Means To Convey Load Back And Forth Between Initial Location And Station Patents (Class 414/222.07)
  • Patent number: 11817333
    Abstract: A miniaturized semiconductor manufacturing system including: a housing, a lifting mechanism, a processing chamber and a transportation mechanism. The housing includes an inner space and an opening communicated with the inner space. The lifting mechanism is disposed in the inner space and includes a holder configured for a substrate to be placed thereon. The holder is movable in a first direction relative to the opening between a first position and a second position. The processing chamber is disposed in the inner space and includes a holding portion configured for the substrate to be placed thereon. The transportation mechanism is disposed between the lifting mechanism and the processing chamber and is movable in a second direction. Wherein an aspect ratio value of the housing is between 1 to 6.
    Type: Grant
    Filed: March 17, 2021
    Date of Patent: November 14, 2023
    Assignee: SYSKEY TECHNOLOGY CO., LTD.
    Inventors: Hsueh-Hsien Wu, Chih-Yuan Chan
  • Patent number: 11699608
    Abstract: A substrate storage apparatus includes a stage on which a cassette that has a lid detachably mounted to an opening is disposed, a lid attaching/detaching plate that performs attaching/detaching of the lid to/from the opening of the cassette disposed on the stage, and is provided to be movable between a mounting position in contact with the lid disposed at a position of the opening and a retracted position not in contact with the lid disposed at the position of the opening, a lid holding sensor that detects whether the lid is being held by the lid attaching/detaching plate, and a controller that determines presence/absence of abnormality related to attachment/detachment of the lid based on a detection result of the lid holding sensor.
    Type: Grant
    Filed: February 15, 2018
    Date of Patent: July 11, 2023
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Akihiro Matsumoto, Michiaki Matsushita, Akira Murata, Minoru Tashiro
  • Patent number: 10773890
    Abstract: A device for selectively picking up and depositing articles to an automatic warehouse, comprising: a support plane (2), for the temporary support of an article (A); a temporary support (3), for the temporary support of a tray (V) intended to contain a predetermined number of articles (A); a manipulator (4, 5), structured to grasp and release an article (A) and to translate the article (A) between the support plane (2) and the temporary support (3). The manipulator (4, 5) and the temporary support (3) are movable relative to one another along a vertical direction, between a position of maximum distance and a position of minimum distance.
    Type: Grant
    Filed: April 7, 2017
    Date of Patent: September 15, 2020
    Assignee: MODULA S.P.A. CON SOCIO UNICO
    Inventor: Franco Stefani
  • Patent number: 10442673
    Abstract: A loading-unloading assist system includes a holder that holds a plurality of single cells such that the single cells are detachable from the holder, and a lifting device that moves the holder up and down. The holder holds the plurality of single cells in a state where the single cells are arrayed in a straight line at predetermined intervals.
    Type: Grant
    Filed: August 31, 2017
    Date of Patent: October 15, 2019
    Assignee: Toyota Jidosha Kabushiki Kaisha
    Inventors: Kosuke Katsuta, Naotoshi Miyamoto, Kazumi Sugita
  • Patent number: 9751209
    Abstract: A substrate transport apparatus including a frame, at least one arm link rotatably connected to the frame and a shaftless drive section. The shaftless drive section including stacked drive motors for rotating the at least one arm link relative to the frame through a shaftless interface, each of the stacked drive motors including a stator having stator coils disposed on a fixed post fixed relative to the frame and a rotor substantially peripherally surrounding the stator such that the rotor is connected to a respective one of the at least one arm link for rotating the one of the at least one arm link relative to the frame causing an extension or retraction of the one of the at least one arm link, where the stacked drive motors are disposed in the at least one arm link so that part of each stator is within a common arm link.
    Type: Grant
    Filed: November 16, 2015
    Date of Patent: September 5, 2017
    Assignee: Brooks Automation, Inc.
    Inventor: Robert T. Caveney
  • Patent number: 9633879
    Abstract: A storage system in a ceiling space includes overhead traveling vehicles and a traveling route for the same, a shuttle carriage configured to transport goods to and from processing devices and a traveling route for the same, an OHT port to and from which the overhead traveling vehicles and the shuttle carriage both transport goods, and buffers that are provided in the ceiling space above the processing device and are for the placement of goods by the shuttle carriage. The traveling route for the shuttle carriage enables delivery and reception of goods by the shuttle carriage between the load port of the processing devices, the buffers, and the OHT port.
    Type: Grant
    Filed: May 14, 2014
    Date of Patent: April 25, 2017
    Assignee: MURATA MACHINERY, LTD.
    Inventors: Yasuhisa Ito, Masahiro Ikeda, Yuichi Imamura
  • Patent number: 9572239
    Abstract: A static electricity prevention device includes a main body, an air ionizing generator, a first griping arm, a second griping arm and a driving unit. The main body includes a receiving cavity. The air ionizing generator is fixed on the main body and configured for ejecting ionized air. The first griping arm and the second griping arm each comprises a gripping end and a supporting end connected with the gripping end, the first griping arm and the second griping arm are pivotally mounted on the ends of the main body. The driving unit is arranged in the receiving cavity, and configured for driving the supporting end to rotate, and in order to open or close the gripping end.
