Gas Patents (Class 372/55)
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Patent number: 8653405Abstract: In one aspect, operating a vacuum plasma process system including a plasma discharge chamber is accomplished by generating a main plasma in the discharge chamber in a first operating state, and generating an auxiliary plasma in the discharge chamber in a second operating state. Generating the main plasma includes generating a main plasma power with a first number of RF power generators, and generating an auxiliary plasma power with a second number of RF power generators, such that the second number is smaller than the first number.Type: GrantFiled: November 13, 2006Date of Patent: February 18, 2014Assignee: HUETTINGER Elektronik GmbH + Co. KGInventors: Thomas Kirchmeier, Michael Glück, Christoph Hofstetter, Gerd Hintz
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Patent number: 8653437Abstract: A device is disclosed herein which may comprise a droplet generator producing droplets of target material; a sensor providing an intercept time signal when a droplet reaches a preselected location; a delay circuit coupled with said sensor, the delay circuit generating a trigger signal delayed from the intercept time signal; a laser source responsive to a trigger signal to produce a laser pulse; and a system controlling said delay circuit to provide a trigger signal delayed from the intercept time by a first delay time to generate a light pulse that is focused on a droplet and a trigger signal delayed from the intercept time by a second delay time to generate a light pulse which is not focused on a droplet.Type: GrantFiled: June 9, 2011Date of Patent: February 18, 2014Assignee: Cymer, LLCInventors: William N. Partlo, Richard L. Sandstrom, Daniel J. W. Brown, Igor V. Fomenkov
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Patent number: 8649413Abstract: A high-powered laser beam focusing apparatus for use in laser welding applications that includes a laser having a beam delivery fiber for generating a laser beam and a housing adapted to receive the beam delivery fiber. The housing further includes a first internal chamber adapted to receive a flow of pressurized gas; a second internal chamber; and an aerodynamic window positioned between the first chamber and the second chamber.Type: GrantFiled: July 19, 2012Date of Patent: February 11, 2014Inventor: Stanley L. Ream
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Patent number: 8649412Abstract: The closed cycle solid state optically pumped gas hybrid (chemical recovery) system utilizes a laser diode excited solid state, fiber or bulk, laser as a pump for a molecular gas, or gas mix, medium. The existence of efficient high power laser diode excited solid state fiber or bulk lasers, output spectrally matched to suitable principle and excited level 1st and 2nd overtones of relevant gases, is the enabling system technology. The utilization of such in combination with suitable gases introduces a range of viable, in principle sourcing on laser diodes and thus effectively laser diode pumped, gas laser systems with access to the approximately 3.5 ?m to approximately 5.2 ?m and approximately 9 ?m to approximately 11 ?m spectral regions. Continuous wave or pulsed operation, with significant energy capability courtesy of solid state storage, is admitted.Type: GrantFiled: June 29, 2011Date of Patent: February 11, 2014Inventor: Robert Neil Campbell
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Publication number: 20140023101Abstract: A single-cavity dual-electrode discharge cavity and an excimer laser including such a discharge cavity are disclosed. The discharge cavity may comprise a cavity body and two sets of main discharge electrodes. The cavity body may comprise a left chamber and a right chamber arranged to form a symmetric dual-chamber cavity. The left and right chambers can interface and communicate with each other at a plane of symmetry of the entire discharge cavity. The two sets of main discharge electrodes can be disposed in the left and right chambers on the upper side, respectively. According to the present disclosure, the single-cavity configuration can be used to achieve functions of dual-cavity configurations, such as MOPA, MOPO, and MOPRA. Thus, it is possible to reduce system complexities and also ensure synchronization of discharging in the discharge cavity.Type: ApplicationFiled: September 27, 2013Publication date: January 23, 2014Applicant: Academy of Opto-Electronics, Chinese Academy of SciencesInventors: Yu Wang, Yi Zhou, Jinbin Ding, Bin Liu, Lijia Zhang, Jiangshan Zhao, Pengfei Sha
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Patent number: 8624209Abstract: A deep ultraviolet light source includes a master oscillator producing a seed light beam; a regenerative ring amplifier receiving the seed light beam from the master oscillator and outputting an output light beam, the regenerative ring amplifier including a set of optical components that define a plane of a closed ring; and a divergence control device within the master oscillator or between the master oscillator and the regenerative ring amplifier and configured to reduce a divergence of the output light beam along a normal direction, the normal direction being perpendicular to the plane of the ring.Type: GrantFiled: March 14, 2013Date of Patent: January 7, 2014Assignee: Cymer, LLCInventors: Robert Jay Rafac, Dershen Wan, Eric Mason, Rostislav Rokitski
