Responsive To Corpuscular Radiation (e.g., Nuclear Particle Detector, Etc.) Patents (Class 438/56)
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Publication number: 20130049147Abstract: A bonded wafer structure having a handle wafer, a device wafer, and an interface region with an abrupt transition between the conductivity profile of the device wafer and the handle wafer is used for making semiconductor devices. The improved doping profile of the bonded wafer structure is well suited for use in the manufacture of integrated circuits. The bonded wafer structure is especially suited for making radiation-hardened integrated circuits.Type: ApplicationFiled: August 25, 2011Publication date: February 28, 2013Applicant: Aeroflex Colorado Springs Inc.Inventors: David B. Kerwin, Joseph M. Benedetto
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Publication number: 20130026544Abstract: A method for forming a neutron detector comprises thinning a backside silicon substrate of a radiation detector; and forming a neutron converter layer on the thinned backside silicon substrate of the radiation detector to form the neutron detector. The neutron converter layer comprises one of boron-10 (10B), lithium-6 (6Li), helium-3 (3He), and gadolinium-157 (157Gd).Type: ApplicationFiled: July 25, 2011Publication date: January 31, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Michael S. Gordon, Kenneth P. Rodbell, Jeng-Bang Yau
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Publication number: 20130026355Abstract: A neutron porosity measurement device adapted to receive a neutron source configured to emit neutrons having a first energy includes a segmented semiconductor detector located at a predetermined distance from the neutron source. The segmented semiconductor detector includes a plurality of semiconductor neutron detection cells configured to detect neutrons having a second energy smaller than the first energy. The cells are arranged in subsets located between a first distance and a second distance from the neutron source, each subset including semiconductor neutron detection cells surrounding an axis and being disposed in opposite sectors defined relative to the axis at substantially same distance from the neutron source. One or more of the neutron detection cells are configured to acquire data related to detected neutrons independently from one or more other of the neutron detected cells. A method of manufacturing the neutron porosity measurement device is also provided.Type: ApplicationFiled: July 28, 2011Publication date: January 31, 2013Applicant: SONDEX WIRELINE LIMITEDInventors: Helene Claire CLIMENT, Jason MACINNIS
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Patent number: 8357906Abstract: Charged particle beamlet lithography system for transferring a pattern to a surface of a target comprising a sensor for determining one or more characteristics of one or more charged particle beamlets. The sensor comprises a converter element for receiving charged particles and generating photons in response. The converter element comprises a surface for receiving one or more charged particle beamlets, the surface being provided with one or more cells for evaluating one or more individual beamlets. Each cell comprises a predetermined blocking pattern of one or more charged particle blocking structures forming multiple knife edges at transitions between blocking and non-blocking regions along a predetermined beamlet scan trajectory over the converter element surface. The converter element surface is covered with a coating layer substantially permeable for said charged particles and substantially impermeable for ambient light.Type: GrantFiled: March 22, 2011Date of Patent: January 22, 2013Assignee: Mapper Lithopraphy IP B.V.Inventor: Rabah Hanfoug
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Publication number: 20120313196Abstract: A three-dimensional (3D) Trench detector and a method for fabricating the detector are disclosed. The 3D-Trench detector includes a bulk of semiconductor material that has first and second surfaces separated from each other by a bulk thickness, a first electrode in the form of a 3D-Trench, and a second electrode in the form of a 3D column. The first and second electrodes extend into the bulk along the bulk thickness. The first and second electrodes are separated from each other by a predetermined electrode distance, and the first electrode completely surrounds the second electrode along essentially the entire distance that the two electrodes extend into the bulk such that the two electrodes are substantially concentric to each other. The fabrication method includes doping a first narrow and deep region around the periphery of the bulk to form the first electrode, and doping a second narrow and deep region in the center of the bulk to form the second electrode.Type: ApplicationFiled: October 15, 2010Publication date: December 13, 2012Applicant: Brookhaven Science Associates ,LLC et al.Inventor: Zheng Li
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Patent number: 8310021Abstract: A method of manufacturing a neutron detector comprises forming a first wafer by at least forming an oxide layer on a substrate, forming an active semiconductor layer on the oxide layer, and forming an interconnect layer on the active semiconductor layer, forming at least one electrically conductive pathway extending from the interconnect layer through the active semiconductor layer and the oxide layer, forming a circuit transfer bond between the interconnect layer and a second wafer, removing the substrate of the first wafer after forming the circuit transfer bond, depositing a bond pad on the oxide layer after removing the substrate of the first wafer, wherein the bond pad is electrically connected to the electrically conductive pathway, depositing a barrier layer on the oxide layer after removing the substrate of the first wafer, and depositing a neutron conversion layer on the barrier layer after depositing the barrier layer.Type: GrantFiled: July 13, 2010Date of Patent: November 13, 2012Assignee: Honeywell International Inc.Inventors: Bradley J. Larsen, Todd A. Randazzo
