Abstract: An abrasive composite material containing a matrix, abrasive grains, and carbon fiber having a multi-layer structure, each fiber filament of the carbon fiber having an outer diameter of about 2 to about 500 nm and an aspect ratio of about 5 to about 15,000, and including a hollow space extending along its center axis. Preferably, the carbon fiber has a BET specific surface area of about 4 m2/g or more; the carbon fiber has, at a carbon (002) plane, an interlayer distance (d002) of about 0.345 nm or less as measured by means of X-ray diffractometry; and the ratio of the peak height (Id) of the band at 1,341 to 1,349 cm−1 in a Raman scattering spectrum of the carbon fiber to the peak height (Ig) of the band at 1,570 to 1,578 cm−1 in the spectrum; i.e., Id/Ig, is about 1.5 or less. More preferably, the carbon fiber contains branched vapor grown carbon fiber; boron is contained, in an amount of about 0.

Abstract: Agglomerate abrasive grain is disclosed. The agglomerate abrasive grain can be incorporated into abrasive products such as coated abrasives, bonded abrasives, nonwoven abrasives, and abrasive brushes. A method of making agglomerate abrasive grain is also disclosed.

Abstract: A method is provided for fabricating an abrasive article having porosity. The method includes blending a mixture of abrasive grain, bond material, and pore inducer, in which the pore inducer is soluble in a supercritical fluid, and the abrasive grain and bond material are substantially insoluble in the supercritical fluid. The mixture is pressed into an abrasive laden composite and exposed to the supercritical fluid for a period of time suitable to dissolve at least a portion of the pore inducer. The composite is thermally processed.

Abstract: An improved pad and process for polishing metal damascene structures on a semiconductor wafer. The process includes the steps of pressing the wafer against the surface of a polymer sheet in combination with an aqueous-based liquid that optionally contains sub-micron particles and providing a means for relative motion of wafer and polishing pad under pressure so that the moving pressurized contact results in planar removal of the surface of said wafer, wherein the polishing pad has a low elastic recovery when said load is removed, so that the mechanical response of the sheet is largely anelastic. The improved pad is characterized by a high energy dissipation coupled with a high pad stiffness and hydrolytic stability.

Abstract: Nonwoven abrasive articles comprise a porous reinforcing material, a fiber web affixed to the porous reinforcing material, abrasive particles, and a non-elastomeric binder. Methods of making and using nonwoven abrasive articles are also disclosed.

Abstract: A method is provided for fabricating an abrasive article having porosity. The method includes blending a mixture of abrasive grain, bond material, and pore inducer, in which the pore inducer is soluble in a supercritical fluid, and the abrasive grain and bond material are substantially insoluble in the supercritical fluid. The mixture is pressed into an abrasive laden composite and exposed to the supercritical fluid for a period of time suitable to dissolve at least a portion of the pore inducer. The composite is thermally processed.

Abstract: The present invention provides a flexible abrasive article containing minimal releaseable amounts of physical and chemical contaminants that may be used to clean surfaces. The abrasive article is made of a foraminous substrate, at least one binder and abrasive particles. Methods of making such abrasive articles are also provided.

Abstract: An apparatus and method of chemical mechanical polishing (CMP) of a wafer employing a device for determining, in-situ, during the CMP process, an endpoint where the process is to be terminated. This device includes a laser interferometer capable of generating a laser beam directed towards the wafer and detecting light reflected from the wafer, and a window disposed adjacent to a hole formed through a platen. The window provides a pathway for the laser beam during at least part of the time the wafer overlies the window.

Abstract: An abrasive grain according to the present invention consists of porous particle material in which a large number of fine particles for cutting blade form gaps partly among them and bond loosely each other. The particles for cutting blade are produced by growing primary particles in secondary particles, which are formed by condensing a large number of primary particles, with heat treatment at a temperature of forming necks at bonding points among the primary particles. Therefore, it is possible to have stable processing for many hours with maintaining excellent quality very effectively.

