Abstract: The gas laser oscillator apparatus of the present invention has a temperature-detecting mechanism disposed at the bearings of the bellows section. The temperature-detecting mechanism detects temperature rise in the bearings and calculates a maintenance cycle with reference to the predetermined data on relationship between temperature and the lifetime of the bearings. Disposed at the bearings, the temperature-detecting mechanism outputs a signal that indicates a replacement cycle according to the temperature of the bearings. More preferable, the temperature-detecting mechanism has a sensor at a tip end of a spring having a pressure force smaller than a load applied to the bearings in advance. To enhance accuracy of temperature detection, the spring is wrapped around with heat insulating material so as not to be exposed to outside temperature.

Abstract: Continuous mass flow gas replenishment may be implemented in a gas lasing device, such as a gas laser or amplifier, by using a restrictive orifice to bleed one or more gases into a reservoir and/or discharge chamber of the gas laser or amplifier at a predefined mass flow rate. The mass flow rate is a function of the pressure drop across the restrictive orifice resulting from the pressure differential between the depleted gas and the source gas. Thus, gases may be added as needed such that the gas total pressure, as well as the constituent partial pressures, is maintained within a desired range throughout the laser or amplifier fill lifetime. The continuous mass flow gas replenishment may thus make up the lost partial pressure of reactive gases in gas lasing devices in a manner that is less complicated and is less expensive than other continuous flow methodologies.

Abstract: A method and system for performing injects of halogen gas into the chambers of a two chamber gas discharge laser such as a MOPA excimer laser for allowing operation of the laser within acceptable parameters and compensating for ageing effects without the necessity of performing refills is described. A parameter reflecting efficiency of the laser is measured, and the change in the parameter with respect to the length of laser operation is estimated. The change in the parameter with respect to the pressure in one of the chambers is also measured. At a given time, the total change in the value of the parameter is estimated, and from this change in pressure that is needed to reverse the change in the value of the parameter is calculated. The pressure in the chamber is then changed to correct for the amount of time that the laser has been in operation.

Abstract: A laser device includes an optical resonator, a microwave driven discharge device, and a source for a second gas. The microwave driven discharge device is disposed relative to the optical resonator. The microwave driven discharge device operates at a discharge power and gas flow rate to produce a selected amount of energetic singlet oxygen metastables flowing in the direction of the optical resonator. The second source for the second gas is disposed between the optical resonator and the microwave driven discharge device. The second gas reacts with the selected amount of energetic singlet oxygen metastables to form an excited species in an amount sufficient to support lasing of the excited species in the optical resonator.

Abstract: An oscillator housing includes a main body unit that is shaped into a frame and formed of a metallic material and a cover unit that is formed of a metallic material to cover openings of the main body unit, and has an outer wall that has an arc cross section perpendicular to the optical axis and extends in the optical axis direction and side walls that are connected to the both ends of the outer wall in the optical axis direction. When the cover unit is fixed to the main body unit with a fixing member, the outer wall having an arc shape is configured such that force is generated in the height direction towards the outside of the oscillator housing on the connecting portion of the cover unit with the main body unit.

Abstract: A system and method for automatically performing gas optimization after a refill in the chambers of a two chamber gas discharge laser such as an excimer laser is disclosed. The laser is continuously fired at a low power output, and the gas in the amplifier laser chamber bled if necessary until the discharge voltage meets or exceeds a minimum value without dropping the pressure below a minimum value. The power output is increased, and the gas bled again if necessary until the voltage and pressure meet or exceed the minimum values. The laser is then fired in a burst pattern that approximates the expected firing of the laser in operation, and the gas bled if necessary until the discharge voltage meets or exceeds the minimum value and the output energy meets or exceeds a minimum value, again without dropping the pressure in the chamber below the minimum value. Once the minimum values are provided, the process runs quickly without manual interaction.

