Disparate Apparatus Utilized As Heat Source Or Absorber Patents (Class 62/238.1)
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Patent number: 7735333Abstract: An air conditioning and refrigeration system includes a compressor, a four-way valve, two delivering guide pipes joined to two lateral sides of the four-way valve, two thermal compensation devices and two heat exchangers. Even if the air conditioner is a window type in association with a rotary compressor, the purpose of slow running with fast temperature reduction can be reached by means of doubling refrigerant filling and flow process regulation. Meanwhile, hi/lo pressure ratio 4:1 (cool room) or 8:1 even higher (warm room) is the most novel design of the air conditioner and it is capable of secure the indoor comfort. Besides, in case of the present invention being applied to the refrigeration system, the four-way valve inverse direction of the refrigerant being changed to enhance the efficiency thereof without using tungsten filament for defrosting.Type: GrantFiled: July 1, 2005Date of Patent: June 15, 2010Inventor: Ming-Li Tso
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Publication number: 20100115977Abstract: A thermodynamic energy conversion device (14) based on the effect of differential evaporation generated by a convex liquid surface and by a temperature gradient is constructed for the use either as a heat or hydraulic pump. In one arrangement the device (14) comprises two heat conductive containers (1) and (2); a working liquid (5) disposed in said containers with open surfaces (6) and (6?); a vapour (7) of the working liquid; a porous device (8) for creating at least one convex meniscus (9) on the open surface (6), of the working liquid (5) in one of the containers said convex meniscus having higher mean curvature than that of the open surface (6?); means (10) for connecting containers (1) and (2) to an external hydraulic circuit (11). An efficient external combustion engine using such a device (14) is disclosed.Type: ApplicationFiled: August 23, 2007Publication date: May 13, 2010Applicant: Thermodynamic Nanotechnologies LimitedInventor: Aliaksandr Saroka
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Publication number: 20100000707Abstract: A thermal storage device having a plurality of tube-like first thermal medium branch pipes (5) into which a first thermal medium (3) flows and a thermal storage material (1) provided on the outer peripheries of the first thermal medium branch pipes (5) is characterized by including a first header (6) that communicates with the upper portions of the first thermal medium branch pipes (5) and allows the first thermal medium (3) to flow therethrough, a first upper reservoir (7) that communicates with the first header (6) and stores the first thermal medium (3), and a first inlet (8) that communicates with the first upper reservoir (7) and allows the first thermal medium (3) to flow therethrough. The first upper reservoir (7) is formed in a direction intersecting with the direction of streamline of the first inlet (8).Type: ApplicationFiled: October 24, 2007Publication date: January 7, 2010Inventors: Kenji Tsubone, Seiichi Hashi, Masahito Tsukahara, Masataka Fukuzawa, Kouji Narita
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Publication number: 20090320499Abstract: The present invention concerns a compact, multi-purpose magneto-calorific thermal generator of high thermal efficiency, having a maximal heat exchange coefficient, while being simple to industrialise in order to respond to a wide range of both industrial and domestic applications.Type: ApplicationFiled: July 9, 2007Publication date: December 31, 2009Applicant: COOLTECH APPLICATIONS S.A.S.Inventors: Christian Muller, Jean-Louis Dupin, Jean-Claude Heitzler, Georges Nikly
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Publication number: 20090320502Abstract: A method of cleaning an air conditioner utilizing carbon dioxide as a working refrigerant includes three steps. In a charging step, a refrigeration cycle is charged with carbon dioxide. In a venting step, a charging target with which the refrigeration cycle is charged is vented after the charging step. In a repeating step a unit operation is performed at least one time or more. The unit operation includes the charging step and the venting step. An air conditioner includes a refrigeration cycle configured to perform the unit operation at least one time, and a counter configured to count and output the number of times that the unit operation has been performed.Type: ApplicationFiled: August 3, 2007Publication date: December 31, 2009Applicant: DAIKIN INDUSTRIES, LTD.Inventors: Toshiyuki Kurihara, Hiromune Matsuoka
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Publication number: 20090320503Abstract: A cogeneration system includes a coolant circuit through which a coolant is circulated for conducting a heat exchange with an exhaust heat generated by a power generation unit, a buffer tank provided at the coolant circuit and storing the coolant, a heating circuit including a heating power source and a heating terminal, the heating power source generating a heating water that is circulated to be supplied to the heating terminal, a heating water bypass circuit bypassing a flow passage of the heating circuit at a portion between an exit of the heating terminal and the heating power source, and a heat exchanging device performing a heat exchange between the heating water flowing through the heating water bypass circuit and the coolant.Type: ApplicationFiled: June 23, 2009Publication date: December 31, 2009Applicant: AISIN SEIKI KABUSHIKI KAISHAInventor: Hiroshi KAMIYA
