Abstract: A wafer processing system occupies minimal floor space by using vertically mounted modules such as reactors, load locks, and cooling stations. Further saving in floor space is achieved by using a loading station which employs rotational motion to move a wafer carrier into a load lock. The wafer processing system includes a robot having extension, rotational, and vertical motion for accessing vertically mounted modules. The robot is internally cooled and has a heat resistant end-effector, making the robot compatible with high temperature semiconductor processing.

Abstract: An apparatus safely fills and empties a pressurized vessel charged with flammable and/or reactive gas. The apparatus features an upper flap combination, an intermediate lock vessel having a flushing apparatus, and a lower flap combination. The present invention also relates to a pressurized reactor which is charged with flammable and/or reactive gas and is equipped with a filling lock apparatus and an emptying lock apparatus for the simultaneous preparation of tetrachlorosilane, trichlorosilane and hydrogen. In addition, the present invention relates to a special process for filling and emptying such a reactor.

Abstract: A keyboard etching apparatus includes a base on which a frame is fixed to support a laser beam source and a keyboard tray thereon to be spaced from each other in such a manner to allow a laser beam emitted from the laser beam source to project onto a keyboard removably supported on the keyboard tray for performing etching operation on the keyboard. A keyboard supply cart having a plurality of non-etched keyboards held therein and a keyboard collecting cart for collecting etched keyboards are respectively arranged on two opposite sides of the frame and movable along rails fixed on the base. A conveyor system is arranged between the keyboard supply cart and the keyboard collecting cart for sequentially moving each of the non-etched keyboards received in the keyboard supply cart to the keyboard tray to be etched by the laser beam and to simultaneously move the etched keyboard from the keyboard tray to the keyboard collecting cart to be collected therein.

Abstract: A wet ash remover installation includes a first wet ash remover (5) which is placed in operating position under an ash funnel (2) of a boiler and a second, similar, movable wet ash remover (12) placed in reserve position. The wet ash removers (5, 12) respectively consist of a water-filled trough (7) which houses a conveying implement and in which a dip member (4) connected to the ash funnel (2) is immersed. Each trough (7) is provided in one of the side walls (13) and at the same height with an opening (14) extending to the upper edge of the side wall (13) and having a width which corresponds to at least the width of the dip member (4) and a height which corresponds to at least the maximum depth of immersion of the dip member (4) into the wet ash remover (5). The opening (14) is surrounded by a frame (17) supporting a compressible seal (19) and is closed by a rotatable gate (16) which engages the opening (14) from the inside.

Abstract: A batching module for a mobile batching plant includes an open three dimensional frame with first and second end cells defined therein and a third intermediate cell defined between the end cells. A plurality of interchangeable batching apparatus are provided for removable installation within the cells. A reversible conveyor is mounted within the frame and extends between the ends thereof to convey materials deposited thereon from the batching apparatus to either the first or second end of the frame. Length extensible support legs are mounted to the batching apparatus frame to permit selective height adjustment of the frame above the ground. The legs are telescopically mounted within vertical hollow support posts of the frame for selective retraction completely within the frame posts. Either mobile mixers or stationary mixers may be positioned under the first and second cells to receive product from the batchers and conveyor.

Abstract: A dumping container for collecting, transporting and dumping primarily ashes removed from an incinerator. A pair of pivoted fore and aft frame members, of hollow box like crossection engage the tines of a manual cable operated hoist. The cable hoist provides the mobility needed to transport the dumping container to the incinerator, elevate it to the open top receiving vessel, and provide tilting and dumping in cooperation with a pair of hooking members on the bottom of the dumping container and the pivotal action of the dumping container fore and aft frame members. An integral water spray bar, connectable to an external water supply, provides water to wet down the ashes during the removal operation.

Abstract: A sealing arrangement at coke oven chambers, for gastightly sealing the junction gaps between a transfer means, such as provided on coke guide cars or at the pushing machine and the coke oven, comprises sealing sheets at the oven side, which in operating position, apply against the outside of the chamber opening. The inner space of this transfer means is connected to stationary exhausters, for example. The sealing sheets comprise a plurality of individual segments which, as the transfer means is put in place, are pressed by adjustable springs acting through sliding rods against anchor posts and, at the top of the chamber opening against plates connected between the anchor posts at the top of the chamber.