Abstract: An abrasive article including from about 40 to about 80 volume percent interconnected porosity, the article being useful as a segment for a segmented grinding wheel, and a method for fabricating the same. The method includes blending a mixture of abrasive grain, bond material and dispersoid particles, the mixture including from about 40 to about 80 volume percent dispersoid particles. In one embodiment the mixture includes from about 50 to about 80 volume percent dispersoid particles. In another embodiment the mixture includes an organic bond material and from about 40 to about 80 volume percent dispersoid particles. The powder mixture is then pressed into an abrasive laden composite and thermally processed. After cooling the composite is immersed into a solvent, which dissolves substantially all of the dispersoid particles, leaving a highly porous, bonded abrasive article.

Abstract: An apparatus and method of chemical mechanical polishing (CMP) of a wafer employing a device for determining, in-situ, during the CMP process, an endpoint where the process is to be terminated. This device includes a laser interferometer capable of generating a laser beam directed towards the wafer and detecting light reflected from the wafer, and a window disposed adjacent to a hole formed through a platen. The window provides a pathway for the laser beam during at least part of the time the wafer overlies the window.

Abstract: Abrasive articles abrasive articles (e.g., abrasive wheels) comprised of abrasive agglomerate particles dispersed within cellular polymeric material, and methods of making and using the abrasive articles.

Abstract: Abrasive articles (e.g., abrasive wheels) comprised of abrasive particles and polymeric material such as a polymeric reaction product of components comprising saturated polyol, saturated polyisocyanate, and a free radical source, and methods of making and using the abrasive articles.

Abstract: An abrasive molding comprising at least 90% by weight, based on the abrasive molding, of an inorganic material having a stock hardness of 50-400 kg/mm2, and said abrasive molding having a relative density of 20-70% and an average particle diameter of 0.001-50 &mgr;m. The abrasive molding preferably has pores having a pore size distribution such that the integrated pore volume of pores having a diameter of 0.01-1 &mgr;m is at least 20% of the integrated total pore volume of the entire pores, and the integrated pore volume of pores having a diameter of 1-360 &mgr;m is in the range of 10% to 70% of the integrated total pore volume of the entire pores. The abrasive molding is suitable for polishing a material having a Vickers hardness not larger than 300 kg/mm2.

Abstract: An elastic foamed grinder material of polyurea series for grinding and/or buffing, which is obtainable by subjecting a composition including a main ingredient component including a polyisocyanate, and a composition comprising an aromatic diamine, a foaming agent, a foam-adjusting agent and a curing catalyst to foaming and curing in the presence of grinder granules, wherein the aromatic diamine is an aromatic diamine oligomer alone or in mixture with an aromatic diamine compound, and a method for producing the grinder material.

Abstract: A method for making high density foam semiconductor polishing pads and belts with controlled, reproducible microcellular structure by mechanical frothing. The method involves agitating a liquid polymer resin at a controlled temperature and pressure in order to produce a stable froth. Next, the resin froth is metered under pressure to a mix head where it is typically combined with a desired amount of curative before being injected or poured into a mold.

Abstract: A vitreous bonded abrasive article, more particularly a grinding wheel, having improved grinding performance is provided wherein the open pores of the abrasive article contain an impregnant which comprises at least one water insoluble, sulfur bearing organic substance having at least one carbon to sulfur bond, at least about 5% by weight sulfur and a melting point of at least about 30° C. said melting point being at least 10° C. below the decomposition temperature of the substance and selected from the group consisting of substituted and unsubstituted aliphatic, aromatic, cycloaliphatic, alkenyl, alkynyl, alkylaryl, arylalkyl and substituted heterocyclic sulfur bearing organic substances or a mixture of said substances grinding aid. The impregnant is free of a medium, other than the water insoluble, sulfur bearing substance, in which the substance or a mixture of such substances is dissolved or dispersed.

Abstract: A multi-layer combination sponge includes a scrubbing layer and a cleaning layer that are each laminated to an intermediate layer. The intermediate layer is more compressible than the cleaning layer and the scrubbing layer, and a groove is formed around a perimeter of the sponge between the cleaning layer and the scrubbing layer. The layers are preferably coextensive, forming a nose portion at the front of the combination sponge and having rounded comers at the rear of the combination sponge. The cleaning and intermediate layers each have an approximately equal thickness, and the scrubbing layer has a thickness less than one-half as thick as either the cleaning layer or the intermediate layer.

