Abstract: A semiconductor manufacturing apparatus includes a processing chamber for performing a manufacturing processing on a wafer. A gas supply line for introducing a purge gas is connected to an upper portion of the processing chamber, a valve being installed on the gas supply line. A rough pumping line with a valve a is connected to a lower portion of the processing chamber. Installed on the rough pumping line are a dry pump for exhausting a gas in the processing chamber and a particle monitoring unit for monitoring particles between the valve a and the dry pump. In the semiconductor manufacturing apparatus, after the valve is opened, the purge gas is supplied to apply physical vibration due to shock wave in the processing chamber 100 so that deposits are detached therefrom to be monitored as particles.

Abstract: Hybrid composites including carbon nanotubes and a carbide-derived carbon material, electron emitters including the hybrid composites, methods of preparing the electron emitters, and electron emission devices including the electron emitters are provided. Specifically, a hybrid composite includes at least one carbon nanotube and a carbide-derived carbon material. The carbide-derived carbon material is prepared by thermochemically reacting a carbide compound with a halogen-containing gas to extract substantially all of the elements except for the carbon in the carbide compound. Since the carbon nanotubes and the carbide-derived carbon material are hybridized and composited, a screen effect that may occur when large amounts of carbon nanotubes are used can be prevented, and an electron emitter including the hybrid composite has excellent electron emission capabilities, excellent uniformity, and a long lifetime.

Abstract: An object of the present invention is to provide an organosol for forming a coating that can remain hydrophilic for a long time even in a situation with no exposure to light, and a manufacturing method thereof. As a means for solving this problem, the organosol is created by dispersing magnesium fluoride compound obtained by reacting at least a magnesium compound (the main raw material) with a solution containing hydrogen fluoride, in an organic solvent. The organosol is characterized by containing fine particles of the magnesium fluoride compound which particles have an average particle diameter of from 5 to 500 nm.

Abstract: The subject of the invention is a material comprising a substrate coated on at least one portion of at least one of its faces with a coating comprising photocatalytic titanium oxide, characterized in that said substrate and/or a coating placed between said substrate and said coating comprising photocatalytic titanium oxide comprises at least one compound capable of converting radiation having a wavelength in the visible or infrared range to radiation having a wavelength in the ultraviolet range.

Abstract: The present invention relates to amorphous thin films and methods of manufacturing the same. These amorphous thin films contain zirconium oxide (ZrO2), preferably at a concentration of at least 30 mol %, and other metal oxides and have surprisingly good mechanical and optical properties. In some embodiments of the present invention, the thin films may be further processed to obtain fluorinated glasses containing the same metal elements as the metal oxides.

Abstract: The invention relates to a method for modifying piece surfaces consisting in bringing pieces into contact with at least one type of a modifying agent in such a way that the modification of the surface is carried out.

Abstract: Disclosed herein are a fluorine-doped tin oxide (FTO) transparent conductive film glass used for defogging purposes comprising a glass layer, a dielectric barrier layer, a functional layer, a metal electrode layer, a plastic intermediate layer, and a glass layer, stacked in this sequential order, in which the functional layer comprises an FTO transparent conductive film having a molar ratio of F to Sn in the range of 0.5 to 2, mainly including a (301) crystal plane and being formed by a spray coating method, and a method of fabricating the same.

Abstract: Charge transport materials are provided, and methods for making the same.

Abstract: A transparent electromagnetic wave-shielding filter, containing a support, a conductive layer provided on the support, and a hard coat layer provided on the conductive layer, wherein the conductive layer is formed by subjecting an emulsion layer which contains a silver halide and a binder and is coated on the support, to exposure and developing process, wherein the hard coat layer is formed by coating a coating liquid for forming the hard coat layer with a solvent on the conductive layer, and wherein the emulsion layer contains a compound soluble in the solvent of the coating liquid for forming the hard coat layer.

Abstract: This invention disclosure describes methods for the fabrication of metal oxide films on surfaces by topotactic anion exchange, and laminate structures enabled by the method. A precursor metal-nonmetal film is deposited on the surface, and is subsequently oxidized via topotactic anion exchange to yield a topotactic metal-oxide product film. The structures include a metal-oxide layer(s) and/or a metal-nonmetal layer(s).

