Responsive To Corpuscular Radiation (e.g., Nuclear Particle Detector, Etc.) Patents (Class 438/56)
  • Publication number: 20130049147
    Abstract: A bonded wafer structure having a handle wafer, a device wafer, and an interface region with an abrupt transition between the conductivity profile of the device wafer and the handle wafer is used for making semiconductor devices. The improved doping profile of the bonded wafer structure is well suited for use in the manufacture of integrated circuits. The bonded wafer structure is especially suited for making radiation-hardened integrated circuits.
    Type: Application
    Filed: August 25, 2011
    Publication date: February 28, 2013
    Applicant: Aeroflex Colorado Springs Inc.
    Inventors: David B. Kerwin, Joseph M. Benedetto
  • Publication number: 20130026544
    Abstract: A method for forming a neutron detector comprises thinning a backside silicon substrate of a radiation detector; and forming a neutron converter layer on the thinned backside silicon substrate of the radiation detector to form the neutron detector. The neutron converter layer comprises one of boron-10 (10B), lithium-6 (6Li), helium-3 (3He), and gadolinium-157 (157Gd).
    Type: Application
    Filed: July 25, 2011
    Publication date: January 31, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Michael S. Gordon, Kenneth P. Rodbell, Jeng-Bang Yau
  • Publication number: 20130026355
    Abstract: A neutron porosity measurement device adapted to receive a neutron source configured to emit neutrons having a first energy includes a segmented semiconductor detector located at a predetermined distance from the neutron source. The segmented semiconductor detector includes a plurality of semiconductor neutron detection cells configured to detect neutrons having a second energy smaller than the first energy. The cells are arranged in subsets located between a first distance and a second distance from the neutron source, each subset including semiconductor neutron detection cells surrounding an axis and being disposed in opposite sectors defined relative to the axis at substantially same distance from the neutron source. One or more of the neutron detection cells are configured to acquire data related to detected neutrons independently from one or more other of the neutron detected cells. A method of manufacturing the neutron porosity measurement device is also provided.
    Type: Application
    Filed: July 28, 2011
    Publication date: January 31, 2013
    Applicant: SONDEX WIRELINE LIMITED
    Inventors: Helene Claire CLIMENT, Jason MACINNIS
  • Patent number: 8357906
    Abstract: Charged particle beamlet lithography system for transferring a pattern to a surface of a target comprising a sensor for determining one or more characteristics of one or more charged particle beamlets. The sensor comprises a converter element for receiving charged particles and generating photons in response. The converter element comprises a surface for receiving one or more charged particle beamlets, the surface being provided with one or more cells for evaluating one or more individual beamlets. Each cell comprises a predetermined blocking pattern of one or more charged particle blocking structures forming multiple knife edges at transitions between blocking and non-blocking regions along a predetermined beamlet scan trajectory over the converter element surface. The converter element surface is covered with a coating layer substantially permeable for said charged particles and substantially impermeable for ambient light.
    Type: Grant
    Filed: March 22, 2011
    Date of Patent: January 22, 2013
    Assignee: Mapper Lithopraphy IP B.V.
    Inventor: Rabah Hanfoug
  • Publication number: 20120313196
    Abstract: A three-dimensional (3D) Trench detector and a method for fabricating the detector are disclosed. The 3D-Trench detector includes a bulk of semiconductor material that has first and second surfaces separated from each other by a bulk thickness, a first electrode in the form of a 3D-Trench, and a second electrode in the form of a 3D column. The first and second electrodes extend into the bulk along the bulk thickness. The first and second electrodes are separated from each other by a predetermined electrode distance, and the first electrode completely surrounds the second electrode along essentially the entire distance that the two electrodes extend into the bulk such that the two electrodes are substantially concentric to each other. The fabrication method includes doping a first narrow and deep region around the periphery of the bulk to form the first electrode, and doping a second narrow and deep region in the center of the bulk to form the second electrode.
    Type: Application
    Filed: October 15, 2010
    Publication date: December 13, 2012
    Applicant: Brookhaven Science Associates ,LLC et al.
    Inventor: Zheng Li
  • Patent number: 8310021
    Abstract: A method of manufacturing a neutron detector comprises forming a first wafer by at least forming an oxide layer on a substrate, forming an active semiconductor layer on the oxide layer, and forming an interconnect layer on the active semiconductor layer, forming at least one electrically conductive pathway extending from the interconnect layer through the active semiconductor layer and the oxide layer, forming a circuit transfer bond between the interconnect layer and a second wafer, removing the substrate of the first wafer after forming the circuit transfer bond, depositing a bond pad on the oxide layer after removing the substrate of the first wafer, wherein the bond pad is electrically connected to the electrically conductive pathway, depositing a barrier layer on the oxide layer after removing the substrate of the first wafer, and depositing a neutron conversion layer on the barrier layer after depositing the barrier layer.
    Type: Grant
    Filed: July 13, 2010
    Date of Patent: November 13, 2012
    Assignee: Honeywell International Inc.
