Abstract: A method and a system that enable the inspection of large envelopes and complex surfaces. This is accomplished by generating a rotation and translation transform which enables the process monitoring system to define the location of the product placed in a field of view of the process monitoring system, applying the transform to three dimensional CAD data defining the process being performed with respect to the product to provide transformed CAD data representative of three dimensional information in a two dimensional pattern of the process with respect to the process monitoring system, providing placement guidance signals at predetermined locations in relation to a region of the three dimensional product, and providing an inspection data gathering device having a handheld component and providing the predetermined locations.

Abstract: A motion control system and method for configuring a motion controller drive. The system may comprise a motion controller coupled through a digital communication link to the motion controller drive. The motion controller drive includes a reconfigurable portion that is configurable with, for example, different communication protocols for communication with different motion controllers.

Abstract: A control system for a bulk material baler embodied in a machine readable data structure and including an instruction to a moveable guide track to move from a removed position to a closed position to create a guide track loop around a volume of bulk material to be baled while that bulk material is under compression and also including in instruction to a bale strap feed drive to feed a pre-determined length of strapping around the guide track loop, and including an instruction to a cutter to cut the end of the bale strap and including an instruction to a strap fastener to fasten together the ends of the bale strap and including an instruction to remove the moveable guide track section from around the bale and an instruction to release compression and an instruction to eject a bound bale.

Abstract: A precision positioning device comprises a hydraulic cylinder extending along the vertical direction and a piston member accommodated in the cylinder. The inside of the cylinder is divided into two chambers by a piston head of the piston member. A hydraulic circuit supplies a fluid at a constant pressure to one of the two chambers and supplies the fluid at a controlled flow rate to the other of the chambers via a servo valve. A control system performs position control with respect to the piston member by controlling the servo valve based on a detection signal from the position sensor, a position command value, a velocity command value, and an acceleration command value. The control system also performs force control with respect to the piston member by controlling the servo valve using detection signals from the first and second pressure sensors and a load command value.

Abstract: A performance test system includes a measuring device to measure an object device, and a computing device having a controller to test performance of the object device based on measured data transmitted from the measuring device, wherein the controller controls to display a report setup window through which data to be reflected in a measurement report is inputted, a coordinate-system setup window through which a coordinate system is set up based on the object device, and a measuring option setup window through which options for measuring the performance of the object device are set up, controls operation of the measuring device and the object device based on the options set up through the measuring option setup window, and tests the performance of the object device based on the measured data transmitted from the measuring device according to the operation of the object device and the measuring device, and controls to display a report window to process and to output report data inputted through the report setup

Abstract: A method of generating control commands to be executed by a motion control system under control of a plurality of system users to move an object in a desired manner. At least one restricted program element associated with the motion control system is identified. An application program used by the system users when controlling the motion control system is provided. The application program employs the at least one restricted program element. A plurality of access levels are determined. Each restricted program element is associated with one of the access levels. Each of the plurality of system users is associated with one of the access levels. Motion control commands are generated based on the application program, the access level of each system user, and the access level of each restricted program element.

Abstract: A method for the synchronous control of several manipulators, such as several industrial robots, is characterized in that control units of specific manipulators exchange control information according to the data structures contained in a corresponding control program, through which control units to be synchronized and synchronization points in the control programs taking place there can be clearly identified, and in that on reaching and synchronization points the program sequence in the control units to be synchronized is continued according to the contents of the data structures in conjunction with the already exchanged control information or stopped until corresponding information arrives from other control units to be synchronized.

Abstract: A motion control system comprising a source application program, a target device, a parser, an emitter, a program engine, and a parser interface. The source application program is defined by a source language specification. The target device creates motion under control of application programs defined by a target language specification. The parser component contains logic for converting application programs defined by the source language specification into a generic format. An emitter component containing logic for converting application programs in the generic format into application programs defined by the target language specification. The program engine component directs the parser component to convert the source application program into a generic application program. The program engine component further directs the emitter component to convert the generic application program into a target application program defined by the target language specification.

Abstract: A motion system comprising a motion enabled device, an event source, a plurality of message transceivers, and a motion services system. The motion enabled device performs motion operations based on motion commands. The event source generates motion messages upon the occurrence of events, where the motion messages correspond to motion operations. The motion messages are transmitted among the plurality of message transceivers. The motion services system maps motion messages transmitted between the plurality of message transceivers to motion commands based on motion operations corresponding to mapped motion messages. The motion services system performs motion operations based on motion commands corresponding to mapped motion messages.

