Abstract: A passive mechanism for centering a wafer on a chuck and with respect to a backside exclusion gas ring includes a plurality of wheels that are rotatably mounted in a circular pattern at the top surface of a chuck. The axis of rotation of each wheel is parallel to the top surface of the chuck and perpendicular to a radius extending outward from the centerpoint of the chuck surface. When a wafer is placed on the chuck, its edge contacts the wheels and, by its own weight, the wafer moves toward the center of the chuck, thereby centering itself. The wafer either slides on the wheels or, if the frictional force between the wafer and one or more of the wheels is great enough, the wafer causes the wheel to turn. The wheels may be mounted on the chuck, a carrier ring or a wafer transfer arm for moving wafers between processing stations. In one embodiment the alignment wheels are mounted on a carrier ring, and a second alignment mechanism aligns the carrier ring to the chuck.

Abstract: A method and an apparatus for examining wafers includes a wafer cassette having a capacity for holding a plurality of wafers located on each of first and second locaters. The wafer cassettes are fixedly held on the first and second locaters during the wafer examination. A first indicator shows that the wafer cassettes are fixedly held on the first and second locaters. A robot arm sequentially carries each of the wafers between the first locator, an aligner, a scanning chamber and the second locater to examine the wafers. The wafer cassettes are released when the examination is complete, and a second indicator shows that the examination is complete.

Abstract: An apparatus for presenting a flexible article, longer than it is wider, in a predetermined orientation which has an orientation for tumbling the article generally about one direction while retaining the article so that it can rotate about another direction while it is being tumbled. The retention mechanism on the apparatus includes a retention face and is moveable between a first position in which the retention face is disposed to receive the article generally downwardly from the orientation head while it is being tumbled thereby, and a second position displaced from the first. Additionally, when the article is received on the retention face, it can be detected if it is correctly orientated on the retention face. In response to this detection, the retention mechanism moves to the second position and the article is received in a predetermined orientation from the retention face at the second position of the retention mechanism.

Abstract: A substrate support mechanism including a housing made of a magnetically permeable material; a pin located substantially within the housing and having an upper end extending up into a passage which extends up through the bottom of the chamber and into the cavity which contains a substrate during processing; a first magnet assembly on the inside of the housing and mounted on the pin; a carriage structure located outside of the housing; and a second magnet assembly mounted on the carriage structure, wherein the first and second magnet assemblies are positioned relative to each other so that the second magnet assembly causes the pin and the first magnet assembly to magnetically levitate within the housing.

Abstract: The present invention is an orientation flat aligner for preventing the angle deviation of the flat edge of the wafer. This invention applies two new designs to the aligner: (1) The two parallel rollers with different radius instead of two parallel rollers the same radii prevent the problem of the angle deviation to line up the flat edge of the wafer. (2) placing the photosensor on the orientation flat aligner instead of on the sensor bracket avoids the detection error because of the photosensor position relate to the orientation flat aligner position and saves time on checking whether the flat edge of the wafer line up or not.

Abstract: A notched wafer aligning apparatus capable of aligning a number of notched wafers received in a cassette with each other at a predetermined position and facilitating shifting of the thus-aligned wafers to any desired position. A plurality of notch detection rollers are rotatably arranged in juxtaposition to each other on a rotation drive shaft so as to be rotated while being abutted against a lower portion of peripheral edges of the wafers through a lower open end of the cassette. The notch detection rollers are individually rotated due to friction between the notch detection rollers and the rotation drive shaft.

