Abstract: Embodiments of the invention are directed toward a novel pressurized vapor cycle for distilling liquids. In some embodiments of the invention, a liquid purification system is revealed, including the elements of an input for receiving untreated liquid, a vaporizer coupled to the input for transforming the liquid to vapor, a head chamber for collecting the vapor, a vapor pump with an internal drive shaft and an eccentric rotor with a rotatable housing for compressing vapor, and a condenser in communication with the vapor pump for transforming the compressed vapor into a distilled product. Other embodiments of the invention are directed toward heat management, and other process enhancements for making the system especially efficient.

Abstract: An environmental control system (ECS) for an aircraft may be employed to regulate temperature of air entering a cabin of the aircraft. During conditioning of the air, condensate may form in the air. A multiple-stage condensate extraction unit may be incorporated into the ECS to remove the condensate. The extraction unit may be provided with two fluid collection stages built into a cylindrical duct. The duct may have a bend therein. One of the collection stages may be positioned on an upstream side of the bend while the second one of the stages may be positioned on a downstream side thereof. The combination of the two stages and their positioning on either side of the bend may provide a particularly compact and efficient condensate extraction unit.

Abstract: An apparatus for trapping residual product of semiconductor manufacturing processes increases trapping effect and trapping capacity of residual product of reaction by maximizing an effective area for the residual product of reaction to be trapped while actively preventing the residual product of reaction generated in a process chamber during a thin film deposition and etching process from sucking into a vacuum pump, thereby easily removing the trapped residual product of reaction, including hollow housing having an inner containing space, first connection pipe connecting process chamber and housing, second connection pipe connecting vacuum pump and housing, and a protrusion extending inwardly and protruding from a housing base, cooling element disposed inside the housing for cooling the residual product of reaction flowing into the housing through the first connection pipe, and trap plates disposed inside the housing as multiple layers on which the residual product of reaction is laminated.

Abstract: Three exhaust trap units are arranged in series in an exhaust trap device for trapping substances solidified from exhaust gas and exhaust gas paths are formed inside the exhaust trap units. One or more collision plates are placed in each trap unit. The collision plates in each of the two upstream side exhaust trap units are arranged such that a space extending in the axial direction of the exhaust path is present therein without being blocked by any of the collision plates. The collision plates in the downstream side exhaust trap unit are arranged such that such a space is not present. Uneven distribution of the amount of accumulation of solidified substances is suppressed without performing complex control, and outflow of the solidified components to the downstream side of the exhaust trap device can be reliably reduced.

Abstract: Provided is a byproduct collecting apparatus for efficiently collecting reaction-byproducts contained in an exhaust gas exhausted from a process chamber during a semiconductor manufacturing process. The apparatus includes a housing and a trap module. The housing has a gas inlet port and a gas outlet port. The trap module is installed inside the housing and has first plates curved or inclined to guide an exhaust gas flow in a curved fashion.

Abstract: Improved apparatus for collecting particles from air comprises a cyclone having air inlet and outlet means, means maintaining an airflow there through and means delivering a collecting fluid from a reservoir to particles separated from the air flow in the cyclone, in which the air inlet means is associated with means for heating the incoming air. The apparatus, which is optionally provided with enclosure means for trapping heat, prevents freezing of the collecting fluid at temperatures near to and even below 0° C.

Abstract: A liquid separator configured to separate liquid from a fluid stream. The separator includes a housing, a separation chamber disposed within the housing, a drain having a drain passageway for draining liquid from the separation chamber, an inlet chamber configured to receive the fluid stream, an inlet channel configured to communicate the fluid stream from the inlet chamber to the separation chamber, a swirler disposed within the inlet channel, and an outlet channel configured to communicate the fluid stream from a first outlet end positioned proximate the second inlet end, to a second outlet end remote from the separation chamber. Preferably, the separator also includes a separator mounting face proximate the inlet chamber, the mounting face configured for mounting the separator to a humidifier. The housing preferably includes a base and a cap which is removably mountable to the base.

Abstract: A continuous processing trap apparatus is capable of increasing the trapping efficiency while maintaining conductance required by a vacuum chamber. The trap apparatus includes an exhaust passage for evacuating a hermetically sealed chamber by a vacuum pump, a hermetically sealed trapping and regenerating casing extending across the exhaust passage and a regenerating passage adjacent to the exhaust passage, and a trap unit movably housed in the trapping and regenerating casing for selective movement between a trapping position connected to the exhaust passage and a regenerating position connected to the regenerating passage. The trap apparatus further includes valve bodies disposed one on each side of the trap unit and supporting seals on outer circumferential surfaces thereof for sealing the exhaust passage and the regenerating passage from each other, and a monitoring mechanism for monitoring whether the seals are functioning normally.