    Inventors: Bradley J. Larsen, Todd A. Randazzo
  • Patent number: 8286578
    Abstract: A coating device for coating a peripheral surface of a sleeve body with a coating formulation includes a vertical support column for supporting a sleeve body in a vertical position coaxial with a coating axis, a carriage slideable along the vertical support column, and an annular coating stage attached to the carriage and moveable therewith for containing the coating formulation and for coating a layer of the coating formulation onto the peripheral surface of the sleeve body during a sliding movement of the carriage along the vertical support column. The coating device includes an irradiation stage that is arranged to be moveable with the annular coating stage and to provide radiation to at least partially cure the layer of coating formulation onto the peripheral surface so as to prevent flow off of the coating formulation.
    Type: Grant
    Filed: September 18, 2007
    Date of Patent: October 16, 2012
    Assignee: Agfa Graphics NV
    Inventors: Luc Leenders, Willem Mues, Jackie Duprez, Bart Verhoest, Hilbrand Vanden Wyngaert, Eddie Daems, Luc Vanmaele
  • Publication number: 20120235260
    Abstract: Methods for manufacturing solid-state thermal neutron detectors with simultaneous high thermal neutron detection efficiency (>50%) and neutron to gamma discrimination (>104) are provided. A structure is provided that includes a p+ region on a first side of an intrinsic region and an n+ region on a second side of the intrinsic region. The thickness of the intrinsic region is minimized to achieve a desired gamma discrimination factor of at least 1.0E+04. Material is removed from one of the p+ region or the n+ region and into the intrinsic layer to produce pillars with open space between each pillar. The open space is filed with a neutron sensitive material. An electrode is placed in contact with the pillars and another electrode is placed in contact with the side that is opposite of the intrinsic layer with respect to the first electrode.
    Type: Application
    Filed: April 25, 2012
    Publication date: September 20, 2012
    Applicant: Lawrence Livermore National Security, LLC
    Inventors: Rebecca J. Nikolic, Adam M. Conway, Daniel Heineck, Lars F. Voss, Tzu Fang Wang, Qinghui Shao
  • Publication number: 20120186637
    Abstract: A power converter comprises a nuclear radiation emitter having a first side and a second side, wherein the nuclear radiation emitter comprises a radiation-emitting radioisotope, a plurality of semiconductor substrates disposed over the first side of the nuclear radiation emitter, wherein each of the plurality of semiconductor substrates comprises a junction for converting nuclear radiation particles to electrical energy, and at least one high-density layer, wherein the high density layer has a density that is higher than a density of the semiconductor substrates, and wherein the high-density layer is disposed between two of the plurality of semiconductor substrates.
    Type: Application
    Filed: November 1, 2011
    Publication date: July 26, 2012
    Applicant: MEDTRONIC, INC.
    Inventor: Geoffrey D. Batchelder
  • Publication number: 20120187305
    Abstract: A multi-component tunable resistive coating and methods of depositing the coating on the surfaces of a microchannel plate (MCP) detector. The resistive coating composed of a plurality of alternating layers of a metal oxide resistive component layer and a conductive component layer composed of at least one of a metal, a metal nitride and a metal sulfide. The coating may further include an emissive layer configured to produce a secondary electron emission in response to a particle interacting with the MCP and a neutron-absorbing layer configured to respond to a neutron interacting with the MCP.
    Type: Application
    Filed: January 21, 2011
    Publication date: July 26, 2012
    Inventors: Jeffrey W. Elam, Anil U. Mane, Qing Peng
  • Patent number: 8216931
    Abstract: Embodiments are directed to the formation of multi-layer three-dimensional structures by forming and attaching a plurality of layers where each of the plurality of layers comprises at least one structural material forming a pattern and where at least one of the plurality of layers comprises at least one sacrificial material. In one embodiment, the formation of a multi-layer three-dimensional structure comprises (1) forming a plurality of individual layers and (2) attaching at least the formed plurality of individual layers together. In another embodiment, the formation of a multi-layer three-dimensional structure comprises (1) attaching an individual layer onto a substrate or onto a previously formed layer; (2) processing the attached individual layer to form a new layer comprising at least one material forming a pattern; and (3) repeating the steps of (1) and (2) one or more times.
    Type: Grant
    Filed: October 10, 2006
    Date of Patent: July 10, 2012
    Inventor: Gang Zhang
  • Publication number: 20120161575
    Abstract: Provided are a stack-type beta battery generating a current from a beta source and a method of manufacturing the same. The method includes forming an oxide mask in a predetermined pattern on a surface of a substrate, forming a plurality of recesses by etching a region without the oxide mask from the substrate, removing the oxide mask and forming a PN-junction layer on the substrate, forming a first electrode on the PN-junction layer and forming a second electrode on another surface of the substrate, and forming a unit module by stacking a radioisotope layer on the PN-junction layer, the radioisotope layer emitting a beta ray. The beta battery can improve efficiency per unit area than a single layered beta battery by the number of stacked PN-junctions, and the process is simpler than a pore-forming process using DRIE, and manufacturing costs and time can be saved.