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Patent number: 8611393Abstract: This disclosure is directed to widen an adjustable range of the spectral linewidth of laser light output from a laser apparatus. This laser apparatus may include: (1) an excitation source configured to excite a laser medium in a laser gain space, (2) an optical resonator including an output coupler arranged on one side of an optical path through the laser gain space and a wavelength dispersion element arranged on the other side of the optical path through the laser gain space, and (3) a switching mechanism configured to switch a beam-width magnification or reduction factor by placing or removing at least one beam-width change optical system for expanding or reducing a beam width in or from an optical path between the laser gain space and the wavelength dispersion element or by inverting orientation of the at least one beam-width change optical system in the optical path.Type: GrantFiled: March 15, 2012Date of Patent: December 17, 2013Assignee: Gigaphoton Inc.Inventors: Junichi Fujimoto, Takahito Kumazaki, Toru Suzuki, Satoshi Tanaka, Osamu Wakabayashi
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Patent number: 8611391Abstract: A gas-discharge waveguide CO2 laser has a Z-shaped folded waveguide formed by three ceramic tubes. Ends of the adjacent tubes are shaped and fitted together to form a common aperture. The tubes are held fitted together by spaced-apart parallel discharge electrodes. Four mirrors are arranged to form a laser-resonator having a longitudinal axis extending through the tubes.Type: GrantFiled: May 3, 2011Date of Patent: December 17, 2013Assignee: Coherent, Inc.Inventors: Anthony J. DeMaria, R. Russel Austin
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Patent number: 8611390Abstract: A fan for circulating laser gas in a gas laser, the fan having a shaft which is supported by at least one radial bearing and at least one axial gas bearing. The axial gas bearing has at least two rotating bearing faces, one or both being structured with a groove pattern, and at least two stationary bearing faces that are arranged at both sides of a plate.Type: GrantFiled: August 3, 2012Date of Patent: December 17, 2013Assignee: TRUMPF Maschinen AGInventors: Andreas Lehr, Patrick Bon, Kenworthy Molyneaux Alexander
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Publication number: 20130315272Abstract: A regenerative amplifier according to one aspect of this disclosure is used in combination with a laser device, and the regenerative amplifier may include: a pair of resonator mirrors constituting an optical resonator; a slab amplifier provided between the pair of the resonator mirrors for amplifying a laser beam with a predetermined wavelength outputted from the laser device; and an optical system disposed to configure a multipass optical path along which the laser beam is reciprocated inside the slab amplifier, the optical system transferring an optical image of the laser beam at a first position as an optical image of the laser beam at a second position.Type: ApplicationFiled: July 31, 2013Publication date: November 28, 2013Applicant: GIGAPHOTON INC.Inventors: Krzysztof NOWAK, Takashi SUGANUMA, Osamu WAKABAYASHI
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Publication number: 20130308673Abstract: In a slab laser, a gas mixture containing carbon dioxide CO2 is formed as a laser-active medium in a discharge space which is formed between two plate-shaped metal electrodes, the flat faces of which are located opposite one another. A resonator mirror is arranged on each of the mutually opposite end faces of the discharge space, the mirrors forming an unstable resonator parallel to the flat faces. At least one of the mutually facing flat faces is provided either on the entire flat face with a dielectric layer the thickness of which is greater on at least one sub-surface than in the remaining area of the flat face, or the at least one flat face is provided with a dielectric layer exclusively on at least one sub-surface.Type: ApplicationFiled: July 25, 2013Publication date: November 21, 2013Applicant: ROFIN-SINAR LASER GMBHInventors: FLORIAN ENGEL, STEFAN RUPPIK, VOLKER SCHOLZ, HERMANN HAGE
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Patent number: 8576891Abstract: The sealed gas laser oscillator that includes the airtight vessel, the laser gas supply source that supplies a laser gas to the airtight vessel, and the vacuum pump that performs evacuation until a pressure of an inside of the airtight vessel reaches a target reached pressure every predetermined interval between laser gas exchanges and is connected to the airtight vessel, and that performs laser oscillation in a state where the airtight vessel is filled with the laser gas. The gas laser oscillator includes a unit that determines the target reached pressure on the basis of the interval between laser gas exchanges, a leakage rate of an impurity gas from the outside to the airtight vessel after evacuation, and an allowable impurity gas pressure at which the gas laser oscillator is capable of being operated.Type: GrantFiled: September 13, 2011Date of Patent: November 5, 2013Assignee: Mitsubishi Electric CorporationInventors: Naoki Miyamoto, Mototoshi Kumaoka
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Patent number: 8559099Abstract: A laser beam amplifier with high optical axis stability is provided. The laser beam amplifier includes: a container for accommodating a laser medium; a pair of electrodes for performing discharge in the laser medium to form an amplification region for a laser beam in the laser medium; and an optical system for forming an optical path between a first point, upon which the laser beam is incident, and a second point, from which the laser beam is outputted, such that the amplification region is located in the optical path between the first point and the second point, wherein the first point and the second point are conjugate to each other, and the laser beam incident upon the first point is amplified while passing through the amplification region at least twice and then transferred to the second point.Type: GrantFiled: January 11, 2010Date of Patent: October 15, 2013Assignee: Gigaphoton Inc.Inventors: Krzysztof Nowak, Masato Moriya, Osamu Wakabayashi