Abstract: A gas collecting hood for taking off emissions from coke being pushed out of coke oven chambers, travels along with a coke guide alongside the battery. The hood is connected through a gas collecting duct to a stationary exhausting system. The hood is supported at three points, through roller (15,16) at two points (A,B) on a rail (11) which is provided at the hood side remote from the coke guide (3), and pivotally at a point (C) on the coke guide (3).

Abstract: A coke quench car emission control system includes a coke car and a filter car connected in tandem for joint movement on rails disposed adjacent a coke oven. A hood and recuperator are mounted on a third car disposed on auxiliary rails which extend longitudinally along the upper portions of both the quench car and the filter car and in end-wise alignment. The hood is adapted to be coupled to the coke oven for receiving coke during a pushing operation. The recuperation has an inlet coupled to the hood for receiving emissions and withdrawing heat therefrom. The recuperator also has an outlet which is disposed adjacent the inlet of a filter system mounted on the filter car, when the third car is positioned atop the quench car. The third car is sized so that it can be moved on the auxiliary rails from a position atop the quench car to a position atop the filter car whereby the quench car can be exposed for a quenching operation.

Abstract: A coke delivery device 10 includes a swingable chute 16 for guiding coke pushed from a coke oven through a coke rack 12 into a quench car 24.The chute 16 is drivingly interconnected with a moveable fume hood 14 whereby lowering the fume hood over the quench car positions the chute 16 for coke guiding. Raising the fume hood moves the chute from the coke guiding position to a storage position concurrently spreading coke pushed into the quench car and dumping any coke remaining on the chute into the quench car.

Abstract: A coke oven battery servicing apparatus includes a coke catching and collecting bucket movable from a first position adjacent the oven to a second position clear of the oven and a coke guide cage having an opening therein which is complementary to the bucket. When in the first position the bucket collects coke spillage during oven door extraction and door jamb cleaning. When the coke guide is positioned for pushing, the bucket is moved into a third position in which the bucket is removably inserted into the aforementioned opening to become integral with the coke guide cage. The collected coke spillage is then pushed together with the coke from the oven through the guide means for disposal in a quenching receptacle or car.

Abstract: An extendible hopper is mounted to the undercarriage of a pusher machine and is operable to be extended to engage the face of the coke oven battery, between the buckstays and just below the door jamb, to catch hot coke that spills out of coke ovens as the door is removed and the pusher ram is retracted. A bin is also mounted to the undercarriage of the pusher machine to receive the hot coke collected by the extendible hopper. Quench sprays are mounted to the bin to quench the hot coke, and suction means are mounted to the bin to draw off pollutants that emanate from the hot coke and the quench thereof.

Abstract: In a coke oven coke side door machine, a bottom tray is mounted to collect spillage that results from the removal of coke oven doors as well as the residue buildup that is scraped from the door seals and bottom plugs during the door cleaning operation. Trays, in the form of inclined planes, are extended from the door machine to catch the coke spillage from the oven and to catch the residue buildup which is scraped from the door jambs during the jamb cleaning operations. This material gravitates down the trays into the catch pan. A scraper then pushes the material accumulated in the catch pan to one end of that catch pan where a conveyor carries it to a dump bucket. The dump bucket can be dumped when the door machine is positioned adjacent a quench car. All of the above apparatus is mounted onto and within the confines of the door machine.

Abstract: One cycle of operations for pushing-out of the coke, including door removal, jamb cleaning, coke guidance and reinstallation of the removed door can be conducted on one spot by employment of a common passage system for door extractor, jamb cleaner and coke guide cage, and of an automatic centering mechanism which allows the car to be positioned at once exactly in front of the coking chamber without necessity of highly skilled workman.

Abstract: A discharge chute assembly for a rotary calcining hearth in which a carriage movable radially along tracks carries one or more pairs of opposed rollers receiving a flange extending around the hearth. The carriage supports the chute to cause the chute to follow any radial fluctuations in the position of the hearth edge and thereby minimize spillage of material. The chute is disposed with its upper edge extending into an outwardly opening circumferential channel formed around the side of the hearth beneath the upper surface, further minimizing spillage.