Abstract: Every year numerous people are diagnosed with cancer, many of whom are detected in the latter stages of the cancers' progression. The later the cancer is detected, the more difficult it becomes to treat the cancer. Due to inefficient technology and late diagnosises, many people lose their lives to cancer each year. If this new X-ray system is implemented and put into use by medical doctors, not only will tumors be detected earlier, but smaller tumors, which are often overlooked by conventional X-ray systems, will also be detected. In addition, due to the multiple angles provided by this system, the exact location of these cancerous tumors can be pinpointed, thereby saving time that is currently wasted in determining exact tumor locations and allowing the patient to go into surgery sooner to have the malignant tumor removed. Thus, the development and implementation of this new technology will save many cancer patients' lives through early and more precise diagnosises.

Abstract: Verification of properness of a modeling theory of an uncrystallized substance or an image processing method is made easy. There includes: a first displaying unit 120 for rotationally displaying an simulated three-dimensionally shaded model image, which is a shaded image of the three-dimensional reconstruction image; and a second displaying unit 140 for displaying the three-dimensional image of the substance acquired by experimental structural analysis, which synchronously rotates with the simulated three-dimensionally shaded model image.

Abstract: To provide an X-ray microscopic inspection apparatus capable of performing non-destructive inspection with high resolving power within a very short period, and having advantageous functions such as a high precision electron probe control function, a CT function, an elemental analysis function, and a target switching function. The apparatus includes a magnetic superposition lens having a magnetic field generating portion disposed in the vicinity of an electron generating portion of an electron gun; reflected electron detecting means having a detecting portion disposed above the target for X-ray generation, for detecting a reflected electron from the target; and electron image generating means for performing imaging of a target surface utilizing the signals from the reflected electron detecting means, wherein the apparatus is arranged so that alignment including focus adjustment to the target for X-ray generation and astigmatism correction may be performed based on image information of the electron image.

Abstract: A Soller slit device is provided for collimation of high energy radiation, such as X-ray or EUV radiation, and has a low angle of divergence (less than 0.1°) and a high transmission efficiency (60 to 80% or greater). The Soller slit is made up of multiple, parallel blades of low-density material, such as glass, mica, or the like, which can be treated to reduce reflectivity. The Soller slit device of the invention advantageously provides an increased peak intensity and decreased peak width in diffraction patterns produced in high energy diffractometry applications, such as X-ray diffractometry.

Abstract: X-ray microscope comprise extended X-ray source, as well as means for placement of test object 3 and recording means, and located between them X-ray capillary lens. Channels of the latter are diverging towards recording means. Means for placement of the test object is located between extended X-ray source and lesser end side of the X-ray capillary lens. The device is characterized in that the walls of the channels (14, 16) for radiation transmission have a coating or are made of material absorbing or scattering X-ray radiation, and have lateral surface shape of truncated cone or pyramid, or that of cylinder or prism. With specified choice of the material, phenomenon of total external reflection is excluded, while rectilinearity of longitudinal axes of the channels ensures their functioning as collimators. Therefore, channels capture radiation only from the fragments of the test object 3 situated exactly opposite their entrances.

Abstract: An electron microscope is offered which is fitted with an X-ray spectrometer having a compact optical system and high resolution. The spectrometer has a spectrometer chamber whose inside is evacuated by a vacuum pumping system. A diffraction grating having unequally spaced grooves is placed in the chamber. An X-ray detector is mounted to an end of the chamber. The X-ray spectrometer is mounted to the sidewall of the electron microscope via a gate valve. A specimen is irradiated with an electron beam and emits characteristic X-rays, which are made to impinge on the face of the grating at a large angle with respect to the normal line to the face. Diffracted X-rays from the grating reach the X-ray detector and are detected.

Abstract: In a phase information restoring method using a phase contrast method, the estimated accuracy of phase is enhanced. The phase information restoring method of restoring phase information of radiation transmitted through an object on the basis of a plurality of image signals respectively obtained by detecting intensity of radiation transmitted through the object on a plurality of planes different in distance from the object, comprises the steps of: obtaining a differential signal representing difference between a first image signal and a second image signal; subjecting any one of the plurality of image signals to a suppressing process or a removing process for high spatial frequency components thereof so as to generate a third image signal; obtaining Laplacian of phase with respect to the differential signal and the third image signal; and restoring phase information by applying an inverse Laplacian operation to the Laplacian of phase.

