Abstract: The present invention has been made in order to construct a CIM system that is capable of reducing burden on a host computer and instructing processing conditions by the unit of substrate and a start order of work by the unit of substrate. In the present invention, a recipe applied to each substrate is managed in each manufacturing apparatus rather than being managed in a host computer. One or a plurality of numbered recipes are stored in each manufacturing apparatus. With the structure described above, even if decision of a recipe and an order of work of a manufacturing apparatus is managed by the unit of substrate rather than by the unit of carrier, since it is unnecessary to manage concrete contents of a recipe for each substrate in each manufacturing apparatus in the host computer, burden on the host computer can be reduced.

Abstract: Disclosed is a system for selectively managing workpieces used in the process of manufacturing semiconductor elements. The present invention comprises equipment for receiving a cassette having a plurality of workpieces and for executing a job on the workpieces; a database having job schedules on the workpieces and information on the cassette; and a controller for referring to workpiece information and job schedule information from the database and controlling the job of the equipment when the cassette is loaded into the equipment. This system provides for loading a cassette with workpieces equipment, and at the same time an equipment server and a host refers to job schedules of the workpieces from a file server, and select workpieces to be processed by the equipment. Since the selected workpieces are processed with different job schedules, the equipment can be automatically and remotely driven without manual mechanical manipulation and operator handling.

Abstract: An inventive method in an integrated circuit (IC) manufacturing process for using data regarding repair procedures conducted on IC's at probe to determine whether any further repairs will be conducted later in the manufacturing process includes storing the data in association with a fuse ID of each of the IC's. The ID codes of the IC's are automatically read, for example, at an opens/shorts test during the manufacturing process. The data stored in association with the ID codes of the IC's is then accessed, and additional repair procedures the IC's may undergo are selected in accordance with the accessed data. Thus, for example, the accessed data may indicate that an IC is unrepairable, so the IC can proceed directly to a scrap bin without having to be queried to determine whether it is repairable, as is necessary in traditional IC manufacturing processes.

Abstract: A system and a method for controlling a surface mounting process are proposed. Barcodes of feeder trays in a work station are scanned, prompting an inquiry module to retrieve a corresponding work station serial number, which is transmitted to a microprocessor module. This then prompts the microprocessor module to generate a signal to the work station, so as to inform an operator to place the scanned feeder trays in the work station. After placing the feeder trays in position, the microprocessor module generates another signal to inform the operator whether or not the surface mounting process is readily initiated. A printer device is prompted by the microprocessor module to print a list of material serial numbers of the feeder trays to be replenished, allowing the operator to perform replenishment for the feeder trays according to the list, so as to maintain the progress of the surface mounting process.

Abstract: The described arrangements and procedures describe to a sheet with top, bottom, left, and right facial portions and edges. The sheet has a single respective fluid-based marking positioned on at least one facial portion and edge. The single fluid-based marking includes data that is detectable by an imaging device from the at least one facial portion or edge to configure operations to form images on the sheet.

Abstract: To provide a product development and manufacturing system to be used in the increasingly competitive electronic equipment market, which enables the process from product planning to design, manufacturing, and sales of a product to be performed efficiently while incorporating newly developed techniques, to thereby minimize or avoid risks. The present invention provides a production system for a product by multiple companies which enables multiple corporations or companies cooperating to perform product development, manufacturing and sales in a new product field, to mutually utilize techniques and sales networks owned by the respective companies to thereby further strengthen their competitiveness and develop their business.

Abstract: The present invention relates to a process and an application for handling information in relation to meat being conveyed through a number of processing stations. The information is used to trace the processing history of a piece of meat, including its origination. The ability to trace the processing history may be used e.g. in order to trace back sources of contamination and for verification of the status and quality, weight etc. of the meat. The information is furthermore useful for the workers processing the meat at the stations or useful for the control and management of the meat processing plant.