Abstract: A multiplexer (MUX) driver system controls a deformable mirror, in part, by enabling and disabling individual or multiple actuators, mechanically coupled to the deformable mirror, through use of switches (e.g., solid-state switches) electrically coupled between the actuators and a reference node. In operation, the driver system enables actuator(s) by closing respective switch(es) and driving the enabled actuator(s) to deform respective portions of the deformable mirror in a controlled manner. The driver system disables the actuator(s) by opening the respective switch(es) to decouple the actuator(s) from the reference node. The switches, in the open state, prevent respective actuators from discharging, thereby allowing a desired surface figure of the deformable mirror to be maintained for long periods of time without having to refresh the actuators.

Abstract: The invention relates to a computer-based method and system to facilitate quality control for manufactured assemblies based on computer aided design (CAD) files. The instant invention mitigates the problems encountered with large CAD files by decomposing each of such files into a multi-file format. A large CAD file is thereby broken-down into smaller files that organize the information contained in the larger file. The organization is performed in such a way that the information pertinent to the measurement process is segregated into a different smaller file than the information not needed to calculate measurements. Thus, the computer running the computation accesses a smaller file containing a higher percentage of required information. Additionally, assisting the user in coordinating a match-up between the physical surfaces being measured and the proper associated CAD model version of that surface further increases the handling speed.

Abstract: A Process and device for displacing a moveable unit on a base. The process includes: a) a force (F) is determined which, applied to the moveable unit (4), produces a combined effect, on the one hand, on the moveable unit (4) so that it exactly carries out the envisaged displacement on the base (2), especially as regards the prescribed duration and prescribed distance of the displacement, and, on the other hand, on the elements (MA1, MA2, MA3, 4) brought into motion by this displacement so that all these elements are immobile at the end of said displacement of the moveable unit (4); and b) the force (F) thus determined is applied to the moveable unit (4).

Abstract: The present invention discloses a method, system and apparatus for use in a roll grinding machine. Data is read from an RFID tag automatically by providing an RF read/write sensor on a movable cylinder rod. The RF sensor is held away from the work roll area while the work roll is loaded or removed. When the work roll is placed in the position for grinding, a signal to rotate the roll is sent to the grinding machine, and also operates to advance the cylinder rod. An RFID tag embedded in the work roll and containing identification and other data related to the work roll, is read by a read/write sensor, and the data is then transferred from the sensor to a serial control interface, which converts the data and transmits the information to the grinding machine control desk and the computer control management data base.

Abstract: A positioning system including a sensor, a drive sequencer and an actuator. The sensor senses the actuator position and provides position signals to drive the sequencer which responsively computes and drives the actuator in open loop moves containing dwell intervals of position. The actuator positions a mirror or other load means to reflect an optical beam as desired. Either preprogrammed or non-repeating sequences of actuator stopping positions can be synchronized with a laser. During dwell times, mirror position accuracy better than 10 microradians is suitable for tuning CO2 pulse burst or CW lasers.

Abstract: A system and method 100 of using residual feedback in a control loop in a manner that substantially eliminates the steady state error in the predicted states that results from the mismatch in gain between the plant and the model. The control effort used by the estimator to predict the next position is modified to compensate for this difference in gain. By integrating the residual, and modifying the apparent control effort accordingly, the residual is driven to have a mean value of zero. When the residual goes to zero, by definition, the steady state error in the position state goes to zero; and to the extent that the model matches the plant, the velocity state also approaches zero such that the steady state error in the predicted states are substantially eliminated, allowing for improved control.

Abstract: This invention provides an output service provision system which is capable of allowing a user to easily receive a provided output service, providing an output service responsive to the user and flexibly coping with situational variations. Upon determining that a virtual object B is in an area-in state with respect to a virtual object A, a virtual object management device can transmits an area-in notification to a projector. Upon receiving the area-in notification, the projector can transmits a projector display data transmission request to a portable terminal and receives projector display data transmitted in response to the transmission request. The projector can then executes a projection process by a projection device on the basis of the received projector display data. The portable terminal can transmits the projector display data to the projector in response to the projector display data transmission request.

Abstract: A positioning system is disclosed. The positioning system includes a movable stage. The positioning system also includes a cable carrier movable relative to the stage. The cable carrier is configured for carrying a cable so as to prevent cable drag forces from acting on the stage.