Abstract: An X-ray microscope apparatus includes an X-ray generator, a photocathode disposed on a path of X-rays for producing electrons when irradiated with X-rays generated by the X-ray generator, an electron image enlarging device having an acceleration anode for accelerating electrons produced by the photocathode and a magnetic lens for enlarging and focusing an electron beam of electrons emitted by the photocathode, an electron beam detecting device for detecting the electron beam focused thereon by the electron image enlarging device; and an image processing device for processing an electron image formed by the electron beam detecting device. The X-ray microscope apparatus can be formed in compact construction.

Abstract: Soft X-rays are very suitable for the examination of biological samples by means of an X-ray microscope. It is known to generate such soft X-rays by means of a laser excited plasma in a fluid jet. According to the invention the X-rays are generated by focusing an electron beam 6 onto a fluid jet 2, thus producing a very small electron focus on the jet and hence a very small monochromatic X-ray spot 8. The electron spot 8 can be obtained by means of a standard electron microscope (a SEM) or by means of a standard electron gun for a cathode ray tube (a CRT gun). The imaging optical elements 18, 34, 40 in the X-ray microscope may be Fresnel zone plates.

Abstract: A methodology and concomitant system for three-dimensional near-field microscopy achieves subwavelength resolution of an object without retrieval of the optical phase. The features of this approach are three-fold: (i) the near-field phase problem is circumvented by employing measurements of the power extinguished from probe fields; (ii) the fields on which the power measurements are performed may be monitored far from the object and thus subwavelength resolution is obtained from far zone measurements; and (iii) by developing an analytic approach to the inverse problem in the form of an explicit inversion formula, an image reconstruction algorithm is produced which is strikingly robust in the presence of noise.

Abstract: These methods describe a collimated x-ray beam, used for in vivo phase-contrast x-ray imaging of the interior architecture of carbon-based objects, such as the intact human soft-tissue anatomy, for mapping the decrements of refraction experienced by the incident x-ray beam. These methods utilize a microscopically-thin laser-produced plasma x-ray spatial line-source, specified in the target plane as 50 microns or less in width and orthogonally, greater than one centimeter in length, requiring an optically-reflective mirror to line-focus cylindrically-shaped femptosecond pulses of infrared laser photons onto a heavy metal target. Bragg-diffractive multilayer x-ray mirrors collect a wide solid-angle of characteristic hard x-rays in the 15 KeV-to-100 KeV range from the spatial line-source, yielding a microscopically-thin x-ray fanbeam or x-ray slicebeam, specified in the object plane as 50 microns or less in width and orthogonally, greater than seven centimeters in length.

Abstract: A specimen preview and inspection system is disclosed. The system beneficially includes a preview stage, which provides a set of biasing-information for preview by a technician before the technician formally screens the specimen. The preview stage enables the technician to conveniently review information pertinent to the specimen at issue. The preview stage may thereby bias, or channel, the technician's attention during screening toward diagnostically significant aspects of the specimen. The invention is particularly useful in the context of Pap smear screening, although the invention may extend to inspection of other types of specimens or samples as well.

Abstract: An X-ray condenser for condensing X-rays radiated from an X-ray source to a very small condensing spot is disclosed. X-rays from the X-ray source are formed to a parallel X-ray beam by a parallel type parabolic reflection mirror. The parallel X-ray beam is made monochromatic by an analyzing crystal and condensed to the condensing spot by a zone plate. The zone plate is constructed by alternately arranging a plurality of X-ray transmitting bands and a plurality of X-ray shielding bands and can condense the parallel X-ray beam to a very small focus point.

Abstract: A reflective-type soft X-ray microscope includes an image-focusing optical system including a concave mirror and a convex mirror, an illumination optical system that has a light source, a filter, and a focusing optical element for transmitting an illumination light beam, and a stage mechanism that carries and moves a sample under observation. In the reflective-type soft X-ray microscope, the concave mirror has at least one opening part for transmitting the illuminating light beam that illuminates the sample, and a reflected image of the sample is focused on a soft X-ray image detector by the image-focusing optical system.

