Abstract: A method of introducing small amounts of a refractory element into a vapor deposition coating. A second material (30), containing at least two elements which are desired to be deposited as a coating on a base material, has placed over it a first material (20) substantially comprising such two elements and a refractory element. The first material (20) is adapted to permit transport of the at least two elements in the second material (30) through the first material (20) when the first (20) and second (30) material are in a molten state and in touching contact with the other so as to permit evaporation of the two elements and the refractory element from an exposed surface. Heat is supplied to the first (20) and second (30) materials to permit evaporation of the at least two elements of second material (30) and the refractory element in the first material (20), and the resulting vapors are condensed as a deposit on a base material (50).

Abstract: In order to deopsit a high-grade and extra-thin film without causing damage to the substrate at a relatively low temperature, the present invention provides a method for forming a cluster which is a lumpy group of atoms or molecules of a reactive substance at the room temperature under the atmospheric pressure, irradiating electrons onto clusters, irradiating the resulting cluster ions onto a substrate surface by accelerating by an acceleration voltage, and at the same time or alternately, irradiating one or more component gases of the deposit film onto the substrate surface, thereby depositing a thin film on the substrate surface through reaction.

Abstract: In order to deopsit a high-grade and extra-thin film without causing damage to the substrate at a relatively low temperature,

Abstract: A process for irradiating material in web form by means of electron beams and/or UV rays, wherein the material is applied to a transport means, the material on the transport means is guided through a first irradiation in which the material is irradiated on the open side, the material is transferred from the transport means to a substrate, and the material on the substrate is guided through a second irradiation in which the material is irradiated on the second, hitherto unirradiated, open side.

Abstract: To provide a thin film forming method and apparatus that can automatically form thin films having constant optical properties with high reproducibility Antireflection films are deposited on lenses 2a that are held by a coating dome 2 by vaporizing an evaporation material 4 by using an electron gun 3 The power to be applied to the electron gun 3 is controlled so that a transmission or reflection light quantity value that is measured at each time point by an optical film thickness meter 10 becomes equal or approximately equal to a standard light quantity value stored in a standard light quantity value data storing means

Abstract: A method of producing a coating of solvent-free pressure-sensitive adhesive systems on substrates, especially release-coated substrates, in which a fluid film is applied to a rotating roller by means of a fluid applicator, the pressure-sensitive adhesive system is applied in one or more layers to the fluid film by means of an adhesive applicator, and the roller is contacted with the substrate, so that the pressure-sensitive adhesive system is transferred from the roller to the substrate.

Abstract: An improved method for applying a ceramic material, such as a thermal barrier coating to an article. A method for applying a ceramic material as a coating to a substrate article in which the thermal conductivity of the ceramic material is reduced or lowered is provided. The thermal conductivity of a coating applied by a physical vapor deposition (PVD) method is dependent upon its distance from the source(s) of material used for the coating. The thermal conductivity of the applied coating is altered by adjusting the position of the article undergoing the PVD process by increasing the distances of the article or workpiece from the ingot or source of ceramic material to provide a coating of lower thermal conductivity. In accordance with the present invention, the article to be coated is positioned at a distance required to achieve at least a 10% reduction in the thermal conductivity of the applied coating.

Abstract: A method for forming a thin film includes the steps of: supplying a deposition material in the form of a liquid onto a heated surface; heating and vaporizing the deposition material on the heated surface while the deposition material is undergoing movement; and depositing the deposition material onto a deposition surface. The deposition material is supplied onto a position of the heated surface where the vaporized deposition material does not reach the deposition surface.

Abstract: A method of depositing nano-particles in a gas stream for efficiently depositing nano-particles by irradiating an electron beam on charged nano-particles in the stream of a first gas species containing the nano-particles, as well as a method of modifying the surface of the nano-particles in a gas stream by mixing them with the first gas species in a gas mixing chamber thereby activating the second gas species, intended for providing a method of depositing nano-particles and a method of modifying the surface thereof in a gas stream, capable of efficiently depositing the nano-particles in a charged state in a gas stream and modifying the surface of the nano-particles which are extremely sensitive to defects and impurities caused by large exposure ratio of surface atoms in a gas stream at a good controllability.