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Patent number: 8553733Abstract: A light source device 1 includes a laser light source 10 and an optical phase modulator 15 or the like. The optical phase modulator 15 inputs coherent light output from the laser light source 10 and transmitted through a beam splitter 14, phase-modulates the light according to the position on a beam cross section of the light, and outputs the phase-modulated light to the beam splitter 14. When (p+1) areas sectioned by p circumferences centered on a predetermined position are set on a beam cross section of light input to the optical phase modulator 15, the more outside each of the (p+1) areas is, the wider the radial width of the area, the amount of phase modulation is constant in each of the (p+1) areas, and the amounts of phase modulation differ by ? between two adjacent areas out of the (p+1) areas.Type: GrantFiled: February 21, 2008Date of Patent: October 8, 2013Assignee: Hamamatsu Photonics K.K.Inventors: Taro Ando, Yoshiyuki Ohtake, Naoya Matsumoto, Takashi Inoue, Haruyoshi Toyoda, Norihiro Fukuchi
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Publication number: 20130259769Abstract: Singlet oxygen metastables can be formed. A catalytic coating is formed on an interior surface of a flow reactor, and an oxygen containing species is flowed into the flow reactor to produce singlet oxygen metastables by a chemical reaction in the presence of the catalytic coating.Type: ApplicationFiled: June 26, 2009Publication date: October 3, 2013Inventors: W. Terry Rawlins, Seonkyung Lee, Steven J. Davis
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Publication number: 20130235893Abstract: A transmissive optical device includes a crystal part including a c-axis in a crystal structure. The crystal part is configured to include a surface to receive a laser beam. The c-axis is arranged to be inclined relative to an incident direction of the laser beam in a plane of incidence of the laser beam.Type: ApplicationFiled: February 21, 2013Publication date: September 12, 2013Applicant: Gigaphoton Inc.Inventors: Takahito KUMAZAKI, Osamu Wakabayashi
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Patent number: 8526479Abstract: A laser device is provided. The laser device includes a laser tube, and power devices distributed uniformly along the length of the laser tube.Type: GrantFiled: May 17, 2007Date of Patent: September 3, 2013Assignee: Synrad, Inc.Inventor: Michael W. Murray
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Patent number: 8526481Abstract: A movable electrode assembly for use in a laser system, includes a first electrode having a first discharge surface, a second electrode having a second discharge surface. The second electrode being arranged opposite from the first electrode. The second discharge surface being spaced apart from the first discharge surface by a discharge gap. A discharge gap adjuster interfaced with at least one of the second electrode or the first electrode, the discharge gap adjuster configured to adjust the discharge gap. A method of adjusting a discharge gap is also disclosed.Type: GrantFiled: May 10, 2012Date of Patent: September 3, 2013Assignee: CYMER, Inc.Inventors: Richard L. Sandstrom, Tae (Mark) H. Chung, Richard C. Ujazdowski
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Publication number: 20130202006Abstract: Apparatus, systems, and methods using an optically pumped gas filled hollow fiber laser can be implemented in a variety of applications. In various embodiments, operation of an optically pumped gas filled hollow fiber laser is based on population inversion in the gas. Additional apparatus, systems, and methods are disclosed.Type: ApplicationFiled: January 21, 2011Publication date: August 8, 2013Inventors: Wolfgang G. Rudolph, Amarin Ratanavis, Vasudevan Nampoothiri, Kristan L. Corwin, Andrew M. Jones, Brian R. Washburn, Rajesh Kadel, John M. Zavada
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Patent number: 8502178Abstract: An extreme ultraviolet light source apparatus, in which a target material is irradiated with a laser beam from a laser apparatus and the target material is turned into plasma, thereby emitting extreme ultraviolet light, may include a burst control unit configured to control irradiation of the target material is irradiated with the laser beam outputted successively in pulses from the laser apparatus when the extreme ultraviolet light is emitted successively in pulses. The target material is prevented from being turned into plasma by the laser beam while the laser beam is outputted successively in pulses from the laser apparatus when the successive pulsed emission is paused.Type: GrantFiled: January 12, 2012Date of Patent: August 6, 2013Assignee: Gigaphoton Inc.Inventors: Masato Moriya, Hideyuki Hayashi, Tooru Abe