Abstract: A scanning confocal microscope and methods are provided for configuring scanning confocal microscopes for imaging specimens, such as, high resolution imaging of thick non-optically transparent specimens including imaging of buried or subsurface features of thick non-optically transparent structures. The scanning confocal microscope, such as a scanning confocal electron microscope (SCEM), is configured to image structures buried in thick specimens, such as specimens greater than eight microns thick, utilizing confocal imaging principles. A scanning confocal microscope includes an illumination source, a specimen, and a detector. The illumination source provides a focused radiation beam that is applied to the specimen. The detector detects an interaction signal from the specimen. The scanning confocal microscope is configured to operate in the confocal imaging mode, where the imaging source, specimen and detector are arranged to be located at conjugate image points.

Abstract: An optical sample X-ray testing apparatus including an X-ray source which is configured to radiate X-rays including a group of line spectra. At least one line spectrum selecting device is provided between the X-ray source and an optical sample and configured to direct substantially one line spectrum among the group of line spectra from the X-ray source toward the optical sample. An optical characteristics finding device is configured to find optical characteristics of the optical sample based on radiation of the substantially one line spectrum through the line spectrum selecting device onto the optical sample.

Abstract: An automated real-time, non-destructive inspection system usable to inspect a selected structure for a defect and visually identify a defect's location. In one embodiment, the inspection system is an x-ray inspection system mounted to an articulatable robot arm movable relative to the selected structure. A support system is attached to the articulatable robot arm that supports an imaging source on a first support portion and a detector panel on a second support portion spaced apart from the first support portion. A visual targeting system configured to identify where an imaging beam axis intersects the selected structure is positioned adjacent to the imaging source. The inspection system is configured to maneuver the imaging source and detector panel around the selected structure such that the desired areas on the selected structure may be fully inspected without having to reposition the selected structure.

Abstract: This invention describes a dynamic X-ray imaging system for small animal studies and other applications that include a volumetric CT fluoroscopy (VCTF) scanner and software, which operates in accordance with a generalized Feldkamp algorithm or any other suitable reconstruction methods. The VCTF system is a significant advancement of current micro-CT techniques. While prior micro-CT systems are featured by relatively slow data acquisition and static image reconstructions, the present invention includes real-time data acquisition hardware, a dedicated real-time image reconstruction algorithm, an extra-fast cone-beam reconstruction engine, and integrating them into a 4D micro-CT scanner. The system of the present invention can be constructed relatively economically using state-of-the-art x-ray source, electronic detector techniques and image reconstruction methods.

Abstract: An automated real-time, non-destructive inspection system usable to inspect a selected structure for a defect and visually identify a defect's location. In one embodiment, the inspection system is an x-ray inspection system mounted to an articulatable robot arm movable relative to the selected structure. A support system is attached to the articulatable robot arm that supports an imaging source on a first support portion and a detector panel on a second support portion spaced apart from the first support portion. A visual targeting system configured to identify where an imaging beam axis intersects the selected structure is positioned adjacent to the imaging source. The inspection system is configured to maneuver the imaging source and detector panel around the selected structure such that the desired areas on the selected structure may be fully inspected without having to reposition the selected structure.

Abstract: A specimen preview and inspection system is disclosed. The system beneficially includes a preview stage, which provides a set of biasing-information for preview by a technician before the technician formally screens the specimen. The preview stage enables the technician to conveniently review information pertinent to the specimen at issue. The preview stage may thereby bias, or channel, the technician's attention during screening toward diagnostically significant aspects of the specimen. The invention is particularly useful in the context of Pap smear screening, although the invention may extend to inspection of other types of specimens or samples as well.

Abstract: A sample cell for use in x-ray imaging, including structure defining a chamber for a sample and, mounted to said structure, a body of a substance excitable by an appropriate incident beam to generate x-ray radiation, the cell being arranged so that, in use, at least a portion of the x-ray radiation traverses said chamber to irradiate the sample therein and thereafter exits the structure for detection.

