Including Isolation Means Formed In Trench Patents (Class 438/391)
  • Patent number: 5792686
    Abstract: A dynamic random access memory (DRAM) integrated circuit (10). The DRAM (10) includes a recessed region (20) defined in a semiconductor substrate (22). This recessed region has substantially vertical sides (34) extending from a bottom surface (32). A field effect transistor (18) is defined adjacent to the recessed region (20). A capacitor structure, including a lower capacitor plate (26), a capacitor dielectric (28), and an upper capacitor plate (30), is defined in the recessed region (20) and over the field effect transistor (18), thereby providing a greater capacitor surface.
    Type: Grant
    Filed: February 7, 1996
    Date of Patent: August 11, 1998
    Assignee: Mosel Vitelic, Inc.
    Inventors: Min-Liang Chen, Nan-Hsiung Tsai