    Type: Application
    Filed: November 22, 2011
    Publication date: June 28, 2012
    Applicant: Electronics and Telecommunications Research Institute
    Inventors: Byoung Gun CHOI, Jung Bum Kim, In Gi Lim, Chang Hee Hyoung, Hyung Il Park, Kyung Hwan Park, Tae Young Kang, Sung Eun Kim, Jung Hwan Hwang, Tae Wook Kang, Kyung Soo Kim, Sung Weon Kang
  • Publication number: 20120161266
    Abstract: Radiation detectors can be made of n-type or p-type silicon. All segmented detectors on p-type silicon and double-sided detectors on n-type silicon require an “inter-segment isolation” to separate the n-type strips from each other; an alumina layer for isolating the strip detectors is applied, and forms negative charges at the silicon interface with appropriate densities. When alumina dielectric is deposited on silicon, the negative interface charge acts like an effective p-stop or p-spray barrier because electrons are “pushed” away from the interface due to the negative interface charge.
    Type: Application
    Filed: February 29, 2012
    Publication date: June 28, 2012
    Applicants: Counsel
    Inventors: Marc Christophersen, Bernard F. Phlips
  • Patent number: 8207008
    Abstract: A solar device is provided, comprising a substrate structure having a surface region, a flexible and conformal material comprising a polymer material affixing the surface region, and one or more solar cells spatially provided by one or more films of materials characterized by a thickness dimension of 25 microns and less and mechanically coupled to the flexible and conformal material. The one or more solar cells have a flexible characteristic. The flexible characteristic maintains each of the solar cells substantially free from any damage or breakage thereto when the one or more films of materials is subjected to bending.
    Type: Grant
    Filed: March 18, 2009
    Date of Patent: June 26, 2012
    Assignee: Stion Corporation
    Inventor: Chester A. Farris, III
  • Publication number: 20120149142
    Abstract: This is a novel SiC betavoltaic device (as an example) which comprises one or more “ultra shallow” P+ N? SiC junctions and a pillared or planar device surface (as an example). Junctions are deemed “ultra shallow”, since the thin junction layer (which is proximal to the device's radioactive source) is only 300 nm to 5 nm thick (as an example). This is a betavoltaic device, made of ultra-shallow junctions, which allows such penetration of emitted lower energy electrons, thus, reducing or eliminating losses through electron-hole pair recombination at the surface.
    Type: Application
    Filed: February 14, 2012
    Publication date: June 14, 2012
    Inventors: Michael Spencer, Mvs Chandrashekhar
  • Publication number: 20120122260
    Abstract: An array of radiation sensors or detectors is integrated within a three-dimensional semiconductor IC. The sensor array is located relatively close to the device layer of a circuit (e.g., a microprocessor) to be protected from the adverse effects of the ionizing radiation particles. As such, the location where the radiation particles intersect the device layer can be calculated with coarse precision (e.g., to within 10 s of microns).
    Type: Application
    Filed: January 25, 2012
    Publication date: May 17, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Ethan H. Cannon, Michael J. Hauser, Timothy D. Sullivan
  • Patent number: 8158449
    Abstract: A structure and a method for operating the same. The method includes providing a detecting structure which includes N detectors. N is a positive integer. A fabrication step is simultaneously performed on the detecting structure and M product structures in a fabrication tool resulting in a particle-emitting layer on the detecting structure. The detecting structure is different than the M product structures. The M product structures are identical. M is a positive integer. An impact of emitting particles from the particle-emitting layer on the detecting structure is analyzed after said performing is performed.
    Type: Grant
    Filed: October 8, 2008
    Date of Patent: April 17, 2012
    Assignee: International Business Machines Corporation
    Inventors: Cyril Cabral, Jr., Michael S. Gordon, Jeff McMurray, Liesl M. McMurray, legal representative, Cristina Plettner, Paul Andrew Ronsheim
  • Patent number: 8153453
    Abstract: This is a novel SiC betavoltaic device (as an example) which comprises one or more “ultra shallow” P+N? SiC junctions and a pillared or planar device surface (as an example). Junctions are deemed “ultra shallow”, since the thin junction layer (which is proximal to the device's radioactive source) is only 300 nm to 5 nm thick (as an example). In one example, tritium is used as a fuel source. In other embodiments, radioisotopes (such as Nickel-63, promethium or phosphorus-33) may be used. Low energy beta sources, such as tritium, emit low energy beta-electrons that penetrate very shallow distances (as shallow as 5 nm) in semiconductors, including SiC, and can result in electron-hole pair creation near the surface of a semiconductor device rather than pair creation in a device's depletion region.
    Type: Grant
    Filed: August 1, 2011
    Date of Patent: April 10, 2012
    Assignee: Widetronix, Inc.
