Abstract: Kiln furniture for holding and supporting articles of refractory and ceramic flatware in spaced and stacked relationship during kiln firing has upper and lower end units detachably connected by pillars engaging apertures in said upper and lower end units. The points of contact and support between the pillars and the upper and lower end units are formed to prevent the build up of glaze spray and vapor between the engaging portions so as to prevent sticking and adherence of the portions while at the same time providing for a rapid and easy assembly and disassembly of the respective parts which permits repeated reuse of the kiln furniture.

Abstract: A hollow lavatory setter (10, 10', 10", 10'") of recrystallized silicon carbide has a continuous wall of predetermined cross sectional size and shape including an outer wall portion (14, 14', 14", 14'") spaced from a bowl engaging inner wall portion (16, 16', 16", 16'") adjoining, extending around and defining the general configuration of a bowl receiving opening (18, 18', 18", 18'") and the peripheral mounting rim portion (R', R'") including a continuous mounting under surface of a rimless lavatory (L', L'"). Spaced upper (24, 24', 24", 24'") and lower (26, 26', 26", 26'") wall portions extend between the inner and outer wall portions and of which the upper wall (24, 24', 24", 24'") surface is adapted to supportingly engage and maintain the continuous mounting under surface of the peripheral mounting rim portion (R, R'") in a single plane during firing in a kiln and suitable for mounting on a counter top thereafter.

Abstract: A stable lightweight low mass recrystallized silicon carbide kiln furniture module (M&M') adapted for mounting on a kiln car (C, C') has a plurality of triangularly arranged post support blocks (20, 20') and hollow one piece vertical posts (30, 30', 30", 32, 32') inserted therein. The posts are provided with vertically spaced ledges (30a, 32a) or hollow pins (30a', 32a') or notches 30a" supporting refractory batts (34, 34', 34") and hollow end caps (36, 38, 36') with tie pins (36a, 38a, 36a') insertable into upper open ends thereof. Thin overlapping tie plates (40, 40') each with triangularly arranged holes interconnect with and tie the tie pins, (36a, 38a, 36a') end caps (36, 38, 36') and posts (30, 30', 30", 32, 32') together and a hollow tie bar (42, 42') interconnects with and ties the posts (32, 32') and overlapping inner portions of the tie plates (40, 40') together.

Abstract: A cantilever diffusion tube apparatus includes a quartz cantilever tube having a support end clamped to a laterally movable carriage mechanism and an outer end portion containing a plurality of spaced semiconductor wafers. The cantilever tube is coaxially aligned with a diffusion tube of a diffusion furnace. The support end of the cantilever tube is sealed by a door plate through which a gas tube extends. The wafers are loaded into the cantilever tube through a window opening. The carriage then moves the cantilever tube and wafers therein into the diffusion tube. Reactant gases are caused to flow into the cantilever tube, between the heated wafers therein, and out of the cantilever tube. Then purging gas is caused to flow through the cantilever tube and wafers therein.

Abstract: Wafer tray construction for use in a gas plasma reactor. A plurality of the trays are arranged in an array, with an overlap at the adjacent edges of the trays to prevent line-of-sight communication between the trays and ion bombardment of the support on which the trays are mounted. In one disclosed embodiment, the edges of the trays are configured to form the overlap, and in a second embodiment bars inserted between the trays cooperate with the edge portions to form the overlap.

Abstract: A framework for supporting ware to be kiln fired is constructed from a plurality of shelves or supporting arms which are engaged within horizontal slots in one or more vertical support posts. The shelves or supporting arms are secured to the support posts by locking pins which are inserted through apertures in the posts and shelves or support arms which apertures are aligned when the posts and shelves or support arms are properly engaged with one another. In an alternate embodiment, a supporting framework is constructed from vertical support members and support plates. Each vertical support member comprises a vertical support post preassembled with ware supporting arms which are interlocked to the post by a locking pin. Assembled vertical support members are received at either end by the support plates which include indentations for receiving the ends of the vertical support members.