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Patent number: 8503499Abstract: A gas discharge chamber that uses a calcium fluoride crystal which reduces a breakage due to mechanical stress (window holder and laser gas pressure), thermal stress from light absorption, and the like, increases the degree of linear polarization of output laser, and suppresses degradation due to strong ultraviolet (ArF, in particular) laser light irradiation. A first window (2) and a second window (3) of the gas discharge chamber have an incident plane and an emitting plane in parallel with a (111) crystal plane of their calcium fluoride crystal. With respect to an arrangement where laser light entering the calcium fluoride crystal passes through a plane including a <111> axis and a <001> axis of each of the first window (2) and the second window (3) as seen from inside the chamber (1), the first window (2) and the second window (3) are arranged in positions rotated in the same direction by the same angle about their <111> axis.Type: GrantFiled: October 7, 2010Date of Patent: August 6, 2013Assignee: Gigaphoton Inc.Inventors: Shinji Nagai, Fumika Yoshida, Osamu Wakabayashi, Kouji Kakizaki
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Patent number: 8498317Abstract: A temperature controller for a gas laser which controls temperatures of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion and each second temperature-controlled portion in parallel.Type: GrantFiled: July 6, 2012Date of Patent: July 30, 2013Assignee: Gigaphoton Inc.Inventors: Yukio Watanabe, Hideyuki Hayashi, Kouji Kakizaki, Michio Shinozaki, Hideo Hoshino
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Patent number: 8462824Abstract: Phase-matched high-order harmonic generation of soft and hard X-rays is accomplished using infrared driving lasers in a high-pressure non-linear medium. The pressure of the non-linear medium is increased to multi-atmospheres and a mid-IR (or higher) laser device provides the driving pulse. Based on this scaling, also a general method for global optimization of the flux of phase-matched high-order harmonic generation at a desired wavelength is designed.Type: GrantFiled: April 22, 2010Date of Patent: June 11, 2013Assignee: The Regents of the University of ColoradoInventors: Tenio V. Popmintchev, Ming-Chang Chen, Alon Bahabad, Margaret M. Murnane, Henry C. Kapteyn
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Patent number: 8446928Abstract: A movable electrode assembly for use in laser system includes a first electrode, a second electrode arranged opposite from the first electrode, the second electrode being spaced apart from the first electrode by a discharge gap and a discharge gap adjuster interfaced with at least one of the second electrode or the first electrode, the discharge gap adjuster configured to adjust the discharge gap. A movable electrode assembly for integration into a housing of a laser system includes a first electrode having a discharge surface, a second electrode having a discharge surface, such that the discharge surface of the first electrode and the discharge surface of the second electrode face each other in a spaced apart setting that defines a desired discharge gap, and a mechanism for moveably adjusting the spaced apart setting toward the desired discharge gap. A method of adjusting a discharge gap is also disclosed.Type: GrantFiled: November 12, 2010Date of Patent: May 21, 2013Assignee: Cymer, Inc.Inventors: Richard L. Sandstrom, Tae (Mark) H. Chung, Richard C. Ujazdowski
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Patent number: 8442091Abstract: The invention provides microchannel lasers having a microplasma gain medium. Lasers of the invention can be formed in semiconductor materials, and can also be formed in polymer materials. In a microlaser of the invention, high density plasmas are produced in microchannels. The microplasma acts as a gain medium with the electrodes sustaining the plasma in the microchannel. Reflectors are used with the microchannel for obtaining optical feedback to obtain lasing in the microplasma gain medium in devices of the invention for a wide range of atomic and molecular species. Several atomic and molecular gain media will produce sufficiently high gain coefficients that reflectors (mirrors) are not necessary. Microlasers of the invention are based on microplasma generation in channels of various geometries. Preferred embodiment microlaser designs can be fabricated in semiconductor materials, such as Si wafers, by standard photolithographic techniques, or in polymers by replica molding.Type: GrantFiled: October 27, 2008Date of Patent: May 14, 2013Assignee: The Board of Trustees of the University of IllinoisInventors: Sung-Jin Park, J. Gary Eden, Paoyei Chen, Paul A. Tchertchian, Thomas M. Spinka
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Publication number: 20130114637Abstract: The invention relates to the field of laser physics and laser technology and can be used in the development and creation of plasma-chemical systems based on lasers. A method of obtaining an optical discharge consisting in the optical breakdown of the gas to form a plasma region and maintain it in a laser beam during the duration of its action. New in the author's opinion is that the breakdown of the gas to form a plasma region and its maintenance is carried out in the laser cavity. New in the author's opinion is that the breakdown of the gas to form a plasma region and its maintenance is carried out in an additional cavity of three-mirror laser cavity. New in the author's opinion is that the breakdown of the gas to form a plasma region and its maintenance is carried out in the focal region of a conical laser beam New in the author's opinion is that the breakdown of gas to form a plasma region and its maintenance is carried out in the focal region of the volumetric laser beam.Type: ApplicationFiled: July 11, 2011Publication date: May 9, 2013Inventor: Yuri Aleksandrovich Chivel