    Type: Grant
    Filed: April 30, 2014
    Date of Patent: February 14, 2017
    Assignee: HON HAI PRECISION INDUSTRY CO., LTD.
    Inventor: Min-Tsang Tseng
  • Patent number: 9563136
    Abstract: Arranging an application apparatus, an exposure apparatus, a developing apparatus, and similar apparatus together within a large yellow room makes it difficult to change a layout in association with a change of a recipe and to streamline a layout area and similar parameter. A yellow room system includes: a plurality of portable unit process apparatuses 50 that each have the same standardized outer shape and include a yellow room configured to shield a exposure light to a photosensitive material formed on a workpiece; conveyance containers 11 and 25 that convey the workpiece between the unit process apparatuses and itself is formed as the yellow room; and a light-shielding coupling structure that couples the unit process apparatus, which is formed on a docking port 56 disposed in the upper portion of a front chamber 80 of the unit process apparatus 50, and the conveyance containers together.
    Type: Grant
    Filed: October 3, 2012
    Date of Patent: February 7, 2017
    Assignee: National Institute of Advance Industrial Science and Technology
    Inventor: Shiro Hara
  • Patent number: 9548230
    Abstract: A temporary storage device transfers an article in different positions to and from an overhead travelling vehicle system and a second transport system, and transfers an article to and from an article transfer position outside the temporary storage device. The temporary storage device includes a local carrier including a hoist, travel rails of the local carrier below a travel rail of the overhead travelling vehicle system, passing directly above an article transfer position, and a slide rack below the travel rails of the local carrier, slidable between a portion directly above the transfer position and a second position in which an article can be transferred to and from the second transport system, the second position being different from the portion directly above the transfer position in a direction perpendicular or substantially perpendicular to the travel rails of the local carrier in a horizontal plane.
    Type: Grant
    Filed: September 21, 2015
    Date of Patent: January 17, 2017
    Assignee: MURATA MACHINERY, LTD.
    Inventor: Junji Iwasaki
  • Patent number: 9126330
    Abstract: A carrier device according to an embodiment includes a base that is disposed on an installation surface and a swivel arm that is provided on the base to swivel freely and of which turn tables attached to its both ends pass between a carrying in and out position and a working position that are previously set on a circular orbit. The base has a hollow structure and includes a hollow part that has at least therein the center of rotation of the swivel arm and into and through which a predetermined linear object can be inserted.
    Type: Grant
    Filed: May 14, 2012
    Date of Patent: September 8, 2015
    Assignee: KABUSHIKI KAISHA YASKAWA DENKI
    Inventor: Katsuhiko Yoshino
  • Publication number: 20150147141
    Abstract: A pick-and-place head for picking a plurality of work-pieces from at least one first location and for placing the plurality of work-pieces at least one second location is disclosed. The pick-and-place head exhibits a plurality of nozzles, wherein each nozzle is configured to engage one of the work-pieces by action of a vacuum. At least one nozzle has an individual vacuum supply and at least two further nozzles have a shared vacuum supply. A corresponding method is also disclosed, the method including the steps of approaching at least one of the plurality of work-pieces with a respective nozzle and then starting generation of a vacuum at each respective nozzle. The generation of vacuum in at least one nozzle is achieved by an individual vacuum supply, and generation of vacuum in at least two further nozzles is achieved by a shared vacuum supply of the at least two further nozzles.
    Type: Application
    Filed: January 12, 2015
    Publication date: May 28, 2015
    Inventor: Carl Truyens
  • Publication number: 20150139759
    Abstract: A rotation mechanism includes a mandrel, a rotation axle, a needle roller bearing and an angular bearing. The mandrel includes a shaft portion, a first annular contact portion and a second annular contact portion. The shaft portion has an outer surface, and the first annular contact portion and the second annular contact portion are located on the outer surface and respectively surround the axis of the mandrel. The rotation axle includes an annular portion, a third annular contact portion and a fourth annular contact portion. The annular portion has a shaft hole and an inner surface forming the shaft hole. The third annular contact portion and the fourth annular contact portion are located on the inner surface, and the mandrel passes through the shaft hole. The needle roller bearing is in contact with the first annular contact portion and the third annular contact portion, and is located between them.
    Type: Application
    Filed: February 10, 2014
    Publication date: May 21, 2015
    Applicant: Industrial Technology Research Institute
    Inventors: Wei-Chu LIN, Mei-Chin CHOU, Yu-Shiang HUANG, Hsin-Chuan SU, Hsi-Hung HSIAO
  • Publication number: 20150125241
    Abstract: In the method for manufacturing tires: a member is moved, transporting at least one green tire into a predetermined loading zone (17) of a curing station; at least one cured tire is transferred from the station to the member and the or each green tire is transferred from the member to the station, and the member is moved, transporting the or each cured tire out of the zone. The member remains in the zone between the two transporting steps.
