Abstract: A power MOS chip and package assembly is provided for packaging a power MOS chip that has high heat dissipation. The assembly maintains a low contact resistance to the chip using compression without damaging the chip. The package assembly includes a thermally conductive body, a chip, an electrically conductive contact washer and an external electrical terminal. The chip includes a semiconductor substrate layer, an insulating layer, a conductive material gate layer and a metal layer. The layers form a plurality of first regions that are functionally inactive and a plurality of second regions. The insulating layer is formed to be thicker in the first regions than in the second regions so that the metal layer is elevated with respect to the substrate layer by a greater amount in the first regions than in the second regions. The contact washer is placed in mechanical contact with the chip so that it exerts pressure against the metal layer in the first regions to create an electrical connection.
Type:
Grant
Filed:
May 22, 1997
Date of Patent:
August 25, 1998
Assignee:
Consorzio per la Ricerca sulla Microelettronica nel Mezzogiorno
Abstract: The specification describes a p-channel IGBT with improved performance attributable to a vertical underlying n-p-n structure, and fabricated by a process that is fully compatible with simultaneously forming complementary MOS and TGBT devices.
Abstract: The present invention relates to a method for producing a semiconductor device having a semiconductor layer of SiC. The method comprises the steps of a) applying a mask on at least a portion of the SiC layer to coat a first portion of the SiC layer leaving a second portion thereof uncoated, b) applying a heat treatment to the SiC layer, and c) supplying dopants to the SiC layer during the heat treatment for diffusion of the dopants into the SiC layer at the second portion thereof for doping the SiC layer. The mask is made of crystalline AIN as the only component or AIN as a major component of a crystalline alloy constituting the material.
Type:
Grant
Filed:
May 8, 1995
Date of Patent:
August 5, 1997
Assignee:
ABB Research Ltd.
Inventors:
Christopher Harris, Andrei Konstantinov, Erik Janzen
Abstract: A method for forming a semiconductor device includes forming insulated gate regions (122,222) on a substrate (26) using a first photo-masking step, forming a base region (47) through an opening (143) between the insulated gate regions (122,222), and forming a source region (152) within the base region (47). Next, a protective layer (61) is formed and selectively patterned using a second photo-masking step to form an opening (62) within the first opening (143) and an opening (63) above one of the insulated gate regions (122). Next, a portion (66) of the substrate (26) and a portion (67) of the insulated gate region (122) are removed. Ohmic contacts (74,76) are then formed and patterned using a third photo-masking step. Additionally, a termination structure (81) is described.
Type:
Grant
Filed:
December 26, 1995
Date of Patent:
May 20, 1997
Assignee:
Motorola, Inc.
Inventors:
Hak-Yam Tsoi, Pak Tam, Edouard D. de Fresart