Abstract: A lithographic apparatus includes a movable part and a controller to control a position quantity of the movable part. The controller includes a first controller transfer function and a second controller transfer function. A selector selects the first controller transfer function or the second controller transfer function depending on a state of the movable part. The first controller transfer function may be chosen in a substantially stationary state of the movable part, while in a substantially non-stationary state of the movable part, the second controller transfer function may be chosen.

Abstract: A measurement system has a transmitter for determining the position of a movable element, and a first energy store which, in the event of failure of an external electrical supply unit of the transmitter, supplies at least a part of the transmitter with electrical power such that a stored count of the transmitter is maintained in the event of failure of the external electrical supply voltage. The first energy store produces a first auxiliary supply voltage, wherein a first data item is stored in the transmitter when a reference mark of the transmitter is detected for the first time. The first data item is deleted in the event of failure of the external electrical supply voltage for the transmitter and failure of the first auxiliary supply voltage for the transmitter. As a result, an incorrectly determined position resulting from a failure of the electrical power supply for the transmitter can be identified.

Abstract: A detector for detecting the presence of a memory tag, the detector comprising a radio frequency source operable to generate a radio frequency signal and a detector resonant circuit part connected to the radio frequency source, the detector resonant circuit part comprising an antenna, the detector further comprising a power monitor responsive to the power of a reflected signal returned from the detector resonant circuit part, the power monitor being operable to generate an output in response to the power of the reflected signal, wherein a decrease in the power of the reflected signal indicates the presence of a tag in the vicinity of the antenna.

Abstract: A control system for controlling one or more manipulators. One or more drives control motors driving the movements of the manipulator. An axis computer provides control signals to the drives. A main computer is adapted to execute a program with instructions for the movements and supplies the axis computer with control instructions. Physically separated modules are adapted to be placed at separated locations and to handle different functions. Each module may be surrounded by a casing of its own, may have its own power supply and has a well-defined interface in relation to the other modules. The computers and drives are arranged in the modules. One of the modules is a main computer module, which comprises the main computer. Another of the modules is a drive module, which comprises the axis computer.

Abstract: Method and computer control software executing, the method for an electronic submersible device, such as a fishing device for facilitating trolling a fish-catching element in water, comprising obtaining a first indication relating to water temperature, obtaining a second indication relating to the depth of the device, determining the location of the thermocline layer, and providing control data utilizing said first and/or second indication so as to adjust the depth of the submersible device and thus guide the device relative to the thermocline layer. In addition to fishing applications the disclosed device may be utilized in marine or other underwater research. Related submersible device and carrier medium are likewise presented.

Abstract: A system for debugging motion control software used to communicate with a motion control system, comprising a set of hardware motion control attributes, a set of common motion control attributes a motion control device, a set of software drivers, a software application, and a motion component. A selected software driver is capable of causing debug information to be sent to a debug target and converting a common motion control attribute to a hardware motion control attribute. The software application calls a motion component function to cause the motion component function to call a driver function. The called driver function causes the selected software driver to convert a common motion control attribute to a hardware motion control attribute, exchange a hardware motion control attribute with the motion control device, and cause debug information to be sent to the debug target.

Abstract: A method for aligning a stent with a stent support includes the steps of (1) placing a stent support and a stent mounted on the stent support in a vertically position with the stent support's first support element at a lower position and the stent support's second support element at an upper position; (2) obtaining a digital image of the stent support and stent; (3) analyzing the digital image of the stent support and stent to compute the vertical position of the stent's upper end; (4) computing a desired position of the second support element based on the position of the stent's upper end; and (5) using a positioning device to move the second support element to the desired position. The movement of the second support element causes the conical sections of the first and second support elements to engage the respective ends of the stent to center the stent around a core element of the stent support and to secure the stent in a longitudinal direction of the stent support.

Abstract: A method of navigating a mobile machine dependent upon the relationship of the mobile machine to a target path includes operating a steering system to change the heading of the mobile machine in response to the mobile machine deviating from a first navigational dead band. Additionally, the method may include subsequently operating the steering system to make a heading change of the mobile machine only in response to predetermined events, which may include operating the steering system to make a heading change of the mobile machine if the mobile machine deviates from a second navigational dead band.