Abstract: An apparatus for conveying a wafer to wafer work suction-holding stage and then discharging a worked wafer from the wafer work suction-holding stage, including a loader side elevator device, a wafer position correcting stage, a wafer work suction-holding stage, a wafer carrying table and an unloader side elevator device which are successively disposed in this order; and the apparatus further including a conveyor which conveys a wafer inside a loader side magazine carried on the loader side elevator device to a point above the positional correction suction-holding stage, a stopper which positions the wafer conveyed by the conveyor to the wafer position correcting stage, and a feeding pawl moving device which operates after the wafer position correcting stage and wafer work suction-holding stage have been moved vertically so that the upper surface of the wafer position correcting stage is at substantially the same height as the upper surface of the stopper and so that the upper surface of the wafer work suction

Abstract: A method and apparatus for rotating wafers in a double sided scrubber without slipping or hesitating. A rotating roller imparts rotary motion to a semiconductor wafer during a double sided cleaning process. The rotating roller and wafer contact at their outer edges and the friction between their outer edges causes the wafer to rotate. The roller has an outer edge with a groove. The wafer edge is pinched inside the groove to create enough friction that when cleaning solutions are applied the wafer does not slip and continues to rotate. Also, the groove allows the roller to pinch the wafer just enough so that when the roller reaches the flat of the wafer, the roller may regain the radius of the wafer without hesitating.

Abstract: A semiconductor processing system, such as a system for scrubbing both sides of a wafer at the same time, that includes a brush box containment apparatus for use with highly-acidic or other volatile chemical solutions, a roller positioning apparatus and a (brush) placement device.

Abstract: An envelope inverter comprises a conveyor (14) arranged below a surface (2) onto which envelopes (6) are delivered through a slot (4). The surface (2) is arranged such that each envelope (6) is unstable thereon, and tends to rotate about the edge (12) of the surface, striking the conveyor (14), which moves in a direction tending to continue the rotating movement until the envelope (6) comes to rest inverted on the conveyor.

Abstract: A transport container for transporting a plurality of semiconductor wafers as stacked therein. The container includes a box-shaped container body having four peripheral walls, and an upper lid for closing and opening an upper opening of the container body. The front wall of the container body is pivotable between an open position and a closed position. The upper lid and front wall are opened when the semiconductor wafers are loaded into or unloaded from the transport container. An apparatus is provided for loading and unloading the semiconductor wafers into/from the transport container.

Abstract: The invention provides a manually operated machine for radially aligning one or more semiconductor wafers. The machine includes an elongated first "notch" roller for rotatably engaging the edge of the wafers, a gear train, and a hand crank for manually rotating the first roller in cooperation with the gear train. The wafers are aligned according to the notches as the wafers are engaged and rotated by the notch roller until the notch in each wafer falls over and is disengaged by that roller. The manual notch finder may also include an elongated second "position" roller for rotatably engaging the edge of the wafers. The position roller is disposed laterally near the notch roller and sized and shaped to engage the edge of the wafers fully along the periphery of each wafer so that the aligned wafers can be positioned to any degree of radial orientation. The invention also provides a combination notch or flat finder machine integrated with a wafer transfer machine.

Abstract: In an electronic component transfer method and apparatus, an electronic component is placed on a suctional top surface of a suction nozzle brought into a protruded posture relative to a component fixing block while the electronic component is drawn by suction by a transfer nozzle which is movable up and down, the electronic component placed on the component fixing block is pressed from above with the transfer nozzle so that the electronic component is sandwiched between the transfer nozzle and the suction nozzle, a position of the suction nozzle is fixed by the suction nozzle fixing stopper, and, in this state, the electronic component is held on the component fixing block by the holding members.

Abstract: An apparatus and method for aligning indexing notches of disk-shaped members, such as semiconductor wafers, include providing an alignment rod that is driven by another roller to cause rotation of the disk-shaped members. The circumferential surfaces of the alignment rod and the drive roller are in frictional contact. Initially, the disk-shaped members rest upon the alignment rod, so that rotation of the alignment rod causes rotation of the disk-shaped members until indexing notches are seated on the alignment rod. In the preferred embodiment, the seating of the indexing notches transfers at least a portion of the weight of the disk-shaped members to a reciprocating structure, such as a comb member. After all of the indexing notches have been aligned, a second weight transfer occurs, with the reciprocating structure following the contour of the drive roller and the disk-shaped members coming to rest on the drive roller. The disk-shaped members can then be uniformly rotated to locate the notches as desired.

