Abstract: Methods and systems are provided for making a coated plastic container, such as for packaged beverages, possessing a gas barrier and having enhanced resistance to loss in barrier due to handling abuses expansion of walls of the container. The system comprises a vacuum cell, a coating source in the vacuum cell for supplying a coating vapor to an external surface of a plastic container positioned within the vacuum cell, and gas feeds for supplying one or more process gases into an interior space of the vacuum cell. The coating source heats and evaporates an inorganic coating material, such as metal or silicon, to form a coating vapor, which is energized to form a plasma. The process gases include a carbon-containing gas, such as acetylene.

Abstract: A method of manufacturing a titanium nitride thin film at the surface of a substrate the chemical vapor deposition method (CVD method) includes supplying trakisdialkylamino titanium (TDAAT and ammonia into a reaction vessel, and heating it a prescribed temperature under a low pressure of less than 100 Pa total pressure, wherein the partial pressure PTDAAT of the source-material gas is set in a range of 0<PNH3/PTDAAT<10 with respect to the partial pressure PNH3 of the added ammonia gas.

Abstract: There provided a powder supply means for supplying a powdery mold releasing agent to a basin and a pressure reduction means for reducing a pressure in a cavity, and in a casting work the powdery mold releasing agent is supplied through a basin into a cavity while reducing a pressure in the cavity.

Abstract: A container, desirably blow molded or extrusion molded, said container having barrier properties and including an upper wall portion having an opening, an intermediate sidewall portion positioned beneath the upper wall portion, and a base portion positioned beneath the intermediate sidewall portion to support the container. The container includes a molded first layer having an inner surface and an outer surface formed from high density polyethylene, and a carbon coating formed on the inner surface of the first layer and adhered thereto and substantially coextensive with the first layer, wherein said carbon coating has a thickness of less than about 10 microns.

Abstract: A hard carbon film (15) is formed directly or through an intermediate layer for enhancing adhesion over an inner surface (11b) of a guide bush (11) for holding a workpiece (51) rotatably and axially slidable on an automatic lathe at a position near a cutting tool, to be in sliding contact with the workpiece (51) or directly or through an intermediate layer for enhancing adhesion on the surface of a superhard lining fixed to the inner surface (11b). The guide bush (11) has remarkably enhanced durability and prevents damaging the workpiece (51) and seizing that makes a machining operation impossible even when the guide bush (11) is used for an extended period of time and when the automatic lathe operates for heavy machining.

Abstract: A method for coating an internal surface of a substrate includes providing a substrate having an internal surface, coating a slurry on the internal surface, the slurry containing a metallic powder, and drying the slurry such that the slurry forms a metal-based coating on the substrate.

Abstract: A prosthesis having an apertured structure is located in a chamber (11) which is taken to sub-atmospheric pressure. Once sub-atmospheric pressure has been reached, a liquid, optionally containing pharmacological agents, is introduced into the chamber. Drawn by the sub-atmospheric pressure, the liquid saturates the apertured structure of the prosthesis. In this way, the invention eliminates the risk of air being trapped in the apertured structure that could give rise to the formation of blood clots after implantation of the prosthesis. The liquid can contain drugs that penetrate the prosthesis, performing their therapeutic action locally and over time after implantation.

Abstract: An article of manufacture is provided that is useful in differentiating between solutes, such as during electrophoretic separations. An embodiment of the article is a capillary tube, that carries a polymer along the inner wall of the capillary tube. The polymer is effective to reduce undesired interactions and preferably includes a polylactam that is absorbed to the surface before the surface is exposed to the solutes. A preferred polylactam is poly(vinylpyrrolidone) with a molecular weight greater than about 1,000,000 daltons (weight-average).

Abstract: The described device is introduced into a plastic container with a narrow opening and serves a plasma enhanced process for treating the inside surface of the container. The device (2) extends between the container opening and the container bottom along the container axis (X) and comprising a gas feed tube (23) for feeding a process gas into the container and permanent magnets (24) for establishing a stationary magnetic field inside the container. The magnets (24) form a column of superimposed magnets which is arranged inside the gas feed tube (23). The north and south poles of each magnet are positioned on opposite sides of the container axis (X). The device may also comprise cooling means (25) for cooling the gas feed tube and the magnets.

Abstract: The invention relates to a coating process, particularly for coating a gas turbine blade (1) having cooling passageways (4) opening out onto the surface (2). During the coating operation, a fluid (6) is directed out of the cooling passageways (4) to prevent blocking of the cooling passageways (4). The invention also relates to an apparatus for implementing this coating process.

