Abstract: A getter pump with high gas sorption velocity includes a cylindrical housing that has an open end and a closed end and defines a chamber with a central axis. Three to eight getter structures are disposed within the chamber. The getter structures are symmetrically arranged around the central axis of the chamber and are substantially parallel to the central axis of the chamber. Each of the getter structures includes a plurality of porous disks of getter material disposed on a central shaft. A heater is centrally disposed within the chamber such that the heater is substantially coaxial with the central axis of the chamber.

Abstract: A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. In one embodiment, a focus shield is provided to reflect thermal energy to the getter material from an external heater element and provide high pumping speeds. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.

Abstract: An improved getter pump module includes a number of getter elements and a heating element that heats the getter elements. The getter elements are preferably porous, sintered getter disks. The heating element is disposed proximate to the getter elements and provides heat to activate the getter material and cause it to pump desired gasses. The getter elements and heater element are partially surrounded by a focus shield that is positioned between the getter elements and a wall of a processing chamber that encloses the getter elements, the heater element, and the focus shield. The focus shield is provided to reflect thermal energy to the getter material from the heater element, to provide high pumping speeds or short activation/baking times, and to reduce the heat seen by the chamber from the heating element. In certain embodiments of the present invention the focus shield is angled as to be wedge shaped, and may include planar extension portions. Multiple focus shields are provided in some embodiments.

Abstract: A getter pump includes a one-piece, substantially U-shaped frame having a bottom, a first sidewall, and a second sidewall opposing the first sidewall. The first and second sidewalls each have a plurality of slots formed therein. A plurality of getter elements are housed in the frame. Each of the getter elements is disposed in one of the slots in the first sidewall and a corresponding slot in the second sidewall. A heating member for heating the getter elements to their operating temperature is disposed in the frame. A preformed sheet of metal for use in forming a component of a getter pump has a top surface, a bottom surface, and discontinuous perforations formed therein to define a generally rectangular frame section. This frame section is connected to the remainder of the sheet by breakaway tabs and has a pair of folding lines formed therein to define a middle section and opposing outer sections. Each of the opposing outer sections has a plurality of slots formed therein.

Abstract: A getter pump, especially suitable for the use upstream, in proximity and coaxially with respect to a turbomolecular pump, comprising inside a cylindrical cartridge (10) a getter device (20) formed of a continuous coil-shaped metal wire having turns (18, 18a) or formed of several zigzag-shaped segments mutually in series between two end points (22), such as to lie in an annular-shaped peripheral zone, concentric with respect to said cartridge (10) and coated with a sintered porous layer of non-evaporable getter material in form of powder. Said cartridge (10) is inserted into a steel stub (30) which is fastened on one side to the chamber to be evacuated and on the other side to a turbomolecular pump. The getter device (20) may be directly supplied with electric current from the outside through said ends (22).

Abstract: A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. In one embodiment, a focus shield is provided to reflect thermal energy to the getter material from an external heater element and provide high pumping speeds. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.

Abstract: A wafer processing system including a processing chamber, a low pressure pump coupled to the processing chamber for pumping noble and non-noble gases, a valve mechanism coupling a source of noble gas to the processing chamber, an in situ getter pump disposed within the processing chamber which pumps certain non-noble gases during the flow of the noble gas into the chamber, and a processing mechanism for processing a wafer disposed within the processing chamber. Preferably, the in situ getter pump can be operated at a number of different temperatures to preferentially pump different species of gas at those temperatures. A gas analyzer is used to automatically control the temperature of the getter pump to control the species of gasses that are pumped from the chamber.

Abstract: A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. In one embodiment, a focus shield is provided to reflect thermal energy to the getter material from an external heater element and provide high pumping speeds. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.

Abstract: An apparatus for processing a substrate includes at least one closed chamber for containing the substrate in a controlled environment, and a non-evaporable gettering material in the chamber acting as an internal pump serving as the primary pumping means for removing contaminants from the controlled environment. In this way the use of expensive and bulky cryogenic pumps can be avoided or minimized.

Abstract: A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.