Abstract: An apparatus having a series of conveyor belts for flattening and stacking a plurality of flexible, generally planar articles, such as tortillas. The apparatus includes a first conveyor belt extending along first end, upper, second end and lower surfaces of a belt support. The conveyor belt is adapted to move the planar articles placed on the upper surface of the belt support from the first end to the second end. A second conveyor belt is biased against the first belt at the second end of the belt support for applying compressive and lateral forces to the planar articles as they are moved along the second end of the belt support. A third conveyor belt is located beneath the first and second conveyor belts for receiving the planar articles from the first belt, forming stacks of them, and then discharging the stacked planar articles. Motor assemblies drive the first, second, and third conveyor belts.

Abstract: This invention pertains to processing continuous webs such as paper, film, composites, and the like, in dynamic continuous processing operations. More particularly, it relates to transferring discrete parts to a continuous web, whether paper, film, composite, or the like. Specifically, the invention relates to methods and apparatus for taking discrete parts from a source in a taking zone, optionally taking the discrete parts as components of a continuous web, onto a transport head on a transfer assembly, severing the discrete parts from the continuous web if received as part of a continuous web, rotating the transfer assembly about a first axis and correspondingly rotating the transport head about a second axis radial to the first axis, to thereby present the discrete parts to a receiver in a transfer zone, and transferring the discrete parts to the receiver in the transfer zone.

Abstract: An orientation apparatus for aligning indexing notches of disk-shaped members, such as semiconductor wafers, includes a flexible alignment rod that imparts rotation of the disk-shaped members until the indexing notches are registered with the alignment rod. The alignment rod is captured by a displaceable comb member that exposes regions of the rod between adjacent teeth. The teeth ensure that the disk-shaped members are properly aligned. The comb member has a raised operation position in which the disk-shaped members are spaced apart from rollers and has a lowered retracted position in which the weight of the disk-shaped members is transferred to the rollers. A camming mechanism may be used to raise and lower the comb member and alignment rod between the two positions.

Abstract: According to this invention, there is provided a notch position aligning mechanism and a process for using the mechanism including a base which can be vertically movably inserted into a cassette through a lower opening of the cassette for storing a plurality of targets to be aligned having notches formed in edge portions of the targets wherein can be fitted, a rotating/supporting mechanism, including a first rotary member which is arranged on the base, and has a plurality of fitting grooves in which the notches of the targets can be fitted, a second rotary member which can be rotated and is arranged on the base, and a drive unit for rotating at least one of the first and second rotary members, the rotating/supporting mechanism supporting and rotating the targets using the first and second rotary members while the targets are spaced apart from the cassette, and a support member, arranged on the base, for supporting the targets having the notches fitted in the fitting grooves of the first rotary member to stop

Abstract: A lightweight turntable for use in manipulating printing paper rolls of 1,500 pounds in weight or more is disclosed. The device includes a stationary base plate having one or more circular bearing raceways formed therein. A rotatable upper plate having matching raceways is fitted to the base plate with a plurality of ball bearings positioned in the upper and lower race tracks. The upper plate includes a raised circular bead or an elevated surface to direct the loading of the paper roll from the peripheral edge of the stationary base to provide easy turning of the roll. The device is manually carried and spotted at selected turning locations, as needed, to move a paper roll to a desired location.

Abstract: An accumulator for business forms is easily inserted into, or removed from, a path of continuous format, zig-zag business forms being fed from one business form handling machine (such as a folder) to another (such as a mailing machine like an inserter). A barrier having drive belts on one face is movable from a position allowing forms to pass under it, to a barrier position in which the forms engage the barrier and are slowly driven up the barrier until they bend over by their own weight onto a shelf. The forms are also driven along a shelf into contact with a stop, and a stack of forms is formed on the shelf. By handling the forms in this way the forms are creased along the perforations between the continuous forms (making subsequent separation easier) and prevented from developing a curl.

