Abstract: Systems and method of compressing and storing fluids without rotating machinery or hydrated electrochemical. The system and method makes use of shock waves, created by plasma generated by exposing the fluid to an ultrashort wavelength laser pulse from a femtosecond laser, and the fluid guided by check valves that create vortexes to resist backflow. The fluid and plasma being accumulated and recombined in a storage chamber in a compressed state.

Abstract: Getter pumping system particularly useful for linear accelerators or more generally high-volume environments, wherein a plurality of getter cartridges (100, 100?, 100?, . . . 100n) having a linear support (110, 110?, 110?, . . . 110n) and a plurality of linear heaters (120, 120?, . . . 120n) are connected in a high-density configuration to a wall (11) that has a surface area of at least 0.5 m2.

Abstract: An apparatus for shielding a controlled pressure environment, including a shield assembly with: a gate disc arranged for location in a chamber and including a first continuous surface facing an opening in the chamber and including an outer circumference extending past the opening in a radial direction orthogonal to a longitudinal axis passing through the chamber and the opening; and an at least one actuator arranged to displace the gate disc in an axial direction parallel to the longitudinal axis. The opening is arranged for connection to an inlet of a vacuum pump. In an example embodiment, the thermal system attains and maintains thermal equilibrium in the chamber and/or to shields the chamber from unwanted thermal affects by heating or cooling the gate disc to offset cooling or heat generated by the vacuum pump. For example, the gate disc is cooled to offset heat generated by a turbo-molecular pump.

Abstract: A first surface of a porous medium is in contact with a first space. A second surface of the porous medium is in contact with a second space. The first space is in communication with the second space via the pores of the porous medium. Light in a wavelength range where the material of the porous medium exhibits light absorption properties is applied to the first surface of the porous medium from a light source, so that energy of the applied light can be efficiently absorbed into the porous medium from its first surface, and the first surface of the porous medium can be efficiently heated. As a result, a thermal transpiration flow can be efficiently generated in the porous medium, and a pressure difference can be efficiently produced between the first space and the second space.

Abstract: This relates to vacuum insulated glass (VIG) window units and methods for making VIG window units. Hybrid getter(s) are utilized. In certain example embodiments, a hybrid getter for use in a VIG window unit and/or a method making same includes both evaporable getter (EG) material and non-evaporable getter (NEG) material. In certain example embodiments, the NEG material may be covered (directly or indirectly) with EG material in the hybrid getter at least prior to getter activating/flashing.

Abstract: A discharge lamp comprising a holed metallic structure that serves as a support for an amalgam Bi—In—X—Hg, a method for controlling pressure of mercury within discharge lamps and a process for manufacturing of the lamps are described.

Abstract: An absorber tube, especially for solar collectors in solar thermal power plants with at least one collector mirror, is provided. The absorber tube includes a metal tube for supplying and heating a heat transfer medium, a sheath tube surrounding the metal tube to form an annular space that can be evacuated, a wall extending through the sheath tube and the metal tube to seal the annular space, and a getter material binding free hydrogen in the annular space. The absorber tube has a temperature variation device that changes the temperature of the getter material and the wall.

Abstract: A system and method for using an element made of porous ceramic materials such as zeolite to constrain the flow of gas molecules to the free molecular or transitional flow regime. A preferred embodiment of the gas pump may include the zeolite element, a heater, a cooler, passive thermal elements, and encapsulation. The zeolite element may be further comprised of multiple types of porous matrix sub-elements, which may be coated with other materials and may be connected in series or in parallel. The gas pump may further include sensors and a control mechanism that is responsive to the output of the sensors. The control mechanism may further provide the ability to turn on and off certain heaters in order to reverse the flow in the gas pump. In one embodiment, the pump may operate by utilizing waste heat from an external system to induce transpiration driven flow across the zeolite.

Abstract: A highly efficient getter pump with low maintenance requirements is applied to a vacuum coating installation, allowing a substrate to be coated to remain uncontaminated by a dusting of getter material. The getter pump comprises a pump housing with an exposure opening. The housing has a getter body, of getter material that essentially closes the exposure opening and can move in relation to the exposure opening. An inner sub-section of the surface of the getter body points towards the interior of the pump housing and an outer sub-section points towards the exterior of the pump housing through the exposure opening. The positions of the inner and outer sub-sections are interchangeable by movement of the getter body. The getter pump is equipped with a device for removing getter material from the inner sub-section.