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Patent number: 8286578Abstract: A coating device for coating a peripheral surface of a sleeve body with a coating formulation includes a vertical support column for supporting a sleeve body in a vertical position coaxial with a coating axis, a carriage slideable along the vertical support column, and an annular coating stage attached to the carriage and moveable therewith for containing the coating formulation and for coating a layer of the coating formulation onto the peripheral surface of the sleeve body during a sliding movement of the carriage along the vertical support column. The coating device includes an irradiation stage that is arranged to be moveable with the annular coating stage and to provide radiation to at least partially cure the layer of coating formulation onto the peripheral surface so as to prevent flow off of the coating formulation.Type: GrantFiled: September 18, 2007Date of Patent: October 16, 2012Assignee: Agfa Graphics NVInventors: Luc Leenders, Willem Mues, Jackie Duprez, Bart Verhoest, Hilbrand Vanden Wyngaert, Eddie Daems, Luc Vanmaele
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Publication number: 20120235260Abstract: Methods for manufacturing solid-state thermal neutron detectors with simultaneous high thermal neutron detection efficiency (>50%) and neutron to gamma discrimination (>104) are provided. A structure is provided that includes a p+ region on a first side of an intrinsic region and an n+ region on a second side of the intrinsic region. The thickness of the intrinsic region is minimized to achieve a desired gamma discrimination factor of at least 1.0E+04. Material is removed from one of the p+ region or the n+ region and into the intrinsic layer to produce pillars with open space between each pillar. The open space is filed with a neutron sensitive material. An electrode is placed in contact with the pillars and another electrode is placed in contact with the side that is opposite of the intrinsic layer with respect to the first electrode.Type: ApplicationFiled: April 25, 2012Publication date: September 20, 2012Applicant: Lawrence Livermore National Security, LLCInventors: Rebecca J. Nikolic, Adam M. Conway, Daniel Heineck, Lars F. Voss, Tzu Fang Wang, Qinghui Shao
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Publication number: 20120186637Abstract: A power converter comprises a nuclear radiation emitter having a first side and a second side, wherein the nuclear radiation emitter comprises a radiation-emitting radioisotope, a plurality of semiconductor substrates disposed over the first side of the nuclear radiation emitter, wherein each of the plurality of semiconductor substrates comprises a junction for converting nuclear radiation particles to electrical energy, and at least one high-density layer, wherein the high density layer has a density that is higher than a density of the semiconductor substrates, and wherein the high-density layer is disposed between two of the plurality of semiconductor substrates.Type: ApplicationFiled: November 1, 2011Publication date: July 26, 2012Applicant: MEDTRONIC, INC.Inventor: Geoffrey D. Batchelder
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Publication number: 20120187305Abstract: A multi-component tunable resistive coating and methods of depositing the coating on the surfaces of a microchannel plate (MCP) detector. The resistive coating composed of a plurality of alternating layers of a metal oxide resistive component layer and a conductive component layer composed of at least one of a metal, a metal nitride and a metal sulfide. The coating may further include an emissive layer configured to produce a secondary electron emission in response to a particle interacting with the MCP and a neutron-absorbing layer configured to respond to a neutron interacting with the MCP.Type: ApplicationFiled: January 21, 2011Publication date: July 26, 2012Inventors: Jeffrey W. Elam, Anil U. Mane, Qing Peng
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Patent number: 8216931Abstract: Embodiments are directed to the formation of multi-layer three-dimensional structures by forming and attaching a plurality of layers where each of the plurality of layers comprises at least one structural material forming a pattern and where at least one of the plurality of layers comprises at least one sacrificial material. In one embodiment, the formation of a multi-layer three-dimensional structure comprises (1) forming a plurality of individual layers and (2) attaching at least the formed plurality of individual layers together. In another embodiment, the formation of a multi-layer three-dimensional structure comprises (1) attaching an individual layer onto a substrate or onto a previously formed layer; (2) processing the attached individual layer to form a new layer comprising at least one material forming a pattern; and (3) repeating the steps of (1) and (2) one or more times.Type: GrantFiled: October 10, 2006Date of Patent: July 10, 2012Inventor: Gang Zhang
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Publication number: 20120161575Abstract: Provided are a stack-type beta battery generating a current from a beta source and a method of manufacturing the same. The method includes forming an oxide mask in a predetermined pattern on a surface of a substrate, forming a plurality of recesses by etching a region without the oxide mask from the substrate, removing the oxide mask and forming a PN-junction layer on the substrate, forming a first electrode on the PN-junction layer and forming a second electrode on another surface of the substrate, and forming a unit module by stacking a radioisotope layer on the PN-junction layer, the radioisotope layer emitting a beta ray. The beta battery can improve efficiency per unit area than a single layered beta battery by the number of stacked PN-junctions, and the process is simpler than a pore-forming process using DRIE, and manufacturing costs and time can be saved.Type: ApplicationFiled: November 22, 2011Publication date: June 28, 2012Applicant: Electronics and Telecommunications Research InstituteInventors: Byoung Gun CHOI, Jung Bum Kim, In Gi Lim, Chang Hee Hyoung, Hyung Il Park, Kyung Hwan Park, Tae Young Kang, Sung Eun Kim, Jung Hwan Hwang, Tae Wook Kang, Kyung Soo Kim, Sung Weon Kang