Abstract: An optical arrangement, e.g. a projection exposure apparatus (1) for EUV lithography, includes: a housing (2) enclosing an interior space (15); at least one, preferably reflective optical element (4-10, 12, 14.1-14.6) arranged in the housing (2); at least one vacuum generating unit (3) for the interior space (15) of the housing (2); and at least one vacuum housing (18, 18.1-18.10) arranged in the interior space (15) and enclosing at least the optical surface (17, 17.1, 17.2) of the optical element (4-10, 12, 14.1-14.5). A contamination reduction unit is associated with the vacuum housing (18.1-18.10) and reduces the partial pressure of contaminating substances, in particular of water and/or hydrocarbons, at least in close proximity to the optical surface (17, 17.1, 17.2) in relation to the partial pressure of the contaminating substances in the interior space (15).

Abstract: A TE gas laser contains a gas contour with the following elements arranged in succession: a discharge gap formed by two elongated electrodes; a diffuser; a heat exchanger; a cross-flow fan; and an additional converging channel, the inlet opening of which is situated on the discharge side of the fan, while the outlet opening is oriented towards the fan impeller on the intake side of the fan. The proposed technical solution makes it possible to produce a compact TE gas laser with a high pulse repetition rate.

Abstract: A gas laser oscillation device of the present invention including a blower unit having a rotating part that rotates, which includes an impeller, a rotating shaft, a motor rotor and a portion of bearings that are brought into contact with the rotating shaft, and a non-rotating part that does not rotate, which includes a motor stator, a casing and a portion of the bearings that are brought into contact with the casing. Two bearings are disposed between the rotating part and the non-rotating part. A grease supply mechanism that supplies grease to each of the two bearings is provided. A control unit drives the blower unit at a rotation rate lower than a rotation rate when a laser is output, after grease is supplied from the grease supply mechanism to the two bearings.

Abstract: Two excimer lasers have individual pulsing circuits each including a storage capacitor which is charged and then discharged through a pulse transformer to generate an electrical pulse, which is delivered to the laser to generate a light pulse. The time between generation of the electrical pulse and creation of the light pulse is dependent on the charged voltage of the capacitor. The capacitors are charged while disconnected from each other. The generation of the electrical pulses is synchronized by connecting the capacitors together for a brief period after the capacitors are charged to equalize the charging voltages. The capacitors are disconnected from each other before they are discharged.

Abstract: A method for thermally compensating lenses in an optical system for high power lasers includes the steps of providing a fused silica lens to collimate a high power laser beam and positioning that lens in collimating relation to the laser beam. A focusing lens assembly is provided to focus the collimated laser beam and is positioned in focusing relation to the collimated laser beam. At least one lens having a negative dn/dT to offset a heat-induced change in index of refraction of the fused silica lens is included as a part of the collimating lens assembly and as a part of the focusing lens assembly. The lens having a negative dn/dT is selected from a group of glasses having a negative dn/dT. The power of the lenses is balanced with an offsetting negative dn/dT so that the optical system maintains its focus over a wide temperature range.

Abstract: A laser processing method processes spots on an object in a scan area with a laser beam emitted from a laser emitter. The method includes steps of covering the scan area in such a way as to transmit the laser beam and define a closed space over the scan area, jetting an inert gas into the closed space so that the jetted inert gas forms a gas curtain sweeping along the scan area in the closed space, and discharging the inert gas from the closed space while maintaining a positive pressure in the closed space, thereby removing plumes from the spots processed with the laser beam and preventing the spots from oxidizing. The method is capable of stably laser-processing the object without changing the color of the processed spots.

Abstract: A CO2 gas flow laser with multiple discharge modules places acoustic baffles between the discharge modules to suppress shock waves and ions passing between the discharge modules such as may disrupt the optical path of the laser. A catalyst may be placed in a center of a toroidal recirculation chamber of the laser and may have integrated filters to prevent catalyst particulates from coating the chamber optical windows.