Abstract: An amalgam capsule (16) for a low-pressure mercury vapor discharge lamp (1) has a closed end and an opposing end with an opening (21) to allow passage of mercury vapor between the amalgam plug (18) and the discharge space (3) of the lamp (1). A glass rod (19) placed in the capsule (16) restrains movement of the amalgam plug (18), and projections (20) in the inner wall of the capsule (16) restrain movement of the glass rod (19). The presence of the amalgam capsule (16) in the discharge space (3) enables highly-loaded, substantially temperature-independent operation of linear fluorescent lamps such as T8 lamps.

Abstract: Provided is a manufacturing method of forming an airtight container including an electron beam irradiation process for irradiating an electron beam to a non-evaporable type getter that has not been activated so as not to activate the non-evaporable type getter, and a sealing process for sealing a seal portion after the electron beam irradiation process.

Abstract: The present fluid pumping method for micro-fluidic devices uses gas bubbles to move fluid by light beams. The light beams are emitted to the fluid near the gas bubble through an optically transparent cover and correspondingly heat the fluid in the micro channels. The liquid temperature variation changes the surface tension of the gas bubble near the heated fluid side, therefore, a pressure gradient between the end portions of the gas bubble generates accordingly. By moving the light beams, the moved pressure difference will be achieved, which will drive the gas bubbles and pump the fluid. Such a fluid pumping can simplify the structure of a micro-fluidic device and eliminate heat loss because of using a controllable light beam.

Abstract: A pump device and a pump unit of the pump device. The pump device includes a low-temperature flat plate group (low-temperature portion) having a plurality of flat plates as low-temperature objects arranged parallel with each other at specified intervals in a direction crossing a flow passage for a gas; a high-temperature flat plate group (high-temperature portion) having a plurality of flat plates as high-temperature objects arranged parallel with each other at specified intervals in a direction crossing the flow passage; and, a temperature-operating device operating the temperature of at least one of these flat plate groups so that a temperature difference occurs between these flat plate groups. The flat plates are displaced from each other in the flow direction of the flow passage, and a heat insulating layer is interposed between the low-temperature flat plates and the high-temperature flat plates.

Abstract: The present invention provides a charged particle beam system which can perform evacuation on an electron gun chamber or an ion-gun chamber having a non-evaporable getter pump in a short time and can maintain the ultra-high vacuum for a long time, and a technology of evacuation therefor.

Abstract: According to one embodiment, a vacuum system comprises a vacuum chamber, a construct of nanotubes, and a heat source. The vacuum chamber contains one or more gases. The construct of nanotubes is located proximate to the vacuum chamber and is operable to absorb or adsorb gases from the vacuum chamber. The hear source is located proximate to the construct of nanotubes and is operable to heat the construct of nanotubes such that the construct of nanotubes desorbs the gases from the vacuum chamber.

Abstract: An image display apparatus is provided with a vacuum chamber consisting of an electron source substrate and an image display substrate, and an ion pump which is attached to an electron-emitting substrate or the image display substrate and exhausts air from the vacuum chamber by the action of a magnet, wherein the magnet is attached and fixed to the substrate to which the ion pump has been attached. Thereby, the image display apparatus prevents the magnet from applying an excessive force to the ion pump by its weight, and acquires a stable structure without causing a vacuum leak.

Abstract: There is provided a compact charged particle beam apparatus with a non-evaporable getter pump which maintains high vacuum even during emission of an electron beam without generating foreign particles. The apparatus comprises: a charged particle source; a charged particle optics which focuses a charged particle beam emitted from the charged particle source on a sample and performs scanning; and means of vacuum pumping which evacuates the charged particle optics. The means of vacuum pumping has a differential pumping structure with two or more vacuum chambers connected through an opening in series. A pump made of non-evaporable getter alloy is placed in an upstream vacuum chamber with a high degree of vacuum, and a gas absorbing surface of the non-evaporable getter alloy is fixed without contact with another part.

Abstract: A highly efficient getter pump with low maintenance requirements is applied to a vacuum coating installation, allowing a substrate to be coated to remain uncontaminated by a dusting of getter material. The getter pump comprises a pump housing with an exposure opening. The housing has a getter body, of getter material that essentially closes the exposure opening and can move in relation to the exposure opening. An inner sub-section of the surface of the getter body points towards the interior of the pump housing and an outer sub-section points towards the exterior of the pump housing through the exposure opening. The positions of the inner and outer sub-sections are interchangeable by movement of the getter body. The getter pump is equipped with a device for removing getter material from the inner sub-section.