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Publication number: 20120161266Abstract: Radiation detectors can be made of n-type or p-type silicon. All segmented detectors on p-type silicon and double-sided detectors on n-type silicon require an “inter-segment isolation” to separate the n-type strips from each other; an alumina layer for isolating the strip detectors is applied, and forms negative charges at the silicon interface with appropriate densities. When alumina dielectric is deposited on silicon, the negative interface charge acts like an effective p-stop or p-spray barrier because electrons are “pushed” away from the interface due to the negative interface charge.Type: ApplicationFiled: February 29, 2012Publication date: June 28, 2012Applicants: CounselInventors: Marc Christophersen, Bernard F. Phlips
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Patent number: 8207008Abstract: A solar device is provided, comprising a substrate structure having a surface region, a flexible and conformal material comprising a polymer material affixing the surface region, and one or more solar cells spatially provided by one or more films of materials characterized by a thickness dimension of 25 microns and less and mechanically coupled to the flexible and conformal material. The one or more solar cells have a flexible characteristic. The flexible characteristic maintains each of the solar cells substantially free from any damage or breakage thereto when the one or more films of materials is subjected to bending.Type: GrantFiled: March 18, 2009Date of Patent: June 26, 2012Assignee: Stion CorporationInventor: Chester A. Farris, III
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Publication number: 20120149142Abstract: This is a novel SiC betavoltaic device (as an example) which comprises one or more “ultra shallow” P+ N? SiC junctions and a pillared or planar device surface (as an example). Junctions are deemed “ultra shallow”, since the thin junction layer (which is proximal to the device's radioactive source) is only 300 nm to 5 nm thick (as an example). This is a betavoltaic device, made of ultra-shallow junctions, which allows such penetration of emitted lower energy electrons, thus, reducing or eliminating losses through electron-hole pair recombination at the surface.Type: ApplicationFiled: February 14, 2012Publication date: June 14, 2012Inventors: Michael Spencer, Mvs Chandrashekhar
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Publication number: 20120122260Abstract: An array of radiation sensors or detectors is integrated within a three-dimensional semiconductor IC. The sensor array is located relatively close to the device layer of a circuit (e.g., a microprocessor) to be protected from the adverse effects of the ionizing radiation particles. As such, the location where the radiation particles intersect the device layer can be calculated with coarse precision (e.g., to within 10 s of microns).Type: ApplicationFiled: January 25, 2012Publication date: May 17, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Ethan H. Cannon, Michael J. Hauser, Timothy D. Sullivan
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Patent number: 8158449Abstract: A structure and a method for operating the same. The method includes providing a detecting structure which includes N detectors. N is a positive integer. A fabrication step is simultaneously performed on the detecting structure and M product structures in a fabrication tool resulting in a particle-emitting layer on the detecting structure. The detecting structure is different than the M product structures. The M product structures are identical. M is a positive integer. An impact of emitting particles from the particle-emitting layer on the detecting structure is analyzed after said performing is performed.Type: GrantFiled: October 8, 2008Date of Patent: April 17, 2012Assignee: International Business Machines CorporationInventors: Cyril Cabral, Jr., Michael S. Gordon, Jeff McMurray, Liesl M. McMurray, legal representative, Cristina Plettner, Paul Andrew Ronsheim
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Patent number: 8153453Abstract: This is a novel SiC betavoltaic device (as an example) which comprises one or more “ultra shallow” P+N? SiC junctions and a pillared or planar device surface (as an example). Junctions are deemed “ultra shallow”, since the thin junction layer (which is proximal to the device's radioactive source) is only 300 nm to 5 nm thick (as an example). In one example, tritium is used as a fuel source. In other embodiments, radioisotopes (such as Nickel-63, promethium or phosphorus-33) may be used. Low energy beta sources, such as tritium, emit low energy beta-electrons that penetrate very shallow distances (as shallow as 5 nm) in semiconductors, including SiC, and can result in electron-hole pair creation near the surface of a semiconductor device rather than pair creation in a device's depletion region.Type: GrantFiled: August 1, 2011Date of Patent: April 10, 2012Assignee: Widetronix, Inc.Inventors: Michael Spencer, MVS Chandrashekhar