Abstract: An aim of a system and method for configuring and parametrizing a machine used in automation technology is to simplify configuration of an automation process. Said aim is achieved by graphically representing the different technological components as model components. The respective mechatronic signal flow between the technological objects can be defined on a graphic level by means of connections to which the inputs and the outputs of the technological objects can e joined. Such a graphic mechatronic model substantially facilitates projection of an automation process.

Abstract: A partially or fully automated microscope includes one or more configurable subassemb1y. Each subassembly has at least one element. The element can be configured in various positions. A computer, associated with the microscope and having an input device and display, also includes a database configured to store configurations of the element for the subassembly.

Abstract: A device for controlling movement of an object relative to an environment is disclosed. The device may include a ball configured to store data for determining at least an orientation of the object relative to the environment. The data may pertain to a plurality of possible orientations of the object. The device may also include a speed control unit configured to determine at least a speed of the object relative to the environment.

Abstract: A system for allowing communication between a software application and at least one motion controller in a set of motion controllers comprising a set of motion operations, a set of motion commands, a set of selectable software modules, a software system, and a driver administrator. At least one motion command is associated with at least one primitive motion operation. Each software module is associated with at least one motion controller in the set of motion controllers. At least two selectable software modules expose a common software interface. The software application comprises a plurality of motion commands associated with a desired motion sequence, where the application comprises at least one motion command associated with a primitive motion operation. The software system uses the driver administrator to select at least one selected software module. The software application uses the driver administrator to load the selected software module.

Abstract: A transfer mechanism is used for transferring a target object having a mainly circular contour. The transfer mechanism includes a transfer unit that supplies movements in angular and rectilinear directions to a pick for supporting the target object. An optical sensor is disposed at a standby position on a route of the target object toward a destination, to optically detect presence/absence of the target object on the pick. Angular and rectilinear misalignment amounts of the target object in the angular and rectilinear directions are calculated, with reference to detection and reference values of a signal output from the optical sensor, and at least one of detection and reference values of a radius of the target object. A controller controls the transfer unit to compensate for the angular and rectilinear misalignment amounts in transfer of the target object by the pick.

Abstract: The invention provides systems and methods that integrate and/or control motion of a plurality of axes in a motion control environment. Grouped axes can be linked (e.g., via a tag) to provide desired multi-axis coordinated motion as well as provide control for corresponding aspects of motion such as acceleration, velocity, etc. Such axes can be integrated with other control functionality such as process and/or machine control to provide the user with a comprehensive control. The foregoing can provide simple mechanisms for moving devices in multiple axes of a coordinate system in a coordinated fashion. Such coordinated move functionality can provide a user-friendly interface for linear and circular moves in multi-dimensional space. The algorithm employed for path planning can provide fast execution and dynamic parameter changes (e.g., maximum velocity, acceleration and deceleration) along a desired path of motion.

Abstract: Systems, methods and apparatus are provided through which movement of a medical imaging device is detected and the movement is assisted in magnitude by an external force.

Abstract: In cleaning using a self-propelled cleaning device, firstly the cleaning device moves alongside a wall surface and then a reference direction is set. Next, the cleaning device advances alongside the wall surface at a prescribed distance, makes a right-angle turn, and travels in the reference direction. When the cleaning device reaches the surface of an opposing wall, it moves in a spiraling manner. At that time, the orientation angle of the cleaning device, which is estimated using a gyro sensor, is checked and corrected. If an obstacle is encountered while traveling, the cleaning device travels on a path that avoids the obstacle or travels in a spiral manner in a region in front of the obstacle.

Abstract: In a scrubber adapted to clean a semiconductor wafer, the torque of a brush rotation motor is monitored while a scrubber brush is in contact with the wafer and is being rotated by the motor. The position of the brush relative to the wafer may be adjusted based on the monitored torque to regulate the pressure applied to the wafer by the brush. Open loop positioning or closed loop control may be employed.