Abstract: The invention pertains to a method of operating a transfer system with individual workpiece carriers driven so as to be able to travel along a path, wherein the workpiece carriers exchange information wirelessly with at least one data loading station arranged on the path. The invention is distinguished by the fact that each workpiece carrier takes on information intended for it wirelessly from the data-loading station, the information is written into a microprocessor control unit of the workpiece carrier, the written information, together with basic data present in the microprocessor, is converted into a travel and machining program for the workpiece carrier, and the workpiece carrier independently conditions its predetermined travel path on the basis of the travel and machining program, travels to corresponding machining stations and exchanges data with machining and/or positioning stations arranged on the path.

Abstract: The substrate carrier management system includes a pre-diffusion processing apparatus, a carrier cleaner, and a carrier conveyer. The pre-diffusion processing apparatus unloads a substrate from a supplied carrier in which the substrate is stored, performs predetermined processing on the substrate, and transfers the processed substrate stored in a carrier to be used after processing. The carrier cleaner cleans a carrier emptied as a result of taking a substrate out of the carrier. The carrier conveyer conveys a carrier between the pre-diffusion processing apparatus and the carrier cleaner. The empty carrier unloaded from the pre-diffusion processing apparatus is cleaned by the carrier cleaner, and the processed substrate is stored in the empty carrier. With this arrangement, it is possible to automatically change carriers and thereby continuously use a cleaned carrier in the subsequent step without using a dedicated carrier.

Abstract: The present invention provides for a method and an apparatus for automatic routing of semiconductor devices within a manufacturing area. Performance of a plurality of manufacturing tools is tracked while processing semiconductor devices. At least one optimal combination of the manufacturing tools is determined based upon the tracked performance of the manufacturing tools. A queuing system is implemented to attain the optimal combination of the manufacturing tools. A dispatch system is deployed in response to the queuing system for routing the semiconductor devices within the manufacturing area.

Abstract: A computerized method of assisting the routing of a part, comprising the steps of: providing at least one computer; receiving part identifier information; and generating a tag for affixing to the part. The tag has information thereon responsive to the identifier information. A computerized method of assisting the handling of a part, comprising the steps of: providing at least one computer; receiving part identifier information; processing the part identifier information; and generating output from the computer responsive to the part identifier information.

Abstract: A method and system for producing a thin film with highly uniform (or highly accurate custom graded) thickness on a flat or graded substrate (such as concave or convex optics), by sweeping the substrate across a vapor deposition source with controlled (and generally, time-varying) velocity. In preferred embodiments, the method includes the steps of measuring the source flux distribution (using a test piece that is held stationary while exposed to the source), calculating a set of predicted film thickness profiles, each film thickness profile assuming the measured flux distribution and a different one of a set of sweep velocity modulation recipes, and determining from the predicted film thickness profiles a sweep velocity modulation recipe which is adequate to achieve a predetermined thickness profile.

Abstract: A production control system provides real-time monitoring of process parameters in an automated production line that manufactures contact lenses, the line and having a plurality of process stations with each process station having one or more process control devices that control production operations at each respective process station and generates production parameter data therefrom. The system includes a line monitor device for receiving an externally generated production order including a lot number, product type, and quantity, and further coordinates manufacturing processes at each of the plurality of process stations, and tracks order production. A plurality of cell monitor devices retrieves the production data from one or more process control devices and processes the data to ensure that production parameters are within predefined limits.

Abstract: The present invention is directed to a distributed computerized control and information system for a manufacturing system which generates a product from distinct components, where the manufacturing system includes a plurality of processing machines which generate signals indicative of parameters of the processing machines' operation. The system includes a plurality of sensors in communication with an associated processing machine for non-intrusively obtaining parameter signals in real-time from the processing machine so as to not interfere with the parameter signal generation and transmission. Also included is a plurality of command apparatus in communication with an associated sensor for providing real-time analysis of the received parameter signal of the associated processing machine, and a summary station in communication with the plurality of command apparatus for providing real-time summary and detailed analysis of received parameter signals from associated processing machines.