Abstract: A very low energy-absorption coating and related methods for use with high power CO2 lasers includes at least a thin layer of ThF4 (16) used as a water/moisture barrier, in combination with BaF2 (14), for various optical elements. When used in connection with a ZnSe substrate (12) or any other suitable material (such as for a focusing lens), the coating (10) extends the useful life by helping prevent moisture adsorption that otherwise may occur within 2-3 days of contact with air. The coating (10) may comprise (1) a BaF2 layer (14) of approximately optical quarter wave thickness, (2) a thin 200-300 Angstrom layer of ThF4 (16) used as a water barrier (3) a thin 1000-2000 Angstrom layer of ZnSe (18), and (4) an optional ZnSe layer (20) of optical half wave thickness. Among other applications, the coating (10) provides very low energy absorption for a 10.6 um CO2 laser at a value<0.15%, and provides longer lifetimes as compared to conventional coated lenses without the combination of BaF2 (14) and ThF4 (16).

Abstract: A gas barrier layered product and a method for producing the same are provided. The gas barrier layered product exhibits a high oxygen barrier property regardless of humidity, exhibits a high oxygen barrier property even after being subjected to retort processing, and is excellent in strength and transparency. In order to provide the gas barrier layered product, the gas barrier layered product includes a base material and a layer stacked on at least one surface of the base material. The layer is formed of a composition that includes: a hydrolyzed and condensed product of at least one compound (L) containing a metal atom to which at least one characteristic group selected from a halogen atom and an alkoxy group has been bonded; and a neutralized product of a polymer containing at least one functional group selected from a carboxyl group and a carboxylic anhydride group.

Abstract: A metal article and a method for welding the metal parts to form the metal article, where the method comprises feeding filler material to an intersection of the metal parts, and melting the filler material with a laser beam to form a weld between the metal parts at the intersection.

Abstract: An accessory coating composition having a fragrance emission function is disclosed, in which a fragrance composition containing 10-hexaoxa decanolide, 11-hexaoxa decanolide or 12-hexaoxa decanolide, nicotinic acid amide and fragrance is coated on the surfaces of various accessories, so the fragrance composition-coated accessories can continuously emit fragrance for a long time.

Abstract: A process for modifying the surface of an inorganic or organic substrate with strongly adherent nanoparticles is described, providing to the surface modified substrate durable effects like hydrophobicity, hydrophilicity, electrical conductivity, magnetic properties, flame retardance, color, adhesion, roughness, scratch resistance, UV-absorbance, antimicrobial properties, antifouling properties, antiprotein properties, antistatic properties, antifog properties, release properties. In this process, an optional first step a) a low-temperature plasma, ozonization, high energy irradiation, corona discharge or a flame is caused to act on the inorganic or organic substrate, and in a second step b) one or more defined nanoparticles or mixtures of defined nanoparticles with monomers, containing at least one ethylenically unsaturated group, or solutions, suspensions or emulsions of the afore-mentioned substances, are applied, preferably at normal pressure, to the inorganic or organic substrate.

Abstract: The methods of the disclosure may be used for the fluorination of organic compounds, and in particular aryl organic compounds other than just benzyl halogens. It is within the scope of the present disclosure, for organic compounds comprising an electrophilic carbon atom and a halogen leaving group to be fluorinated by the methods of the disclosure. One aspect of the disclosure provides methods of introducing a fluorine atom onto an electrophilic carbon atom, comprising mixing an insoluble basic silver salt, an organic molecule containing a leaving group, an aqueous solution of hydrofluoric acid, and a polar solvent:water composition; incubating said mixture at a temperature of about 20° C. to about 35° C., thereby obtaining a fluorinated organic product.

Abstract: Embodiments of the invention relate to compositions of metal oxyfluoride-comprising glazes or metal fluoride-comprising glazes, glass ceramics, and combinations thereof which are useful as plasma-resistant solid substrates or plasma resistant protective coatings over other substrates. Also described are methods of fabricating various structures which incorporate such compositions, including solid substrates and coatings over the surface of a substrate which has a melting point which is higher than about 1600° C., such as aluminum oxide, aluminum nitride, quartz, silicon carbide, silicon nitride.