Abstract: A digital servo control unit which uses a D/A converter, which suppresses the spike-like pulsation superimposed on a current error signal inside a current control circuit, and which has control performance not lower than that in the background art even when a low-voltage and low-price power supply circuit is used. A first-order low pass filter acts on an analog signal output by the D/A converter, and a stabilizing compensation occurs for a phase delay caused by the first-order low pass filter. The first-order low pass filter is formed as a low pass filter having a cut-off frequency which is lower than a sampling frequency. The first-order low pass filter may be replaced by a notch filter having a cut-off frequency which is equal to a sampling frequency or which is equal to an integer multiple of a Nyquist frequency.

Abstract: The present invention disclose a device for electrode positioning. The electrodes are preferably positioned in the XYZ planes for collecting and recording the signals of the cell activity. This activity is afterwards amplified, filtered, sorted and acquired into an acquisition system like a computer memory. The electrode positioning device according to the present invention enable any configuration of electrode positioning. The device is comprised of: a base which is mounted onto the head directly or indirectly using a remote adapter, movable terminal holders which are mounted on said base directly or indirectly, extend guides which are mounted on said movable terminal holders and movable electrode holders which are mounted on said extended guides. The electrodes are actuated by suitable actuating means. The terminals may be connected to the terminal holder by a ball joint or a hinge.

Abstract: A method for optically detecting the position of a moveable test object (10), especially a mirror or reflector, in which a measuring beam (6) produced by a light source (2) is reflected by the test object (10 and reaches a position-sensitive light detector (12) which carrier out a conversion into information corresponding to the position of the test object (10). The invention enables the position of mirrors, especially rotating mirrors, to be quickly measured optically using a simple optical construction. The measuring beam (6) is focused onto the light detector (12) by an optical system (8). A signal corresponding to the geometric center or the maximum (I0) of the intensity distribution of the focused measuring spot is determined based on the measured values obtained by the light detector (12).

Abstract: A method of increasing control precision of a path of a product in a leveling machine including: a fixed support cage; two leveling assemblies with parallel rollers, which are placed above and below the strip respectively; devices necessary to adjust the interlocking of the rollers; a mechanism for measuring leveling forces at least of two sides of the machine; and a theoretical pre-setting model. The method directly measures at least one value for the spacing of the leveling rollers, which is compared to reference values, and uses the members for adjusting the position of the leveling rollers to maintain the measured values equal to the reference values. The method is particularly suitable for machines used to level flat metal products.

Abstract: A twisted wire actuator, whereby the shortening of the length of a wire or a bundle of wires, as it is twisted, is used to control the motion of an actuated element, achieving sub-micron motion resolution. The control can be performed robotically. The high resolution can be achieved without the use of gears, sliders, or high precision lead screws, thus enabling a simplified actuation system and eliminating sources of friction. The use of wires operating in opposing directions and having oppositely directed rotations significantly reduces the non-linearity effect inherent in twisted wire actuation, resulting in a system having a good level of motion linearity as a function of control input impulse. The use of multiple twisted wires attached to the actuated element at different angles, enables the implementation of robotic systems with multiple degrees of freedom. Several experimental actuators verify these results.

Abstract: A method and a device are provided for estimating at least one component placement position on a substrate at which a component is to be placed. The component placement position is estimated on the basis of the position of at least one mark on the substrate. The statistical measurement inaccuracies of the marks are determined. Subsequently, the positional accuracy of the component placement position on the substrate is estimated on the basis of the measurement inaccuracies of the marks. Subsequently, the estimated positional accuracy of the component placement position is compared with a desired positional accuracy. Subsequently, a determination is made regarding whether the component is to be placed on the substrate with the estimated positional accuracy of the component placement position.

Abstract: A method and an apparatus for transferring a substantially flat and substantially circular objects, such as wafers, from a pick-up position to a delivery position, the apparatus comprising, a manipulator, at least one source for emitting a source signal, at least one sensor for sensing said source signal and for providing a sensor signal, a computing device arranged for processing at least one sensor signal to obtain data on the position of said object, the manipulator being arranged for simultaneously transferring a first and a second object along a path in a substantially parallel orientation, spaced apart from each other, and substantially co-axially whereby the central axis of each object may be displaced radially, a said source and a said sensor are connected by a virtual line, whereby the virtual line includes an angle with the central axes of the first and second objects.