    Inventors: Michael Spencer, MVS Chandrashekhar
  • Patent number: 8134216
    Abstract: We introduce a new technology for Manufacturable, High Power Density, High Volume Utilization Nuclear Batteries. Betavoltaic batteries are an excellent choice for battery applications which require long life, high power density, or the ability to operate in harsh environments. In order to optimize the performance of betavoltaic batteries for these applications or any other application, it is desirable to maximize the efficiency of beta particle energy conversion into power, while at the same time increasing the power density of an overall device. The small (submicron) thickness of the active volume of both the isotope layer and the semiconductor device is due to the short absorption length of beta electrons. The absorption length determines the self absorption of the beta particles in the radioisotope layer as well as the range, or travel distance, of the betas in the semiconductor converter which is typically a semiconductor device comprising at least one PN junction.
    Type: Grant
    Filed: March 7, 2011
    Date of Patent: March 13, 2012
    Assignee: Widetronix, Inc.
    Inventors: Michael Spencer, MVS Chandrashekhar, Chris Thomas
  • Publication number: 20120056287
    Abstract: A method for manufacturing an ionizing radiation detection device having a block of a semiconductor material adapted to undergo local separations of charges between positive and negative charges under the effect of ionizing radiation. The device including a first series of at least two collecting electrodes formed on the surface of the semiconductor block, and a second series of at least two non-collecting electrodes formed on a support and separated from the semiconductor block by an insulating layer. During processing, after forming the insulating layer on the support so as to cover the non-collecting electrodes, the block of semiconductor material bearing the collecting electrodes and the support bearing the non-collecting electrodes and the insulating layer are assembled.
    Type: Application
    Filed: June 28, 2011
    Publication date: March 8, 2012
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Olivier MONNET, Guillaume MONTEMONT, Loick VERGER, Marie-Claude GENTET
  • Publication number: 20120043632
    Abstract: Methods for fabricating three-dimentional PIN structures having conformal electrodes are provided, as well as the structures themselves. The structures include a first layer and an array of pillars with cavity regions between the pillars. A first end of each pillar is in contact with the first layer. A segment is formed on the second end of each pillar. The cavity regions are filled with a fill material, which may be a functional material such as a neutron sensitive material. The fill material covers each segment. A portion of the fill material is etched back to produce an exposed portion of the segment. A first electrode is deposited onto the fill material and each exposed segment, thereby forming a conductive layer that provides a common contact to each the exposed segment. A second electrode is deposited onto the first layer.
    Type: Application
    Filed: January 27, 2011
    Publication date: February 23, 2012
    Inventors: Rebecca J. Nikolic, Adam M. Conway, Robert T. Graff, Catherine Reinhardt, Lars F. Voss, Qinghui Shao
  • Patent number: 8114698
    Abstract: A III-nitride light emitting diode (LED) and method of fabricating the same, wherein at least one surface of a semipolar or nonpolar plane of a III-nitride layer of the LED is textured, thereby forming a textured surface in order to increase light extraction. The texturing may be performed by plasma assisted chemical etching, photolithography followed by etching, or nano-imprinting followed by etching.
    Type: Grant
    Filed: December 1, 2008
    Date of Patent: February 14, 2012
    Assignee: The Regents of the University of California
    Inventors: Hong Zhong, Anurag Tyagi, Kenneth J. Vampola, James S. Speck, Steven P. DenBaars, Shuji Nakamura
  • Publication number: 20120012958
    Abstract: Charged particle sensing devices and methods of forming charged particle sensing devices are provided. The charged particle sensing device includes a source of charged particles, a plurality of collector electrodes for receiving a first portion of the charged particles and a grid formed around and spaced apart from the plurality of collector electrodes. The grid receives a second portion of the charged particles and directs backscattered charged particles, generated responsive to the second portion, to adjacent collector electrodes.
    Type: Application
    Filed: July 15, 2010
    Publication date: January 19, 2012
    Applicant: ITT MANUFACTURING ENTERPRISES, INC.
    Inventors: DAN WESLEY CHILCOTT, William J. Baney, John Richard Troxell
  • Publication number: 20120012957
    Abstract: A method of manufacturing a neutron detector comprises forming a first wafer by at least forming an oxide layer on a substrate, forming an active semiconductor layer on the oxide layer, and forming an interconnect layer on the active semiconductor layer, forming at least one electrically conductive pathway extending from the interconnect layer through the active semiconductor layer and the oxide layer, forming a circuit transfer bond between the interconnect layer and a second wafer, removing the substrate of the first wafer after forming the circuit transfer bond, depositing a bond pad on the oxide layer after removing the substrate of the first wafer, wherein the bond pad is electrically connected to the electrically conductive pathway, depositing a barrier layer on the oxide layer after removing the substrate of the first wafer, and depositing a neutron conversion layer on the barrier layer after depositing the barrier layer.
    Type: Application
    Filed: July 13, 2010
    Publication date: January 19, 2012
    Applicant: HONEYWELL INTERNATIONAL INC.
    Inventors: Bradley J. Larsen, Todd A. Randazzo
  • Patent number: 8093095
    Abstract: Device and method of forming a device in which a substrate (10) is fabricated with at least part of an electronic circuit for processing signals. A bulk single crystal material (14) is formed on the substrate, either directly on the substrate (10) or with an intervening thin film layer or transition region (12). A particular application of the device is for a radiation detector.