Abstract: An abrasive-particle grinder and a method of manufacturing the grinder, in which the bonding force between super-abrasive particles and a binder is enhanced, attrition of the binder during a grinding process is increased, and physical properties of the grinder are improved. The grinder comprises super-abrasive particles as grinding particles and metal powder as a binder. The binder is formed into a porous body and then at least the surface thereof is denatured to ceramic. Protrusion of the abrasive particles is first controlled and then grip of the abrasive particles is controlled.

Abstract: A polishing pad is described as comprising, (a) particulate polymer selected from particulate thermoplastic polymer (e.g., particulate thermoplastic polyurethane), particulate crosslinked polymer (e.g., particulate crosslinked polyurethane and/or particulate crosslinked polyepoxide) and mixtures thereof; and (b) crosslinked organic polymer binder (e.g., crosslinked polyurethane binder and/or crosslinked polyepoxide binder), which binds the particulate polymer together. The particulate polymer and crosslinked organic polymer binder are distributed substantially uniformly throughout the polishing pad, and the pad has a percent pore volume of from 2 percent by volume to 50 percent by volume, based on the total volume of said polishing pad. Polishing pad assemblies are also described.

Abstract: A vitrified grindstone having a vitrified abrasive structure which has pores and which includes abrasive grains and an inorganic bonding agent that holds the abrasive grains together, wherein 10-95% of a total volume of the pores is filled with a cured resin. The vitrified abrasive structure may further include an aggregate such that the abrasive grains and the aggregate are held together by the inorganic bonding agent.

Abstract: A resinoid grinding wheel of the present invention has low grinding resistance and is capable of providing a ground workpiece excellent in ground surface quality without burn mark while maintaining essential properties of the resinoid grinding wheel such as low elastic modulus and strong force for holding abrasive grains. A typical resinoid grinding wheel of the present invention includes 25 parts by volume of Al2O3 abrasive grains with grain size of #150, 20 parts by volume of organic hollow material with average particle diameter of 80 &mgr;m, and 10 parts by volume of pores having 1 mm in size. They are all dispersed in 40 parts by weight of a bond made of cured epoxy resin.

Abstract: An abrasive vitreous bonded solid mass having a vitrified abrasive structure comprising abrasive grains which are held together by an inorganic bonding agent, the abrasive structure is impregnated with a composition which comprises a resin and a solid lubricant agent. The abrasive solid mass is manufactured by preparing the composition comprising the resin and the solid lubricant agent, impregnating the vitrified abrasive structure with the composition, and curing the composition.

Abstract: Manufacture of a polishing pad for polishing a semiconductor substrate, involves, transporting a backing layer to successive manufacturing stations, supplying a fluid phase polymer composition onto the transported backing layer, shaping the fluid phase polymer composition into a surface layer having a measured thickness, and curing the polymer composition on the transported backing layer in a curing oven to convert the liquid phase polymer composition to a solid phase polishing layer attached to the transported backing layer.

Abstract: A rotary foam buffing pad is provided with a concave working face which allows the operator to provide true graduated surface contact in applying polish, buffing or glazing compounds, while containing the polishing compound against centrifugal force which would otherwise result in splattering of the compound. The manner in which the concave working face is formed and in which the edge face is formed and dressed results in dynamic balancing of the pad and reducing vibration and operator fatigue. The working surface forming and pad finishing operations further provide a velvetized texture to the pad working surfaces which further enhances the polishing or finishing process.

Abstract: The present invention provides a flexible abrasive product comprised of an open cell foam backing, a foraminous barrier coating and a shaped foraminous abrasive coating.

Abstract: A resilient abrasive article includes a resilient elongatable substrate, abrasive particles adhesively bonded to the substrate with a flexible make coat, and a hard size coat applied over the abrasive particles and flexible make coat. The size coat provides an anti-loading layer which is applied thinly enough to prevent the size coat from cracking and tearing the substrate during use.