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Publication number: 20090301123Abstract: A shipping container having an interior and a plurality of electronic equipment modules disposed within the interior of the container is cooled by an air conditioning unit adapted to be disposed within the interior of the container. The cooling can be assisted or assumed by use of an air side economizer cycle, or by use of a water side economizer cycle. The electronic equipment may include computing equipment and electronic data storage equipment.Type: ApplicationFiled: June 15, 2009Publication date: December 10, 2009Inventors: Brian Monk, IIye Meldrum
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Publication number: 20090272135Abstract: An air conditioner refrigerant circuit performs a cooling operation in which an outdoor heat exchanger functions as a condenser of the refrigerant compressed in a compressor and an indoor heat exchanger functions as an evaporator of the refrigerant condensed in the outdoor heat exchanger. Further, an outdoor expansion valve is disposed at a position that is at once downstream of the outdoor heat exchanger and upstream of a liquid refrigerant communication pipe in the refrigerant flow direction in the refrigerant circuit in the cooling operation, and shuts off the refrigerant flow. A refrigerant detection unit is disposed upstream of the outdoor expansion valve and detects the amount or the amount-related value of refrigerant accumulated upstream of the outdoor expansion valve.Type: ApplicationFiled: August 29, 2007Publication date: November 5, 2009Applicant: DAIKIN INDUSTRIES, LTD.Inventors: Tadafumi Nishimura, Takahiro Yamaguchi
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Publication number: 20090220220Abstract: An energy accumulator system for accumulating heat from a heat source for subsequent supply to a heat demand, comprises an energy accumulator having a storage material in a heat-exchange relation with the heat source so as to store heat produced by the heat source. A controller is connected to the energy accumulator to obtain temperature data with respect to the storage material, and to the heat source so as to selectively actuate the heat source. An energy level calculator is associated with the controller to determine a storage capacity in the energy accumulator as a function of temperature data of the storage material. An operation identifier determines when to store energy in the energy accumulator as a function of the storage capacity and of condition data pertaining to the heat source. The controller actuates the energy accumulator and the heat source to store heat in the energy accumulator.Type: ApplicationFiled: November 6, 2006Publication date: September 3, 2009Inventor: Stéphane Bilodeau
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Patent number: 7574870Abstract: Various embodiments of air conditioning systems are disclosed. The systems may include an air conditioner whose energy source is provided by heating of a first fluid. The first fluid may be in a liquid state contained in a reservoir hydraulically connected to a first chamber. The first chamber may be configured to receive thermal energy utilized to convert the first fluid into a vapor. The system may also include a second chamber hydraulically connected to the first chamber to receive the vaporized fluid from the first chamber. The second chamber may be configured to condense the vaporized first fluid, causing depressurization in the second chamber. The system may be configured such that the depressurization of the second chamber may drive an external fluid through an expanding valve in addition to an energy converter (e.g. Turbine Generator) overall able to convert the first fluid condensing energy into cooling and mechanical or electrical energy.Type: GrantFiled: July 20, 2006Date of Patent: August 18, 2009Inventor: Claudio Filippone
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Publication number: 20090173082Abstract: A device for simultaneously generating electrical power and cooling, including an active layer for intrinsically transducing thermal energy into electrical energy, a first electrical contact having a first work function and a second electrical contact having a second work function, a first electron diffusion barrier positioned between and in electric communication with the active layer and the first electrical contact, and a second electron diffusion barrier positioned between and in electric communication with the active layer and the second electrical contact. The first work function and the second work function are nonidentical. Transduction of thermal energy into electrical energy yields thermally generated electrical carriers of both positive and negative charge, wherein thermally generated electrical carriers are separated according to charge to either the first electrical contact or the second electrical contact, thereby lowering the average thermal energy of the active layer.Type: ApplicationFiled: December 12, 2008Publication date: July 9, 2009Inventor: Matthew Rubin