Abstract: A method and apparatus may comprise a line narrowed pulsed excimer or molecular fluorine gas discharge laser system which may comprise a seed laser oscillator producing an output comprising a laser output light beam of pulses which may comprise a first gas discharge excimer or molecular fluorine laser chamber; a line narrowing module within a first oscillator cavity; a laser amplification stage containing an amplifying gain medium in a second gas discharge excimer or molecular fluorine laser chamber receiving the output of the seed laser oscillator and amplifying the output of the seed laser oscillator to form a laser system output comprising a laser output light beam of pulses, which may comprise a ring power amplification stage.

Abstract: A TE gas laser contains a gas contour with the following elements arranged in succession: a discharge gap formed by two elongated electrodes; a diffuser; a heat exchanger; a cross-flow fan; and an additional converging channel, the inlet opening of which is situated on the discharge side of the fan, while the outlet opening is oriented towards the fan impeller on the intake side of the fan. The proposed technical solution makes it possible to produce a compact TE gas laser with a high pulse repetition rate.

Abstract: A laser apparatus comprises a laser having a lasing chamber an inlet to the lasing chamber for a lasing gas containing a heavy noble gas and an outlet from the lasing chamber for the discharge of a flow of lasing gas, wherein the outlet is able to be paced in communication with the atmospheric through an adsorptive trap containing a selective adsorbent of the heavy noble gas. In operation, the heavy noble gas (xenon or krypton) is adsorbed in the trap. The trap may be taken to a remote site for the recovery of the heavy noble gas when it is approaching saturation.

Abstract: The gas laser oscillator apparatus of the present invention has a temperature-detecting mechanism disposed at the bearings of the bellows section. The temperature-detecting mechanism detects temperature rise in the bearings and calculates a maintenance cycle with reference to the predetermined data on relationship between temperature and the lifetime of the bearings. Disposed at the bearings, the temperature-detecting mechanism outputs a signal that indicates a replacement cycle according to the temperature of the bearings. More preferable, the temperature-detecting mechanism has a sensor at a tip end of a spring having a pressure force smaller than a load applied to the bearings in advance. To enhance accuracy of temperature detection, the spring is wrapped around with heat insulating material so as not to be exposed to outside temperature.

Abstract: A CO2 gas flow laser with multiple discharge modules places acoustic baffles between the discharge modules to suppress shock waves and ions passing between the discharge modules such as may disrupt the optical path of the laser. A catalyst may be placed in a center of a toroidal recirculation chamber of the laser and may have integrated filters to prevent catalyst particulates from coating the chamber optical windows.

Abstract: A laser oscillator includes a blower for blowing laser gas to discharge tubes; a gas circulation path for connecting discharge tubes and a blower; a gear chamber pressure detector for detecting the pressure of the gear chamber disposed in the blower; and an alarm part for issuing an alarm when the pressure detected in the gear chamber pressure detector is higher than a predetermined pressure. The predetermined pressure is set based on the average value of the pressure on the laser gas inlet side and the pressure on the laser gas outlet side of the blower. This configuration can prevent the entry of the oil mist generated from the blower into the gas circulation path and an increase in the gas consumption, while maintaining stable laser output for an extended period of time without increasing the running cost.

Abstract: A gas laser oscillator includes a discharge section for exciting laser gas, a blowing section for transmitting the laser gas, and a laser gas flowing path for forming a circulation route of the laser gas between the discharge section and the blowing section. The blowing section is formed of a rotary part to be rotated by a shaft driver and a non-rotary part not to be rotated. The rotary part includes a rotary shaft to which an impeller is mounted at an end, the shaft driver for rotating the rotary shaft, an upper bearing and a lower bearing coupled to the rotary shaft. The rotary part is detachable from the non-rotary part.

Abstract: A gas laser device including a blower circulating a laser gas along a gas passage; a pressure detection section detecting a gas pressure of the laser gas in the gas passage; a gas supply and exhaust section supplying the laser gas to the gas passage and exhausting the laser gas from the gas passage; an instruction section instructing a temporary stop of a laser oscillation by a laser oscillator; and a control section controlling the blower and the gas supply and exhaust section in response to an instruction from the instruction section.