Abstract: A control system (102) operates within a dynamic range, and a follow-up system (104) is commanded to reduce a positional error between the follow-up system and the control system when the dynamic range is exceeded. A linear follow-up command may be initially provided once a dead band value (208) is exceeded. The follow-up system (104) is driven relative to its base mount (103) in a direction to reduce the positional error to within a null value range (214). The follow-up command may also implement a decay function to control the follow-up system (104). A control variable transfer function may also be utilized to gradually subtract the dead band value from the follow-up system position error command as a function of time. The decaying function may include linear as well as non-linear decaying functions. In one embodiment, a figure eight-type hysteresis control function may be implemented to control the inertial position of an inertial element.

Abstract: An acceleration and deceleration control in which, for a relation between speed and acceleration, the low speed part need not be symmetrical with the high speed part, is performed such that an actual acceleration curve may lie along a restricted acceleration curve as much as possible. A curve representing actual acceleration-speed, corresponding to time-speed transition to be planned, approaches a restricted acceleration curve. When supplying a movement command which has been subjected to acceleration and deceleration processing to a servo control section, acceleration in the acceleration and deceleration processing is determined such that a speed-acceleration curve of the movement command which has been subjected to acceleration and deceleration processing may lie along predetermined speed-acceleration curve. The speed-acceleration curve is set for each axis and dependent on acceleration or deceleration, using parameters.

Abstract: In a method for operating machines (138) with a plurality of shafts (102, 110, 111), in which the shafts (102, 110, 111) are each driven, synchronized with one another, by individual drive mechanisms (103) belonging to them, in accordance with an electronic, chronological guide shaft function, which corresponds to an instantaneous position of a guide shaft L, and the motions of a plurality of derived shafts (102, 110, 111) are derived from the guide shaft L in accordance with conversion functions that correspond to respective predetermined mechanical conversions (106, 107, 108, 109) with respect to the guide shaft L, it is proposed, in order to improve the method in such a way that—particularly when there is a large number of shafts to be regulated—simple startup at comparatively little expense for equipment is permitted, that all the shafts (102) of at least one group (117) of shafts, which correspond to one another in terms of the conversion (106, 107, 108, 109), obey an electronic, chronological following

Abstract: A position transducer is connected to merely one input circuit. The outputs of the input circuit are connected, transmitted or routed, in part, to a first and to a second counter circuit. For the counting process, the first counter circuit uses the digital signals of the input circuit, while the second counter circuit generates digital signals from the analog signals and uses them for the counting process. It is, thus, possible, in spite of a not fully two-channel processing of the signals of a position transducer, to set up a reliable position monitoring using only one position transducer.

Abstract: A distributed control system having system components (1, 2, 3). The positions of the system components (1, 2, 3) are stored in respective memories (11, 12, 13) as component-specific data, which represent the spatial coordinates of the positions. The system components (1, 2, 3) transmit their respective positions to a configuration unit (4) via a communications channel (5). By means of a layout plan, e.g., in the form of a piping and installation diagram, the component-specific data of the individual system components (1, 2, 3) is assigned to the configured system components. In addition, a respective physical address is assigned to each of the system components (1, 2, 3). This achieves simple and reliable configuration of the system components (1, 2, 3). The distributed control system is used, in particular, in process apparatuses.

Abstract: A determining method of movement sequence and a positioning apparatus of the invention are arranged in such a manner that, in order to measure positions of plural marks as being measurement targets provided on a wafer within a shorter time, a group including executable movement sequences is generated out of a group of movement sequence candidates, each indicating a measurement order of these marks, and a movement sequence that accomplishes a movement operation between the marks within the shortest time is obtained from the group thus generated. For efficiently searching an optical system as a globally optimal solution within a shorter computation time, independently of an initial solution given, a designing method of optical system of the invention obtains the optimal solution of the optical system to be designed, using an evolutionary computation method (genetic algorithm) having a genetic operator for handling continues values explicitly.

Abstract: A method for manufacturing a product having locally specific properties, the geometric form of which is described by a collection of polygonal basic figures in particular in STL (structural triangulation language), comprises the following steps: selecting the above basic figures a face part composed of coherent basic figures, adding to that face part at least one specific property, which during the manufacture of the product is to be given to the part thereof that comprises the above face part, optionally repeating the above process steps for other face parts to be selected, and manufacturing the product on the basis of the then obtained model information by means of a technique adding material in layers or in a die molding process, which includes giving the associated specific property during the building up in layers of at least the part of the product that comprises the above face part or during the injection molding.