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Publication number: 20090158750Abstract: A method of addressing environmental warming and generating power, including positioning a device for generating electrical power in an environment experiencing undesired warming, the device including an active layer for intrinsically transducing thermal energy into electrical energy, and first and second electrical contacts having different work functions, respective first and second electron diffusion barriers positioned between and in electric communication with the active layer and respective first and second electrical contacts, wherein thermally generated electrons are separated to the first electrical contact and holes are separated to the second electrical contact, and wherein the introduction of thermal energy to the active layer increases the rate at which electron-hole pairs are formed, connecting the device to a power grid, removing thermal energy from the environment via conversion into electricity, and supplying electricity to the power grid, wherein the removal of thermal energy from the enviroType: ApplicationFiled: December 12, 2008Publication date: June 25, 2009Inventor: Matthew Rubin
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Publication number: 20090142637Abstract: A warming system for a high pressure hydrogen gas storage tank in a motor vehicle for maintaining the temperature of the gas within the tank and the gas flow control components associated with one or more boss at the tank ends above the lower design temperature tolerance limit of the tank and components associate with the utilizing the Joule-Thomson effect in gas flowing from the tank to recycles the mechanical energy of heat compression in high pressure hydrogen fuel to warm the gas within the tank as the high pressure gas is utilized.Type: ApplicationFiled: November 30, 2007Publication date: June 4, 2009Inventor: Kiyoshi Handa
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Publication number: 20090126381Abstract: A trigeneration system comprising a cooling loop and a heat/power loop connected by a heat exchanger. Energy available at the high side of the cooling loop is transferred from cooling loop to the heat/power loop by the heat exchanger. This energy is put to use by the heat/power loop to efficient produce heat and power. The system can be run transcritical and use environmentally friendly working fluid, such as carbon dioxide.Type: ApplicationFiled: November 15, 2007Publication date: May 21, 2009Inventor: Gerardo C. Diaz
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Publication number: 20090095005Abstract: Described is an air conditioning system with a heating function, wherein the inner heat exchanger is split in the air flow direction, wherein the first partial heat exchanger of the inner heat exchanger in the air flow direction preferably operates to cool the supply air, that is to say as a refrigerant evaporator, and wherein the second partial heat exchanger, which is connected downstream in the air direction, preferably operates to heat the supply air, that is to say as a refrigerant gas cooler, wherein the two partial heat exchangers of the inner heat exchanger can also both be used, in the case of the maximum cooling demand, as a refrigerant evaporator for cooling or can also both be used, in the case of the maximum heating demand, as refrigerant gas coolers for heating the supply air, and wherein in drying operation (reheat), the first partial heat exchanger of the inner heat exchanger in the air flow direction operates as a refrigerant evaporator and at the same time the second partial heat exchanger oType: ApplicationFiled: March 16, 2007Publication date: April 16, 2009Inventors: Gunnar Dietrich, Michael Sonnekalb
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Publication number: 20080295533Abstract: A heat exchange and heat transfer device comprises an evaporating/absorbing arrangement connected to a binary mixture flow circuit containing a first refrigerant fluid and a second absorbing fluid. The refrigerant fluid is evaporated in the evaporator part of the arrangement and subsequently absorbed in the absorber part by an absorbing fluid-enriched mixture. The evaporating/absorbing arrangement comprises at least two oppositely disposed reference surfaces defining evaporation and absorption components, respectively, an evaporator mass for supplying the liquid refrigerant fluid to the reference surface of the evaporation component and an absorber mass for supplying the absorbing fluid-enriched mixture to the reference surfaced of the absorption component.Type: ApplicationFiled: May 24, 2005Publication date: December 4, 2008Applicant: PEUGEOT CITROEN AUTOMOBILES S.A.Inventors: Emmanuel Boudard, Vitale Bruzzo
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Publication number: 20080148754Abstract: The invention provides an efficient way of cooling of the microelectronic devices and converting the heat back into the electrical power. With addition of the ambient-air heat exchanger the system generates enough power to completely satisfy the demand of the microelectronic device and replace the electric battery with the cryogenic storage vessel.Type: ApplicationFiled: December 23, 2006Publication date: June 26, 2008Inventor: Roman Snytsar