Abstract: A process for casting and preparing an ingot of a beta-phase NiAl-based material, particularly for use in PVD coating processes. The method entails melting a nickel-aluminum composition having an aluminum content below that required for stoichiometric beta-phase NiAl intermetallic so as to form a melt comprising nickel and Ni3Al. Aluminum is then added to the melt, causing an exothermic reaction between nickel and aluminum as the melt equilibrium shifts from Ni3Al to NiAl. However, the aluminum is added at a rate sufficiently low to avoid a violent exothermic reaction. The addition of aluminum continues until sufficient aluminum has been added to the melt to yield a beta-phase NiAl-based material. The beta-phase NiAl-based material is then solidified to form an ingot, which is then heated and pressed to close porosity and homogenize the microstructure of the ingot.

Abstract: A surface hardening method for resins and a surface hardened resin, capable of reforming the surface of a plastic disk substrate at low energy in a short time, and a production device of such a resin is disclosed. The formation of an ion-implanted layer 11 by implanting equal to or more than 1017 carbon ions per cm2 into the surface of a plastic disk substrate 10 at equal to or less than 20 KeV and the formation of a thin film 12 of high hardness on the ion-implanted layer 11 can be performed alternately or simultaneously, and the hardening rate is increased further by using a bias device.

Abstract: A method, composition and system for coating an external surface of containers and in particular, plastic containers, provides for low permeability to gases and vapors. The coating applied to the external surface of the containers is very thin and is comprised of one or several inorganic substances or layers of substances. For example, the coating can include silica which is bonded to the external surface of the container. This coating will be flexible and can be applied regardless of the container's internal pressure or lack thereof. The coating will firmly adhere to the container and possess an enhanced gas barrier effect after pressurization even when the coating is scratched, fractured, flexed and/or stretched. Moreover, this gas barrier enhancement will be substantially unaffected by filling of the container.

Abstract: This invention relates to a process for metalizing polyolefin film in which at least one outermost layer of the unmetalized polyolefin film has at least about 90% cycloolefin polymer that has not been subjected to a process for increasing surface tension before metalization. The metalized films are useful as dielectrics in capacitors.

Abstract: A method, composition and system for coating an external surface of containers and in particular, plastic containers, provides for low permeability to gases and vapors. The coating applied to the external surface of the containers is very thin and is comprised of one or several inorganic substances or layers of substances. For example, the coating can include silica which is bonded to the external surface of the container. This coating will be flexible and can be applied regardless of the container's internal pressure or lack thereof. The coating will firmly adhere to the container and possess an enhanced gas barrier effect after pressurization even when the coating is scratched, fractured, flexed and/or stretched. Moreover, this gas barrier enhancement will be substantially unaffected by filling of the container.

Abstract: Disclosed is an electron beam evaporator for installation in a vacuum apparatus which provides for variable positioning during or between applications of a coating. The apparatus has a carrier plate which is a flat hollow body, the top cover plate of which supports the evaporator. The hollow body is disposed over the bore in the tank such that it can be turned about the main axis of the bore. The component assemblies of the electron beam evaporator are vacuum-tight on the cover plate and the connecting lines are carried through the interior of the hollow body to the component assemblies.

Abstract: To provide a thin film forming method and apparatus that can automatically form thin films having constant optical properties with high reproducibility. Antireflection films are deposited on lenses 2a that are held by a coating dome 2 by vaporizing an evaporation material 4 by using an electron gun 3. The power to be applied to the electron gun 3 is controlled so that a transmission or reflection light quantity value that is measured at each time point by an optical film thickness meter 10 becomes equal or approximately equal to a standard light quantity value stored in a standard light quantity value data storing device.