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Patent number: 8134216Abstract: We introduce a new technology for Manufacturable, High Power Density, High Volume Utilization Nuclear Batteries. Betavoltaic batteries are an excellent choice for battery applications which require long life, high power density, or the ability to operate in harsh environments. In order to optimize the performance of betavoltaic batteries for these applications or any other application, it is desirable to maximize the efficiency of beta particle energy conversion into power, while at the same time increasing the power density of an overall device. The small (submicron) thickness of the active volume of both the isotope layer and the semiconductor device is due to the short absorption length of beta electrons. The absorption length determines the self absorption of the beta particles in the radioisotope layer as well as the range, or travel distance, of the betas in the semiconductor converter which is typically a semiconductor device comprising at least one PN junction.Type: GrantFiled: March 7, 2011Date of Patent: March 13, 2012Assignee: Widetronix, Inc.Inventors: Michael Spencer, MVS Chandrashekhar, Chris Thomas
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Publication number: 20120056287Abstract: A method for manufacturing an ionizing radiation detection device having a block of a semiconductor material adapted to undergo local separations of charges between positive and negative charges under the effect of ionizing radiation. The device including a first series of at least two collecting electrodes formed on the surface of the semiconductor block, and a second series of at least two non-collecting electrodes formed on a support and separated from the semiconductor block by an insulating layer. During processing, after forming the insulating layer on the support so as to cover the non-collecting electrodes, the block of semiconductor material bearing the collecting electrodes and the support bearing the non-collecting electrodes and the insulating layer are assembled.Type: ApplicationFiled: June 28, 2011Publication date: March 8, 2012Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Olivier MONNET, Guillaume MONTEMONT, Loick VERGER, Marie-Claude GENTET
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Publication number: 20120043632Abstract: Methods for fabricating three-dimentional PIN structures having conformal electrodes are provided, as well as the structures themselves. The structures include a first layer and an array of pillars with cavity regions between the pillars. A first end of each pillar is in contact with the first layer. A segment is formed on the second end of each pillar. The cavity regions are filled with a fill material, which may be a functional material such as a neutron sensitive material. The fill material covers each segment. A portion of the fill material is etched back to produce an exposed portion of the segment. A first electrode is deposited onto the fill material and each exposed segment, thereby forming a conductive layer that provides a common contact to each the exposed segment. A second electrode is deposited onto the first layer.Type: ApplicationFiled: January 27, 2011Publication date: February 23, 2012Inventors: Rebecca J. Nikolic, Adam M. Conway, Robert T. Graff, Catherine Reinhardt, Lars F. Voss, Qinghui Shao
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Patent number: 8114698Abstract: A III-nitride light emitting diode (LED) and method of fabricating the same, wherein at least one surface of a semipolar or nonpolar plane of a III-nitride layer of the LED is textured, thereby forming a textured surface in order to increase light extraction. The texturing may be performed by plasma assisted chemical etching, photolithography followed by etching, or nano-imprinting followed by etching.Type: GrantFiled: December 1, 2008Date of Patent: February 14, 2012Assignee: The Regents of the University of CaliforniaInventors: Hong Zhong, Anurag Tyagi, Kenneth J. Vampola, James S. Speck, Steven P. DenBaars, Shuji Nakamura
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Publication number: 20120012958Abstract: Charged particle sensing devices and methods of forming charged particle sensing devices are provided. The charged particle sensing device includes a source of charged particles, a plurality of collector electrodes for receiving a first portion of the charged particles and a grid formed around and spaced apart from the plurality of collector electrodes. The grid receives a second portion of the charged particles and directs backscattered charged particles, generated responsive to the second portion, to adjacent collector electrodes.Type: ApplicationFiled: July 15, 2010Publication date: January 19, 2012Applicant: ITT MANUFACTURING ENTERPRISES, INC.Inventors: DAN WESLEY CHILCOTT, William J. Baney, John Richard Troxell
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Publication number: 20120012957Abstract: A method of manufacturing a neutron detector comprises forming a first wafer by at least forming an oxide layer on a substrate, forming an active semiconductor layer on the oxide layer, and forming an interconnect layer on the active semiconductor layer, forming at least one electrically conductive pathway extending from the interconnect layer through the active semiconductor layer and the oxide layer, forming a circuit transfer bond between the interconnect layer and a second wafer, removing the substrate of the first wafer after forming the circuit transfer bond, depositing a bond pad on the oxide layer after removing the substrate of the first wafer, wherein the bond pad is electrically connected to the electrically conductive pathway, depositing a barrier layer on the oxide layer after removing the substrate of the first wafer, and depositing a neutron conversion layer on the barrier layer after depositing the barrier layer.Type: ApplicationFiled: July 13, 2010Publication date: January 19, 2012Applicant: HONEYWELL INTERNATIONAL INC.Inventors: Bradley J. Larsen, Todd A. Randazzo
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Patent number: 8093095Abstract: Device and method of forming a device in which a substrate (10) is fabricated with at least part of an electronic circuit for processing signals. A bulk single crystal material (14) is formed on the substrate, either directly on the substrate (10) or with an intervening thin film layer or transition region (12). A particular application of the device is for a radiation detector.Type: GrantFiled: December 21, 2006Date of Patent: January 10, 2012Assignee: Kromek LimitedInventors: Arnab Basu, Max Robinson, Ben Cantwell, Andy Brinkman