Abstract: A controlled odor generator, comprising a central processing unit, at least one micropump unit, a sensor unit and a fan. The micropump unit is housed in a casing containing odorous fluid and has a micropump array for ejecting the odorous fluid in tiny droplets. The central processing unit regulates operation of the micropump unit, allowing to control timing quantity and mixture of spread odor. The sensor unit provides the central processing unit with environmental data, like temperature, air density and humidity, as well as human body states for controlling the micropump unit. Environmental changes are followed by a change of spraying of odor, and varying taste and demand are adapted to.

Abstract: A pump apparatus comprises a low-temperature flat plate group (a low-temperature portion) C having flat plates 5 as a plurality of low-temperature bodies arranged parallel with each other with intervals in a direction crossing a passage 4 of gas, a high-temperature flat plate group (a high-temperature portion) H having flat plates 6 as a plurality of high-temperature bodies arranged parallel with each other with intervals in the direction crossing the passage 4, and temperature operation means for operating at least one of temperatures of the flat plate groups to generate temperature difference between the flat plate groups. The flat plates 5 and the flat plates 6 are displaced from each other in a flow direction in the passage 4, and a heat insulating layer interposed between the flat plates 5 and the flat plates 6.

Abstract: Disclosed is a micro-pump having at least one channel on a substrate where the channel has an inlet and an outlet. The micro-pump includes a first and second electrode coupled to the substrate, wherein the electrodes deliver a current that produces an electric field across the substrate to create a flow from the inlet to the outlet of a fluid contained in the channel. The micro-pump also includes an ion-specific membrane housing for the electrode reservoir minimizes bubble generation, fluid leakage and pressure loss. Further, at least a portion of the channel contains a chemically formed porous matrix.

Abstract: A gas injection port structure for a flat fluorescent lap (FFL) is provided. The FFL has a flat lower plate and an upper plate that form a channel therebetween, and at least one gas injection port in communication with the channel. The gas injection port may be formed at a predetermined position on the upper plate so that a height of the gas injection port is level with or lower than a height of the channel. The gas injection port may contain a mercury getter and a sealing material having a passage formed therethrough so that mercury vapor may be injected into the channel and then the channel sealed. The gas injection port minimizes a thickness of the FFL, and improves durability of the FFL.

Abstract: Provided is an image display apparatus, including: a vacuum container which includes an electron source and an anode electrode opposed to the electron source; and an ion pump arranged so as to communicate through the vacuum container, in which: an ion pump container is composed of a non-electroconductive material; and an electroconductive film is formed on an external surface of the vacuum container on a side on which the ion pump container is mounted or on an internal surface of the ion pump container. The image display apparatus achieves: a reduction in weight of the ion pump; an improvement in compatibility to the vacuum container; and the prevention of an adverse effect of discharge inside the ion pump on image display.

Abstract: Provided is an image display apparatus including: a vacuum container having an electron source enclosed therein for displaying an image; an ion pump communicating with the vacuum container for discharging air therefrom and decreasing pressure therein; and a resistor connected in series with the ion pump with respect to a power supply for driving the ion pump. Even if internal resistance of the ion pump undergoes order-of-magnitude changes according to its operating state, current consumption can be suppressed and the ion pump can be driven efficiently.

Abstract: An inlet check valve is mountable to a valve body that, in turn, is mounted to a high pressure pump. The inlet check valve has a removable inlet seat with a first through-hole forming an inlet path and functioning as a valve seat. A valve is positionable over the first through-hole. An inlet guide has first, second, third and fourth through-holes alignable with respective first, second, third and fourth through-holes of the inlet seat. The third and fourth through-holes receive fasteners to mount the inlet check valve to the valve body.

Abstract: To prevent partial saturation of a getter by contact with absorbable atmospheric gases when the getter is introduced into a vacuum vessel, a method for introducing and activating the getter and a getter unit includes introducing the getter into the vacuum vessel packaged in a protective sleeve, closing off the vacuum vessel, evacuating the vessel, and opening the protective sleeve only after the evacuation has commenced. The protective sleeve can be opened by the sleeve being made to burst under the action of a protective gas atmosphere that is present.