    Type: Application
    Filed: April 23, 2013
    Publication date: May 7, 2015
    Applicants: MICHELIN RECHERCHE ET TECHNIQUE, S.A., COMPAGNIE GENERALE DES ETABLISSEMENTS MICHELIN
    Inventors: Julien Moynet, JR., Jean-Pierre Guilbaud, Eric Lebedel, Aurelien Prevost
  • Patent number: 9011069
    Abstract: A glass substrate transporting apparatus aims to load or unload a quartz bracket into or from multiple reactors. It includes a track, a carriage, a rotary element and a telescopic fetching rack. The reactors are located at two sides of the track. The carriage has four track wheels movable on the track and multiple motors to synchronously drive the four track wheels. The rotary element is located on the carriage. The telescopic fetching rack is located on the rotary element. Through movement of the carriage on the track and rotation of the rotary element, the telescopic fetching rack can sequentially align and enter the reactors to load or unload the quartz bracket, thus amount of the reactors to be utilized is increased and utilization efficiency of the glass substrate transporting apparatus is improved. Moreover, as the carriage can move quickly on the track, production is also increased.
    Type: Grant
    Filed: January 23, 2012
    Date of Patent: April 21, 2015
    Assignee: Tera Autotech Corporation
    Inventor: Yi-Lung Lee
  • Patent number: 9013569
    Abstract: A conveying device including: a storage unit storing two or more sheets of slide glasses to be subjected to a predetermined treatment; a stage holding only one sheet of slide glass to be subjected to the treatment; a supply arm by which one sheet of slide glass to be subjected to the treatment is picked up from the storage unit and supplied onto the stage; a discharge arm by which the slide glass mounted on the stage is picked up and discharged in the storage unit; a moving unit operable to move the supply arm and the discharge arm in an integral manner so as to bring the supply arm or the discharge arm into proximity to each of the storage unit and the stage; and a control unit operable to control the supply arm, the discharge arm and the moving unit.
    Type: Grant
    Filed: June 24, 2011
    Date of Patent: April 21, 2015
    Assignee: Sony Corporation
    Inventors: Yu Hirono, Fumiyasu Suzuki, Yuichi Machida
  • Patent number: 8992160
    Abstract: A transfer robot according to an embodiment includes an arm and a body. The arm is provided, at a terminal end thereof, with a robot hand transferring a thin plate-like workpiece, and operates in horizontal directions. The body includes a lifting and lowering mechanism that lifts and lowers the arm. In the transfer robot, at least a part of the body is disposed outside a side wall of a transfer room that is connected to an opening and closing device opening and closing a storage container for the thin plate-like workpiece and to a processing room processing the thin plate-like workpiece.
    Type: Grant
    Filed: November 1, 2012
    Date of Patent: March 31, 2015
    Assignee: Kabushiki Kaisha Yaskawa Denki
    Inventor: Masatoshi Furuichi
  • Patent number: 8979462
    Abstract: A substrate-processing apparatus includes a plurality of process chambers, a buffer unit, and a transfer member. The transfer member transfers the substrate between the process chambers and the buffer unit, and collects the substrates processed in at least two of the process chambers where processes are simultaneously finished to transfer the processed substrates to the buffer unit at once. Accordingly, a number of times during which the transfer member transfers substrates is decreased so that the substrate-processing apparatus reduces the process time and improves the productivity.
    Type: Grant
    Filed: April 9, 2009
    Date of Patent: March 17, 2015
    Assignee: Semes Co., Ltd.
    Inventors: Kyung Mo Kim, Sang-Seok Hong
  • Publication number: 20150050105
    Abstract: Embodiments described herein generally relate to a vapor dryer module for cleaning substrates during a chemical mechanical polishing (CMP) process. In one embodiment, a module for processing a substrate is provided. The module includes a tank having sidewalls with an outer surface and an inner surface defining a processing volume, a substrate support structure for transferring a substrate within the processing volume, the substrate support structure having a first portion that is at least partially disposed in the processing volume and a second portion that is outside of the processing volume, and one or more actuators disposed on an outer surface of one of the sidewalls of the tank and coupled between the outer surface and the second portion of the support structure, the one or more actuators operable to move the support structure relative to the tank.
    Type: Application
    Filed: July 25, 2012
    Publication date: February 19, 2015
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Dan Zhang, Hui Chen, Jim K. Atkinson, Hung Chih Chen, Allen L. D'Ambra
  • Publication number: 20150037122
    Abstract: The present invention relates to a station arrangement for processing and/or measuring semiconductor wafers which comprises, as individual modules, at least one loading module, at least one process station for processing the semiconductor wafers and/or at least one measuring station for measuring a variable of the semiconductor wafers, at least one adjustment-/cooling station and also at least one transport robot which is disposed in a transport housing. The transport robot enables the transport of the semiconductor wafers to be processed between the loading module and the respective process station for processing the semiconductor wafers and/or the at least one measuring station for measuring the semiconductor wafers.
