Abstract: There is described a wafer processing system for thinned wafers that are easily broken during handling. The system protects against breakage during handling and provides for temperature controls during processing.

Abstract: Each storage provided for an storing apparatus is provided with: a driving device capable of reciprocating the load in a horizontal one direction and in a vertical direction; and a rack having a plurality of rack portions at a plurality of stages in the vertical direction, each stage including one or a plurality of rack portions in the horizontal one direction, the rack portion capable of accommodating or putting thereon the load to be displaced by the driving device. The storing apparatus is provided with a plurality of controllers, which control the loading and unloading in respective groups, each group comprising at least one or a plurality of storages of the plurality of the storages, and which can perform complementary control with each other.

Abstract: A robot comprises a fixed member that has a lower end, a movable member, and an elastic sheet member. The movable member is supported by the fixed member to be movable between an uppermost position and a lowermost position of a movable range given to the movable member in a vertical direction relative to the fixed member. This movable member has a lower end at which an operation tool is provided The elastic sheet member has both ends. Of these ends, one end is fixed to the lower end of the fixed member and the other end is fixed to the lower end of the movable member. This sheet member droops when the movable member moves up to the uppermost position of the fixed member.

Abstract: A load port particularly well-suited to application in batch processing semiconductor manufacturing processes is provided with a load port main body having a main table onto which a FOUP containing wafers is placed, a mapping means for mapping the wafers contained within the FOUP, and the like, and is further provided with a displacing means for moving the FOUP placed on the main table between the main table and a predetermined position removed a distance from the load port main body, in which the displacing mechanism is provided with an open space enabling the passing of a FOUP which contains wafers between the aforementioned predetermined position and a piece of equipment located adjacent to the load port main body.

Abstract: System and method for sortation of picked inventory into individual orders in an order fulfillment process, for example order fulfillment processes in materials handling facilities. Collections of items picked from inventory for multiple orders are stowed to locations at a stow and sortation station. The items for a particular order may be stowed to two or more different locations, and items for two or more orders may be stowed to one location; no particular location is assigned to or reserved for each order. Thus, no space is allocated or reserved for incomplete orders at the station. When all items for a particular order are stowed to locations at the station, the order may be picked from the various locations at the station and placed into order receptacles. The order receptacles may be shipping containers.

Abstract: A package handler is disclosed, by which productivity and work efficiency can be enhanced in a manner of automatically performing a work of unloading a cut package from a cutting jig (5) and a work of loading a new uncut package on the cutting jig. The present invention includes a body (1), an on-loader part (10) provided to one side of the body (1) to have a jig (5) provided with a plurality of slots (5a) accommodating a plurality of cut packages therein, a cut tray part (20) in which an empty tray to accommodate a package unloaded from the jig (5) is loaded, an uncut tray part (30) in which a tray accommodating the package to be inserted in the jig (5) is loaded, and a package loading/unloading part unloading the cut package from jig (5) of the on-loader part (10), the package loading/unloading part loading the uncut package in the uncut tray part (30) in the jig (5).

Abstract: A processing station for a processing line, having a module platform (12) and a plurality of withdrawable modules (14) that can be introduced into it has a transporting device (40, 42) for transporting workpieces (59) to be processed at the processing station (10). According to the invention, the transporting device (40, 42) includes a plurality of part-transporting devices (43), and one part-transporting device (43) is associated with each withdrawable module (14) and is solidly connected to the withdrawable module (14). Moreover, at least some of the part-transporting devices 43 include a first transportation path (40), which is embodied for transporting a workpiece (56) essentially over the width of the withdrawable module (14) in a first transporting direction (T1).

Abstract: An automated cassette and slide handling system is disclosed which organizes microscope slides in cassettes, automatically and sequentially removes individual slides from their respective cassettes, positioned each slide under the microscope as provided by the protocol, and after examination returns the slide to its proper cassette.

Abstract: Method and system for obtaining a liquid sample from a particulate matter-containing liquid in, e.g., a specimen container. A receptacle is used that has an inlet and a chamber for collecting the liquid sample. A discharge passage accommodates upward flow of liquid from the container. The discharge passage preferably has an upper discharge port, and at least one intake submerged in the liquid in the container. A flow-metering passage prevents particulate matter above a predetermined size from passing into the receptacle chamber. Liquid transfer commences after the receptacle inlet is placed in liquid-tight communication with the discharge port. Operation of mechanized system also is disclosed, as well as an arrangement and method for handling multiple receptacles at a liquid transfer station.