Abstract: Disclosed are a non-evaporation type getter excellent in gettering effect, capable of maintaining the inside of a gas-tight container in a display apparatus, particularly a flat panel display apparatus or the like, in a high vacuum condition, easy to mount and less liable to contaminate the inside of the gas-tight container, a display apparatus including the getter, and methods of manufacturing the same. The non-evaporation type getter (20) includes a molded body including at least one element selected from the group consisting of Ti, Zr, Al, V, and Fe as a principal constituent thereof, the molded body formed by powder injection molding. The molded body is composed of a porous body having a porosity of 10 to 30%.

Abstract: An improved getter device and method for forming a calcium-rich getter thin film in an electronic vacuum device is disclosed. The getter device includes a powder of a Ca—Ba—Al ternary alloy composed of between 53% and 56.8% by weight of aluminum, from 36% to 41.7% by weight of calcium and from 1.5% to 11% by weight of barium. The method allows the formation of a calcium-rich getter thin film with a substantially reduced amount of released hydrogen in the vacuum device.

Abstract: A life counter that calculates and records the life utilized of the flywheel in a flywheel energy storage system and indicates when it should be removed from service, based on operational history instead of monitoring for symptoms of failure. The life counter can effectively monitor and measure any or all of the flywheel energy storage system parameters, such as the flywheel structural life, vacuum system life, bearing system life and electronics life. The life counter ensures safe operation of highly stressed flywheels by indicating when the safety margin for the flywheel is reached so that the flywheel energy storage system can be removal from service prior to encountering a risk of catastrophic failure. In some cases, failures may not be preceded by measurable warning symptoms, so removal from service at a calculated end of life would be desirable.

Abstract: The invention, intended primarily for use in a steel flywheel power source (30), provides a vacuum system and a method of maintaining a vacuum inside a flywheel chamber (32) for the life of the power source (30). The vacuum system combines the use of cleaning and de-gassing treatments in the chamber (32) and vacuum tempering of the steel flywheel (31) with the use of a chemical type metal alloy nonevaporable getter, such as zirconium-vanadium-iron, that cooperatively matches the outgassing of the flywheel (31) and chamber (32) by sorbing those gases that are released. The getter may be reactivated throughout the life of the flywheel system by reheating it with an integral heater that is triggered by a timer instead of a vacuum gauge to increase the system reliability, using power taken directly from the energy stored in the flywheel.

Abstract: A fluorescent luminous tube is provided that has a getter mirror film formed in an arbitrary shape by illuminating a laser beam onto a getter. In order to form the getter film 32, the rectangular ring-less getter 31 mounted on the anode substrate 11 is irradiated with the laser beam L from the outside of the front substrate 12 and thus is evaporated. In this process, when the illumination spot of the laser beam L is moved along the scanning line 33, the rectangular getter mirror film 32 is formed around the scanning line 33. The burnt region 34, which has the same shape and size as those of the scanning line 33, is formed using the laser beam L.

Abstract: A method for preventing contamination, oxidation and gas absorption of reactive materials, and articles formed thereby. The method generally entails depositing a first layer of a reactive material and a second layer of a substantially nonreactive material so that the second layer protects the first layer from a surrounding atmosphere. For example, the first and second layers may be deposited to form a film on a surface within a chamber that is desired to be maintained in a vacuum during use of the article. The second layer is sufficiently thin such that appropriately heating the first and second layers causes the reactive material of the first layer to become interdiffused with the nonreactive material of the second layer, to the extent that at least a portion of the reactive material is able to react and getter gases from the surrounding atmosphere.

Abstract: The invention concerns a device comprising at least one field effect electron source within a sealed structure, which encompasses an internal space that contains a reducing gas whose purpose is to prevent oxidation of the emissive material of the electron source, whereby the reducing gas is a gas with the formula NxHy where x=1 or 2 and y=3 or 4, and which is advantageously under a pressure of between 10?8 and 10?1 mbar. It also concerns manufacturing processes for such a device and apparatuses for implementing these processes.

Abstract: A flywheel energy storage system, including a plurality of pumps arranged in parallel for simultaneously drawing-off and absorbing substantially all of the gases that evolve from a flywheel assembly during high-speed operation, is disclosed. The plurality of pumps includes at least one pump for pumping mainly water vapor; and, at least one pump for pumping mainly active gases. The at least one pump for pumping mainly water vapor plurality of pumps is disposed in a gas storage chamber that is separate from the main housing of the flywheel system. The at least one pump for pumping mainly active gases is disposed in a container external to the main housing and fluidly coupled to the gas storage chamber. A drag pump assists the plurality of pumps in the gas storage chamber by pumping the evolved gases from the main housing to the gas storage chamber.