    Type: Application
    Filed: February 22, 2013
    Publication date: February 5, 2015
    Inventors: Martin Schellenberger, Dirk Lewke
  • Publication number: 20150030418
    Abstract: A processing station for two-dimensional substrates including at least two processing units and at least two conveyor lines for substrates arranged in parallel to another, wherein both the processing units are placed between the two conveyor lines, and an arrangement for moving the substrates from the conveyor lines to the processing units and back is provided. The arrangement includes four linear conveyor units each having at least one substrate support, wherein a first linear conveyor unit leads from the second conveyor line to the first processing unit, a second linear conveyor unit leads from the first conveyor line to the first processing unit, a third linear conveyor unit leads from the first conveyor line to the second processing unit, and a fourth linear conveyor unit leads from the second conveyor line to the second processing unit.
    Type: Application
    Filed: February 25, 2013
    Publication date: January 29, 2015
    Inventors: Michael Reichenbach, Markus Bau
  • Publication number: 20150023768
    Abstract: A transport device (100) for samples (310) in a microtome having a transport arm (112) that is mounted longitudinally movably, has an entraining element (114) mounted pivotably on the transport arm. The entraining element is movable into a first position in which it entrains a sample present on a transport path, and into a second position in which it does not entrain a sample present on the transport path. The transport device has a positioning mechanism for the entraining element having a positioning element and a gate (130) with two tracks (131, 132) extending alongside one another for the positioning element. The entraining element is obligatorily located in the first position when the positioning element is moved in a first (131) of the two tracks, and the entraining element is obligatorily located in the second position when the positioning element is moved in a second (132) of the two tracks.
    Type: Application
    Filed: July 7, 2014
    Publication date: January 22, 2015
    Inventor: René Buettner
  • Publication number: 20150016927
    Abstract: The invention relates to a bobbin changing device (1) for feeding bobbins to and/or removing bobbins from a processing system (40) which can wind a strand-like material onto a bobbin and/or from a bobbin, wherein the bobbin changing device (1) has at least one conveyor system (30) which comprises, for example, two conveyor belts (31, 32), and a swivel fork (10). At least one bobbin receiving site (21, 22) on which a bobbin can be placed is formed on the swivel fork (10). By lifting, lowering and/or swivelling the swivel fork (10) in a specific sequence and repeating same, bobbins can be fed to the processing system (40) and the conveyor system (30) and/or removed therefrom and in this way a bobbin change can be carried out. The conveyor system (30) and the movement area of the swivel fork (10) may be at least partially interpenetrating.
    Type: Application
    Filed: January 10, 2013
    Publication date: January 15, 2015
    Inventor: Steffen Troitzsch
  • Publication number: 20140368815
    Abstract: The present invention provides a glass panel stocking system and a stocking method. The stocking system includes a loading and unloading port and a crane. The loading and unloading port functions to receive a cassette that contains glass panels to position thereon. The crane functions to move a cassette that contains glass panels. The crane includes a chassis, a carrying fork mounted on the chassis and movable for extension and retraction with respect to the chassis, and a mapping bar mounted on the chassis and located above the carrying fork. The carrying fork functions to carry the cassette that contains the glass panels and move the cassette that contains the glass panels to the mapping bar so that the mapping bar is allowed to carry out inspection and counting of the glass panels received in the cassette that contains the glass panels.
    Type: Application
    Filed: June 21, 2013
    Publication date: December 18, 2014
    Inventors: Minghu Qi, Chunhao Wu, Kunhsien Lin, Yongqiang Wang, Guokun Yang, Weibing Yang, Zenghong Chen, Yunshao Jiang, Zhiyou Shu, Chenyangzi Li
  • Patent number: 8894343
    Abstract: A carrier device according to embodiments includes: a swivel arm that is provided on a base installed on an installation surface to be able to swivel around a central axis and whose leading ends can pass on a circular orbit; and turn tables that are attached to the leading ends of the swivel arm and can carry a predetermined workpiece while placing thereon the workpiece between a working position and a carrying in/out position provided on the circular orbit. The turn table is rotated by an integral multiple of 360 degrees with respect to the installation surface while the turn table is moving from the working position to the carrying in/out position by swiveling the swivel arm.
    Type: Grant
    Filed: September 10, 2012
    Date of Patent: November 25, 2014
    Assignee: Kabushiki Kaisha Yaskawa Denki
    Inventor: Katsuhiko Yoshino
  • Patent number: 8882431
    Abstract: A robot that includes an end effector for holding a substrate in a substantially horizontal state; a vertical driving unit for driving the end effector to move in a vertical direction; a horizontal driving unit for driving the vertical driving unit to move in a horizontal direction; and a rotation driving unit for rotating the horizontal driving unit about a rotation axis extending in the vertical direction. In this case, one end of the end effector is connected with the vertical driving unit. One end of the vertical driving unit is connected with the horizontal driving unit.