Abstract: A furnace tray for supporting tooth pegs used in the manufacture of false teeth, dental prostheses and the like comprises a refractory tray base member having a carbon plate receiving recess in its upper surface. A carbon plate is positioned in the recess and dental prostheses supported by tooth pegs are placed on the upper surface of the plate. The tray with the carbon plate and the dental prostheses thereon are then placed in a furnace and the teeth are fired. During the firing process the interior of the furnace is simultaneously purged by the carbon.

Abstract: A holding device for supporting a dental workpiece and the like is shown as having a main body attachable as to a cooperating base or sagger tray; the main body carries a fixed extending first arm; a lever is pivotally fixed to the main body and carries a second arm which when pivoted moves toward or away the first arm; a disengageable latching arrangement is provided whereby the lever may be effectively latched in any selected position as to thereby cause the first and second arms to hold the dental workpiece in a selected position.

Abstract: A quartz tube adapted for thermal processing of semiconductor substrates comprising a double-layered central tube having an external sintered crystalline quartz layer fused with a quartz layer of different quality, i.e. an internal transparent fused quartz layer. Both ends of the central tube are fused with the ends of two transparent fused quartz end tubes. The double-layered tube portion can be produced by compacting quartz particulates by means of centrifugal force within a mould and heating from the center with or without placing a fused quartz tube on its inner surface. Semiconductor substrates are processed using this quartz tube, thereby semiconductor devices having stabilized high qualities are produced at an increased yield as well as at a low cost.

Abstract: The invention relates to walking beam furnaces. It concerns a skid pad or lug for walking beam furnaces, which comprises a body made of an oxide-based refractory substance and a shell made of refractory metal alloy surrounding the periphery of the body, means being provided to prevent detachment towards the top of the body in relation to its shell.

Abstract: An apparatus for supporting ceramic insulator greenware including container means for supporting the ceramic insulator greenware in a first position and integral spacing means integrally connected with the container means for supporting the container means in a second position. One embodiment of the invention supports the ceramic insulator greenware such that the lower flange of the weather shed of the ceramic insulator greenware is supported above the apparatus so as not to interfere with the glazing coat. Refractory fire brick normally used for spacing and the labor involved in placing and leveling the fire brick/support arrangement is eliminated.

Abstract: Apparatus for supporting an insulator or a plurality of insulators having a support means for supporting the insulators at a predetermined position and an integral spacing means integrally connected to the support means for supporting another support means to provide for stacking of a plurality of apparatus. The support means includes a base having a plurality of recesses therein for receiving a mounting portion of a typical insulator and supporting it in a predetermined position. The spacing means includes integral supports projecting upward a predetermined distance from the periphery of the base and an external peripheral wall enclosed upon itself extending upward a second predetermined distance from the periphery of the base, the first and second predetermined distances being selected to provide for adequate ventilation of the insulators. Being self-supporting the apparatus eliminates secondary support materials that are normally required.

Abstract: A refractory sagger comprises of a bottom wall having a netted frame which is defined by a plurality of alloy wires e.g. nichrom wires, ferrochrome wires, inserted therein, and a surrounding wall having an upwardly faced groove filled with an alloy wire and glaze. The expansion coefficient of the said glaze matches with that of the said refractory sagger.

Abstract: A base for a kiln car for firing ceramic ware is constructed so as to have low thermal mass combined with adequate load-supporting strength. It comprises upright load-supporting pillars (16) made of stacked elements (17) and having continuous vertical grooves (20). Peripheral thin ceramic walls (19) slot into the grooves (20), to define central compartments (22) subsequently filled with insulating material, e.g. ceramic fiber. Horizontal bats (18), trapped between elements (17) project at the periphery of the base to form a radiant heat seal with adjacent kiln car bases and the kiln walls.