    Type: Grant
    Filed: December 21, 2006
    Date of Patent: January 10, 2012
    Assignee: Kromek Limited
    Inventors: Arnab Basu, Max Robinson, Ben Cantwell, Andy Brinkman
  • Publication number: 20110291210
    Abstract: A power converter comprises a first die and a second die. Each die comprises a semiconductor substrate comprising a junction for converting nuclear radiation particles to electrical energy, the junction of each semiconductor substrate comprising a first side and a second side, a first electrode comprising a nuclear radiation-emitting radioisotope deposited on the semiconductor substrate, the first electrode being electrically connected to the first side of the junction, and a second electrode deposited on the semiconductor substrate, the second electrode being electrically connected to the second side. A bond is formed between one of the first electrode or the second electrode of the first die and one of the first electrode or the second electrode of the second die, wherein the bond forms an electrical contact between the bonded electrodes.
    Type: Application
    Filed: May 28, 2010
    Publication date: December 1, 2011
    Applicant: Medtronic, Inc.
    Inventor: Geoffrey D. Batchelder
  • Publication number: 20110284755
    Abstract: An apparatus (200) for detecting slow or thermal neutrons (160) including an alpha particle-detecting layer (240) that is a hydrogenated amorphous silicon p-i-n diode structure. The apparatus includes a bottom metal contact (220) and a top metal contact (250) with the diode structure (240) positioned between the two contacts (220, 250) to facilitate detection of alpha particles (170). The apparatus (200) includes a neutron conversion layer (230) formed of a material containing boron-10 isotopes. The top contact (250) is pixilated with each contact pixel extending to or proximate to an edge of the apparatus to facilitate electrical contacting. The contact pixels have elongated bodies to allow them to extend across the apparatus surface (242) with each pixel having a small surface area to match capacitance based upon a current spike detecting circuit or amplifier connected to each pixel.
    Type: Application
    Filed: January 30, 2009
    Publication date: November 24, 2011
    Applicant: Alliance For Sustainable Energy, LLC
    Inventors: Pauls Stradins, Howard M. Branz, Qi Wang, Harold R. Mchugh
  • Publication number: 20110287567
    Abstract: This is a novel SiC betavoltaic device (as an example) which comprises one or more “ultra shallow” P+N? SiC junctions and a pillared or planar device surface (as an example). Junctions are deemed “ultra shallow”, since the thin junction layer (which is proximal to the device's radioactive source) is only 300 nm to 5 nm thick (as an example). In one example, tritium is used as a fuel source. In other embodiments, radioisotopes (such as Nickel-63, promethium or phosphorus-33) may be used. Low energy beta sources, such as tritium, emit low energy beta-electrons that penetrate very shallow distances (as shallow as 5 nm) in semiconductors, including SiC, and can result in electron-hole pair creation near the surface of a semiconductor device rather than pair creation in a device's depletion region.
    Type: Application
    Filed: August 1, 2011
    Publication date: November 24, 2011
    Inventors: Michael Spencer, MVS Chandrashekhar
  • Patent number: 8063462
    Abstract: A semiconductor device includes a semiconductor substrate having a first surface in which a light-receiving portion and electrodes are provided. The semiconductor substrate has a penetrating wiring layer connecting the first surface and the second surface. A light-transmissive protective member is disposed on the semiconductor substrate so as to cover the first surface. A gap is provided between the semiconductor substrate and the light-transmissive protective member. A protective film is formed at a surface of the light-transmissive protective member. The protective film has an opening provided at a region corresponding to the light-receiving portion.
    Type: Grant
    Filed: September 18, 2008
    Date of Patent: November 22, 2011
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kazumasa Tanida, Masahiro Sekiguchi, Susumu Harada
  • Publication number: 20110278464
    Abstract: A monolithic integrated radiation detector includes a photodetector and a scintillator deposited directly on the photodetector. Preferably the photodetector is silicon and the scintillator is a rare earth phosphor. The rare earth phosphor is crystal lattice matched to the silicon by a transitional layer epitaxially grown therebetween.
    Type: Application
    Filed: May 13, 2010
    Publication date: November 17, 2011
    Inventors: Andrew Clark, David L. Williams
  • Publication number: 20110253900
    Abstract: Charged particle beamlet lithography system for transferring a pattern to a surface of a target comprising a sensor for determining one or more characteristics of one or more charged particle beamlets. The sensor comprises a converter element for receiving charged particles and generating photons in response. The converter element comprises a surface for receiving one or more charged particle beamlets, the surface being provided with one or more cells for evaluating one or more individual beamlets. Each cell comprises a predetermined blocking pattern of one or more charged particle blocking structures forming multiple knife edges at transitions between blocking and non-blocking regions along a predetermined beamlet scan trajectory over the converter element surface. The converter element surface is covered with a coating layer substantially permeable for said charged particles and substantially impermeable for ambient light.