Abstract: A compact getter pump, compatible with size limitations of portable apparatus is described. In one embodiment a getter device and a heating apparatus capable of heating getter elements to a desired temperature, are contained within a thermally insulating housing comprised of a plurality of nested thermally insulating shields with an open end. The open end of at least one of the shields is covered with a particle trap. In another embodiment, each of the nested thermally insulating shields is of a substantially cylindrical shape and is substantially coaxially disposed along an axis defined by the heating apparatus. In one embodiment a plurality of getter elements and a heating apparatus are enclosed by three nested evenly spaced cylindrical metal shields that have open ends and are coaxially disposed along an axis defined by the getter elements and the heating apparatus.

Abstract: An improved high-capacity getter pump, suitable for creating and maintaining the vacuum, comprising a plurality of porous sintered blades made from a non-evaporable getter material and having a first main surface; a second main surface, parallel to said first surface and spaced therefrom by a thickness of 0.5-5.0 mm; wherein said blades are arranged in a housing and are separated from each other by a gas conductance, with the adjacent surfaces of adjacent blades being spaced from each other by a distance of 0.5-10 mm.

Abstract: An improved high-capacity getter pump, comprising a plurality of porous sintered piled-up annuli made from a non-evaporable getter material and having: i) a first planar surface having a central hole; ii) a second planar surface, having a broader central hole, parallel to said first surface and spaced therefrom by a distance "d" of 1-10.5 mm; iii) a third intermediate planar surface, interposed between said first and second surfaces, spaced from said first surface by a thickness "t" of 0.5-5.0 mm and having a hole coincident with the hole of said first surface; wherein the first surface of a subsequent annulus is in contact with the second surface of a preceding annulus and wherein the first surface of a subsequent annulus is spaced from the third surface of a preceding annulus by a gas conductance having a height "c" of 0.5-10 mm.

Abstract: The invention relates to an ion sputtering pump having a housing with at least one getter module located in the housing. The getter module has a heating device. In order to reduce the amount of time required for the activation and regeneration of the getter module, the heating device is in direct, intimate thermal contact with the getter module.

Abstract: A bulk getter-pump, consisting primarily of large beds of heated getter-material for use in pumping down in a high-vacuum environment. The pump is designed for applications now are served by turbo, cryo, diffusion, and ion pumps. The pump consists of a meshed cage filled with bulk getter-material pellets, which cage is housed in a housing coupled to a conduit of a vacuum chamber, so that the bulk getter-material is exposed to the interior of the vacuum chamber. In use, a roughing pump is first used to bring the chamber down to a pressure of about 10.sup.3 torr, and then the bulk getter-pump of the invention is operatively coupled to the chamber for sorbing gases, in order to reach a high vacuum.

Abstract: A bulk getter-pump, consisting primarily of large beds of heated getter-material for use in pumping down a vacuum chamber to a rough vacuum. The pump is designed for applications now are served by turbo, cryo, diffusion, and ion pumps. The pump consists of a meshed cage filled with bulk getter-material pellets, which cage is housed in a housing coupled to a conduit of a vacuum chamber, so that the bulk getter-material is exposed to the interior of the vacuum chamber. In use, a roughing pump is first used to bring the chamber down to a pressure of about 2 torr, and then the bulk getter-pump of the invention is operatively coupled to the chamber for sorbing gases, in order to reach a desired vacuum.

Abstract: A method of producing a vacuum in a volume of a hollow body which has at least one outlet opening for the gaseous atmosphere present therein, the method includes the following steps: introducing at least about 3 g/dm.sup.3 of evacuation volume of a metal hydride into the hollow body so as to take up less than about 5% of the volume 3. The metal hydride comprises a hydride forming alloy of the formulaTi(V.sub.1-a-b Fe.sub.a Al.sub.b).sub.xy Mn.sub.z,wherein1<x.ltoreq.20<y.ltoreq.0.2x+y.ltoreq.20<a.ltoreq.0.40<b.ltoreq.0.2a+b.ltoreq.0.5(1-a-b) x.gtoreq.10<z.ltoreq.2-x-y.The metal hydride is heated to a temperature so that a substantial amount of the gaseous hydrogen is released from the hydride, the heating step is performed so that heating of the hollow body will not exceed a temperature of about 500.degree. C.

Abstract: A method is described for the manufacture of a vacuum insulating structure intended mainly, but not exclusively, for use in such domestic appliances as refrigerators or freezers as well as for vehicle walls including aeroplanes and in buildings. A hollow plastic or metal panel is purged to atmospheric air by means of a getterable gas. Vacuum is produced by removing the purge gas and the vacuum is subsequently maintained by contacting the residual gas with a getter material. A vacuum insulating structure thus manufactured is also described.