Abstract: An evaporable getter device is provided for cathode-ray tubes (CRTs). The getter device is formed by a metallic container (101; 201) containing a mixture of powders (104; 205) of the compound BaAl4 and nickel (Ni), and by two different metallic nets (106, 107; 207, 208), superimposed and positioned in the container over the powders. The device allows one to obtain a barium distribution in the CRT that is more uniform and wider than that obtainable with a conventional getter device.

Abstract: An apparatus for removing contaminants from a display device is disclosed. In one embodiment, an auxiliary chamber is adapted to be coupled to a surface of a display device such that contaminants within the display device can travel from the display device into the auxiliary chamber. A getter is disposed in the auxiliary chamber. The getter is adapted to capture the contaminants once the contaminants travel from the display device into the auxiliary chamber. In other embodiments, the getter is disposed in the border region surrounding the active area of the display.

Abstract: In a method for manufacturing an electron tube including a front substrate and a back substrate, a wiring and an electrode are formed on the front substrate and/or the back substrate. A component is mounted on the front substrate and/or the back substrate. A ring-less getter is mounted on at least one of the front substrate, the back substrate and the component. A vessel is assembled and sealed so that the front substrate faces the back substrate. A light is irradiated on the ring-less getter from outside of the sealed vessel, thereby activating the ring-less getter.

Abstract: This invention relates to a method for reducing the partial pressure of undesired gases in a small vacuum vessel. The method comprises using a getter pump with a sufficient sorption capacity to eliminate the need for a bakeout step.

Abstract: A CRT including an evacuated envelope with a color selection electrode assembly disposed within the envelope, and an internal magnetic shield (IMS) secured to the color selection electrode assembly, and having a replaceable getter attachment assembly comprising a mounting rail and replaceable getter portion. The mounting rail having a first portion with a coupling clip attached to the IMS and a second portion extending therefrom. The replaceable getter portion includes a first end extending from the mounting rail with a getter cup attached thereto and a second end detachably attached to the second portion of the mounting rail. The replaceable getter portion extends from the mounting rail to deposit a film of evaporated getter material therefrom within the envelope.

Abstract: A flywheel energy storage system, including a plurality of pumps arranged in parallel for simultaneously drawing-off and absorbing substantially all of the gases that evolve from a flywheel assembly during high-speed operation, is disclosed. The plurality of pumps includes at least one pump for pumping mainly water vapor; and, at least one pump for pumping mainly active gases. The at least one pump for pumping mainly water vapor plurality of pumps is disposed in a gas storage chamber that is separate from the main housing of the flywheel system. The at least one pump for pumping mainly active gases is disposed in a container external to the main housing and fluidly coupled to the gas storage chamber. A drag pump assists the plurality of pumps in the gas storage chamber by pumping the evolved gases from the main housing to the gas storage chamber.

Abstract: A vacuum management and regeneration apparatus and method for operating an energy storage flywheel system having a flywheel supported by a bearing system inside an evacuated chamber enclosed within a container. A motor/generator stores and retrieves energy by accelerating and decelerating the flywheel. A vacuum is maintained in the container with a vacuum level sufficient to reduce the aerodynamic drag on the flywheel, typically between 10−1 Torr to 10−3 Torr depending on the flywheel construction and its operating tip speed. The vacuum management system, including a vacuum pump and a timer, maintains the vacuum level in the container. The timer periodically enables operation of the vacuum pump, such as a mechanical vacuum pump or a getter pump, to reduce the pressure in the container.

Abstract: An apparatus for removing contaminants from a display device is disclosed. In one embodiment, an auxiliary chamber is adapted to be coupled to a surface of a display device such that contaminants within the display device can travel from the display device into the auxiliary chamber. A getter is disposed in the auxiliary chamber. The getter is adapted to capture the contaminants once the contaminants travel from the display device into the auxiliary chamber. In other embodiments, the getter is disposed in the border region surrounding the active area of the display.

Abstract: A method of manufacturing a pump [10] for pumping various primary fluids. A body is formed from silicon dies [102,104]. A primary fluid channel [110] is formed in the body and a primary fluid supply [122] is coupled to the primary fluid channel [110] to supply a primary fluid to the primary fluid channel [110]. A mechanism for introducing a secondary fluid to an interface region of the primary fluid channel [110] is formed in the body. An energy delivery device is formed in the body to deliver energy to an interface between region between the primary fluid and the secondary fluid to create a thermal gradient along the fluid interface. The thermal gradient results in a surface tension gradient along the interface. The primary fluid will move to compensate for the surface tension gradient. Various semiconductor fabrication processes can be used to form the elements on the body.