Abstract: Alpha alumina abrasive grits which are particularly well-suited to medium to low pressure grinding applications wherein the grits comprise uniformly dispersed microvoids.

Abstract: The abrasive particle layer of resin bonded abrasive tool is constructed by resin binder phase consisting of heat hardening resin, for example, phenol resin etc. and super abrasive particle of diamond (or CBN etc.) distributed in this resin binder phase. The wear resistant filler consisting of SiC, for example, as hard filler and hollow glass and metal coated amorphous carbon is distributed in resin binder phase. The amorphous carbon is made to spherical shape and metal coating layer consisting of Cu, for example, as the metal having high thermal conductivity, is set on a surface of this amorphous carbon.

Abstract: A microabrasive tool is formed from a slurry including liquid, abrasive grains, a bonding material, and a polymer—for example, gellan gum. The slurry is cast in a mold, and the polymer is ionically cross-linked. Cross-linking the polymer fixes the structure of the bonding material and the abrasive grains, wherein the abrasive grains are dispersed substantially uniformly within the bonding material. The ionically cross-linked structure of bonding material and abrasive grains can then be fired to form a microabrasive tool.

Abstract: A resinoid grinding wheel of the present invention has low grinding resistance and is capable of providing a ground workpiece excellent in ground surface quality without burn mark while maintaining essential properties of the resinoid grinding wheel such as low elastic modulus and strong force for holding abrasive grains. A typical resinoid grinding wheel of the present invention includes 25 parts by volume of Al2O3 abrasive grains with grain size of #150, 20 parts by volume of organic hollow material with average particle diameter of 80 &mgr;m, and 10 parts by volume of pores having 1 mm in size. They are all dispersed in 40 parts by weight of a bond made of cured epoxy resin.

Abstract: The present invention provides a composite bond wheel that has both excellent wear resistance and self-edging properties. The composite bond wheel of the invention includes: a grain layer including abrasive grains and a bonding phase; wherein the bonding phase includes a metal bonding phase and a resin bonding phase, wherein said metal bonding phase includes a metal having the abrasive grains and outside-opening pores dispersed therein, and wherein at least a portion of the outside-opening pores are filled with a resin of the resin bonding phase.

Abstract: A resilient abrasive article includes a resilient elongatable substrate, abrasive particles adhesively bonded to the substrate with a flexible make coat, and a hard size coat applied over the abrasive particles and flexible make coat. The size coat provides an anti-loading layer which is applied thinly enough to prevent the size coat from cracking and tearing the substrate during use.

Abstract: Disclosed is a polishing method including the step of: polishing a surface of a member to be polished by rotating and sliding an abrasive wheel holding fixed abrasive grains on the surface of the wheel while supplying free abrasive grains to the surface of the member to be polished; wherein the abrasive wheel is formed by binding the fixed abrasive grains with a soft binder and a pore forming agent. This polishing method is effective to obtain a high flatness of a polished surface and improve surface characteristics of the polished surface, and also to obtain a high continuous-workability by stably keeping a polishing ability for a long period of time.

Abstract: A method for manufacturing a foraminous abrasive article whereby abrasive particles are concentrated in an external surface region of a foraminous substrate. The method includes the steps of: providing a foamable, hardenable, liquid resin composition and a foraminous substrate having an external surface; foaming the resin composition effective to disperse a plurality of gas bubbles throughout the resin composition; applying the foamed resin composition to the external surface of the substrate to form a foam coating layer having an upper surface; applying a plurality of abrasive particles to the upper surface of the foam coating layer; heating the foamed coating layer effective to eliminate the gas bubbles from the foamed coating layer; and hardening the resin composition to attach the abrasive particles to the substrate. The invention also concerns the foraminous abrasive article products of this method.

Abstract: A foamed glass article for preparing surfaces, the use therefor, and a method of making same are provided. The foamed glass article is in the form of a block, disk or similar product, and is used for preparing surfaces such as by sanding, rubbing and scraping the same to clean, abrade, polish, smooth, or the like such a surface. The foamed glass article is formed from a starting mixture that comprised glass, 0.10-20% by weight of at least one non-carbon/sulfate based foaming agent, and optionally an additional abrasive material. A mixture of powdered glass and non-carbon/sulfate based foaming agent can be placed in a mold and heated so that the mixture sinters and subsequently foams. Thereafter, the foamed mixture is annealed.