Abstract: One aspect of the disclosed subject matter describes a gas discharge laser chamber. The gas discharge laser chamber includes a discharge region formed between a first electrode and a second electrode, a tangential fan for circulating gas through the discharge region, wherein the fan is proximate to an input side of the discharge region, an input side acoustic baffle proximate to the input side of the discharge region. The input side acoustic baffle includes a vanishing point leading edge, a vanishing point trailing edge, a gas flow smoothing offset surface aligning a gas flow from a surface of the input side acoustic baffle to an input side of a cathode support in the discharge region, a plurality of ridges separated by a plurality of trenches, wherein the plurality of ridges and the plurality of trenches are aligned with a direction of gas flow through the discharge region and wherein the plurality of ridges have a random pitch between about 0.3 and about 0.7 inch.

Abstract: A laser device includes an optical resonator, a microwave driven discharge device, and a source for a second gas. The microwave driven discharge device is disposed relative to the optical resonator. The microwave driven discharge device operates at a discharge power and gas flow rate to produce a selected amount of energetic singlet oxygen metastables flowing in the direction of the optical resonator. The second source for the second gas is disposed between the optical resonator and the microwave driven discharge device. The second gas reacts with the selected amount of energetic singlet oxygen metastables to form an excited species in an amount sufficient to support lasing of the excited species in the optical resonator.

Abstract: An operating method of an excimer laser system includes following steps. First, a halogen gas with an injection volume is injected into a chamber until a pressure of the chamber is a total pressure. The halogen gas in the chamber has a halogen pressure. Thereafter, a driving voltage is provided between two electrodes in the chamber so as to start the excimer laser system. The halogen pressure and a full width half maximum of a laser light generated by the excimer laser system have negative relation, and the halogen pressure and the driving voltage have positive relation.

Abstract: A CO2 gas discharge laser includes elongated planar live and ground electrodes vertically spaced and electrically insulated from each. The electrodes are spaced apart by ceramic spacer strips arranged along the edges of the electrodes. An auxiliary electrode is located at each end of the live electrode, co-planar with the live electrode, longitudinally spaced part from the live electrode vertically spaced apart from, but electrically connected to, the ground electrode. The auxiliary electrode has two raised portions spaced apart by a distance less than the distance between inside edges of the ceramic strips. The raised portions of the auxiliary electrode prevent erosion of the ceramic strips by laser radiation generated in the resonator when the laser is operating.

Abstract: A method and apparatus may comprise a line narrowed pulsed excimer or molecular fluorine gas discharge laser system which may comprise a seed laser oscillator producing an output comprising a laser output light beam of pulses which may comprise a first gas discharge excimer or molecular fluorine laser chamber; a line narrowing module within a first oscillator cavity; a laser amplification stage containing an amplifying gain medium in a second gas discharge excimer or molecular fluorine laser chamber receiving the output of the seed laser oscillator and amplifying the output of the seed laser oscillator to form a laser system output comprising a laser output light beam of pulses, which may comprise a ring power amplification stage.

Abstract: A method and apparatus for carrying out a laser operation, wherein a laser source is provided, wherein lasing gas is supplied from at least one lasing gas source to the laser source for the formation of a laser beam, wherein, with the aid of the laser beam, an operation is carried out, such as for instance a welding, a drilling, a cutting or a lighting operation, wherein the lasing gas which comes from the at least one lasing gas source is fed through at least one lasing gas filter before the gas is supplied to the laser source. The invention further relates to the use of a quick-change filter for cleaning gases consumed in laser processing apparatuses.

Abstract: A two phase reactor includes a source of liquid reactant and a source of gas reactant. A chamber has an inlet coupled to the source of gas reactant and a flat jet nozzle coupled to the source of the liquid reactant.