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Patent number: 8432949Abstract: A laser device includes an optical resonator, a microwave driven discharge device, and a source for a second gas. The microwave driven discharge device is disposed relative to the optical resonator. The microwave driven discharge device operates at a discharge power and gas flow rate to produce a selected amount of energetic singlet oxygen metastables flowing in the direction of the optical resonator. The second source for the second gas is disposed between the optical resonator and the microwave driven discharge device. The second gas reacts with the selected amount of energetic singlet oxygen metastables to form an excited species in an amount sufficient to support lasing of the excited species in the optical resonator.Type: GrantFiled: September 14, 2010Date of Patent: April 30, 2013Assignee: Physical Sciences Inc.Inventors: W. Terry Rawlins, David B. Oakes, Seonkyung Lee, Steven J. Davis
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Publication number: 20130100979Abstract: A high-powered laser beam focusing apparatus for use in laser welding applications that includes a laser having a beam delivery fiber for generating a laser beam and a housing adapted to receive the beam delivery fiber. The housing further includes a first internal chamber adapted to receive a flow of pressurized gas; a second internal chamber; and an aerodynamic window positioned between the first chamber and the second chamber.Type: ApplicationFiled: July 19, 2012Publication date: April 25, 2013Applicant: EDISON WELDING INSTITUTE, INC.Inventor: Stanley L. REAM
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Patent number: 8428095Abstract: One embodiment of a laser resonator comprises one or more laser resonator components, a container and an ozone generator. The laser resonator components include a non-linear crystal, a beam polarization combiner, an optical lens, a mirror and/or an optical grating. The container encloses the one or more laser resonator components. The ozone generator is configured to introduce ozone gas into the container.Type: GrantFiled: December 21, 2009Date of Patent: April 23, 2013Assignee: AMS Research CorporationInventors: Ming Ko, Wen-Jui Ray Chia
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Patent number: 8422528Abstract: A laser may comprise a ceramic body including a first wall and a second wall opposite the first wall, a first mirror positioned at first ends of the first and second walls, a second mirror positioned at second ends of the first and second walls opposite the first ends, the first and second walls and the first and second mirrors defining a slab laser cavity within the ceramic body. The laser may further comprise a first electrode positioned outside the laser cavity and adjacent to the first wall of the ceramic body and a second electrode positioned outside the laser cavity and adjacent to the second wall of the ceramic body, wherein a laser gas disposed in the laser cavity is excited when an excitation signal is applied to the first and second electrodes. In some embodiments, the first and second mirrors may form a free-space multi-folded resonator in the slab laser cavity. In other embodiments, the first and second mirrors may form a free-space unstable resonator in the slab laser cavity.Type: GrantFiled: February 24, 2011Date of Patent: April 16, 2013Assignee: Iradion Laser, Inc.Inventors: Clifford E. Morrow, Wendelin Weingartner
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Patent number: 8416828Abstract: An array of discrete catalyst elements is contained in a heated module external to the main laser vessel with an auxiliary gas flow loop connecting them so as to provide independent control of catalyst temperature and gas flow rate to achieve high CO+1/2O2 to CO2 recombination under high pulse repetition frequency operation for a sealed laser. Catalyst elements in the form of cylinders with holes through their centers are mounted on multiple parallel rods or catalysts in the form of small spherical or cylindrical elements are contained in multiple packets arranged in the module so as to minimize flow impedance and maximize laser gas recycling throughput. The cylindrical catalyst module is constructed so as to allow for rapid heating to operating temperature while withstanding atmospheric differential pressures during laser processing.Type: GrantFiled: October 8, 2010Date of Patent: April 9, 2013Assignee: DBC Technology Corp.Inventor: David B. Cohn
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Patent number: 8416827Abstract: An oscillator housing includes a main body unit that is shaped into a frame and formed of a metallic material and a cover unit that is formed of a metallic material to cover openings of the main body unit, and has an outer wall that has an arc cross section perpendicular to the optical axis and extends in the optical axis direction and side walls that are connected to the both ends of the outer wall in the optical axis direction. When the cover unit is fixed to the main body unit with a fixing member, the outer wall having an arc shape is configured such that force is generated in the height direction towards the outside of the oscillator housing on the connecting portion of the cover unit with the main body unit.Type: GrantFiled: May 19, 2009Date of Patent: April 9, 2013Assignee: Mitsubishi Electric CorporationInventors: Kouji Funaoka, Masahiko Hasegawa, Kazuo Sugihara