Abstract: A trap device including at least one substance delivery element for introducing a substance therein is disclosed. The delivered substance may influence the nature of deposits that have formed within the trap device, may influence the formation of deposits within the trap device, or may cause a precipitate to form. Deposit interaction elements may be employed to influence the distribution or redistribution of deposits within the trap device. Deposit interaction elements may effect thermal conditions, introduce substances, or physically interact with deposits within the trap device. Further, a storage region within the trap device may be used to accumulate deposits. In one embodiment, a substantially continuous path through the trap device may be maintained or preserved so that deposits form within the trap device except substantially along the path. The present invention also encompasses a method of operation of a trap device as well as a system incorporating same.

Abstract: An object of the present invention is to ensure the stable operation of a vacuum pump for discharging an unused source gas and reaction byproduct gases from a low-pressure processing chamber, to recover the reaction byproducts efficiently for the effective utilization of resources and reduction of running costs. A low-pressure CVD system has a processing vessel (10) for carrying out a low-pressure CVD process for forming a copper film, a source gas supply unit (12) for supplying an organic copper compound as a source gas, such as Cu(I)hfacTMVS, into the processing vessel (10), and an evacuating system (14) for evacuating the processing vessel (10). The evacuating system (14) includes a vacuum pump (26), a high-temperature trapping device (28) disposed above the vacuum pump (26) with respect to the flowing direction of a gas, and a low-temperature trapping device (30) disposed below the vacuum pump with respect to the flowing direction of a gas.

Abstract: A cold trap having improved trapping efficiency for particles, particularly ammonium chloride fine powder particles. The cold trap has a dual-stage design, including an upstream stage fitted with at least one trap plate and a downstream stage fitted with a typically cup- or cone-shaped trap core in which is provided a conically-spiraled water cooling coil. A decreasing temperature gradient is provided along the length of the cold trap, such that exhaust gases flowing through the cold trap are gradually cooled and ammonium chloride or other particles which form from the gas are trapped by the trap plate or plates and collect in the trap core. The exhaust gases exiting the downstream end of the trap core are substantially or completely devoid of particles.

Abstract: A circulating fluidized bed (CFB) unit utilizing a mechanical dust collector located in a vertical flue above at least one heat exchange surface, and at least partially underneath the floor of a non-vertical flue, includes a plurality of individual collection elements each having a downward bottom outlet for a flow of cleaned gas conveyed through the collection elements.

Abstract: The present invention discloses an impactor with a cooled impaction plate capable of efficiently separating aerosols by cooling the impaction plate below a temperature of fluid inflowing into the impactor and a method for classifying and collecting the aerosols using the same. The impactor with a cooled impaction plate according to the present invention comprises: an accelerating nozzle for accelerating movement of the aerosols; an impaction plate for changing the flowing direction of the aerosols by means of impacting the aerosols exhausted from the accelerating nozzle, and for collecting the aerosols which are out of the flowing path of the aerosols and have larger inertia than critical value, wherein the impaction plate is installed apart from an outlet of the accelerating nozzle; and cooling means for cooling the impaction plate below a temperature of fluid inflowing into the impactor, wherein the cooling means is fixedly installed at the impaction plate.

Abstract: An air/oil separation tank for installation in a circuit for the production of compressed air, the circuit including an intake regulator (1) which intercepts external air and sends the air to an oil bath spin compressor (2) which is activated by an electric motor (3). The pressurized air/oil mixture produced by the compressor, passes through conduit (4) to enter separation tank (5) in which the separation of the oil from the air occurs. The air under pressure passes through radiator (6) and fills accumulation tank (7) waiting to be used, while the oil (8) deposited at the bottom of the separator, is picked up by conduit (9) and passes through radiator (10) to be brought again to compressor (2). This separation tank is characterized by the fact that the entry port of the air/oil mixture is placed on the upper wall or cover of the vessel.

Abstract: An apparatus for decreasing water vapor in a compressed gas, such as compressed air, using cooling. A pipe, tapered or not, is attached to the air inlet port of the main gas compressor tank, or in a secondary tank or other downstream device, such that the compressed gas is forced through the pipe and onto a heat conductive plate, where water vapor condenses and is drained away.

Abstract: An air-liquid separating apparatus for compressed air includes a cooling device adapted to be connected to an air source via a first transfer tube. The cooling device includes a liquid cooling tank filled with cooling agent and a cooling tube spiraled in the liquid cooling tank for condensing and separating the mist in the compressed air. An air-liquid separating tank is connected to the liquid cooling tank, wherein the compressed air is cooled and released again in the air-liquid separating tank. The air-liquid separating tank includes a backflow tube connected to the air-liquid separating tank for outputting the compressed air. The backflow tube is provided to carry the heat from the cooling device.

Abstract: An air treatment system comprising an exhaust including an exhaust annulus defined by an inner exhaust wall, an outer exhaust wall circumscribing the inner wall, and a pressurized annulus between the inner and outer walls, and at least one condenser suspended within the exhaust annulus, where the at least one condenser includes a cooling fluid therein.

Abstract: A circulating fluidized bed (CFB) unit utilizing a mechanical dust collector located in a vertical flue above at least one heat exchange surface, and at least partially underneath the floor of a non-vertical flue, includes a plurality of individual collection elements each having a downward bottom outlet for a flow of cleaned gas conveyed through the collection elements.