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Publication number: 20110291210Abstract: A power converter comprises a first die and a second die. Each die comprises a semiconductor substrate comprising a junction for converting nuclear radiation particles to electrical energy, the junction of each semiconductor substrate comprising a first side and a second side, a first electrode comprising a nuclear radiation-emitting radioisotope deposited on the semiconductor substrate, the first electrode being electrically connected to the first side of the junction, and a second electrode deposited on the semiconductor substrate, the second electrode being electrically connected to the second side. A bond is formed between one of the first electrode or the second electrode of the first die and one of the first electrode or the second electrode of the second die, wherein the bond forms an electrical contact between the bonded electrodes.Type: ApplicationFiled: May 28, 2010Publication date: December 1, 2011Applicant: Medtronic, Inc.Inventor: Geoffrey D. Batchelder
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Publication number: 20110284755Abstract: An apparatus (200) for detecting slow or thermal neutrons (160) including an alpha particle-detecting layer (240) that is a hydrogenated amorphous silicon p-i-n diode structure. The apparatus includes a bottom metal contact (220) and a top metal contact (250) with the diode structure (240) positioned between the two contacts (220, 250) to facilitate detection of alpha particles (170). The apparatus (200) includes a neutron conversion layer (230) formed of a material containing boron-10 isotopes. The top contact (250) is pixilated with each contact pixel extending to or proximate to an edge of the apparatus to facilitate electrical contacting. The contact pixels have elongated bodies to allow them to extend across the apparatus surface (242) with each pixel having a small surface area to match capacitance based upon a current spike detecting circuit or amplifier connected to each pixel.Type: ApplicationFiled: January 30, 2009Publication date: November 24, 2011Applicant: Alliance For Sustainable Energy, LLCInventors: Pauls Stradins, Howard M. Branz, Qi Wang, Harold R. Mchugh
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Publication number: 20110287567Abstract: This is a novel SiC betavoltaic device (as an example) which comprises one or more “ultra shallow” P+N? SiC junctions and a pillared or planar device surface (as an example). Junctions are deemed “ultra shallow”, since the thin junction layer (which is proximal to the device's radioactive source) is only 300 nm to 5 nm thick (as an example). In one example, tritium is used as a fuel source. In other embodiments, radioisotopes (such as Nickel-63, promethium or phosphorus-33) may be used. Low energy beta sources, such as tritium, emit low energy beta-electrons that penetrate very shallow distances (as shallow as 5 nm) in semiconductors, including SiC, and can result in electron-hole pair creation near the surface of a semiconductor device rather than pair creation in a device's depletion region.Type: ApplicationFiled: August 1, 2011Publication date: November 24, 2011Inventors: Michael Spencer, MVS Chandrashekhar
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Patent number: 8063462Abstract: A semiconductor device includes a semiconductor substrate having a first surface in which a light-receiving portion and electrodes are provided. The semiconductor substrate has a penetrating wiring layer connecting the first surface and the second surface. A light-transmissive protective member is disposed on the semiconductor substrate so as to cover the first surface. A gap is provided between the semiconductor substrate and the light-transmissive protective member. A protective film is formed at a surface of the light-transmissive protective member. The protective film has an opening provided at a region corresponding to the light-receiving portion.Type: GrantFiled: September 18, 2008Date of Patent: November 22, 2011Assignee: Kabushiki Kaisha ToshibaInventors: Kazumasa Tanida, Masahiro Sekiguchi, Susumu Harada
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Publication number: 20110278464Abstract: A monolithic integrated radiation detector includes a photodetector and a scintillator deposited directly on the photodetector. Preferably the photodetector is silicon and the scintillator is a rare earth phosphor. The rare earth phosphor is crystal lattice matched to the silicon by a transitional layer epitaxially grown therebetween.Type: ApplicationFiled: May 13, 2010Publication date: November 17, 2011Inventors: Andrew Clark, David L. Williams
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Publication number: 20110253900Abstract: Charged particle beamlet lithography system for transferring a pattern to a surface of a target comprising a sensor for determining one or more characteristics of one or more charged particle beamlets. The sensor comprises a converter element for receiving charged particles and generating photons in response. The converter element comprises a surface for receiving one or more charged particle beamlets, the surface being provided with one or more cells for evaluating one or more individual beamlets. Each cell comprises a predetermined blocking pattern of one or more charged particle blocking structures forming multiple knife edges at transitions between blocking and non-blocking regions along a predetermined beamlet scan trajectory over the converter element surface. The converter element surface is covered with a coating layer substantially permeable for said charged particles and substantially impermeable for ambient light.Type: ApplicationFiled: March 22, 2011Publication date: October 20, 2011Applicant: MAPPER LITHOGRAPHY IP B.V.Inventor: Rabah HANFOUG