    Type: Application
    Filed: March 22, 2011
    Publication date: October 20, 2011
    Applicant: MAPPER LITHOGRAPHY IP B.V.
    Inventor: Rabah HANFOUG
  • Publication number: 20110248366
    Abstract: A method of manufacturing a radiation-detecting device including spaced first columnar scintillators, second columnar scintillators which are located between the neighboring first columnar scintillators and which are spaced from the first columnar scintillators, and photodetecting elements overlapping with the first columnar scintillators includes a step of preparing the substrate such that the substrate has a surface having an uneven section having protruding portions and a plurality of spaced flat sections surrounded by the uneven section and also includes a step of forming the first columnar scintillators and the second columnar scintillators on the flat sections and the protruding portions, respectively, by depositing a scintillator material on the substrate having the uneven section and the flat sections. The uneven section has recessed portions and satisfies the following inequality: h/d?1 where h is the depth of each recessed portion and d is the distance between the protruding portions.
    Type: Application
    Filed: March 25, 2011
    Publication date: October 13, 2011
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: Tatsuya Saito, Ryoko Horie, Nobuhiro Yasui, Toru Den
  • Publication number: 20110248176
    Abstract: A detection apparatus comprising a substrate; a switching element arranged over the substrate and including a plurality of electrodes; a conductive line arranged over the substrate and electrically connected to a first electrode of the plurality of electrodes of the switching element; and a conversion element including a semiconductor layer arranged over the switching element and the conductive line and arranged between two electrodes, one electrode of the two electrodes being electrically connected to a second electrode of the plurality of electrodes of the switching element, is provided. The one electrode of the conversion element is arranged over the switching element and the conductive line through a space formed between the one electrode and the first electrode of the switching element or between the one electrode and the conductive line.
    Type: Application
    Filed: March 17, 2011
    Publication date: October 13, 2011
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: Chiori Mochizuki, Minoru Watanabe, Takamasa Ishii, Jun Kawanabe, Kentaro Fujiyoshi
  • Publication number: 20110233420
    Abstract: A neutron detector includes a microchannel plate having a structure that defines a plurality of microchannels, and layers of materials disposed on walls of the microchannels. The layers include a layer of neutron sensitive material, a layer of semiconducting material, and a layer of electron emissive material. For example, the layer of neutron sensitive material can include boron-10, lithium-6, or gadolinium.
    Type: Application
    Filed: March 23, 2011
    Publication date: September 29, 2011
    Inventors: W. Bruce Feller, Paul L. White
  • Patent number: 8017412
    Abstract: This is a novel SiC betavoltaic device (as an example) which comprises one or more “ultra shallow” P+N? SiC junctions and a pillared or planar device surface (as an example). Junctions are deemed “ultra shallow”, since the thin junction layer (which is proximal to the device's radioactive source) is only 300 nm to 5 nm thick (as an example). In one example, tritium is used as a fuel source. In other embodiments, radioisotopes (such as Nickel-63, promethium or phosphorus-33) may be used. Low energy beta sources, such as tritium, emit low energy beta-electrons that penetrate very shallow distances (as shallow as 5 nm) in semiconductors, including SiC, and can result in electron-hole pair creation near the surface of a semiconductor device rather than pair creation in a device's depletion region.
    Type: Grant
    Filed: September 23, 2010
    Date of Patent: September 13, 2011
    Assignee: Widetronix, Inc.
    Inventors: Michael Spencer, MVS Chandrashekhar
  • Patent number: 7998788
    Abstract: Techniques for combining nanotechnology with photovoltaics are provided. In one aspect, a method of forming a photovoltaic device is provided comprising the following steps. A plurality of nanowires are formed on a substrate, wherein the plurality of nanowires attached to the substrate comprises a nanowire forest. In the presence of a first doping agent and a first volatile precursor, a first doped semiconductor layer is conformally deposited over the nanowire forest. In the presence of a second doping agent and a second volatile precursor, a second doped semiconductor layer is conformally deposited over the first doped layer. The first doping agent comprises one of an n-type doping agent and a p-type doping agent and the second doping agent comprises a different one of the n-type doping agent and the p-type doping agent from the first doping agent. A transparent electrode layer is deposited over the second doped semiconductor layer.
    Type: Grant
    Filed: July 27, 2006
    Date of Patent: August 16, 2011
    Assignee: International Business Machines Corporation
    Inventors: Supratik Guha, Hendrik F. Hamann, Emanuel Tutuc
  • Publication number: 20110193138
    Abstract: Provided is an electronic device that generates an output signal corresponding to an input signal, comprising a signal processing section that receives the input signal and outputs the output signal corresponding to the input signal, and a floating electrode that accumulates a charge by being irradiated by an electron beam. The signal processing section adjusts electric characteristics of the output signal according to a charge amount accumulated in the floating electrode, and includes a transistor formed on the semiconductor substrate between an input terminal that receives the input signal and an output terminal that outputs the output signal.