Abstract: Methodology for providing a smooth, thin, highly reflective coating to the walls of microchannels disposed in a plate or substrate. Such plates are commonly used in image intensifiers and have more recently been used to provide high resolution X-ray imaging screens. In the process silver nitrate solution is reacted so as to provide a silver amine complex. In a first embodiment of the process, the microchannel plates are disposed vertically in a beaker and immersed, without stirring, in a solution including the silver amine complex and a reducing agent. In a second embodiment of the process, a fluid flow of filtered reactant is directed through the microchannels. In each embodiment the walls of the microchannels become plated with a highly reflective (>90%), thin (20-50nm) and smooth coating of metallic silver.

Abstract: A method of coating an inner face of a weapon barrel with a coating material includes the following steps: introducing the coating material as a component in sheet or foil form into the weapon barrel; positioning the component in the weapon barrel such that a first face of the component is oriented toward the inner face of the barrel and a second face of the component is oriented away from the inner face of the barrel; maintaining an annular clearance between the inner face of the barrel and the component; providing the second face of the component with an explosive; and detonating the explosive for hurling the coating material of the component against the inner face of the barrel for effecting a cold welding between the coating material and the inner face of the barrel.

Abstract: The present invention is directed to a substrate, such as a honeycomb having a plurality of parallel channels defined by the honeycomb walls. The honeycomb has different zones along the length of the channels. The zones are defined by their coating (or lack of coating) and extend for a length of the channel in which there is the same coating and architecture. Soluble components in coating compositions are fixed in their respective zones.

Abstract: There is provided an apparatus for manufacturing a plastic container coated with a diamond-like carbon film comprising; an outer electrode in which a chamber is formed, the shape of the chamber being comparable to an outline of the plastic container, the plastic container being received in the chamber, an inner surface of the chamber of the outer electrode being formed in the shape where the plastic container having a protrusion can be received within the chamber; an inner electrode inserted into the plastic container which is received within the chamber of the outer electrode; and an attaching member which has an inner surface, the shape of the inner surface being comparable to the outline of the plastic container, the attaching member covering an area where the protrusion is formed when the attaching member is attached to the plastic container, the attaching member being able to be received within the chamber of the outer electrode in company with the plastic container in state where the attaching member is

Abstract: A process and device is shown for coating the delineating surfaces of a hollow object, preferably a hollow object having at least one sealable opening, by means of plasma coating, via the action of plasma on the delineating surface of the hollow object that is to be coated.

Abstract: A coating fluid for forming a phosphor screen is coated on an inside surface of a glass panel having a wall portion provided with a wall portion edge at an outside surface of the glass panel. Then, the coating fluid on the inside surface of the glass panel is dried after facing the inside surface of the glass panel downward and placing the wall portion edge onto a panel support stand in a manner that the panel is supported on the support stand primarily by the wall portion edge. Since the glass panel is placed on the support stand in a manner that only the edge portion contacts the support stand, the scattering of coating fluid during this placement can be prevented. As a result, a uniform phosphor layer can be formed on the inside surface of the panel without decreasing the productivity for making such a glass panel on which a phosphor layer is formed.

Abstract: The present invention relates to a method and device for manufacturing coated sleeves, whereby the sleeve is positioned vertically and held stationary, while a feed pipe is introduced from below, by vertical displacement, concentrically into the sleeve. Also from below, an excess of fluid is supplied under pressure, through the feed pipe. The fluid is allowed to emanate from an upper end outlet of the feed pipe and allowed to flow by gravity in the small gap which is formed between the feed pipe and the internal walls of the sleeve. The internal walls of the sleeve are thereby coated with the fluid, while at the same time, the coating of the outside of the sleeve is prevented. The invention also relates to a writing pen comprising a coated sleeve.

Abstract: A method and apparatus for use in impregnating an absorbent fibrous layer or similar portion of a tubular liner with a curable resin material to prepare such a liner for installation into a pipe to repair the pipe. Several vacuum applicators such as hollow needles, all connected to a vacuum, are used simultaneously to evacuate air from the entire absorbent fibrous layer of the tubular liner, beginning at a time significantly before curable resin is first introduced to be absorbed. A timer is used to begin the evacuation automatically.