Abstract: A machining center is provided enabling a high degree of machining automation. The machining center includes a master machining head including multiple spindles mounted fixedly to the machining base. A workpiece transport system transports workpieces between machining stations and also moves it toward and away from the machining stations which are preferable fixedly mounted. Registration pins mounted to the master machine head register with a receiving socket carried by the workpiece platform or associated workpiece fixture. A robot actuator is provided which loads and unloads workpieces with the machining center 10 and can also potentially provide other functions such as tool inspection tool changing, workpiece repositioning.

Abstract: A work handling apparatus of the present invention includes a pair of traveling guides (20, 20?) provided so as to extend in a front-and-rear direction X at right and left sides, a pair of direct-acting arms (30, 30?) provided so as to travel independently on the pair of traveling guides and are extendable from contracted positions at which the arms oppose to each other and avoid mutual interference in a right-and-left direction Y to extended positions at which the arms overlap with each other, an operation spot (41) arranged in an operation area (40) sandwiched between the pair of traveling guides for performing a predetermined operation to a work and work tools (60, 60?) attached to the pair of direct-acting arms (30, 30?) respectively for transferring the work between a work storage area (50) and the operation spot (41) or performing an operation after transfer.

Abstract: A system comprising a load port and a transfer module. In one embodiment, the load port includes a plate having a first opening and a second opening, a first workpiece access port, a second workpiece access port and at least one storage location. The storage location(s) may be located either beneath the second workpiece access port or above the first workpiece access port. The transfer mosule, which is located adjacent the load port, includes a load arm for moving the workpiece containers between the first workpiece access port, the second workpiece access port, any of the storage shelves and a material transport system.

Abstract: A device for assembling a composite structure is disclosed. An illustrative embodiment of the device includes at least one carriage track, a linear rail carriage carried by the at least one carriage track, a yoke assembly carried by the linear rail carriage, a linear actuator assembly engaging the linear rail carriage and adapted to move the linear rail carriage along the at least one carriage track and a pair of mandrel cradles pivotally carried by the yoke assembly. Activation of the linear actuator assembly facilitates movement of the linear rail carriage along the at least one carriage track and pivoting of the pair of mandrel cradles with respect to the yoke assembly.

Abstract: A self-retaining O-ring having at least two radial struts connectively extending from inside surfaces to a central sphere-shaped retainer. The top surfaces of the radial struts are formed below the top surfaces of the O-ring. The central sphere-shaped retainer is connectively formed to the radial struts and extending below the bottom surfaces of the struts. A circular recess is provided for containing and supporting the O-ring, its inside surface is dovetailed. The circular recess has a spherical hole disposed on its center for insertion of the sphere-shaped retainer.

Abstract: An apparatus through which a substrate may be transferred between a first chamber and a second chamber in which the first chamber is maintained at a high temperature relative to the ambient temperature of the second chamber. The apparatus comprises a passageway for receiving the substrate and a thermally isolating interface. The thermally isolating interface reduces heat transfer from the first chamber to the second chamber and allows for transfer of the substrate between the apparatus and the second chamber. The thermally isolating interface includes a hole having dimensions such that the substrate is transferrable through the thermally isolating interface.

Abstract: A manipulating arrangement having a horizontal portal on which a slide is horizontally traversable, an arm being pivotably mounted on the slide about a pivot axis which runs parallel to the portal, and a gripper for at least one of workpieces and tools being arranged on the end of the arm. The slide has an elongated support, on which a further slide is mounted in a vertically traversable manner, and the arm is pivotably mounted on the further slide.

Abstract: A device for transporting cartridges comprises a housing for holding a plurality of cartridges in a temperature controlled environment. A transport system is also provided and has a grasping mechanism for grasping one of the cartridges. The transport system is further used to remove the cartridge from the housing and to place the cartridge into a scanner.

Abstract: A transfer chamber for a substrate processing tool includes a main body having side walls adapted to couple to at least one processing chamber and at least one load lock chamber. The main body houses at least a portion of a robot adapted to transport a substrate between the processing chamber and the load lock chamber. A lid couples to and seals a top of the main body of the transfer chamber. The transfer chamber also has a domed bottom adapted to couple to and to seal a bottom portion of the main body of the transfer chamber.