Abstract: A soft X-ray projection exposure apparatus has at least one metal mirror in either an illumination optical system or a projection optical system. The mirror includes a metal substrate and a thin film of an amorphous substance formed thereon. The surface of the amorphous substance is polished to optical smoothness. On the surface of the thin film is a multi-layer film that reflects X-rays of a specified wavelength. The metal substrate efficiently dissipates heat to the back surface of the mirror where it can be easily cooled. The mirror has a small shape error and surface roughness, and sufficiently suppresses thermal deformation caused by irradiating electromagnetic radiation such as X-rays or light. In this manner, the soft X-ray projection exposure apparatus achieves a higher through-put of wafers.

Abstract: An atomic coordinates generating method generating an atomic coordinate position within a rectangular parallelepiped as an outer frame of a crystal having a predetermined plane orientation derives a sphere circumscribing the rectangular parallelepiped, derives a cubic circumscribing the sphere, generates atomic coordinates within the cubic, provides rotation for the generated atomic coordinates for matching a bottom of the cubic with the plane orientation, checks whether the atomic coordinates after rotation are present within a rectangular parallelepiped having the predetermined plane orientation, and selects only coordinates present within the rectangular parallelepiped.

Abstract: The invention is based on a method for examining structures on a semiconductor substrate. The structures are imaged with X-radiation in an X-ray microscope. The wavelength of the X-radiation is established as a function of the thickness of the semiconductor substrate in such a way that both a suitable transmission of the X-radiation through the semiconductor substrate and a high-contrast image are obtained. As a result, the structures can be observed continuously with short exposure times, high resolution and even while they are in operation.

Abstract: As described in the methods of the present invention, x-ray photons derived from a microscopic solid-density plasma that is produced by optically focusing a high power laser beam upon a high atomic number target, may be use for phase-contast medical microimaging and also for absorptive microradiography. As described in the methods of the present invention, x-rays derived from a microscopic solid-density plasma are utilized as object illumination sources that are microscopic in at least one direction (so that ultrathin slicebeams and fan-beams are allowed, as are linear arrays of numerous clusterd parallel microbeams). Collimating optical devices of prior art are required.

Abstract: A sample cell for use in x-ray imaging, including structure defining a chamber for a sample and, mounted to said structure, a body of a substance excitable by an appropriate incident beam to generate x-ray radiation, the cell being arranged so that, in use, at least a portion of the x-ray radiation traverses said chamber to irradiate the sample therein and thereafter exits the structure for detection.

Abstract: An interferometer that uses plane mirrors at grazing incidence to create interference fringes in the extreme ultraviolet and x-ray portions of the spectrum. X-ray interferometry has historically been implemented through narrow band, diffractive systems that split the wavefront. By using two separate optical channels at grazing incidence to create interference from two areas of the wavefront, this system has broad band response and much higher efficiency. The interferometer has applications to telescopes, microscopes and spectrometers in the extreme ultraviolet and x-ray, and high contrast imaging in the visible.

Abstract: Light-intensive zone plates (4) are disclosed which are useful as condensers and X-ray objectives for high resolution X-ray microscopes. They have high refraction effectiveness in a high refraction order thanks to a high aspect ratio (H/P) and a suitably adjusted line-slot ratio (P.sub.1 /P.sub.2) lower than 1. Additional improvements may be obtained by zones (6, 7) inclined relative to the optical axis (3). The zone plates (4) may also be operated in Bragg reflection. They thus provide efficient optics with a high numeric aperture and make X-ray microscopes with 10 nm resolution possible. The zone plates (4) may have a relatively coarse structure, and thus they are easy to produce in a relatively short time. The zone plates (4) with high numerical aperture may be used in a particularly advantageous manner as small condensers in laboratory X-ray microscopes, as they can capture light from a microplasma X-ray radiation source in a particularly wide solid angle and focus it on an object.

Abstract: A sample cell for use in x-ray imaging, including structure defining a chamber for a sample and, mounted to the structure, a body of a substance excitable by an appropriate incident beam to generate x-ray radiation, the cell being arranged so that, in use, at least a portion of the x-ray radiation traverses the chamber to irradiate the sample therein and thereafter exits the structure for detection.