Abstract: A wireless substrate-like sensor is provided to facilitate alignment and calibration of semiconductor processing systems. The wireless substrate-like sensor includes an optical image acquisition system that acquires one or more images of targets placed within the semiconductor processing system. Analysis of images of the targets obtained by the wireless substrate-like sensor provides position and/or orientation information in at least three degrees of freedom. An additional target is affixed to a known location within the semiconductor processing system such that imaging the reference position with the wireless substrate-like sensor allows the measurement and compensation for pick-up errors.

Abstract: There is described a method and a device for positioning an element of a machine. A setpoint position variable is generated, said setpoint position variable is reduced by means of a limiting variable and a modified setpoint position variable which is forwarded as a setpoint variable to a controller for positioning the element is formed in this manner. An expected setpoint position variable is determined from the modified setpoint position variable, the braking distance of the element is determined from the expected setpoint position variable, and a braking process of the element is initiated if the braking distance matches a target position which is reduced by the expected setpoint position variable. An element of a machine can so be positioned with accuracy.

Abstract: A system for communicating with a motion controller, comprising a set of primitive motion commands and non-primitive motion commands, a set of motion operations, a reprogrammable motion controller capable of executing at least one motion command, a set of selectable software modules, and a software system. Functionality of the non-primitive motion commands can be emulated by a combination of primitive motion commands. Functionality of the primitive motion commands cannot be emulated by a combination of primitive motion commands. At least one motion operation is associated with at least one motion command. At least one software module is associated with at least one motion controller, and at least two selectable software modules expose a common software interface. The software system is capable of commanding at least one motion controller to perform at least one motion operation using the common software interface exposed by at least one selected software module associated with at least one motion controller.

Abstract: A system for motion control in which an application is developed that is independent from the actual motion control hardware used to implement the system. The system comprises a software system that employs an application programming interface comprising component functions and a service provider interface comprising driver functions. A system programmer writes an application that calls the component functions. Code associated with the component functions relates these functions to the driver functions. A hardware designer writes driver code that implements the driver functions on a given motion control hardware product. The driver functions are separated into core and extended driver functions. All software drivers implement the core driver functions, while the software drivers need not contain code for implementing the extended driver functions.

Abstract: A robot control apparatus capable of largely reducing a calculation amount to be capable of lowering a load of a CPU is provided.

Abstract: An alignment mechanism to align a microelectronic device to a socket, the device including an array of contact pads thereon. The mechanism includes a socket system having a socket and a device positioning mechanism disposed adjacent the socket and adapted to position the device in the socket. The mechanism also includes a control system adapted to receive alignment data on a position of the array of contact pads relative to two reference sides of the device, the control system further being adapted to control the device positioning mechanism as a function of alignment data to align the device in the socket.

Abstract: In a searching step, a laser beam by a laser beam projector is projected toward an object to be detected, which is previously disposed at a delivery position, while moving a holding member which is positioned apart from the object to be detected. In a delivery position data acquiring step, delivery position data is acquired by obtaining member position data provided by a member position data detecting unit when a laser beam reflected by the object to be detected is received by a laser beam receiver and calculating the delivery position data based on the member position data obtained by the member position data detecting unit.

Abstract: A limited rotation motor optical scanning system is disclosed that includes a limited rotation motor scanner, a digital controller servo system, a position feedback unit, a wide angle compensation unit, a digital processor, and an adjustment unit. The limited rotation motor scanner element is adapted for directing an energy beam to at least one location within a field of view. The digital controlled servo system is adapted for controlling motion of the limited rotation motor scanner element in accordance with a servo command waveform. The position feedback unit is for providing a position feedback signal indicative of a rotational position of the limited rotation motor scanner element. The wide angle compensation unit is for receiving the position feedback signal and for providing a boost signal that is representative of a boost factor that compensates for torque constant variation with the rotational position of said limited rotation motor scanner element.

Abstract: A system and process uses pheromone propagation to provide direction and/or distance information to a remote destination through the use of localized decision making processes. Locally available information is exchanged and translated with global information through the use of a pheromone vocabulary and multi-layer grid systems. Self-organizing networks of sensors provide remote monitoring of a space.