Abstract: A brake band formed by pressing a smooth hot plate or hot drum heated to a temperature of 350 to 550° C. on a surface of the frictional material made of a fiber component, a filler, a friction adjustment agent and a thermosetting resin on a strap for 1 to 5 seconds before or after the frictional material is fixed.

Abstract: A method of coating an inner face of a metal tube with an electrically conducting coating material includes the steps of positioning a wire, made of the coating material, generally axially in an interior of the tube, along the inner face thereof; and passing an electric current pulse of sufficient intensity through the wire to cause an explosive vaporization thereof, whereby particles of the vaporized material impinge on the inner face of the metal tube and form a layer thereon.

Abstract: A gas inlet, which also serves as a counter electrode, is located inside of a vacuum chamber made of an electrically insulating material. A container is mounted on a mandrel mounted on the gas inlet. The chamber is evacuated to a subatmospheric pressure. A process gas is then introduced into the container through the gas inlet. The process gas is ionized by coupling RF power to a main electrode located adjacent an exterior surface of the chamber and to the gas inlet which deposits a plasma enhanced chemical vapor deposition (PECVD) thin film onto the interior surface of the container.

Abstract: The invention relates to a method and apparatus for applying a protective film of, for example, oil to the interior of a metal pipe for preservation purposes. The method is according to the invention characterized by the steps of placing one end of the pipe to be preserved against a pipe member provided with a spray nozzle, siphoning over a particular amount of oil from a storage vessel into a bent pipe section of said pipe member, and generating and leading a compressed air pulse through the pipe member and the pipe to be preserved by quickly opening and closing a valve which is disposed in said pipe member between said bent pipe section and a pressure vessel which is connected to the other end of said pipe member.

Abstract: A method of inhibiting deposition of material on a wall of a chemical vapor deposition reactor includes providing a chemical vapor deposition reactor having a wall which has an inside facing surface, the inside facing surface at least partially defining a chemical vapor deposition reactor chamber; forming a first material atop the inside facing surface; positioning a substrate in the chemical vapor deposition a reactor chamber, the substrate having an outer surface; and chemical vapor depositing a second material layer on the substrate in a manner which is selective to the substrate outer surface, and not the first material, thereby restricting deposition of the second layer on the reactor inside facing surface.

Abstract: A process for the coating of the flow channels of a cylindrical, honeycomb form catalyst carrier with a dispersion coating through filling of the vertically oriented flow channels with a fill quantity of the coating dispersion through the bottom face of the catalyst carrier and subsequent downward emptying and clearance extraction of the flow channels, as well as drying and calcination of the catalyst carrier, by the following steps:a) filling of the flow channels with a fill quantity that is about 10% greater than the empty volume of the flow channels, so that the coating dispersion goes over the upper face of the catalyst carrier after completion of the filling cycle,b) removal of the excess coating dispersion at the top before emptying of the flow channels andc) emptying and clearance extraction of the flow channels through an extraction impulse, which is generated by connection of a vacuum tank with the bottom face of the catalyst carrier,whereby the time between the beginning of the fill cycle and the en

Abstract: Plasma assisted polymerization and deposition of a very thin inner surface coating in a plastic or metal container without an undesirable increase in container surface temperature is provided to change the surface properties of the internal plastic surface of a container by reaction of the surface with a reactive gas which has been energized to produce a plasma or the surface is activated by a plasma of reactive gas so that it becomes receptive to a further surface reaction.

Abstract: Method and apparatus for applying a protective coating to the surfaces of air vents in a vented brake rotor wherein the method includes the steps of rotating the rotor, directing coating material along with a stream of air toward the inlets of the vents to flood the vents with coating material to coat the surfaces, applying a suction to the outlets of the vents to remove and recover the excess material, and curing the coating. The apparatus includes fixtures for mounting the rotors that are driven to rotate the rotors during the coating operation, and for automatic operation a conveyer for advancing the rotors through a vent coating station, an exterior coating station for coating exterior rotor surfaces, and a curing station.

Abstract: Disclosed herein is a fluororesin-coating process, which comprises the steps of inserting a base having powder of the fluororesin on its surface in the interior of a cylindrical face transfer member, and heating both base and face transfer member by means of an infrared heater from the outside of the face transfer member, thereby heating them in a state that the fluororesin powder layer is pressed by the face transfer member making good use of a difference in coefficient of thermal expansion between the base and the face transfer member to form a fluororesin layer.