Abstract: The description relates to high-transmission condenser-monochromator arrangements providing quasi-monochromatic object illumination and incoherent imaging in X-ray microscopes (5) and are particularly suitable for well-collimated beams from undulators on electron storage rings. As the deflecting optical component, the condenser-monochromator arrangements comprise an off-axis zone plate in transmission (7) or reflection. There is a monochromator diaphragm (11) in the object plane. The exposure aperture of the condenser-monochromator arrangement may be variably set by means of simple plane mirrors (2). The off-axis zone plate (7) and at least one plane mirror (2) are rotated about the optical axis 6 of the X-ray microscope (5) during exposure. In addition, there are fixed elements containing a focusing device with a focusing ring and a downstream system on one or two hollow conical mirrors.

Abstract: A cytological specimen analyzer includes an image capture apparatus, a mapper and a screening station. The mapper receives digital images of regions of a slide containing a cytological specimen and determines if each of the regions contains cytological material. The mapper analyzes the image of each region, pixel by pixel, and if the region contains cytological material then the coordinates of the region are stored along with a focal position for the region and a value indicative of the amount of cytological material in the region. Upon analysis of each region on the slide, the mapper determines the most efficient path to be traveled between regions containing cytological material to minimize the viewing time of an operator at the screening station. Upon request by the screening station, the sequence of the aforesaid coordinates, which is indicative of the most efficient path, are transmitted to the screening station.

Abstract: A scintillation based microscope. One surface of a single crystal salt crystal scintillator is supported on an optically transparent support plate. The opposite surface, an illumination surface, of the crystal is coated with an optically reflecting material which is transparent to high energy photons (such as x-ray and/or high energy ultraviolet photons) in order to provide a scintillation sandwich having an optical mirror at the illumination surface of the crystal. These high energy photons are directed through a target to create a shadow image of the target on the illumination surface of the scintillator salt crystal. A portion or all of the shadow image is viewed with an optical device such as an eye piece to provide a very high resolution image of the target or portions of the target. In a preferred embodiment an adjustable pin hole unit is described to produce a very small x-ray spot source for producing high resolution geometric magnification of the shadow image of the target.

Abstract: An X-ray converging mirror that can be positioned adjacent an X-ray source for reflecting X-ray beams from the X-ray source includes an X-ray converging mirror having a reflecting surface of a cross-sectional profile expressed by a curve of the following equation:x=y tan .theta.[1-ln(y/b)]wherein x and y denote a coordinate system, .theta. is equal to or less than a Bragg critical angle of reflection for the X-ray beams, and b denotes a point on the y-axis when dx/dy is 0.

Abstract: Inspection of objects such as X-ray lithography masks is carried out by passing X-rays or extreme ultraviolet light through an object which absorbs in a pattern to provide a patterned X-ray or ultraviolet image which is then directed to a converter. The converter converts the image incident upon it to an image formed by electrons emitted from the converter. The emitted electrons are magnified in an electron microscope and the magnified electron image is displayed by the electron microscope. The visible image may be further digitized and processed by a computer, including long-term storage or display on a computer monitor. X-ray lithography masks may be inspected by passing X-rays through masks of the same type that will be used for lithography so that the magnified image of the X-rays passed through the masks corresponds to the pattern of X-rays that will be incident on a photoresist, allowing accurate inspection of X-ray masks before use.

Abstract: A method of generating an X-ray microbeam of the present invention generates an X-ray microbeam having a restricted divergence angle and desirable planeness in regions other than the focus. With this method, it is possible to compensate for a change in the degree of asymmetry ascriable to a change in the wavelength of X-rays selected, and therefore to maintain the degree of asymmetry constant. In addition, the condensing conditions including the energy of X-rays and beam size each can be set independently of the others. A device for practicing the above method is also disclosed.