Abstract: The present invention has an object to improve the efficiency of collection of solidification constituents and solids in exhaust gas and to prevent early blockage of the filter without damaging the vacuum pump. In an exhaust path 48a, a vacuum pump and exhaust gas filtration device are provided. This exhaust gas filtration device is constituted by a trap device, pre-filter and filter. The pre-filter reduces the exhaust gas flow rate flowing through the interior of the exhaust path by controlling the exhaust gas flow path in the vessel. The aforesaid exhaust path is constituted by connecting this vacuum pump, trap device, pre-filter and filter which are arranged in this order from the side of airtight vessel and connected through piping if required.

Abstract: A temperature-controlled exhaust assembly with cold trap capability. One embodiment of the exhaust assembly comprises a multi-heater design which allows for independent multi-zone closed-loop temperature control. Another embodiment comprises a compact multi-valve uni-body design incorporating a single heater for simplified closed-loop temperature control. The cold trap incorporates a heater for temperature control at the inlet of the trap to minimize undesirable deposits. One embodiment also comprises a multi-stage cold trap and a particle trap. As a removable unit, this cold trap provides additional safety in the handling and disposal of the adsorbed condensables.

Abstract: A new three-stage cold trap configuration is provided that allows for significantly improved cold trap efficiency and reduced Preventive Maintenance of the cold trap. The cold trap of the invention is provided with three stages that are used for the removal of impurities from processing gasses after they have been released from a processing chamber. The spaces between the three plates of the cold trap are not the same while the angle under which the gas impacts the plates differs from conventional cold trap designs. The three plates of the cold trap are furthermore adjustable, making the design of the cold trap of the invention flexible and readily applicable to a range of cold trap requirements.

Abstract: In a gas recovery system, before gases including PFC are diluted with nitrogen gas, a cooling mechanism trap separates the gases into PFC and the other gases, and the separated PFC is stored temporarily in a temporary storage mechanism until it reaches a concentration at which an efficient recovery of PFC is possible, and thereafter, the temporarily stored PFC is packed in a cylinder.

Abstract: Apparatus for separating fluids and/or solid matter or gases having different specific weight from a gas flow. The apparatus includes a gas inlet connector and a gas outlet connector. The apparatus contains a tube like cavity which conically is enlarged from the gas inlet connector to the gas outlet connector. Also included is an auxiliary gas inlet passage that opens to the cavity in proximity to the gas inlet connector tangentially to the lateral area of the cavity.

Abstract: The device enables the deposition of substances from a gas phase. The device has a deposition chamber with at least one inner wall that is maintained at a deposition temperature for the deposition of the substances. A delivery end of a feed line extends to or into the deposition chamber. The substances to be deposited in the deposition chamber are delivered in gas form via the feed line. The feed has a transport temperature above the deposition temperature. This transport temperature is selected such that premature deposition of the substances inside the feed is prevented. A thermal insulation is formed between the feed and the inner wall of the deposition chamber. Any cooling of the feed toward its delivery end down to the deposition temperature is thereby prevented.

Abstract: A gas condensing and cooling system for cooling hot vaporous emissions from a hot vaporous emissions source to a level below prescribed regulatory limits that includes a cooling unit that operates using a readily available pressurized natural gas as the refrigerant element within the cooling unit and includes a multi-chamber condenser unit having a number of chambers each containing a volume of porous rock suspended above a liquid barrier.

Abstract: A cold trap that is equipped with a curvilinear housing and a curvilinear cooling plate contained therein for collecting unwanted reactant gases and reaction byproducts in an exhaust gas is disclosed. In the curvilinear housing of the cold trap, a curvilinear cooling plate, i.e., in a convex shape is provided which has a plurality of cooling fins mounted on a convex surface facing an incoming flow of exhaust gas such that contaminating powder in the exhaust gas is collected by the cooling fins. The present invention novel curvilinear cooling plate functions at twice the efficiency of a conventional flat cooling plate such that the frequency for cleaning required for the present invention novel cold trap is reduced.

Abstract: In order to create a cyclone separator with segmented immersion pipe for cement clinker manufacturing system with cyclone suspension type heat exchanger system, whereby the releasable immersion pipe segment fastening is dependable and is distinguished by a long service life, it is inventively proposed to secure the immersion pipe segments at their upper end with releasable screw bolts, whereby the screw bolts are arranged in spacer sleeves distributed around the immersion pipe circumference that respectively comprise at least one window-like opening at the outside for the access of ambient air as coolant for the immersion pipe segment fastening.

Abstract: The separator is of a type comprising at least one inclined deflecting surface mounted within a fluid flowing path so that water droplets contained in the flow of fluid are separated from the fluid when the fluid is deflected by the deflecting surface. The deflecting surfaces comprise collecting recesses for water that has been separated, which recesses are connected to an under-pressure space in which is maintained an under-pressure with respect to the pressure prevailing in the fluid flowing path.