Abstract: A support element (17), an upright support (16) formed of such elements (17) and a support structure (10) further including cranks (11) or shelves supported by the upright supports (16) over described. The structure (10) is intended for supporting ware such as plates in a fast firing kiln. The elements (17) have enlarged apertures (18) with projections (19) on their lower borders to support hooked terminal portions (15) of the cranks loosely, allowing release of thermal stresses and free circulation of kiln gases.

Abstract: An improved kiln or oven useable support structure is provided which includes a base having a surface with a plurality of vertically oriented support bores disposed thereacross. A plurality of straight and crank shaped support pins having predetermined cross-sections are removably insertable into the bores of said base. A curved support member has in one end an aperture having a configuration minimally larger than the cross-section of said support pins. When said aperture encircles a support pin and the axis of said aperture is substantially parallel with said pin the two move freely with respect to one another, but when the axis of said aperture is not substantially parallel with said pin, the two pinch-lock or bind to maintain their relative positions.

Abstract: A method of achieving uniform shrinkage of a laminated green ceramic substrate during sintering wherein the substrate is placed on a flat, relatively thick plate of refractory material such as molybdenum, tantalum or tungsten or alloys thereof with the flat plate provided with a thin surface coating layer of a ceramic material, and heating the substrate to a sintering temperature and maintaining the temperature for a time sufficient to sinter the substrate.A setter plate for supporting a planar green ceramic substrate during the sintering operation, the setter plate is made of a refractory material and provided with a thin ceramic coating at least on the top surface.

Abstract: An improved container used in baking furnaces for baking carbon products. The container has a porous base and porous walls connected to the base. A porous medium is disposed between the container and the carbon product. Volatiles and liquid tars released during the baking of the carbon products pass through the porous medium and through the porous container.

Abstract: A pressure sensor including a pressure capsule such as a dual diaphragm quartz capacitance pressure capsule. The pressure capsule having two parallel quartz plates spaced by a dielectric ring forming a vacuum chamber therein.A registration fixture is described which contains a plurality of flat plates, each plate having a pressure capsule receiving cavity sized to closely receive one of the quartz plates and further provides a uniform temperature radiation pattern for sealing of the pressure capsule during the controlled pressure-temperature profile.

Abstract: A carrier having a plurality of transport channels arranged in stacked parallel relationship for receiving semiconductive wafers is provided with a pair of oppositely facing recessed regions extending partially into the transport channels. In each of these recessed regions a stop member is pivotally mounted and spring-loaded for automatic movement between an inoperative position out of the transport channels to permit passage of the semiconductive wafers therethrough, when the carrier is set down, and an operative position protruding into the transport channels and blocking passage of the semiconductive wafers therethrough to impede spillage of any semiconductive wafers contained in the carrier, when the carrier is picked up.

Abstract: Nestable burn-in trays for semiconductor circuits are provided. The trays are stackable thereby eliminating the need for special storage cabinets. Further the trays are designed not to tilt when being inserted or removed from a burn-in chamber preventing damage to the components on the tray.

Abstract: A setter is configured to minimize distortion of a core supported during firing. The configuration also provides for adequate gas flow both to envelope the core and to provide an aspiration effort to cause the gas to be drawn downwardly through and about the core structure to the interior of the setter to enhance the removal of reaction products therefrom. A retort, preferably made of molybdenum, is provided to enhance the effects of the setter configuration.

Abstract: A furnace paddle adapted to hold semiconductor wafers therein and having means attached thereto for supporting the paddle for movement along the inside of a cylindrically-shaped tube of a semiconductor processing furnace has means attached to the paddle adjacent the supporting means for limiting the lateral movement of the supporting means up the inside wall of the tube. The means includes a guide wing having two ends for contacting respectively the inside wall of the tube at intersecting points of a chord thereof and having a stem attached to the paddle adjacent the supporting means for maintaining the ends proximate the inside wall of the tube.