Abstract: Feedback timing control equipment and process for an injection seeded modular gas discharge laser. A preferred embodiment is a system capable of producing high quality pulsed laser beams at pulse rates of about 4,000 Hz or greater and at pulse energies of about 5 to 10 mJ or greater for integrated outputs of about 20 to 40 Watts or greater. The feedback timing control is programmed to permit in some circumstances discharges timed so that no significant laser energy is output from the system. Use of this technique permits burst mode operation in which the first discharge of a burst is a no-output discharge so that timing parameters for each of the two chambers can be monitored before the first laser output pulse of the burst. Two separate discharge chambers are provided, one of which is a part of a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber.

Abstract: A method and apparatus are disclosed which may comprise predicting the gas lifetime for a gas discharge laser light source for a photolithography process, the light source comprising a halogen containing lasing gas may comprise: utilizing at least one of a plurality of laser operating input and/or output parameters; utilizing a set of at least one parameter of utilization in the photolithography process to determine a gas use model in relation to the respective input or output parameter; predicting the end of gas life based upon the model and a measurement of the respective input or output parameter. The parameter may comprise a pulse utilization pattern.

Abstract: A laser apparatus comprises a laser having a lasing chamber an inlet to the lasing chamber for a lasing gas containing a heavy noble gas and an outlet from the lasing chamber for the discharge of a flow of lasing gas, wherein the outlet is able to be paced in communication with the atmospheric through an adsorptive trap containing a selective adsorbent of the heavy noble gas. In operation, the heavy noble gas (xenon or krypton) is adsorbed in the trap. The trap may be taken to a remote site for the recovery of the heavy noble gas when it is approaching saturation.

Abstract: A laser device includes an optical resonator, a microwave driven discharge device, and a source for a second gas. The microwave driven discharge device is disposed relative to the optical resonator. The microwave driven discharge device operates at a discharge power and gas flow rate to produce a selected amount of energetic singlet oxygen metastables flowing in the direction of the optical resonator. The second source for the second gas is disposed between the optical resonator and the microwave driven discharge device. The second gas reacts with the selected amount of energetic singlet oxygen metastables to form an excited species in an amount sufficient to support lasing of the excited species in the optical resonator.

Abstract: Systems and methods for efficiently operating a gas discharge excimer laser are disclosed. The excimer laser may include a chamber containing laser gases, first and second electrodes within the chamber, and a plurality of reflective elements defining an optical resonant cavity. The method may include setting the laser gases to a first pressure; after setting the gases to the first pressure, applying a first voltage to the electrodes, thereby propagating a laser beam in the optical resonant cavity; measuring energy of the beam; adjusting the first voltage until the energy of the beam is substantially equal to a target pulse energy; operating the laser for an amount of time; after the amount of time, measuring energy of the beam; and changing the pressure of the gases to a second pressure different from the first pressure.

Abstract: A multi-chambered excimer or molecular halogen gas discharge laser system comprising at least one oscillator chamber and at least one amplifier chamber producing oscillator output laser light pulses that are amplified in the at least one power chamber, having a fluorine injection control system and a method of using same is disclosed, which may comprise: a halogen gas consumption estimator: estimating the amount of halogen gas that has been consumed in one of the at least one oscillator chamber based upon at least a first operating parameter of one of the least one oscillator chamber and the at least one amplifier chamber, and the difference between a second operating parameter of the at least one oscillator chamber and the at least one amplifier chamber, and estimating the amount of halogen gas that has been consumed in the other of the at least one oscillator chamber and the at least one amplifier chamber based upon at least a third operating parameter of the other of the at least one oscillator chamber and

Abstract: A transversally electrically excited gas discharge laser for generating light pulses with a high pulse repetition rate. The gas discharge laser has components include a gas-tight discharge tube with opposed wall passages and front ends. The discharge tube includes ceramic material with laser gas sealed therein. The components also include partial metal layers disposed on the discharge tube. Decoupling and holding elements including support trays are disposed in the wall passages, with the support trays being adhered with solder to the discharge tube via the partial metal layers. The components also include a pair of electrodes extending axially and disposed in the decoupling and holding elements so as to form a gas discharge path. The components also include a pair of rod-shaped electrodes disposed in the discharge tube that are substantially parallel to the main electrodes and operable to control the starting conditions of gas discharge.