    Type: Grant
    Filed: September 28, 2009
    Date of Patent: November 11, 2014
    Assignee: Kawasaki Jukogyo Kabushiki Kaisha
    Inventor: Yasuhiko Hashimoto
  • Patent number: 8875866
    Abstract: A ceiling transport carriage transfers an article at a first supporting position and receives the article from second supporting position in an article transfer section, in association with hoisting operations of a support unit. A ground transport device transports the article between the above two positions and a processing position where an article processing device effects a processing or operation on the article. The respective positions above are set in tandem in the article transfer section along a tandem direction along which the article processing device and the article transfer section are disposed in tandem. The ceiling transport carriage includes a movement operating mechanism for operating and moving a support unit along the tandem direction, to a position immediately above the first supporting position and to a position immediately above second supporting position.
    Type: Grant
    Filed: January 25, 2013
    Date of Patent: November 4, 2014
    Assignee: Daifuku Co., Ltd.
    Inventors: Takahiro Sebe, Yuji Baba
  • Patent number: 8851819
    Abstract: A substrate processing apparatus, which utilizes a first transfer apparatus and a second transfer apparatus which are configured to transfer a transfer container containing a plurality of substrates, along a first transfer path and a second transfer path whose lateral positions differ from each other, respectively, including a first load port where the transfer container is loaded and unloaded by the first transfer apparatus, and a second load port that is arranged stepwise with respect to the first load port, with the transfer container being loaded to and unloaded from the second load port by the second transfer apparatus.
    Type: Grant
    Filed: February 17, 2010
    Date of Patent: October 7, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Yuji Kamikawa, Takafumi Tsuchiya, Koji Egashira
  • Publication number: 20140273086
    Abstract: An apparatus including at least one of a stainer module and a coverslipper module; an imaging module; a storage module; an automated transport module for transporting at least one slide between at least one of the stainer module and the coverslipper module, the imaging module and the storage module; and a controller. A method including processing at least one slide; determining whether an imaging module is available for imaging of a biological specimen on the at least one slide; transporting the at least one slide to the imaging module using an automated transport module; and transporting the at least one slide to a storage module using the automated transport module when it is determined that the imaging module is not available. A system including a processing module for processing at least one slide including a biological specimen thereon. A machine readable medium.
    Type: Application
    Filed: May 28, 2014
    Publication date: September 18, 2014
    Applicant: SAKURA FINETEK U.S.A., INC.
    Inventor: Gilles Lefebvre
  • Patent number: 8813941
    Abstract: In some aspects, a workpiece processing installation includes an operating area, an operating pallet able to be moved along a transport direction between a position within the operating area and a position outside the operating area, the operating pallet being configured to support a workpiece, and a pallet support that is configured to be transferred from a first position, in which the pallet support defines a storage area for the storage of the operating pallet outside the operating area, to a second position in which the pallet support protrudes away from the operating area in the transport direction to a lesser extent than it does in the first position. Transferring the pallet support from the first position to the second position includes moving at least a portion of the pallet support towards the operating area which results in the storage area defined by the pallet support becoming smaller.
    Type: Grant
    Filed: January 31, 2012
    Date of Patent: August 26, 2014
    Assignee: TRUMPF Werkzeugmaschinen GmbH + Co. KG
    Inventors: Andreas Kettner-Reich, Tobias Meck, Martin Petera
  • Patent number: 8798784
    Abstract: Methods and apparatus for robotic induction in materials handling facilities with batch singulation inventory areas are disclosed. A control system directs the one or more robotic devices to transport a particular portable storage unit of a plurality of portable storage units to and from a particular induction station of one or more induction stations. The control system directs induction of one or more single units of items from one or more locations of the portable storage unit, while the particular portable storage unit is located at an induction station, into the conveyance mechanism at the particular induction station. The control system directs picks of batches of heterogeneous items from a separate inventory storage area. The control system directs induction of single units of items from the batches of heterogeneous items picked from the separate inventory storage area into the conveyance mechanism at a batch singulation station.
    Type: Grant
    Filed: December 29, 2010
    Date of Patent: August 5, 2014
    Assignee: Amazon Technologies, Inc.
    Inventors: David H. Clark, Eric Young
  • Publication number: 20140199140
    Abstract: A substrate accommodating and processing apparatus is provided with a cassette mounting table, a processing part, a substrate transfer mechanism, a partition wall, a cassette stage, and a lid attaching/detaching mechanism. The lid attaching/detaching mechanism is provided with a key configured to be engaged with a key hole installed in the lid, and configured to switch a latch between locking and unlocking positions. The mechanism is also provided with a lid abnormality detecting sensor, a lid attaching/detaching mechanism closing sensor, a lid attaching/detaching mechanism opening sensor, a pressure sensor and a control part.