Abstract: In a method for forming an inside electrode within a cup-type electrolyte member of an O.sub.2 sensor element, firstly, a nozzle having a paste discharge hole is prepared. The nozzle is inserted into an inside space of the electrolyte member. Then, the paste discharge hole of the nozzle is relatively rotated with respect to the electrolyte member along an inside surface of the electrolyte member while discharging paste therefrom onto the inside surface. Accordingly, the inside electrode formation portion is formed. After forming the inside electrode formation portion, the electrolyte member is baked. As a result, the inside electrode can be disposed on a required portion of the electrolyte member with a uniform thickness.

Abstract: A method for precoating interior surfaces of a plasma CVD reactor after removal of built-up fluorinated silicon oxide residues by in-situ reactor cleaning. The deposition gas mixture includes F, Si, O and optional Ar. The interior surfaces can be precoated with fluorinated silicon oxide using a deposition gas mixture which includes 80 to 200 sccm SiF.sub.4 and 150 to 400 sccm O.sub.2 supplied to the reactor in a gas flow ratio of O.sub.2 :SiF.sub.4 of 1.4 to 3.2. The precoated film can be deposited at a high deposition rate to maintain high throughput in the reactor while providing a precoat film having low compressive stress and thus high film adhesion and low particle generation during subsequent substrate processing in the reactor.

Abstract: A method for impregnating a resin-absorbable tubular liner with a hardenable liquid resin: (a) a hose is connected to a vacuum pump; (b) the hose is inserted into the liner in a manner such that the open end of the hose comes close to, but sufficiently distant from, one end of the liner; (c) the other end of the tubular liner is closed over the hose in a manner such that the hose can freely slide through the closed end of the tubular liner; (d) a predetermined amount of the hardenable liquid resin is injected into the tubular liner through the open end of the tubular liner; (d') the open end of the tubular liner is substantially closed by placing it between a pair of rollers; and (e) the vacuum pump is operated to evacuate the hose while at the same time the hose and/or the resin-absorbable tubular liner are moved in a manner such that the length of the hose inside the liner is reduced.

Abstract: A process for producing low-density, porous silica films in a vacuum environment is provided. The films are advantageous for use as low dielectric constant insulating materials in semiconductor devices. In a first step, an organic-group-containing silica precursor is deposited on a semiconductor substrate in a chemical vapor deposition reactor. In a second step, the organic groups are removed by heating in a furnace in an oxidizing environment or by exposure to an oxidizing plasma, thereby creating a low density silica film.

Abstract: A method of manufacturing an insulating layer 30 (IMD layer) that has a uniform etch rate and forms improved via/contact opening profiles. The method forms a coating film 11 of silicon oxide over the chamber walls 22 of a CVD reactor. Next, the wafer 12 is loaded into the CVD reactor 20. A first insulating layer 30 composed of oxide preferably formed by a sub-atmospheric undoped silicon glass (SAUSG) using TEOS is formed over the semiconductor structure 12. Via/Contact Openings 32 are then etched in the insulating layer 30. The coating film 11 over the interior surfaces (e.g., reactor walls) 22 improves the etch rate uniformity of the first insulating layer 30. The first insulating layer 30 is preferably a inter metal dielectric (IMD) layer.

Abstract: A process for producing a carbon foam heat sink is disclosed which obviates the need for conventional oxidative stabilization. The process employs mesophase or isotropic pitch and a simplified process using a single mold. The foam has a relatively uniform distribution of pore sizes and a highly aligned graphic structure in the struts. The foam material can be made into a composite which is useful in high temperature sandwich panels for both thermal and structural applications. The foam is encased and filled with a phase change material to provide a very efficient heat sink device.

Abstract: A guide bush (11), coming in sliding contact with a workpiece, for use in an automatic lathe is placed in a vacuum vessel (61), and after inserting an auxiliary electrode (71), which is grounded or to which a positive DC voltage is applied, in the center bore (11j) of the guide bush (11), forming the inner surface (11b) thereof, the vacuum vessel (61) is evacuated such that an initially reached pressure therein is not higher than a predetermined degree of vacuum. Then, after a DC voltage is applied to an anode (79) and an AC voltage is applied to a filament (81) while applying a DC voltage to the guide bush (11), carbon-containing gas is fed into the vacuum vessel (61), producing a plasma therein and the pressure inside the vacuum vessel (61) is controlled to attain a film-forming pressure higher than the initially reached pressure while forming a hard carbon film over the inner surface of the guide bush (11) by means of a plasma CVD process.