Abstract: An apparatus providing identification, monitoring, and tracking of facilities maintenance in which an interactive information storage device receives and retains at least one facility profile that includes a facility identification, at least one process area descriptor and with at least one substrate associated with each process area descriptor. Each substrate includes a substrate condition, a substrate environment, a substrate process priority, and a substrate area. An analyzer evaluates the substrate condition, the substrate environment, and the substrate process priority to determine a substrate ranking. An estimator applies standard work information to the substrate condition, the substrate environment, the substrate process priority, and the substrate area, to determine a substrate maintenance estimate. A reporter generates maintenance specifications of the substrate maintenance estimates and substrate ranking for a selected one of the facility profiles.

Abstract: An elapsed time clock is incorporated into a part call tag for requesting replenishment of components used by workstations of a manufacturing facility. One or more transmission readers spatially distributed around the manufacturing facility detect a part call signal transmitted from the part call tag. A reader output processing subsystem processes part call signals detected by at least one of the tag transmission readers to recover information contained in the part call signal. A management processor associates the recovered information with a respective workstation, and what component is to be replenished. The elapsed time clock is reset when the part call tag is operated to transmit a part call signal, and thereby serves as a call tag ‘stop watch’—informing workstation personnel of the length of time that has elapsed since the last part call transmission from that tag.

Abstract: In a tracking apparatus for tracking an object by the use of a plurality of detecting data sets supplied from a detecting device, a velocity presuming portion is provided together with a position presuming portion. The position presuming portion finds a presumed position of the object at the latest detecting time of the detecting data sets by the use of the latest detecting time and regression curves found on the basis of the detecting data sets. The velocity presuming portion finds a presumed velocity of the object at the latest detecting time by the use of the regression curves and at least one of former detecting times different from the latest detecting time.

Abstract: The present invention provides at low cost a production management system having a production line that includes a combination weigher and a bagger and is capable of using image information for monitoring.

Abstract: To provide a method of controlling a manufacturing process, a Mahalanobis space of plural manufacturing control parameters is generated on the basis of first sampled data. Then, a Mahalanobis distance from the Mahalanobis space and second sampled data is calculated. A manufacturing process is determined to be under a malfunction operating condition by comparing the Mahalanobis distance and a threshold value.

Abstract: There are independently made data of a device pattern, an identification and scribe pattern including a scribe pattern surrounding the device pattern, identification patterns formed in a scribe region indicated by the scribe pattern and outer periphery of the scribe region, and an outer peripheral pattern formed outside the scribe region except the identification pattern. From the data, data for an exposure system or a mask inspection apparatus are produced. The outer peripheral pattern is divided into a plurality of patterns each is a unit of a exposure region.

Abstract: A predictive industrial control system for controlling individual cells of machines through multiple Programmable Logic Controllers in an investment casting processing and handling operation. An application server located in a remote, non-industrial environment executes an industrial control application (ICA) utilizing tagged reference names corresponding to individual machines and information input devices such as sensors on the production line. The ICA accesses local databases that hold casting shell part numbers and their associated recipe control words, and monitors the system for new shell part numbers as they appear on a load conveyor in the production line. Radio Frequency tags on the part signal the ICA to transfer the appropriate recipe control words and robot moves required to process the part in a primary processing cell's PLC. The PLC then controls each machine in the primary processing cell in accordance with the downloaded commands from the ICA.

Abstract: The invention relates to a data processing system and a data processing device for a cohesive technical process, which has at least one processing station (BS1 to BS21) for an initial product or end product of the process, with each initial product or end product of the process having an associated specific data record (D1 to D23), in which case features and/or process information for the initial products or end products can be administered in at least one respective data record (D1 to D23), and with the processing station (BS1 to BS21) having an associated upstream or downstream product buffer (PP1 to PP4). At least one product-associated data record (D1 to D23) can be passed on in time with the processing clock cycle (T) to the respective processing station (BS1 to BS21), and synchronized to the product (P1 to P15) to the following processing station (BS1 to BS21).

