Having Program Card, Tape, Or Disk Patents (Class 396/566)
  • Publication number: 20110229120
    Abstract: A rinsing method for performing a rinsing process on a substrate, after a developing process is performed on a light-exposed pattern disposed thereon, includes a step (STEP 5) of throwing off a developing solution from the substrate after development; a step (STEP 6) of supplying a water-based cleaning liquid onto the substrate; a step (STEP 7) of supplying a surfactant-containing rinsing liquid onto the substrate to replace liquid remaining on the substrate with the surfactant-containing rinsing liquid; and a step (STEP 8) of rotating the substrate to expand and throw off the surfactant-containing rinsing liquid on the substrate. STEP 8 is arranged to supply the surfactant-containing rinsing liquid for a supply time of 5 seconds or less. STEP 9 is arranged to include a first period with a lower rotation number and a second period with a higher rotation number, and to set the rotation number of the substrate in the first period to be more than 300 rpm and less than 1,000 rpm.
    Type: Application
    Filed: May 27, 2011
    Publication date: September 22, 2011
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Yasuhiro TAKAKI, Osamu Miyahara, Keiichi Tanaka, Shinya Wakamizu, Takashi Terada
  • Patent number: 5669029
    Abstract: A method of controlling the replenishment of a processing solution used for processing a photographic material in photographic processing apparatus, wherein replenishment chemistry is added to the processing solution and the replenishment rate is controlled using an algorithm, is characterised in that at least one of the terms of the algorithm is determined by information associated with the replenishment chemistry.
    Type: Grant
    Filed: May 3, 1996
    Date of Patent: September 16, 1997
    Assignee: Eastman Kodak Company
    Inventors: John Richard Fyson, Christopher Barrie Rider, Andrew Benoy