Abstract: The present invention is directed to an apparatus for use in a paint booth to facilitate the coating of an object such as a wheel or rim with a liquid, powder, or other coating. The apparatus is designed to rotate a wheel about both its horizontal and vertical axes. In this manner, the wheel may be more easily and uniformly coated with a minimum of effort by a paint booth operator. After the wheel is coated, the apparatus is designed to lift the object above the work surface so that it can be connected to an overhead conveyor system that may be provided to remove the wheel from the paint booth.

Abstract: The present invention is a device for simultaneously activating a warning device and deactivating turning rolls on which a vessel rotatably rests whenever the vessel rises off of one of the turning rolls. The device is provided with two safety switches which are positioned under and at either end of the vessel and adjusted so that a switch roller provided on a distal end of an upwardly biased switch arm of each safety switch engages the vessel, thereby causing the switch arm to move downward and thereby closing the switch. When the vessel moves upward, the switch opens. The switches are connected in a series circuit, with one leg of the series circuit supplying power to a contactor holding coil which controls a current controlling contactor in order to repeatedly make and break a circuit which supplies power to the turning rolls and a second leg of the series circuit supplying power to the warning device. The turning rolls are activated and the warning device is deactivated when all switches are closed.

Abstract: An inventive orientation apparatus is provided in the present invention preferably for use with blow molding operations. The apparatus includes an object having a body portion and a neck portion. The neck portion has an outer peripheral surface and an alignment lug which extends outwardly from the peripheral surface and past the same. Additionally, a rotating support is included for supporting the object and causing the same to rotate, wherein the rotating support is movable with a moving carrier pallet. The apparatus also includes an orientating element located adjacent the carrier which engages the alignment lug on the object and stops the rotation of the object at a desired orientation. The invention may also include an orientation check device which is positioned upstream from the orientation element, adjacent the carrier, which is used for checking the orientation of the alignment lug for preventing a system jam.

Abstract: In a sample holding apparatus including a main body, a holding body movably provided to the main body, a spring disposed to urge the main body and the holding body toward one another, pins fixed to the main body and the holding body for holding a sample, holding and releasing of the sample are effected by action of a moving stroke of the sample holding apparatus itself and a support member fixed to the sample holding apparatus without requirement for special drive components.

Abstract: An alignment apparatus for aligning the flat edges on semiconductor wafers has a roller 13 used to turn the wafers 12 during alignment. The roller 13 is hollow and has a plurality of holes 14 in the surface of the roller though which a vacuum is drawn to remove particle contaminates from and around the semiconductor wafers.

Abstract: A container for storing a plurality of semiconductor wafers comprises two end walls and two side walls. The container has a main opening through which the wafers are inserted into or withdrawn from the container and a sub-opening through which a wafer counter approaches the wafers. A plurality of slots are formed in the container to hold the wafers one by one at intervals. Each slot includes a pair of grooves which are formed in inner surfaces of both the side walls, have a V-shaped cross-section, and which divergently open toward a central portion of the container. One surface of each groove serves as a supporting surface on which a wafer is disposed substantially horizontal when the container is positioned such that the reference plane is horizontal. The supporting surfaces of the pair of grooves have a pair of converging portions which converge toward the second opening.

Abstract: A method in accordance with the present invention includes programming a plurality of semiconductor devices simultaneously, thereby dramatically increasing the number of devices programmed within a predetermined time. In one embodiment, this method includes arranging a first plurality of semiconductor devices into an array configuration. The first array is then programmed while a second plurality of semiconductor devices is arranged into the array configuration. The second array is then programmed, while the first array is unloaded and a third plurality of semiconductor devices is arranged into the array configuration. The present invention further includes the step of moving the first plurality of semiconductor devices in the array configuration to a programming position and the step of transferring the first plurality of semiconductor devices to an unloading position.