Abstract: There is provided a making method of a coated body by using ion plating. A melt and evaporating source housed in an evaporation container disposed above a subject to be coated in a vacuum container, is heated. The melt and evaporating source is evaporated through a number of fine evaporation holes formed in an evaporation face formed by the bottom of the evaporation container, yet preventing the melt and evaporating source from dropping. The evaporated particles from the melt and evaporating source are ionized with the use of plasma generated between the evaporation container and the subject to be coated. From above, the surface of the subject to be coated is coated with the ionized evaporated-particles, causing the ionized evaporated-particles to adhere to the surface of the subject to be coated, thus forming a coating film thereon.

Abstract: A phosphor and a method of deposition.

Abstract: A method is disclosed for the operation of a high-power electron beam for the vaporization of materials in a target. With this method, static and dynamic deflection errors are corrected. First, the static and dynamic deflection errors are ascertained by means of a teach-in process for concrete spatial coordinates and concrete frequencies of the deflection currents and stored in a memory. For the later operation, this stored data is used in such a way that input geometric data for the incidence points of the electron beam is automatically recalculated into corrected current values which bring about the exact incidence onto the input points. A corresponding procedure takes place with the input of frequencies for the deflection current. The input frequencies are automatically corrected in terms of frequency and amplitude in order to eliminate the frequency-dependent attenuation effects.

Abstract: In a radiation image storage panel composed of a support sheet and a phosphor layer formed on a surface of the support sheet by vapor-accumulating method, the phosphor layer is composed of prismatic crystals of phosphor aligned in the same direction, and each of the crystals has a convex surface at one end. The radiation image storage panel is favorably employed in combination with a line sensor in a radiation image recording and reproducing method.

Abstract: Objects of the invention are to provide a novel vapor deposition material for coating from which a thermal barrier coating film excellent in heat resistance and thermal shock resistance can be satisfactorily formed even by the EB-PVD method, and to provide a method of vapor deposition in which the vapor deposition material is used. The vapor deposition material comprises a zirconia sintered body containing a stabilizer, wherein the sintered body has a content of monoclinic crystals of from 25 to 90% and has a maximum thermal expansion ratio not exceeding 6×10−3 based on room temperature when heated in the temperature range of from room temperature to 1,200° C. This zirconia sintered body preferably has a tapped density of from 3.0 to 5.5 g/cm3, a porosity of from 5 to 50%, and a mode size of pores of from 0.3 to 10 &mgr;m, and in the sintered body the volume of pores of from 0.1 to 10 &mgr;m preferably accounts for at least 90% of the total pore volume.

Abstract: A thermal barrier coating for superalloy turbine engine vanes and blades that are exposed to high temperature gas is disclosed. The coating includes an aluminide or MCrAIY layer, an alumina layer, and a ceramic top layer. The ceramic layer has a columnar grain microstructure. A bond inhibitor is disposed in the gaps between the columnar grains. This inhibitor is either unstabilized zirconia, unstabilized hafnia, or a mixture thereof.

Abstract: An improved crucible cover for multiple pocket electron beam sources has been invented. The invention provides selection between one of the multiple pockets for evaporative heating and a noncontacting, line-of-sight blocking baffle between heated and unheated pockets. In one embodiment, the baffle is formed by the cooperation of a crucible surface groove with a cover feature that extends into the groove. In a second embodiment, the baffle is formed by a barrier extending upwards from the crucible surface between pockets that cooperates with a cover to form the line-of-sight baffle. The crucible and cover in these embodiments accommodate deposits without hindering the ability of the baffle to reduce contamination or interfere with the operation of the source. Additionally, the cover and crucible may be operated separately, with a cover lifting mechanism that lowers the cover to form a baffle and raises the cover to allow the separately controlled rotation of the crucible.