    Type: Application
    Filed: January 7, 2014
    Publication date: July 17, 2014
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Akihiro MATSUMOTO, Michiaki MATSUSHITA, Satoru SHINTO, Kazunori KURATOMI
  • Patent number: 8757180
    Abstract: In a processing block, a plurality of back surface cleaning units and a main robot are provided. The main robot is provided between the back surface cleaning units provided on one side of the processing block and the back surface cleaning units provided on the other side of the processing block. A reversing unit used to reverse a substrate and a substrate platform used to transfer and receive substrates between an indexer robot and the main robot are provided adjacent to each other in the vertical direction between the indexer robot and the processing block. The main robot transports substrates among the plurality of back surface cleaning units, the substrate platform, and the reversing unit.
    Type: Grant
    Filed: February 12, 2008
    Date of Patent: June 24, 2014
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventor: Ichiro Mitsuyoshi
  • Publication number: 20140169916
    Abstract: A machine is capable of loading and unloading materials from a product. The product is capable of loading the materials and ejecting the materials. The machine includes a containing device and a transferring device. The containing device includes a containing assembly for receiving the materials; and an ejecting assembly for driving the materials out of the containing assembly. The transferring device is positioned between the product and the containing device. The transferring device transfers the materials ejected from the containing assembly to the product and transfers the materials ejected from the product to the containing device. When the transferring device releases the materials, the materials are capable of sliding into the containing assembly.
    Type: Application
    Filed: October 30, 2013
    Publication date: June 19, 2014
    Applicant: HON HAI PRECISION INDUSTRY CO., LTD.
    Inventor: TA-TUNG LIN
  • Publication number: 20140119857
    Abstract: A highly efficient Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and at least one vertical carousel stocker having a plurality of storage bins. The overhead hoist transport subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route, which runs adjacent to the carousel stocker, thereby allowing the overhead hoist transport vehicle to access a WIP part directly from one of the storage bins. At least one of the storage bins includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the overhead hoist transport vehicle.
    Type: Application
    Filed: November 14, 2013
    Publication date: May 1, 2014
    Applicant: Murata Machinery Ltd.
    Inventors: Brian J. Doherty, Thomas R. Mariano, Robert P. Sullivan
  • Patent number: 8701862
    Abstract: A disk transportation device includes a pair of rotation arms that are rotatable respectively about a fulcrum shaft extending in the same direction as the axial direction of a center shaft of a disk-shaped recording medium in both sides thereof that pinch the transportation passage of the disk-shaped recording medium transported between a disk changer and a disk drive device; and four transportation rollers of which two at a time are rotatably supported on the pair of rotation arms respectively, wherein the four transportation rollers contact the outer peripheral surface of the disk-shaped recording medium respectively and the pair of rotation arms are rotated in opposite directions to each other in a state where one of the transportation rollers at a time is supported at the pair of the rotation arms respectively contact the outer peripheral surface of the disk-shaped recording medium.
    Type: Grant
    Filed: May 1, 2012
    Date of Patent: April 22, 2014
    Assignee: Sony Corporation
    Inventors: Takeharu Takasawa, Takeshi Kubo, Naofumi Goto, Akira Suzuki
  • Publication number: 20140023461
    Abstract: A manufacturing system includes a gantry module, having an end effector, for moving workpieces from a conveyor system to a working area, such as a swap module. The swap module removes a matrix of processed workpieces from a load lock and place a matrix of unprocessed workpieces in its place. The processed workpieces are then moved by the gantry module back to the conveyor. Due to the speed of operation, the end effector may build up excessive electrostatic charge. To remove this built up charge, grounded electrically-conductive brushes are strategically positioned so that, as the end effector moves during normal operation, it comes in contact with these brushes. This removes this built up charge on the end effector, without affecting throughput. In another embodiment, the end effector moves over the brushes while the swap module is moving matrix to and from the load lock.
    Type: Application
    Filed: July 22, 2012
    Publication date: January 23, 2014
    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: Jason Schaller, Robert Brent Vopat
  • Publication number: 20140017042
    Abstract: An apparatus is provided for lifting a substrate. The apparatus comprises a first piece and a second piece. The apparatus further comprises a set of first contact points in a plane and a set of second contact points, where at least one contact point from each set is present on the first piece and the second piece. The apparatus also comprises an actuator that translates the first piece, substantially parallel to the plane, between a first position and a second position relative to the second piece. Additionally, the first position arranges the set of first contact points so that all of the contact points of the set of first contact points are able to engage the substrate, and the second position arranges the set of second contact points so that all of the contact points of the second set of contact points are able to engage the substrate.