Abstract: A wafer positioning device providing superior precision in a very thin configuration. Piezoelectric (vs. electrostrictive) solid state actuators provide precise positioning. To provide a thin configuration, the actuators are positioned horizontally. To move the wafer vertically, and to magnify the stroke of the actuators, there are provided displacement transformers. The positioning device provides positioning along four degrees of motion. The device can be mounted onto an x-y table to provide positioning along all six degrees of motion.

Abstract: A load-lock unit is disposed between first and second atmospheres, stores a wafer transferred from the first atmosphere, is blocked off from the first atmosphere, is thereafter set in the same atmosphere as or a similar atmosphere to the second atmosphere, and is opened to communicate with the second atmosphere in order to transfer the wafer to the second atmosphere. The load-lock unit includes a load-lock chamber, a storing device, disposed in the load-lock chamber, for storing a plurality of wafers vertically at a gap, a holding mechanism for holding one of the plurality of wafers stored in the storing device, a rotating mechanism for rotating the wafer held by the holding mechanism, and an error detecting device for detecting the positional error of the center of the wafer and an orientation error of the wafer on the basis of data obtained by radiating light on the wafer which is rotating.

Abstract: A sharp chain charger and infeed device for feeding logs in a desired orientation to a sawing machine is characterized by alignment and displacement assemblies for accurately positioning a succession of logs on a sharp chain drive mechanism. The alignment assembly includes a pair of pivotal arms for laterally aligning a log with the longitudinal axis of the sawing machine. A pair of longitudinal rollers are connected with the alignment arms to rotate the log to a selected rotary position. The displacement assembly displaces the alignment assembly longitudinally in the direction of the sawing machine and downwardly beneath the sharp chain, whereby the log is deposited on the moving chain with both longitudinal and vertical components while the desired rotational and aligned orientation of the log is retained for transport to the sawing machine.

Abstract: An apparatus for transporting surgical needles includes a needle holding apparatus having a movable jaw structure. The jaw structure is releasably biased in a closed position for holding needles in a predetermined position. The jaw structure may include laterally movable first and second sections for rotating a needle therebetween.The needle holding apparatus may be removably positionable on a work surface such that the needle holding apparatus may interface with a needle loading apparatus. The needle loading apparatus provides accommodating means capable of containing a multiplicity of needles. A needle advancing structure, such as a movable track, advances the needles in a predetermined fashion from the accommodating means. The needle advancing structure positions needles such that said jaw structure of the holding apparatus can selectively grasp the needles and transport the needle to another location.

Abstract: The invention relates to a container conveyor for conveying a container to a container inspecting station. The container has a flanged portion surrounding its opening. The conveyor includes a rotary disc having a plurality of holders arranged around its circumference for holding the containers. The holders include a driving roller and a pair of rotation rollers. The rollers contact the container to provide a three-point connection with the flanged portion of the container. Each roller has a recessed portion formed about its periphery. The recessed portions engage the flanged portion of the container to nip the container.

Abstract: In an apparatus for the automatic casting, coating, varnishing, inspecting and sorting of workpieces--especially of optical or magneto-optical data storages--with at least one transport apparatus advancing the substrates from a production station to the processing stations, and with a stacking station for the separate stacking of workpieces that are finished and have been found perfect and workpieces containing defects, a substrate transporting apparatus is provided which has a transport carriage (3) which can be moved back and forth along a straight line and has three transport arms (4,4',4'';5,5',5'') bearing substrate holders (6, 6',6'';7,7',7'') on each side of the carriage.

Abstract: A system and method for automatically processing a supply of cartons, in flattened form and of different types, in accordance with a selectable number of plural, different and separately identifiable carton types. Unsorted cartons are removed in successive layers from stacks thereof and transported in serial succession along a transport path. Sorting modules are disposed along the transport path, each including respectively associated routing and stacking devices individually predesignated to receive and stack a given, identifiable carton type. A system controller tracks the progress of each carton, simultaneously for plural cartons, along the transport path and when a match of the carton type with a predesignated stacking device is determined, actuates the associated routing device to route a carton of a matching type from the transport path and to the associated stacking device for stacking.