Abstract: A cleaning processing system including a wafer transfer device, a wafer detecting sensor for detecting a wafer, a memory for storing the position and direction of an extra wafer present inside the cleaning processing system when the power supply is cut off, an alarm device for generating an alarm in the case where the information detected by the wafer detecting sensor when the power supply to the cleaning processing system is turned on differs from the wafer information taken out of the memory, an alarm canceling section for canceling the alarm, an apparatus control section for controlling the wafer transfer device to recover the extra wafer, and a recovery start-up section for emitting an instruction to start the wafer recovery to the apparatus control section.

Abstract: A multi-chamber system of an etching facility for manufacturing semiconductor devices occupies a minimum amount of floor space in a cleanroom by installing a plurality of processing chambers in multi-layers and in parallel along a transfer path situated between the processing chambers. The multi-layers number 2 to 5, and the transfer path can be rectangular in shape and need only be slightly wider than the diameter of a wafer. The total width of the multi-chamber system is the sum of the width of one processing chamber plus the width of the transfer path.

Abstract: A latch sensor for a pod transport gripper for transferring semiconductor wafers is disclosed. The transport gripper has a left bar and a right bar, as well as a cross bar connecting the left and the right bars. The gripper also has a left clamp and a right clamp disposed on interior sides of the left bar and the right bar, respectively, to clamp a pod, such as a front-opening unified pod (FOUP), for transport. A number of latches are disposed on the cross bar, and correspond to a number of latch holes of the pod. The gripper has at least one latch sensor disposed on either the left bar, the right bar, or both, to determine whether the latches have properly engaged the latch holes of the pod.

Abstract: A method and apparatus are provided for detecting contact between a wafer blade of a wafer-handling robot and a component in a wafer-handling system. The robot moves the wafer blade within the system while the wafer blade is maintained at an electrical potential, which is different from an electrical potential of the component. Contact between the wafer blade and the component is detected by sensing a change in the electrical potential of the wafer blade during the contact.

Abstract: The present invention comprises a loading device for automating transfer of a plurality of probes between a cassette within which the plurality of probes are initially constrained and an analytical instrument, e.g., mass spectrometer. The loading device may be configured to accept a single or a plurality of cassettes each removably constraining a plurality of probes to be analyzed. The loading device may permit each of the plurality of cassettes to be independently interchanged with a separate cassette removably constraining a separate plurality of probes during mass spectrometric analysis, or for additional cassettes to be loaded into the device during analysis. In a useful embodiment, the loading device comprises a cassette transport assembly and a probe insertion assembly. The cassette transport assembly linearly translates one or more cassettes to align the cassette(s) with respect to the mass spectrometer so that a probe may be translated therebetween by the probe insertion assembly.

Abstract: A vacuum chamber for transporting at least one workpiece has two or more openings defining respective opening areas for treating or handling the at least one workpiece. A transport device is arranged relative to the openings and includes a drive shaft rotatable around a drive shaft rotational axis. Two or more conveyors transport at least one workpiece. A linear driver is operationally independent to linearly move respective ones of the two or more conveyors relative to the drive shaft, with a drive component in a radial direction relative to the axis. An obstructing member is provided for closing the openings when one of the conveyors is positioned adjacent to the openings by rotating the transport device and is moved by the linear drive towards the opening.

Abstract: The present invention provides an apparatus and method for substrate transport. In systems according to the invention, at least a first and second chamber are provided. The first chamber may be a load lock and the second chamber a processing chamber. A substrate transfer shuttle is provided and is moveable along a linear path defined by guide rollers between one position in the first chamber and another position in the second chamber. In this way, the substrate may be transferred, in both a forward and a reverse direction, between the first chamber and the second chamber. The substrate transfer shuttle is structured so that a substrate may be removed therefrom by moving a support in one of the chambers from a lowered position to an intermediate position, after which the substrate transfer shuttle may be removed from the chamber.

Abstract: A machine tool has a pallet changer at a front of a machine body for automatically changing a preceding-process pallet loaded with a machined workpiece thereon for a next-process pallet loaded with an unmachined workpiece thereon. A working space is provided between the machine body and the pallet changer. Thus, a machine tool, as well as a pallet changer used in the machine tool can be provided that allows a working space to be ensured without causing any complications for the structure and that has a wide range of applications.