    Type: Application
    Filed: July 10, 2012
    Publication date: January 16, 2014
    Applicant: LAM RESEARCH CORPORATION
    Inventors: Matthew J. RODNICK, Brandon L. SENN, Andrew J. NAGENGAST, Richard M. BLANK
  • Patent number: 8616824
    Abstract: An apparatus for transferring and moving elements that are removably associable with an operating machine comprises a moving arrangement suitable for receiving and supporting the elements, the moving arrangement being movable for transferring to and/or removing from the operating machine the elements; the operating machine comprises a supporting arrangement configured for receiving from and giving to the apparatus the elements, the supporting arrangement in turn comprising hooking elements suitable for abutting and locking abutting elements of the elements.
    Type: Grant
    Filed: April 4, 2007
    Date of Patent: December 31, 2013
    Assignee: IMA Life S.R.L.
    Inventors: Claudio Trebbi, Alessandro Bisi, Francesco Sanmartin
  • Publication number: 20130343840
    Abstract: A transport apparatus that supports and moves a substrate by using a robot hand between a plurality of chambers includes a first detection unit that detects the substrate, in a first stop position of the robot hand, using a first detection position set on one surface of the substrate supported by the robot hand, and a second detection unit that detects the substrate, in a second stop position of the robot hand, using a second detection position set on the one surface of the substrate supported by the robot hand.
    Type: Application
    Filed: March 16, 2012
    Publication date: December 26, 2013
    Applicant: ULVAC, INC.
    Inventor: Yoshinori Fujii
  • Patent number: 8590135
    Abstract: A method for loading and unloading a machining machine for machining boards that includes for loading the machining machine, the changing table is loaded with a board to be machined, whereby the board is separated from the first storage place and is deposited on a changing table. The changing table is conveyed together with the board to the machining machine. For unloading the machining machine, the changing table is conveyed together with a machined board to the second storage place and is then unloaded, wherein the machined board is separated from the changing table and deposited on the second storage place, wherein the unloading of the changing table includes conveying the changing table and the machined board to an unloading place in an area above the second storage place and the machined board is separated from the changing table at the unloading place.
    Type: Grant
    Filed: December 18, 2007
    Date of Patent: November 26, 2013
    Assignee: Bystronic Laser AG
    Inventors: Stefan Jost, Jürg Zimmerli, Jürg Messer
  • Publication number: 20130309050
    Abstract: To provide a work transfer apparatus which can transfer works at high speed with controlling respectively the posture of the right and left of works. The work transfer apparatus includes an arm moving back and forth between machines in order to transfer work(s), a crossbar coupled to the arm, and a pair of right and left work holding devices provided at the left and right sides of the crossbar and tilt drive devices being provided on the arm, respectively controlling the work holding devices to rotate around an axis of a longitudinal direction of the crossbar.
    Type: Application
    Filed: May 14, 2013
    Publication date: November 21, 2013
    Applicant: AIDA ENGINEERING, LTD.
    Inventor: Keisuke TAKEDA
  • Publication number: 20130280017
    Abstract: A substrate processing system 10 includes a multiple number of substrate processing units 40A and 40B having substrate processing modules 40a and 40b, respectively; substrate buffers 30a and 30b which respectively correspond to the substrate processing units 40A and 40B; and a first substrate transfer device 50 configured to take out substrates W from substrate receptacles 20 on substrate mounting tables 25 into substrate buffers 30a and 30b. When a second substrate transfer device 60b of the substrate processing unit 40B is broken down, a substrate W remaining in the substrate buffer 30b corresponding to the substrate processing unit 40B is delivered into the substrate buffer 30a corresponding to the substrate processing unit 40A by a substrate delivery device 35.
    Type: Application
    Filed: April 17, 2013
    Publication date: October 24, 2013
    Applicant: Tokyo Electron Limited
    Inventor: Tomohiro Kaneko
  • Publication number: 20130236276
    Abstract: A system for handling sample vials includes a vault for receiving a series of storage cartridges. Inside the cartridges are one or more discs providing vial recesses. In multidisc cartridges, through passages are provided to place and retrieve vials into and from the subjacent discs. A pick up device is moved until it aligns with a selected vial and the vial is pneumatically removed. A device is provided to reverse orientation of a vial moving through the system. A venturi operated system is provided including symmetrical bleed off ports to propel vials through the system without inducing excessive spinning of the vials. A piping system from a central bank to a multiplicity of analytical instruments includes a minimum number of through conduits and a diverter at each instrument location for sending the vial either to the instrument or downstream toward another diverter and instrument.
    Type: Application
    Filed: March 8, 2012
    Publication date: September 12, 2013
    Inventor: Daniel T. Richter
  • Publication number: 20130209200
    Abstract: A carrier device according to an aspect of an embodiment includes a carrier chamber, a robot that is placed near one longitudinal-side wall in the carrier chamber, and a linear moving mechanism that has a track by which the robot is linearly moved in the longitudinal direction of the carrier chamber. The arm of the robot is defined to a length by which the arm does not interfere with the other longitudinal-side wall even if the arm is rotated around an arm spindle. The track of the linear moving mechanism has a length by which the leading end of the hand perpendicular to the track reaches a predetermined position in a connecting hole located at an end among connecting holes provided in the longitudinal-side wall.
