portion of the surface region typically at or near the center of the surface region. A spring structure is coupled to the anchor structure and at least one portion of the base surface region. A capacitor, having a fixed capacitor element and a movable capacitor element, are disposed near the base surface region. The fixed capacitor element can be coupled to the anchor structure and the movable capacitor element can be spatially disposed on a portion of the base surface region near the anchor structure.

Abstract: An electronic device may have buttons, a display, and a vibrator unit. Buttons may be included in electronic devices such as glass buttons, metal buttons, buttons that are assembled on printed circuit boards, and buttons that are partly formed from antenna structures. Button coatings may be used to improve the sliding performance of metal-on-metal buttons. A layer of polymer may be interposed between a button plate and a housing structure. A glass button member may have an underside on which a layer of patterned ink is formed. Elastomeric members may be used to reduce button rattle. Portions of a button may be provided with conductive features that form portions of an antenna.

Abstract: A test system for testing a capacitive touch sensor is provided. The test system includes a resistor, a signal generator and a micro controller. A first end of the resistor is electrically connected to a sensing port of the capacitive touch sensor. The signal generator provides a test voltage to a second end of the resistor according to control information. In this way, the resistor generates a test current according to the test voltage, and the capacitive touch sensor provides a voltage difference to the sensing port according to a plurality of switching signals, and converts the test current into test information. The micro controller generates the control information according to a test table, and compares the test information according to the test table, so as to determine whether an operation of the capacitive touch sensor is normal.

Abstract: An improved MEMS transducer apparatus and method is provided. The apparatus has a movable base structure including an outer surface region and at least one portion removed to form at least one inner surface region. At least one intermediate anchor structure is disposed within the inner surface region. The apparatus includes an intermediate spring structure operably coupled to the central anchor structure, and at least one portion of the inner surface region. A capacitor element is disposed within the inner surface region.

Abstract: An embodiment of a tunable capacitor can include a plurality of capacitors connected in series where at least two capacitors of the plurality of capacitors share a common electrode where the at least two capacitors are in lateral proximity and a bias that is capable of being applied to the at least two capacitors whereby the at least two capacitors vibrate in opposite phase to each other when the bias and an RF signal is applied to the at least two capacitors.

Abstract: A construction system for a capacitive sensor comprises a source electrode (210), a screening element (220) with partition (221) which forms a first and a second screened chamber (220.a, 220.b), a field sensor (230), a circuit (250), a spacing member (260) with a through-duct, and a screw (270). The partition (221) is provided with a hole (224) and said spacing member (260) is positioned inside the first chamber (220.a) with the axis (260.y) of the duct arranged coaxial with the axis (224-y) of said hole (224). The same spacing member (260) is positioned between the proximal face (223) of the partition (221) and the distal face (232) of the field sensor (230) and said field sensor (230) is provided with a threaded hole (233). The head (271) of the screw (270) is arranged inside the second chamber (220.

Abstract: The present invention includes method and apparatus for a device including two capacitors separated by a gap within one package thereby the two capacitors are coupled to each other in such a way that the impedance between them are matched with respect to the other components along a transmission path.

Abstract: A variable capacitive element includes a first fixed electrode and a second fixed electrode that are insulated from each other, a movable electrode arranged to face the first fixed electrode and the second fixed electrode, a dielectric layer provided between the movable electrode and the first fixed electrode as well as the second fixed electrode, a first wiring part for applying a first driving voltage to the first fixed electrode with reference to a potential of the movable electrode, and a second wiring part for applying a second driving voltage to the second fixed electrode with reference to the potential of the movable electrode, the second driving voltage having a polarity different from a polarity of the first driving voltage.

Abstract: Embodiments of a method include forming a metal-insulator-metal (MIM) capacitor including a first electrode and a second electrode and an insulator layer between the first and second electrodes, the MIM capacitor also including a reactive layer; and altering the reactive layer to change a capacitive value of the MIM capacitor.

Abstract: Disclosed are a humidity sensor and a fabricating method thereof. The humidity sensor includes a substrate, an anodic aluminum oxide layer formed on the substrate and having a plurality of holes, and electrodes formed on the anodic aluminum oxide layer, in order to improve sensitivity and accuracy of the humidity sensor. Further, the fabricating method of a humidity sensor includes preparing an aluminum substrate, forming an anodic aluminum oxide layer by oxidizing the aluminum substrate, and forming electrodes on the anodic aluminum oxide layer.