Abstract: A half bearing has a backing member and at least one metallic overlay, which is applied by electron beam vapour deposition and which comprises at least one finely dispersed component in a matrix material, the atomic weight of which component is greater than that of the matrix material, wherein the concentration of the finely dispersed component (7) decreases continuously from the apex area (8) of the half bearing (1) towards the area (9) of the partial surfaces. The method is characterised in that, during the coating process, an inert gas pressure of 0.1 to 5 Pa is set in the apex area of the bearing shell.

Abstract: A continuously-graded bond coat comprises a gradient of at least one material characteristic value. The gradient extends from a first material characteristic value at a first surface region to a second material characteristic value at a second surface region. The continuously-graded bond coat can be used in a thermal barrier coating system. A source ingot for forming the continuously-graded bond coat comprises aluminum, in an atomic percent range from about 50.0 to less than about 100.0; chromium in an atomic percent range from about 5.0 to about 40.0; silicon in an atomic percent range from about 1.0 to about 17.0; zirconium in an atomic percent range from about a trace to about a 0.5, yttrium in an atomic percent range from a trace to about 2.0; and hafnium in an atomic percent range from about 0.5 to about 2.0. A method for forming the continuously-graded bond coat with the gradient is also provided by the invention.

Abstract: In a method for producing laminate, a buffer layer is applied to a substrate, with the buffer layer material being evaporated from the buffer layer material dispensing devices at an angle &agr;1≠0 at the normal to the substrate surface onto the latter, before an oriented thin layer is evaporated. According to the invention, provision is made such that (a) following evaporation of the buffer layer and prior to the evaporation of the oriented thin layer, at least one cover layer is evaporated under deposition conditions that vary from those under which the buffer layer was applied, especially at a different pressure, different temperature, different rate, and/or different angle &agr;2≠&agr;1, especially &agr;2<&agr;1, preferably &agr;2≈0° to the substrate surface normal, and/or is evaporated on the buffer layer in such fashion that the buffer layer has a biaxial texture and/or facets.

Abstract: An electron beam evaporator, which is formed of the component assemblies: beam generator, deflection system and water-cooled crucible/rotary crucible, is fastened on the cover plate of a flat hollow body.

Abstract: A thermal barrier coating system and a method for forming the coating system on an article. The coating system employs a bond coat of a nickel aluminide alloy over which a thermal-insulating ceramic layer is deposited. The nickel aluminide bond coat contains zirconium, but is otherwise predominantly of the beta (&bgr;) NiAl phase. The bond coat is preferably deposited by a physical vapor deposition process to have a fine-grain microstructure and a limited diffusion zone in the article surface.

Abstract: When an insulator is irradiated with an electron beam, a pulse-shape voltage is applied to the insulator from a pulse power source. As a result, a charge-up state of the insulator can be prevented. If an object which must be subjected to surface modification is an insulator, the object can effectively be irradiated with the electron beam to perform the surface modification.

Abstract: A display as for images and/or information comprises a plurality of light-emitting fibers disposed in side-by-side arrangement to define a viewing surface. Each light-emitting fiber includes a plurality of light-emitting elements disposed along its length, each having two electrodes between which are applied electrical signals to cause the light-emitting element to emit light to display a pixel or sub-pixel of the image and/or information. The light-emitting fiber includes an electrical conductor disposed along its length to serve as a first electrode, a layer of light-emissive material disposed thereon, and a plurality of electrical contacts disposed on the light-emissive material to serve as the second electrodes of the light-emitting elements, and are formed in a continuous process wherein a transparent fiber passes through a plurality of processing chambers for receiving the electrical conductor, the light-emissive layer and the plurality of electrical contacts thereon.

Abstract: A method is disclosed for the operation of a high-power electron beam for the vaporization of materials in a target. With this method, static and dynamic deflection errors are corrected. First, the static and dynamic deflection errors are ascertained by means of a teach-in process for concrete spatial coordinates and concrete frequencies of the deflection currents and stored in a memory. For the later operation, this stored data is used in such a way that input geometric data for the incidence points of the electron beam is automatically recalculated into corrected current values which bring about the exact incidence onto the input points. A corresponding procedure takes place with the input of frequencies for the deflection current. The input frequencies are automatically corrected in terms of frequency and amplitude in order to eliminate the frequency-dependent attenuation effects.