Abstract: A method for resetting a process recipe in a semiconductor factory automation (FA) system, includes the steps of: a) sending the process recipe and a lot identifier inputted from an operator to a process equipment, wherein the process recipe represents a set of semiconductor process conditions corresponding to a lot of semiconductor wafers and the lot identifier corresponds to the lot of semiconductor wafers; b) processing the lot of semiconductor wafers according to the process recipe; c) measuring the processed lot of semiconductor wafers to generate semiconductor measurement data; d) writing the semiconductor measurement data to a trace file, wherein the trace file includes the process recipe, the semiconductor measurement data and the lot identifier; e) retrieving the semiconductor measurement data contained in the trace file in response to a retrieval command inputted from the operator; and f) resetting the process recipe in response to a reset command inputted from the operator if the process recipe is

Abstract: The invention relates to a method and a system for making up and managing a logistic chain for transporting goods, such as parcels. Such a chain may consist of a combination of collecting, delivery and packing/unpacking actions—elementary activities. The chain-management system breaks down a logistic chain chosen by a principal into the elementary activities required therefor, sees to the supply of orders to a transporter fitting the choice of the principal and indicated by the system, and makes it possible to collect information on the status of execution of the elementary activities.

Abstract: A method for providing information or a printed matter of the information smoothly in a meeting place such as a museum or an exhibition is provided. A card reader reads an ID card that a tourer carries, so as to obtain information relating to an exhibit corresponding to the card reader. Then, the obtained information is printed and is passed to the tourer.

Abstract: A method for continuous, non lot-based manufacturing of integrated circuit (IC) devices of the type to each have a unique fuse identification (ID) includes: reading the fuse ID of each of the IC devices; advancing multiple lots of the IC devices through, for example, a test step in the manufacturing process in a substantially continuous manner; generating data, such as test data, related to the advancement of each of the IC devices through the step in the process; and associating the data generated for each of the IC devices with the fuse ID of its associated IC device.

Abstract: A module for use in a system for processing articles, in which the system includes a plurality of machine tools for processing articles, a pod for carrying the articles to be processed by the machine tools from one machine tool to another, a host processing controller associated with the machine tools for controlling the operation thereof, a robot connected to each machine tool for receiving a pod, opening the pod and for transporting the articles from within the pod into position on the machine tool for processing. An identification device is carried by the pod for identifying a particular pod and the articles carried in the pod. The module includes a single wire connection between the identification system, the host controller and the robot. The module has a microprocessor to identify the source of a signal and for routing the signal between the identification system and the host controller and between the host controller and the robot depending on its source.

Abstract: This installation comprises:

Abstract: A computerized system for tracking the activities of a manufacturing system. Identifiers for parts, subassemblies or assemblies produced or used by the manufacturing system are generated and stored by a data processing system. The data processing system performs multi-level tracking of the manufacture of parts, subassemblies made from parts and assemblies made from parts and subassemblies, to facilitate detailed tracking and reconstruction of the manufacturing process and components of any assembly. The system also facilitates quality control; when a part identifier is read from the part, the system verifies that the part associated with the read identifier is supposed to be used in the manufacturing step. Also, the system ensures that all manufactured parts are tracked. The system also stores inspection and process conditions and facilitates statistical process control or statistical quality control data for parts, subassemblies and assemblies.

Abstract: An inventive method in an integrated circuit (IC) manufacturing process for using data regarding repair procedures conducted on IC's at probe to determine whether any further repairs will be conducted later in the manufacturing process includes storing the data in association with a fuse ID of each of the IC's. The ID codes of the IC's are automatically read, for example, at an opens/shorts test during the manufacturing process. The data stored in association with the ID codes of the IC's is then accessed, and additional repair procedures the IC's may undergo are selected in accordance with the accessed data. Thus, for example, the accessed data may indicate that an IC is unrepairable, so the IC can proceed directly to a scrap bin without having to be queried to determine whether it is repairable, as is necessary in traditional IC manufacturing processes.

