Abstract: A through-type furnace for substrates comprises a furnace with a channel and a transport system for the transport of the substrates through the channel. The channel is bounded by a base, a front side wall, a rear side wall and a top part. The base contains a plurality of first holes which are connectable to a protective gas source so that protective gas can be supplied during operation. The front side wall of the channel comprises a longitudinal slit which extends parallel to the passage direction and which is bounded by a bottom edge and an upper edge. The transport system comprises at least one clamp for transporting the substrates through the channel. The clamp is movable back and forth along the longitudinal slit of the channel. Such a through-type furnace is in particular suitable for use in a soft solder die bonder.

Abstract: A loading unit avoiding the need to enhance the performance of a lifting elevator mechanism, thus preventing an increase in the cost of the lifting elevator mechanism. The loading unit is configured to vertically move a substrate holder, holding a plurality of substrates, into and out of a cylindrical processing container upon heat treatment of the substrates. The loading unit includes: a lifting elevator mechanism for holding and vertically moving the substrate holder and a cap; and a pressing mechanism, having a piezoelectric actuator, for upwardly pressing against the cap lying at a bottom opening of the processing container.

Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.

Abstract: A vacuum assembly used for warming processed substrates above the dew point to prevent unwanted moisture on the processed substrate surfaces as well as reducing negative impact on manufacturing throughput. The vacuum assembly includes a processing chamber, a substrate handling robot, and a heater which may be an optical heater. The processing chamber is configured to cryogenically process one or more substrates. The transfer chamber is connected to the processing chamber and houses the substrate handling robot. The substrate handling robot is configured to displace one or more substrates from the processing chamber to the transfer chamber. The heater is connected to the transfer chamber above the substrate handling robot such that the heater emits energy incident on the substrate when the substrate handling robot displaces the substrate in the transfer chamber.

Abstract: There is provided a loading unit which can avoid the need to enhance the performance of a lifting elevator mechanism, thus preventing an increase in the cost of the lifting elevator mechanism. The loading unit is configured to vertically move a substrate holder 56, holding a plurality of substrates W, into and out of a cylindrical processing container 46 upon heat treatment of the substrates W. The loading unit includes: a lifting elevator mechanism 66 for holding and vertically moving the substrate holder 56 and a cap 62; and a pressing mechanism 86, having a piezoelectric actuator 88, for upwardly pressing against the cap 62 lying at a bottom opening 44 of the processing container 46.

Abstract: A method and a device for charging feedstock, in particular coke or ore, and optionally separated fines of feedstock, for processing in a metallurgical vessel, to produce metal or primary metal products. The device includes a charging mechanism, which has a conveying device and at least one feeding device for supplying to the charging mechanism. The conveying device has an outlet opening which can be guided along an inwardly directed spiral during the charging into the vessel, to set a predefined coverage in the vessel. Charged materials can thereby be positioned precisely in the vessel, and it is possible for fines to be uniformly distributed in the circumferential region.

Abstract: A vacuum assembly used for warming processed substrates above the dew point to prevent unwanted moisture on the processed substrate surfaces as well as reducing negative impact on manufacturing throughput. The vacuum assembly includes a processing chamber, a substrate handling robot, and a heater which may be an optical heater. The processing chamber is configured to cryogenically process one or more substrates. The transfer chamber is connected to the processing chamber and houses the substrate handling robot. The substrate handling robot is configured to displace one or more substrates from the processing chamber to the transfer chamber. The heater is connected to the transfer chamber above the substrate handling robot such that the heater emits energy incident on the substrate when the substrate handling robot displaces the substrate in the transfer chamber.

Abstract: A unit for sterilizing and depyrogenating containers of the type including a conveying device suitable for receiving a plurality of containers through at least an inlet and supplying the containers in a set direction to a corresponding outlet of the unit. The unit has a sterilizing/depyrogenating unit defined by at least two sterilizing modules arranged consecutively in said direction and communicating through an intermediate passage and affected by the conveying device. The sterilizing modules are activatable independently of one another according to alternative operating modes for hot and/or cooling sterilizing the containers.

Abstract: A loader assembly for a TEM machine having a retractable arm that is moveable between a retracted position and an extended position. A hoop portion of the retractable arm also moves between the retracted position and the extended position. A lower closure for holding a part to be processed in the TEM machine is removably positioned in the hoop portion. A ram piston of the TEM machine is movable between a load position and a process position. When the ram piston moves from a load position to a process position the ram piston contacts the lower closure and extends through the hoop of the retractable arm to move the lower closure to the process position. A thermal chamber receives the lower closure when the ram piston moves to the process position.

Abstract: The invention concerns a method for individually separating wafers from a stack of wafers by placing the stack of wafers in a microwave chamber, and exposing the wafers for microwaves causing the water between the wafers to evaporate.