    Type: Application
    Filed: February 15, 2011
    Publication date: August 11, 2011
    Applicant: ADVANTEST CORPORATION
    Inventors: Daisuke WATANABE, Toshiyuki OKAYASU
  • Publication number: 20110192984
    Abstract: Silicon drift detectors are produced for location and energy measurement as well as spectroscopic applications by depositing a single high quality dielectric film followed by deposition of at least one low quality dielectric film.
    Type: Application
    Filed: February 7, 2011
    Publication date: August 11, 2011
    Applicant: WEINBERG MEDICAL PHYSICS LLC
    Inventors: Mario Urdaneta, Pavel Stepanov, Irving WEINBERG
  • Patent number: 7989250
    Abstract: A method of fabricating a membrane structure for a diffractive phased array assembly is provided. The method includes the steps of providing a wafer having a body and at least a membrane layer and a backside layer disposed on opposite faces of the body, forming a grating pattern on a surface of the membrane layer, and forming a window through the wafer to expose a back surface of the membrane, thereby allowing light to pass through the membrane.
    Type: Grant
    Filed: April 3, 2008
    Date of Patent: August 2, 2011
    Assignee: Rosemount Aerospace Inc.
    Inventor: Michael Paul Nesnidal
  • Publication number: 20110180890
    Abstract: A method of producing a radiographic image detector includes: preparing a thin-film transistor substrate comprising an insulating substrate and a thin-film transistor that is disposed on a surface of the insulating substrate at a first side; attaching, to the thin-film transistor substrate, a protective member comprising a protective member support and an adhesive layer that includes conductive particles and that is disposed on the protective member support, such that the adhesive layer and a surface of the thin-film transistor substrate at the first side contact each other; polishing a surface of the thin-film transistor substrate at a second side opposite to the first side, after the attaching of the protective member; separating and removing the protective member from the thin-film transistor substrate after the polishing; and providing a scintillator layer on a surface of the thin-film transistor substrate at the first side, after the removing of the protective member.
    Type: Application
    Filed: December 14, 2010
    Publication date: July 28, 2011
    Applicant: FUJIFILM CORPORATION
    Inventor: Keiichiro SATO
  • Publication number: 20110169116
    Abstract: The invention discloses a process for manufacturing a radiation detector for detecting e.g. 200 eV electrons. This makes the detector suited for e.g. use in an Scanning Electron Microscope. The detector is a PIN photodiode with a thin layer of pure boron connected to the p+-diffusion layer. The boron layer is connected to an electrode with an aluminium grid to form a path of low electrical resistance between each given point of the boron layer and the electrode. The invention addresses forming the aluminium grid on the boron layer without damaging the boron layer.
    Type: Application
    Filed: January 13, 2011
    Publication date: July 14, 2011
    Applicant: FEI Company
    Inventors: Lis Karen Nanver, Thomas Ludovicus Maria Scholtes, Agata Sakic, Cornelis Sander Kooijman, Gerard Nicolaas Anne van Veen
  • Publication number: 20110163242
    Abstract: Room temperature operating solid state hand held neutron detectors integrate one or more relatively thin layers of a high neutron interaction cross-section element or materials with semiconductor detectors. The high neutron interaction cross-section element (e.g., Gd, B or Li) or materials comprising at least one high neutron interaction cross-section element can be in the form of unstructured layers or micro- or nano-structured arrays. Such architecture provides high efficiency neutron detector devices by capturing substantially more carriers produced from high energy ?-particles or ?-photons generated by neutron interaction.
    Type: Application
    Filed: July 23, 2009
    Publication date: July 7, 2011
    Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
    Inventors: Samuel S. Mao, Dale L. Perry
  • Patent number: 7968959
    Abstract: Gray-tone lithography technology is used in combination with a reactive plasma etching operation in the fabrication method and system of a thick semiconductor drift detector. The thick semiconductor drift detector is based on a trench array, where the trenches in the trench array penetrate the bulk with different depths. These trenches form an electrode. By applying different electric potentials to the trenches in the trench array, the silicon between neighboring trenches fully depletes. Furthermore, the applied potentials cause a drifting field for generated charge carriers, which are directed towards a collecting electrode.
    Type: Grant
    Filed: October 19, 2009
    Date of Patent: June 28, 2011
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventors: Marc Christophersen, Bernard F. Phlips
  • Patent number: 7960646
    Abstract: In order to improve photoelectric conversion properties of a silicon-based thin-film photoelectric converter to which a conductive SiOx layer is inserted to obtain an optical confinement effect, the silicon-based thin-film photoelectric converter according to the present invention includes an i-type photoelectric conversion layer of hydrogenated amorphous silicon or an alloy thereof, an i-type buffer layer made of hydrogenated amorphous silicon, and an n-type Si1-xOx layer (x is 0.25-0.6) stacked successively, wherein the buffer layer has a higher hydrogen concentration at its interface with and as compared with the photoelectric conversion layer and has a thickness of at least 5 nm and at most 50 nm. Accordingly, generation of silicon crystal phase parts and reduction of resistivity are promoted in the n-type Si1-xOx layer, contact resistance at the interface is reduced, and FF of the photoelectric converter is improved, so that the photoelectric converter achieves improved properties.