Abstract: An inventive method of manufacturing IC devices from semiconductor wafers includes providing the wafers and fabricating IC's on the wafers. At probe, a unique fuse ID is stored in each IC, and an electronic wafer map is electronically stored for each wafer indicating the locations of good and bad IC's on the wafer and the fuse ID's of the IC's on the wafer. Each IC is then separated from its wafer to form an IC die, and the IC dice are assembled into IC devices. At the opens/shorts test at the end of assembly, the fuse ID of each IC in each device is automatically retrieved so the wafer map of the IC device may be accessed and evaluated to identify any IC devices containing bad IC's that have accidentally been assembled into IC devices. These “bad” IC devices are discarded, and the remaining IC devices continue on to back-end testing.

Abstract: The inventive processing tool (4″) for processing a workpiece (5) comprises detecting device (4) for detecting workpiece-specific parameters and/or processing-specific parameters which are located on the workpiece (5, 5′). Said processing toll (4) and other processing tools (1-3) of a processing device are pre-set with the data that have been read. A processing operation can begin immediately after these data have been read, without the operator having a return to the processing tool pick-up device.

Abstract: A system and method for monitoring the conditions in a gas plasma processing system while varying or modulating the RF power supplied to the system, so that resulting signals of the electrical circuits of the system provide information regarding operational parameters of the system or the state of a process. Significant improvements in sensitivity and accuracy over conventional techniques are thereby achieved. In addition, the plasma processing system can be thoroughly tested and characterized before delivery, to allow more accurate monitoring of and greater control over a process, thereby improving quality control/assurance of substrates being produced by the system. The information obtained by the modulation technique can be displayed on a monitor screen, in order to allow an operator to accurately monitor the system/process and diagnose any problems with the system/process.

Abstract: The physical movement of reticles and solder bump masks within a wafer processing plant are continually tracked and documented in a historical database for the useful life of the reticles or masks. In an example embodiment of the mask tracking method, the method includes moving the masks from one location to another in mask pods. In addition, a mask data set is generated for each mask composed of a mask identification code cross-referenced to a pod identification code and the mask data sets are then stored in a computer arrangement. The mask data sets are then updated in the computer arrangement to include a facility location identification code as each mask moves to a subsequent location during wafer processing. An important advantage is that wafer lots and reticles can now be matched to an event on the processing line and stored as data for later review and analysis.

Abstract: A defect analysis method makes it possible to quantitative grasp the influence of the number of new defects of a single process on the yield of a device. After the presence or absence of a new defect due to a specified process in each chip is judged, and defectiveness or non-defectiveness of the chip is judged by an electric tester, a plurality of chips on a wafer are classified into four groups: {circle around (1)} non-defective chip with no new defect; {circle around (2)} defective chip with no new defect; {circle around (3)} non-defective chip with new defect; and {circle around (4)} defective chip with new defect, to obtained the number of new defective chips considered to be caused only by the new defect of the specified process; a critical ratio of the new defect of the specified process, at which a chip is considered to become defective; and the number of process defective chips considered to be caused by the specified process.

Abstract: A method assists a semiconductor device developer to place an order for manufacturing a semiconductor device to specialized makers of different categories. The method asks a first maker to clarify a category of semiconductor device manufacture to which the first maker belongs. The method asks the first maker to select makers of other categories of semiconductor device manufacture with which the first maker wants to be interfaced. The method asks the makers concerned to fabricate a sample semiconductor device to confirm interfaces among the makers, and if the interfaces are confirmed, registers the makers as an interfaced maker group. The method asks the semiconductor device developer to enter the specifications of a semiconductor device developed by the developer. According to the specifications, the method retrieves maker groups and proposes to the developer the retrieved maker groups as proper maker groups capable of manufacturing the semiconductor device developed by the developer.