Abstract: A plasma source of soft x-rays provides the illumination for a microfluoroscope. In general, an x-ray relay optic collects part of the diverging plasma radiation and redirects it to a distant plane. At that plane, the fine-grained or grainless fluorescent screen of a microfluoroscope is placed to receive the radiation. A specimen is placed in direct contact with the screen, or in very close proximity, so that its x-ray shadow is projected onto the screen. The screen is very thin and transparent to visible or ultraviolet light so that a high-numerical-aperture optical microscope objective can closely approach and view the screen from the opposite side. The optical microscope views the fluorescent light emitted by the screen, which corresponds to the x-ray absorption shadow of the specimen. In general, a very thin, x-ray transparent vacuum window is used to separate the specimen, fluorescent screen, and microscope from the vacuum of the plasma source.

Abstract: An X-ray microscope having an incident X-ray beam (10) from an X-ray source, a first crystal element (14) extending at an angle (.beta.

Abstract: An illumination system includes a spectral optical element for separating radiation light from a radiation source, including at least one of X-rays and vacuum ultraviolet rays. The spectral optical element provides an emission angle to the radiation light which changes with the wavelength thereof. The system also includes an optical arrangement for illuminating an object with radiation light of a particular wavelength from the spectral optical element, and an absorption element for absorbing at least a portion of radiation light of a wavelength longer than the particular wavelength from the spectral optical element.

Abstract: An x-ray telescope has a tubular housing subdivided into M number of radial segments each having a detector for detecting x-rays and an optic module for focussing x-rays onto the detector. The optic modules have polycapillary fibers assembled in subunit layers and asymmetrically arranged about an optical axis. The polycapillary fibers follow a natural cubic spline path to maximize transmission. The polycapillary fibers selectably collimated and decollimated to provide a predetermined field-of-view. A Fourier grid assembly is disposed in front of the optic modules and has M pairs of entrance and exit grids each aligned with a respective one of the optic modules. The pairs of entrance and exit grids have spaced apart bars with a bar spacing period such that N number of the bar spacing periods at the entrance grid subtends the predetermined field-of-view of the polycapillary fibers where N is an integer and is different for each of the pairs of entrance and exit grids.

Abstract: An X-ray microscope utilizing X-rays radiating from a laser-irradiated target so as to form an X-ray image of a specimen placed in a sample cell, the X-ray microscope includes a target for radiating X-rays when the same is irradiated with a laser beam, a sample cell for housing a specimen, the sample cell provided near the surface of target placed opposite to where the target is irradiated with the laser beam, and a detector for forming an X-ray image of the specimen by X-ray penetration, wherein the target, the sample cell and the detector are unified in a unit. The unit is placed at a place where the laser beam is irradiated to the target. A spacer is provided between the target and the sample cell, wherein the size of the spacer is determined depending on a distance between the specimen and the target. With this construction, this facilitates the fabrication of the unit.

Abstract: An original inspecting and repairing system includes an inspecting device having at least one of a vacuum ultraviolet ray microscope and an X-ray microscope, for inspecting an original, and a processing device for processing the original on the basis of the inspection. This practically enables inspection and repair of any fault of a reflection type original.

Abstract: X-ray microscopy is used to observe a specimen by labelling the specimen with a molecule having a double bond, such as, for example, N-succinimidyl-4-nitrophenyl acetate or 5-(dimethylamino phenyl)-2,4-pentadienal, which bond to an amino group, and O-(4-nitrobenzyl)-N,N-diisopropyl isourea, which chemically bonds to a carbonyl group. Such labelling groups can generate fluorescence to facilitate the observation of the specimen. Observation is improved by using a monochromatic X-ray source having a photon energy lower than 2000 eV and a band width narrower than 1 eV.

Abstract: The invention claimed is a collimator for x-rays and the fabrication process for said collimator. The collimator, in its preferred embodiment, displays the general shape of a tube, having two apertures, an entrance aperture and an exit aperture. The walls of the collimator tube are not parallel to each other but rather are paraboloidal in longitudinal section. The geometry of the collimator tube is, therefore, circular in transverse cross-section and paraboloidal in longitudinal section, thereby resulting in a tube whose entrance aperture is of a smaller diameter than its exit aperture. The collimator geometry described is referred to herein as a tubular paraboloid.