Abstract: A wafer counter device comprising a system for aligning the orientation flats of plural wafers in a cassette with one another and a system provided with optical sensors for detecting whether or not the wafers are present in the cassette and serving to count the number of the wafers in the cassette on the basis of the result detected by the optical sensors. The wafers aligning system includes aligning rollers contacted with the rims of the wafers to rotate the wafers, a system for lifting the aligning rollers in such a way that the rollers can be contacted with the rims of the wafers, and a motor for rotating the aligning rollers.

Abstract: A prealigner for semiconductor wafers is described, together with a method for prealigning. The prealigner includes mechanism for holding the wafer in a non-slip manner and motive means for adjusting the position of its engagement with the wafer as necessary to make the geometric center of the wafer precisely coincident with a chose position. The alignment method results in eliminating parts of original equations during the calculations of the location of the geometric center and flats or other distinguishing features on the edge of the wafer are located by utilizing a particular equation for a plurality of overlapping sections of the edge.

Abstract: Method for transporting silicon wafers. Damage to the wafers is minimized by supporting the wafer solely by wafer supports which contact the wafer only around the periphery thereof. Preferred supports are flanged wheels which are rotatable in the plane of the wafer and are mounted on wafer supports which can be moved relative to each other between an open position and a closed position in which the wafer is supported by the supports. The flanged wheels can cooperate with the wafer and/or be driven by a motor as the wafer supports move into the closed position, to align the wafer laterally and/or rotationally.

Abstract: An alignment station for elements such as semiconductor wafers on a robot arm uses a rotating support and edge detector which in combination are operative to place a wafer on the rotating support, detect wafer alignment, move the wafer to bring it into alignment either on the rotating support itself or onto a separate station.

Abstract: An apparatus for holding and positioning a substrate or wafer cassette has a receiving plate which is adjustable on a three-point mounting and is lockable in its position of adjustment. The receiving plate carries runner receivers for initial guidance of a cassette onto the plate by engagement with guide runners on the cassette, and locking pins for the final location of the cassette by engagement with marginal strips on the base of the cassette.

Abstract: A curved log to be sawn lengthwise by a vertical saw blade is supported for a time, near its center of gravity, by a device which permits the log to rotate about its axis, and thus find an orientation at which the plane of the curve of the log axis is vertical, so as to maximize yield from the log. The device also includes drive sprockets which operate, at certain angular positions of the device, to move the log lengthwise.

Abstract: A device having a circled array of tapered motor driven rollers center and find the flat edge of a semiconductor wafer by rotating the wafer until the flat edge is over a photo cell, at which time finder rollers secure the wafer in its centered and orientated position.

Abstract: A holding device for semiconductor disks or wafers orients and secures the disk during transport to a working position. Shortly before the disk reaches a working position the device releases the surface to be worked or secures the disk position with the aid of a ring which remains in the working position. Thereby the disk surface can be worked completely or with minimal shadowing and simultaneously the transport mechanics can be effectively protected against the working process, for example coating or etching. All parts continuously exposed to the working process can be readily exchanged. If the disk remains adhered in the working station, it is torn off by a form-fitting transport securement.

Abstract: An apparatus is described for positioning a can body in the form of a longitudinal seam welded cylinder which is provided with a tongue or the like projection at a predetermined point of its outer circuference, and which is to be further processed, for example shaped. The can body is received in a device in a spatially fixed manner and is rotated about its longitudinal axis. The rotational movement is stopped by a stop (48) or like sensor or obstacle in the path of the tongue, the position of the stop being so selected that the longitudinal seam of the body is then in a precisely defined position. The seam is thus detected in a simple manner by means of a tongue. It is thereby possible to ensure that when a circular cylindrical can body is, for example, further shaped into a parallelepiped body, the longitudinal seam is precisely in the middle of a narrow side of the parallelepiped body.