Abstract: A product controlling method that enables the operator to easily recognize an order of operation includes the steps of: transmitting a number can uniquely identifies portable telephone 200 such as a telephone number and inquiry data to a host computer when an inquiry button of a portable telephone attached to the product is pressed; receiving response data from the host computer; displaying data representing the following process of the received response data as well as data representing the process condition of the following process; and transmitting data representing the process condition of the following process to a production facility in the following process.

Abstract: A task instructing method for use with a work slip issuing terminal 12 and work terminals 14 is provided. The work slip issuing terminal 12 includes a reader/writer 121 which is connected to a central managing apparatus 10 storing task detail update information and which writes and reads information to and from a rewritable print indication area of a card type storage medium. Each of the work terminals 14 also includes a reader/writer connected to the central managing apparatus 10. The method comprises the steps of: causing the work slip issuing terminal 12 to print task details retrieved from the central managing apparatus 10 onto the card type storage medium that is issued as a work slip 20; and causing the work terminal 14, given the work slip 20, to search the central managing apparatus 10 for task detail update information so that the retrieved information is printed on the work slip 20.

Abstract: A system controls a package assembly line. The package assembly line has a piece feeder and a component feeder. The piece feeder is arranged to feed pieces to a transport of the package assembly line. The component feeder is arranged to feed components to the transport of the package assembly line so that the components and the pieces are combined into packages. The components have corresponding component identifiers thereon. The system includes a memory for storing a piece data file having piece identifiers corresponding to pieces fed by the piece feeder, a detector for detecting a component identifier from a component being fed by the component feeder toward the transport, a comparator for comparing the detected component identifier to a corresponding piece identifier, and a data list re-sequencer for re-sequencing the piece data file if the detected component identifier fails to match the corresponding piece identifier.

Abstract: An apparatus for preparing a plastic eyeglass lens includes a coating unit and a lens curing unit. The apparatus is preferably configured to allow the operation of both the coating unit and the lens curing unit. The apparatus may also include a post-cure unit and a controller. The controller is configured to control the operation of the coating unit, the lens curing unit and the post-cure unit. A lens forming composition may include an aromatic containing polyether polyethylenic functional monomer, a photoinitiator, and a coinitiator.

Abstract: A call tag-based material replenishment system employs a tagged object radio location infrastructure of the type described in the U.S. Pat. No. 5,920,287. For each different part used by a lineside workstation an associated ‘call’ tag is placed at or near that workstation. To initiate replenishment of a part, a ‘call’ push-button on a call tag is operated. In response to the operation of the call button, an RF signal burst containing tag identity and status data is transmitted from the call tag. This information is recovered by a spatially distributed reader and processor subsystem for application to an asset management database. The database associates the call tag's identification data with a particular part, to enable a resource management operator to specify what component is to be accessed from storage and delivered to the requesting call tag's workstation.

Abstract: In a semiconductor device test apparatus, a host computer having a data base writes test resultant data in the data base to output the test resultant data in response to a data request. Each of a plurality of testers performs an electric characteristic test based on a test program to generate a test resultant data for each of semiconductor devices to transmit to the host computer. Each of a plurality of handler sections sets the semiconductor devices of a pallet to a test head for the electric characteristic test. A loader section loads the semiconductor devices from a first tray to the pallet. An unloader section unloads the semiconductor devices from the pallet transported thereto to second trays based on the test resultant data from the host computer.

Abstract: In facilities for the automatic assembly of mechanical parts, a parts supply system has a storing section for storing a tray loaded with parts, a conveying mechanism for conveying the tray from the storing section, and a circulation mechanism for circulating a tray carrier to be loaded with the tray along a circulation path which includes at least a tray loading position for receiving the tray conveyed by the conveying mechanism, a pars supply position for allowing a robot to pick up the parts stored in the tray, and a tray discharge position for discharging the tray. The device simplifies the mechanical arrangement, enhances high speed processing, and readily adapts to a change in the kind of parts and an increase or decrease in the number of parts.