Abstract: A neutral pH foamed glass article is produced from a mixture of pulverized glass particles, foaming agent, binder, and water, wherein the glass article is heated to remove excess moisture and organic materals, then further heated to cause the foaming agent to emit a foaming gas, thereby causing foaming of the glass article. The foamed glass article is annealed in a controlled cooling fashion to avoid thermal stress, cracking and devitrification. The foamed glass articles may be used as artificial pumice stones in the stone-washed garment industry. Preferably, the mixture contains an amount of lignosulfonate to produce foamed glass having substantially neutral pH values in a range of from about 7.0 to 8.4.

Abstract: The instant invention relates generally to abrasive stones for use in processing workpiece surfaces. The abrasive stones generally are produced by combining an epoxy novalac resin mixture with microballoons and a catalyst. The mixture is put into a mold, cold pressed, and then cured, creating abrasive stones having a uniform surface and bulk structure with a uniform hardness, suitable for workpiece processing.

Abstract: Abrasive foam articles and a method of manufacture of such articles are described. The articles of the invention comprise a flexible and resilient foam substrate having first and second major substrate surfaces, at least one of the surfaces having a plurality of open cells substantially across the substrate surface, the open cells having coatable surfaces defined by interconnected voids; and a plurality of abrasive particles adhered to said coatable surfaces of said open cells in a substantially uniform manner.

Abstract: A foamed glass article for preparing surfaces, the use therefor, and a method of making same are provided. The foamed glass article is in the form of a block, disk or similar product, and is used for preparing surfaces such as by sanding, rubbing and scraping the same to clean, abrade, polish, smooth, or the like such a surface. The foamed glass article is formed from a starting mixture that comprised waste glass, 0.10-20% by weight of a non-sulfur based foaming agent, and optionally an additional abrasive material. A mixture of powdered waste glass and non-sulfur based foaming agent can be placed in a mold and heated so that the mixture sinters and subsequently foams. Thereafter, the foamed mixture is annealed.

Abstract: An abrasive article having certain minimum levels of permeability to fluids comprises about 40 to 80%, by volume interconnected porosity and effective amounts of abrasive grain and bond to carry out soft grinding and deep cut grinding operations. The high permeability to the passage of fluids and interconnected porosity provides an open structure of channels to permit the passage of fluid through the abrasive article and the removal of swarf from the workpiece during grinding operations.

Abstract: An efficient method for manufacturing bonded abrasive articles comprises the use of elongated abrasive grain having a length to cross-sectional width aspect ratio of at least 5:1 to yield abrasive articles which are highly permeable to the passage of fluids. A method for measuring permeability is provided. The abrasive articles are used to carry out soft grinding and deep cut grinding operations. The permeable abrasive articles provide an open structure of pores and channels permitting the passage of fluid through the abrasive article and the removal of swarf from the workpiece during grinding operations.

Abstract: The present invention relates generally to abrasive stone pads for use in processing workpiece surfaces. The abrasive stones generally are produced by combining a phenolic resin mixture with a diluent and then injecting microballoon structures into the resin/diluent mixture to create a porous solution. The diluent is initially ball milled with an abrasive in a tumbler to eliminate the agglomerates and is then added to a resin monomer. A suitable catalyst is added to the mixture to create a chemical reaction, further increasing the porocity of the substance. The mixture is poured into molds and with through a filter or frit plate to remove excess resin and diluent. Finally, the mixture is cured, creating abrasive stones having a uniform surface and bulk structure with a uniform hardness, suitable for workpiece grinding.

Abstract: A vitreous bonded abrasive grinding wheel comprises silicon carbide abrasive grain, hollow ceramic spheres and a low temperature, high strength bond. The wheel has improved corner or profile holding characteristics and improved mechanical properties and is suitable for grinding non-ferrous materials.