Abstract: An exemplary multi-layer film structure includes a substrate, an inmost layer clinging to the substrate, a medium layer, and a reflective-transmissive layer. The medium layer is formed on the clinging layer. The reflective-transmissive layer is formed on the medium layer. The reflective-transmissive layer is capable of reflecting a portion of incident light to be a first reflected light and allowing another portion of the incident light to transmit therethrough. The substrate is capable of reflecting the transmitted light to be a second reflected light. The medium layer is configured for controlling a light path difference between the first reflected light and the second reflected light thereby allowing the second reflected light to interfere with the first reflected light and provide the multi-layer film structure with a desired color appearance.

Abstract: A method for patterning nanowires on a substrate. The method includes procedures of preparing a substrate having a patterned sacrificial layer of barium fluoride thereon; growing nanowires on an entire surface of the resultant substrate including the patterned sacrificial layer; and removing the patterned sacrificial layer using a solvent to remove part of the nanowires on the patterned sacrificial layer such that part of the nanowires in direct contact with the substrate remains on the substrate to thereby form a nanowire pattern.

Abstract: In a method for manufacturing a flexible memory device and semiconductor device, a stack including an element layer and an insulating layer which seals the element layer is formed over a substrate having a separation layer, and the stack is separated from the separation layer. The element layer includes a memory element having a layer containing an organic compound between a pair of electrodes, a first electrode layer and a second electrode layer, and at least one of the pair of electrode layers is formed using an alloy layer containing tin. The flexible memory device and semiconductor device include a memory element having a layer containing an organic compound between a pair of electrodes, a first electrode layer and a second electrode layer, in which at least one of the pair of electrode layers is formed using an alloy layer containing tin.

Abstract: Embodiments of the invention comprise a method of making a construction board (also known as wallboard) and a device for making same. The resulting construction board is formed by mixing of at least magnesium oxide, magnesium chloride, and a binding agent into a slurry, adding particulized solid material while funneling the slurry, and extruding the slurry comprising the particulized solid material.

Abstract: The present invention concerns multilayer films comprising a plurality of layers, at least some of the layers comprise (i) cross-linked chitosan, alginate, chondroitin sulfate, or hyaluronic acid and (ii) particles or void spaces; wherein the layers are 20-260 nm in thickness. Also disclosed are multilayer films comprising at least two of: a layer comprising a first polymer; a layer comprising a second polymer; a layer comprising particles, wherein said particles comprise ceramic material, metallic species, or both; and, a layer comprising a combination of said first polymer and said particles; wherein said multilayer film is capable of displaying structural color. Also provided are methods for making and using the inventive multilayer films and compositions comprising the multilayer films.

Abstract: A flexible laminate composition and methods for manufacturing same are provided. The flexible laminate composition includes one or more discrete and separate layers of a radiopaque material wherein the radiopaque layer is applied via a solvent to a layer that is composed of a plastic material. The laminate composition can be formed into a radiopaque marker band that can be used with a medical device, such as a catheter, for radiographic imaging. The laminate composition as an alternative can also be utilized to form the catheter or other suitable medical device.

Abstract: The invention is directed to single crystal alkaline earth metal fluoride optical elements having an adhesive, hermetic coating thereon, the coating being chemically bonded to the surface of the metal fluoride optical element with a bonding energy ?4 eV and not merely bonded by van de Walls forces. The materials that can be used for coating the optical elements are selected from the group consisting of SiO2, F—SiO2, Al2O3, F—Al2O3, SiON, HfO2, Si3N4, TiO2 and ZrO2, and mixtures (of any composition) of the forgoing, for example, SiO2;HfO2 and F—SiO2/ZrO2. The preferred alkali earth metal fluoride used for the optical elements is CaF2. Preferred coatings are SiO2, F—SiO2, SiO2/ZrO2 and F—SiO2/ZrO2.

Abstract: Coated components and methods of forming a coating on a component are provided. In an embodiment, by way of example only, a coated component includes a substrate and a coating overlying the substrate, where the coating comprises a plurality of agglomerates, each agglomerate including one or more particles of a first constituent and one or more particles of a second constituent that is different from the first constituent assembled into a structure.

Abstract: A ceramic sprayed member comprises a substrate and a ceramic sprayed coating thereon. Splats have been removed from the surface of the sprayed coating, typically by blasting. The ceramic sprayed member with improved plasma resistance mitigates particle contamination of wafers and enables stable manufacture when used in a halogen plasma process for semiconductor fabrication or the like.