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Patent number: 8411721Abstract: Two excimer lasers have individual pulsing circuits each including a storage capacitor which is charged and then discharged through a pulse transformer to generate an electrical pulse, which is delivered to the laser to generate a light pulse. The time between generation of the electrical pulse and creation of the light pulse is dependent on the charged voltage of the capacitor. The capacitors are charged while disconnected from each other. The generation of the electrical pulses is synchronized by connecting the capacitors together for a brief period after the capacitors are charged to equalize the charging voltages. The capacitors are disconnected from each other before they are discharged.Type: GrantFiled: July 2, 2012Date of Patent: April 2, 2013Assignee: Coherent GmbHInventors: Andreas Targsdorf, Rainer Desor
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Patent number: 8411720Abstract: A system and method for automatically performing gas optimization after a refill in the chambers of a two chamber gas discharge laser such as an excimer laser is disclosed. The laser is continuously fired at a low power output, and the gas in the amplifier laser chamber bled if necessary until the discharge voltage meets or exceeds a minimum value without dropping the pressure below a minimum value. The power output is increased, and the gas bled again if necessary until the voltage and pressure meet or exceed the minimum values. The laser is then fired in a burst pattern that approximates the expected firing of the laser in operation, and the gas bled if necessary until the discharge voltage meets or exceeds the minimum value and the output energy meets or exceeds a minimum value, again without dropping the pressure in the chamber below the minimum value. Once the minimum values are provided, the process runs quickly without manual interaction.Type: GrantFiled: June 30, 2011Date of Patent: April 2, 2013Assignee: Cymer, Inc.Inventors: Kevin Michael O'Brien, Joshua Jon Thornes, Daniel Jason Riggs, Rui Jiang
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Patent number: 8405022Abstract: A polarizing apparatus has a thermally conductive partitioning system in a polarizing cell. In the polarizing region, this thermally conductive partitioning system serves to prevent the elevation of the temperature of the polarizing cell where laser light is maximally absorbed to perform the polarizing process. By employing this partitioning system, increases in laser power of factors of ten or more can be beneficially utilized to polarize xenon. Accordingly, the polarizing apparatus and the method of polarizing 129Xe achieves higher rates of production.Type: GrantFiled: April 7, 2011Date of Patent: March 26, 2013Assignee: University of New HampshireInventor: F. William Hersman
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Patent number: 8391329Abstract: A gas discharge laser including a lasing gas between discharge electrodes and has a power supply for generating RF pulses to be delivered to the electrodes of the laser for energizing the lasing gas. A sequence of RF simmer pulses is delivered to the electrodes. The simmer pulses create sufficient free electrons in the lasing gas to facilitate subsequent ignition of the discharge while not causing laser action. RF lasing pulses having a longer duration than the simmer pulses are delivered to the electrodes to ignite the discharge and provide corresponding laser output pulses. Delivery of the simmer pulses is suspended during delivery of the lasing pulses to avoid amplitude or pulse-width modulation of the laser output pulses by the simmer pulses.Type: GrantFiled: February 6, 2009Date of Patent: March 5, 2013Assignee: Coherent, Inc.Inventor: Joel Fontanella
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Patent number: 8379687Abstract: A line narrowed gas discharge laser system and method of operating same is disclosed which may comprise a dispersive center wavelength selective element; a beam expander comprising a plurality of refractive elements; a refractive element positioning mechanism positioning at least one of the refractive elements to modify an angle of incidence of a laser light beam on the dispersive center wavelength selection element; each of the dispersive center wavelength selection element and the beam expander being aligned with each other and with a housing containing at least the dispersive center wavelength selection element; a housing positioning mechanism positioning the housing with respect to an optical axis of the gas discharge laser system. The dispersive element may comprise a grating and the beam expander may comprise a plurality of prisms. The housing may contain the dispersive center wavelength selective element and the beam expander. The housing positioning element may comprise a position locking mechanism.Type: GrantFiled: June 30, 2005Date of Patent: February 19, 2013Assignee: Cymer, Inc.Inventors: Raymond F. Cybulski, Robert A. Bergstedt, William N. Partlo, Richard L. Sandstrom, Gon Wang
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Patent number: 8369374Abstract: A light source device wherein the high-temperature plasma state after the start of the lighting is maintained stably and the light emission can be maintained stably and a decrease of the lighting life cycle by means of a heating of the light emission tube is suppressed comprises a light emission tube, in which a light emitting means is enclosed, and a pulsed laser oscillator part emitting a pulsed laser beam towards said light emission tube, wherein a continuous-wave laser oscillator part is provided emitting a continuous-wave laser beam towards said light emission tube.Type: GrantFiled: July 27, 2010Date of Patent: February 5, 2013Assignees: Ushio Denki Kabushiki Kaisha, Energetiz Technology, Inc.Inventor: Toshio Yokota