Abstract: A gettering device for hydrogen isotopes and gaseous hydrocarbons based on the interaction of a plasma and graphite used as cathodic material. The plasma is maintained at a current density within the range of about 1 to about 1000 mA/cm.sup.2. The graphite may be heated to a temperature greater than 1000.degree. C. The new device offers high capacity, low noise, and gas species selectivity.

Abstract: A non-evaporable getter device having an electrophoretically deposited electrically insulated heater and support lead wires. To avoid the production of loose particles or short circuits each support lead wire is encircled by a hollow insulating cylinder whose surfaces are partially covered by the electrophoretically deposited heater insulation thus providing a reinforced insulated heater getter device.

Abstract: The invention relates to a method for heating a gas phase stabilizer (5) installed within a gas-filled proportional counter (1) in order to activate the stabilizer (5). According to the invention, the heat is conducted into the proportional counter (1) along a thermal inlet (3), which is in thermal exchange contact with the stabilizer (5). The thermal inlet (3) employed in forming the gas filling can advantageously be employed for heating the stabilizer up to the activating temperature.

Abstract: An apparatus for generating a mist of negatively charged liquid particles comprises a liquid container, a capillary tube in fluid communication with the container, an electrode at least partially within the passage of the capillary tube and a DC power supply providing a negative potential of at least 5,000 Volts to said electrode. The liquid may be water or other fluids as long as the resistivity of the liquid is in the range of 1.6.times.10.sup.3 to 4.0.times.10.sup.5 Ohms-centimeters. A preferred embodiment utilizes a negative potential of between 5,000 and 8,000 Volts DC and a liquid having a resistivity in the range of 2.times.10.sup.4 to 15.times.10.sup.4 Ohms-centimeters.

Abstract: A device is described for the sorption of hydrogen isotopes at low pressures, their storage and their subsequent release at high pressures. Use is made of a getter material having linear sorption isotherms and a compressor material having non-linear sorption isotherms.

Abstract: In a flat cathode ray display tube having an electron gun adjacent a rear wall of the tube's envelope which produces an electron beam travelling across the rear wall before being turned in the opposite direction and then deflected onto a screen carried by faceplate opposite the rear wall, getter means is situated in one or more recesses, each defined at least in part by an elongate rib formed in the rear wall, e.g. by pressing, with the recess wall shielding the getter means directly from the gun to prevent contamination. The rib serves also to strengthen the rear wall. A line scanning deflector is similarly shielded.

Abstract: A getter device comprises a getter metal vapor releasing material and a source of an alkali metal which releases an alkali metal during or after the latter period of getter metal evaporation. Such getter devices are found to produce less methane after evaporation of the getter metal without producing higher hydrocarbons. A higher pressure of hydrogen is formed which aids cathode functioning.

Abstract: In devices provided with an evacuated bulb in which is present an activated metallic getter, hydrocarbons can be released or produced. As a result, the gas pressure and the heat conductivity increase. In devices according to the invention, for example, low-pressure sodium vapor discharge lamps, solar collectors, display tubes and image intensifiers, a getter auxiliary means is provided. The auxiliary means comprises an inorganic porous carrier charged with a transition metal having an atomic number from the series 23 to 29, 41 to 47 and 73 to 79, in elementary form or in oxide form, or with a combination of at least two of the said materials.

Abstract: A getter sorption pump has at least one getter member of non-evaporation getter material and a corresponding heating element. With this getter pump, a high pump rate is achieved by means of an extremely large surface in the smallest possible space. For this purpose, the heating element is disposed in an insulating tube and a plurality of individual getter members are attached to the insulator tube at a spacing from one another. The getter pump is employed in high-vacuum and gas discharge systems.

Abstract: A getter sorption pump has at least one getter member of non-evaporating getter material and a corresponding heating element. The specific performance of the getter pump is increased along with a simultaneous reduction of necessary heating capacity, and it is stabilized over a long time period by use of a heat accumulator having an extremely high heat storing capability. For this purpose, the heating element is attached to a sintered ceramic body, and an insulating tube onto which the getter member is sintered, in situated thereabove. The getter pump is employed in high-vacuum and gas discharge systems.