Abstract: The invention herein is directed to a dual-chamber combustion laser assembly having lighter weight (per unit flow area), a more compact, flexible configuration for packaging in spacecraft, aircraft, or ground mobile vehicles, higher mass efficiency from lower heat loss and proven power extraction efficiency of linear lasers, superior output beam quality by incremental compensation of gain medium optical path disturbances and by reduction in time-dependent variations in structural and gain medium characteristics, lower cost and shorter fabrication time for modular dual flow laser and linear optics, more efficient pressure recovery with side-wall isolation nozzles and compact diffuser configurations, and increased small signal gains for more efficient extraction of overtone power.

Abstract: A gas laser apparatus including a laser oscillating section including a blower forcibly circulating a medium gas in a medium circuit, and a blower monitoring section monitoring a maintenance state of the blower. The blower includes a lubricant storage chamber storing a lubricant, and a lubricant monitoring chamber connected to the lubricant storage chamber to ensure fluidic communication therebetween at a position lower than an oil level of a lubricant having a predetermined appropriate volume and stored in the lubricant storage chamber.

Abstract: A pressure of a laser gas in an enclosure (7) is detected by a gas pressure sensor (12), and a pressure comparison circuit (13) determines whether the thus-detected pressure is normal or anomalous. An electric current output from an inverter (10) that drives a blower (5) to cause a laser gas to flow back, is detected by a current detection circuit (9). A current comparison circuit (11) determines whether or not the output current is normal or anomalous. A result of a pressure comparison circuit (13) and a result of the current comparison circuit (11) are sent to an AND circuit (15) and performed AND processing. A result of the AND circuit (15), a result of the current detection circuit (9), and a result of the gas pressure sensor (12) are sent to a comparison operation section (17) in a controller (14). A determination is made as to whether or not the blower is anomalous.

Abstract: A gas laser oscillating unit having a gas junction part where gas flow may be stable, whereby a stable laser beam output and/or a laser beam that does not fluctuate very much may be achieved. The laser gas, flowing through first and second excitation parts, is introduced into the first and second tapered gas flow passages. After that, the two gas flows are mixed at or near the center point of a gas junction part and the mixed gas flows in a next flow passage. Then, one of the gas flows from the first excitation part is biased toward the ?X direction by a first biasing member arranged in the first gas flow passage, and the other gas flow from the second excitation part is biased toward the +X direction by a second biasing member arranged in the second gas flow passage.

Abstract: A laser device includes an optical resonator, a microwave driven discharge device, and a source for a second gas. The microwave driven discharge device is disposed relative to the optical resonator. The microwave driven discharge device operates at a discharge power and gas flow rate to produce a selected amount of energetic singlet oxygen metastables flowing in the direction of the optical resonator. The second source for the second gas is disposed between the optical resonator and the microwave driven discharge device. The second gas reacts with the selected amount of energetic singlet oxygen metastables to form an excited species in an amount sufficient to support lasing of the excited species in the optical resonator.

Abstract: A pulsed gas discharge laser operating at an output laser pulse repetition rate of greater than 4 kHz and a method of operating same is disclosed which may comprise a high voltage electrode having a longitudinal extent; a main insulator electrically insulating the high voltage electrode from a grounded gas discharge chamber; a preionizer longitudinally extending along at least a portion of the longitudinal extent of the high voltage electrode; a preionization shim integral with the electrode extending toward the preionizer. The preionizer may be formed integrally with the main insulator. The preionization shim may substantially cover the gap between the electrode and the preionizer.

Abstract: A gas laser oscillator appropriately detecting a clogging of a laying pipe of a sub ejection apparatus is disclosed. The gas laser oscillator according to the present invention includes a laser gas flow pipe, a driving part, a divide wall, a main ejection apparatus, a sub ejection apparatus, a detect portion, and a clogged laying pipe judge part. The laser gas flow pipe constitutes a circulating route of the laser gas. The driving part drives the air blower for blowing the laser gas. The divide wall separates the air blower and the driving part. The main ejection apparatus has a valve, and ejects laser gas from the laser gas flow pipe. The sub ejection apparatus ejects laser gas from the driving part. The detector detects an amount of laser gas ejected from the main ejection apparatus and the sub ejection apparatus.