Abstract: A positioning mechanism for wafers put in a container, wherein a notch is formed on the periphery of the wafer. The positioning mechanism includes a drive roller coupled to a drive source, an arm member, a first end thereof being fixed and a second end having a protrusion. The arm is elastically movable in the direction of the wafer surface, and the protrusion has a shape corresponding to the notch of the wafer. A transmission roller is supported between the first and second ends of the arm member. The axes of the drive roller and transmission roller are in the vicinity of the wafer so that the transmission roller is driven by the drive roller while the protrusion contacts with the periphery of the wafer outside the notch region. The transmission roller loses contact with the drive roller when the protrusion is engaged with the wafer notch.

Abstract: An improved apparatus for separating and feeding a preformed container fron a nested stack, said apparatus adapted for accepting a nested stack of containers in a vertical array, tilting the nested stack to a horizontal array by means of a tilting carriage assembly (34), advancing the horizontal stack (170) on an advancing portion (36), stopping the nested stack at a preferred position and immediately lifing the nested stack from the advancing portion (36) by means of an elongated rail assembly 96. A separating assembly (38) separates a first container from the nested stack, said first container advances to a pivoting hook assembly (40) where the first container is oriented from a substantially horizontal array to a substantially vertical array, and a stabilizer assembly (42) steadies the horizontal container for transfer to subsequent machinery.

Abstract: An apparatus for detecting an orientation flat of a wafer and centering the wafer includes a hand base, a pair of guide rollers mounted on the hand base, and a stopper mechanism mounted on the hand base. The hand base is operable to be located in opposed relation to one of opposite faces of the wafer, and has an axis therealong. The guide rollers serve to support the wafer located in opposed relation to the hand base, and are symmetrically disposed with respect to the axis of the hand base. The stopper mechanism cooperates with the pair of guide rollers to center the wafer, and are movable along the axis of the hand base and engageable with the orientation flat of the wafer.

Abstract: A high precision automated wafer inspection station provides a base table area on which an X-Y stage is movable in mutually orthogonal directions relative to an inspection axis in alignment with a microscope or measuring instrument which is mounted on a bridge support above the table. The stage mechanism includes a wafer-supporting vacuum chuck having a top engagement surface for receiving and retaining the wafer, the chuck being rotatable about a central axis to provide angular positioning of the wafer, and focusable along the inspection axis. The wafer is moved on a dual probe mechanism in a horizontal plane from a first cassette controlled by an elevator at one side back to the first cassette, or to a second cassette controlled by an elevator at the opposite side of the table area.

Abstract: An apparatus for providing a rotor of an electrical rotating machine in which the apparatus has frame means including a pair of spaced apart support members each having arcuate shaped surfaces engaging opposite shaft ends of a rotor to thereby support the rotor on the frame means. A drive belt has first and second loop ends with the first loop end being positioned around the rotor for driving the latter. Where the rotor includes a commutator, the first loop end may be positioned in engagement with a generally cylindrical surface of the commutator. A drive means, including a pulley around which the second drive belt loop is wrapped, is provided for rotating the rotor to selected winding attachment positions at which winding sections may be attached to the magnetic core of the rotor.

Abstract: A semiconductor wafer handling apparatus for automated movement of semiconductor wafers between wafer cassette trays and wafer test systems is provided. The apparatus includes a platform for carrying at least one semiconductor wafer cassette tray, a wafer alignment device carried by the platform for aligning a semiconductor wafer in a predetermined test position and a wafer transfer device associated with the platform and the wafer alignment device for transferring the wafer between the cassette tray, the alignment device and the test system. The wafer transfer device is operational in the same plane relative to the platform and capable of extending, retracting and rotating in the plane.

Abstract: A disk guide is comprised of a pair of mutually parallel vertical grooves, a disk holder and a mechanism for moving the disk holder vertically. The grooves are formed on mutually opposite sidewalls such that a disk supported by the disk holder can be lifted vertically, supported and guided by the vertical grooves. The disk holder has a disk-supporting top surface which is sloped such that the disk supported thereon leans against a selected one of the vertical sidewalls and hence can be positioned accurately.