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Publication number: 20110248366Abstract: A method of manufacturing a radiation-detecting device including spaced first columnar scintillators, second columnar scintillators which are located between the neighboring first columnar scintillators and which are spaced from the first columnar scintillators, and photodetecting elements overlapping with the first columnar scintillators includes a step of preparing the substrate such that the substrate has a surface having an uneven section having protruding portions and a plurality of spaced flat sections surrounded by the uneven section and also includes a step of forming the first columnar scintillators and the second columnar scintillators on the flat sections and the protruding portions, respectively, by depositing a scintillator material on the substrate having the uneven section and the flat sections. The uneven section has recessed portions and satisfies the following inequality: h/d?1 where h is the depth of each recessed portion and d is the distance between the protruding portions.Type: ApplicationFiled: March 25, 2011Publication date: October 13, 2011Applicant: CANON KABUSHIKI KAISHAInventors: Tatsuya Saito, Ryoko Horie, Nobuhiro Yasui, Toru Den
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Publication number: 20110248176Abstract: A detection apparatus comprising a substrate; a switching element arranged over the substrate and including a plurality of electrodes; a conductive line arranged over the substrate and electrically connected to a first electrode of the plurality of electrodes of the switching element; and a conversion element including a semiconductor layer arranged over the switching element and the conductive line and arranged between two electrodes, one electrode of the two electrodes being electrically connected to a second electrode of the plurality of electrodes of the switching element, is provided. The one electrode of the conversion element is arranged over the switching element and the conductive line through a space formed between the one electrode and the first electrode of the switching element or between the one electrode and the conductive line.Type: ApplicationFiled: March 17, 2011Publication date: October 13, 2011Applicant: CANON KABUSHIKI KAISHAInventors: Chiori Mochizuki, Minoru Watanabe, Takamasa Ishii, Jun Kawanabe, Kentaro Fujiyoshi
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Publication number: 20110233420Abstract: A neutron detector includes a microchannel plate having a structure that defines a plurality of microchannels, and layers of materials disposed on walls of the microchannels. The layers include a layer of neutron sensitive material, a layer of semiconducting material, and a layer of electron emissive material. For example, the layer of neutron sensitive material can include boron-10, lithium-6, or gadolinium.Type: ApplicationFiled: March 23, 2011Publication date: September 29, 2011Inventors: W. Bruce Feller, Paul L. White
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Patent number: 8017412Abstract: This is a novel SiC betavoltaic device (as an example) which comprises one or more “ultra shallow” P+N? SiC junctions and a pillared or planar device surface (as an example). Junctions are deemed “ultra shallow”, since the thin junction layer (which is proximal to the device's radioactive source) is only 300 nm to 5 nm thick (as an example). In one example, tritium is used as a fuel source. In other embodiments, radioisotopes (such as Nickel-63, promethium or phosphorus-33) may be used. Low energy beta sources, such as tritium, emit low energy beta-electrons that penetrate very shallow distances (as shallow as 5 nm) in semiconductors, including SiC, and can result in electron-hole pair creation near the surface of a semiconductor device rather than pair creation in a device's depletion region.Type: GrantFiled: September 23, 2010Date of Patent: September 13, 2011Assignee: Widetronix, Inc.Inventors: Michael Spencer, MVS Chandrashekhar
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Patent number: 7998788Abstract: Techniques for combining nanotechnology with photovoltaics are provided. In one aspect, a method of forming a photovoltaic device is provided comprising the following steps. A plurality of nanowires are formed on a substrate, wherein the plurality of nanowires attached to the substrate comprises a nanowire forest. In the presence of a first doping agent and a first volatile precursor, a first doped semiconductor layer is conformally deposited over the nanowire forest. In the presence of a second doping agent and a second volatile precursor, a second doped semiconductor layer is conformally deposited over the first doped layer. The first doping agent comprises one of an n-type doping agent and a p-type doping agent and the second doping agent comprises a different one of the n-type doping agent and the p-type doping agent from the first doping agent. A transparent electrode layer is deposited over the second doped semiconductor layer.Type: GrantFiled: July 27, 2006Date of Patent: August 16, 2011Assignee: International Business Machines CorporationInventors: Supratik Guha, Hendrik F. Hamann, Emanuel Tutuc
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Publication number: 20110193138Abstract: Provided is an electronic device that generates an output signal corresponding to an input signal, comprising a signal processing section that receives the input signal and outputs the output signal corresponding to the input signal, and a floating electrode that accumulates a charge by being irradiated by an electron beam. The signal processing section adjusts electric characteristics of the output signal according to a charge amount accumulated in the floating electrode, and includes a transistor formed on the semiconductor substrate between an input terminal that receives the input signal and an output terminal that outputs the output signal.Type: ApplicationFiled: February 15, 2011Publication date: August 11, 2011Applicant: ADVANTEST CORPORATIONInventors: Daisuke WATANABE, Toshiyuki OKAYASU