Abstract: In order to provide a particularly homogeneous pressure and temperature profile in a gas cushion for the levitating support of glass or glass ceramic, the invention provides a device (19) for transporting or supporting glass ceramic or glass, which comprises at least one diaphragm (1, 2) that has at least one continuous bearing surface (3) and at least one gas feed chamber (51-55) and at least one gas discharge chamber (71-75), the gas feed chamber (51-55) and the gas discharge chamber (71-75) having a gas-permeable connection to the bearing surface (3).

Abstract: An apparatus through which a substrate may be transferred between a first chamber and a second chamber in which the first chamber is maintained at a high temperature relative to the ambient temperature of the second chamber. The apparatus comprises a passageway for receiving the substrate and a thermally isolating interface. The thermally isolating interface reduces heat transfer from the first chamber to the second chamber and allows for transfer of the substrate between the apparatus and the second chamber. The thermally isolating interface includes a hole having dimensions such that the substrate is transferrable through the thermally isolating interface.

Abstract: Device for the transport of metallic work pieces during a heat treatment including a transport device, a carriage movable transverse to a transport direction, a rack for carrying the transport device that is movable relative to the carriage, where the transport device is float-mounted in relation to the carriage.

Abstract: Both of a first insulating film and a second insulating film are formed by a spin coating method. Accordingly, the formation of the first insulating film and the second insulating film can be performed in the same SOD processing system. Moreover, the aforesaid formation of both of the first insulating film and the second insulating film by the spin coating method can provide favorable low dielectric constant properties and good adhesion of the first insulating film and the second insulating film.

Abstract: An apparatus for assisting the loading of a plurality of wafer boats into a multi-level wafer boat loading system (1) includes a vertical elevator mechanism (10) attached to the wafer boat loading system (1). A vertically movable horizontal wafer boat platform (18B) is attached to a vertically movable carriage (31) included in the elevator mechanism and vertically movable along a linear track (30) therein. A control system (25) associated with the vertical elevator mechanism includes a processor for executing a stored program which stores information representing a plurality of elevation levels the plurality of cantilever paddles (5), respectively, and which responds to a selection signal corresponding to manual selection of one of the elevator levels to control a drive mechanism (22,27) which moves the wafer boat support platform (18B) from an initial position to the selected elevator level.

Abstract: A jig comprises: a main body; a retainer for retaining a block in which at least one row of sections to be sliders is aligned; a middle load application section coupled to a portion of the retainer located in the middle of the length thereof; end load application sections coupled to portions of the retainer near ends of the length thereof; middle couplers located between the middle load application section and each of the end load application sections, respectively, for coupling the main body to the retainer; and end couplers for coupling the main body to the ends of the length of the retainer. The length between the middle of the retainer and each of the ends thereof is greater than the length between the middle of the retainer and each of the end load application sections.

Abstract: A mold support frame assembly including a pair of mold support frames between which a connector extends and cooperates with to provide a thermally stable center. Each mold support frame includes a linkage extending between a pair of spaced legs and having a connection to a mold positioning member adjacent a centering location thereof so that thermal expansion and contraction takes place about the centering location. The connector includes a second mold positioning member that extends between the pair of mold support frames and has a second mold centering location. A second linkage extends between the pair of mold support frames and has a connection to the second mold positioning member adjacent its second mold centering location to provide thermal expansion and contraction of the second mold positioning member about its second mold centering location.

Abstract: A system and method for processing a substrate. The system includes a substrate heating station, a processing station, a conveyor for transporting the heated substrate from the substrate heating station to the processing station and a conveyor heating station. A substrate transfer station is located between the substrate heating station, the conveyor heating station and the processing station for the transfer of the heated substrate to the conveyor in a thermally controlled environment isolated from contaminants. The substrate transfer station includes a housing having an interior chamber, first and second inlets for the separate passage of a substrate and conveyor into the interior chamber, and an outlet for the egress of the substrate and conveyor. The transfer station also includes a heater and a guide assembly for directing the conveyor between the conveyor inlet and the outlet.

Abstract: A discharge apparatus includes a housing into which a discharge pipe of a carbonization drum opens. A residue discharge chute which starts from the housing opens into a conveying device ending at an outlet. A filling-level meter is disposed at the residue discharge chute. The conveying device has a profiled separating shelf with an end remote from the mouth of the residue discharge chute, at which a bar screen is formed. The bar screen covers a delivery opening for fine residue and ends at the outlet for coarse residue. A vibrator is associated with the conveying device.

Abstract: A transfer system that supports circuit boards as it conveys them through a reflow oven. The system uses a sag support between edge supports. The sag support does not have to move as the circuit board is transferred along the transfer system. The height of the sag support can be easily adjusted. The sag support's mounts can maintain appropriate tension in the sag support even if the sag support expands during operation. The system may use a mechanism to prevent the friction between the boards and the sag support from interfering with the movement of boards along the transfer system.