Abstract: An oscillator-amplifier gas discharge laser system and method is disclosed which may comprise a first laser unit which may comprise a first discharge region which may contain an excimer or molecular fluorine lasing gas medium; a first pair of electrodes defining the first discharge region containing the lasing gas medium, a line narrowing unit for narrowing a spectral bandwidth of output laser light pulse beam pulses produced in said first discharge region; a second laser unit which may comprise a second discharge chamber which may contain an excimer or molecular fluorine lasing gas medium; a second pair of electrodes defining the second discharge region containing the lasing gas medium; a pulse power system providing electrical pulses to the first pair of electrodes and to the second pair of electrodes producing gas discharges in the lasing gas medium between the respective first and second pair of electrodes, and laser parameter control mechanism modifying a selected parameter of a selected laser output lig

Abstract: An apparatus and method is disclosed which may comprise a high power excimer or molecular fluorine gas discharge laser DUV light source system which may comprise: a pulse stretcher which may comprise: an optical delay path mirror, an optical delay path mirror gas purging assembly which may comprise: a purging gas supply system directing purging gas across a face of the optical delay line mirror. The optical delay path mirror may comprise a plurality of optical delay path mirrors; the purging gas supply system may direct purging gas across a face of each of the plurality of optical delay line mirrors. The purging gas supply system may comprise: a purging gas supply line; a purging gas distributing and directing mechanism which may direct purging gas across the face of the respective optical delay path mirror.

Abstract: A gas laser oscillator (2) that excites a laser gas to generate laser light includes a circulation path (9) for the laser gas, a circulation means (14) for circulating the laser gas through the circulation path, a pressure detection means (16) for detecting the pressure of the laser gas in the circulation path, an electric power detection means (11) for detecting electric power to drive the circulation means, a storage means (35) for storing the relationship between the pressure of the laser gas and the electric power of the circulation means during the period of normal operation of the circulation means for each kind of the laser gas, and a laser gas determination means (31).

Abstract: Disclosed is a centrifugal turbine gas blower with foil bearings for use with a fast axial flow laser. The blower utilizes variable components in order to operate at different speeds for multiple applications. In addition, a bypass load has been incorporated to avoid a surge condition. The blower utilizes foil bearings that are self-lubricating in order to achieve improved efficiency and maximized speeds during operation. The bearings are designed with a bump layer that provides damping for pre-load. Additionally, the backplate of the thrust assembly contains holes in order to reduce the thrust load and to balance the force on the impeller.

Abstract: ABSTRACT A laser processing machine having a laser processing head that is open to a workpiece has a device for providing gas to the laser beam guide that introduces a first gas through a first gas inlet into the laser beam guide and introduces a second gas through a second gas inlet into the laser beam guide.

Abstract: A method for the frequency stabilization of a gas laser with a laser tube (1), in stable operation includes a continuous operation control procedure with the following steps: Operating the gas laser for the radiation of laser light; measuring an intensity of one component of the radiated laser light with a detector (8); adjusting a tube temperature of the laser tube (1) by means of a control system (7), so that the measured intensity is controlled to a set-point value. During a startup phase, the procedure includes the following steps: Measuring an ambient temperature; controlling the condition of the laser tube (1) by means of the control system (7) to a set-point state, wherein the set-point state corresponds to a temperature of the laser tube (1) at the measured ambient temperature in the steady condition without any further heating or cooling; and switching over to the continuous operation control.

Abstract: A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall.

Abstract: The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. Feedback timing control techniques are provided for controlling the relative timing of the discharges in the two chambers with an accuracy in the range of about 2 to 5 billionths of a second even in burst mode operation. This MOPA system is capable of output pulse energies approximately double the comparable single chamber laser system with greatly improved beam quality.