Abstract: A variable capacitor includes: a dielectric sheet disposed on a substrate and covering an electrode pattern on the substrate; a resilient conductive supporting seat mounted on the dielectric sheet for supporting an insulating operating cap on a central portion thereof; a conductive cover body covering the conductive supporting seat and permitting the operating cap to extend outward; and a biasing member for biasing the central portion of the conductive supporting seat to move away from the substrate. The cover body is connected electrically to the conductive supporting seat and a conductive contact on the substrate. When the operating cap is depressed, the operating cap forces a contact portion of the conductive supporting seat to deform such that a surface area of the deformed contact portion that contacts the dielectric sheet is increased, thereby changing the capacitance between the conductive supporting seat and the electrode pattern.

Abstract: The invention relates to an air variable capacitor including a mobile comb and a fixed comb. Each of the combs include a body and teeth each having an end fixed to the body and free end. The teeth of the mobile and fixed combs being interdigital and an the air-gap of the capacitor is adjustable by the transverse movement of the teeth of the mobile comb. The teeth of the mobile comb have geometric differences between one another, in order to attenuate the transverse resonance modes of the mobile comb.

Abstract: A MEMS device and method of making same is disclosed. In one embodiment, a micro-switch includes a base assembly comprising a movable structure bearing a contact pad. The base assembly is wafer-scale bonded to a lid assembly comprising an activator and a signal path. The movable structure moves within a sealed cavity formed during the bonding process. The signal path includes an input line and an output line separated by a gap, which prevents signals from propagating through the micro-switch when the switch is deactivated. In operation, a signal is launched into the signal path. When the micro-switch is activated, a force is established by the actuator, which pulls a portion of the movable structure upwards towards the gap in the signal path, until the contact pad bridges the gap between the input line and output line, allowing the signal to propagate through the micro-switch.

Abstract: Disclosed is a proportional controller that utilizes a deflected metal cantilever that provides a progressive change in capacitance for a given deflection that is used to generate a proportional control signal. In addition, a efficient step-up converter 1500 is disclosed, which is capable of operating with a single alkaline cell. Further, a LED drive circuit is disclosed that has high efficiency and is capable of driving an infrared LED with a single alkaline cell.

Abstract: A microelectromechanical system package includes a chip carrier, a first microelectromechanical system chip, a silicon cover, a layer of metal, a plurality of first bonding wires and a sealant. The first microelectromechanical system chip is positioned on the chip carrier and has an active surface, and an active area on the active surface. The layer of metal is formed on the upper surface of the cover. The first bonding wires electrically connect the active surface of the first microelectromechanical system chip to the chip carrier. The sealant is formed on the chip carrier to encapsulate the first microelectromechanical system chip and the first bonding wires.

Abstract: A method and apparatus are described for storing electrical power in the form of relative chemical potential between a concentrated solution, typically salt brine, and a dilute version of the same solution. To recover the power, the concentrated solution and dilute solution are supplied to a means for transforming the difference in their chemical potential into electrical power by such means as pressure retarded osmosis or reverse electrodialysis. In operation such means take in the concentrated and dilute solutions and exhaust a solution of intermediate concentration. The concentrated solution is supplied from a container such as a pond. It is generated by evaporation of the intermediate concentration solution in a second, separate pond, which receives the exhaust from the power generation means. The exhaust solution is concentrated by evaporation and is transferred into the first pond when the concentration has reached a sufficient level.

Abstract: A variable capacitive element includes a first fixed electrode and a second fixed electrode that are insulated from each other, a movable electrode arranged to face the first fixed electrode and the second fixed electrode, a dielectric layer provided between the movable electrode and the first fixed electrode as well as the second fixed electrode, a first wiring part for applying a first driving voltage to the first fixed electrode with reference to a potential of the movable electrode, and a second wiring part for applying a second driving voltage to the second fixed electrode with reference to the potential of the movable electrode, the second driving voltage having a polarity different from a polarity of the first driving voltage.

Abstract: Disclosed are one-port and two-port voltage-tunable micro-electromechanical capacitors, switches, and filter devices. High aspect-ratio metal micromachining is used to implement very high quality factor (Q) tunable and fixed capacitors, fixed inductors, and low insertion loss tunable and fixed bandpass LC filters. The tunable capacitors can move in the plane of the substrate by the application of DC voltages and achieve greater than 100% of tuning. A combination of low-loss substrate and highest conductivity metal is used to achieve record high Q and low insertion loss at radio frequencies. The disclosed tunable capacitor structure can also be used as a micromechanical switch.