Abstract: A composition comprises a fluorine-containing aromatic polymer, an epoxy compound and an initiator. Its use as film, laminate with polyimide or copper foils, copper-clad laminated board and adhesive film. The fluorine-containing aromatic polymer is preferably a fluorine-containing aryl ether polymer. The initiator is preferably a cationic initiator.

Abstract: A hydrophilic system and method includes a substrate selected because of at least one designated optical property and one or more dissimilar insulating layers. The one or more dissimilar insulating layers are one of on and adjacent to at least a portion of a surface of the substrate and optically operate without substantial interference of the at least one designated optical property of the substrate. A substantially fixed and static monopole electrical charge is embedded at an interface between at least one of the substrate and one of the one or more dissimilar insulating layers and two of the one or more dissimilar insulating layers.

Abstract: Components of semiconductor processing apparatus axe formed at least: partially of erosion, corrosion and/or corrosion-erosion resistant ceramic materials. Exemplary ceramic materials can include at least one oxide, nitride, boride, carbide and/or fluoride of hafnium, strontium, lanthanum oxide and/or dysprosium. The ceramic materials can be applied as coatings over substrates to form composite components, or formed into monolithic bodies. The coatings can protect substrates from physical and/or chemical attack. The ceramic materials can be used to form plasma exposed components of semiconductor processing apparatus to provide extended service lives.

Abstract: Components of semiconductor processing apparatus are formed at least partially of erosion, corrosion and/or corrosion-erosion resistant ceramic materials. Exemplary ceramic materials can include at least one oxide, nitride, boride, carbide and/or fluoride of hafnium, strontium, lanthanum oxide and/or dysprosium. The ceramic materials can be applied as coatings over substrates to form composite components, or formed into monolithic bodies. The coatings ca protect substrates from physical and/or chemical attack. The ceramic materials can be used to form plasma exposed components of semiconductor processing apparatus to provide extended service lives.

Abstract: The present invention relates to composite ceramic membranes for use in chemical processes such as the separation of molecules, sometimes referred to as molecular sieving, preferably in combination with chemical conversion of molecules selected from a composition of different molecules, e.g. the selective partial or full oxidation. The composite membrane of the invention offers a combination of molecular sieving and oxygen transport that makes the composite membrane suitable for the selective oxidation of hydrocarbons from a feed comprising a mixture hydrocarbons. The composite membrane of the invention comprises a first layer containing an oxygen transporting material (OTM), e.g. perovskite, and, in association with the first layer, a second layer, containing a molecular sieve layer, e.g. a zeolite.

Abstract: Titanium oxide-based photocatalysts which contain a metal halide in titanium oxide and which are prepared from titanium oxide and/or its precursor, which may optionally be heat treated, by contact with a reactive gas containing a metal halide of the formula MXn or MOXn (wherein M=a metal, X=a halogen, and n=an integer) with heating stably develop a high photocatalytic activity with visible light irradiation. The photocatalysts may subsequently be stabilized by contact with water or by heat treatment, and/or promoted by contact with a heteropoly acid and/or an isopoly acid so as to include a metal complex in the titanium oxide. Photocatalysts prepared in this manner exhibit novel ESR features. The present invention also provides methods for preparing these photocatalysts, a photocatalyst dispersion and a photocatalytic coating fluid containing such a photocatalyst, and photocatalytic functional products and methods for their manufacture using the photocatalyst.

Abstract: The invention relates to a method of doping semiconductor material. Essentially, the method comprises mixing a quantity of particulate semiconductor material with an ionic salt or a preparation of ionic salts. Preferably, the particulate semiconductor material comprises nanoparticles with a size in the range 1 nm to 100 ?m. Most preferably, the particle size is in the range from 50 nm to 500 nm. Preferred semiconductor materials are intrinsic and metallurgical grade silicon. The invention extends to a printable composition comprising the doped semiconductor material as well as a binder and a solvent. The invention also extends to a semiconductor device formed from layers of the printable composition having p and n type properties.