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Publication number: 20080127665Abstract: Disclosed, amongst other things, is a compressor, a heat recovery device, and a plant, configured to practice heat recovery from a compressible media for performing useful work in driving a heat-driven chiller.Type: ApplicationFiled: November 30, 2006Publication date: June 5, 2008Applicant: Husky Injection Molding Systems Ltd.Inventor: David John Fournier
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Publication number: 20080028781Abstract: Desalination apparatus based on porous restraint panels fabricated from a number of different layers of metal, thermoplastic, or other substances are used as sophisticated heat exchangers to control the growth of gas hydrate. The gas hydrate is produced after infusion of liquid hydrate-forming material into water to be treated, which liquid hydrate-forming material can also be used to carry out all the refrigeration necessary to cool seawater to near the point of hydrate formation and to cool the porous restraint panels. Hydrate forms on and dissociates through the porous restraints. The composite restraint panels can also be used in gaseous atmospheres where, for instance, it is desired to remove dissolved water.Type: ApplicationFiled: May 8, 2007Publication date: February 7, 2008Inventor: Michael David Max
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Publication number: 20080022707Abstract: Disclosed related to a co-generation according to the present invention has some advantages in that the heat of the refrigerant recovered at the supply heat exchanger is used for the water boiling as well as the heat recovered at the drive source is used for water boiling when the air conditioner is under the air-cooling mode and has a water boiling request by comprised as an electric generator; a drive source operating the electric generator; a waste heat recovery heat exchanger recovering the exhaust gas heat of the drive source; a water boil heat exchanger installed for boiling water; an air conditioner air-conditioning indoor air; a radiant heat exchanger radiating heat to outside; a supply heat exchanger installed on the refrigerant path of the air conditioner; and a heat transfer path connecting the waste heat recovery heat exchanger, water boil heat exchanger, and the radiant heat exchanger, and the supply heat exchanger.Type: ApplicationFiled: April 13, 2007Publication date: January 31, 2008Inventors: Eun Jun Cho, Sim Bok Ha, Cheol Min Kim, Se Dong Chang
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Publication number: 20080016901Abstract: A heat exchanger is disclosed for transferring energy between a first flowing fluid and a second flowing fluid. The heat exchanger comprises a first, second and third tube having an input end and an output end. A primary and a secondary angled couplers join the output end of the first tube to the input end of the second tube and the output end of the second tube to the input end of the third tube respectively. A continuous conduit conveys the second flowing fluid between a conduit input and a conduit output. The continuous conduit has a cross sectional area less than the cross sectional area of the first tube and the third tube for enabling the continuous conduit to be inserted within the first tube and the third tube. The continuous conduit enters a first aperture to extend inside the first tube for enabling heat exchange between the first flowing fluid and the second flowing fluid. The continuous conduit exits from a second aperture of the primary angled coupler to extend outside the second tube.Type: ApplicationFiled: July 24, 2006Publication date: January 24, 2008Inventor: Wilson M. Leary
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Patent number: 7234646Abstract: A hot-water supply system heats water through heat exchange between high-temperature refrigerant of a heat pump circuit and water of a water circulating circuit. The system is an instantaneous water heater unit for instantaneously heating, at a water heat exchanger, water supplied through a water supply pipe and supplying hot water to a using end unit. Therefore, a large-capacity hot-water storage tank is not needed. Sufficient heat of condensation to heat water can not be produced, because pressure conditions of the heat pump circuit is not stabilized just after the start of operation. Therefore, during a short period of rising time, hot water stored in a hot-water supply tank and water from the water heat exchanger are mixed and the mixture is supplied to keep the hot water at a preset temperature. Therefore, it is possible to use a smaller hot-water supply tank.Type: GrantFiled: April 4, 2005Date of Patent: June 26, 2007Assignee: Hitachi Appliances, Inc.Inventors: Kenichi Saitoh, Masahiko Gommori, Hiroshi Kogure, Haruko Ashida, Takeo Ozawa, Tetsunobu Okamura
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Patent number: 7095143Abstract: A device and method for ferrofluid power generator and cooling system, wherein the waste heat of electronic device is used as a heat source to vaporize fluid and form bubbles as a forwarding pump of the ferrofluid. The fluid with magnetic nano particles is pumped forward and rotated by a fluid mechanism, then passes through a high density coil to result in the time varying magnetic flux and induced current. No additional heat-dissipating device is needed for this invention to dispose the waste heat, which requires the waste heat to produce electricity, which provides cooling and saves power.Type: GrantFiled: March 17, 2003Date of Patent: August 22, 2006Assignee: Industrial Technology Research InstituteInventor: Li-Chieh Hsu