Abstract: A hydrocarbon getter pump for use in sealed envelopes comprises an active metal alloy capable of gettering hydrogen, a nickel catalyst and means for heating the nickel catalyst and getter material from 300.degree. to 500.degree. centigrade. The heated catalyst dissociates the hydrocarbon into hydrogen and carbon. The getter material getters the hydrogen and the carbon is deposited on the surfaces of the catalyst.

Abstract: Tubular apparatus for delivering steam or other hot fluids to an oil well comprises an inner tubular having an outer surface and defining an inner space for conveying fluids at a temperature greater than 400 degrees F., and an outer tubular disposed around the inner tubular and defining an annular space with the inner and the outer tubulars being connected together. The annular space is closed to atmospheric pressure. A vacuum is established within the annular space. A getter material for absorbing at least one active gas is disposed within the annular space. Active gases which are absorbed by the getter material include hydrogen formed by corrosion of the outer tubular which hydrogen migrates through the outer tubular into the annular space and gases such as nitrogen, carbon monoxide, and hydrogen that are released from the inner tubular at elevated temperatures.

Abstract: The specification describes a process and apparatus for pumping and removal of unwanted gases by effecting a chemical reaction between the gases and a highly reactive substance which is in the form of aerosol particles, to form a non-volatile, solid reaction product. In one embodiment of the invention, the reactive substance is initially provided in the form of a solid; the solid is heated to liquify it; and the liquid is forced through spray nozzles under high pressure to form the desired aerosol particles, which then react with the gas to be pumped.

Abstract: Vacuum gettering system includes first bulk getter 18 of zironium-aluminum alloy and having a heater 22 therein for activation. Second bulk getter 20 of porous silica glasse's is directly adjacent to getter 18 for heating activation. As vacuum enclosure 10 is pumped out, heater 22 heats both getters to activation temperature to drive off gases and vapors during low temperature enclosure baking and pumpout so that at enclosure closeoff both getters are fully activated.

Abstract: A device for releasing water vapor in electron tubes comprises a holder and a water vapor releasing material carried by said holder. In one embodiment the water vapor releasing material is a hydroxide or hydrated oxide of a metallic element in combination with a binder. In another embodiment it is hydrated alumina.

Abstract: This invention relates to a supported getter device comprising a metallic support structure consisting of a three-dimensional network defining a multiplicity of inter-connecting free cells and a particulate getter material substantially filling at least some of said free cells. This invention also relates to a getter device comprising at least one attachment zone of a compressed three-dimensional metal network attached to at least one supported getter material zone comprising a three-dimensional metal network. Methods of making the getter devices are described.

Abstract: A modular getter pump includes a first and a second supporting electrode. At least one strip of high ohmic resistance material is connected to and supported by the first and second supporting electrodes. The strip of high ohmic resistance material has a length much greater than its width and only a nominal thickness and is pleated into flat substantially parallel zones which are uniformly separated from each other. The pleated strip forms a substrate having a non-evaporable getter metal at least partially embedded therein. A rod means is orthogonally positioned with respect to the width of the pleated strip for maintaining the separation between adjacent parallel zones. Such modular getter pumps can be used singularly or in a multiple array to sorb gases in closed vessels such as, for example, fusion reactors, particle accelerators, storage rings, neutral beam injectors, and others.

Abstract: An accelerator for charged particles comprising: a vacuum tight chamber, means for producing a beam of particles, and means for inhibiting secondary emission. The means for inhibiting secondary emission comprises outwardly extending wedge-shaped members covering the inner walls of the vacuum chamber. The outwardly facing surfaces of the wedge-shaped members are covered with a nonevaporable getter metal.

Abstract: A getter pump comprising two getter elements wherein the first getter element comprises a metallic substrate having a nonevaporable getter metal embedded therein. The second getter element employs a getter metal having a lower hydrogen equilibrium vapor pressure than that of the first getter element.

Abstract: Apparatus for removing the helium ash from a fusion reactor having a D-T plasma comprises a helium trapping site within the reactor plasma confinement device, said trapping site being formed of a trapping material having negligible helium solubility and relatively high hydrogen solubility; and means for depositing said trapping material on said site at a rate sufficient to prevent saturation of helium trapping.