Abstract: The invention is directed to a method for cleaning surfaces of optical elements made from metal fluoride single crystals of formula MF2, where M is calcium, barium, magnesium, or strontium, or mixtures of the foregoing, prior to coating the elements with films of protective materials; and to a DUV optic made using the foregoing method. The method has at least the steps of: (a) immersing the optical element in at least one selected liquid and utilizing sonication at megasonic frequencies to remove particulates, polishing slurry residue and the damaged top layer of the optical element; (b) cleaning in a gas phase cleaning process whereby hydrocarbons are removed from the surface of the optical element using UV/ozone cleaning; and (c) exposing, in a gas phase process, of the optical element's surface to a low-energy plasma containing argon and oxygen, xenon and oxygen, or fluorine in a vacuum environment.

Abstract: The sintered ceramic product comprises a granular material bound by a nitrogenous mold. According to the invention, at least one anti-dust agent selected among calcium and boron exists in a surface layer of the product, the mass ratio of all the anti-dust agents in the surface layer being greater than that measured underneath this layer. This product advantageously has a reduced ratio of non-adherent particles to its surface.

Abstract: A transparent substrate for an optical engine of a rear-projection television receiver or a liquid crystal image projector, in particular, for protecting an original image forming panel of the optical engine, the transparent substrate characterized by being formed from a transparent highly-thermal-conductive cubic polycrystal plate, exhibiting good transmission of light or the like, good thermal conductivity, and good operability, and a rear-projection television receiver including the transparent substrate. It is favorable that the transparent substrate formed from the transparent highly-thermal-conductive cubic polycrystal and provided with a coating layer on a surface is used. Preferably, the coating layer is a multilayer. It is favorable that the material for the coating is at least two types selected from metal fluorides, metal oxides, and zinc compounds. The optical transparency is improved and the environmental stability is also improved by the coating.

Abstract: A Group IIIA element fluoride-containing coating comprising a Group IIIA element fluoride phase which contains at least 50% of a crystalline phase of the orthorhombic system belonging to space group Pnma is formed on a member for imparting corrosion resistance so that the member may be used in a corrosive halogen species-containing atmosphere. When the state of a crystalline phase is properly controlled, the coating experiences only a little color change by corrosion. A Group IIIA element fluoride-containing coating having a micro-Vickers hardness Hv of at least 100 is minimized in weight loss by-corrosion.

Abstract: A manufacturing method of a semiconductor substrate is provided, in which a bonding strength can be increased even when a substrate having low heat resistant temperature, e.g., a glass substrate, is used. Heat treatment is conducted at a temperature higher than or equal to a strain point of a support substrate in an oxidation atmosphere containing halogen, so that a surface of a semiconductor substrate is covered with an insulating film. A separation layer is formed in the semiconductor substrate. A blocking layer is provided. Then, heat treatment is conducted in a state in which the semiconductor substrate and the support substrate are superposed with the silicon oxide film therebetween, at a temperature lower than or equal to the support substrate, so that a part of the semiconductor substrate is separated at the separation layer. In this manner, a single crystal semiconductor layer is formed on the support substrate.

Abstract: An apparatus is an optical substrate having a defined refractive index. A primary optical coating is disposed on a first major surface of the substrate and a secondary coating having a refractive index substantially similar to the defined refractive index is disposed on a second major surface of the substrate. A method for manufacturing an optical substrate comprises depositing a primary coating on the first major surface of the optical substrate and depositing a secondary coating having a refractive index substantially similar to the defined refractive index on the second major surface of the optical substrate.

Abstract: An optical multilayer film includes: a first layer; a second layer that contains titanium oxynitride as a main component; and a third layer that contains magnesium fluoride as a main component; the first layer that has a different refractive index from that of the second layer or the third layer; and the first layer, the second layer, and the third layer being part of a laminated structure that includes a plurality of reflection planes. The thickness of the third layer is smaller than ¼ wavelength.

Abstract: Protective layers of the MCrAlX type according to the prior art are often provided with a platinum layer to prevent diffusion of elements out of the base material into the MCrAlX. The MCrAlX alloy according to the invention includes halogens (F, Cl, Br, I), which prevent this diffusion, in particular of titanium.