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Publication number: 20110192984Abstract: Silicon drift detectors are produced for location and energy measurement as well as spectroscopic applications by depositing a single high quality dielectric film followed by deposition of at least one low quality dielectric film.Type: ApplicationFiled: February 7, 2011Publication date: August 11, 2011Applicant: WEINBERG MEDICAL PHYSICS LLCInventors: Mario Urdaneta, Pavel Stepanov, Irving WEINBERG
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Patent number: 7989250Abstract: A method of fabricating a membrane structure for a diffractive phased array assembly is provided. The method includes the steps of providing a wafer having a body and at least a membrane layer and a backside layer disposed on opposite faces of the body, forming a grating pattern on a surface of the membrane layer, and forming a window through the wafer to expose a back surface of the membrane, thereby allowing light to pass through the membrane.Type: GrantFiled: April 3, 2008Date of Patent: August 2, 2011Assignee: Rosemount Aerospace Inc.Inventor: Michael Paul Nesnidal
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Publication number: 20110180890Abstract: A method of producing a radiographic image detector includes: preparing a thin-film transistor substrate comprising an insulating substrate and a thin-film transistor that is disposed on a surface of the insulating substrate at a first side; attaching, to the thin-film transistor substrate, a protective member comprising a protective member support and an adhesive layer that includes conductive particles and that is disposed on the protective member support, such that the adhesive layer and a surface of the thin-film transistor substrate at the first side contact each other; polishing a surface of the thin-film transistor substrate at a second side opposite to the first side, after the attaching of the protective member; separating and removing the protective member from the thin-film transistor substrate after the polishing; and providing a scintillator layer on a surface of the thin-film transistor substrate at the first side, after the removing of the protective member.Type: ApplicationFiled: December 14, 2010Publication date: July 28, 2011Applicant: FUJIFILM CORPORATIONInventor: Keiichiro SATO
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Publication number: 20110169116Abstract: The invention discloses a process for manufacturing a radiation detector for detecting e.g. 200 eV electrons. This makes the detector suited for e.g. use in an Scanning Electron Microscope. The detector is a PIN photodiode with a thin layer of pure boron connected to the p+-diffusion layer. The boron layer is connected to an electrode with an aluminium grid to form a path of low electrical resistance between each given point of the boron layer and the electrode. The invention addresses forming the aluminium grid on the boron layer without damaging the boron layer.Type: ApplicationFiled: January 13, 2011Publication date: July 14, 2011Applicant: FEI CompanyInventors: Lis Karen Nanver, Thomas Ludovicus Maria Scholtes, Agata Sakic, Cornelis Sander Kooijman, Gerard Nicolaas Anne van Veen
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Publication number: 20110163242Abstract: Room temperature operating solid state hand held neutron detectors integrate one or more relatively thin layers of a high neutron interaction cross-section element or materials with semiconductor detectors. The high neutron interaction cross-section element (e.g., Gd, B or Li) or materials comprising at least one high neutron interaction cross-section element can be in the form of unstructured layers or micro- or nano-structured arrays. Such architecture provides high efficiency neutron detector devices by capturing substantially more carriers produced from high energy ?-particles or ?-photons generated by neutron interaction.Type: ApplicationFiled: July 23, 2009Publication date: July 7, 2011Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIAInventors: Samuel S. Mao, Dale L. Perry
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Patent number: 7968959Abstract: Gray-tone lithography technology is used in combination with a reactive plasma etching operation in the fabrication method and system of a thick semiconductor drift detector. The thick semiconductor drift detector is based on a trench array, where the trenches in the trench array penetrate the bulk with different depths. These trenches form an electrode. By applying different electric potentials to the trenches in the trench array, the silicon between neighboring trenches fully depletes. Furthermore, the applied potentials cause a drifting field for generated charge carriers, which are directed towards a collecting electrode.Type: GrantFiled: October 19, 2009Date of Patent: June 28, 2011Assignee: The United States of America as represented by the Secretary of the NavyInventors: Marc Christophersen, Bernard F. Phlips
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Patent number: 7960646Abstract: In order to improve photoelectric conversion properties of a silicon-based thin-film photoelectric converter to which a conductive SiOx layer is inserted to obtain an optical confinement effect, the silicon-based thin-film photoelectric converter according to the present invention includes an i-type photoelectric conversion layer of hydrogenated amorphous silicon or an alloy thereof, an i-type buffer layer made of hydrogenated amorphous silicon, and an n-type Si1-xOx layer (x is 0.25-0.6) stacked successively, wherein the buffer layer has a higher hydrogen concentration at its interface with and as compared with the photoelectric conversion layer and has a thickness of at least 5 nm and at most 50 nm. Accordingly, generation of silicon crystal phase parts and reduction of resistivity are promoted in the n-type Si1-xOx layer, contact resistance at the interface is reduced, and FF of the photoelectric converter is improved, so that the photoelectric converter achieves improved properties.Type: GrantFiled: July 25, 2006Date of Patent: June 14, 2011Assignee: Kaneka CorporationInventors: Toshiaki Sasaki, Kenji Yamamoto