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Patent number: 7055339Abstract: A hot water heater with a built in refrigerant heat recovery system is provided. A thermosyphon and Coriolis force powered refrigeration heat recovery unit is integrated into the tank of a conventional gas or electric hot water heater. The heat recovery unit is placed beneath the outer skin of the hot water heater to decrease the number of exterior connections and increase the ease of installation. The use of the Coriolis effect increases the flow rate and thus the efficiency of the heat transfer system.Type: GrantFiled: June 2, 2003Date of Patent: June 6, 2006Assignee: Global Energy Group, Inc.Inventor: Thomas H. Hebert
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Patent number: 6880352Abstract: In a heat pump apparatus having a refrigerating cycle including a compressor 1, a gas cooler 3, a pressure reducing device 5 and an evaporator 7 in which water can be heated by the gas cooler, the compressor 1 comprises a two-stage compression type compressor for leading all or a part of refrigerant compressed to an intermediate pressure at a first stage through a shell case 11 to a second stage, compressing the intermediate-pressure refrigerant to a high pressure at a second stage and discharging the high-pressure refrigerant, and there is equipped a defrosting circuit 33 for leading the intermediate-pressure refrigerant of the first stage of the compressor 1 to the evaporator 7 with bypassing the gas cooler 3 and the pressure reducing device 5.Type: GrantFiled: July 2, 2002Date of Patent: April 19, 2005Assignee: Sanyo Electric Co., Ltd.Inventors: Haruhisa Yamasaki, Hiroshi Mukaiyama
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Patent number: 6874694Abstract: A hot-water supply system heats water through heat exchange between high-temperature refrigerant of a heat pump circuit and water of a water circulating circuit. The system is an instantaneous water heater unit for instantaneously heating, at a water heat exchanger, water supplied through a water supply pipe and supplying hot water to a using end unit. Therefore, a large-capacity hot-water storage tank is not needed. Sufficient heat of condensation to heat water can not be produced, because pressure conditions of the heat pump circuit is not stabilized just after the start of operation. Therefore, during a short period of rising time, hot water stored in a hot-water supply tank and water from the water heat exchanger are mixed and the mixture is supplied to keep the hot water at a preset temperature. Therefore, it is possible to use a smaller hot-water supply tank.Type: GrantFiled: May 6, 2004Date of Patent: April 5, 2005Assignee: Hitachi, Ltd.Inventors: Kenichi Saitoh, Masahiko Gommori, Hiroshi Kogure, Haruko Ashida, Takeo Ozawa, Tetsunobu Okamura
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Patent number: 6843425Abstract: Disclosed are an apparatus and a method for controlling compressors of an air conditioner. The apparatus includes a temperature sensor, a comparison unit, and a controller. The temperature sensor is installed close to an outdoor unit and serves to sense an outdoor temperature. The comparison unit compares the outdoor temperature sensed by the temperature sensor to a predetermined temperature. The controller determines a heating load when the comparison unit determines that the outdoor temperature is more than the predetermined temperature, and controls the operation of the plural compressors based on the determined heating load. The apparatus determines the heating load by means of the outdoor temperature, and properly operates the plural compressors depending the determined heating load, thereby improving the heating efficiency of the air conditioner.Type: GrantFiled: March 27, 2003Date of Patent: January 18, 2005Assignee: LG Electronics Inc.Inventor: Won Hee Lee
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Patent number: 6837063Abstract: A system and method for power management of a computer with a vapor-cooled processor is disclosed. A dual mode cooling system for an information handling system includes a heat exchanger for receiving heat generated by the information handling system. The system further includes a condenser in communication with the heat exchanger such that the heat received at the heat exchanger is transferred to the condenser. The heat exchanger and the condenser are able to selectively operate in an active cooling mode and a passive cooling mode.Type: GrantFiled: July 31, 2003Date of Patent: January 4, 2005Assignee: Dell Products L.P.Inventors: Charles D. Hood, III, Curtis L. Progl
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Patent number: 6837443Abstract: The object of the present invention is to provide a compact lightweight heat pump hot-water supply system. The hot-water supply system heats water through heat exchange between high-temperature refrigerant of a heat pump circuit and water of a water circulating circuit. The system is an instantaneous water heater unit for instantaneously heating, at a water heat exchanger, water supplied through a water supply pipe and supplying hot water to a using end unit. In this system, therefore, large-capacity hot-water storage tank in conventional systems is no longer needed. Sufficient heat of condensation to heat water can not be produced, because pressure conditions of the heat pump circuit is not stabilized just after the start of operation. Therefore, during a short period of rising time, hot water stored in a hot-water supply tank and water from the water heat exchanger are mixed and the mixture is supplied to keep the hot water at a preset temperature.Type: GrantFiled: February 5, 2003Date of Patent: January 4, 2005Assignee: Hitachi, Ltd.Inventors: Kenichi Saitoh, Masahiko Gommori, Hiroshi Kogure, Haruko Ashida, Takeo Ozawa, Tetsunobu Okamura