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Patent number: 8369373Abstract: An RF powered CO2 gas-discharge laser includes discharge electrodes and a lasing gas mixture between the electrode. The lasing gas mixture is ionized when the RF power is applied to the electrodes and laser action is initiated when the RF power has been applied for a duration sufficient to ignite a discharge in the lasing gas mixture. The gas mixture is pre-ionized by periodically applying the RF power to the electrodes for a predetermined period during which ignition of a discharge is not expected to occur. RF power reflected back from the electrodes is monitored. If the monitored power falls below a predetermined level indicative of the imminent onset of laser action before the predetermined duration has elapsed, application of the RF power to the electrodes is terminated to prevent the laser action from occurring.Type: GrantFiled: March 23, 2010Date of Patent: February 5, 2013Assignee: Coherent, Inc.Inventors: David John Allie, Joel Fontanella
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Patent number: 8351480Abstract: A pulse width modulation method for controlling the output power of a pulsed gas discharge laser powered by a pulsed RF power supply comprises delivering a train of digital pulses to the RF power supply. Each pulse in the train has an incrementally variable duration. The power supply is arranged to deliver a train of RF pulses corresponding in number and duration to the train of digital pulses received. The average power in the RF-pulse train can be varied by incrementally varying the duration of one or more of the digital pulses in the digital pulse train. The train of RF pulses is used to power a gas discharge laser. The gas discharge laser outputs a pulse train corresponding to the RF pulse train.Type: GrantFiled: March 30, 2010Date of Patent: January 8, 2013Assignee: Coherent, Inc.Inventor: David John Allie
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Publication number: 20130003773Abstract: A system and method for automatically performing gas optimization after a refill in the chambers of a two chamber gas discharge laser such as an excimer laser is disclosed. The laser is continuously fired at a low power output, and the gas in the amplifier laser chamber bled if necessary until the discharge voltage meets or exceeds a minimum value without dropping the pressure below a minimum value. The power output is increased, and the gas bled again if necessary until the voltage and pressure meet or exceed the minimum values. The laser is then fired in a burst pattern that approximates the expected firing of the laser in operation, and the gas bled if necessary until the discharge voltage meets or exceeds the minimum value and the output energy meets or exceeds a minimum value, again without dropping the pressure in the chamber below the minimum value. Once the minimum values are provided, the process runs quickly without manual interaction.Type: ApplicationFiled: June 30, 2011Publication date: January 3, 2013Applicant: CYMER, INC.Inventors: Kevin Michael O'Brien, Joshua Jon Thornes, Daniel Jason Riggs, Rui Jiang
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Publication number: 20130003772Abstract: The closed cycle solid state optically pumped gas hybrid (chemical recovery) system utilizes a laser diode excited solid state, fiber or bulk, laser as a pump for a molecular gas, or gas mix, medium. The existence of efficient high power laser diode excited solid state fiber or bulk lasers, output spectrally matched to suitable principle and excited level 1st and 2nd overtones of relevant gases, is the enabling system technology. The utilization of such in combination with suitable gases introduces a range of viable, in principle sourcing on laser diodes and thus effectively laser diode pumped, gas laser systems with access to the ˜3.5 ?m to ˜5.2 ?m and ˜9 ?m to ˜11 ?m spectral region. Continuous wave or pulsed operation, with significant energy capability courtesy of solid state storage, is admitted.Type: ApplicationFiled: June 29, 2011Publication date: January 3, 2013Inventor: Robert Neil Campbell
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Patent number: 8331416Abstract: In a stripline laser, a gas mixture containing carbon dioxide is situated as a laser-active medium between two plate-type electrodes lying with their flat sides opposite one another. The electrodes define a discharge space, at whose end sides lying opposite one another a resonator mirror is respectively arranged. The resonator mirrors form an unstable resonator. To operate the stripline laser in the 9.3 ?m band and/or in the 9.6 ?m band, the electrodes are provided with a passivation layer on their flat sides. The passivation layer, of at least one electrode, contains silicon dioxide in a region covering a partial area of a flat side. A distance between the electrodes is set such that the attenuation of laser beams in the 10.3 ?m band and in the 10.6 ?m band is greater than the attenuation of laser beams in the 9.3 ?m band and/or in the 9.6 ?m band.Type: GrantFiled: May 25, 2012Date of Patent: December 11, 2012Assignee: Rofin Sinar Laser GmbHInventors: Hermann Hage, Volker Scholz, Florian Engel