Abstract: A method and apparatus are described for storing electrical power in the form of relative chemical potential between a concentrated solution, typically salt brine, and a dilute version of the same solution. To recover the power, the concentrated solution and dilute solution are supplied to a means for transforming the difference in their chemical potential into electrical power by such means as pressure retarded osmosis or reverse electrodialysis. In operation such means take in the concentrated and dilute solutions and exhaust a solution of intermediate concentration. The concentrated solution is supplied from a container such as a pond. It is generated by evaporation of the intermediate concentration solution in a second, separate pond, which receives the exhaust from the power generation means. The exhaust solution is concentrated by evaporation and is transferred into the first pond when the concentration has reached a sufficient level.

Abstract: The invention relates to an electric circuit arrangement for generating or receiving an output signal or switched condition definitive for the effective locking condition of a door system, especially a motor vehicle door system. The object of the invention is to provide a circuit arrangement with which an output signal definitive for the locking condition of a door system can be furnished, the generation of which signal takes the intentions of a user or the instantaneous situation into account in improved manner.

Abstract: Disclosed is an integrated tunable inductor having mutual micromachined inductances fabricated in close proximity to a tunable inductor that is switched in and out by micromechanical ohmic switches to change the inductance of the integrated tunable inductor. To achieve a large tuning range and high quality factor, silver is preferably used as the structural material to co-fabricate the inductors and micromachined switches, and silicon is selectively removed from the backside of the substrate. Using this method, exemplary tuning of 47% at 6 GHz is achievable for a 1.1 nH silver inductor fabricated on a low-loss polymer membrane. The effect of the quality factor on the tuning characteristic of the integrated inductor is evaluated by comparing the measured result of substantially identical inductors fabricated on various substrates. To maintain the quality factor of the silver inductor, the device may be encapsulated using a low-cost wafer-level polymer packaging technique.

Abstract: A capacitive device comprising at least one first and one second comb, respectively provided with interdigital fingers, adapted to be mobile relative to each other depending on the closing-spacing apart of the axes of the fingers, at least one finger of the first comb including a face opposite a face of a finger of the second comb wherein the axis of the finger of the first comb and the axis of the finger of the second comb are inclined relative to a plane orthogonal to the first direction of displacement of the combs, the plane being defined by the second and third directions perpendicular to the direction, and perpendicular to each other.

Abstract: A method is for fabricating an integrated circuit formed from a substrate and including several metallic interconnection levels in which, in a same plane parallel to the main plane of the substrate, is a plurality of thick horizontal metallic interconnection lines, as well as one or several MIM capacitors fitted with metallic electrodes that are orthogonal to the main plane of the substrate.

Abstract: A capacitive generator has a generator circuit (G) and a charge priming circuit (P) consisting of variable capacitors (1, 2, 101, 102) all coupled to a mechanical transmission which acts to vary the capacitance of the capacitors and to actuate an array of switches (K). A small residual charge on the priming circuit (P) can thus be amplified and conveyed to the generating circuit (G) where it is used to generate an alternating current between the variable capacitors (1, 2) of the generating circuit. The capacitance of the generating capacitors (1, 2) is varied in antiphase in response to the movement of the transmission. An electrical energy extraction device (8) in circuit with the generator capacitors (1, 2) extracts electrical energy from the circuit in reaction to the alternating current which can then be used to power or recharge a small portable device.

Abstract: An operating control device, such as for an appliance, is disclosed comprising sensor elements with a capacitive sensing function, the elements being located underneath a metallic surface that is used as the operating field. An insulating layer is situated between the elements and the metallic surface. When pressure is applied to the metallic surface the capacitance of the sensor element is altered by capacitive coupling. This alteration of capacitance can be determined by a corresponding evaluation circuit or the like for detecting activation of the device.

Abstract: A micro-electromechanical device includes a semiconductor body, in which at least one first microstructure and one second microstructure of reference are integrated. The first microstructure and the second microstructure are arranged in the body so as to undergo equal strains as a result of thermal expansions of the body. Furthermore, the first microstructure is provided with movable parts and fixed parts with respect to the body, while the second microstructure has a shape that is substantially symmetrical to the first microstructure but is fixed with respect to the body. By subtracting the changes in electrical characteristics of the second microstructure from those of the first, variations in electrical characteristics of the first microstructure caused by thermal expansion can be compensated for.

Abstract: A variable capacitor including a first electrode part, which is provided at a fixed part that includes a substrate, and a movable part, which has a second electrode part forming the capacity of said variable capacitor between itself and the first electrode part, and the movable part is displaced in response to a first drive signal to selectively go into an opposing status, in which the second electrode part opposes the first electrode part, and a non-opposing status, in which the second electrode part essentially does not oppose the first electrode part. This variable capacitor is able to obtain at least a two-value capacity in which the mutual ratio is large without specially requiring another capacitor or a switch, and it is able to obtain the desired capacity variation range by combining a plurality of capacitors.