Abstract: A mobile, self-evacuating, micro-environment system for transit and storage of substrates between two or more processing chambers in the manufacture of semiconductor devices is provided where the system includes a mobile cart, a vacuum sealable container to hold the substrates, a vacuum source having a portable power source, located on the cart and capable of generating a vacuum in the container, and a docking valve to mate with a corresponding valve on each of the processing chambers, where the docking valve and the corresponding valve are securable to one another to form a substantially vacuum-tight seal and openable, while mated, to permit unloading and loading of substrates between the container and the processing chamber. A method of using the system is also provided.

Abstract: The present invention comprises a loading device for automating transfer of a plurality of probes between a cassette within which the plurality of probes are initially constrained and an analytical instrument, e.g., mass spectrometer. The loading device may be configured to accept a single or a plurality of cassettes each removably constraining a plurality of probes to be analyzed. The loading device may permit each of the plurality of cassettes to be independently interchanged with a separate cassette removably constraining a separate plurality of probes during mass spectrometric analysis, or for additional cassettes to be loaded into the device during analysis. In a useful embodiment, the loading device comprises a cassette transport assembly and a probe insertion assembly. The cassette transport assembly linearly translates one or more cassettes to align the cassette(s) with respect to the mass spectrometer so that a probe may be translated therebetween by the probe insertion assembly.

Abstract: With a rail which is used by both a linear conveyor vehicle and a track guided vehicle, the traveling loops 2,3, the short-cuts 4˜7 and the access routes 8˜11 are provided. The traveling loops 20˜25 are arranged in a rail for a track guided vehicle, and are connected to the traveling loops 2,3 at the diverging/converging point 30. A linear conveyor vehicle system and a track guided vehicle system are integrated to convey articles efficiently.

Abstract: Described is an arrangement for feeding and/or taking away magazines intended to receive individual articles, to and/or from an apparatus for treating and/or handling the articles, wherein the apparatus comprises a first transport element which receives a supply of magazines for feeding articles to be treated, and a second transport element which receives a supply of magazines for carrying away treated articles, with the transport elements being arranged in mutually juxtaposed relationship and movable in a horizontal plane. A third transport element is operatively associated with the first and second transport elements and movable between a first position in which it is towards the first and second transport elements and at least one second position in which it is away from the first and second transport elements. The third transport element has at least one movable carrier for at least one magazine.

Abstract: A vacuum chamber for transporting at least one workpiece has two or more openings defining respective opening areas for treating or handling the at least one workpiece. A transport device is arranged relative to the openings and includes a drive shaft rotatable around a drive shaft rotational axis. Two or more conveyors transport at least one workpiece. A linear driver is operationally independent to linearly move respective ones of the two or more conveyors relative to the drive shaft, with a drive component in a radial direction relative to the axis. An obstructing member is provided for closing the openings when one of the conveyors is positioned adjacent to the openings by rotating the transport device and is moved by the linear drive towards the opening.

Abstract: A transfer chamber is provided. The transfer chamber has a temperature adjustment plate located in an upper portion of the chamber, a substrate handler located in a lower portion of the chamber, and a rotatable substrate carriage adapted so as to raise and lower between an elevation above a substrate supporting surface of the temperature adjustment plate, and an elevation below a substrate supporting blade of the substrate handler. The rotatable substrate carriage is adapted to transfer a substrate to and from the substrate supporting surfaces of the temperature adjustment plate, and of the substrate handler blade.

Abstract: An assembly device, in particular a fully automatic assembly device for producing microsystem technical products and for assembling components in the semiconductor industries, comprising an assembly table, at least one material transport system that transports the products to be placed with components, at least one transport system arranged on the assembly table, and at least one component transport unit that is arranged and displaceable perpendicularly to the transport system and that comprises at least one assembly head, said component transport unit(s) is/are arranged on one or more portals displaceable by means of the transport system in parallel to the direction of transport of the products to be placed with components, which products are in turn displaced by the material transport system.

Abstract: Apparatus for feeding electronic components comprises a slide base, a plurality of tape cassettes mounted on the slide base, a linear motor 14, and a control unit for the motor. The control unit includes a motor driver 61, a memory device 66, and a control device 67 which controls the motor driver 61 using data stored in the memory device 66. The control device 67 adjusts the data for controlling the motor according to the load weight of the slide base. The data is used for properly moving the slide base carrying a plurality of tape cassettes to a position for feeding the components.