Abstract: A gas permeable structural part, particularly for use in burning and sintering devices, for withdrawal preferably of hot gases from a layer of granular material with a group of rods arranged parallel to one another and spaced from one another, which rods form a gap respectively therebetween, the gap width being smaller than the diameter of the smallest material granule. The grid rods have the smallest possible cross-section, and extend as short as possible in a direction perpendicularly to the surface of the structural part, solely assuming the mechanical pressure of the material loading the grid rods without deformation.

Abstract: A crank for holding and supporting articles of refractory or ceramic flatware in spaced and stacked relationship during kiln firing has upper and lower end units rigidly interconnected by a first set of vertical spacing pillars which are each bonded at their ends to the respective end units thereby to form a rigid unitary frame structure. Support means are provided for holding and supporting the articles of refractory or ceramic flatware in spaced and stacked relationship within the rigid unitary frame structure. The support means comprise a second set of separate detachably mounted additional support posts which each have a plurality of spaced-apart sockets into which fit or plug laterally projecting pins or pegs to form a removable rack adapted to support the flatware articles.

Abstract: A rotatable supporting structure adapted to withstand substantial intense heat and provide for the rotation of a workpiece without lateral displacement thereof during the heating of the workpiece within a furnace, including a base having a substantially planar upper surface, and a pin located on the upper surface of the base extending upwardly therefrom. The supporting structure also includes an upper member having an opening at substantially the center thereof, and of a diameter slightly larger than that of the cross sectional size of the pin. The upper member is provided with a plurality of holes or slots into which a plurality of supporting dowels may be disposed, in a variety of positions, thereby varying the space therebetween so as to support a workpiece without engaging the upper surface of the upper member and provide for the rotation thereof.

Abstract: Disclosed is a preformed ceramic base useful in firing an open-ended ceramic shell mold having a mold base prior to metal casting. The ceramic firing base includes a working surface having a majority of flat surface portions for supporting the mold base during firing and one or more groove-like surface portions which define gas circulation passages from the outside atmosphere into the open mold bottom when the mold base is placed in supported relation on the flat surface portions. The ceramic firing base thereby enables firing of a green shell mold while maintaining mold base flatness and circulation of furnace gas into the mold cavity to minimize mold hot spots. Also disclosed is a preformed ceramic firing cap to be used in conjunction with the ceramic firing base, the firing cap being adapted to cover the open top end of the shell mold to prevent foreign particulate from entering the mold.

Abstract: A shelf support for a ceramic-ware support structure in which a transverse groove extends across the upper shelf supporting surface to provide a dust trap. The support is intended for use with movable shelves of refractory material and prevents quantities of ceramic dust from falling onto the ware supported by the structure when the shelves are slid into position. Additionally, chamfers are provided on the shelf support and the associated uprights of the structure to reduce the amount of dust abraded from the shelves during insertion and removal.

Abstract: A carrier having a plurality of transport channels arranged in stacked parallel relationship for receiving semiconductive wafers is provided with a pair of oppositely facing recessed regions extending partially into the transport channels. In each of these recessed regions a separate spring-loaded stop member is pivotally mounted for automatic movement to a raised inoperative position, where itis pivoted out of the transport channels to permit passage of the semiconductive wafers therethrough, when the carrier is set down, and for automatic movement to a lowered operative position, where it is pivoted into the transport channels to block passage of the semiconductive wafers therethrough and thereby impede spillage of any semiconductive wafers contained in the carrier, when the carrier is picked up.

Abstract: This invention is concerned with improving the properties of refractory supports used in the manufacture of ceramic articles such as setters, batts, saggars, cranks, stilts, thimbles, saddles and spurs, and resides in the provision on an article-supporting surface of such supports of a coating comprising comminuted plasma dissociated zircon. Also provided is a method of coating refractory supports and a coating composition comprising a dispersion of comminuted plasma dissociated zircon in a carrier liquid.