Abstract: A device (22, 24) for actuating a seat element comprises an actuator (26, 28) equipped with a transducer designed to supply a crude measurement value representing the current position of the actuator. The actuator provides for calculation of a corrected value of the current position of the actuator, from each crude measurement value supplied by the transducer, and calculation of a refining correction function. The device also provides for processing the corrected value of the current position of the actuator.

Abstract: At least one exemplary embodiment comprises a system comprising an arithmetic logic unit; a memory comprising a pre-computed table of target pulse widths, changes in pulse width, and pulse counts distributed according to a constrained semi-logarithmic distribution, the memory connected to the arithmetic logic unit via a pipeline mechanism; and a state machine adapted to load each of the target pulse widths and changes in pulse width from the memory into the arithmetic logic unit at pre-determined intervals of pulse count while maintaining control of a pulse width generated by the arithmetic logic unit.

Abstract: A security system for controlling access to motion control systems. The security system limits access to application programming interface (API) functions. The limitations on API functions can be implemented as a denial of access to certain restricted functions and/or as a limitation on certain controlled parameters employed by certain restricted functions. The security system may allow or disallow access based on users or accounts. The security system may also be programmed to prevent access to certain functions arbitrarily as determined by a system administrator or on criteria such as the status of the system.

Abstract: Method and device for controlling the angular speed of an electromechanical drive train with little damping. The control of the speed of the load driven in rotation by an electromechanical drive train with little damping, possibly having transmission nonlinearities such as play, without measuring said speed, is accomplished by using an observer in conjunction with a robust CRONE-type non-integer order controller, the physical realization of which is achieved by an integer order controller obtained by approximation in the frequency domain. The device thus provides good damping for the system in the presence of resonance frequencies and excellent robustness, while still allowing a relatively simple adjustment.

Abstract: A light curtain safety system for a semiconductor device handler that includes a programmable control unit and a robot mechanism that is selectively operated in response to signals generated by the control unit. The light curtain safety system includes an apparatus for generating a light curtain such that accessing the robot mechanism requires breaking the light curtain. The light curtain safety system detects an operating state of the semiconductor device handler using signals generated in the control unit, and allows de-activation of the light curtain apparatus only when operating state of the semiconductor device handler is in a predetermined “safe” operating state. When the light curtain apparatus is active and the light curtain is broken, the light curtain safety system causes the semiconductor device handler to terminate power flow to the robot mechanism.

Abstract: A computer assisted method is disclosed for making an optimized layout of a manufacturing cell to be used, for example, to locate, hold and process workpieces, such as in robotic welding of an assembly of stamped sheet metal parts. The items to be processed and employed in the cell are identified by physical structure and kinematic characteristics and given an initial location to start the process. Further movements of the parts toward attraction points and away from repelling points are evaluated on the computer by an optimization program to arrive at an optimized cell layout.

Abstract: A method and apparatus is disclosed for providing a motion signal to a motion platform comprising a plurality of actuators. The apparatus comprises a formatting unit receiving a motion signal indication of a motion to perform on the motion platform and formatting the motion signal and a synchronized unit receiving the formatted signal and providing a synchronized and formatted motion signal to the motion platform.

Abstract: A method for the incremental position determination of two objects, which are movable in relation to each other. The method including generating at least one pair of position-dependent incremental scanning signals during a position determination between two objects, which have a defined phase offset from each other. Passing the at least one pair of position-dependent incremental scanning signals on to a transformation table in which one or several output signal values with respect to each pair of the at least one pair of position-dependent incremental scanning signals have been stored. Transferring the one or several output signals from the transformation table to an evaluation unit wherein position determination between the two objects is performed. Dynamically updating the transformation table during the position determination between the two objects.

Abstract: A computerized numerical control system is provided for controlling a servomechanism under the direction of a general-purpose computer system. The system implements in software a PID controller for determining appropriate inputs to the servomechanism. The system further includes a Field Programmable Gate Array which is loadable with custom logic for remotely interfacing to the servomechanism.