Abstract: Novel methods and apparatus are disclosed for handling carriers for soft contact lenses in a lens manufacturing system. In accordance with a first aspect of the invention, article handling devices are located beneath a pre-cure station and a curing station of the system to move lens carriers within those stations. As a result of locating these devices beneath these stations, the desired movement of the carriers can be achieved without increasing the footprint of the station. Pursuant to a second aspect of the invention, a complete set of assemblies is provided for moving a multitude of lens carriers into, through, and out from the pre-cure station and the curing station. This set of assemblies accomplishes this movement in a completely automated, high speed, mass production basis. In accordance with a third aspect of the invention, the curing station is provided with an intelligent buffer.

Abstract: A substrate processing system includes a primary processing assembly and secondary processing assembly. The secondary processing assembly has one or more interconnected modules and includes one or more process stations. The primary and secondary processing assemblies are connected by a vacuum conveyor, so that the substrates remain in vacuum during transport. The secondary processing assembly may include one or more modules which are interconnected to provide a desired system configuration. A dual processing module, including first and second process stations, is selectably operable in a serial mode or a parallel mode.

Abstract: A multi-chamber system of an etching facility for manufacturing semiconductor devices occupies a minimum amount of floor space in a cleanroom by installing a plurality of processing chambers in multi-layers and in parallel along a transfer path situated between the processing chambers. The multi-layers number 2 to 5, and the transfer path can be rectangular in shape and need only be slightly wider than the diameter of a wafer. The total width of the multi-chamber system is the sum of the width of one processing chamber plus the width of the transfer path.

Abstract: A substrate processing apparatus includes a substrate holder for holding a plurality of wafers and being loaded therewith into a process tube through an opening in the process tube, in which a plurality of the wafers are processed, a wafer transfer system for charging a plurality of the wafers to the substrate holder, a boat waiting chamber installed on a line passing through the opening in the process tube and substantially hermetically accommodating the substrate holder before and after the substrate holder is loaded into and unloaded from the process tube and a wafer transfer chamber for substantially hermetically accommodating the wafer transfer system. An oxygen concentration of the boat waiting chamber is different from that of the wafer transfer chamber.

Abstract: A magnetic film forming system which can always apply a magnetic field to a substrate in a constant direction is disclosed. The magnetic film forming system includes a vacuum container, a substrate pallet for holding a substrate in the vacuum container and being removable while still holding the substrate, from the vacuum container, and means for supporting the substrate pallet. Magnetic field generation means are fixed to the substrate pallet for applying a magnetic field to the substrate. When the substrate pallet is removed from the vacuum container, the magnetic field generation means are also taken out together with the substrate.

Abstract: An apparatus and method for controlling wafer temperature and environment is provided. The apparatus includes a batch processing fixture for batch processing wafers at a first elevated temperature. The batch of wafers is not substantially ramped in temperature within the batch processing fixture. The apparatus also includes a single wafer processing apparatus for rapidly ramping temperature of a wafer of the batch from the first elevated temperature wherein a uniform temperature across the wafer is maintained during the ramping. Another embodiment of the apparatus (10) includes an RTP chamber (20) having an inert or reducing environment and that includes a pedestal (24) for holding a single wafer (16) and a heater unit (22) arranged so as to uniformly and rapidly heat the single wafer.

Abstract: A method and apparatus are provided for substrate handling. In a first aspect, a temperature adjustment plate is located below a substrate carriage and is configured such that a substrate may be transferred between the temperature adjustment plate and the substrate carriage by lifting and lowering the substrate carriage above and below the top surface of the temperature adjustment plate. The temperature adjustment plate may be configured to heat and/or cool a substrate positioned thereon. In a second aspect, the substrate carriage is magnetically coupled so as to rotate and/or lift and lower magnetically, thereby reducing particle generation via contact between moving parts (and potential chamber contamination therefrom). In a third aspect, a substrate handler positioned below the substrate carriage is both magnetically coupled and magnetically levitated, providing further particle reduction.