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Publication number: 20110127527Abstract: A silicon-on-insulator (SOI) neutron detector comprising a silicon-on-insulator structure, wherein the silicon-on-insulator structure consists of an active semiconductor layer, a buried layer, and a handle substrate, a lateral carrier transport and collection detector structure within the active semiconductor layer of the silicon-on-insulator structure, and a neutron to high energy particle converter layer on the active semiconductor layer.Type: ApplicationFiled: January 21, 2011Publication date: June 2, 2011Applicant: The Government of the United States of America, as represented by the Secretary of the NavyInventors: Francis J. Kub, Bernard F. Phlips, Karl D. Hobart, Eric A. Wulf
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Publication number: 20110121192Abstract: A radiation detector is provided with a scintillator 2A containing a plurality of modified regions 21 and a plurality of photodetectors or a position-sensitive photodetector optically coupled to a surface of the scintillator 2A. The plurality of modified regions 21 are formed by irradiating an inside of a crystalline lump which will act as the scintillator 2A with a laser beam and three-dimensionally dotted and have a refractive index different from a refractive index of a surrounding region within the inside of the scintillator 2A.Type: ApplicationFiled: March 13, 2009Publication date: May 26, 2011Applicant: HAMAMATSU PHOTONICS K.K.Inventors: Takahiro Moriya, Takaji Yamashita, Makoto Kakegawa
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Publication number: 20110095193Abstract: A detector (100) for detecting neutrons includes a neutron reactive material (102) adapted to interact with neutrons to be detected and release ionizing radiation reaction products in relation to the interactions with neutrons. The detector also includes a first semiconductor element (101) being coupled with the neutron reactive material (102) and adapted to interact with the ionizing radiation reaction products and provide electrical charges proportional to the energy of the ionizing radiation reaction products. In addition electrodes are arranged in connection with the first semiconductor element (101) for providing charge collecting areas (106) for collecting the electrical charges and to provide electrically readable signal proportional to the collected electrical charges. The thickness of the first semiconductor element (101) is adapted to be electrically and/or physically so thin that it is essentially/practically transparent for incident photons, such as background gamma photons.Type: ApplicationFiled: March 8, 2010Publication date: April 28, 2011Applicant: FINPHYS OYInventors: Risto ORAVA, Tom SCHULMAN
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Publication number: 20110095386Abstract: A semiconductor sensor for detecting a radiation including a sensitive layer obtained in an inactive layer adapted to detect a light radiation, a portion thereof having a metal layer attached thereto, while on the remaining portion of the sensitive layer there is an overlapping scintillator. A bonding wire branches from said metal layer. Said sensor is shaped so that, according to a section of the sensor, said metal layer is at a lower height with respect to the scintillator crystal, so that the bonding wire does not interfere therewith. Such a result is obtained by tapering the thickness of said inactive layer and/or interposing a transparent layer between said sensitive layer and said scintillator crystal.Type: ApplicationFiled: October 26, 2010Publication date: April 28, 2011Inventor: Claudio Piemonte
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Publication number: 20110095194Abstract: A detector for detecting neutrons includes a neutron reactive material interacting with neutrons to be detected and releasing ionizing radiation reaction products in relation to the interactions. It also includes a first semiconductor element being coupled with the neutron reactive material and adapted to interact with the ionizing radiation reaction products and provide electrical charges proportional to the energy of the ionizing radiation reaction products. In addition electrodes are arranged in connection with the first semiconductor element for providing charge collecting areas for collecting the electrical charges and to provide electrically readable signal proportional to the collected electrical charges.Type: ApplicationFiled: May 19, 2010Publication date: April 28, 2011Applicant: FINPHYS OYInventors: Risto ORAVA, Tom SCHULMAN
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Publication number: 20110086456Abstract: This is a novel SiC betavoltaic device (as an example) which comprises one or more “ultra shallow” P+N? SiC junctions and a pillared or planar device surface (as an example). Junctions are deemed “ultra shallow”, since the thin junction layer (which is proximal to the device's radioactive source) is only 300 nm to 5 nm thick (as an example). In one example, tritium is used as a fuel source. In other embodiments, radioisotopes (such as Nickel-63, promethium or phosphorus-33) may be used. Low energy beta sources, such as tritium, emit low energy beta-electrons that penetrate very shallow distances (as shallow as 5 nm) in semiconductors, including SiC, and can result in electron-hole pair creation near the surface of a semiconductor device rather than pair creation in a device's depletion region.Type: ApplicationFiled: September 23, 2010Publication date: April 14, 2011Inventors: Michael Spencer, MVS Chandrashekhar