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Publication number: 20040144115Abstract: A geothermal accumulator and a air-conditioning system using the geothermal accumulator, said geothermal accumulator includes a well pipe and a heat-accumulating pipe inserted within the well pipe coaxially, the lower portion and the upper portion of the well pipe are provided with inlet holes and outlet holes for underground water respectively, said heat-accumulating pipe is provided with a water-collecting chamber, a different chamber, a heat-exchanging chamber and a water-accumulating chamber from the bottom up in sequence, the heat-exchanging chamber is provided with a plurality of axially disposed heat-exchanging pipes communicating with the different chamber and water-accumulating chamber respectively, and a plurality of baffles attached to the outside of the heat-exchanging pipes, gap exists between the baffles and the heat-exchanging pipes, the upper portion of the heat-exchanging chamber is connected with a returning pipe, and the lower portion is connected with a discharging pipe, water inlet holesType: ApplicationFiled: November 14, 2003Publication date: July 29, 2004Inventor: Shengheng Xu
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Publication number: 20040069001Abstract: A first, optional second, optional third air conditioning systems employing air condensers and/or water condensers, coupled to a water source are disclosed. The water source includes a water to air heat exchanger, which is not coupled to nor provides cooling to either a habitable interior space or an attic.Type: ApplicationFiled: June 13, 2003Publication date: April 15, 2004Inventors: Darrell Thomas Taylor, Jeffrey Edward Cantrell
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Publication number: 20030188544Abstract: In a heat pump apparatus having a refrigerating cycle including a compressor 1, a gas cooler 3, a pressure reducing device 5 and an evaporator 7 in which water can be heated by the gas cooler, the compressor 1 comprises a two-stage compression type compressor for leading all or a part of refrigerant compressed to an intermediate pressure at a first stage through a shell case 11 to a second stage, compressing the intermediate-pressure refrigerant to a high pressure at a second stage and discharging the high-pressure refrigerant, and there is equipped a defrosting circuit 33 for leading the intermediate-pressure refrigerant of the first stage of the compressor 1 to the evaporator 7 with bypassing the gas cooler 3 and the pressure reducing device 5.Type: ApplicationFiled: March 18, 2003Publication date: October 9, 2003Inventors: Haruhisa Yamasaki, Hiroshi Mukaiyama
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Patent number: 6460360Abstract: An energy-saving system including a primary heat recovery apparatus for recovering heat from the environment of a silencer box having a compressor and a power generator simultaneously coupled with an engine commonly built in the box for warming utility water, a refrigerant heat recovery apparatus for recovering the condensation heat of the refrigerant for warming utility water, a water heat recovery apparatus for recovering the water heat in the water jacket of the engine, and a flue gas heat recovery system having a first gas heat exchanger and a second gas heat exchanger for recovering the waste heat of the exhaust gas. A turbo-generator is driven by a steam turbine driven by the steam produced from the gas heat exchanger for generating electricity. Also at least an absorption-based air conditioner is driven by the waste heat as recovered from the energy-saving system.Type: GrantFiled: February 20, 2001Date of Patent: October 8, 2002Inventor: Sheng-Ming Hsieh
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Patent number: 6370897Abstract: A cooling jacket unit (5) is provided to a periphery of a heating furnace of a heat treatment apparatus. A cooling unit has a double water jacket comprising an inner fluid passage (51) and an outer fluid passage (52), and cooling water supplied to the outer fluid passage exits from the inner fluid passage. The temperatures of the inlet port and the outlet port of the cooling jacket unit (5) are set to, for example, 40° C. and 85° C., respectively, and the cooling water (warmed exhaust water) from the outlet port is supplied to a heat recovery part (2). Heat is recovered from the cooling water by the heat recovery part (29, and the recovered heat is reused for heating a boiler water and the like. The warmed exhaust water from which the heat is recovered is supplied again to the cooling jacket unit (5) as the cooling water.Type: GrantFiled: September 27, 2000Date of Patent: April 16, 2002Assignees: Tokyo Electron Limited, Taisei CorporationInventors: Osamu Suenaga, Tadahiro Ohmi, Sadao Kobayashi