Abstract: A method for irrigating an irrigation region (30) with an irrigation unit (20) includes the steps of subdividing the irrigation region (30) into a plurality of subregions (34), establishing a sequence for irrigating the subregions (34) based on irrigation requirements for the irrigation region (30), and directing a fluid (19) to one or more of the subregions (30) using the irrigation unit (20) based on the sequence. The irrigation regions (30) can be rectangular, square, or hexagonal, and can each have non-overlapping rectangular, square or triangular, similarly-sized subregions (34). The irrigation requirements can include the color of the subregions (34), the elevation of one subregion (34) relative to another subregion (34) and/or other physical conditions. The sequence can be established entirely within a housing (200) of the irrigation unit (20).

Abstract: An earthquake disaster prevention system having: an estimation section to estimate a size of an earthquake from a P-wave of the earthquake detected by the earthquake detector; a stopping control section to control to stop the motion of the operation device when the size of the earthquake estimated by the estimation section exceeds a stopping reference value; a calculation section to calculate at any time the size of the earthquake from the S-wave of the earthquake detected by the earthquake detector; a convergence judgment section to judge convergence of the earthquake by judging whether a predetermined earthquake convergence condition is satisfied from the size of the earthquake calculated by the calculation section; and a resumption control section to resume a predetermined motion of the operation device stopped by the stopping control section when the earthquake is judged to have converged by the convergence judgment section.

Abstract: A position control device of a moving body, by which position control device a moving body can be driven in a translational manner with high precision where the moving body is not rotated in a yawing direction even if disturbance is input, a stage device using the position control device, and a position control method of a moving body, is provided.

Abstract: A drive device for a load (18a) comprises a device for detecting accidental collisions with a motor (14a), a first, respectively a second position sensor (15a, 16a) disposed upstream, respectively downstream of a transmission assembly (12a) providing first and second values of position. A calculation unit (20) makes it possible to calculate an error signal (d) corresponding to the difference of these position values. Ways to discriminate are devised so as to analyze the successive error signals as a function of the path (xR) traversed by the load in a spatial reference frame (xR, d). Filters with rectangular spatial window or with exponential spatial window are particularly adapted for discriminating between errors due to an accidental collision and those due to other causes attributable to normal operation. One thus obtains particularly reliable and sensitive collision detection with a very low detection threshold.

Abstract: This method of adjusting the operating parameters of a robot to move an effector tool along a given path in an optimum cycle time comprises a step (140) of modifying the operating parameter values to cause the cycle time to approach its optimum value. During this step, the values of the operating parameters are modified so as to approach an extremum of a compromise function, the compromise function comprising at least first and second terms, the first term being a function of the cycle time and the second term being a function of the temperature and/or the degree of wear.

Abstract: A complete Direct Digital Numerical Control (DDNC) automation system for a practical measurement system for a manufacturing process where a given slide or ram is moved under power by input of GO-TO location commands to cause a cascade of motion events to an approximate position, then relax, as a low-cost precision lock system completes the power move into exact absolute final position. This low-cost system uses simple switches & drive systems to operate without computer micro-processor (CNC) or program-logic-controllers (PLC), yet provide accurate final positioning. Position commands are simple real number digits meaningful to the Operator in work-station terms. Add-on Digital Readout Displays (DRO) are optional, as is remote input by other digital programs to augment the simple manual control panel GO-TO commands. This system is engineered for small shops in rural communities; for affordable automation of tiny devices; machines; & even provide numerical control (DDNC) for monster-machines.

Abstract: An on-screen calibration system for disc drives and the operating method thereof. The calibration system includes an autocollimator detecting the inclined angle of the stage of a disc drive. A control module is connected to the on-screen display module and a bar code scanner to receive the bar code of the pick-up module and compute a predetermined position data. A monitor displays a moving point according to the inclined angle and a target point according to the predetermined position data through an on-screen display module. The tilt-adjusting mechanism supporting the pick-up module is adjusted to shift the moving point overlapping the target point.

Abstract: A detector for detecting the presence of a memory tag, the detector comprising a radio frequency source operable to generate a radio frequency signal and a detector resonant circuit part connected to the radio frequency source, the detector resonant circuit comprising an antenna, the detector further comprising a power monitor responsive to the power of a reflected signal returned from the detector resonant circuit part, the power monitor being operable to generate an output in response to the power of the reflected signal, wherein a decrease in the power of the reflected signal indicates the presence of a tag in the vicinity of the antenna.