Abstract: A support structure for ceramic ware during firing in which very lightweight tubular props are used in combination with circular caps having projections which rest in the tops of the upright props. Each cap has a raised projection on the upper side which locates in a hole in a shelf. The shelves each have three such holes disposed in a triangular formation, each arranged midway between a respective edge of the shelf and a centerline parallel to the edge to reduce undesirable thermal effects during firing.

Abstract: An Adjustable Dental Bridge Firing Stand that is adjustable to hold all sizes, shapes and types of dental bridge frameworks; which need to be moved, placed in and held in a dental porcelain oven, or to be held during the various stages of firing the applied porcelain to complete a finished dental bridge.

Abstract: The invention is a support structure for the firing of flat ceramic articles such as tiles. The structure comprises a composite back wall of loosely interconnected planar components, some of which have upright apertures to receive hooks formed on the edges of upright second components attached at right angles to form transverse walls. Equally spaced fins are hooked into apertures in the transverse walls to form shelves to carry the edges of the ceramic articles. At some levels the fins are replaced by tie bats bridging the space between adjacent transverse walls. All of the components are formed by die pressing which precisely controls their dimensions in the plane of the component although not necessarily the thickness so that the dimensions of the overall structure are very precisely controlled and it can be loaded by machine without difficulty.

Abstract: An apparatus for imparting combined centro-symmetric and noncentro-symmetric rotation to semiconductor bodies comprises a liquid-cooled sun gear, a stationary liquid-cooled ring gear coaxial with and radially spaced outwardly from the sun gear, and at least one planet gear disposed between and driven in engagement with the sun and ring gears. Means are provided for supporting a semiconductor body on each of the planet gears while minimizing the conduction of heat from the semiconductor body to the planet gear. Means are also provided for guiding a semiconductor body onto the supporting means and centering the semiconductor body on the planet gear. Thermal distortion of the apparatus is minimized when heated to extreme temperatures making the apparatus ideally suited for processing the semiconductor bodies with heat as in processing by temperature gradient zone melting.

Abstract: An apparatus for automatically transferring semiconductor wafers is disclosed. Semiconductor wafers are loaded on a boat which is placed on a pair of first supporting bars. A pair of second supporting bars are driven by a motor to repeat circular motion between the first supporting bars. The second supporting bars, circularly moving in parallel with the first supporting bars, forwardly transfer the boat. The boat is kept uplifted over the first supporting bars during the forward transfer thereof. Repetition of the circular motion of the second supporting bars makes the automatic transfer of the semiconductor wafers to be heat-treated in a semiconductor manufacturing system.

Abstract: A semiconductor boat or carrier fabricated of stress relieved quartz bar having a rectangular cross section. The carrier has parallel elongate side bars and a parallel elongate lower bar, all of which are joined at the ends thereof by transverse lengths of quartz bar also having rectangular cross section. Spaced slots are formed in the inwardly facing edges of the elongate side and bottom bars so that groups of three slots, one in each bar, lie in parallel planes for receiving semiconductor wafers in three point contact in the carrier. End bars attached to and extending between the side bars and central bars extending between each of the side bars and the bottom bar are provided for obtaining rigidity in the carrier. These end and central bars are also rectangular in cross section.

Abstract: The invention is a clip assembly for use in a muffled kiln car suitable for use in a tunnel kiln. The clip assembly enables tall baffle plates to be used without these becoming displaced during travel through the kiln. The assembly includes a swivelable block mounted on the base or shelf of the kiln car and having a groove to receive the corner of the baffle plate. The groove has a tapered forward face having a preferred angle of 27 degrees and a wedge of ceramic material is provided to co-operate with the tapered wall and wedge the base of the baffle plate in position, preventing it from wobbling and becoming displaced or detached.