Abstract: Disclosed is a magnetic film forming method of forming a magnetic film on a substrate by preparing a material A formed of oxide of an element T of at least one kind of Fe, Co, and Ni and a material B formed of oxide of an element M of at least one kind selected from Ti, Zr, Hf, Nb, Ta, Cr, Mo, Si, P, C, W, B, Al, Ga, Ge, and rare earth elements and making a target by sintering the powders of the material A and the material B or preparing the material A formed of oxide of the element T of at least one kind of Fe, Co, and Ni, the material B formed of oxide of the element M of at least one kind selected from Ti, Zr, Hf, Nb, Ta, Cr, Mo, Si, P, C, W, B, Al, Ga, Ge, and rare earth elements and a material C formed of an element S of at least one kind of Fe, Co, and Ni and making a target by sintering the powders of the material A, the material B and the material C; disposing the target in a film forming apparatus so that the target confronts a substrate; and forming the magnetic film on the substrate.

Abstract: A method of forming titanium boronitride coatings using ion beam assisted deposition. The method involves exposing the substrate to a vacuum, depositing titanium onto the substrate, substantially simultaneously exposing the substrate to a source comprising boron and nitrogen, and substantially simultaneously bombarding the substrate with an energetic beam of ions under conditions effective to form a quantity of titanium-boron bonds and a quantity of titanium-nitrogen bonds effective to produce a titanium boronitride coating having a hardness of at least about 5000 kg/mm2.

Abstract: A metallic article includes a bond coating and a ceramic thermal barrier coating on the bond coating. The ceramic thermal barrier coating includes a plurality of columnar grains, which extend perpendicularly to the surface of the metallic article. Each columnar grain includes a plurality of layers. Some of the layers include sub-grains extending at an acute angle to the surface of the metallic article to form voids between adjacent sub-grains. The voids are arranged at an acute angle to the surface of the metallic article and reduce the thermal conductivity of the ceramic thermal barrier coating. Some of the layers include sub-grains extending perpendicularly to the surface of the metallic article to provide erosion resistance.

Abstract: Fuel cell electrodes comprising a minimal load of catalyst having maximum catalytic activity and a method of forming such fuel cell electrodes. The method comprises vaporizing a catalyst, preferably platinum, in a vacuum to form a catalyst vapor. A catalytically effective amount of the catalyst vapor is deposited onto a carbon catalyst support on the fuel cell electrode. The electrode preferably is carbon cloth. The method reduces the amount of catalyst needed for a high performance fuel cell electrode to about 0.3 mg/cm.sup.2 or less.

Abstract: A process for depositing a transparent coating of indium tin oxide on a substrate comprising providing said substrate in a partial vacuum environment and conducting electron beam evaporation of tin oxide doped indium oxide granules while operating an ion source providing oxygen adjacent said substrate until a coating of indium tin oxide is deposited on at least a portion of said substrate.

Abstract: A vapor deposition material which is a molded body composed of powdery zirconia and a stabilizer, the molded body having a fine structure constituted of a mixture of granules of zirconia particles and non-granulated particles; granules of particle diameter ranging from 20 to 300 .mu.m constitute 20 to 90% of the molded body; the granules of the zirconia particles containing substantially no stabilizer, and being constituted of crystals of a monoclinic phase and a cubic phase with a ratio of the monoclinic phase of 70% or higher; and the particles constituting the granules having an average particle diameter from 0.5 to 15 .mu.m. A process for vapor deposition which employs the above vapor deposition material, and further a member is provided of a base article coated directly, or with interposition of a third film, with a thin zirconia film.