    Type: Grant
    Filed: July 25, 2006
    Date of Patent: June 14, 2011
    Assignee: Kaneka Corporation
    Inventors: Toshiaki Sasaki, Kenji Yamamoto
  • Publication number: 20110127527
    Abstract: A silicon-on-insulator (SOI) neutron detector comprising a silicon-on-insulator structure, wherein the silicon-on-insulator structure consists of an active semiconductor layer, a buried layer, and a handle substrate, a lateral carrier transport and collection detector structure within the active semiconductor layer of the silicon-on-insulator structure, and a neutron to high energy particle converter layer on the active semiconductor layer.
    Type: Application
    Filed: January 21, 2011
    Publication date: June 2, 2011
    Applicant: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Francis J. Kub, Bernard F. Phlips, Karl D. Hobart, Eric A. Wulf
  • Publication number: 20110121192
    Abstract: A radiation detector is provided with a scintillator 2A containing a plurality of modified regions 21 and a plurality of photodetectors or a position-sensitive photodetector optically coupled to a surface of the scintillator 2A. The plurality of modified regions 21 are formed by irradiating an inside of a crystalline lump which will act as the scintillator 2A with a laser beam and three-dimensionally dotted and have a refractive index different from a refractive index of a surrounding region within the inside of the scintillator 2A.
    Type: Application
    Filed: March 13, 2009
    Publication date: May 26, 2011
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Takahiro Moriya, Takaji Yamashita, Makoto Kakegawa
  • Publication number: 20110095193
    Abstract: A detector (100) for detecting neutrons includes a neutron reactive material (102) adapted to interact with neutrons to be detected and release ionizing radiation reaction products in relation to the interactions with neutrons. The detector also includes a first semiconductor element (101) being coupled with the neutron reactive material (102) and adapted to interact with the ionizing radiation reaction products and provide electrical charges proportional to the energy of the ionizing radiation reaction products. In addition electrodes are arranged in connection with the first semiconductor element (101) for providing charge collecting areas (106) for collecting the electrical charges and to provide electrically readable signal proportional to the collected electrical charges. The thickness of the first semiconductor element (101) is adapted to be electrically and/or physically so thin that it is essentially/practically transparent for incident photons, such as background gamma photons.
    Type: Application
    Filed: March 8, 2010
    Publication date: April 28, 2011
    Applicant: FINPHYS OY
    Inventors: Risto ORAVA, Tom SCHULMAN
  • Publication number: 20110095386
    Abstract: A semiconductor sensor for detecting a radiation including a sensitive layer obtained in an inactive layer adapted to detect a light radiation, a portion thereof having a metal layer attached thereto, while on the remaining portion of the sensitive layer there is an overlapping scintillator. A bonding wire branches from said metal layer. Said sensor is shaped so that, according to a section of the sensor, said metal layer is at a lower height with respect to the scintillator crystal, so that the bonding wire does not interfere therewith. Such a result is obtained by tapering the thickness of said inactive layer and/or interposing a transparent layer between said sensitive layer and said scintillator crystal.
    Type: Application
    Filed: October 26, 2010
    Publication date: April 28, 2011
    Inventor: Claudio Piemonte
  • Publication number: 20110095194
    Abstract: A detector for detecting neutrons includes a neutron reactive material interacting with neutrons to be detected and releasing ionizing radiation reaction products in relation to the interactions. It also includes a first semiconductor element being coupled with the neutron reactive material and adapted to interact with the ionizing radiation reaction products and provide electrical charges proportional to the energy of the ionizing radiation reaction products. In addition electrodes are arranged in connection with the first semiconductor element for providing charge collecting areas for collecting the electrical charges and to provide electrically readable signal proportional to the collected electrical charges.
    Type: Application
    Filed: May 19, 2010
    Publication date: April 28, 2011
    Applicant: FINPHYS OY
    Inventors: Risto ORAVA, Tom SCHULMAN
  • Publication number: 20110086456
    Abstract: This is a novel SiC betavoltaic device (as an example) which comprises one or more “ultra shallow” P+N? SiC junctions and a pillared or planar device surface (as an example). Junctions are deemed “ultra shallow”, since the thin junction layer (which is proximal to the device's radioactive source) is only 300 nm to 5 nm thick (as an example). In one example, tritium is used as a fuel source. In other embodiments, radioisotopes (such as Nickel-63, promethium or phosphorus-33) may be used. Low energy beta sources, such as tritium, emit low energy beta-electrons that penetrate very shallow distances (as shallow as 5 nm) in semiconductors, including SiC, and can result in electron-hole pair creation near the surface of a semiconductor device rather than pair creation in a device's depletion region.
    Type: Application
    Filed: September 23, 2010
    Publication date: April 14, 2011
    Inventors: Michael Spencer, MVS Chandrashekhar