Abstract: A method for controlling an air cylinder such that air is supplied to and exhausted from pressure chambers of the air cylinder by air servo valves. Pressures in the pressure chambers are detected by pressure sensors, signals of the detected pressures are feedback to a controller, and the degrees of opening of the air servo valves are adjusted by corresponding PID adjusters of the controller on the basis of the respective differences between instruction values and detection values. The displacement of the rod of the air cylinder is detected by a displacement sensor, and a detection signal of the displacement is fed back to the controller so that a gain of the PID adjuster is always changed in accordance with the detection signal of the displacement.

Abstract: A method, or corresponding apparatus, for controlling deformation of a structure, in part, includes applying a command signal at a first signal level to at least one actuator mechanically coupled to a structure, the first signal level known to produce an energy level in the actuator(s) substantially the same as an energy level currently stored by the actuator(s). The method enables the actuator(s) to respond to the command signal by applying an electrical reference to the actuator(s). The method drives the command signal from the first signal level to a second signal level, changing the actuator(s) in at least one dimension as a function of the command signal, which results in a corresponding deformation of the structure. The method electrically disables the actuator(s) by removing the electrical reference, which results in maintaining deformation of the structure defined by energy stored by the actuator(s).

Abstract: An improved servo system for galvanometers, scanners and similar devices which uses digital processing to increase the dynamic range and provide greater effective resolution. The system provides digital control of a reference point that directly influences the excitation, which in turn directly influences the gain of the circuit. A high and low resolution switching path is provided to optimize dynamic range. Wide angle torque compensation improves uniformity of response at large angular deflections from zero. Improved thermal protection allows safe operation near system thermal limits. A graphical user interface allows adjustments and changes response on the fly for tuning due to input conditions or user control.

Abstract: This invention provides an output service provision system which is capable of allowing a user to easily receive a provided output service, providing an output service responsive to the user and flexibly coping with situational variations. Upon determining that a virtual object B is in an area-in state with respect to a virtual object A, a virtual object management device can transmit an area-in notification to a projector. Upon receiving the area-in notification, the projector can transmit a projector display data transmission request to a portable terminal and receive projector display data transmitted in response to the transmission request. The projector can then execute a projection process by a projection device on the basis of the received projector display data. The portable terminal can transmit the projector display data to the projector in response to the projector display data transmission request.

Abstract: In a movable barrier operator, data that corresponds to force requirements to effect desired movement of a movable barrier is compressed and stored for later retrieval. Multiple compression schemes and/or compression rates can be made available. Selection of a given scheme or rate can be determined on a user-directed or an automatic basis. Automatic selection in turn can be based on various criteria including, for example, presently available memory resources.

Abstract: A monitor with an adjustable angle and operating method thereof. The monitor includes a rotation component to control display angle, an OSD (On Screen Display) module, a microprocessor and a motor. The OSD module provides an interface from which a target angle can be selected, and the OSD module transmits a first control signal corresponding to the target angle to the microprocessor. The microprocessor transmits a second control signal corresponding to the first control signal to the motor. The motor drives the rotation component to automatically adjust angle of the monitor to the target angle according to the second control signal.

Abstract: A control software system for generating and distributing motion media for operating a target motion device. The control software system generates the motion media based on a motion program generated at a content server. The control software system distributes the motion media to a client browser associated with the target motion device.

Abstract: A motion event system for transmitting events between a motion program and a motion device. The motion event system comprises a driver component, a motion component, and a motion event component. The driver component is associated with the motion device. The motion component allows communication between the motion program and the at least one driver component. The motion event component configures at least one of the driver component and the motion component to recognize events to be transmitted between the motion program and the motion device.

Abstract: A system and method for designing a tooling assembly automatically validates and maintains relationships between components in view of predefined requirements, preferences, and best design practices. The process is performed as part of a program performed by a computer system. A database containing information relevant to the design of the tooling assembly such as design standards, customer requirements and other desired attributes of the completed tooling assembly is used to define a set of requirements for each component. The specific part configuration for each component is then stored in a Master Control File for validation with respect to other components within the tooling assembly to maintain interrelationships between each component within the tooling assembly.