Abstract: Inductive position detector (10) is described which includes scale (20) having a longitudinal axis containing a train of magnetic balls (22), and a transducer (30) moveable relative to the scale (20). The transducer (30) includes means to induce a magnetic field in the scale (20). Magnetic markers (23) are provided at axially spaced locations along the scale (20). As the transducer (30) is moved along the scale (20), the pattern of magnetic markers (23) detected enables the position of the transducer to be determined.

Abstract: High precision position control apparatus. An object supported on a frame of reference is moved by an actuator. A position sensor generates a position signal and an acceleration sensor affixed to the frame of reference generates an acceleration signal. A control system responds to the position signal and the acceleration signal to control the actuator to move the object to follow a commanded trajectory with reduced following error.

Abstract: A robot flexure correction device and method in which flexure amount correction can be automatically performed on taught points. For each robot model and for each of loads that are different in weight and center-of-gravity position, flexure amounts representing deviations of a robot front end are measured at a plurality of positions in a robot operating area, and stored as flexure amount data. When a robot is used, flexure amount data about the model of the used robot and about the load that is close in weight and center-of-gravity position to a used tool is designated from flexure amount data 1-1 to 1-m with a designation means. A program is designated from programs 2-1 to 2-n with an operation program designation means. With a flexure amount calculation means, a flexure amount for each of taught point positions/orientations in the program is calculated using the flexure amount data.

Abstract: The invention relates to a control method and a control device for the operation of rotationally or linearly driven axes with a position control. This involves determining the difference between the setpoint position value (LS) and actual position value (WI) caused by an additional movement component during the time period of the occurrence of at least one superposed movement by subtraction of one value from the other. Furthermore, it is possible to eliminate movement components which are known, periodic and can be mathematically determined as desired from all the required control data paths during the time period of the superposed movement.

Abstract: The invention relates to a method and a device, whereby a galvanometer actuator (7) that is connected to the element and a control unit are provided. Said unit generates a control signal for the actuator for adjusting the element according to a desired position time history that can be freely predetermined, whereby the control unit detects the control signal by means of the desired position time history and by considering a model (4) consisting of the unit of the actuator and the element. Said model is a time discrete state space model and is selected in such a way that said model can predict the position time history of the element for a time history of the control signal and with predetermined exactness, whereby said time history of the control signal can be freely predetermined. The predetermined desired position time history is verified by the control unit and by means of a preliminary filter and is modified with regard to the feasibility thereof if required.

Abstract: A method and apparatus for teaching a person how to perform a specific body motion in a consistent manner is based on electronically measuring one or more parameters of an actual body motion, comparing the one or more measured parameters with corresponding parameters of a target body motion, and providing a sensible feedback to the user based on a degree of correspondence between the one or more measured parameters and the corresponding target parameters. In a particular embodiment, the feedback is audible. More specifically the feedback is a musical tune that has a particular characteristic (such as rhythm) that is particularly suited to a particular body motion (such as a golf swing). The feedback may be in the form of electronically causing the musical tune to go off-key in proportion to a discrepancy between the actual body motion and the target body motion.

Abstract: A positioning system including a sensor, a drive sequencer and an actuator. The sensor senses the actuator position and provides position signals to drive the sequencer which responsively computes and drives the actuator in open loop moves containing dwell intervals of position. The actuator positions a mirror or other load means to reflect an optical beam as desired. Either preprogrammed or non-repeating sequences of actuator stopping positions can be synchronized with a laser. During dwell times, mirror position accuracy better than 10 microradians is suitable for tuning CO2 pulse burst or CW lasers.

Abstract: In a method for operating machines (138) with a plurality of shafts (102, 110, 111), in which the shafts (102, 110, 111) are each driven, synchronized with one another, by individual drive mechanisms (103) belonging to them, in accordance with an electronic, chronological guide shaft function, which corresponds to an instantaneous position of a guide shaft L, and the motions of a plurality of derived shafts (102, 110, 111) are derived from the guide shaft L in accordance with conversion functions that correspond to respective predetermined mechanical conversions (106, 107, 108, 109) with respect to the guide shaft L, it is proposed, in order to improve the method in such a way that—particularly when there is a large number of shafts to be regulated—simple startup at comparatively little expense for equipment is permitted, that all the shafts (102) of at least one group (117) of shafts, which correspond to one another in terms of the conversion (106, 107, 108, 109), obey an electronic, chronologica