Abstract: A method for fabricating an electron multiplier is provided. The method consists of depositing a random channel layer on a substrate such that the random channel layer is capable of producing a cascade secondary electron emission in response to an incident electron in the presence of an electric field.

Abstract: An apparatus and method for facilitating plasma processing and in particular chemical plasma enhanced vapor deposition, plasma polymerization or plasma treatment of barrier materials onto the interior surface of containers barrier materials are useful for providing an effective barrier against gas and/or water permeability in containers and for extending shelf-life of containers, especially plastic evacuated blood collection devices.

Abstract: The invention is a method and device for sealing leaks remotely by means of injecting a previously prepared aerosol into the enclosure being sealed according to a particular sealing efficiency defined by the product of a penetration efficiency and a particle deposition efficiency. By using different limits in the relationship between penetration efficiency and flowrate, the same method according the invention can be used for coating the inside of an enclosure. Specifically the invention is a method and device for preparing, transporting, and depositing a solid phase aerosol to the interior surface of the enclosure relating particle size, particle carrier flow rate, and pressure differential, so that particles deposited there can bridge and substantially seal each leak, with out providing a substantial coating at inside surfaces of the enclosure other than the leak.

Abstract: A device for coating the internal surfaces of elongate hollow spaces includes a shield substantially corresponding to the cross section of the hollow space and capable of being displaced in the longitudinal direction of the hollow space by means of a bogie connected therewith. The shield is connected with supply ducts for a curable mass being in the plastic state. The supply ducts are provided with outlet openings substantially uniformly distributed about the periphery of the cross section of the hollow space. A blower is provided with a seat for a flexible tube capable of being pressed at the hollow space to be coated and substantially air-tight relative to the inner side and includes a supporting element capable of being stationarily anchored within the hollow space. The shield is provided with a central opening intended for the passage of the flexible tube containing a fiber material in addition to the impermeable layer.

Abstract: A process for CVD coating of a hollow body with a barrier layer, comprising measuring the temperature inside of the body by igniting plasma within said body with at least one ignition pulse and correlating the time between the ignition pulse and a pulse of light given off by plasma ignition, and a device for carrying out such a process.

Abstract: Disclosed are methods and compositions for removing, inhibiting, or preventing corrosion on metal surfaces within water channels in salt-water cooled internal combustion engines. These methods comprise contacting the metal surfaces with an aqueous mixture of a di- lower alkyl fatty acid amide.

Abstract: The present invention relates to a method of forming a two-layer intermediate film over the inner surface of a cylindrical member, such as a bushing or a cylinder, with a DLC film being formed on the intermediate film with a uniform thickness by using an auxiliary electrode, greatly enhancing of abrasion resistance of the inner surface. The cylindrical member is placed in a vacuum vessel, an auxiliary electrode of a first intermediate film forming material is inserted in the bore of the cylindrical member, a sputtering gas is supplied into the vacuum vessel, keep the auxiliary electrode at ground potential or a negative DC voltage is applied to the auxiliary electrode to produce a plasma around the auxiliary electrode in order that a first intermediate film is formed over the inner surface of the cylindrical member.

Abstract: Method of making an apparatus for inserting intraocular lenses (IOLs) into eyes include a hollow tube including a material and having a plasma exposed interior wall defining a hollow space through which an IOL is passed and an outlet through which the IOL is passed from the hollow space into an eye, and a lubricity enhancing component physically secured to said hollow tube and concentrated at or near the interior wall in an amount effective to facilitate the passage of the IOL through the hollow space.

Abstract: A hard carbon film is formed in a vacuum vessel directly or through an intermediate layer for enhancing adhesion over an inner surface of a guide bush with a uniform thickness and excellent adhesion wherein the inner surface is in sliding contact with a workpiece and the guide bush is mounted on an automatic lathe for holding the workpiece rotatably and slidably in the axial direction near a cutting tool. Accordingly, the method comprises disposing the guide bush in a vacuum vessel, inserting an auxiliary electrode into the center bore forming the inner surface of the guide bush to be at a ground potential, introducing a gas containing carbon into the vacuum vessel through the gas inlet port after evacuating the vacuum vessel, and applying a DC voltage to the guide bush through a reactor, thereby producing a plasma in the vacuum vessel so that a hard carbon film of hydrogenated amorphous carbon is formed over the inner surface of the guide bush by a plasma CVD method.