Abstract: An Advanced Process Control (APC) Framework performs automatic process control operations through the design and development of a software framework that integrates factory, process, and equipment control systems. The APC Framework benefits semiconductor-manufacturing factories, or “fabs,” throughout the development of the APC Framework by using an iterative development approach. The APC Framework is designed to integrate seamlessly with commercially-available APC tools. The APC Framework specifies components and a component structure that enable multiple vendors to build and sell framework-compatible products using an open architecture that accommodates plug-and-play components. The APC Framework advantageously increases product yield distributions and equipment utilization, and lowers defect densities.

Abstract: A method and system for identification of manufacturing components on an assembly line. The system is designed to be incorporated into a production line of a build-to-order plaint in which a series of components are arranged on the assembly line and different manufacturing operations are to be performed on each component. The components initially are identified by paper tags which are scanned into a manufacturing computer system, and each component includes an adhesive label which is capable of being laser engraved. The system includes a laser engraver, which is positioned immediately upstream of a first manufacturing operation, and the laser engraver is actuated by the factory computer system to etch an identification code on the adhesive label.

Abstract: A permanently read- and write-enabled but not easily erasable chip card (C) accompanies a product from manufacturing through recycling. The basic product data are supplemented using read-write devices (SL1 through SL8).

Abstract: Parallel organized unit-by-unit manufacturing and assembly systems and methods for computer systems and other products advantageously integrate into a build-to-order environment. Responsive to orders received, kit trays are prepared that each hold parts and components needed to build an ordered product. The kit tray is transferred to a work cell where a team builds the product. The product is then tested and repaired, with information regarding any problems provided to the responsible work cell.

Abstract: A multiple reaction chamber system includes a transfer chamber, a load lock chamber connected to the transfer chamber, and a plurality of reaction chambers connected to the transfer chamber. An alignment chamber is connected to the transfer chamber, disposed along a path of wafer transfer from the load lock chamber to the plurality of reaction chambers, and includes a wafer aligner. A wafer recognition, disposed along a post-aligner portion of the path of wafer transfer system, recognizes an identification code of an individual wafer. A controlling system is in data communication with the wafer recognition system for selecting a selected chamber of the plurality of reaction chambers into which the individual wafer is to be transferred. Because individual wafers can be associated with each reaction chamber, a defective reaction chamber can be identified immediately and its use discontinued so that unproductive operations can be eliminated.

Abstract: An inventive method of manufacturing IC devices from semiconductor wafers includes providing the wafers and fabricating IC's on the wafers. At probe, a unique fuse ID is stored in each IC, and an electronic wafer map is electronically stored for each wafer indicating the locations of good and bad IC's on the wafer and the fuse ID's of the IC's on the wafer. Each IC is then separated from its wafer to form an IC die, and the IC dice are assembled into IC devices. At the opens/shorts test at the end of assembly, the fuse ID of each IC in each device is automatically retrieved so the wafer map of the IC device may be accessed and evaluated to identify any IC devices containing bad IC's that have accidentally been assembled into IC devices. These “bad” IC devices are discarded, and the remaining IC devices continue on to back-end testing.

Abstract: The program memory 23 for storing the machining program MPR1 which instructs to carry the raw material workpiece 29 with the workpiece carrying robot 7 and to machine with the laser beam machine 3, and the classification program TPR1 which instructs to classify and carry the machined raw material workpiece to each classification rack 10, corresponding to each raw material workpiece, is provided. On the basis of the machining instruction from the input portion 17, the machining program MPR1 and the classification program TPR1 corresponding to the raw material workpiece, on which machining is instructed, are read out of the program memory 23. The machining portions 2, 3, 5 are instructed to machine on the basis of the read machining program, and the classification portions 9, 13, 15 are instructed to classify on the basis of the read classification program TPR1.