Abstract: A single channel reformatter having a syringe that is movable along a z-axis by a z-positioner. A x-y positioner is capable of positioning any well of a source plate having a plurality of wells, and of positioning any well of a destination plate having a plurality of wells, beneath the syringe. Liquid from a well of the source plate is aspirated by the syringe and dispensed into one or more wells of the destination plate. Since the syringe does not move in the x-y plane, it is advantageously integrated into a wash system that cleanses it between liquid transfer operations. The drive element that actuates the syringe to aspirate and dispense during liquid transfer operations is advantageously used to drive the wash cycle. In a method according to present invention for controlling the reformatting operation, well-to-well links are specified, a preferred execution order for executing the specified links is determined, and the specified links are executed in the preferred order.

Abstract: The present invention relates to an automation system in which a functionality of at least two components from a programmable logic controller which can be regulated as required and/or from a drive controller which regulates rotation speed and/or position, and/or from a motion controller which regulates complex operations is integrated. The integrated controller constructed in this way can additionally have a single processor equipped with every functionality, further specific interfaces incorporation of engineering system and runtime system (RS) into the integrated controller, a web server functionality, a project data configuration using a single control action and an integrated, extensive data management unit (DM).

Abstract: The invention comprises a modem apparatus adapted to provide full messaging and communications interface between a control device and a communications medium such as a telephone line. The modern can comprise an interface adapted to communicate directly with a control system device, such as a programmable logic controller (PLC), using a communications protocol compatible with the normal network communications used in a distributed control system. The apparatus advantageously interfaces directly with unmodified control system devices, providing the ability to send and receive messages from remote devices or personnel via a communications medium. The invention also comprises a control system including a modem device providing full communications between a control device and remote personnel and/or devices.

Abstract: A positional control system wherein the position of the controlled object connected to a drive is controlled to a variable target or desired position. A period is determined which starts with a detection of a reversal in the direction of the feed of a positional command Pr as well as the detection of a stoppage of a table 104 as a controlled object and which ends with a detection of the re-start of the movement of the table 104. During the period, a correction amount for correcting a positional deviation E is issued.

Abstract: An identification environment determining method includes converting a captured image into digital information, detecting a face area of a person from the digital image to store the face area, and identifying the person using a stored image and face image information that is referred for identification, informing a user about a result of identification acquired, inputting information obtained by having the user judge whether the result of identification is correct or incorrect, determining whether a present lighting environment is suitable for identification, controlling a robot, and moving the robot.

Abstract: A system and method for estimating the position of an object in three dimensions uses two cameras interconnected with a machine vision search tool. The search tool is capable of registering transformation of a pattern in at least two translational degrees of freedom, along the image plane, and at least one non-translational degree of freedom along a camera axis perpendicular to the image plane. The tool can be a rotation/scale-invariant (RSIS) search tool. A nominal position for each camera's acquired image of the object is determined and a set of uncertainty vectors along each of the degrees of freedom is generated. The vectors are weighted, with the respective vectors along the camera axis being weighted more-highly than orthonormal vectors within the image plane. The weighted vectors are combined to define an error.

Abstract: A method is presented for path planning after changes in task space. In one embodiment, the method is applied to planning a path for a robot arm. The method identifies areas in the configuration space which are affected by the changes in task space. Cost waves can then be repropagated in these affected areas to allow for planning in N dimensions and using space variant metrics. The method is also adapted to use in the presence of phantom obstacles.

Abstract: A movement control system useful for an apparatus comprising a movable member movable between two positions, a motor and a sensor device for producing an output value which changes during the movement of the movable member. The control system drives the motor in a first amount so as to move the movable member from one of the two positions to the other position and thereafter drives the motor in a second amount to move the movable member toward said one position when the output value of the sensor device remains unchanged. When the sensor device produces a changed output value, the system drives the motor in a third amount to move the movable member toward said one position. Subsequently, the system drives the motor in a fourth amount when the output value of the sensor device is different from the output value before the motor is driven in the first amount, so as to move the movable member toward said other position.

Abstract: A positioning device and method can position a subject of positioning at a higher speed than conventional ones. A positioning device and method for moving a subject of positioning to a desired position, moves the subject of positioning at a desired speed and acceleration, and adjusts the acceleration/deceleration duration of the subject of positioning and the timing of starting the deceleration so as to cancel the residual vibration, in accordance with the vibration period of the residual vibration that occurs immediately after positioning the subject of positioning.