Abstract: A composite ceramic board having a low dielectric constant and a low heat expansion coefficient and being suitable for use as a heat-resistant material having a high dimensional accuracy and a low dielectric constant, which is formed of a sintered substrate (II) having a thickness of 0.2 to 10 mm and a thermosetting resin (R) which is integrated into the sintered substrate (II) by being impregnated into pores of the sintered substrate (II) under vacuum and cured, the sintered substrate (II) being a substrate obtained from an inorganic continuous porous sintered body (I) produced by sintering a spherical inorganic powder having an average particle diameter of 0.1 to 10 .mu.m in the presence of a sintering aid, the sintered inorganic powder substantially retaining the spherical forms, the inorganic continuously porous sintered body (I) having an average pore diameter of 0.1 to 10 .mu.m, a true porosity of 8 to 35% and a closed porosity of 2% or less.

Abstract: A method of lining a surface of a substrate comprises providing a reactive mixture which comprises (1) a resin containing active hydrogens; (2) a polycarbodiimide; and (3) an organic diluent; reacting the resin containing active hydrogens and the polycarbodiimide to chemically bind the resin and the polycarbodiimide; applying the chemically bound resin and polycarbodiimide to the surface of the substrate; and curing the chemically bound resin and polycarbodiimide in the presence of an initiator to form a cured resin material which lines the surface of the substrate.

Abstract: An auxiliary electrode which is to be connected to a ground potential or applied with a positive DC voltage is disposed in a center bore which forms an inner surface of a guide bush, and a ringlike dummy member made of a conductive material having an internal diameter equal to or larger than the diameter of the center bore of the guide bush with its both ends having a different diameter is placed on an end face of the guide bush opening the inner surface thereof so that one end having the smaller diameter contacts the end face of the guide bush with its center in alignment with the central axis of the center bore. A DLC film is formed over an inner surface of a guide bush which is in sliding contact with a workpiece held in the guide bush by disposing the guide bush in a vacuum vessel after evacuating the vessel and introducing a gas containing carbon, producing a plasma in a vacuum vessel by applying a DC voltage or a radio frequency power to the guide bush by the plasma CVD process.

Abstract: A process for placing an ultra thin layer of a non-porous gas permeable polymer continuously over an entire filter surface area allows the fabrication of compact, high flux, fouling resistant gas filters. The process involves contacting a dilute coating solution of gas permeable polymer in a solvent with one side of a microporous substrate. The pore size of the substrate is chosen for its ability to effectively filter the gas permeable polymer from the coating solution. Solvent of the coating solution is made to flow through the microporous substrate which causes an ultra thin layer of polymer to build up on the side of substrate. When a desired thickness of polymer is built up, the solution and solvent is removed and residual solvent is evaporated, preferably by passing a gas at high rate over the surface of the polymer layer.This process can be used to coat flat sheet and hollow fiber substrates.

Abstract: A plastic vessel has a barrier coating comprising sequentially arranged barrier layers of organic polymer and of inorganic oxides, nitrides or oxynitrides. The barrier coating preferably has at least two inorganic barrier layers. The thickness of the inorganic barrier layers lies between 2 and 300 nm and the thickness of the organic barrier layer lies between 2 and 1000 nm. The total thickness of the layer packet should not exceed 0.1 mm.

Abstract: A membrane-coated substrate and method for forming the membrane coating on the substrate that involves providing a porous inorganic monolithic substrate having one or more through channels having inner surfaces, providing solid polymeric film fusible to the substrate, and joining the film to the substrate by applying the film in a softened state to those inner surfaces and applying pressure thereto, so that the film fuses to and coats the inner surfaces of the channels. A workstream is modified by passing it through the membrane-coated substrate to cause modification of the workstream by the membrane coating.

Abstract: A cylindrical member having a center bore is disposed in a vacuum vessel provided with a gas inlet port and a gas outlet port, and an auxiliary electrode is inserted into the center bore of the cylindrical member along the central axis thereof so as to extend to substantially an entire length of the center bore, thereby permitting the auxiliary electrode to be grounded or having a positive DC voltage applied to the auxiliary electrode. A gas containing carbon is supplied into the vacuum vessel through the gas inlet port after the vacuum vessel is evacuated and a voltage is applied to the cylindrical member to produce a plasma in the vacuum vessel including an inside of the center bore of the cylindrical member, thereby forming a hard carbon film over the inner surface of the cylindrical member by a plasma CVD process.