Abstract: The invention is directed to improved coated metal fluoride single crystal optical elements suitable for use in below 250 nm optical lithography, and particularly below 200 nm lithography. The coated elements of the invention can be lenses, windows, prisms and other elements used in lithographic methods, including the laser sources used therein. The invention is also directed to a method of removing the quasi-Bielby layer formed when a shaped optical element is polished. Removal of the quasi-Bielby layer prior to coating results in improved durability and optical transmission characteristics of the coated lenses. The coating material can be any material that does not impede the transmission of below 250 nm electromagnetic radiation. Fluorine doped silicon dioxide is the preferred coating material.

Abstract: A ceramic member, which is usable in a state where at least a part thereof is exposed in a reactor in which halogen plasma is generated, includes a base member containing a first ceramic material, and a coating layer on a surface of the base member containing a second ceramic material more resistant to plasma etching than the first ceramic material. Further, the ceramic member includes a thick portion in a region where an etching rate of the coating layer by the halogen plasma is locally high, and a thickness (tt) of the thick portion and a thickness (tn) of a normal thickness portion other than the thick portion satisfy the following expression (1): tn<tt?(Ee/En)×tn??(1) where En: etching rate of the coating layer in the normal thickness portion; and Ee: etching rate of the coating layer in the thick portion.

Abstract: The present invention provides a method for forming a film of aluminum oxide in which a target containing aluminum is sputtered in a gas containing fluorine atoms. The thin film of aluminum oxide according to the present invention has little optical absorption and high refractive index in the ultraviolet and vacuum ultraviolet regions.

Abstract: In an organic EL device comprising a cathode, an anode, and two or more stacked organic layers therebetween including a light emitting layer, an electron injecting organic layer containing an organic salt or complex of a metal having a standard electrode potential of more negative than ?1.8 V at 25° C. is formed close to the cathode by coating, and an organic layer containing a high molecular weight EL material is disposed close to the electron injecting organic layer. A multilayer structure of organic layers can be formed by coating, and the organic EL device has a high luminance, high efficiency, high reliability, long life and ease of handling.

Abstract: The invention provides an optical filter comprising: a. an organic, solar blind filter dye; and b. a UV-transparent, non-scattering and chemically stable substrate. The substrate may be a UV-transparent nanoporous silica glass solid having pores that are substantially filled with a UV-transparent solvent, which has been selected to dissolve said dye and also to match the refractive index of the nanoporous silica glass solid. Alternatively, the substrate may be a UV-transparent inorganic salt compressed to form a solid body. The invention also provides for methods of making these embodiments and an optical device comprising such an optical filter. The filter provides an efficient solar blind filter that is chemically and dimensionally stable.

Abstract: A monolayer or multilayer film has a single layer or multiple layers of silica containing fluorine. An optical element has the forgoing film laid on a surface of a substrate. A concentration of the fluorine in the layer or layers of silica is not less than 0.1 mol % (referably, not less than 1 mol %) nor more than 10 mol %.

Abstract: An aluminum alloy article is cleaned to remove oxides and organic matter from a coatable surface, coated with a composition comprising an organic resin and a fluorine compound, and then heated to an elevated temperature to decompose the organic resin and at least a portion of the fluorine compound. After heating the coated surface is left with a protective oxyfluoride film that prevents blistering and hydrogen pickup and promotes hydrogen degassing from the article.

Abstract: The invention is directed to a coated metal fluoride crystals that are resistant to laser-induced damage by a below 250 nm UV laser beam; methods of making such coated crystals, and the use of such coated crystals. The method includes the steps of providing an uncoated metal fluoride crystal of general formula MF2, where M is beryllium, magnesium, calcium, strontium and barium, and mixtures thereof, and coating the uncoated metal fluoride crystal with a coating of a selected material to thereby form a coated metal material resistant to laser induced damage. Preferred coating materials include MgF2, MgF2 doped fused silica and fluorine doped fused silica.

Abstract: The invention provides an optical filter comprising: a. an organic, solar blind filter dye; and b. a UV-transparent, non-scattering and chemically stable substrate. The substrate may be a UV-transparent nanoporous silica glass solid having pores that are substantially filled with a UV-transparent solvent, which has been selected to dissolve said dye and also to match the refractive index of the nanoporous silica glass solid. Alternatively, the substrate may be a UV-transparent inorganic salt compressed to form a solid body. The invention also provides for methods of making these embodiments and an optical device comprising such an optical filter. The filter provides an efficient solar blind filter that is chemically and dimensionally stable.