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Publication number: 20120307851Abstract: A system includes a chamber, a laser beam apparatus configured to generate a laser beam to be introduced into the chamber, a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the laser beam, and a target supply unit configured to supply a target material into the chamber, the target material being irradiated with the laser beam for generating extreme ultraviolet light.Type: ApplicationFiled: August 10, 2012Publication date: December 6, 2012Inventors: Tsukasa HORI, Kouji KAKIZAKI, Tatsuya YANAGIDA, Osamu WAKABAYASHI, Hakaru MIZOGUCHI
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Patent number: 8320424Abstract: Preferred embodiments of a purge gas port, laser beam attenuating input window, and laser shutter constitute subsystems of a UV laser optical system in which a laser beam is completely enclosed to reduce contamination of the optical system components. Purge gas is injected through multiple locations in a beam tube assembly to ensure that the optical component surfaces sensitive to contamination are in the flow path of the purge gas. The input window functions as a fixed level attenuator to limit photopolymerization of airborne molecules and particles. Periodically rotating optical elements asymmetrically in their holders reduces burn damage to the optics.Type: GrantFiled: November 30, 2006Date of Patent: November 27, 2012Assignee: Electro Scientific Industries, Inc.Inventors: Bryan C. Bolt, David M. Hemenway, Mark Kosmowski, A. Grey Lerner, Brady E. Nilsen, Richard Pope
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Publication number: 20120281728Abstract: A gas-discharge waveguide CO2 laser has a Z-shaped folded waveguide formed by three ceramic tubes. Ends of the adjacent tubes are shaped and fitted together to form a common aperture. The tubes are held fitted together by spaced-apart parallel discharge electrodes. Four mirrors are arranged to form a laser-resonator having a longitudinal axis extending through the tubes.Type: ApplicationFiled: May 3, 2011Publication date: November 8, 2012Applicant: Coherent, Inc.Inventors: Anthony J. DEMARIA, R. Russel AUSTIN
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Patent number: 8295319Abstract: A laser may comprise a ceramic body defining a chamber therein containing a laser gas. The ceramic body may include a plurality of parallel walls that partially define a first section of the chamber, the first section of the chamber defining a waveguide. The ceramic body may further include a plurality of oblique walls that partially define a second section of the chamber, the second section of the chamber being shaped to modify a transverse profile of a laser beam traveling through the second section of the chamber. The laser may further comprise a plurality of electrodes positioned outside the ceramic body and adjacent to the plurality of parallel walls such that only laser gas within the first section of the chamber is excited when an excitation signal is applied to the plurality of electrodes.Type: GrantFiled: November 23, 2010Date of Patent: October 23, 2012Assignee: Iradion Laser, Inc.Inventors: Clifford E. Morrow, Wendelin Weingartner
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Patent number: 8295316Abstract: A laser light source experiencing an EOL condition, which might otherwise cause an unscheduled shutdown, is instead operated in a diminished capacity in one or more predetermined or calculated increments. Operating in such diminished capacity continues until the laser system can undergo appropriate maintenance either during a regularly scheduled shutdown or a newly scheduled shutdown. In the meantime, the diminished capacity of the laser system is accommodated by the utilization tool, as appropriate.Type: GrantFiled: March 24, 2010Date of Patent: October 23, 2012Assignee: Cymer, Inc.Inventors: Robert P. Akins, Richard L. Sandstrom, Daniel J. W. Brown, Matthew R. Graham, Kevin W. Zhang, Patrick L. Nelissen
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Patent number: 8290017Abstract: A carbon-dioxide (CO2) gas-discharge slab laser includes elongated discharge-electrodes in a sealed enclosure. Radio Frequency (RF) power is supplied to the electrodes via an impedance matching network and a co-axial electrical low inductance transmission line feed-through sealed to the enclosure. The feed-trough includes two spring contacts which are configured to be spring compression push-fit in grooves in edges of the discharge-electrodes. A central conductor of the feed-through is fluid cooled. A capacitor of the impedance matching network is assembled on the central conductor as an integral part of the feed-trough.Type: GrantFiled: September 19, 2011Date of Patent: October 16, 2012Assignee: Coherent, Inc.Inventors: Leon A. Newman, Vernon A. Seguin, Lanny Laughman, Adrian Papanide
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Patent number: 8284478Abstract: A device for increasing the spectral bandwidth of optical pulses, comprises a hollow fiber waveguide, optical components for focusing the beam into the hollow fiber waveguide and for re-collimating the beam at the exit of the hollow fiber waveguide, the hollow fiber waveguide being contained in an air-tight chamber filled with a gas at a given pressure; the length of the hollow fiber is such that, for a given input pulse energy and gas pressure, the energy contained in a fundamental propagation mode of the optical pulses that has minimum propagation losses exhibits substantially periodic oscillations over the full length of the hollow fiber waveguide and reaches a local maximum at the output end of the said hollow fiber waveguide.Type: GrantFiled: June 30, 2010Date of Patent: October 9, 2012Assignee: Femtolasers Produktions GmbHInventor: Gabriel-Florin Tempea