    Type: Application
    Filed: December 26, 2012
    Publication date: August 15, 2013
    Applicant: KABUSHIKI KAISHA YASKAWA DENKI
    Inventor: KABUSHIKI KAISHA YASKAWA DENKI
  • Publication number: 20130202389
    Abstract: A pallet changing device (40) for changing pallets on a machine tool comprises a changing means (15) comprising connecting elements (26, 28) for releasably connecting the pallet changing device (40) to pallets (7, 8), a rotational drive means (19) for rotating the changing means (15) comprising connecting elements (14a, 14b) in a working plane (18), and a lifting means (20) for raising and lowering the changing means (15) and thus the working plane (18) within a workspace (21). The rotational drive means (19) is arranged outside the workspace (21).
    Type: Application
    Filed: February 5, 2013
    Publication date: August 8, 2013
    Applicant: DECKEL MAHO PFRONTEN GMBH
    Inventor: Deckel Maho Pfronten GmbH
  • Patent number: 8504194
    Abstract: A substrate processing apparatus includes: a plurality of substrate processing sections arranged alongside a transport passage; a standby mechanism which retains a substrate in standby, the standby mechanism being movable along the transport passage; a transport mechanism which transports the substrate between the standby mechanism and each of the substrate processing sections, the transport mechanism being movable along the transport passage; a first movement mechanism which moves the transport mechanism along the transport passage; and a second movement mechanism which moves the standby mechanism along the transport passage.
    Type: Grant
    Filed: March 11, 2010
    Date of Patent: August 6, 2013
    Assignee: Dainippon Screen MFG. Co., Ltd.
    Inventor: Ichiro Mitsuyoshi
  • Patent number: 8474117
    Abstract: There is provided a machine tool capable of housing workpieces of different sizes in a same workpiece storage unit without requiring a new workpiece storage unit. In a machine tool including a workpiece storage unit having a plurality of housing spaces housing workpieces and a processing machine processing a workpiece supplied from one of the housing spaces, the workpiece storage unit is structured so that the size of each housing space is changeable.
    Type: Grant
    Filed: June 1, 2010
    Date of Patent: July 2, 2013
    Assignee: Mori Seiki Co., Ltd.
    Inventors: Tatsuhiko Kuriya, Tsuyoshi Fujimoto, Hiroshi Kamo, Hidehito Ota, Hiroki Nagahara
  • Patent number: 8459442
    Abstract: An inter-travel-paths transport device transports articles between a first article transfer location and a second article transfer location. It extends in a space upwardly of the article processing devices and connects the first and second article transfer locations. A first transport device transfers an article to or from an article transferring point by vertically moving its holding portion and of transferring an article to or from the first article transfer location by slidingly moving the holding portion at a position which overlaps with the first travel path portion. A second movement slide transport device vertically transfers an article to or from an article transferring point in the same manner with respect to the second travel path portion.
    Type: Grant
    Filed: May 29, 2012
    Date of Patent: June 11, 2013
    Assignee: Daifuku Co., Ltd.
    Inventors: Yuichi Morimoto, Takeshi Chuma
  • Publication number: 20130051958
    Abstract: A pallet changing system which utilizes the moving function itself of a machine head at a machining center for conveying a pallet and a configuration of a machining center equipping the system, combines a machine head 2 for machining a workpiece with a pallet changing unit 1 having a pallet changing arm 11 which can be rotated by a motor 13 and then allowed to move, by which a pallet 3 is conveyed, and the new pallet 3 for changing is changed with the existing pallet 3 gripped by a pallet clamping device 4 by turning the pallet changing arm 11, and a machining center which equips the above system and also machines a workpiece by using the machine head 2.
    Type: Application
    Filed: December 15, 2011
    Publication date: February 28, 2013
    Applicant: MATSUURA MACHINERY CORPORATION
    Inventors: Kouichi Amaya, Toshihiko Kato, Masaki Kaneko
  • Patent number: 8366371
    Abstract: A battery movement, storage, and charging system for large size batteries used in lift trucks includes spaced, parallel storage racks, each of which have multiple storage and charging bays. A battery transport tower is positioned in an aisle between the storage racks and is moveable horizontally between the two rows of racks. The tower includes an extendable fork lift mounted which may rotate around the axis of the tower as well as move vertically upwardly or downwardly on the tower. A battery exchanger loads a discharged battery from a lift truck, places it on a pallet and then transfers the pallet and battery to a transfer bay in a storage rack where the tower forklift moves a pallet and battery to a selected charging bay.
    Type: Grant
    Filed: November 30, 2007
    Date of Patent: February 5, 2013
    Assignee: Sacket Material Handling Systems, Inc.
    Inventors: Leonard J. Maniscalco, Paul R. Egger, Daniel J. Dwyer