Abstract: An apparatus for preventing the cross contamination of heating element within horizontal furnaces is disclosed. A rotating spindle may connect to either or both of the lifting arm of a triaxial loader or the transfer plate of a loading station. A pair of spindles are able to lift a single wafer boat. Each spindle includes a plurality of active positions with one active position associated with each heating element of the horizontal furnace. A control processor monitors the position of the spindle and rotates the spindle to the active position associated with a heating element when a loading or unloading process is initiated for that heating element.

Abstract: A system for removing and replacing heat exchange baskets for radially loaded air preheaters. The system includes a platform having a horizontal upper surface for supporting the heat exchange baskets. The upper surface is substantially alignable with each basket support level such that a single platform may be used to remove or replace all of the heat exchange baskets. A tugger and tugger line are provided for providing the motive force required to move the heat exchange baskets. An engagement apparatus engages and applies the motive force to the heat exchange basket. At least one pulley is used to control the direction of movement of the tugger line and thereby direct the motive force to either push or pull the heat exchange basket.

Abstract: A single charge continuous rotary retort furnace for heat treating machine parts in a sealed atmosphere, including a rotary retort furnace housing having an inlet and outlet end with a feeder assembly at the inlet end that has a plurality of chambers for supplying the machine parts to the rotary retort furnace housing to be heat treated. In addition, the rotary retort furnace includes a locking collar assembly for connecting the feeder assembly to the inlet end of the rotary retort furnace housing having locking tabs for locking the feeder assembly to the locking collar assembly; pistons and cylinders for rotating the locking collar assembly relative to the feeder assembly; and a device for sealing the feeder assembly relative to the locking collar assembly to create an atmospheric seal in the retort furnace housing for enabling the machine parts to be heat treated.

Abstract: An apparatus for the transit of objects within treatment chambers including at least one support trolley for supporting food products and having lifting elements arranged at its longitudinal ends. The trolley includes a plurality of links aligned with and articulated to each other in the longitudinal direction. The trolleys can be used either in a closed or an open cycle operation. The trolleys are articulated in a manner which enables them to remain rigid during stages in which they cooperate with at least four projecting pins which are driven vertically by acting as lead pins torsionally rigid with a fixed structure and engaged with respective rotating vertical screws. The articulation of the trolleys also enables the trolleys to turn about end toothed wheels which upon rotation cause movement of the trolleys in a longitudinal movement.

Abstract: A semiconductor device manufacturing apparatus has a heat retaining tube which can be freely placed in and pulled out of a processing chamber of the apparatus. When located within the processing chamber, the heat retaining tube surrounds a boat with the semiconductor wafers mounted thereon. After the thermal processing of the semiconductor wafers has been completed, the heat retaining tube and the semiconductor wafers are pulled out of the processing chamber together. In this way, the difference in the temperature of the center and periphery of the semiconductor wafer is decreased, and semiconductor devices, which have excellent performance and which are free from crystalline defects or dislocation, can thus be manufactured.

Abstract: The circuit board plasma etching apparatus includes a preheating chamber, a plasma reaction chamber and a cooling chamber for etching circuit boards with plasma in a quasi continuous operation. The plasma reaction chamber is sealed by a gas-tight preheating sealing slide adjacent the preheating chamber and by a gas-tight cooling sealing slide adjacent the cooling chamber. A preheating door selectively closes the preheating entry end and a cooling door selectively closes the cooling chamber exit end. Boards to be etched are placed in printed circuit board cages supported by a guide rail within the chambers. The guide rail is separable into a preheating segment, a reaction chamber segment and a cooling segment contained within the respective chambers. A preheating chamber bellows allows axial movement of the preheating door, as does a cooling chamber bellows for the cooling chamber door. Axial displacement of the doors allows selective segmentation of the guide rail.

Abstract: The invention relates to apparatus for heat treatment of material in pieces at high temperature, especially for firing ceramic material. In this apparatus supports in the form of elongated support elements are provided on carrier elements rotatable about fixed axes, the supports are guided in the transport direction and are spaced a clear distance from one another at right angles to the transport direction. This results in even heat treatment of the material, a reduction in the energy consumption, shortening of the transit time, and a significant reduction in the construction and running costs.

Abstract: A sliding shoe or member for a pusher or reheating furnace for the sliding transport of substantially bar-shaped heated objects has an essentially U-shaped profile or sectional shape and is provided with downwardly protruding legs for the laterally guided support of the sliding shoe on a rail. At its inner web side the sliding shoe is provided with sliding elements which consist of a material which has a coefficient of friction sufficient for an essentially wear-free feed or advance of the sliding elements and thus the shoes at the central region of the rail at a furnace temperature of about 600.degree. to 700.degree. C. These measures afford sliding characteristics which make it unnecessary to provide additional lubrication between the sliding shoes and the rail.

Abstract: A cooking retort for soup or the like in which the individual cans are stored in storage rack clusters arranged around a generally horizontal axis. The retort employs a power cylinder to tilt the retort and thus the storage racks to enable inclination of the racks to facilitate the loading and tilting of the racks to facilitate unloading. In addition, a hexagonal pattern of can rack clusters is provided to enhance cooking capacity of cans.