Abstract: The present invention relates generally to an improved process for providing complete via fill on a substrate and planarization of metal layers to form continuous, void-free contacts or vias in sub-half micron applications. In one aspect of the invention, a refractory layer is deposited onto a substrate having high aspect ratio contacts or vias formed thereon. A CVD metal layer, such as CVD Al or CVD Cu, is then deposited onto the refractory layer at low temperatures to provide a conformal wetting layer for a PVD Cu. Next, a PVD Cu is deposited onto the previously formed CVD Cu layer at a temperature below that of the melting point temperature of the metal. The resulting CVD/PVD Cu layer is substantially void-free.

Abstract: A metallic article includes a bond coating and a ceramic thermal barrier coating on the bond coating. The ceramic thermal barrier coating includes a plurality of columnar grains extending substantially perpendicularly to the surface of the metallic article. Each columnar gain has a plurality of first layers, a plurality of second layers and a plurality of third layers. The first layers have a different structure from the second layers and the third layers. The second layers have a different structure from the third layers. The first layers have the same composition as the third layers. The second layers have a greater proportion of voids than the first layers and the third layers. The voids reduce the thermal conductivity of the thermal barrier coating. The second layers may also have a different composition from the first layers and the third layers to reduce the thermal conductivity.

Abstract: Disclosed is a method of coating cutting edges, more particularly razor blade cutting edges, with polytetrafluoroethylene (PTFE). The present method of forming a polytetrafluoroethylene (PTFE) coating on a razor blade cutting edge comprises: spraying the edge of an aqueous dispersion of PTFE having a molecular weight of at least 500,000 to form a coating of the PTFE of the cutting edge; subjecting the PTFE coating to ionizing radiation in the presence of an oxygen containing gas to obtain a radiation dose of up to 50 Mrads, and then sintering the PTFE coating.

Abstract: The present invention is directed to a method for forming dielectric thin films having substantially reduced electrical losses at microwave and millimeter wave frequencies relative to conventional dielectric thin films. The reduction in losses is realized by dramatically increasing the grain sizes of the dielectric films, thereby minimizing intergranular scattering of the microwave signal due to grain boundaries and point defects. The increase in grain size is realized by heating the film to a temperature at which the grains experience regrowth. The grain size of the films can be further increased by first depositing the films with an excess of one of the compoents, such that a highly mobile grain boundary phase is formed.

Abstract: An abrasion-resistant dielectric composite product is described comprising a substrate and an abrasion wear resistant coating material comprising carbon, hydrogen, silicon, and oxygen and a dielectric material. An improved method is provided for the deposition of highly durable and abrasion-resistant multilayer dielectric antireflective coatings and reflective colored mirror coatings onto plastic lenses such as ophthalmic lenses, safety lenses, sunglass lenses, and sports optics. An adhesion-enhancing polymer layer may be deposited onto the plastic substrate prior to deposition of the abrasion-resistant first coating layer. The multilayer dielectric coating structure consists of a transparent, highly abrasion-resistant first coating, and a second dielectric coating composed of at least one layer of dielectric material.

Abstract: A method of forming metallization layers and vias as part of an interconnect structure within an integrated circuit ("IC") is disclosed. The metallization layers and vias are formed of an alloy consisting of tungsten and one or more other materials such as aluminum, gold, copper, cobalt, titanium, molybdenum or platinum. In the alternative, the alloy may include aluminum and exclude tungsten. The alloy that forms the metallization layers and vias is deposited onto the IC substrate using ionized cluster beam ("ICB") apparatus. The IC substrate is an "in-process" IC in that various active devices (e.g., bipolar and/or MOS transistors), resistors and capacitors are formed in the substrate using conventional techniques prior to the ICB deposition of the alloy layers. Intermediate IC substrate processing steps (e.g., patterning and etching to form the vias) may take place in-between ICB deposition steps.