Abstract: A getter assembly for use in a vacuum display panel is described. The novel getter assembly can be provided including both a non-evaporative getter and an evaporative getter which are uniquely positioned juxtaposed to each other such that ions emitted by the evaporative getter upon activation substantially shield the non-evaporative getter so that gases emitted by the non-evaporative getter when activated does not affect the state of vacuum in the vacuum display panel. A preferred embodiment of the present invention novel getter assembly is shown for vacuum display panels that have sufficient thickness in the cavity so that the getter assembly can be installed inside the cavity.

Abstract: Methods of removing gaseous phase contaminants from a processing chamber, such as a PVD chamber, are provided. In one aspect, a method of removing gaseous phase water from a processing chamber is provided that includes placing a heated substrate that has a titanium film in the processing chamber to dissociate a first portion of the gaseous phase water into hydrogen and oxygen and capture some of the oxygen in, the titanium film. The dissociated hydrogen and uncaptured oxygen are pumped from the processing chamber and the substrate is removed from the processing chamber. Pump down times and test wafer consumption may be reduced.

Abstract: An ion pump anode eliminates the intercellular spaces while maintaining an efficient cell shape in which the plasma sheath follows the contour of the cell wall. The cell are preferably quasi-cylindrical and can be manufactured by folding one or more metal strip into a corrugation and welding the strip to create separate cells. By eliminating the intercellular region, which support a high plasma density, the formation of dendrites under such a region is prevented and instabilities caused by those dendrites are eliminated.

Abstract: A flywheel energy storage system, including a plurality of pumps arranged in parallel for simultaneously drawing-off and absorbing substantially all of the gases that evolve from a flywheel assembly during high-speed operation, is disclosed. The plurality of pumps includes at least one pump, e.g., a water sorbent, for pumping mainly water vapor; and, at least one pump, e.g., a getter pump, for pumping mainly active gases. The plurality of pumps is disposed in a gas storage chamber that is separate from the main housing of the flywheel system. A drag pump assists the plurality of pumps in the gas storage chamber by pumping the evolved gases from the main housing to the gas storage chamber for subsequent absorption by the plurality of pumps.

Abstract: A temperature-responsive, mobile shielding device (10) is located between a getter pump (GP) and a turbo pump (TMP) being in line to each other, capable of providing a complete shielding to the radiating heat transfer from the getter pump to the turbo pump when the non-evaporable getter material is heated to be activated, while on the contrary leaving free, without sensible reductions of conductance the transfer during the normal working of the pumps. This is obtained by providing, mounted on a vacuum flange (13) coupling the two pumps, a set of shielding metal members (11, 31) including shape-memory elements, preferably of Ni—Ti alloy, capable of assuming two different configurations in a first of which, at a higher temperature, the shielding members (11, 31) are substantially all co-planar, with their edges slightly overlapping to form a complete shielding, while in a second configuration, at a lower temperature, the shielding members leave substantially free the passage between the two pumps.

Abstract: An apparatus for removing an undesirable gas in a processing chamber includes one or more getter materials disposed between a process gas inlet and a substrate support member in the processing chamber, and one or more temperature control elements disposed in thermal communication with the one or more getter materials. Preferably, a controller is connected to the one or more temperature control elements to regulate the temperature of the one or more getter materials, and a gas analyzer is disposed within the processing chamber to provide signals to the controller and indicate the presence of undesirable gases. Another aspect of the invention provides a method for removing a gas from a processing chamber comprising pumping the gas using a getter material disposed between a process gas inlet and a substrate support member in the processing chamber, wherein the getter material is activated by a temperature control element disposed in thermal communication with the getter material.

Abstract: A wafer processing system including a processing chamber, a low pressure pump coupled to the processing chamber for pumping noble and non-noble gases, a valve mechanism coupling a source of noble gas to the processing chamber, an in situ getter pump disposed within the processing chamber which pumps certain non-noble gases during the flow of the noble gas into the chamber, and a processing mechanism for processing a wafer disposed within the processing chamber. Preferably, the in situ getter pump can be operated at a number of different temperatures to preferentially pump different species of gas at those temperatures. A gas analyzer is used to automatically control the temperature of the getter pump to control the species of gasses that are pumped from the chamber.