Abstract: An X-ray generating apparatus generates X-rays from plasma formed by irradiating a laser beam to a target. The apparatus includes an X-ray transmitting film disposed at at least one side of the target with a predetermined gap provided therebetween. The X-ray transmitting film has a thickness such that the film is not broken due to an action in the X-ray generating process. The X-rays are taken out through the X-ray transmitting film. An X-ray microscope can employ such an X-ray generating apparatus, with the X-rays from the apparatus being guided to the sample, with the sample to be observed being disposed in the vicinity of the X-ray transmitting film, and with a detecting device for detecting an X-ray image formed by X-rays transmitted through the sample.

Abstract: An X-ray microscope for observing a transmitted X-ray microscopic image of a specimen by irradiating the specimen with X-rays and exciting radiation rays, in which the exciting radiation rays are made incident upon the specimen at a large photon flux in an efficient manner without loss, so that a contrast of the image can be increased. The invention provides a desired relationship between thickness of specimen, wavelength of X-rays and tone resolving power of image fro obtaining a transmitted X-ray microscopic image having an excellent contrast. The invention further proposes optimizations for a photon flux of exciting radiation rays as well am for a timing of irradiation of X-rays and exciting radiation rays. The X-ray microscope can observe particular element contained in particular substance without being affected by the same element contained in other substances which constitute a specimen together with the particular substance by suitably selecting a wavelength of the exciting radiation rays.

Abstract: An electron spectroscopy apparatus in which pulses of EUV of a prescribed wavelength are generated from plasma produced by pulsed laser beam irradiation of a target containing specific elements, the EUV pulses are used to irradiate a specimen, producing an emission of photoelectrons from the specimen, and the time it takes these photoelectrons to pass along a flight channel is measured and analyzed.

Abstract: An X-ray microscope has the following features: a pulsed x-ray source that delivers an intense line radiation, an annular condenser that focuses the radiation of the X-ray source on the object to be investigated, an X-ray optics constructed as a micro zone plate that images the object with high resolution on an X-ray detector, and a phase ring positioned in the rear focal plane of the micro zone plate and applies to the zero order X-ray radiation coming from the object a phase shift, with respect to the higher order radiation deflected by the object structures, which is determined by the thickness and material of the phase ring. The phase shift amounts, for example, to 90.degree. or 270.degree..

Abstract: A sample vessel for X-ray microscopes comprising a first silicon base plate having an entrance window covered with a thin film of silicon nitride, and a second silicon base plate which has an exit window covered with a thin film of silicon nitride and matched with the entrance window. The second silicon base plate being connected the first base plate by way of a spacer so as to form a sealed space capable of accommodating samples to be observed. Disposed in the space is a mesh member made of a wire material having an angle of contact with water smaller than 90.degree. at a location adjacent to the thin film of silicon nitride covering the entrance window or a thin film of aluminium is evaporation-coated over the thin film of silicon nitride.

Abstract: An X-ray microscope for observing a transmitted X-ray microscopic image of a specimen by irradiating the specimen with X-rays and exciting radiation rays, in which the exciting radiation rays are made incident upon the specimen at a large photon flux in an efficient manner without loss, so that a contrast of the image can be increased. The invention provides a desired relationship between thickness of specimen, wavelength of X-rays and tone resolving power of image for obtaining a transmitted X-ray microscopic image having an excellent contrast. The invention further proposes optimizations for a photon flux of exciting radiation rays as well as for a timing of irradiation of X-rays and exciting radiation rays. The X-ray microscope can observe particular element contained in particular substance without being affected by the same element contained in other substances which constitute a specimen together with the particular substance by suitably selecting a wavelength of the exciting radiation rays.

Abstract: In a soft X-ray microscope including a soft X-ray source for emitting soft X-rays, a condenser lens for focusing the soft X-rays onto a specimen under inspection, an objective lens for focusing soft X-rays emanating from the specimen, a soft X-ray detector for receiving the soft X-rays focused by the objective lens, and a visually observing optical system for forming a visible image of the specimen by converting an optical property of the specimen other than contrast and color into a contrast in brightness or color. The visually observing optical system may be formed as phase contrast microscope, dark field microscope, polarizing microscope, differential interference microscope, or fluorescent microscope. Then, alignment and focus adjustment can be performed by observing the visible image of the specimen without irradiating the specimen with the soft X-rays even if the specimen has substantially no contrast and color.