Abstract: The present invention relates to a process for vapor-depositing zirconium dioxide on ceramic or metallic substrates, and the heat-insulating layers obtainable by such process.In particular, the invention relates to a process for vapor-depositing zirconium dioxide, optionally doped with rare-earth metal oxides or mixtures of such oxides, on ceramic or metallic substrates in a range of substrate temperatures of from 600 to 1550.degree. C. while the substrate is continuously rotated at a speed in the range of from 1 to 300 rpm, characterized in that, following the nucleation phase, the rotational speed and the temperature are adjusted to a range defined by the equations: ##EQU1## where T represents the substrate temperature in .degree. K, and .omega. represents the rotational speed of the substrate in rpm, wherein the rotational speed is varied continuously or discontinuously, or alternatively in alternating senses of rotation.

Abstract: A method is provided for physical vapor deposition of ceramic thermal barrier coatings and articles made therefrom. Impurity levels in conventional yttria stabilized zirconia source materials have caused undesired spitting (eruptions) due to a combined effect of various impurities thereby requiring relatively low evaporation rates to control the level of spitting during the process. The present method provides a high purity source material having a purity index sufficiently low to result in reduced spitting in the vapor deposition process and to permit increased evaporation rates. Reducing the density of the source material has also been found to reduce spitting. The method permits higher processing rates and/or reduced levels of spitting.

Abstract: A method is disclosed for generating a ceramic coating on a superalloy substrate. A first constituent of the coating and a second constituent of the coating are provided separate from one another, and preferably within a sealed chamber that has been evacuated. The first constituent and the second constituent are heated and evaporated to generate a first evaporant and a second evaporant, and form a vapor flux. The flux is then condensed on the article to generate the coating.

Abstract: A method of producing an aluminum film on a substrate, from which very narrow aluminum conductor tracks can be created that are highly resistant to electromigration and/or stress migration. The substrate with the polycrystalline aluminum film is cooled in an oven in a controlled fashion from a target temperature to a final temperature such that energetically stable Al.sub.2 Cu-.theta.-phases are formed directly among the individual aluminum grains in the aluminum film. The cooling is controlled such that the instantaneous temperature passes through a predetermined temperature profile. Within the range of 320.degree. C. to 200.degree. C., the cooling gradient is less than 6.degree. C. per hour.

Abstract: The present invention is directed to providing thin-film-coated substrate manufacturing methods and apparatus that make it possible to manufacture large thin-film-coated substrates such as anti-reflection filters using relatively small production facilities. The thin-film-coated substrate manufacturing methods pertaining to the present invention area capable of producing thin films on substrates to be coated as large as the film formation area by using a film formation monitor or monitors placed outside of the film formation area or displaceably mobile therein, measuring the thickness of the monitor thin film or films formed on the film formation monitor or monitors, and controlling the film coating process based on the measured thickness of the monitor thin film or films. It is also capable of increasing the productivity of the manufacturing process through increased flexibility in the arrangement of substrate or substrates to be coated inside the film formation area.

Abstract: An electric arc ion plating apparatus to coat a metal material on an object includes: (a) an vacuum chamber; (b) an electric arc bombardment chamber in the vacuum chamber, comprising an anode, a cathode target, and an arc triggering electrode to generate metal particles when a voltage is applied on the anode and the cathode, and on the arc triggering electrode; and (c) a magnetic coil having a longitudinal axis. The magnetic coil emanates from the electric arc bombardment chamber and encloses at least a part of the electric bombardment chamber. The magnetic coil contains a constant-diameter section enclosing and immediately emanating from the electric arc bombardment chamber to guide the metal particles away from the cathode and toward the object, and a varying-diameter section away from the electric arc bombardment chamber to provide optimum distribution of the metal particles before they reach the object surface.

Abstract: The present invention provides a process of forming an antimicrobial coating on a surface of a medical implant, the coating comprising an antimicrobially effective amount of antimicrobial metal atoms incorporated into a coating of amorphous carbonaceous material.