Abstract: An apparatus for drying ceramic bodies in which a framework of horizontal pipes and spacer bars define vertical columns beneath which a platform is disposed. The drying medium is circulated through the chamber containing the rack and through the pipes of the rack which have outlets for the cooling medium therealong. The ceramic bodies are stacked on the platform and the stacks are held pneumatically when the platform is lowered to remove the bottom article from each stack, additional articles being fed to the stack from the top. Plates on opposite sides of the stack are shifted back and forth by a crank arrangement to impart a quasi-sinusoidal movement to the gases around the bodies in the stacks.

Abstract: A heat resistant material comprising a recrystallized (self bound) skeleton of silicon carbide the pores of which are filled by infiltration of a heat resistant infiltration material, such as a silicon-molybdenum disilicide composition, so that the porosity is less than 5 % and preferably less than 2 %, the composition of the final material being such that the bending strength thereof at room temperature is at least 5 kp/mm.sup.2, and preferably above 10 kg/mm.sup.2, such as of the order of 20 kp/mm.sup.2.

Abstract: A boat for carrying a load of stacked layers of interspaced pellets through a high-temperature continuous furnace, has a base for carrying the load through the furnace and having upstanding posts, each of the layers being carried by a sheet having holes through which the posts are inserted to prevent lateral shifting of the sheets.

Abstract: A sagger including a plurality of identical side walls each including at one end a flange member extending the height of the side wall and at the opposite end, a flange-receiving socket extending the height of the side wall for receiving and positively interlocking the flange of an adjacent side wall such that a plurality of the side walls can be interfitted to complete the side construction of the sagger. The side walls include inwardly extending flanges for supporting a floor for the sagger.

Abstract: A carrier for processing semiconductor materials consisting of a first removable mounting boat with supporting branches having grooves for receiving first type semiconductor substrates thereon, and a second mounting boat with a pair of elongated supporting members having grooves for receiving second type semiconductor substrates thereon. The mounting of the first type semiconductor substrates to the first boat can be independently performed and after this mounting, the first boat is then coupled with the second tupe semiconductor substrates. When the first and second boats are coupled, the two types of semiconductor substrates are aligned on the second mounting boat alternately between adjacent substrsates in a juxtaposed configuration. Thereby, handling of the two type of conductors are remarkably facilitated.

Abstract: A kiln car has a wheeled base and a superstructure supported above the base, the superstructure comprising a number of tiers of refractory batts supported one tier above the other by a series of props. At least the lowermost tier of batts is supported on at least some of the props through the agency of discs which each have a convex or domed face so as to make point contact either with a batt or the supporting face of the respective prop.

Abstract: A support assembly unit and a support assembly formed from such units which can be mounted on a kiln car to support pottery being fired. The unit comprises upper and lower shelves having through holes which receive upper and lower spigots of a plurality of uprights. Each upright is a unitary structure with one or more spigots at the upper and lower ends and may have an intermediate shelf support upon which an intermediate shelf can be rested.

Abstract: A sagger construction is disclosed for holding refractory articles during firing. The construction comprises at least two, separable, normally bottomless, topless, multi-sided saggers placed atop each other in substantial vertical alignment to define a hollow columnar enclosure which is adapted to contain the refractory articles. The topmost sagger defines an entrance to the columnar enclosure, while the bottommost sagger has closure means along the bottom thereof and contains exit means for release of the refractory articles such as after firing. This construction not only substantially increases the volume of refractory material which can be fired at one time, but also appreciably reduces labor requirements while prolonging the useful life of the individual saggers.

Abstract: The invention is furnace fittings in which supports made of silicon nitride or of other ceramic are formed so as to be removably fitted to a base, the supports being formed also so as to support a "green" artefact such as dental artefacts during firing of the green artefact in a furnace.

Abstract: Process tube, paddle, and boat for a semi-conductor diffusion furnace composed of a matrix of high purity sintered silicon carbide which is made impervious to gases by impregnation thereof with silicon metal which is 99.9% pure. The process tube, paddle and boat provide the ultra pure environment needed for semi-conductor production and are highly resistant to the degradative effect of a great number of high temperature heating cycles.