Abstract: A nonwoven abrasive or scouring article having at least one major surface and an interior region comprises an open, lofty web of first and second crimped, staple organic thermoplastic fibers, wherein the first organic thermoplastic fiber comprises materials selected from the group consisting of polyamides, pololefins, and polyesters, and wherein said second organic thermoplastic fiber comprises at least two materials of different heat stability. The first and second organic crimped, staple thermoplastic fibers are melt-bonded together at least at a portion of points where they contact. At least a portion of the first and second fibers of one major surface of the nonwoven article have an abrasive coating bonded thereto, and at least a portion of the first and second fibers of the interior region have no abrasive coating bonded thereto, a structure which minimizes the amount of binder which must be used.

Abstract: A flexible abrasive member comprising a first porous layer of mesh, non-woven or perforated sheet, conductive or non-conductive material to which on one side deposits are deposited by way of any metal plating technique of either the electrolytic, electroless or vacuum deposition type, or any galvanic process, abrasive particles being embedded in the metal deposits, a layer of filling material, such as a resin, being present between the deposits which filling material is bonded to said first porous layer and/or the deposits, and at least a second porous layer of mesh, non-woven or perforated sheet, conductive or non-conductive material being present and being laid substantially along one side of the first porous layer. The side edge of the deposit has at least one annular groove along at least part of the circumference of the deposit.

Abstract: A new grinding medium consisting essentially of a synthetic resin matrix in which small-sized foam, coarse powdery abrasives and fine powdery abrasives are dispersed is provided. A powder having a low electric resistance is added to the medium to form relatively large-sized foam around the powder. The medium is preferably produced by softening and blocking a synthetic resin powder by high-frequency dielectric heating to form a matrix of the synthetic resin and dispersing small-sized foam, coarse powdery abrasives, fine powdery abrasives and powder having a low electic resistance in the synthetic resin matrix wherein relatively large-sized foam is formed around the powder. The medium has a high ability of abrasion and the surface of the medium is smoothly renewed during the grinding process so that the medium has an excellent grinding effectiveness.

Abstract: A porous iron system metal bond diamond grinder using diamond as grinding particles and iron system metal powder as binder so as to have a large number of pores in the binder. The grinding particles are chemically and physically combined with the iron system metal to be held. The occupancy rate of pores in the whole grinder is 5 to 60%. The iron system metal is selected from a group composed of mixtures of iron powder, carbon-coated iron powder, iron nitride powder, carbon and iron. Carbon of diamond constituting the grinding particles is reacted to the iron system metal in the surface. In the manufacturing method, grinding particles and binder are mixed and molded into a predetermined shape and the molded product is then heated and sintered at 900.degree. to 1150.degree. C. The occupancy rate of pores and/or the concentration gradient of diamond are adjusted. The porous iron system metal bond diamond grinder capable of performing grinding continuously for a long time without loading can be provided.

Abstract: A liquid soap absorbent, liquid soap dispensing synthetic ceramic stone of specified porosity with interconnecting voids throughout the body of the stone. The surface of the stone is mildly abrasive in a soap and water milieu. The interconnecting voids are substantially uniform enabling a liquid soap to thoroughly penetrate the stone by capillary action. In use, the liquid soap is continuously dispensed by dissolution in water and the aspirating action caused by a concave bottom surface of the stone and the seal provided by soap, water and skin at the point of use. As the liquid soap is drawn from the stone the interconnecting voids are cleared of the soap. With the depletion of the liquid soap from the stone a fresh charge of liquid soap is accomplished by merely placing the depleted stone in a shallow receptacle filled with liquid soap.

Abstract: The present invention relates to an article of manufacture or polishing pad for altering a surface of a workpiece, such as polishing or planarizing a semiconductor device. The article includes a polymeric matrix impregnated with a plurality of polymeric microelements, each polymeric microelement having a void space therein. The article has a work surface and a subsurface proximate to the work surface. When the article is in contact with a working environment, polymeric microelements at the work surface of the article are less rigid than polymeric elements embedded in the subsurface. As the work surface of the article is abraded during use, the work surface of the pad may be continuously regenerated. In alternative preferred embodiments, the work surface may further include a minitexture and/or a macrotexture. Preferably, the minitexture is formed by fractal patterning at least a portion of the work surface.