Abstract: Sheet metal working system includes a housing rack provided with a plurality of shelves for housing pallets, an elevator provided on a side of the housing rack, and a pallet holder located on a bottom shelf of the housing rack for temporarily holding a pallet transported by pallet transporter. Also provided is a workpiece separator located above the pallet holder, a workpiece table located adjacently to the housing rack, a sheet working machine and a workpiece piler arranged so as to sandwich the workpiece table, and a loader that moves among the workpiece table, the machine and the workpiece piler.

Abstract: This invention relates to a wafer inspection apparatus having various types of structures for realizing a reduction in convey time of a selected wafer as an inspection target, an improvement in operability, or the like. In particular, this wafer inspection apparatus has a first convey system and a second convey system. The first convey system is movable in a direction perpendicular to a wafer convey reference surface and has a plurality of arm portions operable independently of each other. The second convey system has a plurality of rotary arm portions that are movable in the direction perpendicular to the wafer convey reference surface. Thus, a structure in which the wafer convey time is shorter than in a conventional wafer inspection apparatus is realized. This wafer inspection apparatus also has a lifting unit with a specific structure, thus realizing an improvement in operability of the apparatus or the like.

Abstract: A cable assembler which makes it possible to carry out in a short tact time the assembling of cable terminal which needs a plurality of jigs and tools. A robot delivers a bobbin of cable to various stations in a working area. Processing in accordance with the invention reduces tact time.

Abstract: A display panel transporting apparatus and a display panel transporting unit improves efficiency of display panel manufacturing processes and a display panel production line. The display panel transporting unit includes a loaded cassette transporting unit for transporting loaded cassettes in which display panels are housed in a vertical direction, an empty cassette transporting unit for transporting empty cassettes, and a display panel transporting unit for removing display panels from a loaded cassette and loading the display panels in an empty cassette.

Abstract: A substrate transfer system is used in an in-line film deposition system. The substrate transfer system is provided with an auxiliary vacuum chamber and a main vacuum chamber. The auxiliary vacuum chamber has a plurality of first substrate cassettes. The main vacuum chamber is communicated with another vacuum chamber through which carriers are transferred along a transport path. The main vacuum chamber has two robots and a plurality of second substrate cassettes arranged in parallel on which the substrates is placed. The second substrate cassettes are arranged between the two robots. The substrates are disk-shaped substrates having center holes. The center holes are utilized as hook parts during a pickup operation. Thereby the method of mounting substrates in the holders of carriers etc. is improved without changing the operating speed of the robots. Therefore the amount of substrates transported per unit time is increased and the processing capacity of the substrate processing system is enhanced.

Abstract: A flexible, modular thin film deposition machine comprises a number of batch process stations which define a batch process path. At least one of the batch process stations is a thin film deposition station including a serial deposition chamber and an inter-chamber disk transfer mechanism. The disks move in batches along the process path, being individually processed only at the deposition station. Within the serial sputtering chambers of at least one deposition station there is at most partial environmental separation, whereas between different deposition stations the separation is complete. The resulting simplification of the transport mechanism provides for a high throughput rate while simultaneously minimizing contamination of individual thin film layers.

Abstract: A transferring device which operates on an apparatus for producing optical discs comprising several different work stations, each arranged to perform a predetermined operation on the discs being processed. The transferring device performs a sequential transfer of each disc between the different work stations following a path comprising two parallel advance lines, one forward line and one return line, respectively, which are disposed laterally on opposite sides relative to the longitudinal extension axis of a support arm. The support arm supports a first and a second series of pick-up heads arranged to execute the optical disc transfer on the forward and return lines during the forward and return strokes of the support arm, respectively.

Abstract: The harness accommodating device (1) of the present invention is equipped with a transfer section (10) which is installed on the discharge side of the harness discharge groove (67) of the harness manufacturing apparatus (60) and which temporarily holds the harnesses (80), a chuck (20) which grips and conveys the harnesses (80) held by the transfer section (10), and a bundle receiver (30) which accommodates the harnesses (80) conveyed by the chuck (20).

Abstract: A magnetic film forming system which can always apply a magnetic field to a substrate in a constant direction. The magnetic film forming system comprises a vacuum container, a substrate pallet for holding a substrate in the vacuum container and being removable with the substrate held, from the vacuum container, and means for supporting the substrate pallet. Magnetic field generation means are fixed to the substrate pallet for applying a magnetic field to the substrate. When the substrate pallet is removed from the vacuum container, the magnetic field generation means are also taken out together with the substrate.